Abstract: In accordance with the purpose(s) of the present disclosure, as embodied and broadly described herein, the disclosure, in one aspect, relates to a vibrating sharp edge spray ionization (VSSI) method suitable for coupling with a mass spectrometer, a VSSI method modified with a capillary suitable for use with continuous-flow separation methods such as liquid chromatography, and a VSSI method suitable for coupling with a capillary electrophoresis (CE) device in order to introduce the CE sample flow into a mass spectrometer. Also disclosed herein are devices for carrying out these methods and methods of making the same. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present disclosure.

Abstract: An apparatus and method of measuring pattern uniformity, and a method of manufacturing a mask by using the measurement method are provided. The measurement apparatus includes a light source configured to generate and output light, a stage configured to support a measurement target, an optical system configured to transfer the light, output from the light source, to the measurement target supported on the stage, and a first detector configured to detect light reflected and diffracted by the measurement target, or diffracted by passing through the measurement target, wherein the first detector is configured to detect a pupil image of a pupil plane and to measure pattern uniformity of an array area of the measurement target on the basis of intensity of at least one of zero-order light and 1st-order light of the pupil image.

Abstract: To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.

Abstract: A method for friction coefficient determination on elastically connected subsystems, in which an overall system includes multiple subsystems and at least two subsystems are connected to one another by an elastic connection. The elastic connection has at least one static friction state and a sliding friction state for prescribed external state variables, in which the overall system is excited with a vibration having a variable excitation amplitude at a defined excitation frequency. The excitation amplitude is varied, in which a phase difference between the vibration and a measured reaction torque together with the excitation amplitude are recorded as a function of time, in which no phase difference occurs in the static friction state and a phase difference of 180° occurs in the sliding friction state. In a first step, the excitation amplitude is increased until a transition in the phase difference from 0° to 180° indicates the transition from the static friction state to the sliding friction state.

Abstract: Systems and methods according to present principles provide for three axis force sensing in a convenient and manufacturable way. In one implementation, a vibrating motor is attached at the fixed end of an anisotropic structure, such as a rod, which then vibrates in a circular motion. A monitor such as a 3-axis accelerometer is also attached to the anisotropic structure. The resulting motion is then mapped electronically for analysis. With no force applied, a circular motion is achieved. When a net force is applied to the free, vibrating end of the rod, the circular pattern which is traced out becomes distorted, e.g., progressively flattened into an ellipse, in a repeatable way which is directly proportional to the applied force. The axis of the applied force can be ascertained according to the direction in which the ellipse forms. Systems and methods according to present principles may be used in any application in which force sensing is needed, e.g., robotics, including robotic surgery.

Abstract: A system for manufacturing an electrode for a secondary battery is disclosed herein. In an embodiment, the system for manufacturing the electrode for the secondary battery comprises a supply roller for supplying a collector having a long sheet shape; an electrode active material coating device for applying an electrode active material to a surface of the collector supplied by the supply roller to manufacture an unfinished electrode; a rolling roller for rolling a surface of the unfinished electrode and adjusting a thickness of the electrode active material to manufacture a finished electrode; and an electrode quality inspection device for inspecting quality of the electrode through a surface roughness value of the rolling roller, a surface roughness value of the surface of the electrode, and a rolling load value of the rolling roller.

Abstract: A multi-functional scanning probe microscopy nanoprobe may include a cantilever, a tapered structure formed on a surface of the cantilever from a first material, and a nanopillar formed on an apex of the tapered structure from a second material. One of the first and second materials may exhibit ferromagnetism and the other may have greater electrical conductivity. A method of simultaneous multi-mode operation during scanning probe microscopy may include scanning a sample with the nanoprobe in contact with the sample to produce a current measurement indicative of an electric current flowing through the sample and a height measurement indicative of a topography of the sample and, thereafter, scanning the sample with the nanoprobe oscillating about a lift height derived from the height measurement to produce a deflection measurement (e.g. phase shift) indicative of a magnetic force between the sample and the nanoprobe.

Abstract: This invention is directed to a pattern height information correction system which includes a contour line information of a pattern extracted from an acquired image including at least an AFM (atomic force microscope) module, a design information database that stores design information including at least layer information, and a computer system that divides the extracted pattern into regions based on the design information stored in the design information database relating to the extracted pattern and associates the divided regions with layer information, in which the computer system specifies a horizontal region designated as horizontal in advance from the divided regions, creates an approximated curved surface based on the specified horizontal region corresponding to the same layer information, and corrects height information of the extracted pattern using the approximated curved surface.

