Abstract: A multi-sensor alignment testing device for aligning or testing a sensor in a paper processing apparatus. The device comprises a housing, a power supply section, and a signal selector section connected to the housing. The signal selector section is connectable to a power supply section and the sensor. The indicator section is connected to the signal selector section and the sensor.

Abstract: To prevent process defects and wafer damage caused by improperly positioned wafers, a system and method for detecting a position of a wafer determines whether the wafer is properly positioned before executing a process. The system includes a chuck plate preferably having a supporting part configured to support a lower face of the wafer and a guide part located on a perimeter of the supporting part. A sensing unit senses a positional state of the wafer on an upper portion of the supporting part. A controller receives a signal corresponding to the positional state of the wafer from the sensing unit, and determines whether the wafer is properly positioned. The controller then sends an output control signal to an outputting unit to notify an operator of the wafer position. In this manner, process defects are avoided and a fabricating yield and operating rate of a fabrication unit increases.

Abstract: A jig for aligning a wafer-handling system in a calibration location, such as a wafer pickup-dismount location, with respect to a wafer-processing tool. The jig comprises an alignment fixture adapted to be repeatably mounted on the tool and having one or more edge stops. The jig may further comprise an edge-to-center locator adapted to be mounted on the alignment fixture. The edge-to-center locator has a peripheral edge and a center marker that identifies the precise center of the calibration location when the edge-to-center locator edge is positioned in contact with the edge stop or stops. An alignment method for use of the jig is also disclosed.

Abstract: A coordinate measuring machine (CMM) carries a probe and is controlled by a controller to drive the probe to take measurements on a workpiece. In order to reduce the effects of acceleration-induced deflections of the probe on the measurements made by the machine, accelerometers are provided to measure the accelerations of the probe and to produce signals indicative thereof. The acceleration signals (45) are passed to the controller (FIG. 2) where they are integrated (46) and filtered (48) before being passed as velocity signals (49) to a summing junction (50) from which they are fed to a velocity feedback control loop[ (34, 35, 36, 37) which reduces any changes in the velocity (and hence deflection) of the probe due to the accelerations.

Abstract: A system and method for aligning the beam path of a beam-emitting sensor arranged on a motor vehicle. Convenient and nevertheless highly precise setting of the beam direction of the beam-emitting element is possible if, when the vehicle is stationary, an external aligning beam propagating along or parallel to an actual direction of travel of the motor vehicle 1 hits a strictly planar surface on the sensor which reflects the aligning beam, the incident aligning beam and the reflected aligning beam are made to overlap as a result of the position of the sensor being changed.

Abstract: A coordinate measuring machine (CMM) carries a probe and is controlled by a controller to drive the probe to take measurements on a workpiece. In order to reduce the effects of acceleration-induced deflections of the probe on the measurements made by the machine, accelerometers are provided to measure the accelerations of the probe and to produce signals indicative thereof. The acceleration signals (45) are passed to the controller (FIG. 2) where they are integrated (46) and filtered (48) before being passed as velocity signals (49) to a summing junction (50) from which they are fed to a velocity feedback control loop (34,35,36,37) which reduces any changes in the velocity (and hence deflection) of the probe due to the accelerations.

Abstract: A hitch control unit for use in a tractor comprises a housing that defines an arcuate surface having a tangentially extending slot. An arm extending through the slot is rotatably mounted in the housing and connected to a transducer to produce a signal indicative of the position of the arm along the slot. A stop movably mounted in the housing defines a reference position for the arm along the slot, and a finger-actuated wheel rotatably mounted in the housing allows the position of the movable stop along the slot to be adjusted. The wheel has an internally screw threaded bore and is mounted in the housing for rotation about an axis that extends parallel to the slot and the adjustable stop is connected to an arcuate rack in screw threaded engagement with the bore in the wheel.

