Roughness Patents (Class 73/105)
  • Patent number: 11940416
    Abstract: The present invention relates to a heterodyne scanning probe microscopy method for imaging structures on or below the surface of a sample, the method including applying, using a transducer, an acoustic input signal to the sample sensing, using a probe including a probe tip in contact with the surface, an acoustic output signal, wherein the acoustic output signal is representative of acoustic surface waves induced by the acoustic input signal wherein the acoustic input signal comprises at least a first signal component having a frequency above 1 gigahertz, and wherein for detecting of the acoustic output signal the method comprises a step of applying a further acoustic input signal to at least one of the probe or the sample for obtaining a mixed acoustic signal, the further acoustic input signal including at least a second signal component having a frequency above 1 gigahertz, wherein the mixed acoustic signal comprises a third signal component having a frequency equal to a difference between the first frequen
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: March 26, 2024
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Hamed Sadeghian Marnani, Maarten Hubertus van Es, Paul Louis Maria Joseph van Neer, Rutger Meijer Timmerman Thijssen
  • Patent number: 11927564
    Abstract: A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.
    Type: Grant
    Filed: February 3, 2020
    Date of Patent: March 12, 2024
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Maarten Hubertus Van Es, Abbas Mohtashami, Benoit Andre Jacques Quesson, Paul Louis Maria Joseph Van Neer
  • Patent number: 11929504
    Abstract: Vertically aligned carbon nanotubes (VACNTs) (e.g., multi-walled VACNTs and methods of synthesizing the same are provided. VACNTs can be synthesized on nickel foam (Ni—F), for example by using a plasma-enhanced chemical vapor deposition (PECVD) technique. A wet chemical method can then be used to coat on the VACNTs a layer of nanoparticles, such as tin oxide (SnO2) nanoparticles.
    Type: Grant
    Filed: October 7, 2022
    Date of Patent: March 12, 2024
    Assignee: THE FLORIDA INTERNATIONAL UNIVERSITY BOARD OF TRUSTEES
    Inventors: Wenzhi Li, Arun Thapa
  • Patent number: 11860187
    Abstract: This invention belongs to the technical field of cell mechanics and provides a modified method to fit cell elastic modulus based on Sneddon model. The process of the conical atomic force microscope probe compressing into the cell was simulated by ABAQUS. The simulation results are compared with the Sneddon model to get the error caused by Sneddon model. The fitting errors of Sneddon model under different circumstances were obtained by using the method of function fitting, so as to realize the modification of Sneddon model to fit cell elastic modulus. As a modified method to fit cell elastic modulus based on Sneddon model, it can be used to measure the elastic modulus of cells more accurately. The design process is convenient and fast. The design method is easy to master, and the process of use is convenient and simple.
    Type: Grant
    Filed: September 7, 2020
    Date of Patent: January 2, 2024
    Assignee: DALIAN UNIVERSITY OF TECHNOLOGY
    Inventors: Wei Zhang, Weihao Sun, Chengwei Wu, Jianli Ma
  • Patent number: 11821813
    Abstract: A drive train abnormality determination device for a straddled vehicle that includes a drive train having a rotator. The drive train abnormality determination device includes an angle signal output unit that periodically outputs an angle signal in accordance with rotation of the rotator, a rotator rotation speed fluctuation physical quantity acquisition unit that acquires a quantity related to a fluctuation in a rotation speed of the rotator, based on the angle signal from the angle signal output unit, a rough road determination unit that determines whether a distribution state or pattern satisfies a predetermined rough road condition, a continuity determination unit that determines whether the rough road condition is continuously satisfied, and a drive train abnormality determination unit that determines, responsive to a determination by the continuity determination unit that the rough road condition is continuously satisfied, that the drive train has an abnormality in its functioning.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: November 21, 2023
    Assignee: YAMAHA HATSUDOKI KABUSHIKI KAISHA
    Inventors: Kazuteru Iwamoto, Hisatoshi Kinoshita, Nobuyuki Kawashima
  • Patent number: 11796563
    Abstract: The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: October 24, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Matejka, Christof Baur
  • Patent number: 11796608
    Abstract: The inventive concepts provide a magnetic property measurement apparatus capable of quickly measuring a magnetic property of a subject without a decrease in a measurement speed that might occur due to an electromagnet. In addition, the inventive concepts provide a magnetic property measurement apparatus capable of monitoring a magnetization distribution of a memory device as an image and integrating images by using a TDI camera, thereby being capable of performing highly sensitive measurement and not having to capture images for a long time. The magnetic property measurement apparatus includes: a magnetic field generation unit configured to generate a magnetic field which is constant with time and varies with relative position; a mobile unit configured to move a subject to be measured in the magnetic field; and a measurement unit configured to measure a magnetic property of the subject moving in the magnetic field.
