Abstract: An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Abstract: An integrated MEMS inertial sensor device includes one or more three-axis MEMS inertial sensor devices, such as accelerometers, with dual or single proof mass configurations. These designs can be compact and can decouple the motion of each axis to minimize the measurement errors due to cross-axis sensitivity. Some embodiments include a frame to decouple the motion of two axes and to provide geometric symmetry. Some embodiments also include double-folded springs. In a specific embodiment, the three axes of an integrated MEMS accelerometer device are entirely decoupled. Thus, the actuation of each axis, through a force due to acceleration, has little or substantially no effect on the other axes.

Abstract: A MEMS device (20) includes a movable element (20) suspended above a substrate (22) by a spring member (34) having a spring constant (104). A spring softening voltage (58) is applied to electrodes (24, 26) facing the movable element (20) during a powered mode (100) to decrease the stiffness of the spring member (34) and thereby increase the sensitivity of the movable element (32) to an input stimulus (46). Upon detection of a stiction condition (112), the spring softening voltage (58) is effectively removed to enable recovery of the movable element (32) from the stiction condition (112). A higher mechanical spring constant (104) yields a stiffer spring (34) having a larger restoring force (122) in the unpowered mode (96) in order to enable recovery from the stiction condition (112). A feedback voltage (56) can be applied to feedback electrodes (28, 30) facing the movable element (32) to provide electrical damping.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other.

Abstract: The present invention relates to a microelectromechanical structure, and more particularly, to systems, devices and methods of incorporating z-axis out-of-plane stoppers that are controlled to protect the structure from both mechanical shock and electrostatic disturbance. The z-axis out-of plane stoppers include shock stoppers and balance stoppers. The shock stoppers are arranged on a cap substrate that is used to package the structure. These shock stoppers are further aligned to a proof mass in the structure to reduce the impact of the mechanical shock. The balance stoppers are placed underneath the proof mass, and electrically coupled to a balance voltage, such that electrostatic force and torque imposed by the shock stoppers is balanced by that force and torque generated by the balance stoppers. This structure is less susceptible to mechanical shock, and shows a negligible offset that may be induced by electrostatic disturbance caused by the shock stoppers.

Abstract: A driving circuit for a gyroscope device provided with a micromechanical detection structure having a driving mass, which is driven in resonance condition and elastically coupled to which is a sensing mass for enabling detection of angular velocity; the driving circuit has: a set of driving electrodes, coupled to the driving mass; a driving stage supplying driving signals to the set of driving electrodes to cause oscillation in resonance condition of the driving mass; and a reading stage, which detects movement of the driving mass to implement a feedback control of the driving signals. In particular, the reading stage is selectively coupleable to the set of driving electrodes in a way temporally alternative to the driving stage, for discrete-time detection of the movement of the driving mass.

Abstract: Certain disclosed accelerometer sensors and methods employ a proof mass that is acted upon by multiple feedback paths. One illustrative sensor embodiment includes an electrode arrangement proximate to a proof mass, the electrode arrangement providing multiple electrostatic force centroids on the proof mass. The sensor embodiment further includes multiple feedback paths, each feedback path independently controlling an electrostatic force for a respective centroid, and an output unit that converts signals from the multiple feedback paths into an acceleration-responsive output signal. An illustrative method embodiment derives multiple feedback signals from at least one displacement signal, applies the multiple feedback signals to an arrangement of electrodes that capacitively couple the proof mass to a substrate, and converts the multiple feedback signals into an acceleration signal.

Abstract: An acceleration-sensing device having error correction includes a stator having at least one conductor affixed to a surface and a proof mass having a first conductor affixed at a first location relative to the at least one conductor affixed to a surface of the stator. The proof mass includes a second conductor affixed at a second location relative to the at least one conductor affixed to a surface of the stator, wherein an excitation signal applied to the first conductor of the proof mass brings about a force on the proof mass in the plane of motion of the proof mass that is substantially equally opposed by a force resulting from an excitation signal applied to the second conductor of the proof mass in the plane of motion of the proof mass.