Abstract: A process of finishing outer joint parts formed in a non-cutting way and intended for constant velocity joints, said outer joint parts having a longitudinal axis and an inner recess which extends in the direction of the longitudinal axis and which, in the direction of the longitudinal axis, is substantially undercut-free, with the inner recess being provided with tracks which comprise contact zones for the rolling contact of rolling contact members, characterized by the following sequence of process stages: non-cutting forming of the outer joint part, surface-layer-hardening of the inner recess at least along the length of the contact zones, for the purpose of producing a hardened surface layer, at least in the region of the contact zones above an unhardened matrix, calibrating the contact zones in respect of their radial positions and axial linearity by displacing the hardened surface layer in the region of the contact zones within the unhardened matrix.

Abstract: In a coordinates detecting apparatus including a tablet for detecting X and Y coordinates and a correcting circuit for correcting the X and Y coordinates detected from the tablet, a parameter used for correcting the X coordinate and a parameter used for correcting the Y coordinate are adjustable independent from each other. More specifically, time constant of a CR filter circuit for the X coordinate and time constant of the CR filter circuit for the Y coordinate can be adjusted independent from each other. Further, numbers of A/D conversion, threshold values, number of samples and so on for the X and Y coordinates can be set independent from each other. As a result, in the coordinates detecting apparatus, noises in X and Y coordinates can be optimally removed, allowing detection of X and Y coordinates with high accuracy.

Abstract: A method for cell alignment, identification and calibration of part of a robot tool, preferably a part of the robot tool, is positioned close to a detector, whereupon it is moved repeatedly past the limit of the area of detection of the detector. During the movement, the pose of the robot is registered each time the surface of said robot tool comes into tangential contact with the area of detection, and an over determined system of equations is formed, consisting of a correlation between the registered poses and unknown parameters regarding the detection area of the detector and the location of the robot part in space. An error vector is introduced into the system of equations, which is then solved while minimizing the error vector, preferably in the least square sense, in order to thus identify said unknown parameters and the error vector.

Abstract: An apparatus and method for sensing angular displacement of a rotating object. A reference object is provided that maintains an independent angular reference. An angular displacement of the rotating object may be measured with respect to the reference object. The apparatus may include a turn sensor for measuring directional changes in the heading of the object, an angular compensator, and a servomotor for maintaining the turn sensor in a same angular position. The object may be a vehicle such as a boat, car, train, airplane or any other vehicle. The turn sensor is coupled to the servomotor that may be attached to a platform of the vehicle. As the vehicle rotates, the heading of the vehicle changes. The servomotor rotates the turn sensor housing to keep the sensor at the same angular position. The heading may be determined by measuring an angular difference between the position of the turn sensor in relation to the moving object.

Abstract: A method of testing an actuation system for positioning an actuator, the actuation system including a primary electronic system, a secondary hydro-mechanical system is disclosed. The method includes the steps of measuring the actual position of the actuation device as set by the primary electronic system; measuring the system inputs and computing an ideal actuator position based thereon; determining the difference between the actual actuator position and the ideal position. The difference is then compared to a first threshold value which represents a disturbance beyond which the system cannot safely operate. Control is transferred from the primary control to the secondary control if the difference exceeds the first threshold. If the difference is less than the first threshold, the difference is compared to a second threshold value which represents an operating condition that can be tolerated for a period of time.

Abstract: The present invention provides an NC machine tool which permits a check for the run-out of a spindle thereof at any time. The NC machine tool includes deflection detecting means (22) provided on a base within a machining area, and run-out diagnosing means (8) for conducting a diagnosis on the run-out of the spindle by calculating the amount of the run-out of the spindle on the basis of a deflection detected by the deflection detecting means (22) and comparing the calculated run-out amount with a predetermined tolerance. A test tool is attached to the spindle and rotated about an axis thereof, and the deflection of an outer circumferential surface of the test tool is detected by the deflection detecting means (22). On the basis of the deflection thus detected, the run-out diagnosing means (8) conducts a diagnosis on the run-out of the spindle.