    Type: Grant
    Filed: September 7, 2021
    Date of Patent: October 24, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Harutaka Sekiya, Shinji Ueyama, Tomoki Onishi
  • Patent number: 11774381
    Abstract: A method for measuring damage (D) of a substrate (1) caused by an electron beam (2). The method comprises using an atomic force microscope (AFM) to provide a measurement (S2) of mechanical and/or chemical material properties (P2) of the substrate (1) at an exposure area (1a) of the electron beam (2). The method further comprises calculating a damage parameter (Sd) indicative for the damage (D) based on the measurement (S2) of the material properties (P2) at the exposure area (1a).
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: October 3, 2023
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventor: Hamed Sadeghian Marnani
  • Patent number: 11760882
    Abstract: Disclosed are asphalt and asphalt binders and methods for making such compositions with sterols. The sterols improve various rheological properties. Also disclosed are methods of determining the changes or improvements of various rheoloical properties.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: September 19, 2023
    Assignees: A.L.M. Holding Company, Ergon Asphalt & Emulsions, Inc.
    Inventors: Gerald H. Reinke, Gaylon L. Baumgardner, Andrew Hanz
  • Patent number: 11762046
    Abstract: An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Baohua Niu, Ji-Feng Ying
  • Patent number: 11747228
    Abstract: Device and method for measuring contact force exerted by an object on a probe comprising a lever and said probe for contacting the object is provided. The lever is pivotably coupled to a body by a coupling module. The device comprising a fixed frame coupled to the body. The body is designed to be moved with respect to the object to put the probe in contact with the object to create force pivoting said lever with respect to the body around a pivot axis. The device comprising a sensor for measuring displacement of the lever with respect to the body upon pivoting. The coupling module comprises control stiffness module, so that when the probe contacts the object, the displacement of the lever is proportional to the force exerted by the probe on the object. Such control stiffness module is tunable so that accuracy and sensitivity of measured force is controlled.
    Type: Grant
    Filed: April 3, 2020
    Date of Patent: September 5, 2023
    Assignee: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
    Inventors: Mohammad Hussein Kahrobaiyan, Charles Baur, Simon Henein, Mohamed Zanaty
  • Patent number: 11719719
    Abstract: A method of batch-fabricating an array of probe devices for a surface analysis instrument, such as an atomic force microscope (AFM), includes providing a wafer, and photolithographically forming a base and a cantilever for each probe. The cantilever includes a built-in angle, ?, relative to the base, and the base is substantially parallel to a sample holder when the probe device is mounted in a probe holder of the surface analysis instrument.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: August 8, 2023
    Assignee: Bruker Nano, Inc.
    Inventors: Jeffrey Wong, Joseph Fragala, Weijie Wang, Deepkishore Mukhopadhyay, Xing Zhao, Rakesh Poddar
  • Patent number: 11660706
    Abstract: A welding quality detection system and a welding quality detection method are provided. A detection device applies a force to at least one weld point of a first welded object or a second welded object that are welded together. A displacement detector detects a displacement signal that varies with the force or time between the first welded object and the second welded object based on the force. A detection module receives or records the displacement signal and determines whether a gap exists between the first welded object and the second welded object based on a slope of the displacement signal, so as to detect the welding quality of the weld point quickly and precisely.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: May 30, 2023
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Tsung-Ying Tsai, Kun-Tso Chen, Chih-Wei Chien, Chung-Hsin Hsiao
  • Patent number: 11619649
    Abstract: An atomic force microscope equipped with an optical measurement device is disclosed. An atomic force microscope equipped with an optical measurement device which acquires characteristics of a surface of a measurement target by moving a probe along the surface of the measurement target while scanning the measurement target on an XY plane using an XY scanner for supporting the measurement target, includes: an optical measurement device including a lighting unit configured to allow light to enter the surface of the measurement target, and a detection unit configured to detect light reflected by the surface of the measurement target, the optical measurement device being configured to acquire the characteristics of the surface of the measurement target by the scanning by the XY scanner; and a control device configured to control an operation of the atomic force microscope and an operation of the optical measurement device.
