Displacement, Motion, Distance, Or Position Patents (Class 73/1.79)
  • Patent number: 6694797
    Abstract: Calibration and resolution-determining apparatus for dial indicators is disclosed. In this apparatus, a dial indicator to be tested is rigidly mounted in an upper frame member, with a plunger of the dial indicator bearing against a movable gage block having upper and lower parallel surfaces. A reference indicator of a higher accuracy than the dial indicator under test is mounted to the frame below the gage block, with a plunger thereof bearing against the lower surface thereof. The gage block is mounted to a distortable structure connected to the frame by living hinges so that distortion of the structure causes the gage block to move, causing corresponding movement of the respective plungers of the dial indicator and reference indicator. A readout of the reference indicator may then be compared to a reading on the dial indicator, allowing determination of accuracy and resolution of the instrument under test.
    Type: Grant
    Filed: May 10, 2001
    Date of Patent: February 24, 2004
    Inventor: Ilmar Luik
  • Publication number: 20040025563
    Abstract: The invention has disclosed a handheld device for contactless distance measurement, having a housing (11) with a housing front (15) pointing in the measuring direction (17) and a housing back (16) oriented away from it, having a linear first measuring stop (21) that is embodied on the housing back (16) oriented away from the measuring direction (17) and that lies in a reference plane for the distance measurement, and having means disposed on the housing back (16) for producing a flat second measuring stop (22) that is aligned at right angles to the measuring direction and points away from the measuring direction (17).
    Type: Application
    Filed: April 16, 2003
    Publication date: February 12, 2004
    Inventors: Joerg Stierle, Peter Wolf
  • Patent number: 6688155
    Abstract: In one aspect, a spin-rinse-dry chamber comprises an adjustable nozzle. A calibration element may be positioned in the spin-rinse-dry chamber at which the adjustable nozzle may be directed. Targets (for example cross-hairs in one embodiment) may be located on the calibration element at a position corresponding to where it is desired to direct a fluid flow from the adjustable nozzle. Another aspect provides a method of calibrating a spin-rinse-dry chamber having an adjustable nozzle comprising inserting a calibration element having a similar contour as a substrate into the spin-rinse-dry chamber. Fluid is then directed through the adjustable nozzle at a selected target position located on the surface of the calibration element.
    Type: Grant
    Filed: December 31, 2002
    Date of Patent: February 10, 2004
    Assignee: Applied Materials Inc.
    Inventors: Alexander Sou-Kang Ko, Duane DeMore
  • Patent number: 6681495
    Abstract: To provide a measuring apparatus of positions and postures of a machine for correcting positions and postures of an end effecter by means of an actuator, and an error correcting method for correcting errors thereof. At least three universal joint fixing members 2 are attached onto a base 1 that comprises a measuring reference; steel balls 3 are fixed to the respective universal joint fixing members 2 as universal joints; a steel ball 5 is fixed to a universal joint fixing member 9 as a universal joint; a universal joint fixing member 4 is attached to an object to be measured 7 that is supported by means of another member; and a measuring device 6 is attached to between the steel balls B3 and the steel ball 5. By using such a measuring apparatus, geometrical errors of a mechanism in a machine are estimated and corrected based on measured values on positions and postures of the end effecter.
    Type: Grant
    Filed: March 14, 2000
    Date of Patent: January 27, 2004
    Assignee: Okuma Corporation
    Inventors: Nashiki Masayuki, Matsushita Tetsuya, Watanabe Shigeharu, Nakagawa Masao
  • Publication number: 20040010386
    Abstract: A resolver output correction device receives sine output signal and cosine output signal from a resolver. Each of the sine output signal and the cosine output signal has an offset error and a gain differential error due to a secular variation. The correction device detects maximal and minimal values with respect to both the sine output signal and the cosine output signal. It calculates average values between the maximal values and the minimal values. Then, it corrects the offsets of the signals based on the average values. It also calculates gain differentials between the maximal value and the minimal value with respect to both the sine and cosine signals. Then, it corrects the gain differentials of the signals based on the calculated gain differentials. As a result, both the offset and gain errors of the signals are corrected with accuracy.
    Type: Application
    Filed: July 3, 2003
    Publication date: January 15, 2004
    Inventor: Hisashi Kameya
  • Publication number: 20040003647
    Abstract: [Subject]
    Type: Application
    Filed: June 25, 2003
    Publication date: January 8, 2004
    Inventors: Masayuki Nashiki, Tetsuya Matsushita, Watanabe Shigeharu, Nakagawa Masao, Shigeharu Watanabe, Masao Nakagawa
  • Publication number: 20030209051
    Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.
