Roughness Patents (Class 73/105)
  • Patent number: 9395212
    Abstract: A differential displacement sensor is disclosed that includes a pair of aligned stationary carbon nanostructures and a moveable carbon nanostructure. The moveable carbon nanostructure is configured to engage and move with respect to the pair of aligned stationary carbon nanostructures throughout a range of motion. Circuitry applies an excitation voltage across the pair of aligned stationary carbon nanostructures and the moveable carbon nanostructure to generate an output voltage proportional to a displacement of the moveable carbon nanostructure with respect to the pair of aligned stationary carbon nanostructures throughout the range of motion. Graphene sheets or carbon nanotubes may form the moveable carbon nanostructure or the pair of aligned stationary carbon nanostructures.
    Type: Grant
    Filed: March 23, 2014
    Date of Patent: July 19, 2016
    Inventor: Tyson York Winarski
  • Patent number: 9394851
    Abstract: The apparatus includes a housing, a compression chamber disposed in the housing and having at least a first interface operable to vary a volume of the compression chamber, an expansion chamber disposed in the housing and having a second interface operable to vary a volume of at least the expansion chamber, and a thermal regenerator in fluid communication with each of the compression chamber and the expansion chamber. The thermal regenerator is operable to alternatively receive thermal energy from gas flowing in a first direction through the regenerator and to deliver the thermal energy to gas flowing in a direction opposite to the first direction through the regenerator. The compression chamber, the expansion chamber, and the regenerator together define a working volume for containing a pressurized working gas.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: July 19, 2016
    Assignee: Etalim Inc.
    Inventors: Thomas Walter Steiner, Briac Medard de Chardon, Takao Kanemaru
  • Patent number: 9365217
    Abstract: An exemplary apparatus and associated method are disclosed for analyzing surface degradation. The apparatus can include a sensor configured to acquire images of a surface; and a processing device configured to correlate the acquired images to a geo-coordinate, to extract at least one property of a surface abnormality identified in at least one of the acquired images, and to generate trend data based on changes over time in the at least one property of the surface abnormality identified in the images, which are correlated to a common geo-coordinate.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: June 14, 2016
    Assignee: BOOZ ALLEN HAMILTON INC.
    Inventors: James Bridgers, Tony Chiang
  • Patent number: 9366694
    Abstract: A multimode local probe microscope having a resonator, a first electrode, and a second electrode, an excitation source adapted to generate mechanical resonance in the resonator, a metal tip fastened to the resonator, movement mechanism for imparting relative movement between the local probe and a sample and adapted to bring the end of the tip to within a distance Z lying in the range 0 to 100 nm, and detector for detecting at least one electrical signal representative of friction forces at the terminals of said electrodes. The metal tip is electrically connected to the output second electrode and the microscopy apparatus includes amplifier and filter for amplifying and filtering signals relating to the friction forces and to the tunnelling current in a single electronic circuit, and configured for regulating the distance Z between the end of the tip and the surface of the sample.
    Type: Grant
    Filed: January 13, 2014
    Date of Patent: June 14, 2016
    Assignees: Ecole Polytechnique, Centre National de la Recherche Scientifique
    Inventors: Marc Chaigneau, Akli Karar, Bernard Drevillon, Razvigor Ossikovski
  • Patent number: 9347969
    Abstract: A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: May 24, 2016
    Assignee: OLYMPUS CORPORATION
    Inventors: Nobuaki Sakai, Yoshitsugu Uekusa
  • Patent number: 9331606
    Abstract: A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
    Type: Grant
    Filed: September 9, 2011
    Date of Patent: May 3, 2016
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Sebastien Hentz, Philippe Andreucci, Eric Colinet, Laurent Duraffourg, Sebastien Labarthe
  • Patent number: 9329153
    Abstract: An electrical conductor and antenna are positioned in a fixed relationship to one another. Relative lateral movement is generated between the electrical conductor and a homogenous material while maintaining the electrical conductor at a fixed distance from the homogenous material. The antenna supplies a time-varying magnetic field that causes the electrical conductor to resonate and generate harmonic electric and magnetic field responses. Disruptions in at least one of the electric and magnetic field responses during this lateral movement are indicative of a lateral location of a subsurface anomaly. Next, relative out-of-plane movement is generated between the electrical conductor and the homogenous material in the vicinity of the anomaly's lateral location. Disruptions in at least one of the electric and magnetic field responses during this out-of-plane movement are indicative of a depth location of the subsurface anomaly. A recording of the disruptions provides a mapping of the anomaly.
