Abstract: A MEMS device formed using the materials of the BEOL of a CMOS process where a post-processing of vHF and post backing was applied to form the MEMS device and where a total size of the MEMS device is between 50 um and 150 um. The MEMS device may be implemented as an inertial sensor among other applications.

Abstract: A force sensor includes a substrate; a first electrode fixed to a first area on the substrate; a second electrode fixed to a second area different from the first area on the substrate, the second electrode extending to a position higher than the first electrode; a capacitance detecting unit configured to detect a capacitance corresponding to a distance between the first electrode and the second electrode; and an operation member including a contact area that is in contact with the second electrode. At least one of the first electrode and the second electrode is provided in plurality. The second electrode is elastically deformed by a load applied to the second electrode by an operation with respect to the operation member, and the distance between the second electrode and the first electrode changes according to an elastic deformation of the second electrode.

Abstract: An inertial sensor includes a movable element including a first movable section and a second movable section, a first detection electrode, and a first dummy electrode. The first movable section has a first section, a second section that is farther from the swing axis than the first section, and a third section disposed between the first section and second section. A separation distance between the third section and the first dummy electrode is greater than a separation distance between the first section and the first detection electrode.

Abstract: A resonant accelerometer includes a proof mass, one or more springs connecting the proof mass to an anchor, and one or more capacitive transduction gaps providing a void or space between the movable proof mass and a corresponding fixed electrode, wherein the static displacement of the proof mass in response to acceleration applied to the anchor modifies the electrostatic stiffness imparted by one or more of the capacitive transduction gaps on the proof mass, resulting in a corresponding change in the resonance frequency of the resonant accelerometer.

Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.

Abstract: An inertial sensor includes a substrate, a first detection movable body and a second detection movable body which overlap the substrate in a direction along the Z-axis and are disposed side by side in a direction along the X-axis, a first detection spring that supports the first detection movable body to be displaceable in the direction along the X-axis, a second detection spring that supports the second detection movable body to be displaceable in the direction along the X-axis, a first drive portion that drives the first detection movable body with a drive component in the direction along the X-axis, a second drive portion that drives the second detection movable body with the drive component in the direction along the X-axis, and a first and second fixed detection electrodes disposed on the substrate and facing the first and second detection movable bodies.

Abstract: A vibrating device includes: a base body containing mobile ions; a movable member disposed facing and spaced apart from the base body; and a conductor section disposed so as to cover at least a portion of the movable member. A first voltage whose potential periodically changes based on a reference potential is applied to the movable member. A second voltage that is at the reference potential when time-averaged is applied to the conductor section. The second voltage is constant at the reference potential.

Abstract: Reducing, at a common sense electrode of a group of sensors of a system, a common charge flow due to a common motion of the group of sensors is presented herein. The group of electromechanical sensors generates a common charge flow as a result of a common motion of the group of electromechanical sensors and a differential charge flow as a result of a differential motion of the group of electromechanical sensors—respective sense elements of the group of electromechanical sensors being electrically connected at the common sense electrode. The system further comprises a voltage-to-voltage converter component that generates, via an output of the voltage-to-voltage converter component, a positive feedback voltage, and minimizes the common charge flow by coupling, via a defined feedback capacitance, the positive feedback voltage to the common sense electrode—the common sense electrode being electrically coupled to an input of the voltage-to-voltage converter component.

Abstract: To reduce effects of noise and improve detection accuracy, a sensor device includes: a detection electrode opposing an external electrode to which a predetermined voltage is applied, and configured to generate a voltage corresponding to a change in electrostatic capacitance; and a capacitive amplifier circuit having a first capacitor and a second capacitor connected in series to each other, and configured to detect the voltage generated in the detection electrode, and output a detection signal obtained by amplifying the voltage generated in the detection electrode based on a capacitance ratio between the first capacitor and the second capacitor.

Abstract: A signal generator generates a control signal that causes an inverter to supply a drive current in an AC voltage waveform to each phase of a motor. The signal generator alternately repeats a first energization cycle in which only a switch on an upper side of an arm is set to an ON state and a second energization cycle in which only a switch on a lower side of the arm is set to the ON state in the AC voltage waveform having a third energization cycle therebetween, changes the switches on the upper side and the lower side of the arm to the ON state and an OFF state in order in the third energization cycle, continuously changes an output voltage of the switch that has been further changed to the ON state, and generates a control signal to cause waveforms of the preceding and succeeding first energization cycle and second energization cycle to be continuous with the third energization cycle by varying a phase of the first to the third energization cycles in each phase.

