Abstract: A transduction detection device includes a substrate and a strain gauge suspended above a face of the substrate having a piezoresistive element. At least one portion of the surface of the piezoresistive element is covered by a stack having, successively from the surface of the piezoresistive element, a dielectric layer and an electrically conductive layer.

Abstract: A power consumption control device includes: a voltage detection circuit configured to detect whether an input power supply of a magnetic levitation system to be controlled is turned off; and a comparison unit configured to detect an operating parameter of a motor of the magnetic levitation system during an operation of the motor as a generator, and compare the operating parameter with a set parameter to obtain a comparison result; a motor controller of the magnetic levitation system controls the motor of the magnetic levitation system to operate as the generator in a case that the input power supply is turned off, a bearing controller of the magnetic levitation system adjusts a magnitude of a bearing bias current of the magnetic levitation system according to the comparison result, to control a power consumption of a magnetic levitation bearing of the magnetic levitation system within a set range.

Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate, a semiconductor layer, a second substrate, and a eutectic sealing structure. The semiconductor layer is over the first substrate. The semiconductor layer has a cavity at least partially through the semiconductor layer. The second substrate is over the semiconductor layer. The second substrate has a through hole. The eutectic sealing structure is on the second substrate and covers the through hole. The eutectic sealing structure comprises a first metal layer and a second metal layer eutectically bonded on the first metal layer. A method for manufacturing a semiconductor structure is also provided.

Abstract: A representative method involves: generating measured angular velocities and measured axial accelerations; calculating a resulting deviation associated with movements and rotations in a spatial reference frame by: providing a previous quaternion corresponding to time T?1 based on the measured axial accelerations corresponding to time T?1 and the measured angular velocities corresponding to time T?1; converting the measured angular velocities corresponding to time T based on the previous quaternion into a current quaternion and predicted axial accelerations; comparing the predicted axial accelerations with the measured axial accelerations corresponding to time T to obtain a first comparison result; obtaining an updated quaternion associated with time T based on the current quaternion and the first comparison result, and using the updated quaternion as a next occurrence of the previous quaternion; and providing the resulting deviation based on the updated quaternion; and, providing content based on the resultin

Abstract: A micromechanical sensor. The sensor includes a substrate, a cap element situated on the substrate, at least one seismic mass that is deflectable orthogonal to the cap element, an internal pressure that is lower by a defined amount relative to the surrounding environment prevailing inside a cavity, and a compensating element designed to provide a homogenization of a temperature gradient field in the cavity during operation of the micromechanical sensor.

Abstract: This disclosure is related to devices, systems, and techniques for determining an acceleration. For example, an accelerometer system includes a proof mass, a pole piece connected to the proof mass, and a coil disposed around the pole piece and connected to the proof mass, where the coil is rectangular in shape. Additionally, the accelerometer system includes circuitry configured to deliver an electrical signal to the coil in order to maintain the proof mass at a null position and determine an electrical current value corresponding to the electrical signal. Additionally, the circuit is configured to identify, based on the electrical current value, an acceleration of the accelerometer system.

Abstract: A biomass impact sensor for sensing impacts of biomass material may include a pressure sensitive film having a first sensing face and a second opposite face, a first layer of a first material composition directly abutting the first sensing face having a first stiffness, and a second layer of a second material composition directly abutting the second opposite face. The first layer and the second layer may be joined along opposite edges of the pressure sensitive film to envelope the sensing material layer on the opposite edges.

Abstract: An assembly has a base structure, a rotatable structure, a first magnet coupled to the base structure, a second magnet coupled to the rotatable structure, and a magnetic field sensor. The magnetic field sensor can identify at least one condition (i.e., position) of the assembly.

Abstract: An accelerometer includes an upper stator, a lower stator, and a proof mass assembly disposed between the upper and the lower stator. At least one of the upper stator or the lower stator includes an excitation ring, a magnet coupled to the excitation ring, and an asymmetric pole piece coupled to a top surface of the magnet. The asymmetric pole piece covers at least a portion of the top surface of the magnet such that a center of magnetic flux associated with the at least one of the upper stator or the lower stator is aligned with a center of mass of the proof mass assembly.