    Type: Grant
    Filed: March 12, 2013
    Date of Patent: May 3, 2016
    Assignee: United States of America as represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Stanley E. Woodard, Bryant D. Taylor
  • Patent number: 9308641
    Abstract: Magnetic tweezers have two jaws formed by thin magnetic films connected together via a hinge. The magnetic tweezers include a nanoparticle formed by a stack of thin magnetic films. A process for fabricating the magnetic tweezers by techniques used in the fabrication of microelectronic components is presented.
    Type: Grant
    Filed: August 3, 2011
    Date of Patent: April 12, 2016
    Assignee: COMMISSARIAT A L'ENERGIE ET AUX ENERGIES ALTERNATIVES
    Inventors: Bernard Dieny, Philippe Sabon, Hélène Joisten
  • Patent number: 9304072
    Abstract: A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: April 5, 2016
    Assignee: Hysitron Incorporated
    Inventors: Yunje Oh, Syed Amanula Syed Asif, Oden Warren
  • Patent number: 9297632
    Abstract: A method for estimating a roughness R of a surface is provided, including: measuring, during relative movement of at least one force sensor in a direction roughly parallel to the surface, at least one force Fortho perceived by the at least one force sensor in a direction which is roughly orthogonal to said direction of movement, and parallel to said surface; calculating at least one statistical parameter P representative of variations of the value of the measured at least one force Fortho; and estimating the roughness R by calculating R=f(P), where f(P) is a function of the at least one statistical parameter P having at least some coefficients with values that are dependent on characteristics of the at least one force sensor used, and on a force with which the at least one force sensor is applied on said surface during the relative movement.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: March 29, 2016
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventors: Christelle Godin, Loris Olmos
  • Patent number: 9297827
    Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.
    Type: Grant
    Filed: October 29, 2012
    Date of Patent: March 29, 2016
    Inventors: Roger B. Proksch, Jason Bemis
  • Patent number: 9286687
    Abstract: A system and method for image-processing that will facilitate automatically analyzing and estimating atomic force microscopy (AFM) images and magnetic force microscopy (MFM) images of fabricated nanomagnetic arrays to identify the magnetization states of the nanomagnets in the array. The system and method will automatically estimate the magnetization states of nanomagnetics disks into one of a plurality of energy minimum magnetization state configurations and provide an annotated image of the results of the estimation.
    Type: Grant
    Filed: August 25, 2014
    Date of Patent: March 15, 2016
    Assignee: University of South Florida
    Inventors: Ravi Panchumarthy, Dinuka K. Karunaratne, Sudeep Sarkar, Sanjukta Bhanja
  • Patent number: 9268017
    Abstract: Systems and method for near-field millimeter wave imaging are provided, in particular, near-field millimeter wave imaging systems and methods that enable sub-wavelength resolution imaging by scanning objects with sub-wavelength probe elements and capturing and measuring phase and intensity of reflected energy to generate images.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: February 23, 2016
    Assignee: International Business Machines Corporation
    Inventors: Aydin Babakhani, Duixian Liu, Scott K. Reynolds, Mihai A. Sanduleanu
  • Patent number: 9250053
    Abstract: A surface roughness measuring unit according to the present invention includes a contact pin unit having a contact pin and a displacement detector, the contact pin being provided so as to project and retract through a through-hole of a skid and scanning and moving along a surface of a work piece, the displacement detector detecting displacement of the contact pin in a direction perpendicular to the work piece surface; a driver moving the contact pin unit forward and backward along the surface of the work piece; and a joint coupling the contact pin unit and the driver to a measurement head holder of a coordinate measuring system. The surface roughness measuring unit further includes a contact detector that detects contact of the skid on the surface of the work piece.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: February 2, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Kotaro Hirano, Nobuyuki Hama, Masanori Arai, Sadayuki Matsumiya
  • Patent number: 9244095
    Abstract: The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device (100) for controlling a scanning probe microscope.