    Type: Application
    Filed: June 17, 2003
    Publication date: November 13, 2003
    Applicant: RENISHAW PLC
    Inventor: David R. McMurtry
  • Patent number: 6640607
    Abstract: A reference measuring machine previously calibrated and an object measuring machine to be calibrated are positioned in such a manner that a measurement space by the reference measuring machine is superimposed on a measurement space by the object measuring machine. First measurement values by the reference measuring machine and second measurement values by the object measuring machine are acquired each on plural points in the measurement spaces respectively by the reference measuring machine and the object measuring machine. The object measuring machine can be calibrated based on the first- and second measurement values.
    Type: Grant
    Filed: February 27, 2002
    Date of Patent: November 4, 2003
    Assignee: Mitutoyo Corporation
    Inventor: Makoto Abbe
  • Publication number: 20030197516
    Abstract: A slider assembly for use in a linear or rotary position sensor having a board that includes ink strips. The slider assembly includes a base element having a plunger for attachment to an object whose position is being detected. Finger elements extend from the base element, wherein the finger elements contact the ink strips and are biased against the ink strips. A spring device having first and second spring elements is also included, wherein the first and second spring elements contact portions of the board that do not include the ink strips. The contact portions are biased against the board to reduce relative motion between the finger elements and the ink strips.
    Type: Application
    Filed: September 20, 2002
    Publication date: October 23, 2003
    Inventors: Don Bird, Russell Miles Modien, Kenneth Peter Nydam
  • Patent number: 6634206
    Abstract: A method for synchronizing a plurality of pedal position sensors in a motor vehicle. A series of voltages are accumulated from each of a plurality of pedal position sensors. Representative voltages are determined from the series of voltages. The representative voltages are assigned to linear relationships from which an offset is determined.
    Type: Grant
    Filed: November 8, 2001
    Date of Patent: October 21, 2003
    Assignee: DaimlerChrysler Corporation
    Inventors: Weijia Cui, Gerald L Holbrook, Binqiu Xu, Gary K Lowe
  • Publication number: 20030182984
    Abstract: The present invention is directed to methods for supporting the production of microarrays of biological samples using a vacuum manifold and variable pin contact velocity. It relates to methods for preparing the microarrayer for production. The invention includes methods for calibrating a microarrayer print head with respect to a microarrayer components for rapid and safe movement, for testing the spotting accuracy of the microarrayer, for evaluating the efficiency of cleaning procedures for the microarrayer spotting members, and for conditioning spotting members for printing.
    Type: Application
    Filed: April 15, 2003
    Publication date: October 2, 2003
    Inventors: Neil A. Winegarden, James B. McNeil
  • Patent number: 6615503
    Abstract: A method for determining the axis of rotation (AR) of an object (12) mounted to a rotary stage or platform (10) in a gauge measurement system by estimating a transformation (&dgr;) between multiple views or measurements of the object (12) obtained at different poses.
    Type: Grant
    Filed: April 16, 2002
    Date of Patent: September 9, 2003
    Assignee: General Electric Company
    Inventors: Victor Nzomigni, Donald Wagner Hamilton, James Vradenburg Miller, Peter Henry Tu, Glen William Brooksby
  • Patent number: 6618505
    Abstract: A method and apparatus for determining a shape of a shim that can be inserted between a first body, such as a strut torque box, and a second body, such as a torque box skin, is disclosed. The strut torque box is marked with a plurality of retro-reflective markers at the desired locations needing to be shimmed. The positions of the markers are measured using digital photogrammetry equipment yielding a plurality of measured points. The measured points define a surface of the first body. The locations of the measured points are transformed relative to a surface of the second body to yield a profile of the shape of the shim. The present method and apparatus have the advantage of considerably reducing the labor required for manual shim measurement using gauges by allowing multiple shim points to be measured simultaneously and without the pre-assembly of the strut torque box and torque box skin.
    Type: Grant
    Filed: March 6, 2001
    Date of Patent: September 9, 2003
    Assignee: The Boeing Company
    Inventors: Glen P. Cork, Ronald G. Lane
  • Patent number: 6612173
    Abstract: An improved plunger for fluid dispensing cartridges used in automated dispensing systems. The plunger helps control the reflection of ultrasonic signals used to sense the position of the plunger as it moves within the cartridge tube. The plunger has a convex bottom, ink-facing surface and a top surface comprising one or more flat, horizontal surfaces. In the preferred embodiment, the horizontal surfaces are concentric steps.
    Type: Grant
    Filed: October 24, 2002
    Date of Patent: September 2, 2003
    Assignee: Sonoco Development, Inc.
