Abstract: A vibrating gyroscope having a base, and a resonator. The resonator includes a body of generally cylindrical shape terminating in a distal face to the side opposite the base. The face includes at least one through hole, a plurality of piezoelectric elements placed in contact with the resonator, vibration control and processing modules arranged at least in part on the base, and at least one electrical connection passing through the body of the resonator via the hole, and electrically connecting the modules of the base and the plurality of piezoelectric elements for controlling and measuring the vibration of the resonator.

Abstract: The present invention provides an angular rate gyro in which a bell-shaped vibrator having nonuniform thickness, axially symmetric and multi curved surface combined structural features is used as a sensitive element. The angular rate gyro is composed of the bell-shaped vibrator, a vibrator fixing shaft, a vibrator base, an airtight hood, a housing and a circuit system. The bell-shaped vibrator includes a bell shoulder having a hemispheric shell structure, a bell waist having a cylindrical shell structure and a bell lip having a hyperboloidal shell structure. The bell-shaped vibrator, the base and a central shaft are mechanically and fixedly connected together to be formed into an integral core having sensitive gyratory effect. A circuit system is used to control vibration forms of the bell-shaped vibrator, perform signal processing and solve the applied angular rate.

Abstract: In one embodiment, an apparatus includes a resonant structure having a plate, a drive electrode and a sense electrode. The resonant structure defines an axis substantially orthogonal to a plane defined by the plate when the resonant structure is not excited. The plate is formed from a piezoelectric material. The drive electrode is configured to excite the resonant structure, and the sense electrode is configured to sense a signal in response to rotation of the resonant structure about the axis.

Abstract: A spring system (74) links a pair of drive masses (30, 32) of a MEMS device (72). The spring system (74) includes stiff beams (76, 78, 80, 82) oriented to form a parallelogram arrangement (84). The beams are oriented diagonal to a drive direction (56) of the masses (30, 32). Diagonally opposing corners (86, 88) of the parallelogram arrangement (84) are coupled to the drive masses (30, 32). A spring (90) is coupled to a corner (94) and a spring (92) is coupled to a diagonally opposing corner (96) of the parallelogram arrangement. The springs (90, 92) are interconnected with a sense frame (34) surrounding the drive masses. The beams and side springs are stiff to substantially prevent in-phase motion (66) of the drive masses. However, rotationally compliant flexures (102, 104, 106, 108), allow the arrangement (84) to collapse and expand to enable anti-phase motion (60) of the drive masses.

Abstract: A micro-scale hemispherical resonator gyroscope includes a hemispherical resonator with a plurality of masses positioned around the periphery of the hemispherical resonator. At least some of the masses may be made of a heavy metal, such as tungsten, gold, platinum, or lead, and may be positioned at points of maximum deflection or velocity of the resonator. The hemispherical resonator may have a 2 mm diameter and a ring down time of at least 500 seconds.

Abstract: A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.

Abstract: A vibrating gyro device includes a piezoelectric substrate, an upper main surface electrode, a lower main surface electrode, and a support substrate. The piezoelectric substrate is provided with inner open holes and outer open holes. Side edge surfaces of a frame-shaped region in the X-Y plane are exposed to the interior of the frame through the inner open holes. Side edge surfaces of the frame-shaped region are exposed to the exterior of the frame through the outer open holes. Drive detection electrodes arranged within the upper main surface electrode are bonded to the upper main surface of the frame-shaped region and together with the lower main surface electrode are electromechanically coupled with deformation of the frame-shaped region in the Z-axis direction and deformation of the frame-shaped region in a direction parallel or substantially parallel to the X-Y plane. The support substrate provides a vibration space for the frame-shaped region and supports the piezoelectric substrate.

Abstract: A method of making a handheld, electromechanical device useful in mammalian body-care includes the steps of: a) forming a one-piece housing having a single opening defined by a rim; b) assembling a unitary insert; c) inserting the unitary insert through the single opening of the housing; d) removably applying a cover having an exterior surface to close the opening of the one-piece housing; and e) attaching the unitary insert to at least one of the one-piece housing and the removable cover. The rim of the one-piece housing circumscribes a rim area, and the one-piece housing has a projected area that is substantially larger than the rim area. The unitary insert is dimensioned to be insertable through the opening defined by the rim, and it has a frame having disposed thereon electromechanical elements interconnected in an electrical circuit. The cover closes off the opening of the one-piece housing.