    Type: Grant
    Filed: December 12, 2012
    Date of Patent: January 26, 2016
    Assignee: UNIVERSITAT BASEL
    Inventors: Marija Plodinec, Marko Loparic, Roderick Y H Lim
  • Patent number: 9222958
    Abstract: Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: December 29, 2015
    Assignee: INFINITESIMA LIMITED
    Inventors: Andrew Humphris, Bin Zhao
  • Patent number: 9212960
    Abstract: Apparatuses and methods, consistent with embodiments herein, are directed to an apparatus having a stretchable substrate and a plurality of nanostructures. While the plurality of nanostructures are adhered to the stretchable substrate, the stretchable substrate and the nanostructures are stretched and/or operate in a stretched mode in which the nanostructures are characterized by a resistance corresponding to a strain imparted due to the stretching. When the substrate is relaxed or the stretching otherwise lessened, the nanostructures continue to be characterized as a function of the strain and the corresponding resistance, with buckled segments of the nanostructures being adhered along a surface of the substrate.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: December 15, 2015
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Darren Lipomi, Michael Vosgueritchian, Chee-Keong Tee, Sondra Hellstrom, Zhenan Bao
  • Patent number: 9207060
    Abstract: A micro-electrical discharge machine based metrology system including a control unit with a sensing circuit and a micro-electrical discharge machine with a sensing probe. The micro-electrical discharge machine based metrology system capable of sensing dimensions of a work piece at pico-joule energy levels. The micro-electrical discharge machine based metrology system is a non-contact, non-destructive, and on-board metrology system capable of in-process quality assurance/quality control.
    Type: Grant
    Filed: May 2, 2012
    Date of Patent: December 8, 2015
    Inventors: Jerry Mraz, Jonathan Montgomery
  • Patent number: 9207167
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: December 8, 2015
    Assignee: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Patent number: 9202479
    Abstract: An apparatus includes a heat assisted magnetic recording (HAMR) head that comprises a write coil, a write coil heatsink, and a spacer. The write coil heatsink is thermally coupled to the write coil. The spacer lies intermediate the write coil and the write coil heatsink.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: December 1, 2015
    Assignee: Seagate Technology LLC
    Inventors: James Gary Wessel, Raul Horacio Andruet, Chris Rea
  • Patent number: 9194727
    Abstract: A method of calibrating a mechanical instrument assembly includes reading a memory device coupled with a mechanical testing instrument, the mechanical testing instrument having one or more mechanical characteristics with values unique to the mechanical testing instrument, and reading includes reading of one or more calibration values based on the one or more mechanical characteristic values. The method further includes calibrating the mechanical instrument assembly according to the one or more calibration values. The mechanical testing instrument is coupled with the mechanical instrument assembly.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: November 24, 2015
    Assignee: Hysitron, Inc.
    Inventors: Christopher David Young, Daniel Paul Carlson, Lucas Paul Keranen, Jeffrey P. Schirer
  • Patent number: 9162778
    Abstract: The invention relates to a method for spatially manipulating a microscopic object including providing a cantilever (12) having a tip with an opening (19) and a microchannel (15) extending through the cantilever (12) in its longitudinal direction. A suspension means is provided for holding the cantilever (12) and spatially moving the cantilever along a predetermined spatial path. A pressurizing means is provided for applying a predetermined pressure to the microchannel (15) and the cantilever (12) is moved with its tip to the microscopic object to be spatially manipulated. At least a part of the microscopic object is picked up with said cantilever (12) by reducing the pressure within the microchannel (15) relative to the pressure outside the tip of the cantilever (12). The microscopic object is then moved along a predetermined spatial path by means of the cantilever (12).
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: October 20, 2015
    Assignee: ETH Zürich
    Inventors: Michael Gabi, Janos Voeroes, Stefan Pablo Doerig, Pascal Behr, Philipp Stiefel, Thomaso Zambelli, Julia Vorholt-Zambelli
  • Patent number: 9157722
    Abstract: A measurement probe, for a co-ordinate positioning apparatus such as a machine tool, is described that includes a stylus holder that is deflectably mounted to a probe housing. One or more sensors are provided for sensing deflection of the stylus holder relative to the probe housing. A processor is included for producing a trigger signal when the deflection sensed by the one or more sensors meets a trigger condition, such as a deflection threshold. The probe also includes an accelerometer for measuring acceleration of the measurement probe. The trigger condition applied by the processor is alterable, during use, in response to the acceleration measured by the accelerometer. In this manner, false triggering can be suppressed.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: October 13, 2015
    Assignee: RENISHAW PLC
    Inventors: Michael John Wooldridge, Peter Kenneth Hellier, Robert Charles D'Olier Umfreville
  • Patent number: 9157845
    Abstract: A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis.
