Hollow Circular-shaped Inertial Element Patents (Class 73/504.13)
  • Patent number: 11073393
    Abstract: A control system includes sensor controllers that are each coupled to a respective set of electrodes of a CVG sensor system via respective sensor channels. A first portion of the sensor controllers provides a sinusoidal forcer signal on the respective sensor channel in response to digital clock and feedback signals to provide oscillation of a resonator of the CVG sensor system. A second portion of the sensor controllers monitors a capacitive pickoff voltage associated with the resonator on the respective sensor channel to generate a digital pickoff signal. A gyroscope controller generates the digital feedback signal in response to the digital pickoff signal from the second portion of the sensor controllers to provide the digital feedback signal and the digital clock signal to the first portion of the sensor controllers and determines a rotation about the CVG sensor system based on the digital feedback signal or the digital pickoff signal.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: July 27, 2021
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventor: Juergen Karl Peter Flamm
  • Patent number: 11027479
    Abstract: Methods for fabricating three-dimensional microstructures are provided. The method includes disposing a reflow material on a mold, heating the reflow material, and creating a pressure gradient across the reflow material to reflow the material towards a bottom surface of the mold. The mold includes a molding region, a boundary region, and a thermal-isolating region disposed therebetween. The molding region includes a cavity and a projection projecting upwards from a bottom surface of the cavity. The thermal-isolating region includes at least one pocket formed adjacent to and along a perimeter of the cavity of the molding region. During heating, the temperature of the molding region is higher than that of the boundary region and the thermal-isolating region controls the thermal conductivity and mass therebetween. The material reflows towards the bottom surface of the cavity and the protrusion helps shapes the reflow material to form a substantially symmetrical three-dimensional microstructure.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: June 8, 2021
    Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Khalil Najafi, Jae Yoong Cho
  • Patent number: 10670400
    Abstract: A vibrating structure gyroscope includes an annular resonator arranged to vibrate in a plane in response to electrostatic driving forces and a set of capacitive drive electrodes arranged to apply a voltage creating an electrostatic driving force to excite a primary cos n? resonance along a primary axis at a primary frequency fP, such that Coriolis forces, resulting from an angular rate applied about an out-of-plane axis, induce a secondary cos n? resonance along a secondary axis at a secondary frequency fS. The gyroscope also includes digitally-controlled first and second sets to creating a static electrostatic balancing.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: June 2, 2020
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventors: Kevin Townsend, Andrew Kazer
  • Patent number: 10584967
    Abstract: One example includes a hemispherical resonator gyroscope (HRG). The HRG includes a sensing system comprising a plurality of electrodes arranged in a symmetrical annular arrangement about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes. The plurality of electrodes are configured to provide an indication of rotation about a sensitive axis of the HRG. The HRG also includes a controller configured to generate the plurality of forcer signals in a phase-disparate manner to provide the substantially periodic motion in a vibration pattern such that a ratio of the plurality of electrodes and the vibration pattern is a non-integer number, and to measure the rotation about the sensitive axis of the HRG in response to the plurality of forcer signals.
    Type: Grant
    Filed: October 18, 2016
    Date of Patent: March 10, 2020
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Alexander Trusov, David M. Rozelle, David D. Lynch
  • Patent number: 10532943
    Abstract: Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: January 14, 2020
    Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
    Inventors: Khalil Najafi, Jae Yoong Cho, Ali Darvishian, Guohong He, Behrouz Shiari, Tal Nagourney
  • Patent number: 10527422
    Abstract: The present invention discloses a micro three-dimensional shell resonator gyroscope, a method for fabricating a micro shell resonator, a method for fabricating a composite structure substrate, and a method for fabricating a micro three-dimensional shell resonator gyroscope. A micro three-dimensional shell resonator gyroscope includes a packaging shell cover, a micro shell resonator, and a composite structure substrate. The micro shell resonator includes a shell, a single-ended column, and a flange. The composite structure substrate includes a non-planar electrode, a conductive structure, an electrical isolation part, and a main body part. The non-planar electrode includes a driving electrode, a detection circuit, an annular exciting electrode, and an isolation electrode.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: January 7, 2020
    Assignee: SOUTHEAST UNIVERSITY
    Inventors: Jintang Shang, Bin Luo
  • Patent number: 10488199
    Abstract: A gyroscope comprising a resonant structure and a plurality of transducers configured to drive a vibrational mode in the resonant structure and detect vibrations of the resonant structure, wherein at least one of the plurality of transducers comprises a piezoelectric mono crystal.
