Abstract: Disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto. The angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell-type structure for rate sensing or measuring angle of rotation. The structure formed as a merged superposition of two square entities, yields in-plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate. The resonating star gyroscope may be implemented using the primary flexural degenerate modes. Such an implementation has been successfully demonstrated by the authors using trench-refilled polysilicon and epitaxial polysilicon as the structural material. It is also possible to use a solid star-shaped resonator (with or without perforations) for the gyroscope. The authors also suggest the operation of the resonating star gyroscope employing the higher-order flexural modes.

Abstract: The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

Abstract: Embodiments of the present system encompass: a hemispherical resonator gyro (HRG); digital control loop algorithms which operate in two, distinct modes, Force to Rebalance (FTR) and Whole Angle (WA); and a closed-loop slewing-voltage phase control that reduces quadrature error when the hemispherical resonator gyro transitions from WA to FTR.

Abstract: Apparatus, systems, and methods to control the frequency of a plurality of gyroscopes are disclosed. The gyroscopes are configured such that each individual gyroscope operates independently of one another and at the same pre-determined frequency. To accomplish this, the natural frequency of each gyroscope is determined, and a reference signal is added to the output signal of its respective gyroscope such that the sum of the natural frequency and the reference signal frequency equals the pre-determined frequency. Thus, each individual gyroscope, though it may include its own individual natural frequency, operates autonomously at the pre-determined frequency.

Abstract: A vibrational gyroscope includes a piezoelectric ring having a central opening, and a hemispherical resonator having a central opening and mounted over the opening of the central opening of the piezoelectric ring. A plurality of electrodes delivers a voltage to the piezoelectric ring. A plurality of electrodes provides signal readout that corresponds to angular velocity. The hemispherical resonator can be glued to the piezoelectric ring. The hemispherical resonator preferably vibrates in the third vibration mode. A plurality of capacitive electrodes can be located at nodes and at antinodes of the vibration of the hemispherical resonator, and provide a signal readout that corresponds to the angular velocity. The piezoelectric ring is segmented, non-segmented, or includes an outer segmented portion and an inner non-segmented portion.

Abstract: A gyroscope includes a substantially cylindrical resonator mounted in a housing, and a bottom plate attached to the resonator. A plurality of openings are arranged circumferentially and equiangularly on the bottom plate. A plurality of piezoelectric elements arranged between the openings on the bottom plate. The number of openings can be anywhere between 2 and 16, with eight openings preferred, with a corresponding number of piezoelectric elements. Preferably, substantially the entire available area of the bottom plate is taken up by the piezoelectric elements. The piezoelectric elements can be inside or outside the resonator.

Abstract: A packaging system in one example comprises an improved mechanical packaging system for a circuit board disposed between housing elements, the improvement comprising an upper housing member having a centrally disposed opening provided therethrough, a unitary electromagnetic shield disposed on at least an upper surface of the circuit board and secured to the circuit board, the unitary electromagnetic shield secured to the upper housing member, such that undesired mechanical vibration modes are substantially reduced.

Abstract: A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron2 or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5–5.0% in atomic concentration, Ta at 0.5–5.0%, and Cu at 0.5–5.0%. More preferably, it contains Nd at 0.5–5.0%. This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.

Abstract: An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially in-plane vibration, a rigid support coupled to the resonator at a central mounting point of the resonator, at least one excitation electrode within an interior of the resonator to excite internal in-plane vibration of the resonator, and at least one sensing electrode within the interior of the resonator for sensing the internal in-plane vibration of the resonator. The inertial sensor is fabricated by etching a baseplate, bonding the substantially thermally non-conductive wafer to the etched baseplate, through-etching the wafer using deep reactive ion etching to form the resonator, depositing a thin conductive film on the through-etched wafer.

Abstract: A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.

Abstract: In an implementation in rate gyro mode, the method includes exciting the vibrating member with a combination of control signals including an amplitude control signal at a frequency twice the resonant frequency, and a quadrature control signal at DC. In free gyro mode, the method includes the steps of applying a combination of signals to common electrodes 5 and of applying the combination in alternation to main electrodes 5.1 and 5.2 and to auxiliary electrodes 7.1 and 7.2 interleaved between the main electrodes.