    Type: Grant
    Filed: November 26, 2021
    Date of Patent: April 4, 2023
    Assignee: PARK SYSTEMS CORP.
    Inventors: Sang-il Park, Byoung-Woon Ahn, Seung-Ho Han, Sang-Joon Cho
  • Patent number: 11619566
    Abstract: A straddled vehicle engine unit including an internal combustion engine and a misfire detection device. The misfire detection device includes a crankshaft rotation speed fluctuation physical quantity acquisition unit and a misfire determination unit. The misfire determination unit includes first to third determination units. The first determination unit determines whether or not the crankshaft rotation speed fluctuation physical quantity acquired by the crankshaft rotation speed fluctuation physical quantity acquisition unit is greater than a set physical quantity determination reference. The second determination unit determines whether or not a fluctuation pattern constituted by a physical quantity and the crankshaft rotation speed fluctuation physical quantity acquired at least before or after the physical quantity falls within a set misfire pattern range.
    Type: Grant
    Filed: September 13, 2021
    Date of Patent: April 4, 2023
    Assignees: YAMAHA HATSUDOKI KABUSHIKI KAISHA, DENSO CORPORATION
    Inventors: Minoru Hotta, Yoshihiko Nonogaki, Kazuteru Iwamoto, Hisatoshi Kinoshita, Nobuyuki Kawashima
  • Patent number: 11600481
    Abstract: In accordance with the purpose(s) of the present disclosure, as embodied and broadly described herein, the disclosure, in one aspect, relates to a vibrating sharp edge spray ionization (VSSI) method suitable for coupling with a mass spectrometer, a VSSI method modified with a capillary suitable for use with continuous-flow separation methods such as liquid chromatography, and a VSSI method suitable for coupling with a capillary electrophoresis (CE) device in order to introduce the CE sample flow into a mass spectrometer. Also disclosed herein are devices for carrying out these methods and methods of making the same. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present disclosure.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: March 7, 2023
    Assignee: West Virginia University
    Inventors: Peng Li, Xiaojun Li, Stephen J. Valentine, Lisa Holland
  • Patent number: 11562477
    Abstract: An apparatus and method of measuring pattern uniformity, and a method of manufacturing a mask by using the measurement method are provided. The measurement apparatus includes a light source configured to generate and output light, a stage configured to support a measurement target, an optical system configured to transfer the light, output from the light source, to the measurement target supported on the stage, and a first detector configured to detect light reflected and diffracted by the measurement target, or diffracted by passing through the measurement target, wherein the first detector is configured to detect a pupil image of a pupil plane and to measure pattern uniformity of an array area of the measurement target on the basis of intensity of at least one of zero-order light and 1st-order light of the pupil image.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: January 24, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Minho Kim, Hakseung Han, Jiyoung Kim, Jinback Park
  • Patent number: 11538652
    Abstract: To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.