Abstract: One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.

Abstract: A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.

Abstract: Cross-talk sensitivity in an xy-axis shell-type gyroscope can be rejected or reduced by operating the gyroscope with a single in-plane flexural or bulk resonance mode and sensing two out-of-plane degenerate or non-degenerate resonance modes resulting from rotations about two axes in the plane of the resonator. Mode matching in an xy-axis shell-type gyroscope can be achieved by configuring the resonator (e.g., size, shape, thickness) to match the in-plane and out-of-plane resonance frequencies for the drive and sense modes of interest.

Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

Abstract: An exemplary vibrating structure gyroscope includes a ring structure, an external frame and a flexible support including a pair of symmetrical compliant legs arranged to retain the ring structure within the external frame. A metal track is provided on an upper surface of the ring structure, the compliant legs and the external frame, over an insulating surface oxide layer. Each flexible support is arranged to carry a metal track associated with a single drive or pick-off transducer. The metal track is repeated for eight circuits, one circuit for each transducer. Each circuit of metal track associated with a transducer begins at a first bond-pad on the external frame, runs along a first compliant leg, across an eighth segment of the ring structure and back along the other compliant leg to a second bond-pad on the external frame.

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract: Disclosed are devices, materials, systems, and methods, including a device that includes one or more structural components, at least one of the one or more structural components comprising substantially HfO2—TiO2 material. Also disclosed is a hemispherical resonator that includes a hemisphere including one or more structural components with at least one of the one or more structural components comprising substantially HfO2—TiO2 material, a forcer electrode configured to apply an electrical force on the hemisphere to cause the hemisphere to oscillate, and one or more sensor electrodes disposed in proximity to the hemisphere and configured to sense an orientation of a vibration pattern of the hemispherical resonator gyroscope.

Abstract: An inertial sensor is described in which a resonant element is driven by control electronics into resonance. The control electronics includes an oscillator. A circuit is provided for matching the frequency of the oscillator with the frequency of the output of the resonant element such that the time to operation from start up of the sensor is minimized and the requirement of frequency matching a given sensor to the control electronics is removed.

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract: A silicon MEMS gyroscope is described having a ring or hoop-shaped resonator. The resonator is formed by a Deep Reactive Ion Fitch technique and is formed with slots extending around the circumference of the resonator on either side of the neutral axis of the resonator. The slots improve the Quality Factor Q of the gyroscope without affecting the resonant frequency of the resonator.

Abstract: A resonator for an angular parameter sensor, the resonator comprising a bell of electrically-insulating material provided with a central stem and an electrically-conductive layer, the conductive layer comprising branches extending from a central portion of the bell to a peripheral edge of the bell, the number of said branches being a prime number not less than seven.

Abstract: An angular rate sensor device is presented. The sensor device comprises a disk-shaped structure having a proof mass region and a flexible portion. The disk-like structure is coupled to a substrate in a manner enabling a wave type precession motion such that during the wave type precession motion each material point of the proof mass performs elliptic motion.

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract: A rotary disk gyroscope (20) includes a drive mass (28) and a sense mass (32). The sense mass (32) includes a cutout region (46, 48) located proximate an axis of rotation (40). Torsion springs (38), located in the cutout region (46, 48), connect the sense mass (32) to the drive mass (28). The torsion springs (38) enable the sense mass (32) to rotate about the axis of rotation (40) in response to an angular velocity of the gyroscope (20). Spring anchorage structures (30) are also positioned in the cutout region (46, 48), and flexibly couple the drive mass (28) to the substrate (22). In addition, a drive system (68) resides in the cutout region (46, 48) and actuates the drive mass (28) to move with an oscillatory motion. In a dual axis configuration, the gyroscope (20) further includes a rectangular-shaped second sense mass (36) surrounding the disk-shaped drive mass (28).