Abstract: A device for intraoperative, image-controlled navigation during surgical procedures in the spinal and/or adjacent thorax, pelvis or head regions, includes multiple non-x-ray detection devices to be distributed about at least one object to be operated on, and to intraoperatively capture real time image and position data, respectively including information relating to the outer contour of at least one subregion of the object, and to the subregion position relative to the respective detection device. Also, a position determining device for determining respective detection device position relative to a stationary reference system, and a data processing device operatively connected with the detection devices and the position determining device are designed to create, based on the respective detection device image and position data and the position determining device position data, a virtual real-time image, referenced with respect to the reference system, of the object, and displayed on an image display device.

Abstract: A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating an drive signal; a transducer configured to receive the drive signal for converting the drive signal into vibrational waves and coupling said vibrational waves into a stack comprising a sample for interaction with subsurface features within said sample; cantilever tip for contacting the sample for measuring surface displacement resulting from the vibrational waves to determine subsurface features; wherein the system includes a measurement device for measuring a measurement signal returning from the transducer during and/or in between the subsurface atomic force microscopy measurements.

Abstract: A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.

Abstract: Systems and methods implemented in a vehicle involve obtaining elevation information and determining a change in elevation of the vehicle. A method includes determining that the change in elevation indicates an increase or a decrease in the elevation of the vehicle. The method also includes adjusting, for a radar system of the vehicle, a range of detection or a detection threshold that defines a minimum reflected energy required to declare a detection based on the determining that the change in elevation indicates the increase or the decrease in the elevation of the vehicle.

Abstract: A device probe includes a primary probe arm and a subsequent probe arm with a slip plane spacing between the primary probe arm and subsequent probe arm. Each probe arm is integrally part of a probe base that is attachable to a probe card. During probe use on a semiconductive device or a semiconductor device package substrate, overtravel of the probe tip allows the primary and subsequent probe arms to deflect, while sufficient resistance to deflection creates a useful contact with an electrical structure such as an electrical bump or a bond pad.

Abstract: According to one embodiment, an inspection apparatus of a semiconductor device includes a first probe configured to contact a first portion of the semiconductor device, a conductive member configured to oppose a second portion of the semiconductor device, and a detector configured to apply a first voltage between the semiconductor device and the first probe, to apply a conductive member voltage between the semiconductor device and the conductive member, and to detect a current flowing in the first probe. The first voltage has a first polarity of one of positive or negative when referenced to a potential of the semiconductor device. The conductive member voltage has a second polarity of the other of positive or negative when referenced to the potential of the semiconductor device.

Abstract: [Object] To provide an information processing apparatus, an information processing method, a program, and an observation system with which images of cells under observation are efficiently captured. [Solving Means] An information processing apparatus according to the present technology includes an image-capture controller unit, an image-capture area classifier unit, and an observation controller unit. The image-capture controller unit controls an image-capture mechanism to capture images of a culture vessel including a plurality of wells that house cells for each image-capture area. The image-capture area classifier unit applies image processing to the images captured by the image-capture mechanism and classifies the plurality of image-capture areas into a first image-capture area of which image-capturing is continued and a second image-capture area of which image-capturing is not continued on the basis of a result of the image processing.

Abstract: Provided according to the present invention is a road surface profiler performance measuring instrument, which implements a virtual road surface state in order to assess the performance of a road surface profiler (A) including a distance measurement unit (10) and a flatness measurement unit (20), the measuring instrument comprising: a travel operation unit (100) for augmenting movement distance information (a) generated by the distance measurement unit (10); and a height adjustment unit (200) for changing height information (b) generated by the flatness measurement unit (20).

Abstract: A method of analyzing an atomic force microscope image includes receiving data related to an atomic force microscope image, where the data includes at least a first channel of data and a second channel of data relating to a first and second image data type. The method also includes identifying at least a first location of high contrast within the image using the first image data type using edge detection and identifying a first artifact within the image based on the identified first location of high contrast. The method also includes accessing the second image data type corresponding to the identified first location of the first artifact and determining a type of the first artifact by comparing the first image data type with the second image data type relating to the identified location of the first artifact.

Abstract: The document relates to a method of performing subsurface imaging of embedded structures underneath a substrate surface, using an atomic force microscopy system. The system comprises a probe with a probe tip, and a sensor for sensing a position of the probe tip. The method comprises the steps of: positioning the probe tip relative to the substrate: applying a first acoustic input signal to the substrate; applying a second acoustic input signal to the substrate; detecting an output signal from the substrate in response to the first and second acoustic input signal; and analyzing the output signal. The first acoustic input signal comprises a first signal component and a second signal component, the first signal component comprising a frequency below 250 megahertz and the second signal component either including a frequency below 2.5 megahertz or a frequency such as to provide a difference frequency of at most 2.