    Type: Grant
    Filed: May 2, 2011
    Date of Patent: October 13, 2015
    Assignee: Hysitron Incorporated
    Inventors: Yunje Oh, Syed Amanula Syed Asif, Oden L. Warren
  • Patent number: 9142237
    Abstract: A disk drive includes a drive housing, a storage disk, a head suspension assembly, an actuator assembly and a controller. The storage disk has a disk surface including a data region that stores data. In one embodiment, the head suspension assembly includes a slider and an attitude adjuster. The slider has an inner side edge, an outer side edge and a data transducer. The attitude adjuster can adjust a roll attitude and/or a pitch attitude of the slider relative to the disk surface. The slider moves between a first position wherein the data transducer is not positioned directly over the data region and a second position wherein the data transducer is positioned directly over the data region during one of a load operation and an unload operation. The controller controls an electrical signal to the attitude adjuster during one of the load operation and the unload operation to dynamically adjust the attitude of the slider.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: September 22, 2015
    Assignee: MAXTOR CORPORATION
    Inventors: Bernhard Hiller, David M. Sigmond
  • Patent number: 9134341
    Abstract: A heterodyne detection technique for highly localized IR spectroscopy based on an AFM. A pulsed IR source illuminates a sample and causes contact resonance of an AFM probe, which is a function of localized absorption. The probe is operated in intermittent contact mode and is therefore oscillated at a resonance frequency. A secondary oscillation is mixed in to the probe oscillation such that the sum of the secondary oscillation and the IR source pulse frequency is near another harmonic of the probe. A mixing effect causes measurable probe response at the other harmonic allowing data to be taken away from the pulse frequency.
    Type: Grant
    Filed: March 16, 2012
    Date of Patent: September 15, 2015
    Inventors: Craig Prater, Kevin Kjoller
  • Patent number: 9129621
    Abstract: A microwave-assisted recording head comprises a main pole configured to emit a recording magnetic field for affecting a magnetic medium, the main pole serving as a first electrode and having a front portion at an air bearing surface (ABS) and a rear portion extending from the front portion. A microwave oscillator is positioned on a trailing side surface of the main pole. The trailing-side surface of the main pole forms a flat plane along the front and rear portions and is inclined with respect to a leading side surface at the front portion. The head body is inclined at an acute angle to the ABS, such that an acute angle, between 10 and 30 degrees, is formed between the trailing side surface of the main pole and the ABS.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: September 8, 2015
    Assignee: HGST Netherlands B.V.
    Inventors: Hisashi Kimura, Kenji Sugiura, Yuta Udo, Katsuro Watanabe
  • Patent number: 9121683
    Abstract: A measurement probe, for a co-ordinate positioning apparatus such as a machine tool, is described that includes a stylus holder that is deflectably mounted to a probe housing. One or more sensors are provided for sensing deflection of the stylus holder relative to the probe housing. A processor is included for producing a trigger signal when the deflection sensed by the one or more sensors meets a trigger condition, such as a deflection threshold. The probe also includes an accelerometer for measuring acceleration of the measurement probe. The trigger condition applied by the processor is alterable, during use, in response to the acceleration measured by the accelerometer. In this manner, false triggering can be suppressed.
    Type: Grant
    Filed: January 31, 2014
    Date of Patent: September 1, 2015
    Assignee: RENISHAW PLC
    Inventors: Michael John Wooldridge, Peter Kenneth Hellier, Robert Charles D'Olier Umfreville
  • Patent number: 9114247
    Abstract: A method and system for ultrasound treatment utilizing a multi-directional transducer to facilitate treatment, such as therapy and/or imaging or other tissue parameter monitoring, in two or more directions. In accordance with an exemplary embodiment, a multi-directional transducer comprises at least two transduction elements configured to provide for ultrasound energy, such as radiation, acoustical energy, heat energy, imaging, positional information and/or tissue parameter monitoring signals in two or more directions. The transduction elements can comprise various materials for providing ultrasound energy or radiation, such as piezoelectric materials, with and without matching layers. In addition, the transduction elements can be configured for substantially uniform, focused and/or defocused radiation patterns, as well as for single, multiple-element and/or multiple-element array configurations.