    Type: Grant
    Filed: November 15, 2019
    Date of Patent: December 27, 2022
    Assignee: FEI Company
    Inventors: Edwin Verschueren, Paul Tacx
  • Patent number: 11511799
    Abstract: A method for friction coefficient determination on elastically connected subsystems, in which an overall system includes multiple subsystems and at least two subsystems are connected to one another by an elastic connection. The elastic connection has at least one static friction state and a sliding friction state for prescribed external state variables, in which the overall system is excited with a vibration having a variable excitation amplitude at a defined excitation frequency. The excitation amplitude is varied, in which a phase difference between the vibration and a measured reaction torque together with the excitation amplitude are recorded as a function of time, in which no phase difference occurs in the static friction state and a phase difference of 180° occurs in the sliding friction state. In a first step, the excitation amplitude is increased until a transition in the phase difference from 0° to 180° indicates the transition from the static friction state to the sliding friction state.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: November 29, 2022
    Inventor: Georg Tardy-Tuch
  • Patent number: 11504194
    Abstract: Systems and methods according to present principles provide for three axis force sensing in a convenient and manufacturable way. In one implementation, a vibrating motor is attached at the fixed end of an anisotropic structure, such as a rod, which then vibrates in a circular motion. A monitor such as a 3-axis accelerometer is also attached to the anisotropic structure. The resulting motion is then mapped electronically for analysis. With no force applied, a circular motion is achieved. When a net force is applied to the free, vibrating end of the rod, the circular pattern which is traced out becomes distorted, e.g., progressively flattened into an ellipse, in a repeatable way which is directly proportional to the applied force. The axis of the applied force can be ascertained according to the direction in which the ellipse forms. Systems and methods according to present principles may be used in any application in which force sensing is needed, e.g., robotics, including robotic surgery.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: November 22, 2022
    Assignee: The Regents of the University of California
    Inventors: Michael Yip, Jun Zhang, Alex Tran, Winnie Kuang
  • Patent number: 11495783
    Abstract: A system for manufacturing an electrode for a secondary battery is disclosed herein. In an embodiment, the system for manufacturing the electrode for the secondary battery comprises a supply roller for supplying a collector having a long sheet shape; an electrode active material coating device for applying an electrode active material to a surface of the collector supplied by the supply roller to manufacture an unfinished electrode; a rolling roller for rolling a surface of the unfinished electrode and adjusting a thickness of the electrode active material to manufacture a finished electrode; and an electrode quality inspection device for inspecting quality of the electrode through a surface roughness value of the rolling roller, a surface roughness value of the surface of the electrode, and a rolling load value of the rolling roller.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: November 8, 2022
    Inventors: Nam Won Kim, Pil Kyu Park, Han Gab Song, Duck Joong Yun, Dae Hyun Kim, An Soo Jeong
  • Patent number: 11454648
    Abstract: A multi-functional scanning probe microscopy nanoprobe may include a cantilever, a tapered structure formed on a surface of the cantilever from a first material, and a nanopillar formed on an apex of the tapered structure from a second material. One of the first and second materials may exhibit ferromagnetism and the other may have greater electrical conductivity. A method of simultaneous multi-mode operation during scanning probe microscopy may include scanning a sample with the nanoprobe in contact with the sample to produce a current measurement indicative of an electric current flowing through the sample and a height measurement indicative of a topography of the sample and, thereafter, scanning the sample with the nanoprobe oscillating about a lift height derived from the height measurement to produce a deflection measurement (e.g. phase shift) indicative of a magnetic force between the sample and the nanoprobe.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: September 27, 2022
    Assignee: GETEC MICROSCOPY GMBH
    Inventors: Harald Plank, Jurgen Sattelkow, Robert Winkler, Christian Schwalb
  • Patent number: 11448663
    Abstract: This invention is directed to a pattern height information correction system which includes a contour line information of a pattern extracted from an acquired image including at least an AFM (atomic force microscope) module, a design information database that stores design information including at least layer information, and a computer system that divides the extracted pattern into regions based on the design information stored in the design information database relating to the extracted pattern and associates the divided regions with layer information, in which the computer system specifies a horizontal region designated as horizontal in advance from the divided regions, creates an approximated curved surface based on the specified horizontal region corresponding to the same layer information, and corrects height information of the extracted pattern using the approximated curved surface.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: September 20, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Kenji Yamasaki, Hiroyuki Shindo, Taeko Kashiwa, Ryugo Kagetani