Abstract: A surface texture measuring device according to the present invention includes a surface texture detecting component that outputs measurement results for a surface texture of a measurable object, where the measurement results are recognized as a change in the movement of a contact pin of a detector when tracing a surface of the measurable object with the contact pin; a posture detecting sensor that detects a measured posture, which is a posture at the time of measurement by the detector; a memory component that is preloaded with correction values corresponding to each of a plurality of postures; and a correcting component that compares the measured posture with the plurality of postures stored in the memory component, and corrects the measurement results using a correction value that corresponds to a posture equivalent to the measured posture.

Abstract: Apparatus can comprise a probe movable in a direction along a probe axis that intersects a determination axis and a clamping pin can be movable along a clamping pin axis that intersects a product support area of a base. In some embodiments, methods of determining a height of an edge portion of a product can comprise aligning the edge portion of the product along a determination axis and clamping the product to a base at a clamping location of the product positioned over a product support area. Methods can further comprise extending a probe to contact a location of the edge portion of the product while the product is clamped to the base. Methods can further comprise determining a height of the edge portion of the product based on the position of the probe contacting the edge portion of the product.

Abstract: Many embodiments provide a high frequency near-field probe based on a tapered waveguide combined with at least one optically-pumped high frequency radiation source and at least one optically-probed high frequency radiation detector.

Abstract: The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.

Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.

Abstract: The invention relates to a method for carrying out a test and measuring method on a flat test specimen (1), wherein a mechanical load is introduced into a test specimen surface (2) by means of a rotating engraving head (3) of an engraving device (4), wherein the engraving head (3) penetrates with a defined contact pressure at least into a layer system (5) applied to the test specimen (1), wherein the rotating engraving head (3) is moved along the test specimen surface (2) and relative to the test specimen (1) in order to create at least one engraving (6) on the test specimen surface (2) by plastic deformations and/or brittle chipping of the layer system (5), and wherein the at least one engraving (6) introduced into the test specimen surface (2) is measured using a photo-optical method in order to evaluate layer adhesion of the layer system (5) to the main body (11). The invention also relates to an engraving device (4) for carrying out such a method.

Abstract: A method of detecting sub-surface voids in a sample comprises positioning a probe adjacent to a first point on the sample, emitting an ultrasonic wave from the probe towards the sample, moving the probe towards the sample, measuring a shear force amplitude of a reflection of the ultrasonic wave at the probe as the probe moves towards the sample, creating an approach curve by plotting the measured shear force amplitude of the reflection of the ultrasonic wave as a function of a distance between the probe and the sample, and determining whether a sub-surface void exists at the first point on the sample based on a slope of the approach curve.

Abstract: Atomic force microscopy apparatus and method that enable observing charge generation transients with nanometer spatial resolution and nanosecond to picosecond time resolution, the timescale relevant for studying photo-generated charges in the world's highest efficiency photovoltaic films. The AFM apparatus includes an AFM, a light source for illumination of a sample operatively coupled to the AFM, a voltage source operatively coupled to the AFM, and a control circuitry operatively coupled to the light source and the voltage source. The AFM apparatus improves the time resolution and enables rapid acquisition of photocapacitance transients in a wide array of solar-energy-harvesting materials.

Abstract: A chip carrier exchanging device receives a used chip carrier from a head of a scanning probe microscope that performs measurement by using the chip carrier configured such that a measurement means is attached to a carrier made of a magnetic material, and the chip carrier exchanging device supplies a new chip carrier to the head. The chip carrier exchanging device includes: a permanent magnet; a magnetism flow connecting unit made of a magnetic material that allow magnetism to flow therethrough, the magnetism flow connecting unit being configured to fix the chip carrier by exerting a magnetic effect on the carrier; and a drive unit configured to operate the permanent magnet to change magnetic force between the carrier and the magnetism flow connecting unit.

Abstract: Techniques for operating an atomic force microscope, the atomic force microscope comprising a cantilever and configured to image a surface of a sample using a probe tip coupled to the cantilever, the techniques comprising using a controller to perform: obtaining, based on at least one intrinsic parameter of the cantilever, a first quality factor and a first free oscillation amplitude, wherein the cantilever exhibits only one stable oscillation state when oscillating at the first free oscillation amplitude and operating at the first quality factor; and controlling the cantilever to exhibit the only one stable oscillation state by controlling the cantilever to oscillate at a fixed frequency at or near a resonance frequency of the cantilever, oscillate at the first free oscillation amplitude, and operate at the first quality factor.