Abstract: In an implementation in rate gyro mode, the method includes exciting the vibrating member with a combination of control signals including an amplitude control signal at a frequency twice the resonant frequency, and a quadrature control signal at DC. In free gyro mode, the method includes the steps of applying a combination of signals to common electrodes 5 and of applying the combination in alternation to main electrodes 5.1 and 5.2 and to auxiliary electrodes 7.1 and 7.2 interleaved between the main electrodes.

Abstract: A micro-electromechanical system (MEMS) comprises a substrate incorporating an oscillatory ring, forcing electrodes for driving the ring into resonance, and sensing electrodes providing an electrical output signal dependent on oscillation of the ring as a result of such forcing and any externally applied force. A positive feedback circuit is provided for feeding back a signal dependent on the output signal of the sensing electrodes to the forcing electrodes in order to sustain oscillation of the ring. The use of positive feedback to drive the forcing electrodes in order to sustain oscillation of the ring is highly advantageous in such an application since it produces a system which exhibits very low phase noise of a magnitude considerably less than the phase noise experienced in use of a phase-lock loop circuit to sustain oscillation.

Abstract: A micromachined z-axis rate gyroscope with multidirectional drive-mode has an increased drive-mode bandwidth for relaxing mode-matching requirement in which the drive and sense modes are completely decoupled. By utilizing multiple drive-mode oscillators with incrementally spaced resonance frequencies, wide-bandwidth response is achieved in the drive-mode, leading to reduced sensitivity to structural and thermal parameter fluctuations. Quadrature error and zero-rate-output are also minimized, due to the enhanced decoupling of multi-directional linear drive-mode and the torsional sense-mode. Bulk-micromachined prototypes have been fabricated in a one-mask SOI-based process, and is experimentally characterized.

Abstract: The inertial rotation sensor comprising a vibrating resonator associated with transducers defining a pair of control channels and a pair of detection channels, preferably comprises a single multiplexer member for all of the channels, the multiplexer member being associated with a processing unit generating cycles comprising control action times on each control channel followed by detection action times on each detection channel, with two succession action times being separated by a relaxation time.

Abstract: A sensor is fabricated with micron feature sizes capable of simultaneously measuring absolute angles of rotation and angular rotational rates. The measurements are made directly from the position and velocity of the device without the need for electronic integration or differentiation. The device measures angle directly, avoiding the integration of electronic errors and allowing for higher performance in attitude measurement. These performance improvements and flexibility in usage allow for long term attitude sensing applications such as implantable prosthetics, micro-vehicle navigation, structural health monitoring, and long range smart munitions. Through the fabrication of the device using lithographic methods, the device can be made small and in large qualities, resulting in low costs and low power consumption.

Abstract: The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.

Abstract: Unlike customary vibrating mass gyros which operate by exciting a first fundamental mode of vibration of the vibrating mass and by detecting the effect of the Coriolis force on a second fundamental mode of vibration of the vibrating mass orthogonal to the first mode, this gyro operates by giving its suspended mass a circular motion alternately in the forward and reverse directions and by deducing the gyrometric effect from the difference between the apparent frequencies of the circular motion of the suspended mass in one direction and in the other. This allows a considerable reduction in the drafting of the heading measurement obtained with this type of gyro.

Abstract: In an implementation in rate gyro mode, the method comprises the steps of exciting the vibrating member by means of a combination of control signals comprising an amplitude control signal at the resonant frequency of the vibrating member or at a frequency twice the resonant frequency, a precession control signal at a frequency twice the resonant frequency, and a quadrature control signal at DC, at the resonant frequency, or at a frequency twice the resonant frequency. In free gyro mode, the method includes the steps of applying a combination of signals to common electrodes 5 and of applying said combination in alternation to main electrodes 5.1 and 5.2 and to secondary electrodes 7.1 and 7.2 interleaved between the main electrodes.