    Type: Grant
    Filed: December 17, 2015
    Date of Patent: November 26, 2019
    Assignee: Innalabs Limited
    Inventors: Jose Beitia, Alain Renault, Christopher Fell
  • Patent number: 10393525
    Abstract: Aspects of the present disclosure relate to microelectromechanical systems (MEMS) and methods for fabricating MEMS. In some embodiments, the system includes a resonator and a support stem. In some embodiments, the resonator is a hemisphere. The system can further include a front-side or back-side DC contact. The system can further include a levitation support, by which the resonator is virtually levitated from a substrate. In some embodiments, the resonator can be suitable for use in a microhemispherical resonator gyroscope Aspects of the present disclosure also relate to methods for fabricating axisymmetric resonators, including resonators for use in microhemispherical resonator gyroscopes.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: August 27, 2019
    Assignee: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Peng Shao, Xin Gao, Vahid Tavassoli
  • Patent number: 10132632
    Abstract: The present invention relates to a micromachined hemispherical resonance gyroscope, which includes a resonant layer, wherein the resonant layer comprises a hemispherical shell whose top point of the hemispherical shell is its anchor point; several silicon hemispherical electrodes are arranged around the hemispherical shell, the silicon hemispherical electrodes include driving electrodes, equilibrium electrodes, shielded electrodes and signal detection electrodes or quadrature correction electrodes, the hemispherical shell and the several silicon spherical electrodes which surround the hemispherical shell constitute several capacitors.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: November 20, 2018
    Assignee: SUZHOU WENZHIXIN MICRO SYSTEM TECHNOLOGY CO., LTD
    Inventor: Shuwen Guo
  • Patent number: 10119820
    Abstract: A gyroscope sensor is provided that comprises a resonator including a stem extending along an axis and a shell extending from the stem. The shell includes a hemispherical portion extending from the stem and a cylindrical portion extending from the hemispherical portion. The cylindrical portion includes an outer surface and an inner surface and terminates at an axial end surface that is perpendicular to the outer surface and the inner surface. The resonator further comprises an inner cylindrical substrate that extends along an axis and includes a set of inner electrodes arranged annularly about the axis, and a passage that extends along the axis through a central region of the inner cylindrical substrate. The stem extends through the passage to position the inner cylindrical substrate within the inner surface of the cylindrical portion of the resonator forming gaps between the set of inner electrodes and the inner surface.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: November 6, 2018
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: David M. Rozelle, Youngmin Albert Choi, James M. Pavell
  • Patent number: 10053838
    Abstract: A coupler assembly for coupling a work implement to a work vehicle includes a coupler mounted to the work vehicle and to the work implement. The coupler assembly further includes at least one force sensor mounted to the coupler and configured to collect force data associated with force transferred by the coupler assembly from the work implement to the work vehicle. The coupler assembly includes at least one acceleration sensor mounted to the coupler and configured to collect acceleration data associated with acceleration of the coupler assembly during operation. The acceleration sensor and the force sensor are configured to be coupled to a controller that receives and processes the force data and the acceleration data to determine a mass of a load of the work implement.
    Type: Grant
    Filed: March 4, 2016
    Date of Patent: August 21, 2018
    Assignee: DEERE & COMPANY
    Inventors: Michael G. Kean, Eric R. Anderson
  • Patent number: 9970764
    Abstract: A Coriolis-based bulk acoustic wave gyroscope includes a center-supported resonating element with capacitively-coupled drive, sense, and control electrodes. The resonating element has a first substantially solid or perforated region which is connected to the center-support by a second region characterized by a plurality of spokes or beams. When operating in a resonance state, the first region undergoes a bulk acoustic mode of vibration while the second region undergoes a flexural mode of vibration. Energy losses associated with the flexural mode of vibration reduce the overall quality factor (Q) at high resonance frequencies creating a large bandwidth and a fast response time without needing vacuum.