    Inventors: Rebecca A. Lawson, James W. Lowry
  • Publication number: 20030160195
    Abstract: An exposure apparatus has a surface position detection apparatus for measuring the surface position of a measurement area on the surface of a wafer. The surface position detection apparatus scans a shot area on the wafer having a pattern structure and detects the surface position of a measuring point provided within the shot. Prior to detecting the surface position of the measuring points within the shot, drive parameters for the surface position detection apparatus are determined according to a scanning speed employed for the shot in order that a measurement area of the surface position detection apparatus for the measuring points assumes a preset size. The surface position detection apparatus is then driven according to the parameters so determined, measuring the surface position of the measuring point in the shot. The exposure process is then controlled in accordance with the results of those measurements.
    Type: Application
    Filed: February 25, 2003
    Publication date: August 28, 2003
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yuji Kosugi
  • Patent number: 6605940
    Abstract: A linear variable differential transformer (LVDT) assembly comprises a housing. A tube extends into the housing. An armature mounts inside of the tube and can move longitudinally within the tube. A coil assembly, which includes a primary coil and two secondary coils mounts on the outside of the tube. The coil assembly has adjustable connection with the housing. Consequently, the coil assembly can be adjusted longitudinally with respect to the armature until the LVDT is in the null position. That occurs when the differential voltage from alternating current through the secondary coils is zero.
    Type: Grant
    Filed: April 12, 2000
    Date of Patent: August 12, 2003
    Assignee: Kavlico Corporation
    Inventors: Sohail Tabrizi, Hedayatollah Shakibai, Leonard J. Marella
  • Patent number: 6601434
    Abstract: A calibration system and method for a multi-toolhead machine. A calibration device is installed onto the machine. When a first toolhead is calibrated with respect to the calibration device, based upon the change in position between the first toolhead and a predetermined reference on the calibration device, all of the remaining toolheads are automatically calibrated. The system is set up by calibrating each toolhead with respect to the calibration device and determining an offset between the calibrated position of each toolhead and the calibration of the first toolhead.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: August 5, 2003
    Assignee: Thermwood Corporation
    Inventor: Evan Schaefer
  • Publication number: 20030136191
    Abstract: To provide a movement-detecting altimeter designed so as to be capable of avoiding excessive accumulation of errors. The movement-detecting altimeter has a movement dependent altitude updating unit which updates an indicated altitude when a moving condition is maintained, and which avoids updating of the indicated altitude when the moving condition is not maintained.
    Type: Application
    Filed: November 18, 2002
    Publication date: July 24, 2003
    Inventor: Tomoharu Tsuji
  • Patent number: 6585061
    Abstract: A drilling tool has a bent sub or a defined “High Side”. An instrument housing which includes a magnetometer is secured to the directional drilling tool. The magnetometer measures the magnetic field vector in the plane perpendicular to the tool axis. Prior to running the directional drilling tool and the instrument housing into the well, a magnetic source is positioned next to the instrument housing at a position near the magnetometer. The magnetic source is made and positioned such that its magnetic field at the magnetometer points to the chalk line of the high side of a bent sub. The net magnetic field generated from the source is obtained by the difference in magnetic field measurements before and while the magnetic source is applied The azimuthal angle between the net magnetic field vector and the x-axis of the magnetometer or other direction sensor reference point used for tool face calculation is obtained by a computer.
    Type: Grant
    Filed: October 15, 2001
    Date of Patent: July 1, 2003
    Assignee: Precision Drilling Technology Services Group, Inc.
    Inventors: Paul E. Radzinski, Michael L. Larronde, Jian-Qun Wu
  • Patent number: 6568242
    Abstract: A coordinate measuring machine (CMM) carries a probe and is controlled by a controller to drive the probe to take measurements on a workpiece. In order to reduce the effects of acceleration-induced deflections of the probe on the measurements made by the machine, accelerometers are provided to measure the accelerations of the probe and to produce signals indicative thereof. The acceleration signals (45) are passed to the controller (FIG. 2) where they are integrated (46) and filtered (48) before being passed as velocity signals (49) to a summing junction (50) from which they are fed to a velocity feedback control loop[ (34, 35, 36, 37) which reduces any changes in the velocity (and hence deflection) of the probe due to the accelerations.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: May 27, 2003
    Assignee: Renishaw PLC
    Inventor: Kenneth C-H Nai
  • Patent number: 6546780
    Abstract: A sensor assembly for sensing the angular position of a rotatable body such as a motor vehicle steering column. The sensor assembly includes a ring gear which is zero calibrated upon assembly of the sensor assembly. The sensor assembly further includes a ring member which functions to lock the ring gear to the sensor housing to maintain the zero calibration between the time of calibration and the subsequent mounting of the sensor assembly on the steering column and further functions to release the ring member for free rotation with the steering column in response to mounting of the sensor assembly on the steering column.