Abstract: A two axis gyroscope including a substantially planar vibratory resonator (5) having a substantially ring or hoop-like structure with inner and other peripheries extending around a common axis, carrier mode drive (22) for causing the resonator (5) to vibrate in a cosn? vibration mode, carrier mode pick-off (23) for sensing movement of the resonator (5) in response to the carrier mode drive (22), X-axis response mode pick-off (25) for detecting movement of the resonator in response to rotation about the X-axis, X-axis response mode drive (24) for nulling said motion, y-axis response mode pick-off (27) for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive (26) for nulling said motion, and a support (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support (9) in response to the carrier mode drive (22) and to applied rotation, wherein the support (9) comprises only L legs, where, when L is even: L=2N/K,

Abstract: A vibratory gyroscope is provided that includes a vibratory element; a vibration inducing device for inducing a mode of vibration into the vibratory element; and a processing device for generating, in response to a change in strain detected in the vibratory element, a signal indicative of a rate of rotation about an axis of the vibratory element corresponding to a rotation imparted to the vibratory element subsequent to an inducing of the vibration. The vibration inducing device includes an acoustic signal source provided at a location spaced from the vibratory element. Undesirable effects associated with mounting the vibration inducing device to the vibratory element are thereby avoided.

Abstract: The hemispherical resonator comprises a bell fixed to a base which carries main electrodes extending in register with an edge of the bell, and a shield electrode subdivided into two portions each presenting auxiliary electrodes extending in regular manner between the main electrodes.

Abstract: A micromachined angle measuring gyroscope using a dual mass architecture measures angular positions rather than angular rates. The invention decouples the effects of drive and sense through the use of a dual mass architecture, and is comprised of a single lumped drive mass, which is structurally coupled to a second lumped slave mass, where the drive mass is electrostatically driven at the first resonant frequency the system using parallel plate electrodes. The slave mass is driven to higher amplitudes than the drive mass. In the presence of rotation, the line of oscillation in both masses precesses, which is easily detectable in the slave mass due to the amplified motion, and is exactly equal to the angle of rotation. The two illustrated embodiments are z-axis realizations of this principle, where the first device uses an inner drive/outer sense architecture and the second uses an outer drive/inner sense architecture.

Abstract: The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180

Abstract: The invention concerns a mechanical resonator with a planar monolithic vibrating structure extending along a closed contour whereof the axis of sensitivity is substantially perpendicular to the plane of said structure. The invention is characterised in that the planar structure (1) is a regular convex polygon with 4k vertices (3) (k being the order of the vibrational mode implemented when the resonator is vibrated) and is suspended to a fixed base (4, 5) via n suspension arms (2) with substantially radial extension arranged substantially symmetrically.

Abstract: A three axis rate sensor includes a substantially planar vibratory resonator having a substantially ring or hoop-like structure with inner and outer peripheries extending around a common axis, drive means for causing the resonator to vibrate in a Cos 2? vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to the applied drive z-axis response mode, pick-off means for detecting movement of the resonator in response to rotation about the z-axis, z-axis response mode drive means for nulling said motion, x-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the x-axis, x-axis response mode drive means for nulling said motion, y-axis response mode pick-off mean for detecting movement of the resonator in response to rotation about the y-axis, y-axis response mode drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means

Abstract: A three axis sensor including a substantially planar vibrator resonator or having a substantially ring or hoop like structure with inner and outer peripheries e tending around a common axis, drive means for causing the resonator to vibrate in an in lane cos 2? vibration mode, carrier mode pick-off means for sensing movement of the resonator in response to said drive means, pick-off means for sensing in plane sin 2? resonator motion induced by rotation about the z-axis, drive means for nulling said motion, pick-off means for sensing out of plane sin 3? resonator motion induced by rotation about the x-axis, drive means for nulling said motion, pick-off means for sensing out of plane cos 3? resonator motion induced by rotation about the y-axis, drive means for nulling said motion, and support means for flexibly supporting the resonator and for allowing the resonator to vibrate relative to the support means in response to the drive means and to applied rotations, wherein the support means comprises only L support