    Type: Grant
    Filed: November 10, 2011
    Date of Patent: August 25, 2015
    Assignee: Guided Therapy Systems, LLC
    Inventors: Peter G. Barthe, Michael H. Slayton
  • Patent number: 9116167
    Abstract: An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
    Type: Grant
    Filed: March 31, 2015
    Date of Patent: August 25, 2015
    Assignee: Bruker Nano, Inc.
    Inventors: Chanmin Su, Paul Silva, Lin Huang, Bede Pittenger, Shuiqing Hu
  • Patent number: 9110093
    Abstract: Provided is a sealed AFM cell in which measurement accuracy does not decrease and the types of observation liquids are not limited. A sealed AFM cell according to the present invention includes: a cantilever including a probe; a sample holder for fixing the sample; a scanner for moving the sample holder; a lid part which holds the cantilever so as to position the probe near a measurement surface of the sample; and a main body part which is a component for holding the scanner and positioned opposite the lid part with the sample in between, in which the lid part and the main body part are joined via a sealing liquid to seal the observation liquid inside a space formed by the lid part, the main body part, and the sealing liquid, the sealing liquid being different from the observation liquid and not in contact with the observation liquid.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: August 18, 2015
    Assignee: NATIONAL UNIVERSITY CORPORATION KANAZAWA UNIVERSITY
    Inventors: Takeshi Fukuma, Hitoshi Asakawa, Yukitoshi Katagiri
  • Patent number: 9103803
    Abstract: Technologies are generally described for identifying defects in saturable absorbers, such as graphene, by the saturable property of decreasing light absorbance with increasing light intensity. For example, a graphene coated substrate may be imaged twice under two distinct incident intensities. At a gap in the graphene, the substrate may reflect light proportional to the incident intensities. The graphene may show a non-linear increase in reflected light as the intensity of illumination increases. A difference between the two incident intensities may reveal the gap in the graphene. Any suitable imaging technique may be employed such as confocal microscopy or linear scanning. The imaging may be scaled up for high volume automated inspection.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: August 11, 2015
    Assignee: Empire Technology Development LLC
    Inventor: Thomas A. Yager
  • Patent number: 9097737
    Abstract: A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: August 4, 2015
    Assignee: Oxford Instruments Asylum Research, Inc.
    Inventors: Mario Viani, Roger Proksch, Maarten Rutgers, Jason Cleveland, Jim Hodgson
  • Patent number: 9097738
    Abstract: Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: August 4, 2015
    Assignee: UT-Battelle, LLC
    Inventors: Stephen Jesse, Sergei V. Kalinin
  • Patent number: 9097603
    Abstract: The vibration exciter system with a feedback control unit based on an optical linear encoder includes a vibration exciter, a signal generator and a power amplifier. The exciter system further comprises an optical linear encoder converting the displacement of moving component of the exciter into A/B pulse with a phase difference of 90° , a filtering, shaping and level translator unit converting the A/B pulse into standard pulse with standard shape and level, a subdivider and orientation recognizer unit refining standard pulse and recognizing the moving orientation, an analog converter unit converting refined standard pulse into analogue signal that reflects the displacement of the moving component. The standard signal outputted by the signal generator and the converted analogue signal are inputted into a subtracter as the minuend and subtrahend respectively. The output of the subtracter is inputted into the power amplifier and then into the vibration exciter as a driving signal.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: August 4, 2015
    Assignees: ZHEJIANG UNIVERSITY, NATIONAL INSTITUTE OF METROLOGY P. R. CHINA
    Inventors: Wen He, Chunyu Wang, Runjie Shen, Shushi Jia, Mei Yu, Mingde Ma
  • Patent number: 9079338
    Abstract: A method of preparing a tip for lithography, includes forming a mold having at least one recess; disposing a first polymer in the recess to form an apex of the tip,; curing the first polymer in the recess; and disposing a second polymer in the recess to form a base of the tip. The Young's Modulus of the second polymer is lower than the Young's Modulus of the first polymer. The tip structure for lithography includes a substrate, and a layered structure including a tip having an apex of a first polymer and a base of a second polymer. The first polymer is less resiliently deformable than the second polymer.