  • Patent number: 11426241
    Abstract: A device for intraoperative, image-controlled navigation during surgical procedures in the spinal and/or adjacent thorax, pelvis or head regions, includes multiple non-x-ray detection devices to be distributed about at least one object to be operated on, and to intraoperatively capture real time image and position data, respectively including information relating to the outer contour of at least one subregion of the object, and to the subregion position relative to the respective detection device. Also, a position determining device for determining respective detection device position relative to a stationary reference system, and a data processing device operatively connected with the detection devices and the position determining device are designed to create, based on the respective detection device image and position data and the position determining device position data, a virtual real-time image, referenced with respect to the reference system, of the object, and displayed on an image display device.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: August 30, 2022
    Assignee: SpineMind AG
    Inventors: Dezsö János Jeszenszky, Tamás Fülöp Fekete
  • Patent number: 11402405
    Abstract: A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating an drive signal; a transducer configured to receive the drive signal for converting the drive signal into vibrational waves and coupling said vibrational waves into a stack comprising a sample for interaction with subsurface features within said sample; cantilever tip for contacting the sample for measuring surface displacement resulting from the vibrational waves to determine subsurface features; wherein the system includes a measurement device for measuring a measurement signal returning from the transducer during and/or in between the subsurface atomic force microscopy measurements.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: August 2, 2022
    Assignee: Nederlandse Oganisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Paul Louis Maria Joseph Van Neer, Maarten Hubertus Van Es, Hamed Sadeghian Marnani, Rutger Meijer Timmerman Thijssen, Martinus Cornelius Johannes Maria Van Riel
  • Patent number: 11402404
    Abstract: A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: August 2, 2022
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Jan Jacobus Benjamin Biemond, Lukas Kramer, Jasper Winters
  • Patent number: 11378652
    Abstract: Systems and methods implemented in a vehicle involve obtaining elevation information and determining a change in elevation of the vehicle. A method includes determining that the change in elevation indicates an increase or a decrease in the elevation of the vehicle. The method also includes adjusting, for a radar system of the vehicle, a range of detection or a detection threshold that defines a minimum reflected energy required to declare a detection based on the determining that the change in elevation indicates the increase or the decrease in the elevation of the vehicle.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: July 5, 2022
    Assignee: GM GLOBAL TECHNOLOGY OPERATIONS LLC
    Inventors: Praneeth Nelapati, Jeffrey A. Clark, Mark R. Hocevar
  • Patent number: 11372023
    Abstract: A device probe includes a primary probe arm and a subsequent probe arm with a slip plane spacing between the primary probe arm and subsequent probe arm. Each probe arm is integrally part of a probe base that is attachable to a probe card. During probe use on a semiconductive device or a semiconductor device package substrate, overtravel of the probe tip allows the primary and subsequent probe arms to deflect, while sufficient resistance to deflection creates a useful contact with an electrical structure such as an electrical bump or a bond pad.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: June 28, 2022
    Assignee: Intel Corporation
    Inventors: Joe Walczyk, Pooya Tadayon
  • Patent number: 11333700
    Abstract: According to one embodiment, an inspection apparatus of a semiconductor device includes a first probe configured to contact a first portion of the semiconductor device, a conductive member configured to oppose a second portion of the semiconductor device, and a detector configured to apply a first voltage between the semiconductor device and the first probe, to apply a conductive member voltage between the semiconductor device and the conductive member, and to detect a current flowing in the first probe. The first voltage has a first polarity of one of positive or negative when referenced to a potential of the semiconductor device. The conductive member voltage has a second polarity of the other of positive or negative when referenced to the potential of the semiconductor device.