Abstract: An AFM that suppress parasitic deflection signals is described. In particular, the AFM may use a cantilever with a probe tip that is offset along a lateral direction from a longitudinal axis of torsion of the cantilever. During AFM measurements, an actuator may vary a distance between the sample and the probe tip along a direction approximately perpendicular to a plane of the sample stage in an intermittent contact mode. Then, a measurement circuit may measure a lateral signal associated with a torsional mode of the cantilever during the AFM measurements. This lateral signal may correspond to a force between the sample and the probe tip. Moreover, a feedback circuit may maintain, relative to a threshold value: the force between the sample and the probe tip; and/or a deflection of the cantilever corresponding to the force. Next, the AFM may determine information about the sample based on the lateral signal.

Abstract: A method discloses topography information extracted from scanning electron microscope (SEM) images to determine the atomic force microscope (AFM) image scanning speed at each sampling point or in each region on a sample. The method includes the processing of SEM images to extract possible topography features and create a feature metric map (step 1), the conversion of the feature metric map into AFM scan speed map (step 2), and performing AFM scan according to the scan speed map (step 3). The method enables AFM scan with higher scan speeds in areas with less topography feature, and lower scan speeds in areas that are rich in topography features.

Abstract: A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.

Abstract: The present invention relates to a scanning probe microscope. The scanning probe microscope can be configured to remove a polymeric material from a surface of a nanostructure. The scanning probe microscope includes a metal coated probe tip and a voltage source. The voltage source can be configured to apply a bias voltage between the probe tip and a sample. The bias voltage can be between 0.5 V and 2 V. The scanning probe microscope further includes a sample positioner configured to position the sample in relation to the probe tip and a system controller configured to control the scanning probe microscope.

Abstract: Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

Abstract: A resonator defining a longitudinal axis that includes a mounting pad, a pad connector, at least one isolation mechanism, and a pair of elongated tines extending in the direction of the longitudinal axis. The isolation mechanism including an outer block defining a first outer end and a second outer end on opposite sides, an inner block defining a first inner end and a second inner end on opposite sides, and a pair of interconnect members, where each respective interconnect member of the pair of interconnect members connects the second outer end to the first inner end. The respective first ends of the pair of elongated tines being connected to the second inner end and the pad connector connects the mounting pad to the first outer end.

Abstract: A slider design for a hard disk drive (HDD) features a shallow cavity adjacent to a leading edge that has patterns of sub-cavities of various shapes etched into its base to reduce its original surface area. The presence of these patterns of sub-cavities significantly reduces the probability that the slider will capture particles on the surface of a rotating disk and thereby reduces the corresponding probability of surface scratches that such captured particles inevitably produce.

Abstract: Glass-based articles are provided that exhibit improved drop performance. The relationship between properties attributable to the glass composition and stress profile of the glass-based articles are provided that indicate improved drop performance.

Abstract: Disclosed are a vehicle control unit (VCU) and an operation method thereof that calculate a speed variation of a vehicle based on input information, predict an average speed of the vehicle based on the calculated speed variation, generate a first speed profile based on the predicted average speed, and generate a second speed profile by applying speed noise information to the first speed profile.

Abstract: The present invention relates to a system for manufacturing an electrode for a secondary battery. The system for manufacturing the electrode for the secondary battery comprises a supply roller supplying a collector having a long sheet shape; an electrode active material coating device applying an electrode active material to a surface of the collector supplied by the supply roller to manufacture an unfinished electrode; a rolling roller rolling a surface of the unfinished electrode and adjusting a thickness of the electrode active material to manufacture a finished electrode; and an electrode quality inspection device inspecting quality of the electrode through a surface roughness value of the rolling roller and a surface roughness value of the electrode.

Abstract: The present application discloses a portable thermoelectric potential detector, which is small in size and easy to carry. A portable thermoelectric potential detector includes a test fixture for fixing a sample to be tested, a probe assembly unit for detecting the sample to be tested, and a collection and control unit for controlling detecting of the probe assembly and collecting a voltage signal of the probe assembly; the probe assembly unit includes two probe assemblies, each probe assembly includes a probe for loading on the surface of the sample to be tested and a linear motor for driving the probe to move and load on the surface of the sample to be tested; the collection and control unit is electrically connected to the linear motor, and is further configured to transmit a first control signal for controlling a moving distance and a loading force of the linear motor.

Abstract: An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.

Abstract: Systems and methods for removing particles from a surface of a substrate without damage to the substrate are provided. The disclosed systems/methods use polymeric microstructures, e.g., microfibrils, to remove micrometric and sub-micrometric particles from a substrate surface by establishing interfacial interactions with the particles that effectively debond the particles from the surface of the substrate. The disclosed systems/methods have wide ranging applications, including particle removal in art conservation processes, microelectronic applications, optical applications and any other field that stands to benefit from precise removal of particles/dust from a surface without damage to the surface.