    Type: Grant
    Filed: May 9, 2012
    Date of Patent: July 14, 2015
    Assignee: THE HONG KONG POLYTECHNIC UNIVERSITY
    Inventors: Zijian Zheng, Youde Shen, Xuechang Zhou, Xie Zhuang
  • Patent number: 9069007
    Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
    Type: Grant
    Filed: May 28, 2013
    Date of Patent: June 30, 2015
    Assignees: Oxford Instruments PLC, Oxford Instruments AFM Inc
    Inventor: Roger B. Proksch
  • Patent number: 9057740
    Abstract: A system for analyzing a sample is described. The system for analyzing a sample includes a probe and a controller circuit. The controller circuit configured to control a movement of the probe to at least a first position and a second position on the sample based on navigation data. In response to the movement of the probe, the controller circuit is configured to adjust a force of the probe on the sample at the first position from a first force value to a second force value and the force of the probe on the sample from a third force value to a fourth force value at said second position on the sample. And, the controller circuit is configured to acquire sample data with the probe at the first position on the sample.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: June 16, 2015
    Assignee: DCG SYSTEMS, INC.
    Inventors: Vladimir A. Ukraintsev, Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders
  • Patent number: 9052339
    Abstract: A single electron tunneling force spectroscopy (SETFS) system (10) can perform a series of surface potential charge measurements at an array of voltages (V) and tip-sample heights (Z). These measurements are combined with a tunneling model that includes the dependence of the tunneling probability on trap state depth and energy. Simultaneous measurement of the depth and energy of individual trap states in a sample, such as a dielectric film, with an atomic scale of spatial resolution can be achieved. When combined with two-dimensional trap state imaging, such techniques provide for three-dimensional imaging of electronic defect states with atomic scale spatial resolution.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: June 9, 2015
    Assignee: The University of Utah Research Foundation
    Inventors: Clayton Covey Williams, Jon Paul Johnson
  • Patent number: 9052337
    Abstract: Height control systems and/or methods are implemented for dynamic force tunneling microscopy and single electron tunneling force spectroscopy to improve their accuracy.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: June 9, 2015
    Assignee: The University of Utah Research Foundation
    Inventors: Clayton Covey Williams, Jon Paul Johnson
  • Patent number: 9046492
    Abstract: A method for achieving measurable sample heating in the vicinity of a probe microscope tip using Stimulated Raman Spectroscopy. Two laser sources, preferably in the UV visible or near IR illuminate the sample, preferably in overlapping diffraction limited spots. At least one of the sources is swept through a frequency range such that the difference frequency corresponds to IR spectral regions of interest. Selective Absorption by differing sample materials at the difference frequency causes measurable sample heating detectable by the probe tip related to IR spectral absorption bands. Thus very high spatial resolution IR spectroscopy may be achieved.
    Type: Grant
    Filed: November 3, 2012
    Date of Patent: June 2, 2015
    Assignee: Anasys Instruments Corp.
    Inventor: Craig Prater
  • Patent number: 9032797
    Abstract: A sensor device including a mechanical oscillator, an excitation unit which is configured to excite the mechanical oscillator to perform a mechanical oscillation within a non-linear range at a varying excitation frequency, and an evaluation unit configured to detect a jump, arising as a result of anharmonicity, in a resonance oscillation of the mechanical oscillation of the mechanical oscillator.