    Type: Grant
    Filed: August 31, 2010
    Date of Patent: May 15, 2018
    Assignee: Georgia Tech Research Corporation
    Inventors: Farrokh Ayazi, Wang-kyung Sung, Mohammad Faisal Zaman
  • Patent number: 9885576
    Abstract: An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.
    Type: Grant
    Filed: September 12, 2014
    Date of Patent: February 6, 2018
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Junichi Honda
  • Patent number: 9866172
    Abstract: A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.
    Type: Grant
    Filed: March 28, 2014
    Date of Patent: January 9, 2018
    Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Clark T.-C. Nguyen, Lingqi Wu
  • Patent number: 9851373
    Abstract: A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.
    Type: Grant
    Filed: December 9, 2013
    Date of Patent: December 26, 2017
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Katsumi Fujimoto, Toshimaro Yoneda, Takuo Hada, Hideya Horiuchi
  • Patent number: 9718681
    Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.
    Type: Grant
    Filed: February 1, 2016
    Date of Patent: August 1, 2017
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Stephen E. Luce, Anthony K. Stamper
  • Patent number: 9709400
    Abstract: A gyroscope control circuit for a vibratory gyroscope system includes an open-loop RSP control circuit and a closed-loop CSP control circuit. The gyroscope control circuit optionally may include a Q compensation circuit to compensate for variations in gyroscope sensitivity due to variations in resonator signal path Q. The resonator signal path and the Coriolis signal path may have transduction factors that are proportional to each other such that sensitivity of the gyroscope varies directly with resonator signal path quality factor (Q).
    Type: Grant
    Filed: April 7, 2015
    Date of Patent: July 18, 2017
    Assignee: Analog Devices, Inc.
    Inventor: Ronald Alan Kapusta
  • Patent number: 9605964
    Abstract: A gyroscope system may include a disc resonator gyroscope including a plurality of electrodes embedded in the disc resonator gyroscope. The electrodes may be configured for at least applying a drive voltage and a tuning voltage to the disc resonator gyroscope and for sensing operating parameters of the disc resonator gyroscope. The gyroscope system may also include a quadrature stabilization circuit configured to measure a quadrature error and generate a quadrature regulating voltage based on the quadrature error. The tuning voltage may be adjusted by the quadrature regulating voltage to cancel an effect of voltage flicker before being applied to a tuning electrode of the disc resonator gyroscope.
    Type: Grant
    Filed: January 3, 2014
    Date of Patent: March 28, 2017
    Assignee: The Boeing Company
    Inventors: Howard H. Ge, Anthony Dorian Challoner
  • Patent number: 9599471
    Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: March 21, 2017
    Assignee: Analog Devices, Inc.
