Abstract: An angular velocity sensor includes an annular frame, a drive part, and a detection part. The frame has first beams and second beams. The first beams extend in an a-axis direction and are opposed to each other in a b-axis direction orthogonal to the a-axis direction. The second beams extend in the b-axis direction and are opposed to each other in the a-axis direction. The drive part causes the frame to oscillate within an XY plane to which the a-axis and the b-axis belong, in an oscillation mode where, when one of the first and second beams come closer to each other, the other separates from each other. The detection part detects an angular velocity around an axis in the Z-axis direction orthogonal to the XY plane, based on an amount of deformation of the frame oscillating in the oscillation mode within the XY plane.

Abstract: There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element 1 according to the present embodiment includes: sensor units 10a to 10c with driven-related and detection-related vibrating arms; a base section 4 which couples the sensor units 10a to 10c; a first fixed section 6 which is frame-shaped and which surrounds the base section 4 and the sensor units 10a to 10c; first coupling arms 5a to 5c which couple the base section 4 to the first fixed section 6; a second fixed section 8 which is disposed in at least a part of the area around the first fixed section 6; and second coupling arms 7a to 7c which couple the first fixed section 6 to the second fixed section 8.

Abstract: A detection apparatus is provided which includes a cantilever vibration gyro including a piezoelectric element having a first side provided with a drive electrode and a pair of detection electrodes sandwiching the drive electrode with predetermined gaps therebetween and a second side opposed to the first side and provided with a common electrode, which vibrates by a drive signal input between the drive electrode and the common electrode and generates a pair of detected signals corresponding to Coriolis force from the detection electrodes. The detection apparatus also includes a bias applying section for applying a bias voltage to the detection electrodes, an adding section adding the pair of detected signals, a first phase delay section delaying a phase of the detected signal obtained by the addition by a range larger than 45° and smaller than 90°, and an amplitude control section controlling the delayed detected signal to a predetermined voltage amplitude to output as the drive signal.

Abstract: There is provided an oscillation type gyro sensor including an oscillation gyro device, an oscillation circuit, a controller, and an impedance conversion circuit. The oscillation gyro device includes a piezoelectric device including a drive electrode and a detection electrode, oscillates according to a drive signal input to the drive electrode, and is capable of generating an output signal including a detection signal corresponding to a Coriolis force from the detection electrode. The oscillation circuit outputs, based on the output signal, a signal for oscillating the oscillation gyro device to the drive electrode as the drive signal. The controller controls the oscillation circuit such that the oscillation circuit outputs a drive signal that makes the output signal constant. To the impedance conversion circuit, the drive signal output from the oscillation circuit is input.

Abstract: Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.

Abstract: A method for packaging micro electromechanical systems (MEMS) microphone has steps of providing a base, arranging and mounting multiple microphone component assemblies on the base, providing a frame, mounting the frame on the base, forming multiple microphone units, providing a cover; mounting the microphone units on the cover and forming multiple MEMS microphones. Therefore, the MEMS microphones can be produced once in large quantities to save production time and costs.

Abstract: A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G-range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies.

Abstract: The device is for monitoring the pitch angle of an accelerating vehicle in substantially real time and using the data or output obtained to affect engine, braking, or suspension changes to correct or otherwise changing the vehicle's pitch angle.

Abstract: A vibration sensor includes a base, a conducting ring, a number of cantilevers, a number of resistors, a number of helical springs, and a number of pairs of first and second pins. One end of each cantilever is connected to the base; the other end of each cantilever defines a guiding cutout. The resistors are correspondingly inserted in the guiding cutout. The helical springs are correspondingly deposited between the conducting ring and the holding block. The conducting ring slides in the guiding cutout due to a vibration and contacts with the resistor. The first and second pins formed in the base for correspondingly connecting to a pair of resistors in each cantilever. The vibration sensor senses the direction of the vibration by detecting a resistance that changes with a position of the conducting ring.

Abstract: Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.

Abstract: A sensor includes an acceleration detector, an angular velocity detector, a driver, and first to fourth springs. Each detector includes a pair of fixed electrodes, a pair of movable electrodes, and a pair of supporting members for supporting the movable electrodes. The driver causes the supporting members to vibrate in opposite phases in a first direction. The first spring couples the supporting members of the acceleration detector and has elasticity in a second direction perpendicular to the first direction. The second spring couples the supporting members of the acceleration detector to a base and has elasticity in both directions. The third spring couples the supporting members of the acceleration detector to the supporting members of the angular velocity detector and has elasticity in both directions. The fourth spring couples the supporting members to the movable electrodes of the angular velocity detector and has elasticity in the second direction.

Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.

Abstract: A sensor includes a proof mass suspended by a suspension beam, the suspension beam having a thickness less than a thickness of the proof mass.

Abstract: A vibration type gyro sensor according to the present invention includes vibrating elements 1X and 1Y which detect angular velocities, a support substrate 2 which is electrically connected to the vibrating elements 1X and 1Y and which supports the vibrating elements 1X and 1Y, a relay substrate 4 which is electrically connected to the support substrate 2 and which includes external connection terminals 3, and buffer members 5 which are disposed between the support substrate 2 and the relay substrate 4 and which suppress transmission of strain and vibration between the support substrate 2 and the relay substrate 4. The vibration type gyro sensor is capable of stabilizing vibration characteristics without being influenced by strain and vibration.

Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Abstract: A vibrating gyroscopic sensor element including a cantilever vibrator, at least one first depression on the cantilever vibrator, a pair of detection electrodes provided on the cantilever vibrator and at least one second depression on the cantilever vibrator. The cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element and the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal resonance frequency of the vibrator. Further, the second depression is effective to adjust the difference of signals output from the detection electrodes.

Abstract: An inertial sensor and a fabrication method of an inertial sensor are provided. An inertial sensor includes: an elastic support whose one end is supported by a support part disposed on a substrate; an oscillator which is supported by the other end of the elastic support as it is separated from the substrate; and a displacement detecting part which detects a displacement of the oscillator to output a signal, wherein the oscillator is formed with one or both of a groove and a through hole in a direction in parallel with a drive direction of the oscillator.

Abstract: A cantilever control device is provided that can prevent, in an atomic force microscope, self-excited oscillation of a cantilever from stopping and prevent a probe of the cantilever from coming into contact with a measurement object. In the atomic force microscope, a cantilever control device 1 is constituted from a cantilever 10 having a probe 12, an actuator 20 that causes self-excited oscillation in the cantilever 10, an oscillation velocity detector 30 that detects the oscillation velocity of the cantilever 10, a displacement calculator 32 that calculates the oscillation displacement of the cantilever 10, and a controller 40 that generates a signal for driving the actuator 20. A feedback control signal S is represented as (K?G·x2)·dx/dt, where x is the oscillation displacement of the cantilever 10, dx/dt is the oscillation velocity of the cantilever 10, and both K and G are feedback gains of a positive value.

Abstract: A combined detection element (6) of the present invention includes an acceleration detection element (2) and an angular velocity detection element (4) stacked on the acceleration detection element (2) in such a manner as to avoid contacting with the weight parts (12) of the acceleration detection element (2). The angular velocity detection element (4) includes a recess (26) in a surface thereof facing the weight parts (12) of the acceleration detection element (2) so as to avoid contacting with the weight parts (12). At least part of the recess (26) has a depth not exceeding the vertical range of motion of weight parts (12), thereby suppressing the upward movement of weight parts (12).

Abstract: An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs bending vibration, as well as an oscillator circuit for oscillating the first piezoelectric vibrating reed; a phase shifting unit for shifting and outputting a given phase angle of an output signal of the oscillator unit; a phase shift circuit unit provided with a second piezoelectric vibrating reed having a vibrating arm that performs bending vibration, arranged at an output side of the phase shifting unit; a multiplier for multiplying the output signal of the phase shift circuit unit by the output signal of the oscillator circuit; and a phase shift modification output unit which receives an output from the multiplier and outputs a value corresponding to a change in a phase shift angle of an input-output signal of the phase shift circuit unit; a resonant frequency of the second piezoelectric vibrating reed being equa

Abstract: Apparatus and techniques are provided for modifying and measuring surfaces of diamond workpieces and other workpieces with nanoscale precision. The apparatus and techniques exploit scanning probe microscopy (SPM) and atomic force microscopy (AFM) at a wide range of operating temperatures. In some embodiments, the SPM/AFM apparatus also includes an interferometric microscope and/or acoustic-wave microscope for making high-precision measurements of workpiece surfaces.

Abstract: An inertial force sensor is provided in which each of switches is connected in parallel with each of resistors of low-pass filter and high-pass filter, respectively, and capacitor of high-pass filter can be boost charged by making switches on without mediate resistors.