    Type: Grant
    Filed: December 10, 2001
    Date of Patent: April 15, 2003
    Assignee: Delphi Technologies, Inc.
    Inventors: Samuel Roland Palfenier, Cecilia Hernandez
  • Patent number: 6546640
    Abstract: A compensation method according to the present invention includes: a traverse linearity data calculating step for measuring a master workpiece (MW) of which profile data is value-specified in advance while moving a sensor (7) using a linear movement mechanism (4, 5) of a measuring device (1) and for subtracting the previously value-specified profile data from the measurement data of the master workpiece to obtain a traverse linearity data of the linear movement mechanism; a workpiece measurement data calculating step for measuring the workpiece while moving the sensor by the linear movement mechanism of the measuring device to obtain a measurement data of the workpiece; and a workpiece profile calculating step for subtracting the traverse linearity data from the workpiece measurement data to obtain a true value data of the workpiece.
    Type: Grant
    Filed: January 16, 2001
    Date of Patent: April 15, 2003
    Assignee: Mitutoyo Corporation
    Inventors: Eiji Okada, Yoshiyuki Omori, Atsushi Tsuruta, Tsukasa Kojima
  • Patent number: 6542839
    Abstract: An apparatus and a method for calibrating the position of a cassette indexer in a semiconductor process machine are described. The apparatus is constructed by a base plate, a top plate and at least two support members rigidly attaching the top plate to the base plate in a parallel relationship. On the bottom side of the top plate, is mounted at least two spaced-apart rows of distance sensors each having at least five sensors capable of sensing a distance in the cavity of the calibration apparatus. After a wafer blade is extended into the cavity of the apparatus, a sensor in the front row and a sensor in the back row can be used to sense a front-to-back tilt of the wafer blade, while two adjacent sensors in the same row can be used to sense a side-to-side tilt of the wafer blade.
    Type: Grant
    Filed: September 29, 2000
    Date of Patent: April 1, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hsueh-Chin Lu, Jeng-Ding Tseng, Chi-Wei Chang
  • Publication number: 20030056566
    Abstract: [Subject] To provide a measuring apparatus of positions and postures of a machine for correcting positions and postures of an end effecter by means of an actuator, and an error correcting method for correcting errors thereof.
    Type: Application
    Filed: March 14, 2000
    Publication date: March 27, 2003
    Inventors: Masayuki Nashiki, Tetsuya Matsushita, Shigeharu Watanabe, Masao Nakagawa
  • Patent number: 6532791
    Abstract: The invention relates to a method for increasing the positioning accuracy of an element (13) which is movably arranged relative to a stator (10). At least two sensors (11, 12) are provided in the stator (10), a first sensor (11) and a second sensor (12), which are arranged at a distance (a) from one another in the stator (10), with respect to the movement direction (P) of the movably arranged element (13). The element (13) which is arranged such that it can move relative to the stator (10) is provided with encoders (130) which can move together with the movable element (13) and, when the element (13) carries out a movement relative to the stator (10), firstly produce a sensor signal (S11) in the first sensor (11) and then, as the movement of the element progresses, produce a sensor signal (S12) in the second sensor (12). First of all, in a calibration run, the movable element (13) is moved over the entire possible range of movement.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: March 18, 2003
    Assignee: NTI AG
    Inventors: Kuno Schmid, Daniel Ausderau, Marco Hitz, Ronald Rohner
  • Patent number: 6519860
    Abstract: Disclosed is a system and method for independently evaluating the spatial positional performance of a machine having a movable member, comprising an articulated coordinate measuring machine comprising: a first revolute joint; a probe arm, having a proximal end rigidly attached to the first joint, and having a distal end with a probe tip attached thereto, wherein the probe tip is pivotally mounted to the movable machine member; a second revolute joint; a first support arm serially connecting the first joint to the second joint; and coordinate processing means, operatively connected to the first and second revolute joints, for calculating the spatial coordinates of the probe tip; means for kinematically constraining the articulated coordinate measuring machine to a working surface; and comparator means, in operative association with the coordinate processing means and with the movable machine, for comparing the true position of the movable machine member, as measured by the true position of the probe tip, with
    Type: Grant
    Filed: October 19, 2000
    Date of Patent: February 18, 2003
    Assignee: Sandia Corporation
    Inventors: Lothar F. Bieg, Bernhard Jokiel, Jr., Mark T. Ensz, Robert D. Watson
  • Patent number: 6517478
    Abstract: An apparatus for use in calibrating lens position and field of view in an endoscope is disclosed. The apparatus includes tracking elements mounted at fixed positions on the endoscope's shaft, a holder providing an object or pattern to be viewed by the endoscope, when the endoscope is placed in the holder, and positional elements mounted on the holder at known positions. A processor in the apparatus operates to determine the positions of the tracking and positional elements, with the endoscope shaft received in the holder guide, and calculate from the determined positions, the coordinates of the endoscope lens with respect to the tracking elements, and the field of the view of the lens. Also disclosed is a calibration method which employs the apparatus.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: February 11, 2003
    Assignee: Cbyon, Inc.