    Inventors: Gaurav Vohra, Jeffrey A. Gregory
  • Patent number: 9551577
    Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: January 24, 2017
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Jaakko Ruohio, Anssi Blomqvist
  • Patent number: 9494426
    Abstract: A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: November 15, 2016
    Assignee: Atlantic Inertial Systems Limited
    Inventors: Michael Durston, Takafumi Moriguchi, Ryuta Araki
  • Patent number: 9476710
    Abstract: Coriolis vibratory gyroscope includes a thin-walled resonator, fastened centrally on a stem located within the resonator; with 4nk holes in a wall of the resonator and arranged around the stem, where “k” is integer, “n” is order of vibration modes, and the angle between adjacent holes is “?/2nk”. The stem is rotationally symmetric and is fastened on a base; electrodes are arranged on the wall for excitation and measurement of vibration modes, with leads passing from the electrodes through the holes; the base has a seating for the resonator stem, and leads pass from the outside of the base through it, the leads being electrically-insulated and sealed relative to the base; the leads which pass through the base are connected to the leads which pass from the electrodes, allowing signals to pass from outside the base, through the base, through the holes in the resonator wall and to the electrodes.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: October 25, 2016
    Assignee: Innalabs Limited
    Inventors: Valery Valerianovich Chikovani, Yurii Alekseevich Yatzenko
  • Patent number: 9417067
    Abstract: A method for simultaneously identifying an inertial rate of a gyroscope and a bias for a gyroscope. A set of equations for an output of the gyroscope is identified using a model for motion of the gyroscope. The set of equations includes a set of parameters for the bias of the gyroscope. The inertial rate of the gyroscope and a set of values for the set of parameters for the bias of the gyroscope are identified using the set of equations and measurements generated by the gyroscope for a plurality of drive angles.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: August 16, 2016
    Assignee: THE BOEING COMPANY
    Inventors: Yong Liu, Anthony Dorian Challoner
  • Patent number: 9410806
    Abstract: A circuit for processing signals from a gyroscope includes a first that generates an in-phase demodulated signal and a second demodulator that generates a quadrature-phase demodulated signal with reference to in-phase and quadrature-phase modulated signals, respectively, from the gyroscope. The circuit includes a digital processor that receives the demodulated in-phase and quadrature phase signals from the demodulators and generates an output signal corresponding to a rotation of the gyroscope along a predetermined axis with reference to the in-phase demodulated signal and the quadrature-phase demodulated signal to remove a portion of the quadrature-phase signal from the in-phase signal.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: August 9, 2016
    Assignee: Robert Bosch GmbH
    Inventor: Chinwuba D. Ezekwe
  • Patent number: 9354061
    Abstract: A rotation sensor system is presented. The system includes a rotating frame configured to be mounted on a gimbal and configured to be driven for controlled rocking motion about a predetermined axis of the frame, and a proof mass assembly mounted on the rotating frame. The proof mass assembly includes one or more proof mass elements, each mounted to be driven into controlled movement with respect to the predetermined axis along a certain path, such that a distance of each proof mass element from the axis corresponding to a direction of the rocking motion of the frame, thereby affecting a moment of inertia of the rotating frame.
    Type: Grant
    Filed: April 1, 2012
    Date of Patent: May 31, 2016
    Assignee: RAMOT AT TEL AVIV UNIVERSITY LTD.
    Inventors: Viacheslav Krylov, Assaf Ya'Akobovitz
  • Patent number: 9341476
    Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.
    Type: Grant
    Filed: May 13, 2011
    Date of Patent: May 17, 2016
    Assignee: SILICON SENSING SYSTEMS LIMITED
    Inventors: Kevin Townsend, Michael Durston
  • Patent number: 9322655
    Abstract: An axially symmetrical Coriolis vibratory gyroscope includes a thin-walled resonator with a hemispherical or cylindrical or toroidal form, the resonator being fixed at the center to a support and being formed with openings in that wall of the resonator which is located around the support, the number of openings being determined on the basis of the formula 4nk, where k is an integer, n is the order of oscillation modes, wherein the support has a symmetrical form along the longitudinal axis and is fixed to a base, electrodes are positioned on the wall of the resonator or next to the resonator for exciting and measuring two oscillation modes, a constant amplitude of one of the modes is maintained and a secondary oscillation mode which is sensitive to Coriolis forces is monitored, and the base is provided with a seat for the support of the resonator and with electrically insulated hermetically sealed leads which pass outwards via the base and through the openings in of the resonator.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: April 26, 2016
    Assignee: INNALABS LIMITED
    Inventors: Valery Valerianovich Chikovani, Yurii Alekseevich Yatzenko
  • Patent number: 9310201
    Abstract: A silicon MEMS gyroscope is described having a ring or hoop-shaped resonator. The resonator is formed by a Deep Reactive Ion Fitch technique and is formed with slots extending around the circumference of the resonator on either side of the neutral axis of the resonator. The slots improve the Quality Factor Q of the gyroscope without affecting the resonant frequency of the resonator.