    Type: Grant
    Filed: February 25, 2020
    Date of Patent: May 17, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Jumpei Tajima, Jongil Hwang, Shinya Nunoue
  • Patent number: 11334988
    Abstract: [Object] To provide an information processing apparatus, an information processing method, a program, and an observation system with which images of cells under observation are efficiently captured. [Solving Means] An information processing apparatus according to the present technology includes an image-capture controller unit, an image-capture area classifier unit, and an observation controller unit. The image-capture controller unit controls an image-capture mechanism to capture images of a culture vessel including a plurality of wells that house cells for each image-capture area. The image-capture area classifier unit applies image processing to the images captured by the image-capture mechanism and classifies the plurality of image-capture areas into a first image-capture area of which image-capturing is continued and a second image-capture area of which image-capturing is not continued on the basis of a result of the image processing.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: May 17, 2022
    Assignee: Sony Corporation
    Inventors: Masataka Shinoda, Tomoya Onuma, Takeshi Ohashi, Taro Azuma
  • Patent number: 11306450
    Abstract: Provided according to the present invention is a road surface profiler performance measuring instrument, which implements a virtual road surface state in order to assess the performance of a road surface profiler (A) including a distance measurement unit (10) and a flatness measurement unit (20), the measuring instrument comprising: a travel operation unit (100) for augmenting movement distance information (a) generated by the distance measurement unit (10); and a height adjustment unit (200) for changing height information (b) generated by the flatness measurement unit (20).
    Type: Grant
    Filed: December 28, 2017
    Date of Patent: April 19, 2022
    Assignee: KOREA EXPRESSWAY CORP.
    Inventors: Dueck Su Sohn, Jae Hoon Lee
  • Patent number: 11288809
    Abstract: A method of analyzing an atomic force microscope image includes receiving data related to an atomic force microscope image, where the data includes at least a first channel of data and a second channel of data relating to a first and second image data type. The method also includes identifying at least a first location of high contrast within the image using the first image data type using edge detection and identifying a first artifact within the image based on the identified first location of high contrast. The method also includes accessing the second image data type corresponding to the identified first location of the first artifact and determining a type of the first artifact by comparing the first image data type with the second image data type relating to the identified location of the first artifact.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: March 29, 2022
    Assignee: Seagate Technology LLC
    Inventors: Zhiyu Chen, Ramprasath A. Prakash
  • Patent number: 11268935
    Abstract: The document relates to a method of performing subsurface imaging of embedded structures underneath a substrate surface, using an atomic force microscopy system. The system comprises a probe with a probe tip, and a sensor for sensing a position of the probe tip. The method comprises the steps of: positioning the probe tip relative to the substrate: applying a first acoustic input signal to the substrate; applying a second acoustic input signal to the substrate; detecting an output signal from the substrate in response to the first and second acoustic input signal; and analyzing the output signal. The first acoustic input signal comprises a first signal component and a second signal component, the first signal component comprising a frequency below 250 megahertz and the second signal component either including a frequency below 2.5 megahertz or a frequency such as to provide a difference frequency of at most 2.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: March 8, 2022
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Daniele Piras, Paul Louis Maria Joseph van Neer, Maarten Hubertus van Es, Hamed Sadeghian Marnani
  • Patent number: 11262179
    Abstract: A surface texture measuring device according to the present invention includes a surface texture detecting component that outputs measurement results for a surface texture of a measurable object, where the measurement results are recognized as a change in the movement of a contact pin of a detector when tracing a surface of the measurable object with the contact pin; a posture detecting sensor that detects a measured posture, which is a posture at the time of measurement by the detector; a memory component that is preloaded with correction values corresponding to each of a plurality of postures; and a correcting component that compares the measured posture with the plurality of postures stored in the memory component, and corrects the measurement results using a correction value that corresponds to a posture equivalent to the measured posture.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: March 1, 2022
    Assignee: MITUTOYO CORPORATION
    Inventor: Shinsaku Abe
  • Patent number: 11255652
    Abstract: Apparatus can comprise a probe movable in a direction along a probe axis that intersects a determination axis and a clamping pin can be movable along a clamping pin axis that intersects a product support area of a base. In some embodiments, methods of determining a height of an edge portion of a product can comprise aligning the edge portion of the product along a determination axis and clamping the product to a base at a clamping location of the product positioned over a product support area. Methods can further comprise extending a probe to contact a location of the edge portion of the product while the product is clamped to the base. Methods can further comprise determining a height of the edge portion of the product based on the position of the probe contacting the edge portion of the product.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: February 22, 2022
    Assignee: CORNING INCORPORATED
    Inventors: Xiaorui Jin, Ping Ni, Shixian Tian
  • Patent number: 11249017
    Abstract: Many embodiments provide a high frequency near-field probe based on a tapered waveguide combined with at least one optically-pumped high frequency radiation source and at least one optically-probed high frequency radiation detector.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: February 15, 2022
    Assignee: The Regents of the University of California
    Inventors: Mona Jarrahi, Yen-Ju Lin
  • Patent number: 11237185
    Abstract: The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: February 1, 2022
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ulrich Matejka, Christof Baur
  • Patent number: 11215638
    Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.