Abstract: A method of correcting the gain of a capacitive member having electrodes that are movable relative to each other including the steps of successively applying to one of the electrodes, reduced bias voltages having opposite signs and a common value below a threshold for which a remanent field generated by said reduced bias voltages can be measured, making corresponding measurements of the output signals from the capacitive member; taking an average, and correcting the gain of the capacitive member as a function of the measured output signal.

Abstract: A multi-axis force-balance accelerometer has a proof mass included within an enclosure. An electrically conductive tether, flexible in 6 degrees of freedom, provides a compliant electrically conductive link between the proof mass and the enclosure. Mechanical stops limit a range of motion of the proof mass. The enclosure includes captive plates and force balancing control loops for positioning the proof mass in a null position within the enclosure for each of the 3 rectilinear reference axes, and in a null position within the enclosure for each of 3 angular reference axes. The electrically conductive tether is sufficiently mechanically compliant that, on deactivation of the force balancing control loops for the rectilinear axes, the proof mass falls so as to rest on the mechanical stops.

Abstract: An apparatus includes a microelectromechanical system (MEMS) device including a mass anchored to a substrate. The MEMS device is configured to generate an output signal indicative of motion of the mass with respect to the substrate. The MEMS device includes a feedback module configured to provide a control signal to the MEMS device. The control signal is based on the output signal. The MEMS device is configured to apply a damping force to the mass in response to the control signal.

Abstract: An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.

Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs, wherein the proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one fixed anchor having a second plurality of combs. The first plurality of combs is interleaved with the second plurality of combs. Each of the combs in the first plurality of combs and the second plurality of combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that fringing electric fields are screened to reduce motion of the first plurality of combs along a sense axis due to the fringing electric fields.

Abstract: A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes.

Abstract: Various systems and methods for sensing are provided. In one embodiment, a sensing system is provided that includes a first electrode array disposed on a proof mass, and a second electrode array disposed on a planar surface of a support structure. The proof mass is attached to the support structure via a compliant coupling such that the first electrode array is positioned substantially parallel to and faces the second electrode array and the proof mass is capable of displacement relative to the support structure. The first electrode array includes a plurality of first patterns of electrodes and the second electrode array includes a plurality of second patterns of electrodes. The sensing system further includes circuitry configured to provide an input voltage to each of the second patterns of electrodes to produce an electrical null position for the first electrode array.

Abstract: An electrostatic force generator is disclosed. The electrostatic force generator includes an RF AC voltage source, a capacitive module, a resonant capacitive-inductive bridge (CIB) module, a lock-in amplifier module, and a proportional-integral-derivative (PID) controller. The resonant capacitive-inductive bridge module converts the differential capacitance to a differential signal. The differential signal from the resonant capacitive-inductive bridge module is demodulated at the RF excitation frequency by the lock-in amplifier module. The PID controller receives the output signal from the lock-in amplifier module and generates two audio frequency AC signals to generate a compensation electrostatic force and maintain the capacitance balance inside the capacitive module.

Abstract: An out-of-plane comb-drive accelerometer. An example accelerometer linearizes a response. An example accelerometer includes one or more stators having a plurality of tines having a surface parallel to a surface of substrate. The tine surface is at a first distance from the surface of the substrate. A proof mass includes one or more rotors that include a plurality of rotor tines attached to an edge of the proof mass. The rotor tines are interleaved with corresponding ones of the stator tines. The rotor tines include a surface parallel to a surface of the substrate. The rotor tine surface is at a second distance from the surface of the substrate. The first distance and second distance are unequal by a threshold amount. Motion of the rotor relative to the stator in an out-of-plane direction provides a linear change in a capacitive value measured across the rotor and the stator.

Abstract: Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves including MEMS structures that in normal operation are robust against the presence of particles but which can be made sensitive to that presence during a test mode prior to use, e.g.

Abstract: MEMS accelerometers have a substrate, and a proof mass portion thereof which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.

Abstract: An acceleration sensor includes a substrate, first and second torsion beams, first and second detection frames, first and second detection electrodes, first and second link beams, and an inertial mass body. The first and second torsion beams are distorted around the first and second torsion axes. The first and second detection frames are rotated about the first and second torsion axes. The first and second detection electrodes detect an angle formed between the substrate and each of the first and second detection frames. The first link beam is on a first axis located at a position shifted from a position of the first torsion axis to one end side of the first detection frame along a direction crossing the first torsion axis. The second link beam is on a second axis located at a position shifted from a position of the second torsion axis in a direction identical to the direction of shift from the position of the first torsion axis.