    Type: Grant
    Filed: September 5, 2011
    Date of Patent: April 12, 2016
    Assignee: ATLANTIC INERTIAL SYSTEMS LIMITED
    Inventor: Christopher Paul Fell
  • Patent number: 9303995
    Abstract: The invention relates to an gyroscopic sensor comprising a sensitive element designed to vibrate; an electrode carrier capable of carrying excitation/detection electrodes for exciting the sensitive element and for detecting the vibration of the sensitive element; and elements for supporting the electrode carrier. The supporting elements comprise a base made of a material having a density of less than 5 kg/dm3, and the square root of the ratio of Young's modulus divided by said density is greater than 9 GPa1/2.dm3/2/kg?1/2.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: April 5, 2016
    Assignee: Sagem Defense Securite
    Inventors: Jean-Baptiste Eudier, Christophe Maerky, Thierry Bonjour
  • Patent number: 9296133
    Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.
    Type: Grant
    Filed: March 20, 2013
    Date of Patent: March 29, 2016
    Assignee: The Regents of the University of California
    Inventors: Andrei M. Shkel, Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov
  • Patent number: 9207080
    Abstract: Method of angular measurement by a resonator associated with a vibration setting device and with a vibration detector, which are linked to a processing circuit through which there travel control signals and measurement signals, the method comprising the steps of digitizing the measurement signals and of deducing an angular measurement from the measurement signals. The method comprises the steps of performing a spectral analysis of the digitized measurement signals so as to detect harmonic distortions therein and correcting at least some of the signals travelling through the processing circuit so as to attenuate the non-linearities.
    Type: Grant
    Filed: March 23, 2011
    Date of Patent: December 8, 2015
    Assignee: SAGEM DEFENSE SECURITE
    Inventor: Vincent Ragot
  • Patent number: 9176158
    Abstract: An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further includes primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function includes a signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.
    Type: Grant
    Filed: March 3, 2011
    Date of Patent: November 3, 2015
    Assignee: SILICON SENSING SYSTEMS LIMITED
    Inventors: Kevin Townsend, Michael Durston, Douglas Robert Sitch
  • Patent number: 9151612
    Abstract: A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.
    Type: Grant
    Filed: January 6, 2010
    Date of Patent: October 6, 2015
    Assignee: SUMITOMO PRECISION PRODUCTS Co., Ltd.
    Inventors: Ryuta Araki, Takashi Ikeda, Hiroshi Nishida, Takafumi Moriguchi, Yasuyuki Hirata
  • Patent number: 9146109
    Abstract: A driving device of a driving mass of a gyroscope comprises a differential read amplifier to supply first signals indicating a rate of oscillation of the driving mass; a variable-gain amplifier to supply second signals to drive the driving mass based on said first signals; a voltage elevator providing a power supply signal to the variable-gain amplifier; a controller generating a first control signal to control a gain of the variable-gain amplifier; and a first comparator, coupled to the variable-gain amplifier, generating a second control signal based on a comparison of the first control signal with a threshold, the second control signal controlling at least one among: (i) the variable-gain amplifier in such a way that the gain is increased only during the start-up phase of the gyroscope, and (ii) the voltage elevator in such a way that the power supply signal is increased only during the start-up phase.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: September 29, 2015
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Davide Magnoni, Marco Garbarino, Andrea Donadel
  • Patent number: 9103675
    Abstract: A hemispherical resonator includes a bell fastened to a base. The base carries a main electrode extending facing an annular edge of the bell, and at least one guard electrode adjacent to the main electrodes. An electrically conductive layer covers at least part of the inside surface, the annular edge of the bell, and covers a portion of an outside surface of the bell adjacent to the annular edge thereof.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: August 11, 2015
    Assignee: SAGEM DEFENSE SECURITE
    Inventor: Paul Vandebeuque
  • Patent number: 9068833
    Abstract: The invention relates to a gyroscopic sensor comprising a sensitive element designed to vibrate; an electrode carrier capable of carrying electrodes for exciting the sensitive element and electrodes for detecting the vibration of the sensitive element; and support rods designed to support the electrode carrier, characterized in that the support rods have at least one bulged end.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: June 30, 2015
    Assignee: Sagem Defense Securite
    Inventor: Paul Vandebeuque
  • Patent number: 8991247
    Abstract: A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: March 31, 2015
    Assignee: The Regents of the University of California
    Inventors: Alexander Trusov, Sergei Zotov, Andrei Shkel
  • Patent number: 8991249
    Abstract: A vibrating gyroscope has a base and a resonator. The resonator includes a body of generally cylindrical shape terminating in a face. The resonator is capable of vibrating according to a first vibration mode having antinodes distributed on n axes, and a second vibration mode having antinodes distributed on n other axes. The face of the resonator has two piezoelectric assemblies on each axis of the first and of the second vibration modes. Each piezoelectric assembly has at least one piezoelectric element capable of exciting the resonator in vibration and at least one piezoelectric element capable of detecting vibrations of the resonator at the same time.