Abstract: A vibrating structure gyroscope comprises a resonant body, a drive transducer for driving resonant motion of the body, a pick-off for producing signals representative of the resonant motion, and a signal processor for extracting z-axis orientation information and x- and y-axis rate information from the signals. The resonant body is planar and the resonant motion takes place in a vibration mode pattern whose orientation angle with respect to the body varies in accordance with z-axis orientation of the body and couples energy into an out-of-plane response mode motion in accordance with rotation of the body about the x- or y-axis. The signal processor resolves the out-of-plane response mode motion with reference to a z-axis orientation signal to extract the x- and y-axis rate information.

Abstract: In an implementation in rate gyro mode, the method comprises the steps of exciting the vibrating member by means of a combination of control signals comprising an amplitude control signal at the resonant frequency of the vibrating member or at a frequency twice the resonant frequency, a precession control signal at a frequency twice the resonant frequency, and a quadrature control signal at DC, at the resonant frequency, or at a frequency twice the resonant frequency. In free gyro mode, the method includes the steps of applying a combination of signals to common electrodes 5 and of applying said combination in alternation to main electrodes 5.1 and 5.2 and to secondary electrodes 7.1 and 7.2 interleaved between the main electrodes.

Abstract: A three axis sensor including a substantially planar vibrator resonator (2) having a substantially ring or hoop like structure, drive means (4) for causing the resonator (2) to vibrate in an in plane cos 2&thgr; vibration mode, carrier mode pick-off means (5) for sensing movement of the resonator in response to said drive means, pick-off means (6) for sensing in plane sin 2&thgr; resonator motion induced by rotation about the z-axis, drive means (7) for nulling said motion, pick-off means (8) for sensing out of plane sin 3&thgr; resonator motion induced by rotation about the x-axis, drive means (9) for nulling said motion, pick-off means (10) for sensing out of plane cos 3&thgr; resonator motion induced by rotation about the y-axis, drive means (11) for nulling said motion, and support means (9) for flexibly supporting the resonator, wherein the support means comprises only L support beams, where L≠2J×3K and J=0, 1 or 2 and K=0 or 1 with L>24.

Abstract: A micromachined angle measuring gyroscope using a dual mass architecture measures angular positions rather than angular rates. The invention decouples the effects of drive and sense through the use of a dual mass architecture, and is comprised of a single lumped drive mass, which is structurally coupled to a second lumped slave mass, where the drive mass is electrostatically driven at the first resonant frequency the system using parallel plate electrodes. The slave mass is driven to higher amplitudes than the drive mass. In the presence of rotation, the line of oscillation in both masses precesses, which is easily detectable in the slave mass due to the amplified motion, and is exactly equal to the angle of rotation. The two illustrated embodiments are z-axis realizations of this principle, where the first device uses an inner drive/outer sense architecture and the second uses an outer drive/inner sense architecture.

Abstract: A single axis rate sensor including a substantially planar vibratory resonator (1) having a substantially ring or hoop-like structure with inner and outer peripheries (1a, 1b) extending around a common axis (z) drive means (6) for causing the resonator (1) to vibrate in a Cos 2&thgr; vibration mode, carrier mode pick-off means (7) for sensing movement of the resonator (1) in response to said drive means pick-off means (9) for detecting Sin 2&thgr; vibration mode motion induced by rotation around the Z-axis, Sin 2&thgr; vibration mode drive means (8) for nulling said motion and support means (2) for flexibly supporting the resonator (1) and for allowing the resonator (1) to vibrate relative to the support means (2) in response to the drive means, or to applied rotation wherein the support means comprises only L support beams, where L≠2K, and K=0, 1,2 or 3.