Abstract: A signal generation circuit generates first and second non-overlapping digital signals from an input pulse signal. A first digital circuit includes: a first logical OR gate receiving the second digital signal and the input pulse signal to generate a third digital signal; and a second logical OR gate receiving the input pulse signal and a delayed version of the third digital signal to generate the first digital signal. A second digital circuit includes: a first logical AND gate receiving the first digital signal and the input pulse signal to generate a fourth digital signal; and a second logical AND gate receiving the input pulse signal and the fourth digital signal to generate the second digital signal.

Abstract: A method for closed loop operation of a capacitive accelerometer uses a single current source (62) and a single current sink (64) to apply an in-phase drive signal V1? to a first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal V2? to a second set of fixed capacitive electrode fingers. This provides a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintains the proof mass at a null position.

Abstract: A servo control signal is binarized using a digital delta-sigma modulator. The digital delta-sigma modulator forms a feedback loop including a digital adder/subtractor, a digital integrator, and a one-bit quantizer to perform pulse-density modulation of the input servo control signal and output the signal as a binary value of +1 or ?1.

Abstract: A capacitive force sensor that is inexpensive but highly sensitive, and is hardly affected by temperature changes and in-phase noise in the use environment. A force sensor includes: a deformable body having a force receiving portion and a fixed portion; a displacement body that is connected to the deformable body, and is displaced by elastic deformation caused in the deformable body; and a detection circuit that detects an applied force, in accordance with the displacement caused in the displacement body.

Abstract: A noise-reduced capacitive sensing unit is disclosed. The noise-reduced capacitive sensing unit includes: a sensing plate; a first bias voltage source for providing a first bias voltage; a second bias voltage source for providing a second bias voltage; a switch unit, connected between two bias voltage sources and the sensing plate, for selectively providing one of the bias voltages to the sensing plate; an excitation signal source for providing a bi-level waveform; a reference capacitor, formed between the excitation signal source and the sensing plate, for injecting the excitation signal to the sensing plate; and a voltage follower for providing sensing results, wherein an input node of the voltage follower is connected to the sensing plate.

Abstract: A capacitive accelerometer for measuring an acceleration value is provided, including a first and a second electrode; a third mobile electrode arranged therebetween, and forming with the first electrode a first capacitor, and with the second electrode a second capacitor, the third electrode being displaced when the accelerometer is subject to acceleration and generates a capacitance difference value transformable to electrical charges; a first and a second voltage source configured to selectively apply first and second voltages to the first and the second electrodes, respectively, and a third voltage to the third electrode, and to generate electrostatic forces acting on the third electrode, the first, second and/or third voltages applied during electrical charge transfers for collecting the electrical charges to measure the acceleration; and an electrostatic force compensator to compensate for missing electrostatic forces due to a modified charge transfer rate, a compensation amount dependent on the modified

Abstract: Disclosed is a flexible electronic circuit substrate that includes a device that is fabricated from layers of the flexible electronic circuit substrate as part of construction of the flexible electronic circuit substrate. Such devices could be functional units such as micro electro mechanical devices (MEMS) devices such as micro-accelerometer sensor elements, micro flow sensors, micro pressure sensors, etc.

Abstract: The present disclosure provides a CMOS MEMS device. The CMOS MEMS device includes a first substrate, a second substrate, a first polysilicon and a second polysilicon. The second substrate includes a movable part and is located over the first substrate. The first polysilicon penetrates the second substrate and is adjacent to a first side of the movable part of the second substrate. The second polysilicon penetrates the second substrate and is adjacent to a second side of the movable part of the second substrate.

Abstract: A microelectromechanical systems (MEMS) accelerometer that has high sensitivity to motion along the z axis is discussed. The device includes two symmetrical sets of bilateral, diametrically opposed high aspect ratio flexures that tether a movable proof mass to the frame of the device. The flexures are designed in such a way as to restrict movement of the proof mass along the x and y axes but readily allow motion along the z axis. More specifically, when the device experiences an acceleration along the x or y axes, the proof mass is restricted from moving because some of the bilateral, diametrically opposed flexures are in compression and others are in tension.

Abstract: Embodiments of the invention include a piezoelectric resonator which includes an input transducer having a first piezoelectric material, a vibrating structure coupled to the input transducer, and an output transducer coupled to the vibrating structure. In one example, the vibrating structure is positioned above a cavity of an organic substrate. The output transducer includes a second piezoelectric material. In operation the input transducer causes an input electrical signal to be converted into mechanical vibrations which propagate across the vibrating structure to the output transducer.

Abstract: A sensing structure for an accelerometer includes a support and a proof mass mounted to the support by flexible legs for in-plane movement in response to an applied acceleration along a sensing direction. The proof mass includes a plurality of moveable electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction. The structure also includes at least one pair of fixed capacitor electrodes comprising first and second sets of fixed electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction; the first set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a first offset in one direction from a median line therebetween, and the second set of fixed electrode fingers arranged to interdigitate with the moveable electrode fingers with a second offset in the opposite direction from a median line therebetween.