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: March 31, 2015
    Assignee: Sagem Defense Securite
    Inventor: Alain Jeanroy
  • Patent number: 8919199
    Abstract: One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.
    Type: Grant
    Filed: December 1, 2011
    Date of Patent: December 30, 2014
    Assignee: Analog Devices, Inc.
    Inventors: Michael W. Judy, John A. Geen, Houri Johari-Galle
  • Patent number: 8910520
    Abstract: A vibrating gyroscope having a base, and a resonator. The resonator includes a body of generally cylindrical shape terminating in a distal face to the side opposite the base. The face includes at least one through hole, a plurality of piezoelectric elements placed in contact with the resonator, vibration control and processing modules arranged at least in part on the base, and at least one electrical connection passing through the body of the resonator via the hole, and electrically connecting the modules of the base and the plurality of piezoelectric elements for controlling and measuring the vibration of the resonator.
    Type: Grant
    Filed: October 27, 2011
    Date of Patent: December 16, 2014
    Assignee: Sagem Defense Securite
    Inventor: Alain Jeanroy
  • Publication number: 20140360266
    Abstract: The present invention provides an angular rate gyro in which a bell-shaped vibrator having nonuniform thickness, axially symmetric and multi curved surface combined structural features is used as a sensitive element. The angular rate gyro is composed of the bell-shaped vibrator, a vibrator fixing shaft, a vibrator base, an airtight hood, a housing and a circuit system. The bell-shaped vibrator includes a bell shoulder having a hemispheric shell structure, a bell waist having a cylindrical shell structure and a bell lip having a hyperboloidal shell structure. The bell-shaped vibrator, the base and a central shaft are mechanically and fixedly connected together to be formed into an integral core having sensitive gyratory effect. A circuit system is used to control vibration forms of the bell-shaped vibrator, perform signal processing and solve the applied angular rate.
    Type: Application
    Filed: September 2, 2013
    Publication date: December 11, 2014
    Applicants: Beijing Institute of Technology, Beijing Information Science & Technology University
    Inventors: Zhong Su, MengYin Fu, Qing Li, ZhiHong Deng, JunFang Fan, Ning Liu, Hong Liu
  • Patent number: 8833161
    Abstract: In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.
    Type: Grant
    Filed: April 20, 2011
    Date of Patent: September 16, 2014
    Assignee: Sand 9, Inc.
    Inventors: Guiti Zolfagharkhani, Jan H. Kuypers, Alexei Gaidarzhy, Andrew Sparks
  • Publication number: 20140230549
    Abstract: A spring system (74) links a pair of drive masses (30, 32) of a MEMS device (72). The spring system (74) includes stiff beams (76, 78, 80, 82) oriented to form a parallelogram arrangement (84). The beams are oriented diagonal to a drive direction (56) of the masses (30, 32). Diagonally opposing corners (86, 88) of the parallelogram arrangement (84) are coupled to the drive masses (30, 32). A spring (90) is coupled to a corner (94) and a spring (92) is coupled to a diagonally opposing corner (96) of the parallelogram arrangement. The springs (90, 92) are interconnected with a sense frame (34) surrounding the drive masses. The beams and side springs are stiff to substantially prevent in-phase motion (66) of the drive masses. However, rotationally compliant flexures (102, 104, 106, 108), allow the arrangement (84) to collapse and expand to enable anti-phase motion (60) of the drive masses.