Abstract: A detection apparatus is provided which includes a cantilever vibration gyro including a piezoelectric element having a first side provided with a drive electrode and a pair of detection electrodes sandwiching the drive electrode with predetermined gaps therebetween and a second side opposed to the first side and provided with a common electrode, which vibrates by a drive signal input between the drive electrode and the common electrode and generates a pair of detected signals corresponding to Coriolis force from the detection electrodes. The detection apparatus also includes a bias applying section for applying a bias voltage to the detection electrodes, an adding section adding the pair of detected signals, a first phase delay section delaying a phase of the detected signal obtained by the addition by a range larger than 45° and smaller than 90°, and an amplitude control section controlling the delayed detected signal to a predetermined voltage amplitude to output as the drive signal.

Abstract: To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer.

Abstract: Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of a first electrically insulating material extends through the suspended mass and divides it into at least one first electrically insulated suspended region and one second electrically insulated suspended region. A plug element of a second electrically insulating material different from the first electrically insulating material is formed underneath the insulating region and constitutes a barrier between the insulating region and the air gap for preventing removal of the insulating region during fabrication, when an etching agent is used for removing a sacrificial layer and forming the air gap.

Abstract: A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.

Abstract: A gyro-module includes: a first gyro element component having a first detection axis and a second detection axis, and outputting at least a signal that is based on angular velocity around the first detection axis and the second detection axis; a second gyro element component having a first detection axis and a second detection axis, and outputting at least a signal that is based on angular velocity around the first detection axis and the second detection axis; a third gyro element component having a first detection axis; a first operation circuit conducting an operation of an output signal from the first gyro element component and an output signal from the third gyro element component; and a second operation circuit conducting an operation of an output signal from the second gyro element component and an output signal from the third gyro element component.

Abstract: A drive electrode to which a voltage for allowing a vibrator to vibrate is applied and first and second detection electrodes extending in the longitudinal direction of the vibrator in parallel to each other are formed as the upper electrode such that the drive electrode is interposed between the first and second detection electrodes and does not contact with the detection electrodes. In the case where there is a difference between the detection signals detected in the first and second detection electrodes when a voltage is applied between the lower electrode and drive electrode to allow the vibrator to vibrate at a vertical resonance frequency, a laser light is irradiated to a desired portion of the vibrator to apply grinding operation based on detection signals detected in the first and second detection electrodes, thereby adjusting the shape of the vibrator.

Abstract: Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.

Abstract: A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

Abstract: In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrinsically nonlinear behavior corresponding to a progressive spring characteristic curve, in which a greater acceleration is associated at least locally with a greater rigidity (spring constant).

Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Abstract: Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.

Abstract: To provide a transducer that can detect the rotation of the transducer with high degree of accuracy, a transducer includes a pair of oscillating reeds extending in the Y-direction to generate a first oscillation to generate a Coriolis force corresponding to the rotation of the transducer, a beam extending in the X-direction and connected to the pair of oscillating reeds, a first detecting unit provided on the beam to detect deformation of the beam due to a second oscillation of the pair of oscillating reeds caused by the Coriolis force, a base member to support the beam, a first connecting device to connect one end of the beam and the base member, and a second connecting device to connect the other end of the beam and the base member.

Abstract: An electronic device that prevents a failure caused by a temperature drift of an angular velocity sensor, and a signal compensation system and a signal compensation method for compensating for the temperature drift are provided. The present invention provides a mechanism including an angular velocity sensor that outputs a first signal in accordance with a rotational angular velocity. The device stores in advance data of a second signal normally output by the angular velocity sensor while in a stationary state, detects a stationary state and extracts the difference between the first and second signals when the stationary state is detected. The device thereby compensates for the first signal based on the extracted difference signal. A display unit in the device scrolls an image based on the compensated signal. This prevents a failure caused by the temperature drift of the angular velocity sensor.

Abstract: The gyro sensor uses a clock signal as a timing signal or synchronous signal for reading various data stored in a built-in memory for its yaw rate sensing operation. The gyro sensor is configured to use, as such a clock signal, the self-excited oscillation signal being applied to the vibrator of the gyro sensor as a vibrator drive signal.

Abstract: An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is coupled is sensed with a resistive strain gage. In a first embodiment the haltere is actuated (i.e., made to beat or sweep) by simple coupling to an actuator. In a second embodiment, a four-bar structure is used to amplify the motion of a piezoelectric bender to cause haltere beating. Another embodiment achieves haltere beating by parasitic transmission of vibrations of the MFI body to the base of the haltere.