Abstract: A single axis rate sensor (10) including a substantially planar vibratory resonator (16) having a substantially ring or hoop-like structure with inner (24) and outer peripheries extending around a common axis, drive means (18) for causing the resonator to vibrate in a Cos&thgr; vibration mode, carrier mode pick-off means (20) for sensing movement of the resonator in response to said drive means (18), pick-off means (36) for sensing resonator movement induced in response to rotation of the rate sensor about the sensitive axis, drive means (38) for mulling said motion, and support means (22) for flexibly supporting the resonator (16) and for allowing the resonator (16) to vibrate relative to the support means (22) in response to the drive means, and to applied rotation wherein the support means (16) comprises only L support beams, where L≠3×2K−1, L>2 and K=1, 2 or 3.

Abstract: A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.

Abstract: Bias error is reduced in a vibrating structure sensor having primary and secondary pick-offs separated by a fixed angular amount (45°) with respect to the vibrating structure by summing a proportion of the primary pick-off output signal into the secondary pick-off output signal or subtracting a proportion of the primary pick-off output signal from the secondary pick-off output signal effectively to reduce or increase the angular separation of the secondary pick-off from the primary driver by an amount sufficient to set the rate output signal from the vibrating structure to zero and thereby minimize bias error.

Abstract: A gyroscopic sensor comprising: a sensing element (1) associated with detection and excitation electrodes (8); conductive rods (6) connected in particular to said electrodes (8); a protective housing (3, 4) enclosing the sensing element (1) and the electrode (8) and having insulating feed-throughs (7) for the conductive rods (6); and support means interposed between the housing (3, 4) and the sensing element (1) with the electrodes (8); the sensor being characterized in that said support means are constituted by the conductive rods (6) themselves, which are made so as to be elastically deformable.

Abstract: A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output.

Abstract: A rotation sensing system includes a rotation sensor that produces a signal in response to an input rotation about a sensing axis. A servo system is arranged to rotate the rotation sensor at an angle about the sensing axis to null the signal from the rotation sensor such that the rotation sensor is substantially inertially stable. The rotation sensing system is mounted on a resolver arranged to measure the angle through which the servo system has rotated the rotation sensor.

Abstract: The invention relates to a vibrating gyroscope comprising vibrating cylinder (1) that is magnetically or electrostatically excited. Regularly distributed masses (19) designed to lower the vibration frequency of said cylinder are arranged thereon. The inventive gyroscope is much more accurate than conventional gyroscopes and can be produced easily at low cost. The invention can be used to measure angular rotation or angular speed.

Abstract: A structure and arrangement for improving the accuracy and efficiency of an angular rate sensing gyroscope is herein disclosed. Voltage pick-off conductors are applied to an area of the surface of a resonating element of an angular rate sensing gyroscope that is subject to substantially zero stress when the gyroscope is rotationally stationary. Actuator conductors are similarly applied to a resonating element at a location bounded by areas of the resonating element subject to substantially uniform levels of stress when the gyroscope is rotationally stationary. A method for improving the voltage response of a piezoelectric resonating element is also disclosed.

Abstract: A two-axis yaw rate sensor (1) includes a vibration ring (15) and a ring support plate for supporting the vibration ring (15). The vibration ring (15) includes first to fourth vibrating drive surfaces (16a-16d) arranged in turn in a circumferential direction and narrow portions (17) located between the adjacent drive surfaces (16a-16d). The first and the third drive surfaces (16a, 16c) are opposed to one another on the axis Y passing through the center of the vibration ring (15). The second and the fourth drive surfaces (16b, 16d) are opposed to one another on the axis X passing through the center of the vibration ring (15). The axis Y is substantially perpendicular to the axis X. A PZT film (15) is formed on the drive surfaces (16a-16d) and vibrates the drive surfaces (16a-16d) in a radial direction of the vibrating ring (15).

Abstract: A gyroscopic sensor comprising: a sensing element (1) associated with detection and excitation electrodes (8); conductive rods (6) connected in particular to said electrodes (8); a protective housing (3, 4) enclosing the sensing element (1) and the electrode (8) and having insulating feed-throughs (7) for the conductive rods (6); and support means interposed between the housing (3, 4) and the sensing element (1) with the electrodes (8); the sensor being characterized in that said support means are constituted by the conductive rods (6) themselves, which are made so as to be elastically deformable.

