Abstract: An online trimming device and method for a micro-shell resonator gyroscope is provided. A micro-shell resonator gyroscope fixing fixture and a mode test circuit in the device are placed in a vacuum test cavity provided with a circuit interface. The mode test circuit and a host computer are connected through a circuit interface on the vacuum test cavity. The gyroscope fixing fixture is provided with a signal interface, and the electrodes on the gyroscope substrate are connected to the signal interface. The signal interface on the fixture is connected to the mode test circuit. The laser etching module is located at the top of the device. An opening is formed in the gyroscope fixing fixture. The vacuum test cavity is provided with a transparent trimming window. The laser acts on the edge of the resonant structure of the gyroscope through the trimming window and the through hole of the fixture.

Abstract: A sensor assembly for an electrically adjustable piece of furniture having at least one actuator for adjusting a component and a control for the actuator comprises a light transmitter and a light receiver which are coupled to one another via an optical light path. An aperture element which is configured to at least partially cover the light path and which is mounted in a movable manner with respect to the light path in such a way that a change in a position of the aperture element results in a change in the covering of the light path. An evaluation circuit regulates a light quantity emitted by the light transmitter to a reference quantity by means of a control signal and generates a deformation signal based on the control signal or on a signal derived from the control signal. The aperture element converts a deformation or movement of the component into a change of position of the aperture element relative to the light path.

Abstract: An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

Abstract: According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.

Abstract: An angular rate sensor includes an annular resonator. The resonator includes an annular base material made of a first material, and an annular first low thermal conductor made of a second material having a lower thermal conductivity than the first material, the first low thermal conductor being sandwiched between an annular first region and an annular second region on an inner side of the first region in the base material over substantially an entire circumference of the resonator.

Abstract: A method of tuning a vibratory gyroscope, the method comprising the steps of: a) applying an AC drive signal to the drive electrode, the drive signal comprising a plurality of frequencies; b) sensing the response of the resonator to the drive signal at the first and second sense electrodes; c) determining a frequency of maximum response for the first mode of vibration, and determining a frequency of maximum response for the second mode of vibration; d) deriving a comparison result from a comparison of the frequency of maximum response for the first mode of vibration with the frequency of maximum response for the second mode of vibration; and e) applying a biasing voltage to one or more of the tuning electrodes dependent on the comparison result.

Abstract: A MEMS device may output a signal during operation that may include an in-phase component and a quadrature component. An external signal having a phase that corresponds to the quadrature component may be applied to the MEMS device, such that the MEMS device outputs a signal having a modified in-phase component and a modified quadrature component. A phase error for the MEMS device may be determined based on the modified in-phase component and the modified quadrature component.

Abstract: A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies.

Abstract: A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.

Abstract: A ring gyroscope which comprises first and second transversal symmetry axes and first and second diagonal symmetry axes in the ring plane. The gyroscope further comprises one or more primary piezoelectric split transducers configured to drive the ring into resonance oscillation and one or more secondary piezoelectric split transducers configured to sense the oscillation of the ring. The gyroscope further comprises four or more mass elements which form a symmetrical mass distribution in relation to both the first and second transversal symmetry axes and to the first and second diagonal symmetry axes, wherein each mass element is attached to the ring from a bridge connector and the bridge connectors are evenly distributed along the ring.

Abstract: The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs Pi (2?i?N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S1, S2, S3 and S4, characterized in that: each pair Pi consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.

Abstract: A control system includes sensor controllers that are each coupled to a respective set of electrodes of a CVG sensor system via respective sensor channels. A first portion of the sensor controllers provides a sinusoidal forcer signal on the respective sensor channel in response to digital clock and feedback signals to provide oscillation of a resonator of the CVG sensor system. A second portion of the sensor controllers monitors a capacitive pickoff voltage associated with the resonator on the respective sensor channel to generate a digital pickoff signal. A gyroscope controller generates the digital feedback signal in response to the digital pickoff signal from the second portion of the sensor controllers to provide the digital feedback signal and the digital clock signal to the first portion of the sensor controllers and determines a rotation about the CVG sensor system based on the digital feedback signal or the digital pickoff signal.