Abstract: An apparatus for mechanically mounting one or more Micro Electro-Mechanical System (MEMS) sensors on a stable, structurally sound base, the base being a generally cubical block formed in a ceramic substrate having a plurality of substantially planar and mutually orthogonal surfaces, wherein a first one of the surfaces is structured for rotationally interfacing with a host structure that is to be monitored; one or more of the remaining surfaces is structured for mechanically mounting of a MEMS sensor; and a plurality of electrical signal carriers communicate between each of the MEMS sensor mounting surfaces and a plurality of electrical interface contacts positioned on the interfacing surface.

Abstract: A gyroscope that may include various sources of error, with those sources of error each being dependent upon a different parameter, is associated with a simulation or “model” of the gyroscope which is typically a computer simulation. The computer simulation is provided with errors which can be adjusted to be identical with the errors present in the real gyroscope. An arrangement is provided to adjust the errors in the model of the gyroscope to be identical with the errors in the real gyroscope, that arrangement including Kalman filters which receive signals generated by subtracting the outputs of the real gyroscope and the model gyroscope, while simultaneously varying the various inputs to the real gyroscope. The Kalman filters also generate a signal which is an estimate of the angular rotation being sensed by the real gyroscope.

Abstract: The invention relates to gyroscopes having a vibrating structure that is micromachined in a silicon substrate. A novel vibrating structure is described, which has two moving masses 14 and 14′, connected by a vibration energy coupling structure (transverse arms 26, 26′, longitudinal arms 22, 22′, and a short transverse link 24 between the longitudinal links 22, 22′). The moving masses are also suspended from U-shaped flexure arms (13), having one branch end connected to the mass and another end connected to a fixed anchoring point 18. The flexure arms are not inserted between the coupling structure and the mass, but are independent of the coupling structure. The masses are excited so as to vibrate in their plane by electrostatic forces applied by interdigitated combs 11. The Coriolis forces make them vibrate perpendicular to the plane, and this vibration is detected by electrodes forming part of the moving masses.

Abstract: A drive component that comprises a drive axis, a pendulous sensor component that comprises a center of mass, and a hinge component that comprises a rotation axis of an electromechanical system. The drive component makes a determination of a drive direction. Upon the determination of the drive direction, the drive component determines an alignment of a pendulous axis, that intersects the center of mass of the pendulous sensor component and the rotation axis of the hinge component, with the drive axis of the drive component. The drive component and the pendulous sensor component are coupled with the hinge component. A location of the hinge component causes the alignment of the pendulous axis to be substantially parallel with the drive direction of the drive component.

Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Abstract: An angular velocity sensor structured so as to reduce the application of external vibrations to tuning fork as described below. Supporting plate having plate having placement part for placing first rubber body over the top face thereof is placed above the top face of second base via at least two supports so as to provide space between the top face of second base and the supporting plate. First cover and fist base housing tuning fork are placed on first rubber body. Further placed on first cover is second rubber body. The top face of supporting plate and the inner ceiling of second cover compress and hold first rubber body and second rubber body therein.

Abstract: The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.

Abstract: The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

Abstract: An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined.

Abstract: Resonator which can be produced by micromachining and has a mass part (DF1, DF2, V1, V2) which is fixed by means of a resilient suspension (FA) to an anchoring point (AN) in such a way that it can perform rotary oscillations in its plane, in which, in the rest position of the mass part, the resilient suspension is aligned only along an axis (SAX) of symmetry with regard to which the mass part is of mirror-symmetrical design.

Abstract: A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.

Abstract: An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

Abstract: An integrated semiconductor MEMS detector device includes a piezo-resistive detector located at a fixed end of a cantilever, a bi-layer resonance actuator including two thin layer materials having different thermal expansion coefficients, wherein one of the actuator layers serves as a heating element and the other serves as insulating layer between the heating element layer and the cantilever, and a sensing element located at the free end of the cantilever, which serves, dependent on the particular application, as a gravitational mass, an absorber of energy, a gas- or vapor-adsorber, etc. Registration of the resonance frequency of the free end of the cantilever is performed both before and after an interaction (e.g., exposure to energy, materials/mass changes due to chemical reactions or/and physical interactions, etc.

Abstract: A specifically-reactive sample-collecting and testing device possessing a cavity or cavities each having a dimension small enough to enable sample liquid to be drawn into the cavity by capillary action, wherein a surface of the cavity carries an immobilized reagent appropriate to the test to be carried out in the device, and wherein said surface is a surface of a transparent solid plate to act as a light-transmissive waveguide and forming a wall of the cavity, said plate having an edge which is substantially optically smooth and transverse to the plane of the plate.