Abstract: A thermally insensitive open-loop hung mass accelerometer utilizes a transverse geometry to attach the body/flexures/proof mass so that thermal expansion effects due to thermal gradients across the accelerometer or bulk temperatures changes of one flexure relative to the other cause minimal or no axial displacement of the proof mass. In this geometry, multiple flexures may be stacked to achieve the required stiffness, thus reducing manufacturing costs and any tolerancing issues, without affecting thermal sensitivity. The accelerometer is suitably designed to exhibit a radial symmetry. The accelerometer is suitably designed to use low CTE materials for at least the proof mass and body and a low thermal expansion differential Eddy current sensor head.

Abstract: In embodiments, three magnetic field sensing elements are arranged equidistantly from each other to define a plane and a central axis perpendicular to the plane. The magnetic field sensing elements are configured to generate a respective output signal representing proximity of a magnetic target that is proximate to the central axis and capable of moving relative to the central axis. A processor circuit is coupled to receive output signals from each of the sensors and configured to calculate a position of the magnetic target relative to the plane.

Abstract: Inertial measurement units attached to a non-rigid body may measure a common motion event when the body changes direction of travel. Acceleration measurements made by the inertial measurement units of the event are used to determine a common reference direction which in turn can be used to derive, individually for each inertial measurement unit, a new orientation intended to be a better representation of the actual orientation of the inertial measurement unit.

Abstract: An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.

Abstract: An accelerometer includes a mass, suspended by a beam, and associated conductive paths. Each conductive path is subjected to a magnetic field, such that, when a time varying signal is applied to the conductive paths, a characteristic resonant frequency is produced, and when the mass experiences an acceleration, a respective change in the resonant frequency is produced that may be interpreted as acceleration data. Embodiments include methods of manufacturing an accelerometer and systems and devices incorporating the accelerometer.

Abstract: A MEMS gyro is provided, having a movable portion, a non-movable portion, and a magnetic sensing structure that comprises a magnetic source disposed at the movable portion, a magnetic sensing element positioned at the non-movable portion. The movable portion is capable of moving in response to external angular velocity or an external accelerator such that the magnetic field sensed by the magnetic sensing element is in relation to the movement of the movable portion, therefore, the angular velocity or the accelerator. A method of making the MEMS gyro device is disclosed herein.

Abstract: Techniques and mechanisms to provide for metering acceleration. In an embodiment, a microelectromechanical accelerometer includes a magnet, a mass, and a first support beam portion and second support beam portion for suspension of the mass. Resonance frequency characteristics of the first support beam portion and second support beam portion, based on the magnet and a current conducted by the first support beam portion and second support beam portion, are indicative of acceleration of the mass. In another embodiment, the accelerometer further includes a first wire portion and a second wire portion which are each coupled to the mass and further coupled to a respective anchor for exchanging a signal with the first wire portion and the second wire portion. The first wire portion and the second wire portion provide for biasing of the mass.

Abstract: An electronic device is disclosed comprising an acceleration sensor operable to generate an acceleration signal, and a free fall detector operable to detect a free fall event in response to the acceleration signal. A frequency response of the acceleration signal is measured, and the free fall detector is disabled when a magnitude of the frequency response within one of a plurality of frequency bands exceeds a threshold, wherein each frequency band corresponds to one of a plurality of normal operating modes.

Abstract: A micromechanical sensor device, having a first unhoused sensor unit, and at least one second unhoused sensor unit, the sensor units being functionally connected to one another, the sensor units being essentially vertically configured one over the other so that a sensor unit having a larger footprint completely covers a sensor unit having a smaller footprint.

Abstract: According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Abstract: Embodiments relate to integrated sensors and sensing methods. Embodiments relate to integrated sensor layouts. Embodiments are configured to maximize a ratio of sensor spacing over a die area. While being generally applicable to many different types of sensors, particular advantages can be presented for magnetoresistive (xMR) sensors.