Abstract: A device for electrically measuring a force includes a load cell having a first metal electrode and a second metal electrode disposed opposite thereof in the direction of the force, each having contact surfaces in which the force to be measured can be impressed, and electrical resistance in the range of a few milliohms to less than or equal to ten ohms and a mean roughness value (Ra) of less than or equal to 400 nanometers, for forming force-independent conductivity, a thin insulating film disposed between the first and second metal electrodes in a form-locked manner, a reference metal electrode disposed on a section of the thin insulating film such that it is force-decoupled from the first metal electrode and tensioned with respect to the second metal electrode at a constant retaining force by a fastening element, and a measuring circuit designed as a half bridge or a full bridge.

Abstract: A sensor is disclosed. The sensor includes a substrate and a mechanical structure. The mechanical structure includes at least two proof masses including a first proof mass and a second proof mass. The mechanical structure also includes a flexible coupling between the at least two proof masses and the substrate. The at least two proof masses move in an anti-phase direction normal to the plane of the substrate in response to acceleration of the sensor normal to the plane and move in anti-phase in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane. The at least two proof masses move in a direction parallel to the plane of the substrate in response to an acceleration of the sensor parallel to the plane.

Abstract: The present disclosure provides a system and method for controlling operation of a resonance MEMS mirror. The system and method includes activating either an in-plane or staggered MEMS mirror via sets of activation pulses applied to the MEMS mirror, detecting current at the MEMS mirror, generating a window for detecting a change in a direction of the current at the MEMS mirror, and terminating the window and the activation pulse if a change in the current direction is detected during the window. In some embodiments, two sets of activation pulses are applied to the MEMS mirror.

Abstract: The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, an electrostatic force acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).

Abstract: A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor element that are disposed in the deformable unit. The first sensor element is disposed between the second sensor element and the substrate. The second sensor element is operable to measure deformation of the second body when an external force is applied to the deformable unit. The first sensor element is operable to measure deformation of the first body when the first body is deformed by the deformation of the second body.

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

Abstract: A CMOS IC substrate can include sense amplifiers, demodulation circuits and AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. The system can include charge pumps to create higher voltages as required in the system. The system can incorporate ADC to provide digital outputs that can be read via serial interface such as I2C. The system can also include temperature sensor which can be used to sense and output temperature of the chip and system and can be used to internally or externally compensate the gyroscope sensor measurements for temperature related changes. The CMOS IC substrate can be part of a system which can include a MEMS gyroscope having a MEMS sensor overlying the CMOS IC substrate.

Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.

Abstract: This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.

Abstract: A device for the differential acquisition of current includes an acquisition circuit including a charge amplifier connected, at the input, to terminals for connection to a signal emitting component, and at the output, to an integrator. A unit for injecting a charge signal is mounted between the terminals and the charge amplifier and is connected to a control unit connected to an output of the acquisition circuit. The control unit is so arranged as to control the injection of a charge signal, to detect a resultant signal at the output of the acquisition circuit and to compare the resultant signal with the injected signal. A method includes controlling such a device.

Abstract: A microsystem and/or nanosystem type device is disclosed, comprising: a first substrate, or intermediate substrate, comprising a mobile part, a second substrate or support substrate, at least one lower electrode, and one dielectric layer (101) located between the first and second substrates, the dielectric layer being arranged between the lower electrode and the first substrate; the first substrate comprising through vias filled with conducting material in contact with said lower electrode.

Abstract: Methods and apparatus, including computer program products, are provided for receivers. In one aspect there is provided an apparatus. The apparatus may include an in-phase sigma delta receiver coupled to a radio frequency input port providing at least a first carrier aggregation signal and a second carrier aggregation signal; and a quadrature phase sigma delta receiver coupled to the radio frequency input port providing at least the first carrier aggregation signal and the second aggregation signal, wherein the in-phase sigma delta receiver and the quadrature phase sigma delta receiver each include a resonator stage circuitry including at least one variable capacitor that varies notch frequencies to provide passbands for the first carrier aggregation signal and the second carrier aggregation signal. Related apparatus, systems, methods, and articles are also described.

Abstract: An electronic device includes a first functional element including a first movable element capable of moving in a first axis direction, and a first dummy electrode; a second functional element including a second movable element capable of moving in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode.