    Inventor: Rasool Khadem
  • Publication number: 20030024297
    Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.
    Type: Application
    Filed: October 2, 2002
    Publication date: February 6, 2003
    Applicant: Renishaw PLC
    Inventor: David R. McMurtry
  • Patent number: 6513253
    Abstract: A gauge for a coordinate measuring machine has a plurality of balls whose centers are located on at least one line inclined with respect to a reference axis in a virtual reference plane. The gauge is set on a measuring table of the coordinate measuring machine. Orthogonal coordinates in which one of the coordinate axes is identical to the reference axis are set in the virtual reference plane. The coordinates of the center of each ball are measured by the coordinate measuring machine. Thereafter, the gauge is turned and inverted by 180 degrees about the reference axis and is set again on the measuring table. Orthogonal coordinates in which one of the coordinate axes is identical to the reference axis are set in the virtual reference plane. The coordinates of the center of each ball are measured in the same way as above. Thus, measurement errors of the straightness of the machine axes of the coordinate measuring machine and the orthogonality between the machine axes can be easily and precisely evaluated.
    Type: Grant
    Filed: February 7, 2001
    Date of Patent: February 4, 2003
    Assignees: National Institute of Advanced Industrial Science and Technology, Ministry of Economy, Trade and Industry (AIST), Asanuma Giken Co. Ltd.
    Inventors: Jiro Matsuda, Susumu Asanuma, Masanori Shibata
  • Patent number: 6511418
    Abstract: An apparatus for use in calibrating lens position and field of view in an endoscope is disclosed. The apparatus includes tracking elements mounted at fixed positions on the endoscope's shaft, a holder providing an object or pattern to be viewed by the endoscope, when the endoscope is placed in the holder, and positional elements mounted on the holder at known positions. A processor in the apparatus operates to determine the positions of the tracking and positional elements, with the endoscope shaft received in the holder guide, and calculate from the determined positions, the coordinates of the endoscope lens with respect to the tracking elements, and the field of the view of the lens. Also disclosed is a calibration method which employs the apparatus.
    Type: Grant
    Filed: March 30, 2001
    Date of Patent: January 28, 2003
    Assignee: The Board of Trustees of The Leland Stanford Junior University
    Inventors: Ramin Shahidi, Marc Epitaux
  • Patent number: 6510752
    Abstract: A method and apparatus are provided for testing a microactuator that forms part of a suspension assembly in a disc drive. The method and apparatus test the microactuator before placing the suspension assembly in a disc drive. In the invention, the head is positioned over a track on a disc based in part on servo information read from the disc. At least one input signal is then applied to at last one microactuator on the suspension assembly. Servo information is then read from the disc to determine a change in the position of the head. By comparing the change in the position of the head to the input signal applied to the microactuator, a performance characteristic of a microactuator can be determined.
    Type: Grant
    Filed: October 25, 1999
    Date of Patent: January 28, 2003
    Assignee: Seagate Technology LLC
    Inventors: Alexei H. Sacks, James H. McGlennen, Albert van der Schans
  • Patent number: 6510725
    Abstract: A gage inspecting apparatus includes a jog dial 56A for controlling an amount of displacement of a measuring spindle 22 at a time when the position of the measuring spindle 22 is finely adjusted, and a shuttle ring 56B for controlling the driving direction and driving speed of the measuring spindle 22 at a time when the position of the measuring spindle 22 is roughly adjusted. The relationship between the amount of rotation of the jog dial 56A and the amount of displacement of the measuring spindle 22 can be set in correspondence with a scale interval of the gage.
    Type: Grant
    Filed: October 10, 2001
    Date of Patent: January 28, 2003
    Assignee: Mitutoyo Corporation
    Inventors: Yuwu Zhang, Masaoki Yamagata, Yoichi Toida, Shiro Igasaki, Eiichi Tsunoda
  • Patent number: 6505496
    Abstract: A support shaft is non-rotationally inserted into bearing plates of support member. Accelerator rotor is attached to support shaft and can rotate, and a driver rotates it by means of the actuation of the accelerator pedal. Sensor rotor of accelerator opening sensor is attached to support shaft and can rotate. Protruding portion of sensor rotor is engaged with recess portion formed in accelerator rotor. Because plate spring inserted into recess portion sandwiches protruding portion in a direction opposite of the direction of rotation, with respect to sensor rotor, shift or deviation in the direction of rotation of accelerator rotor is prevented. Further, with respect to sensor rotor, accelerator rotor can slide in contact with plate spring while sliding in the direction of support shaft and the radial direction of accelerator rotor.