    Type: Grant
    Filed: March 2, 2018
    Date of Patent: January 4, 2022
    Assignee: CAPRES A/S
    Inventor: Lior Shiv
  • Patent number: 11204311
    Abstract: The invention relates to a method for carrying out a test and measuring method on a flat test specimen (1), wherein a mechanical load is introduced into a test specimen surface (2) by means of a rotating engraving head (3) of an engraving device (4), wherein the engraving head (3) penetrates with a defined contact pressure at least into a layer system (5) applied to the test specimen (1), wherein the rotating engraving head (3) is moved along the test specimen surface (2) and relative to the test specimen (1) in order to create at least one engraving (6) on the test specimen surface (2) by plastic deformations and/or brittle chipping of the layer system (5), and wherein the at least one engraving (6) introduced into the test specimen surface (2) is measured using a photo-optical method in order to evaluate layer adhesion of the layer system (5) to the main body (11). The invention also relates to an engraving device (4) for carrying out such a method.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: December 21, 2021
    Assignee: Robert Bosch GmbH
    Inventors: Richard Braak, Ulrich May
  • Patent number: 11193913
    Abstract: A method of detecting sub-surface voids in a sample comprises positioning a probe adjacent to a first point on the sample, emitting an ultrasonic wave from the probe towards the sample, moving the probe towards the sample, measuring a shear force amplitude of a reflection of the ultrasonic wave at the probe as the probe moves towards the sample, creating an approach curve by plotting the measured shear force amplitude of the reflection of the ultrasonic wave as a function of a distance between the probe and the sample, and determining whether a sub-surface void exists at the first point on the sample based on a slope of the approach curve.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: December 7, 2021
    Assignees: TOYOTA MOTOR ENGINEERING & MANUFACTURING NORTH AMERICA, INC., THE OHIO STATE UNIVERSITY
    Inventors: Shailesh N. Joshi, Vishnu Baba Sundaresan, Vijay Venkatesh
  • Patent number: 11175306
    Abstract: Atomic force microscopy apparatus and method that enable observing charge generation transients with nanometer spatial resolution and nanosecond to picosecond time resolution, the timescale relevant for studying photo-generated charges in the world's highest efficiency photovoltaic films. The AFM apparatus includes an AFM, a light source for illumination of a sample operatively coupled to the AFM, a voltage source operatively coupled to the AFM, and a control circuitry operatively coupled to the light source and the voltage source. The AFM apparatus improves the time resolution and enables rapid acquisition of photocapacitance transients in a wide array of solar-energy-harvesting materials.
    Type: Grant
    Filed: May 10, 2018
    Date of Patent: November 16, 2021
    Assignee: CORNELL UNIVERSITY
    Inventors: John Marohn, Sarah Nathan, Ryan Dwyer
  • Patent number: 11175308
    Abstract: A chip carrier exchanging device receives a used chip carrier from a head of a scanning probe microscope that performs measurement by using the chip carrier configured such that a measurement means is attached to a carrier made of a magnetic material, and the chip carrier exchanging device supplies a new chip carrier to the head. The chip carrier exchanging device includes: a permanent magnet; a magnetism flow connecting unit made of a magnetic material that allow magnetism to flow therethrough, the magnetism flow connecting unit being configured to fix the chip carrier by exerting a magnetic effect on the carrier; and a drive unit configured to operate the permanent magnet to change magnetic force between the carrier and the magnetism flow connecting unit.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: November 16, 2021
    Assignee: PARK SYSTEMS CORP.