Abstract: An auxiliary housing for holding a distance measuring device has a housing part which forms a receptacle for insertion of the distance measuring device, a threaded bushing for mounting the housing part on a tripod, the threaded bushing having a longitudinal axis which coincides with an abutment surface operating as a reference surface for a hand-guided measuring process when the distance measuring device is inserted in the housing part.

Abstract: A gauge for a coordinate measuring machine has a plurality of balls whose centers are located on at least one line inclined with respect to a reference axis in a virtual reference plane. The gauge is set on a measuring table of the coordinate measuring machine. Orthogonal coordinates in which one of the coordinate axes is identical to the reference axis are set in the virtual reference plane. The coordinates of the center of each ball are measured by the coordinate measuring machine. Thereafter, the gauge is turned and inverted by 180 degrees about the reference axis and is set again on the measuring table. Orthogonal coordinates in which one of the coordinate axes is identical to the reference axis are set in the virtual reference plane. The coordinates of the center of each ball are measured in the same way as above. Thus, measurement errors of the straightness of the machine axes of the coordinate measuring machine and the orthogonality between the machine axes can be easily and precisely evaluated.

Abstract: Apparatus which can be used to calibrate, or provide measurement data on, a machine. The apparatus comprises two structures each with three spherical supports spaced in a triangular array thereon. The supports may be balls or sockets. The structures are interconnected by six members and each support has the ends of two members connected to it. The members are passive extensible measuring bars and the structures are respectively connected to fixed and movable parts of a machine so that movement of the machine parts causes relative movement between the structures and varies the lengths of the measuring bars. From measurements of the lengths of the measuring bars the actual movement of the machine part can be determined. Calibration of the spherical supports is carried out using a measuring bar which is pre-calibrated in a Zerodur jig.

Abstract: A multi-sensor alignment testing device for aligning or testing a sensor in a paper processing apparatus. The device comprises a housing, a power supply section, and a signal selector section connected to the housing. The signal selector section is connectable to a power supply section and the sensor. The indicator section is connected to the signal selector section and the sensor.

Abstract: A robot aligning apparatus includes a pointer which may be connected to either the robot or the tool carried by the robot. The apparatus also includes a stationary post having a sleeve mounted thereon. The robot or the tool with the pointer mounted thereon are moved to a test station adjacent the sleeve and post, and the sleeve is moved upwardly over the pointer to indicate proper alignment.

Abstract: A friction drive apparatus includes an edge detection system for determining a lateral position of a strip material advancing in a longitudinal direction. The edge detection system includes a first sensor and a second sensor for monitoring the lateral position of the strip material. The friction drive apparatus also includes instructions for automatically aligning the strip material as the strip material is advanced a predetermined aligning distance and instructions for calibrating the second sensor with respect to the first sensor to compensate for any potential discrepancies therebetween. The apparatus and methods of the present invention ensure that the strip material is properly aligned in the friction drive apparatus and limit waste of strip material during those operations.

Abstract: A calibrating device for detecting the position, firstly, of the axis of the shank (axis of action) and, secondly, of the front end (point of action or line of action) of a surgical instrument relative to an reference position determination device 42 mounted on the rear part of the instrument, has: two clamping-device carriers, each with a clamping device, in a clamping state the clamping devices bringing the shank of the instrument into a clearly defined clamped position; a supporting plate 12 on which the front end of the instrument rests in the clamped state; and a reference position determination device 42, the axis of action being essentially perpendicular to the supporting plate 12 in the clamped position, and the supporting plate and the reference position determination device 42 being connected firmly to one another.

Abstract: A method for calibrating a gage for measuring shot blast intensity having an indication mounted on a platform adjusts the calibration of the indicator to compensate for variations of positioning of the Almen test strip supports on the platform. After verifying that the test strip supports are within tolerance by use of “go-no go” gages, the indicator is mounted on the support and calibrated by using a notch calibration block to first set the zero datum of the indicator and then to make a calibration reading of the depth of the notch. If the reading is within specifications, the notched calibration block is removed, and a calibration block having a curved surface simulating the curvature of an Almen strip to be measured by the Almen gage and having a known maximum deflection is installed on the gage and the indicator used to measure the deflection. If the measured deflection is within tolerance limits of the known actual deflection, the indicator is recalibrated to read the actual deflection.