    Type: Grant
    Filed: December 15, 2000
    Date of Patent: January 14, 2003
    Assignee: Denso Corporation
    Inventors: Yasunari Kato, Takahiro Tamura, Katsumi Watanabe, Masahiro Makino
  • Patent number: 6505495
    Abstract: A test specimen includes four sensed elements and six connection elements for connecting the sensed elements, the sensed elements being releasably connectable by the connection elements in such a way that each sensed element touches precisely three connection elements at the end faces thereof and that the sensed elements and the connection elements in their entirety form a tetrahedron on the corners of which the sensed elements are arranged. The material and/or the dimensions of the sensed elements and the material and/or the dimensions of the connection elements are adapted to one another in such a way that, under standard measurement conditions, the total coefficient of linear expansion from one sensed point to the next sensed point on different sensed elements is essentially zero.
    Type: Grant
    Filed: March 29, 2000
    Date of Patent: January 14, 2003
    Assignee: Metronom Gesellschaft fuer Industievermessung, mbH
    Inventor: Jean Blondeau
  • Patent number: 6501536
    Abstract: A method and apparatus for use in locating the eyes of a vehicle driver or passenger in a vehicle for controlling vehicle systems including the positioning of vehicle sideview mirrors in relation to the driver's eyes to maximize the view of traffic on either side of the vehicle or the characteristics of vehicle airbag deployment. The location of a driver's or passenger's eyes is derived from the adjustment by the driver (or passenger, if capable of doing so) of adjustable light beam(s) emanating from light source(s) or illuminated indicia, until it (or they) intersect the driver's or passenger's eyes. From the angles of adjustment of the light beam(s) and other known coordinates of the vehicle, the location of the driver's or passenger's eyes or the target may be computationally derived as a set of Cartesian coordinates.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: December 31, 2002
    Inventor: Ronald J. Fredricks
  • Patent number: 6501262
    Abstract: The invention relates to a method for applying to a carrier a marking serving to measure length, angle cr the like, such as, for example, a magnetic tape (4), by means of which the accuracy of the measurements is improved. In the case of such methods, in one marking step a means for producing a track with markings, for example a writing head (9), is guided over the carrier and, by virtue of the fact that the carrier is acted upon, markings, for example magnetic north and south poles, are applied therein at predetermined positions of the carrier.
    Type: Grant
    Filed: December 1, 1999
    Date of Patent: December 31, 2002
    Assignee: Schneeberger Holding AG
    Inventors: Hans-Martin Schneeberger, Frederic L. Way
  • Patent number: 6499333
    Abstract: In one aspect, a spin-rinse-dry chamber comprises an adjustable nozzle. A calibration element may be positioned in the spin-rinse-dry chamber at which the adjustable nozzle may be directed. Targets (for example cross-hairs in one embodiment) may be located on the calibration element at a position corresponding to where it is desired to direct a fluid flow from the adjustable nozzle. Another aspect provides a method of calibrating a spin-rinse-dry chamber having an adjustable nozzle comprising inserting a calibration element having a similar contour as a substrate into the spin-rinse-dry chamber. Fluid is then directed through the adjustable nozzle at a selected target position located on the surface of the calibration element.
    Type: Grant
    Filed: March 2, 2000
    Date of Patent: December 31, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Alexander Sou-Kang Ko, Duane DeMore
  • Patent number: 6497134
    Abstract: A system for calibrating an error between the location of a feature of an object as determined by indirect calculation compared to as determined by physical measurement in order to be able to use this determined error to correct the location of the feature as determined by calculation in actual use in the field. This error is found by calculating the position and orientation of the object, having energy emitters disposed thereon, in a plurality of orientations and positions relative to a reference frame, but with the feature in a substantially constant position relative to the reference frame; calculating the locations of the feature of the object from these calculated positions and orientations; averaging these calculated locations; determining the location of the feature by physical measurement thereof in relation to the physical locations of the emitters; and comparing the calculated average location with the physically measured loacation to arrive at the error.
    Type: Grant
    Filed: March 15, 2000
    Date of Patent: December 24, 2002
    Assignee: Image Guided Technologies, Inc.