Abstract: A MEMS gyroscope is provided. A substrate can be formed with a substantially planar surface, a substantially hemispherical cavity extending into the surface, an actuation electrode, and a plurality of sensing electrodes. A resonator formed from a substantially hemispherical shell can be suspended within the cavity by a stem coupling the center of the bottom of the cavity to the center of the bottom of the shell. An electronic processor can be configured to cause a voltage to be applied to the actuation electrode, receive signals from the sensing electrodes, and process the received signals to determine rotation of the MEMS gyroscope.

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract: Micromachined disc resonator gyroscopes (DRGs) are disclosed designed to be virtually immune to external temperature and stress effects. The DRG is a vibratory gyroscope that measures angular rate which is designed to have reduced sensitivity to external thermal and mechanical stress. The DRG features an integrated isolator that may be fabricated on the same wafer as the electrode wafer forming a plurality of integrated isolator beams. In addition, the DRG may include a wafer level hermetical vacuum seal, flip chip ball grid array (BGA), and vertical electrical feedthrough to improve reliability and to reduce manufacturing cost. An additional carrier layer may be used with shock stops, vertical electrical feedthrough, and the flip chip BGA. A pyrex or quartz cap with embedded getter and shock stops can be employed.

Abstract: A vibrating gyroscope comprises a ring-shaped vibrating body (11) a leg portion (15) flexibly supporting the body (11) and having a fixed end, a fixed potential electrode (16), and a plurality of electrodes (13a-13d) with a piezoelectric film sandwiched between an upper and a lower-layer metallic film in a thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for a primary vibration in a vibration mode of cosN?, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) and second detection electrodes (13d) for detecting a secondary vibration generated when an angular velocity is applied to the body (11), which are each disposed in a certain region related to the driving electrode (13a) Each of the electrodes is also disposed in a certain region of the body (11).

Abstract: A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, . . . , 13f formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in FIG. 1, when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cos N? is set as a reference driving electrode, the plurality of remaining electrodes 13b, . . . , 13f are disposed at specific positions.

Abstract: An angular velocity sensor or gyroscope has a ring and a primary drive transducer arranged to cause the ring to oscillate in a primary mode substantially at the resonant frequency of the primary mode of the ring. A primary control loop receives primary pick-off signals from the primary pick-off transducer and provides primary drive signals to the primary drive transducer so as to maintain resonant oscillation of the ring. The primary control loop includes a demodulator arranged to determine the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator arranged to determine the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator arranged to produce the primary drive signals with an amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider.

Abstract: A fixture assembly suitable for use in a manufacturing process includes a crowder plate coupled to a datum plate, which is configured to receive a work piece, such as a disc drive system. In some embodiments, the datum plate is configured to gimbal relative to at least a portion of the crowder plate, and substantially maintain a position along first and second directions relative to at least the portion of the crowder plate. The datum plate is also configured to translate in a third direction relative to at least the portion of the crowder plate, where the first, second, and third directions are substantially orthogonal. In some embodiments, the fixture assembly includes a platform coupled to the crowder plate, where the crowder plate may translate in at least one of the first and second directions relative to the platform.

Abstract: A method for estimating the moment of inertia of a rotating unit of a washing or washing-and-drying machine comprising the steps of: establishing one or more linear parameters; rotating the drum of the rotating unit in such a way as to reach a set of speeds of a pre-set value; once each speed of a pre-set value is reached, detecting the value of the torque provided to the rotating unit; and finally estimating the moment of inertia of the rotating unit through a linear combination of the torques detected and by means of the linear parameters.

Abstract: Techniques for reducing the frequency split between the Coriolis-coupled modes in disc resonator gyroscopes (DRGs) by perturbing the mass distribution on the disc resonator based on an identified model are disclosed. A model-identification method of tuning a resonator comprises perturbing the mass and measuring a frequency response matrix of the resonator. The frequency response matrix includes a plurality of inputs and a plurality of outputs and the resonator has a plurality of coupled resonance modes. A reduced structural mechanics matrix model of the resonator in sensor and actuator coordinates is identified from the measured frequency response matrix and analyzed to determine generalized eigenvectors of the structural mechanics model and their variations due to selected mass perturbations which is then estimated to improve degeneracy of the plurality of coupled resonance modes based on the generalized eigenvectors of the mass and the stiffness.