Abstract: The physical quantity measuring apparatus includes a first function of generating voltage used for position-controlling a movable body, a second function of detecting a position of the movable body during a position detecting period, a third function of calculating a control amount necessary to keep the movable body at a predetermined position on the basis of a detection result by the second function, and causing the first function to generate a control voltage corresponding to the calculated control amount to keep the movable body at the predetermined position during a position controlling period, and a fourth function of setting the position detecting period and the position controlling period in a time-sharing manner so that the position detecting period and the position controlling period do not overlap with each other.

Abstract: Microelectromechanical system (MEMS) devices and methods with controlled die bonding areas. An example device includes a MEMS die having a glass layer and a protective package. The glass layer includes a side facing the protective package with at least one mesa protruding from a recessed portion of the glass layer. The at least one mesa is attached to the protective package. An example method includes creating at least one mesa on a glass layer of a MEMS die and attaching the at least one mesa to a protective package.

Abstract: An acceleration sensor having a mass which is movably supported outside its center of gravity, first electrodes on the mass and second electrodes located at a distance therefrom forming a capacitive sensor in order to determine a change in position of the mass as a function of time. At least one spring element which generates a restoring force when the mass is deflected from its neutral position is provided on the side of the mass facing the capacitive sensor. The mass may be obtained by being exposed from a material layer, and the mass is surrounded, at least at its side faces, by this material.

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration.

Abstract: The systems and methods described herein address deficiencies in the prior art by enabling the fabrication and use of accelerometers, whether MEMS-based, NEMS-based, or CMOS-MEMS based, in the same integrated circuit die as a CMOS chip. In one embodiment, the accelerometer is fabricated on the same integrated circuit die as a CMOS chip using a typical CMOS manufacturing process.

Abstract: An apparatus includes a seismic acquisition system that includes an accelerometer. The accelerometer includes a capacitive MEMS-based sensor, a controller and a charge amplifier. The sensor includes a proof mass; input terminals to receive a first signal; and an output terminal that is electrically connected to the proof mass to provide a second signal. The first signal, which is regulated by the controller, controls an equilibrium restoring force for the sensor and causes the sensor to provide the second signal. The charge amplifier provides a third signal, which is indicative of a position of the proof mass. The charge amplifier has an input terminal to continuously receive the second signal during a time in which the first signal controls the equilibrium restoring force and causes the sensor to provide the second signal.

Abstract: Systems and methods for controlling a closed-loop accelerometer system. A system includes an accelerometer with a driver that responds in a nonlinear manner and a rebalancing controller in signal communication with the driver. The rebalancing controller includes a proportional-integral-derivative (PID) control portion having at least one variable gain component. A method includes sensing a movement of a proof mass, determining a static g field based on the sensed movement, setting at least one variable gain component of a PID controller based on the determined static g field, and rebalancing the proof mass using the PID controller.

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension anus that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration.

Abstract: An electricity-generating backpack that is substantially lighter in weight, has the multiple springs replaced with one large spring whose spring constant can be adjusted in the field in seconds, and replaces a DC generator with a brushless AC generator that permits approximately 70% generator efficiency and the generation of up to 20 W of electrical power by converting mechanical energy to electrical power. A device is provided that always removes some electricity, but not too much, as necessary to extract large levels of the electricity while controlling damping by providing electrical damping circuits including a DC-DC converter designed to emulate a desired load at its input terminals. Additional electricity generating E-MOD devices may be used for generating additional power by hooking an E-Mod device to a generator and to the backpack belt at the wearer's hip and includes a wand that fits against the wearer's femur so as to move through a range of motion as the patient walks.