    Inventors: Sang-il Park, Yonghan Lee, Ahjin Jo
  • Patent number: 11162977
    Abstract: Techniques for operating an atomic force microscope, the atomic force microscope comprising a cantilever and configured to image a surface of a sample using a probe tip coupled to the cantilever, the techniques comprising using a controller to perform: obtaining, based on at least one intrinsic parameter of the cantilever, a first quality factor and a first free oscillation amplitude, wherein the cantilever exhibits only one stable oscillation state when oscillating at the first free oscillation amplitude and operating at the first quality factor; and controlling the cantilever to exhibit the only one stable oscillation state by controlling the cantilever to oscillate at a fixed frequency at or near a resonance frequency of the cantilever, oscillate at the first free oscillation amplitude, and operate at the first quality factor.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: November 2, 2021
    Assignee: Yale University
    Inventors: Udo Schwarz, Eric Altman, Hendrik Hölscher, Omur Erdinc Dagdeviren
  • Patent number: 11156632
    Abstract: A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: October 26, 2021
    Assignee: Bruker Nano GmbH
    Inventors: Detlef Knebel, Tilo Jankowski, Frederik Büchau
  • Patent number: 11156633
    Abstract: An AFM that suppress parasitic deflection signals is described. In particular, the AFM may use a cantilever with a probe tip that is offset along a lateral direction from a longitudinal axis of torsion of the cantilever. During AFM measurements, an actuator may vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode. Then, a measurement circuit may measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements. This lateral signal may correspond to a force between the sample and the probe tip. Moreover, a feedback circuit may maintain, relative to a threshold value: the force between the sample and the probe tip; and/or a deflection of the cantilever corresponding to the force. Next, the AFM may determine information about the sample based on the lateral signal.
    Type: Grant
    Filed: August 12, 2020
    Date of Patent: October 26, 2021
    Inventor: Ozgur Sahin
  • Patent number: 11158486
    Abstract: A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: October 26, 2021
    Assignee: JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
    Inventors: Yu Sun, Jun Chen, Ko Lun Chen, Tiancong Wang
  • Patent number: 11130159
    Abstract: The present invention relates to a scanning probe microscope. The scanning probe microscope can be configured to remove a polymeric material from a surface of a nanostructure. The scanning probe microscope includes a metal coated probe tip and a voltage source. The voltage source can be configured to apply a bias voltage between the probe tip and a sample. The bias voltage can be between 0.5 V and 2 V. The scanning probe microscope further includes a sample positioner configured to position the sample in relation to the probe tip and a system controller configured to control the scanning probe microscope.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: September 28, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventor: Pio Peter Niraj Nirmalraj
  • Patent number: 11125774
    Abstract: Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: September 21, 2021
    Assignee: Xallent LLC
    Inventor: Kwame Amponsah
  • Patent number: 11119115
    Abstract: A resonator defining a longitudinal axis that includes a mounting pad, a pad connector, at least one isolation mechanism, and a pair of elongated tines extending in the direction of the longitudinal axis. The isolation mechanism including an outer block defining a first outer end and a second outer end on opposite sides, an inner block defining a first inner end and a second inner end on opposite sides, and a pair of interconnect members, where each respective interconnect member of the pair of interconnect members connects the second outer end to the first inner end. The respective first ends of the pair of elongated tines being connected to the second inner end and the pad connector connects the mounting pad to the first outer end.
    Type: Grant
    Filed: August 27, 2018
    Date of Patent: September 14, 2021
    Assignee: Honeywell International Inc.
    Inventors: John Strehlow, Mitchell Novack
  • Patent number: 11114121
    Abstract: A slider design for a hard disk drive (HDD) features a shallow cavity adjacent to a leading edge that has patterns of sub-cavities of various shapes etched into its base to reduce its original surface area. The presence of these patterns of sub-cavities significantly reduces the probability that the slider will capture particles on the surface of a rotating disk and thereby reduces the corresponding probability of surface scratches that such captured particles inevitably produce.
    Type: Grant
    Filed: October 19, 2020
    Date of Patent: September 7, 2021
    Assignees: SAE Magnetics (H.K.) Ltd., Headway Technologies, Inc.
    Inventors: Ben Ng Kwun Pan, Ellis Cha