Abstract: A device for visually indicating a change in the operational state of a proximity sensor. The device includes a transparent housing having a cavity and a magnet device for generating a magnetic field. In addition, a sleeve is attached to the housing. The magnet device is concealed within the sleeve in a first position to indicate a first operational state. When a target is positioned adjacent the sensor end, magnetic attraction occurs between the target and the magnet device due to the magnetic field to cause movement of the magnet device to a second position within the cavity wherein the magnetic field does not act on the proximity sensor to change the operational state from the first operational state to a second operational state. Further, the magnet device is visible in the second position to indicate the second operational state.

Abstract: A magnetic encoder including an object to be detected, a casing opposite to the object, a magnet and a magnetic sensor accommodated in the casing is provided. The casing of the magnetic encoder has an opposite wall opposite to the object. The opposite wall has a thickened portion and a thin portion integrally formed with the thickened portion. The thin portion has a smaller thickness than the thickened portion. The magnetic sensor is situated at the thin portion.

Abstract: This invention relates to methods and apparatus for measuring physical properties using microwave cavity sensors. In operation, a number of microwave cavity sensors are interrogated by a remote wireless unit in order to determine the current resonant frequency for the sensor. The current values for various parameters measured by the sensors, such as temperature, stress/stain, or the like, are determined by comparing the current resonant frequency to a first resonant frequency of the sensor, and thus, detect any change in the value of the selected parameter. In particular, the present invention is directed toward extending the range over which such measurements may be performed, using these types of sensors.

Abstract: A sensor device includes a first CMOS chip and a second CMOS chip with a first moving-gate transducer formed in the first CMOS chip for implementing a first 3-axis inertial sensor and a second moving-gate transducer formed in the second CMOS chip for implementing a second 3-axis inertial sensor. An ASIC for evaluating the outputs of the first 3-axis inertial sensor and the second 3-axis inertial sensor is distributed between the first CMOS chip and the second CMOS chip.

Abstract: A speed pick-up ring includes a main body having a plurality of targets and defining a plurality of notches. Each notch is disposed between adjacent targets. Each notch includes a base wall, a first sidewall and an oppositely disposed second sidewall. The base wall includes a convex portion. A fluid device includes a housing and a variable reluctance speed sensor engaged to the housing. The fluid device further includes a speed pick-up ring disposed within the housing. The speed pick-up ring includes a main body having a plurality of targets and defining a plurality of notches. Each notch is disposed between adjacent targets. Each notch includes a base wall, a first sidewall that is generally concave and an oppositely disposed second sidewall that is generally concave. The base wall includes a convex portion.

Abstract: A device and method measure an acceleration of a moving body. The device contains a solid body having a moving part and an internal cavity capable of allowing for a free movement of the moving part. The internal cavity has at least one wall forming a sloping track, the sloping track having a surface allowing for the free movement of the moving part on the sloping track between an initial position at rest and a distant position spaced from the initial position situated at an end of the internal cavity and reachable by the moving part during a variation in acceleration. The moving part moving from the initial position to the distant position in the internal cavity under an effect of the acceleration of the moving body. At least one detector is provide and is capable of detecting a presence of the moving part at the distant position.

Abstract: An integrated circuit (IC) current sensor that self-calibrates to adjust its signal gain when employed in a current divider configuration is presented. The current sensor includes an integrated current conductor, a magnetic field transducer, a controllable gain stage and a calibration controller. The integrated current conductor is adapted to receive a portion of a calibration current. The calibration current corresponds to a full scale current. The magnetic field transducer, responsive to the calibration current portion, provides a magnetic field signal having a magnitude proportional to a magnetic field generated by the calibration current portion. The controllable gain stage is configured to amplify the magnetic field signal with an adjustable gain to provide an amplified magnetic field signal.