Abstract: Methods for fabricating three-dimensional microstructures are provided. The method includes disposing a reflow material on a mold, heating the reflow material, and creating a pressure gradient across the reflow material to reflow the material towards a bottom surface of the mold. The mold includes a molding region, a boundary region, and a thermal-isolating region disposed therebetween. The molding region includes a cavity and a projection projecting upwards from a bottom surface of the cavity. The thermal-isolating region includes at least one pocket formed adjacent to and along a perimeter of the cavity of the molding region. During heating, the temperature of the molding region is higher than that of the boundary region and the thermal-isolating region controls the thermal conductivity and mass therebetween. The material reflows towards the bottom surface of the cavity and the protrusion helps shapes the reflow material to form a substantially symmetrical three-dimensional microstructure.

Abstract: A vibrating structure gyroscope includes an annular resonator arranged to vibrate in a plane in response to electrostatic driving forces and a set of capacitive drive electrodes arranged to apply a voltage creating an electrostatic driving force to excite a primary cos n? resonance along a primary axis at a primary frequency fP, such that Coriolis forces, resulting from an angular rate applied about an out-of-plane axis, induce a secondary cos n? resonance along a secondary axis at a secondary frequency fS. The gyroscope also includes digitally-controlled first and second sets to creating a static electrostatic balancing.

Abstract: One example includes a hemispherical resonator gyroscope (HRG). The HRG includes a sensing system comprising a plurality of electrodes arranged in a symmetrical annular arrangement about a sensitive axis and configured to electrostatically force a resonator into a substantially periodic motion based on a plurality of forcer signals applied to the plurality of electrodes. The plurality of electrodes are configured to provide an indication of rotation about a sensitive axis of the HRG. The HRG also includes a controller configured to generate the plurality of forcer signals in a phase-disparate manner to provide the substantially periodic motion in a vibration pattern such that a ratio of the plurality of electrodes and the vibration pattern is a non-integer number, and to measure the rotation about the sensitive axis of the HRG in response to the plurality of forcer signals.

Abstract: Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

Abstract: The present invention discloses a micro three-dimensional shell resonator gyroscope, a method for fabricating a micro shell resonator, a method for fabricating a composite structure substrate, and a method for fabricating a micro three-dimensional shell resonator gyroscope. A micro three-dimensional shell resonator gyroscope includes a packaging shell cover, a micro shell resonator, and a composite structure substrate. The micro shell resonator includes a shell, a single-ended column, and a flange. The composite structure substrate includes a non-planar electrode, a conductive structure, an electrical isolation part, and a main body part. The non-planar electrode includes a driving electrode, a detection circuit, an annular exciting electrode, and an isolation electrode.

Abstract: A gyroscope comprising a resonant structure and a plurality of transducers configured to drive a vibrational mode in the resonant structure and detect vibrations of the resonant structure, wherein at least one of the plurality of transducers comprises a piezoelectric mono crystal.

Abstract: Aspects of the present disclosure relate to microelectromechanical systems (MEMS) and methods for fabricating MEMS. In some embodiments, the system includes a resonator and a support stem. In some embodiments, the resonator is a hemisphere. The system can further include a front-side or back-side DC contact. The system can further include a levitation support, by which the resonator is virtually levitated from a substrate. In some embodiments, the resonator can be suitable for use in a microhemispherical resonator gyroscope Aspects of the present disclosure also relate to methods for fabricating axisymmetric resonators, including resonators for use in microhemispherical resonator gyroscopes.

Abstract: The present invention relates to a micromachined hemispherical resonance gyroscope, which includes a resonant layer, wherein the resonant layer comprises a hemispherical shell whose top point of the hemispherical shell is its anchor point; several silicon hemispherical electrodes are arranged around the hemispherical shell, the silicon hemispherical electrodes include driving electrodes, equilibrium electrodes, shielded electrodes and signal detection electrodes or quadrature correction electrodes, the hemispherical shell and the several silicon spherical electrodes which surround the hemispherical shell constitute several capacitors.