Abstract: A micromachined sensor having a capacitive sensing structure. The sensor includes a first substrate with first and second conductive layers separated by a buried insulator layer, and a member defined by the first and second conductive layers and the buried insulator layer. A first set of elements defined with the first conductive layer is connected to the member and includes first and second elements that are electrically isolated from each other by the buried insulator layer. A second set of elements is defined with the first conductive layer and capacitively coupled with the first set of elements. A second substrate is bonded to the first substrate so that the member and the first set of elements are movably supported above the second substrate. The second set of elements is anchored to the second substrate, and the first and second sets of elements are physically interconnected through the second substrate.

Abstract: The invention relates to an accelerometer comprising a moving mass (5) and a fixed part (2), which uses variations in capacitance (3, 4) in order to detect the movement of the mass (5). The inventive accelerometer comprises a first series of electrodes (4) which are solidly connected to the mass (5) and which are interdigitated with a series of electrodes (3, 7) which are solidly connected to the fixed part (2). According to the invention, each moving electrode (4), together with an adjacent fixed electrode (3), forms a capacitance which varies according to the position of the moving mass (5). The accelerometer further comprises an electronic circuit which is used to detect the variation in at least one capacitance between the moving mass (5) and the fixed part (2), in the form of a moving mass displacement indicator.

Abstract: An apparatus (100, 200) and method (300) for sensing acceleration are provided. The method includes producing (305) a first signal in response to an acceleration sensed by a transducer, producing (310) a second signal based on the first signal, and actuating (315) the transducer in response to the second signal to remove offset in the transducer. The first signal represents the acceleration, and the second signal represents a low frequency component associated with an offset in the transducer. The apparatus (100) includes a transducer (102) producing a capacitance in response to the acceleration, a sensing system (104, 106, 108) producing a first signal from the capacitance representing the acceleration, and a compensation system (112, 110) coupled between the sensing system and transducer. The compensation system produces a second signal based on the first signal for substantially removing an offset of the transducer.

Abstract: First and second detection frames are supported by a substrate to be rotatable about first and second torsion axes. A first link beam is connected to the first detection frame on an axis located at a position moved from a position of the first torsion axis in a first direction crossing the first torsion axis and directed to one end side of the first detection frame. A second link beam is connected to the second detection frame on an axis located at a position shifted from a position of the second torsion axis in a second direction opposite to the first direction. An inertia mass body is displaceable in a thickness direction of the substrate by being linked with the first and second detection frames by the first and second link beams, respectively. This constitution makes it possible to obtain a highly precise acceleration sensor hardly influenced by disturbances.

Abstract: System and method for mitigating errors in electrostatic force balanced instrument is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments that employ charge pulses to generate an electrostatic force to null an inertial proof mass disposed between opposing electrodes. The system and method mitigate charge buildup by applying charge pulses to each opposing electrode of a sensing element for a given charge cycle time period in a normal polarity configuration followed by charge pulses to each opposing electrode of the sensing element for a second given charge cycle time period in a reverse polarity configuration.

Abstract: The invention concerns an inertial sensor or an actuator based on diamagnetic levitation, said inertial sensor or actuator comprising support means serving as main support body for an inertial sensor or for an actuator, a two dimensional array of permanent magnets and a diamagnetic element facing the said array characterized in that said diamagnetic material constitutes the inertial mass or the moving part of the actuator.

Abstract: Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension arms that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration.

Abstract: A micromachined sensor and a process for fabrication and vertical integration of a sensor and circuitry at wafer-level. The process entails processing a first wafer to incompletely define a sensing structure in a first surface thereof, processing a second wafer to define circuitry on a surface thereof, bonding the first and second wafers together, and then etching the first wafer to complete the sensing structure, including the release of a member relative to the second wafer. The first wafer is preferably a silicon-on-insulator (SOI) wafer, and the sensing structure preferably includes a member containing conductive and insulator layers of the SOI wafer. Sets of capacitively coupled elements are preferably formed from a first of the conductive layers to define a symmetric capacitive full-bridge structure.