Abstract: A micromachined thermal and mechanical isolator for MEMS die that may include two layers, a first layer with an active temperature regulator comprising a built-in heater and temperature sensor and a second layer having mechanical isolation beams supporting the die. The isolator may be inserted between a MEMS die of a disc resonator gyroscope (DRG) chip and the leadless chip carrier (LCC) package to isolate the die from stress and temperature gradients. Thermal and mechanical stress to the DRG can be significantly reduced in addition to mitigating temperature sensitivity of the DRG chip. The small form can drastically reduce cost and power consumption of the MEMS inertial sensor and enable new applications such as smart munitions, compact and integrated space navigation solutions, with significant potential cost savings over the existing inertial systems.

Abstract: A signal processing method and device for measuring the input rate of an FM micro-gyro having a modulation frequency FM and having an oscillator sense element having a nominal frequency FOSC is disclosed. In a first aspect of the invention, the method comprises defining a first time interval TWN and a second time interval TWP and measuring the first time interval and the second time interval by counting the number of periods of a predetermined reference frequency. The nominal frequency of the oscillator sense element FOSC is measured along with the modulation frequency FM. From these measurements, the proof mass period NW is calculated. The time difference ?t is calculated from the above measurements. The method then comprises calculating a modulation M that produced the measured ?t, preferably using an iterative method. From the above, the input rate ? is calculated by dividing M by a sensitivity S of the FM micro-gyro.

Abstract: A single layer micromachined thermal and mechanical isolator may be bonded between a microelectromechanical system (MEMS) die and package. Small bond pads of the isolator are attached to the periphery of the die. The isolator material may be chosen to match that of the die, reducing CTE mismatch. Long thin isolation beams can be used to provide thermal isolation against external temperature changes, which may be conducted through the package. Weak and flexible beams can be used to tolerate large displacements with very little resistance. Thus, excessive stress or distortion to the package, from either CTE mismatch or external stress, may be absorbed by the isolator and will not be transmitted to the MEMS die. Beam rigidity may be designed to attenuate vibration of particular frequency range. The isolator can be readily inserted into an existing disc resonator gyroscope package in one thermal compression bond step.

Abstract: A vibratory gyroscopic device to determine the rotation rate of an object and method of manufacturing thereof, the device including a plurality of supporting springs arranged in pairs to exhibit bilateral symmetry via each pair (i.e., mirror-image symmetry) relative to each other such that the asymmetries in the characteristics of the ring (e.g., resonant frequency, response to angular velocity), caused by asymmetries in the structure of the ring, are reduced.

Abstract: A hemispherical resonator (7) comprising a bell (4) fastened to a base (3) that carries main electrode (2) extending facing an annular edge (6.2) of the bell, and at least one guard electrode (1) adjacent to the main electrodes (2), an electrically conductive layer (6) covering at least part of the inside surface (6.1) of said annular edge of the bell (6.2), wherein the electrically conductive layer (6) covers a portion of an outside surface (6.3) of the bell adjacent to the annular edge thereof.

Abstract: An inertial rotation sensor including a vibrating member having facing metal-plated portions forming a variable capacitance capacitor associated with a low impedance load circuit via a multiplexer/demultiplexer member.

Abstract: Tuning an axisymmetric resonator such as in a disc resonator gyroscope (DRG) is disclosed. Frequency tuning a DRG in a single step informed by a systematic physical model of the resonator structure, sensing and actuation elements, such as a finite element model, is provided. The sensitivity of selected trimming positions on the resonator to reducing asymmetry terms is determined via perturbations of the systematic model. As well, the dependence of the parameters of model transfer functions between actuation and sensing elements on resonator asymmetry are systematically determined. One or two measured transfer functions may then be analyzed according to the systematic model to fully determine the needed asymmetry correction components of the DRG. One or two of four groups of four electrostatic bias electrodes or four groups of four laser trimming locations for the DRG are utilized to correct the asymmetry components which can give rise to mistuning.