    Type: Grant
    Filed: February 10, 2012
    Date of Patent: May 19, 2015
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Andreas Goehlich, Hoc Khiem Trieu, Robert Klieber, Carole Jonville
  • Patent number: 8997258
    Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: March 31, 2015
    Assignees: National Institute of Standards and Technology, University of Maryland, College Park
    Inventors: Vladimir Aksyuk, Kartik Srinivasan, Houxun Miao, Ivo W. Rangelow, Thomas Michels
  • Patent number: 8991246
    Abstract: A gear measuring method allows multi-point continuous measurement using a touch probe and is capable of reducing measuring time compared with known methods. For example, a base action for moving a sensing element of a touch probe along an ideal tooth form line of a workpiece (gear; W) or a tooth form line determined by calculation by controlling the movement of the sensing element and the rotation of the workpiece (W) and, in addition, an oscillation action for receiving first signals (ON signals or OFF signals) from the touch probe by bringing the sensing element into contact with the tooth surface of the workpiece during the base action and subsequently for receiving second signals (OFF signals or ON signals) from the touch probe by moving the touch probe in a direction along which the sensing element is separated from the tooth surface of the workpiece are continuously performed.
    Type: Grant
    Filed: September 15, 2010
    Date of Patent: March 31, 2015
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Yoko Hirono, Takahide Tokawa, Naohiro Otsuki, Yoshihiro Nose
  • Patent number: 8997259
    Abstract: An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
    Type: Grant
    Filed: November 12, 2012
    Date of Patent: March 31, 2015
    Assignee: Bruker Nano, Inc.
    Inventors: Chanmin Su, Paul Silva, Lin Huang, Bede Pittenger, Shuiqing Hu
  • Patent number: 8969088
    Abstract: A substrate mimicking intercellular lipids in stratum corneum consisting of a substrate and a lipid membrane formed on the substrate, wherein the lipid membrane is formed from ceramide, palmitic acid and cholesterol, and the ceramide, palmitic acid and cholesterol are present at a mass ratio of 20-70%:10-60%:20-40% (ceramide:palmitic acid:cholesterol).
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: March 3, 2015
    Assignee: Shiseido Company, Ltd.
    Inventors: Takuya Saiwaki, Takashi Oka, Yuichiro Mori, Toyoko Imae, Xiaojuan Wang, Masaki Ujihara
  • Patent number: 8959986
    Abstract: An apparatus having a roughness sensing system and a roughness measurement sensor, wherein a slide element and a probe tip come to operation, and method of use thereof. The slide element is arranged on an extreme end of a probe pin in the form of a scan-slide element. The probe tip is integrated into the probe pin, and the distance between the scan-slide element and the probe tip is predetermined. The roughness sensing system is a 1D-, 2D- or 3D-scanning system having a parallelogram configuration. The apparatus further has a serving device which enables moving the probe pin together with the scan-slide element and the probe tip jointly over a surface to be scanned.
    Type: Grant
    Filed: June 17, 2011
    Date of Patent: February 24, 2015
    Assignee: Klingelnberg AG
    Inventor: Georg Mies
  • Patent number: 8959661
    Abstract: An atomic force microscope probe comprising a piezo-electric resonator provided with two electrodes and coated with an insulating layer and a tip attached on the coated resonator and functionalized with at least one group or molecule of interest is disclosed. The disclosed technology also relates to preparation method and to different uses thereof.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: February 17, 2015
    Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Jérôme Polesel-Maris, Thomas Berthelot, Pascal Viel
  • Patent number: 8955161
    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ?, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: February 10, 2015
    Assignee: Bruker Nano, Inc.
    Inventor: Gregory O. Andreev
  • Patent number: 8951652
    Abstract: A substrate for a magnetic recording medium having a disc shape with a central hole is provided in which the surface roughness of the principal surface of the substrate is 1 angstrom or less in terms of root mean square roughness (Rq) when a space period (L) of an undulation in the circumferential direction is in the range 10 to 1,000 ?m, and in which when a component in the vertical axis direction of a line segment Z connecting a point A with the space period (L) of 10 ?m and a point B with the space period (L) of 1,000 ?m in a curve S marked on a double logarithmic graph which is obtained by analyzing the surface roughness using a spectrum and in which the horizontal axis is set to the space period (L) (?m) and the vertical axis is set to the power spectrum density (PSD) (k·angstrom2·?m) (where k is a constant) is defined as H and a displacement at which the component in the vertical axis direction of the curve S is the maximum with respect to the line segment Z is defined as ?H, a value (P) expressed by (?
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: February 10, 2015
    Assignee: Showa Denko K.K.
    Inventors: Koji Yukimatsu, Yukihisa Matsumura, Yoshihito Sueoka, Junichi Kishimoto