Abstract: A method of testing frequency characteristics of a laser displacement/vibration meter by the use of a novel which can cope with a broader frequency range and finer micro-level displacements to enhance the reliability of the displacement/vibration meter. Upon applying impact on one end face of a round metal rod, an elastic wave pulse which propagates through the metal rod generates a stepwise dynamic displacement of the other end face of the rod when reflected there. This dynamic displacement is measured simultaneously by a reference laser interferometer with a reference laser beam and a laser displacement/vibration meter with unknown frequency response characteristics, followed by comparison of measurement data over a frequency range to determine the frequency response characteristics of the unknown laser displacement/vibration meter.

Abstract: A compensating method for a positioner is provided, which makes it possible to avoid any temperature-compensating circuit and any linearity-compensating circuit for a position sensor, and reduce the production cost. The position sensor, which detects the displacement amount of a movable section of an objective control device operated on the basis of a control signal outputted from the positioner, provides an output which is subjected to the temperature compensation calculation by using a linear expression including a slope and an intercept determined on the basis of a temperature measured by a temperature sensor to obtain a temperature-compensated output data.

Abstract: An ultrasonic-wave distance measuring apparatus of the separate transmission and reception type reflection system capable of making the measurable distance longer and improving the precision of the measuring, wherein a distance measurement calculation control circuit in an ultrasonic-wave transmitter starts counting a time simultaneously with the start of vibration of an ultrasonic-wave transmission sensor, the ultrasonic-wave emitted from the ultrasonic-wave transmission sensor is reflected at the object to be measured and detected by an ultrasonic-wave reception sensor, a distance measurement sensitivity correction circuit corrects the sensitivity of the signal from the ultrasonic-wave reception sensor based on sensitivity correction data predetermined in accordance with a type of object and a measurement distance, the signal after the sensitivity correction by the distance measurement sensitivity correction circuit is detected in a detection circuit, and the distance measurement calculation control circuit

Abstract: An apparatus for measuring three-dimensional volumetric errors in a multiaxis machine tool is disclosed. The apparatus comprises a kinematic ball bar provided with two balls at both ends thereof as a basic construction. A U-shaped bar with two extension arms is integrated with the ball bar. A vertical post is positioned relative to the U-shaped bar and is integrated with one of the two balls. A sleeve is fitted over the post and two guide bars is fixedly and longitudinally assembled with an external surface of the sleeve at opposite positions. Each of the guide bars is provided with a slot at a lower portion thereof for movably receiving an operating pin.

Abstract: An anatomical position sensing system (100) using one or more substantially spherical transponders for measuring relative positions and distances. Transponders (P) and (S) are capable of receiving and transmitting RF signals, and communicating between themselves and with a separate CPU (112). The CPU (112) is controlled by an operator at an operator control panel (114), interacts with an alarm (120) for providing audible alerts to the operator, and a display for displaying information to the operator. The CPU (112) controls a broadband antenna (118) to transmit, at a frequency f1, a low-frequency RF power signal (122) across a wide field to energize the transponders (P) and (S). Directional components (122a) and (122b) intercept and energize the transponders (P) and (S). Once energized, transponder (P) transmits a range signal in all directions including component (124) at a very high RF frequency f2, extending from transponder (P) to transponder (S).

Abstract: Automated systems and methods for processing substrates are described. An automated processing system includes: a vacuum chamber; a substrate support located inside the vacuum chamber and constructed and arranged to support a substrate during processing; and a substrate alignment detector constructed and arranged to detect if the substrate is misaligned as the substrate is transferred into the vacuum chamber based upon a change in a physical condition inside the system. The substrate alignment detector may include a vibration detector coupled to the substrate support. A substrate may be transferred into the vacuum chamber. The position of the substrate may be recorded as it is being transferred into the vacuum chamber. Misalignment of the substrate with respect to the substrate support may be detected. The substrate may be processed. The processed substrate may be unloaded from the vacuum chamber. The position of the processed substrate may be recorded as it is being unloaded from the vacuum chamber.