Abstract: A micro-scale hemispherical resonator gyroscope includes a hemispherical resonator with a plurality of masses positioned around the periphery of the hemispherical resonator. At least some of the masses may be made of a heavy metal, such as tungsten, gold, platinum, or lead, and may be positioned at points of maximum deflection or velocity of the resonator. The hemispherical resonator may have a 2 mm diameter and a ring down time of at least 500 seconds.

Abstract: A method and device of determining a speed of rotation of an axially symmetrical vibrating sensor. The sensor has a vibrating member associated with control electrodes and with detection electrodes for generating a vibration presenting an elastic line possessing periodicity of order n and having a position that is variable as a function of the rotation of the sensor. The method includes performing successive evaluations of the speed for a predetermined number of positions of the vibration relative to the electrodes. The positions are geometrically offset relative to each other and the vibration is moved from one position to another by applying a precession command using a pre-established scale factor. The method also includes determining a speed of rotation in function of the evaluations.

Abstract: One embodiment is a micro hemispheric resonator gyro having: a plurality of pickoff and forcer electrodes; a hemispheric resonator; a guard ring having first and second opposed sides, the guard ring containing the plurality of pickoff and forcer electrodes, and the hemispheric resonator; a top cover operatively coupled to the first side of the guard ring; and a bottom cover operatively coupled to the second side of the guard ring; wherein the plurality of pickoff and forcer electrodes, the hemispheric resonator, the guard ring, the top cover and the bottom cover form a micro hemispheric resonator gyro.

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract: A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.

Abstract: One exemplary embodiment is directed to a vibratory structure gyroscope having a substrate having a top surface. The vibratory structure gyroscope can also include a resonator having a hemitoroidal shape, the resonator including a stem and an outer lip that surrounds the stem, the stem attached to the top surface of the substrate and the outer lip located apart from the top surface to allow the resonator to vibrate.

Abstract: A sensor and sensing method capable of full-differential symmetry to minimize bias drift and improve stability of the sensor output. The sensor includes a sensing element, sense electrodes capacitively coupled to the sensing element to generate capacitive outputs that vary in response to the motion of the sensing element, and a differential readout device. The sense electrodes are electrically separable into at least two pairs of differential sense electrodes. The readout device performs a sampling sequence of at least two sampling cycles during which the readout device samples the capacitive outputs of the sense electrodes and produces at least two differential outputs based on the difference between the capacitive outputs within each pair of differential sense electrodes. The readout device then calculates an average of the differential outputs of the sampling sequence to produce an output of the differential readout device, and thereafter repeats the sampling sequence and calculation.

Abstract: A vibratory sensor is fabricated as a three-dimensional batch-micromachined shell adapted to vibrate and support elastic wave propagation and wave precession in the shell or membrane and at least one driving electrode and preferably a plurality of driving electrodes directly or indirectly coupled to the shell to excite and sustain the elastic waves in the shell. The pattern of elastic waves is determined by the configuration of the driving electrode(s). At least one sensing electrode and preferably a plurality of sensing electrodes are provided to detect the precession of the elastic wave pattern in the shell. The rotation of the shell induces precession of the elastic wave pattern in the shell which is usable to measure the rotation angle or rate of the vibratory sensor.

Abstract: A control component of an apparatus in one example is configured to signal a plurality of electrodes arranged in at least first, second, third, and fourth radial electrode groups along first, second, third, and fourth axes at approximately 0, 45, 90, and 135 degrees, respectively, around the planar resonator. During a first time period, the control component is configured to signal: the first radial electrode group to induce a drive oscillation in the planar resonator, the third radial electrode group to sense the drive oscillation, the second radial electrode group to sense a Coriolis force induced oscillation, and the fourth radial electrode group to null the Coriolis force induced oscillation.

Abstract: An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the temperature drift are provided. The present invention provides a mechanism including an angular velocity sensor that outputs a first signal in accordance with a rotational angular velocity. The device stores in advance data of a second signal normally output by the angular velocity sensor while in a stationary state, detects a stationary state and extracts the difference between the first and second signals when the stationary state is detected. The device thereby compensates for the first signal based on the extracted difference signal. A display unit in the device scrolls an image based on the compensated signal. This prevents a failure caused by the temperature drift of the angular velocity sensor.