Abstract: A gyroscope sensor is provided that comprises a resonator including a stem extending along an axis and a shell extending from the stem. The shell includes a hemispherical portion extending from the stem and a cylindrical portion extending from the hemispherical portion. The cylindrical portion includes an outer surface and an inner surface and terminates at an axial end surface that is perpendicular to the outer surface and the inner surface. The resonator further comprises an inner cylindrical substrate that extends along an axis and includes a set of inner electrodes arranged annularly about the axis, and a passage that extends along the axis through a central region of the inner cylindrical substrate. The stem extends through the passage to position the inner cylindrical substrate within the inner surface of the cylindrical portion of the resonator forming gaps between the set of inner electrodes and the inner surface.

Abstract: A coupler assembly for coupling a work implement to a work vehicle includes a coupler mounted to the work vehicle and to the work implement. The coupler assembly further includes at least one force sensor mounted to the coupler and configured to collect force data associated with force transferred by the coupler assembly from the work implement to the work vehicle. The coupler assembly includes at least one acceleration sensor mounted to the coupler and configured to collect acceleration data associated with acceleration of the coupler assembly during operation. The acceleration sensor and the force sensor are configured to be coupled to a controller that receives and processes the force data and the acceleration data to determine a mass of a load of the work implement.

Abstract: A Coriolis-based bulk acoustic wave gyroscope includes a center-supported resonating element with capacitively-coupled drive, sense, and control electrodes. The resonating element has a first substantially solid or perforated region which is connected to the center-support by a second region characterized by a plurality of spokes or beams. When operating in a resonance state, the first region undergoes a bulk acoustic mode of vibration while the second region undergoes a flexural mode of vibration. Energy losses associated with the flexural mode of vibration reduce the overall quality factor (Q) at high resonance frequencies creating a large bandwidth and a fast response time without needing vacuum.

Abstract: An angular velocity sensor includes: a frame including a pair of first beams extending in a first direction and opposed to each other in a second direction orthogonal to the first direction, a pair of second beams extending in the second direction and opposed to each other in the first direction, and connections between those pairs; a drive unit that vibrates the frame in a first plane, to which the first and second directions belong, in a vibration mode in which when one pair of those pairs move closer to each other, the other move away from each other, and vice versa; a first detector that detects, based on the amount of deformation of the frame in the first plane, an angular velocity around an axis of a third direction orthogonal to the first plane; and a support mechanism including a base portion and joint portions.

Abstract: A micromechanical resonator having one or more anchoring stems which are hollow to increase resonator Q factor. By way of example a micromechanical disk resonator embodiment is shown utilizing a resonant micromechanical disk anchored by a stem between at least one electrode used for input and output. To increase resonator Q, a hollow stem is utilized in which an outer thickness of stem material surrounds a hollow area interior of the stem, or that is fabricated with a plurality of vias and/or fabricated substructures containing hollow spaces in the stem material. Measurements have confirmed that Q values can be increased using the hollow core stems by a factor of 2.9 times in certain implementations and operating modes.

Abstract: A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.

Abstract: MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode.

Abstract: A gyroscope control circuit for a vibratory gyroscope system includes an open-loop RSP control circuit and a closed-loop CSP control circuit. The gyroscope control circuit optionally may include a Q compensation circuit to compensate for variations in gyroscope sensitivity due to variations in resonator signal path Q. The resonator signal path and the Coriolis signal path may have transduction factors that are proportional to each other such that sensitivity of the gyroscope varies directly with resonator signal path quality factor (Q).

Abstract: A gyroscope system may include a disc resonator gyroscope including a plurality of electrodes embedded in the disc resonator gyroscope. The electrodes may be configured for at least applying a drive voltage and a tuning voltage to the disc resonator gyroscope and for sensing operating parameters of the disc resonator gyroscope. The gyroscope system may also include a quadrature stabilization circuit configured to measure a quadrature error and generate a quadrature regulating voltage based on the quadrature error. The tuning voltage may be adjusted by the quadrature regulating voltage to cancel an effect of voltage flicker before being applied to a tuning electrode of the disc resonator gyroscope.