Abstract: An apparatus and a method for producing accurate straight cuts in a slab of stone, concrete, or the like. A carriage conveys the cutter along two parallel rails that lie directly upon the upper surface of the slab to be cut. In a preferred embodiment of the invention, neither rail is connected to anything else, and a sheet of resilient material is bonded to the underside of each rail. A calibration instrument is disclosed, which is used to facilitate spacing the rails specific distances on either side of the desired cut line. Because the rails can be moved one at a time in the preferred embodiment, the apparatus is highly portable. In an alternative embodiment in which portability is not an important consideration, the rails may be permanently connected by rigid lateral members.

Abstract: A multi-sensor alignment testing device for aligning or testing a sensor in a paper processing apparatus. The device comprises a housing, a power supply section, and a signal selector section connected to the housing. The signal selector section is connectable to a power supply section and the sensor. The indicator section is connected to the signal selector section and the sensor.

Abstract: A calibration wafer for precisely aligning a wafer-handling system that processes a plurality of product wafers. The calibration wafer has radial and thickness dimensions and tolerances equivalent to those of the product wafers and further comprises a first center marker adapted for alignment with a second center marker external to the calibration wafer. The calibration wafer may be a component of a wafer center alignment device for precisely aligning a wafer-handling system in a calibration location in relation to a wafer-processing tool, the device further comprising an alignment jig adapted to be repeatably mounted on the tool and on which the second center marker is located. The calibration wafer is adapted to be positioned so that the first center marker aligns with the second center marker.

Abstract: An equipment for calibration of an industrial robot which has a plurality of axes of rotation and wherein, the equipment comprises a measuring device is adapted for rotatable connection to a reference point the position of which is known, is adapted to be in contact with the robot, or a tool carried by the robot, during the calibration process, and has an axis of rotation which intersects the reference point when the measuring device is connected to the reference point. The measuring device further comprises a gravity sensor which is so mounted so that the axis of the gravity sensor is substantially parallel to the axis of rotation of the measuring device, whereby the gravity sensor measures the angle between the gravity vector and axis of rotation.

Abstract: Disclosed is a calibration method for compensating an offset occurring when parts in an industrial robot are exchanged with now ones. A signal generation part is attached to a moving part of the robot. While the moving part is moving, a signal detection part detects the movement of the signal generation part with a sensor therein, and calibration data are generated on the basis of the detected signals. Preset calibration data are amended using a difference between the generated calibration data and the preset calibration data, so that the offset is compensated.

Abstract: The invention provides a process for measuring the relative movement of at least two components, such as a fixed wheel, a loose wheel and a sliding sleeve of a synchronizing device. For analyzing the measuring values after the detection thereof, first at least a portion of the measuring values is adjusted by linking them with one another, taking into account known marginal conditions. By means of a subsequent standardization of the series of measuring values, in addition, as required, the reference system (the location of the observer of the measurement), can be freely selected. Thus, it is possible to observe the event from a particularly suitable reference system, such as the synchronizing rotational speed. The joint display of the series of measuring values precisely defines the relative movement of the observed components.

Abstract: The invention is a system and method for calibrating a robotics system. The invention measures the actual performance of the robotics system when positioning objects at several calibration positions within an operational area. The invention then determines corrective factors based on the performance measurements. The robotics system uses the corrective factors to overcome positioning errors and operate in the field with extreme precision. The calibration system comprises a control system, a laser projection device, a plate, and a laser detection device. The robotics system positions the laser projection device to project a laser beam through a hole in the plate and onto a laser detection area on the laser detection device. The control system then directs the robotics system to move the laser projection device to a plurality of calibration positions.