Abstract: An inertial sensor having a body with an excitation coil and a first sensing coil extending along a first axis. A suspended mass includes a magnetic-field concentrator, in a position corresponding to the excitation coil, and configured for displacing by inertia in a plane along the first axis. A supply and sensing circuit is electrically coupled to the excitation coil and to the first sensing coil, and is configured for generating a time-variable flow of electric current that flows in the excitation coil so as to generate a magnetic field that interacts with the magnetic-field concentrator to induce a voltage/current in the sensing coil. The integrated circuit is configured for measuring a value of the voltage/current induced in the first sensing coil so as to detect a quantity associated to the displacement of the suspended mass along the first axis.

Abstract: A device (120) for acquiring and providing information which can be associated with a football player, said device comprising: an acceleration sensor (129) for detecting accelerations acting on the devices; a memory unit (121) for storing measured acceleration values with associated time stamps and an ID associated with the device (120); and a radio unit (128) for receiving a first radio signal (150) with a first time stamp, wherein the first radio signal represents a deformation of a ball, and for transmitting a second radio signal (160) including the ID associated with the device (120) in case that a check of the values in the memory unit shows that an acceleration was detected by the device at the corresponding time.

Abstract: Sensors for detecting rapid deceleration/acceleration events are disclosed herein. A sensor configured in accordance with one embodiment of the disclosure includes a magnetically operable device proximate to a magnet. The sensor also includes a biasing member operably coupled to a magnetic shield. The biasing member controls the movement of the magnetic shield between a first position that shields the magnetically operable device from the magnet, and a second position that exposes the magnetically operable device to the magnet. In a deceleration/acceleration event, the magnetic shield overcomes the biasing member and moves from the first position to the second position, thereby causing the magnetically operable device to be exposed to the magnet.

Abstract: A micro-electro-mechanical system (MEMS) pressure sensor includes a silicon spacer defining an opening, a silicon membrane layer mounted above the spacer, a silicon sensor layer mounted above the silicon membrane layer, and a capacitance sensing circuit. The silicon membrane layer forms a diaphragm opposite of the spacer opening, and a stationary perimeter around the diaphragm and opposite the spacer. The silicon sensor layer includes an electrode located above the diaphragm of the silicon membrane layer. The capacitance sensing circuit is coupled to the electrode and the silicon membrane layer. The electrode and the silicon membrane layer move in response to a pressure applied to the diaphragm. The movement of the silicon membrane layer causes it to deform, thereby changing the capacitance between the electrode and the silicon membrane layer by an amount proportional to the change in the pressure.

Abstract: In a sensing unit according to the present invention, a spring portion having a support portion and a movable portion is conductive. A signal of a sensor portion provided on the movable portion of the spring portion is transmitted via the spring portion. Hence, the sensing unit according to the present invention has a simple constitution with a small number of components, and a wire does not necessarily have to be provided for each sensor portion. As a result, a reduction in manufacturing cost, simplification of the manufacturing process, and so on are achieved.

Abstract: A sensor package has integrated magnetic and acceleration sensor package structures, where a first wafer is bonded to a second wafer with a cavity defined between them. The magnetic sensor is bonded to the bottom of the first wafer and the acceleration sensor is provided within the cavity. Circuitry to drive the accelerometer and interface with the magnetic sensor is provided on the first wafer.

Abstract: In a sensing unit according to the present invention, a spring portion having a support portion and a movable portion is conductive. A signal of a sensor portion provided on the movable portion of the spring portion is transmitted via the spring portion. Hence, the sensing unit according to the present invention has a simple constitution with a small number of components, and a wire does not necessarily have to be provided for each sensor portion. As a result, a reduction in manufacturing cost, simplification of the manufacturing process, and so on are achieved.

Abstract: Two opposing substrate layers each having one or more recesses filled with magnetic material guide the flow of flux through a coil in a MEMS device layer to provide for closed-loop operation. Flux flows from one pole piece through the coil to a second pole piece. A method of making using lithographic etching techniques is also provided.