    Inventors: Ivan Faul, Jesse Dean Paylor
  • Patent number: 6493957
    Abstract: A ball step gauge includes a gauge framework that is H-shaped in cross-section and has a horizontal frame. A plurality of holes are formed at predetermined intervals in the horizontal frame in an axial direction of the horizontal frame. A plurality of grooves are formed around each of the holes. A plurality of balls are inserted under pressure in the holes, with centers of the balls existing on a neutral axis of moment of inertia of an area of the gauge framework. Since the ball intervals are less liable to change, the ball step gauge can be used as a reliable standard gauge for calibrating coordinate measuring machines.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: December 17, 2002
    Assignee: Japan as represented by Director General of Agency of Industrial Science and Technology
    Inventors: Toshiyuki Takatsuji, Sonko Osawa, Tomizo Kurosawa, Hironori Noguchi
  • Publication number: 20020157449
    Abstract: A plurality of fixing holes are made in the upper and side faces of a hollow rectangular prism block body at least the top and four side faces of which are quartz glass or monocrystalline quartz rectangular plates. A plurality of reference members, each having a reference measuring face with which the fore end of a probe of a measuring apparatus is brought into contact, are inserted into the fixing holes, respectively, and secured in place. An inspection master block ensuring a high inspection accuracy by minimizing the effect of ambient temperature variation and a method for producing the same are thereby provided.
    Type: Application
    Filed: January 28, 2002
    Publication date: October 31, 2002
    Inventor: Susumu Asanuma
  • Patent number: 6472777
    Abstract: In a stage assembly, for instance a fine stage using a pair of push-pull electro-magnetic actuators to move the stage back and forth along an axis, there is typically a sensor to determine the actual stage location. This sensor's home position must correspond to the actual stage position where the two opposed actuators are observed to exert forces of the same magnitude but opposing directions on this stage. Since the actuators depend on the sensor reading to exert their forces correctly, misalignment of the home position will decrease system performance. The calibration of this sensor is accomplished using actual system feedback signals, which are the currents drawn by the two opposed actuators, during run time conditions. The sensor is considered calibrated (meaning a virtual “null” position) when each of the two opposed actuators draws the same amount of current. If this is not the case a feedback process calibrates the sensor.
    Type: Grant
    Filed: March 14, 2000
    Date of Patent: October 29, 2002
    Assignee: Nikon Corporation
    Inventors: Ting-Chien Teng, Bausan Yuan
  • Patent number: 6463782
    Abstract: A self-centering calibration tool for a wafer platform or a heater in a chemical vapor deposition chamber is disclosed. The self-centering calibration tool is constructed of a circular calibration disc that has at least one alignment mark on a top surface for aligning a robot arm, and a centering device mounted juxtaposed to a bottom surface of the disk. The centering device is detachably mounted to the calibration disk by a bolt threadingly engaging a center aperture in a calibration disk and a center aperture in the centering device. The centering device is constructed by at least three links, or legs extending radially outwardly from the center aperture equally spaced circumferentially from each other adapted for engaging an undercut groove provided in a raised edge of the wafer platform to effectuate a self-centering calibration. A method for calibrating the movement of a robot arm for loading a wafer onto a wafer platform or a heater is also disclosed.
    Type: Grant
    Filed: January 13, 2000
    Date of Patent: October 15, 2002
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-I Shen, Jan-Mei Fan, Su-Hwa Wang, Hui-Lung Hon
  • Patent number: 6463667
    Abstract: A machine tool precision-measuring apparatus comprising: a first linear movement distance-measuring means 17 including a first slide shaft 11, a first slide bush 13 slidably attached to the first slide shaft 11, and a first distance sensor 15 for measuring a distance that the first slide shaft 11 relatively travels with respect to the first slide bush 13; and, a second linear movement distance-measuring means 18 including a second slide shaft 12 positioned across the first slide shaft 11, a second slide bush 14 connected to the first slide bush 13, the second slide bush 14 being slidably attached to the second slide shaft 12, and a second distance sensor 16 for measuring a distance that the second slide shaft 12 relatively moves with respect to the second slide bush 14.
    Type: Grant
    Filed: September 15, 2000
    Date of Patent: October 15, 2002
    Assignees: Orio Precision Co., LTD, Fukuoka Prefectural Government, Japan Science and Technology Corporation
    Inventors: Masaki Ushio, Masahide Koya, Hiromichi Matsuda, Yoshihiko Yamaguchi
  • Publication number: 20020138999
    Abstract: The invention concerns a method for calibrating a tool, of the touch probe type, used on a contact type measuring machine, in order to take account of its dynamic geometrical features.
    Type: Application
    Filed: March 29, 2002
    Publication date: October 3, 2002
    Applicant: SAPHIRWERK INDUSTRIEPRODUKTE AG.