Abstract: A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.

Abstract: A micro-machined angle measurement gyroscope. In one implementation, the gyroscope includes a substrate; a proof mass coupled to the substrate by an isotropic suspension such that the proof mass can move in any direction in the plane of the substrate; a plurality of drive electrodes configured to cause the proof mass to oscillate in the plane of the substrate; and a plurality of sense electrodes configured to sense the motion of the proof mass in the plane of the substrate. In another implementation, the gyroscope includes a substrate; a proof mass suspended above the substrate by an isotropic suspension such that the proof mass can move in any direction in an oscillation plane normal to the substrate; a plurality of drive electrodes configured to cause the proof mass to oscillate in the oscillation plane; and a plurality of sense electrodes configured to sense the motion of the proof mass in the oscillation plane.

Abstract: The gyroscopic sensor has a bell-shaped resonator which is fixed along its axis on a substrate. It has a circular edge lying in a plane perpendicular to the axis and at a distance from the point where the resonator is fixed. The substrate carries detection and excitation electrodes that co-operate with the resonator. The detection electrodes are sensitive to an axial component of resonator vibration and the energization electrodes cause vibration at resonance by exerting axial forces.

Abstract: A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration.

Abstract: Disclosed is a piezoelectric gyroscope which presents as a generally elongated tubular shape having inner and outer radially polarized annular region defining surfaces, with an inner electrode on the inner surface, and four outer electrodes present on the outer surface. The four electrodes present on the outer surface are oriented such that each is in a separate quadrant, (as the piezoelectric gyroscope generally longitudinally elongated essentially tubular structure is viewed in cross-section), and ideally at substantially ninety degree intervals on the outer surface. In use the piezoelectric gyroscope system is caused to rotate about an essentially centrally located longitudinally oriented axis while a flex inducing driving voltage is applied across two of the four electrodes, (driving) electrodes, which are oriented at substantially 180 degrees with respect to one another, while an output voltage is sensed across the other two (sensing), electrodes. Also disclosed are a tuning-fork shaped variations.

Abstract: The invention concerns a vibrating gyro-scope comprising a vibrating cylinder (1) magnetically excited by an internal stator (9) and whereof the vibrations are detected by means of the same stator comprising field coils and separate or common or multiplexed detection coils. The resulting gyroscope is very accurate while being economical and simple to produce.

Abstract: An apparatus for determining a rotation rate has an oscillatory body 11 on which a plurality of electromechanical converters A, A′, B, B′, C, C′, D, D′ are mounted. At least a first converter A, A′ is caused to oscillate mechanically by an electric driver signal UF,O generated in a first circuit arrangement 12. Further, at least a second converter D, D′ is caused to oscillate mechanically by an electric damping signal UF, D generated in a second circuit arrangement 13. At least a third converter C, C′ emits an electric sensor damping signal US, D which corresponds to the oscillation of the body 11 in the location where the at least third converter D, D′ is mounted. The damping sensor signal US, D is fed back to the input of the second circuit arrangement 13. A voltage divider 31 is provided, by means of which the signal UF, D generated in the second circuit arrangement 13 can be reduced.

Abstract: A two axis gyroscope has a substantially planar vibratory resonator having a substantially ring or hoop-like shape structure, carrier mode drive means for causing the resonator to vibrate in a Cosn&thgr; out-of-plane carrier mode, where n has an integer value of 2 or more, support means for flexibly supporting the resonator, carrier mode pick-off means for sensing out-of-plane movement of the resonator, X axis response mode pick-off means for sensing in-plane Cosn1&thgr; response mode movement of the resonator in response to rotation of the gyroscope about the X axis, where n1 has a value of n+1 or n−1, and Y axis response mode pick-off means for sensing in-plane Sinn1&thgr; response mode movement of the resonator in response to rotation of the gyroscope about the Y axis where n1 has a value of n+1 or n−1, identical to that for the X axis response mode.