Abstract: Methods and apparatus for sensing linear acceleration with a MEMS resonator mass, alone, or concurrently with sensing rate of rotation. A resonator mass, which may be a disk or a ring structure, is driven at a resonance frequency of one of the vibration modes of the resonator mass. The amplitude of vibration of that mode is sensed by a set of at least two drive-sense electrodes disposed at opposing positions across the resonator mass. A linear acceleration is derived based at least on a difference between signals of the opposing electrodes. Linear acceleration may be sensed in multiple orthogonal dimensions using multiple pairs of opposing electrodes. Rotation rate may be derived concurrently by sensing the energy coupled into an orthogonal mode of the resonator mass.

Abstract: A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.

Abstract: A vibratory gyroscope is provided comprising a plurality of secondary pickoff transducers which are each sensitive to the secondary response mode, wherein: at least two of the secondary pickoff transducers comprise skew transducers designed to be sensitive to the primary mode which produce an induced quadrature signal in response thereto. A method of using the gyroscope is provided comprising the steps of arranging electrical connections between the secondary pickoff transducers and a pickoff amplifier so that in use the induced quadrature signal is substantially rejected by the amplifier in the absence of a fault condition, and the amplifier outputs an induced quadrature signal when a fault condition disconnects one of the skew transducers from the amplifier, and a comparator compares the quadrature output from the pickoff amplifier with a predetermined threshold value and provides a fault indication when the predetermined threshold is exceeded.

Abstract: Coriolis vibratory gyroscope includes a thin-walled resonator, fastened centrally on a stem located within the resonator; with 4nk holes in a wall of the resonator and arranged around the stem, where “k” is integer, “n” is order of vibration modes, and the angle between adjacent holes is “?/2nk”. The stem is rotationally symmetric and is fastened on a base; electrodes are arranged on the wall for excitation and measurement of vibration modes, with leads passing from the electrodes through the holes; the base has a seating for the resonator stem, and leads pass from the outside of the base through it, the leads being electrically-insulated and sealed relative to the base; the leads which pass through the base are connected to the leads which pass from the electrodes, allowing signals to pass from outside the base, through the base, through the holes in the resonator wall and to the electrodes.

Abstract: A method for simultaneously identifying an inertial rate of a gyroscope and a bias for a gyroscope. A set of equations for an output of the gyroscope is identified using a model for motion of the gyroscope. The set of equations includes a set of parameters for the bias of the gyroscope. The inertial rate of the gyroscope and a set of values for the set of parameters for the bias of the gyroscope are identified using the set of equations and measurements generated by the gyroscope for a plurality of drive angles.

Abstract: A circuit for processing signals from a gyroscope includes a first that generates an in-phase demodulated signal and a second demodulator that generates a quadrature-phase demodulated signal with reference to in-phase and quadrature-phase modulated signals, respectively, from the gyroscope. The circuit includes a digital processor that receives the demodulated in-phase and quadrature phase signals from the demodulators and generates an output signal corresponding to a rotation of the gyroscope along a predetermined axis with reference to the in-phase demodulated signal and the quadrature-phase demodulated signal to remove a portion of the quadrature-phase signal from the in-phase signal.

Abstract: A rotation sensor system is presented. The system includes a rotating frame configured to be mounted on a gimbal and configured to be driven for controlled rocking motion about a predetermined axis of the frame, and a proof mass assembly mounted on the rotating frame. The proof mass assembly includes one or more proof mass elements, each mounted to be driven into controlled movement with respect to the predetermined axis along a certain path, such that a distance of each proof mass element from the axis corresponding to a direction of the rocking motion of the frame, thereby affecting a moment of inertia of the rotating frame.

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract: An axially symmetrical Coriolis vibratory gyroscope includes a thin-walled resonator with a hemispherical or cylindrical or toroidal form, the resonator being fixed at the center to a support and being formed with openings in that wall of the resonator which is located around the support, the number of openings being determined on the basis of the formula 4nk, where k is an integer, n is the order of oscillation modes, wherein the support has a symmetrical form along the longitudinal axis and is fixed to a base, electrodes are positioned on the wall of the resonator or next to the resonator for exciting and measuring two oscillation modes, a constant amplitude of one of the modes is maintained and a secondary oscillation mode which is sensitive to Coriolis forces is monitored, and the base is provided with a seat for the support of the resonator and with electrically insulated hermetically sealed leads which pass outwards via the base and through the openings in of the resonator.