Abstract: A symmetrical MEMS accelerometer. The accelerometer includes a top half and a bottom half bonded together to form the frame and the mass located within the frame. The frame and the mass are connected through resilient beams. A plurality of hollowed parts and the first connecting parts are formed on the top and bottom side of the mass, respectively. The second connecting parts are formed on the top and bottom side of the frame, respectively. The resilient beams connect the first connecting part with the second connecting part. Several groups of comb structures are formed on top of the hollowed parts. Each comb structure includes a plurality of moveable teeth and fixed teeth. The moveable teeth extend from the first connecting part and the fixed teeth extend from the second connecting part. Capacitance is formed between the movable teeth and the fixed teeth. Since the accelerometer is symmetrical with a large mass, it has a large capacitance with a low damping force.

Abstract: A physical quantity sensor includes: a base substrate; a movable portion; a plurality of movable electrode fingers which are provided in the movable portion; a fixed electrode finger which is provided on the base substrate; and a fixing portion which fixes the movable portion to the base substrate. In the movable electrode fingers, a movable electrode finger which opposes the fixing portion in the first direction is included. A clearance between the movable electrode finger and the fixing portion is smaller than a clearance between the movable electrode finger and the fixed electrode finger. The width of the movable electrode finger is greater than the width of other movable electrode finger.

Abstract: A functional element includes a first base body; a coupling section which is coupled to the first base body; a support body which extends from the coupling section; a mass body which is coupled to the support body; a drive electrode which is provided on a surface side that faces the mass body; a detection working electrode which extends from the support body; and a detection fixed electrode which is coupled to the first base body and faces at least a portion of the detection working electrode. The mass body can be displaced in a direction which intersects a main surface of the mass body. When a distance between the first base body and the mass body is referred to as d1 and a distance between the first base body and the detection fixed electrode is referred to as d2, a relation of d1>d2 is satisfied.

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

Abstract: Various embodiments of the invention allow to reduce unwanted high-Q oscillations in capacitive MEMS sensors. In certain embodiments, stabilization of high-Q MEMS sensors is accomplished through a dedicated ultra-low power circuit that provides a bias voltage to one or more sensor electrodes during an OFF-phase. The bias voltage forces a balance condition that eliminates perturbations and enables smooth transitions that, ultimately, result in shorter sensor settling times.

Abstract: A pressure sensor system comprises a force feedback loop. The force feedback loop is configured to receive a measured pressure sensor signal and generate a feedback signal based on the measured pressure and an electrostatic force. The electrostatic force is generated based on the feedback signal and combined with the measured force keeping the resultant sensor signal stable.

Abstract: Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

Abstract: A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

Abstract: A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.

Abstract: An accelerometer sensor and method of controlling the sensor, the accelerometer sensor including at least one electrostatic pendular accelerometer having stationary first and second electrodes fastened to a housing and connected to an exciter circuit, and a third electrode carried by a pendulum connected to the housing, thereby being movable and being connected to a detector circuit. The exciter circuit has an output connected to a switch connected to the first and second electrodes, the switch having a first connection position and a second connection position for selectively connecting the first or second electrode to the exciter circuit. The detector circuit, the exciter circuit, the switch, and the detector circuit are connected to a control circuit arranged so the first and second electrodes are excited by pulse trains, thus keeping the pendulum in a setpoint position and determining an acceleration to which the pendulum is subjected.

Abstract: A microelectromechanical systems (MEMS) accelerometer with extended operational capabilities beyond a closed-loop saturation. The present invention combines the closed-loop feedback signal and the measured proof-mass position into a hybrid acceleration measurement, which effectively provides an operating range equal to the traditional closed-loop operating range plus the sensor's mechanical open-loop range.

Abstract: A physical quantity sensor includes: a substrate; a first movable body that is provided on the substrate and includes first movable electrode sections; first fixed electrode sections disposed on the substrate so as to face the first movable electrode sections; a second movable body that is provided on the substrate and includes second movable electrode sections; and second fixed electrode sections disposed on the substrate so as to face the second movable electrode sections. A post section protruding from the principal surface of the substrate is provided in a portion of the substrate located between the first and second movable bodies in plan view.

Abstract: A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes.

Abstract: Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.

Abstract: An anti-stiction method is proposed in an inertial micro-electro-mechanical device. The device includes: a mobile mass, suspended to an armature via a spring, and having at least one mobile electrode; and at least one fixed electrode rigidly attached to the armature, each fixed electrode cooperating with one of the at least one mobile electrode to form a pair of electrodes. The anti-stiction method carries out a step of detecting, for at least one stuck pair of electrodes, a stiction associated to a stiction force and a step of applying, during a predetermined time period, a predetermined voltage between the electrodes of at least one of the pair or pairs of electrodes, so as to create an electrostatic force which generates a displacement of the mobile mass according to the direction of the stiction force.