    Type: Application
    Filed: February 19, 2013
    Publication date: August 21, 2014
    Inventors: Andrew C. McNeil, Gary G. Li
  • Patent number: 8806939
    Abstract: A micro-scale hemispherical resonator gyroscope includes a hemispherical resonator with a plurality of masses positioned around the periphery of the hemispherical resonator. At least some of the masses may be made of a heavy metal, such as tungsten, gold, platinum, or lead, and may be positioned at points of maximum deflection or velocity of the resonator. The hemispherical resonator may have a 2 mm diameter and a ring down time of at least 500 seconds.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: August 19, 2014
    Assignee: Custom Sensors & Technologies, Inc.
    Inventor: Chris Painter
  • Patent number: 8803624
    Abstract: A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: August 12, 2014
    Assignee: NXP, B.V.
    Inventor: Kim Phan Le
  • Patent number: 8756994
    Abstract: A vibrating gyro device includes a piezoelectric substrate, an upper main surface electrode, a lower main surface electrode, and a support substrate. The piezoelectric substrate is provided with inner open holes and outer open holes. Side edge surfaces of a frame-shaped region in the X-Y plane are exposed to the interior of the frame through the inner open holes. Side edge surfaces of the frame-shaped region are exposed to the exterior of the frame through the outer open holes. Drive detection electrodes arranged within the upper main surface electrode are bonded to the upper main surface of the frame-shaped region and together with the lower main surface electrode are electromechanically coupled with deformation of the frame-shaped region in the Z-axis direction and deformation of the frame-shaped region in a direction parallel or substantially parallel to the X-Y plane. The support substrate provides a vibration space for the frame-shaped region and supports the piezoelectric substrate.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: June 24, 2014
    Assignee: Murata Manufacturing Co., Ltd.
    Inventors: Toshimaro Yoneda, Tsuguji Kambayashi
  • Patent number: 8661650
    Abstract: A method of making a handheld, electromechanical device useful in mammalian body-care includes the steps of: a) forming a one-piece housing having a single opening defined by a rim; b) assembling a unitary insert; c) inserting the unitary insert through the single opening of the housing; d) removably applying a cover having an exterior surface to close the opening of the one-piece housing; and e) attaching the unitary insert to at least one of the one-piece housing and the removable cover. The rim of the one-piece housing circumscribes a rim area, and the one-piece housing has a projected area that is substantially larger than the rim area. The unitary insert is dimensioned to be insertable through the opening defined by the rim, and it has a frame having disposed thereon electromechanical elements interconnected in an electrical circuit. The cover closes off the opening of the one-piece housing.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: March 4, 2014
    Assignee: Johnson & Johnson Consumer Companies, Inc.
    Inventors: Jorge M. Da Silva, Emanuel P. Morano, John Rytel
  • Patent number: 8631702
    Abstract: One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: January 21, 2014
    Assignee: Honeywell International Inc.
    Inventors: Robert D. Horning, Burgess R. Johnson, Robert Compton, Eugen Cabuz
  • Patent number: 8616056
    Abstract: A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
    Type: Grant
    Filed: January 3, 2011
    Date of Patent: December 31, 2013
    Assignee: Analog Devices, Inc.
    Inventors: Firas N. Sammoura, Kuang L. Yang
  • Publication number: 20130319116
    Abstract: Cross-talk sensitivity in an xy-axis shell-type gyroscope can be rejected or reduced by operating the gyroscope with a single in-plane flexural or bulk resonance mode and sensing two out-of-plane degenerate or non-degenerate resonance modes resulting from rotations about two axes in the plane of the resonator. Mode matching in an xy-axis shell-type gyroscope can be achieved by configuring the resonator (e.g., size, shape, thickness) to match the in-plane and out-of-plane resonance frequencies for the drive and sense modes of interest.
    Type: Application
    Filed: May 29, 2012
    Publication date: December 5, 2013
    Applicant: ANALOG DEVICES, INC.
    Inventor: Houri Johari-Galle