Abstract: A silicon MEMS gyroscope is described having a ring or hoop-shaped resonator. The resonator is formed by a Deep Reactive Ion Fitch technique and is formed with slots extending around the circumference of the resonator on either side of the neutral axis of the resonator. The slots improve the Quality Factor Q of the gyroscope without affecting the resonant frequency of the resonator.

Abstract: The invention relates to an gyroscopic sensor comprising a sensitive element designed to vibrate; an electrode carrier capable of carrying excitation/detection electrodes for exciting the sensitive element and for detecting the vibration of the sensitive element; and elements for supporting the electrode carrier. The supporting elements comprise a base made of a material having a density of less than 5 kg/dm3, and the square root of the ratio of Young's modulus divided by said density is greater than 9 GPa1/2.dm3/2/kg?1/2.

Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

Abstract: Method of angular measurement by a resonator associated with a vibration setting device and with a vibration detector, which are linked to a processing circuit through which there travel control signals and measurement signals, the method comprising the steps of digitizing the measurement signals and of deducing an angular measurement from the measurement signals. The method comprises the steps of performing a spectral analysis of the digitized measurement signals so as to detect harmonic distortions therein and correcting at least some of the signals travelling through the processing circuit so as to attenuate the non-linearities.

Abstract: An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further includes primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function includes a signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.

Abstract: A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.

Abstract: A driving device of a driving mass of a gyroscope comprises a differential read amplifier to supply first signals indicating a rate of oscillation of the driving mass; a variable-gain amplifier to supply second signals to drive the driving mass based on said first signals; a voltage elevator providing a power supply signal to the variable-gain amplifier; a controller generating a first control signal to control a gain of the variable-gain amplifier; and a first comparator, coupled to the variable-gain amplifier, generating a second control signal based on a comparison of the first control signal with a threshold, the second control signal controlling at least one among: (i) the variable-gain amplifier in such a way that the gain is increased only during the start-up phase of the gyroscope, and (ii) the voltage elevator in such a way that the power supply signal is increased only during the start-up phase.

Abstract: A hemispherical resonator includes a bell fastened to a base. The base carries a main electrode extending facing an annular edge of the bell, and at least one guard electrode adjacent to the main electrodes. An electrically conductive layer covers at least part of the inside surface, the annular edge of the bell, and covers a portion of an outside surface of the bell adjacent to the annular edge thereof.

Abstract: The invention relates to a gyroscopic sensor comprising a sensitive element designed to vibrate; an electrode carrier capable of carrying electrodes for exciting the sensitive element and electrodes for detecting the vibration of the sensitive element; and support rods designed to support the electrode carrier, characterized in that the support rods have at least one bulged end.

Abstract: A digital angular rate sensor system based on frequency modulation (FM) of the rotation rate. The new approach relies on tracking of the resonant frequencies of two high-Q mechanical modes of vibration in a MEMS vibratory gyroscope to produce an inherently digital measurement of the input angular rate. The disclosed system is enabled by a combination of a MEMS vibratory high-Q gyroscope and a new signal processing scheme which takes advantage of a previously ignored gyroscope dynamics effect. The FM nature of the system eliminates noise versus bandwidth and resolution versus dynamic range tradeoffs of conventional vibratory rate gyroscopes. The FM approach allows achieving superior signal-to-noise-ratio through the use of ultra-high Q (1 million) mechanical structure without limiting the measurement bandwidth. Stability of 1e-9 can be achieved in the FM system, providing a 1000 times improvement over the state-of-the-art conventional AM gyroscopes with capacitive pick-off.

Abstract: A vibrating gyroscope has a base and a resonator. The resonator includes a body of generally cylindrical shape terminating in a face. The resonator is capable of vibrating according to a first vibration mode having antinodes distributed on n axes, and a second vibration mode having antinodes distributed on n other axes. The face of the resonator has two piezoelectric assemblies on each axis of the first and of the second vibration modes. Each piezoelectric assembly has at least one piezoelectric element capable of exciting the resonator in vibration and at least one piezoelectric element capable of detecting vibrations of the resonator at the same time.

Abstract: One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.