Abstract: A method of positioning probe tips relative to pads includes: focusing on each of the probe tips in a first image as viewed by a microscope and collecting the coordinates of the corresponding probe tip relative to a first reference point in the first image; focusing on each of the pads in a second image as viewed by the microscope and collecting the coordinates of the corresponding pad relative to a second reference point in the second image, a relative position of the second reference point to the first reference point being predetermined; matching the pads with the probe tips when the quantity of the probe tips and the pads are equal while minimizing a maximum value of the distances calculated between each of the probe tips and the corresponding pad; and moving the probe tips to touch the pads with the maximum value minimized.

Abstract: A scanning probe microscope including a measurement light-casting section configured to cast light onto a reflective surface provided on a movable end of a cantilever; a light-detecting section configured to detect reflected light from the reflective surface with a light-receiving surface having a larger area than the incident area of the reflected light, the light-receiving surface divided into a plurality of areas; a deflection-calculating section configured to determine at preset intervals, the amount of deflection of the cantilever based on the proportion of the amounts of light incident on the plurality of areas while the distance between the base end and the sample is changed; a determining section configured to determine whether or not the amount of change in the deflection of the cantilever is equal to or larger than a previously determined threshold Kth.

Abstract: A ceramic circuit board comprises: a ceramic substrate with a 1.0 mm thickness or less including a first surface and a second surface, the first surface including a first area and a second area; a first metal plate joined to the first area; and a second metal plate joined to the second surface. The second area has a first waviness profile along a first side of the first surface, the first waviness profile having one extreme value or less. The second area has a second waviness profile along a second side of the first surface, the second waviness profile has not less than two nor more than three extreme values.

Abstract: The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.

Abstract: Techniques for determining a characteristic of a sample using an atomic force microscope including a cantilever having a probe attached thereto, including positioning the sample within a cell and sliding the probe over a sliding zone of the sample within the cell. Lateral and vertical deformations of the cantilever are detected using the atomic force microscope as the probe is slid over the sliding zone. One or more characteristics are determined based on the detected lateral deformations of the cantilever.

Abstract: A needle-shaped body protrudes from a cantilever made of Si. Furthermore, the rear face of the cantilever is coated with aluminum (first metal) having a Fermi level higher than that of Si. The cantilever is dipped into an aqueous silver nitride solution containing the ions of Ag serving as a second metal. The electrons of Si flow out to the aqueous silver nitride solution due to the existence of the aluminum, and Ag nanostructures are precipitated at the tip end of the needle-shaped body. A probe for tip-enhanced Raman scattering in which the Ag nanostructures are fixed to the tip end of the needle-shaped body is manufactured. The sizes and shapes of the Ag nanostructures can be controlled properly by adjusting the concentration of the aqueous silver nitride solution and the time during which the cantilever is dipped into the aqueous silver nitride solution.

Abstract: The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement. A scanner comprising: an outer frame; a first inner frame disposed inside the outer frame; a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction; a second inner frame disposed inside the first inner frame; a wide range X actuator for moving the second inner frame relative to the first inner frame in the X direction orthogonal to the Y direction; a third inner frame disposed inside the second inner frame; a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction; a movable foundation disposed inside the third inner frame; and a narrow range X actuator for moving the movable foundation relative to the third inner frame in the X direction.

Abstract: There is provide a method for controlling a shape measuring apparatus that synchronize an acceleration/deceleration changing timing of a velocity pattern with a control sampling cycle, and prevents a control lag. Based on a shape of a movement path set based on preliminarily-obtained shape data of an object to be measured, a velocity pattern for a probe to move along the movement path. It is determined whether a velocity changing timing of the velocity pattern is synchronized with a control sampling cycle of a shape measuring apparatus. When the velocity changing timing of the velocity pattern is not synchronized with the control sampling cycle, the velocity pattern is corrected such that the velocity changing timing of the velocity pattern is synchronized with the control sampling cycle of the shape measuring apparatus.

Abstract: To avoid applying overload on both a probe and a sample surface, and to reduce time for measuring irregular shapes on the sample surface in performing an intermittent measurement method, provided is a scanning probe microscope including: a cantilever having a probe attached thereto, the scanning probe microscope being configured to scan a sample surface by intermittently bringing the probe into contact with the sample surface; and a control device configured to perform a first operation of bringing the probe and the sample surface into contact with each other, and a second operation of separating the probe and the sample surface from each other after the first operation. The control device executes the second operation by thermally deforming the cantilever.