    Inventor: Daniel Dubois
  • Patent number: 6457251
    Abstract: A calibration assembly and method for calibrating the device pick-up heads used in multi-head IC handlers such that all of the device pick-up heads are reliably calibrated to a consistent optimal calibration position. Gauge blocks are provided that greatly simplify the calibration process by holding the movable portion of a device pick-up head in an optimal calibration position relative to the base structure of the device pick-up head while the collar is secured. Each gauge block has base portion for supporting the base structure of the device pick-up head, and a flat contact surface against which the lower surface of the movable portion is pressed. The contact surface is a predetermined distance from the base portion such that when the device pick-up head is mounted on the gauge block, the movable portion is maintained in an optimal calibration position relative to the base structure.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: October 1, 2002
    Assignee: Xilinx Inc.
    Inventors: Thomas A. Feltner, John C. Marley
  • Publication number: 20020124628
    Abstract: A system and method of calibrating a vehicle odometer (12) includes a controller (18) receiving signals from the odometer (12) indicative of movement of the vehicle (10) and a receiver (26) indicative of distance traveled. The controller (18) obtains information indicative of movement of the vehicle (10) in response to travel at a constant speed. The receiver (26) provides signals indicative of the distance traveled to the controller (18). The controller (18) determines an average number of signals relative to distance and compares the average number to a current number of signals relative to distance. Odometer calibration updates if the average and current number of signals relative to distance differs by a predetermined amount. The number of signals relative to the distance is only recorded when the vehicle (10) is traveling at a constant speed, eliminating aberrant data from odometer calibration. (FIG.
    Type: Application
    Filed: March 8, 2002
    Publication date: September 12, 2002
    Inventors: Steven Paul Price, Todd Alan Biegler
  • Patent number: 6442993
    Abstract: A multi-sensor alignment testing device for aligning or testing a sensor in a paper processing apparatus. The device comprises a housing, a power supply section, and a signal selector section connected to the housing. The signal selector section is connectable to a power supply section and the sensor. The indicator section is connected to the signal selector section and the sensor.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: September 3, 2002
    Assignee: Xerox Corporation
    Inventor: Scott Joseph DiMora
  • Patent number: 6434847
    Abstract: Apparatus and methods for measuring the amount by which the centerline of a shaft disposed in a vessel is offset from the central vertical axis of the vessel, and for measuring the height of such shaft above the inside bottom of the vessel. Apparatus includes a shaft centerline offset measurement device, a shaft height measurement device, and a control/display console. Each measurement device includes a transducer or optical encoder for sensing a displaced position of a biased plunger to which a code strip is mounted. The devices may be combined into a single shaft offset and height measurement device. Improved methods include calculating shaft offset based on a plurality of readings from the transducer, and applying trigonometric relationships. The apparatus and methods are particularly useful in the verification of paddle or basket shafts utilized in dissolution testing stations, so that the dissolution testing protocol complies with government agency guidelines.
    Type: Grant
    Filed: November 2, 1999
    Date of Patent: August 20, 2002
    Assignee: Varian, Inc.
    Inventors: Gregory S. Duckett, C. J. Anthony Fernando, Michael F. Haw
  • Patent number: 6434845
    Abstract: A force characterization device utilizes a flexure having a compliant portion and a solid portion. During operation of a coordinate measuring machine (CMM) on the solid portion of the flexure, a first capacitance probe detects displacement of the solid portion of the flexure in a first dimension and a second capacitance probe detects displacement of the solid portion of the flexure in a second dimension perpendicular to the first dimension. The detected displacements in the first and second dimensions of the solid portion of the flexure are correlated to forces applied to the flexure in the first and second dimensions based on the detected displacements and the predetermined spring constant of the compliant portion of the flexure. A total applied force is determined based on the forces applied to the flexure in the first and second dimensions. The flexure may be utilized for touch-trigger operations or scanning operations of the CMM.
    Type: Grant
    Filed: September 5, 2000
    Date of Patent: August 20, 2002
    Assignee: University of North Carolina at Charlotte
    Inventors: Paulo H. Pereira, Ashok Muralidhar, Robert J. Hocken, Jimmie A. Miller, Stuart Smith
  • Patent number: 6430986
    Abstract: A multi-sensor alignment testing device for aligning or testing a sensor in a paper processing apparatus. The device comprises a housing, a power supply section, and a signal selector section connected to the housing. The signal selector section is connectable to a power supply section and the sensor. The indicator section is connected to the signal selector section and the sensor.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: August 13, 2002
    Assignee: Xerox Corporation
    Inventor: Scott Joseph DiMora