Abstract: A torque driver that includes a regulator circuit for mitigating zero-g discontinuity effects and deadbanding is presented. An accelerometer may comprise the torque driver and the torque driver may be arranged to receive a control signal from a control circuit that is coupled to deflection sensing circuitry. When the accelerometer undergoes an acceleration the deflection sensing circuitry generates an acceleration signal that is communicated to the control circuit. The control circuit responsively generates a control signal, which the torque driver users to balance a proof mass beam within the accelerometer. The regulator circuit mitigates zero-g discontinuity effects and deadbanding by preventing the torque signal from producing torque signals that simultaneously track the control signal. To do this, the regulator circuit may include a rectifying buffer and/or a modulator.

Abstract: An accelerometer uses variations in capacitance to detect and measure the movement of a moving mass in relation to a fixed part. The accelerometer comprises a first series of electrodes, which are solidly connected to the mass and which are interdigitated with a second series of electrodes. The second series of electrodes are solidly connected to the fixed part. The accelerometer further comprises an electronic circuit which: detects the variation in at least one capacitance between the moving mass and the fixed part, in the form of a moving mass displacement indicator; and also generates an electrostatic stress in order to return the moving mass to the initial position thereof.

Abstract: A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.

Abstract: An oversampling electromechanical modulator, including a micro-electromechanical sensor which has a first sensing capacitance and a second sensing capacitance and supplies an analog quantity correlated to the first sensing capacitance and to the second sensing capacitance; a converter stage, which supplies a first numeric signal and a second numeric signal that are correlated to the analog quantity; and a first feedback control circuit for controlling the micro-electromechanical sensor, which supplies an electrical actuation quantity correlated to the second numeric signal.

Abstract: System and method for mitigating errors in electrostatic force balanced instrument is provided. The system and method mitigate errors in measurement readings caused by charge buildup in force balanced instruments that employ charge pulses to generate an electrostatic force to null an inertial proof mass disposed between opposing electrodes. The system and method mitigate charge buildup by applying charge pulses to each opposing electrode of a sensing element for a given charge cycle time period in a normal polarity configuration followed by charge pulses to each opposing electrode of the sensing element for a second given charge cycle time period in a reverse polarity conjuration.

Abstract: A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.

Abstract: The invention relates to an accelerometer comprising a moving mass (5) and a fixed part (2), which uses variations in capacitance (3, 4) in order to detect the movement of the mass (5). The inventive accelerometer comprises a first series of electrodes (4) which are solidly connected to the mass (5) and which are interdigitated with a series of electrodes (3, 7) which are solidly connected to the fixed part (2). According to the invention, each moving electrode (4), together with an adjacent fixed electrode (3), forms a capacitance which varies according to the position of the moving mass (5). The accelerometer further comprises an electronic circuit which is used to detect the variation in at least one capacitance between the moving mass (5) and the fixed part (2), in the form of a moving mass displacement indicator.

Abstract: The present invention relates to MicroElectroMechanical Systems (MEMS), devices and applications thereof in which a proof mass is caused to levitate by electrostatic repulsion. Configurations of electrodes are described that result in self-stabilized floating of the proof mass. The electrical properties of the electrodes causing floating, such as currents and/or voltages, typically change in response to environmental perturbations affecting the proof mass. Measuring such currents and/or voltages allow immediate and accurate measurements to be performed related to those perturbations affecting the location and/or the orientation of the proof mass. Additional sensing electrodes can be included to further enhance sensing capabilities. Drive electrodes can also be included that allow forces to be applied to the charged proof mass resulting in a floating, electrically controllable MEMS device.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.

Abstract: A single crystal silicon substrate (1) is bonded through an SiO2 film (9) to a single crystal silicon substrate (8), and the single crystal silicon substrate (1) is made into a thin film. A cantilever (13) is formed on the single crystal silicon substrate (1), and the thickness of the cantilever (13) in a direction parallel to the surface of the single crystal silicon substrate (1) is made smaller than the thickness of the cantilever in the direction of the depth of the single crystal silicon substrate (1), and movable in a direction parallel to the substrate surface. In addition, the surface of the cantilever (13) and the part of the single crystal silicon substrate (1), opposing the cantilever (13), are, respectively, coated with an SiO2 film (5), so that an electrode short circuit is prevented in a capacity-type sensor. In addition, a signal-processing circuit (10) is formed on the single crystal silicon substrate (1), so that signal processing is performed as the cantilever (13) moves.