Abstract: A three-axis linear position sensor apparatus may include (a) a reference device adapted as a magnetic field generating element, (b) a receiver pad adapted to measure a magnetic field generated by the reference device, and (c) a signal-conditioning and signal-processing electronics adapted to determine a three-axis linear position of the reference device based on the magnetic field measured by the receiver pad.

Abstract: A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.

Abstract: In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: A miniature sensor for detecting acceleration and deceleration processes has at least one bar-like spring element which is formed by a nanowire, which is connected by one end to the detector substrate and projects from the latter and which preferably carries at its free end a coating emitting a permanent magnetic stray field, or a nanoparticle of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass. A magnetic field detection layer composed, for example, of magnetoresistive material, is disposed at least in the region near the connected end of the nanowire. The substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit.

Abstract: A system for determining motion information including attitude and angular rate of a dynamic object. The system includes a magnetic-field sensing device to measure in the body coordinate frame of reference an intensity and/or direction of a magnetic field in three substantially orthogonal directions; an acceleration-sensing device adapted to measure total acceleration of the object in the body coordinate frame of reference; and a processor adapted to calculate attitude and angular rate by combining total acceleration measurement data and magnetic field measurement data with the kinematic model in a filter.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the proof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: A device (120) for acquiring and providing information which can be associated with a football player, said device comprising: an acceleration sensor (129) for detecting accelerations acting on the devices; a memory unit (121) for storing measured acceleration values with associated time stamps and an ID associated with the device (120); and a radio unit (128) for receiving a first radio signal (150) with a first time stamp, wherein the first radio signal represents a deformation of a ball, and for transmitting a second radio signal (160) including the ID associated with the device (120) in case that a check of the values in the memory unit shows that an acceleration was detected by the device at the corresponding time.

Abstract: A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured in the direction of said force, and means (10) for detecting the movement of said seismic mass (2), said seismic mass being articulated relative to the support by at least one pivot link, and means capable of varying the distance between the axis (Z) of the pivot link and the center of gravity (G) of the exertion of the force on said seismic mass.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.

Abstract: A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.

Abstract: Devices (1) are provided with sensor arrangements (2) comprising field generators (10) for generating magnetic fields and first/second/third elements (R1-R4, S1-S4, T1-T4) for detecting first/second/third components of the magnetic fields in a plane and movable objects (14) for, in response to changing the first/second/third accelerations of the moveable objects (14) in first/second/third directions, changing the first/second/third components of the magnetic fields in the plane. The first (second, third) field detector (11, 12, 13) is more sensitive to the first (second, third) acceleration than to the other accelerations. Such devices (1) have a good sensitivity and a good linearity. The elements (R1-R4, S1-S4, T1-T4) form part of bridges. The first elements (R1-R4) may be in round or rectangular form and the second and third elements (S1-S4, T1-T4) may be in the form of sun beams leaving a sun.

Abstract: This application is directed to a shock sensor mounted in an electronic device. The shock sensor includes both active and passive shock detection methods that allow a technician to determine whether the electronic device was subjected to a shock event that exceeded an impact threshold level. The shock sensor may include shock detection contacts that form an electrical circuit that remains open in the absence of a shock event that exceeds an impact threshold level. In response to a significant shock event, a movable component or substance of the shock sensor may move from a first position to a second position, thereby closing the electrical circuit formed by the shock detection contacts. The change in circuit may be detected and used to provide active indication of whether the electronic device has been subjected to a substantial shock event. In addition, the shock sensor may be observed to passively determine whether the electronic device has been subjected to a substantial shock event.

Abstract: In a magnetic data processing device, an input part sequentially inputs magnetic data outputted from a two-dimensional or three-dimensional magnetic sensor. The magnetic data is two-dimensional or three-dimensional vector data that is a linear combination of a set of fundamental vectors. The magnetic data processing device stores a plurality of the inputted magnetic data as a data set of statistical population in order to update an old offset of the magnetic data with a new offset. An offset derivation part derives the new offset based on the old offset and the data set of statistical population under a constraint condition that the new offset be obtained as the sum of the old offset and a correction vector.