Abstract: Systems and methods for minimizing vibration rectification error in magnetic circuit accelerometers. The systems include an accelerometer with an excitation ring that has a top piece with a lower portion inner diameter and a bottom piece having a diameter smaller than the lower portion inner diameter of the top piece. The accelerometer also includes a proof mass, a magnet mounted to the bottom piece of the excitation ring, a pole piece mounted to the magnet, and a coil attached to the proof mass that extends into a gap between the top piece of the excitation ring and the pole piece. The methods include placing a pole piece in a pole piece to lap surface fixture, placing an excitation ring top piece on an outer portion of the pole piece to lap surface fixture, and placing an excitation ring bottom piece in a lower portion of the excitation ring top piece.

Abstract: A motion sensor includes a substrate at least having one micromechanical acceleration sensor and a magnetoresistive circuit. The micromechanical acceleration sensor and the magnetoresistive circuit are constructed on the same substrate.

Abstract: A motion sensor which can easily and accurately detect bearing, attitude and acceleration in any of three-dimensional directions and a portable telephone using the same. The motion sensor comprises three magnetic sensing parts for detecting magnetic field strength in 3-axis directions orthogonal to one another, and three acceleration sensing parts for detecting accelerations in the 3-axis directions. Each of the acceleration sensing parts has a magnet body constituted to be able to displace depending on acceleration, and a magnet displacement detection head for detecting a displacement of the magnet body. The three magnetic sensing parts and the three magnet displacement detection heads are all made of the same type of magnetic detection elements which operate based on common operation principles. The three magnetic sensing parts and the three acceleration sensing parts are integrated into one modular package together with one electronic circuit for controlling these six magnetic detection elements.

Abstract: An in-plane, closed-loop Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane of the device. The device includes substrates, a proof mass, spring elements that flexibly connect the proof mass to the substrate and constrain the proof mass to translate within the major plane of the device which corresponds to a major surface of the proof mass, a plurality of conductive traces located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive traces, and a plurality of anchor pads connected to the substrate and one of the conductive springs.

Abstract: A rotational angle detecting device has a pair of permanent magnets and an angle sensor. Electrical connecting terminals are connected to the angle sensor and further connected to conductors. The conductors have seconds ends opposite to the first ends and serving as connector terminals of the connector. In one embodiment, the rotational angle detecting device includes a first resin-molded portion and a second resin-molded portion. The first resin-molded portion includes at least the electrical connecting terminals, a part of the angle sensor and the first ends of the conductors embedded within a first resin. The second resin-molded portion includes portions of the conductors embedded within a second resin. In another embodiment, capacitors are connected to the connector conductors. The angle sensor has a magnetic detecting element positioned substantially perpendicularly to the rotational axis of the rotary section.

Abstract: A translational, Micro-Electro-Mechanical System (MEMS) accelerometer device with precisely formed pole pieces to guide magnetic flux through a coil in a MEMS device layer. An example device includes a device layer, a magnetic return path component attached to a first side of the device layer, and a magnet unit attached to a second side of the device layer. The device layer includes a proof mass with electrically conductive trace and frame components. The magnet unit includes two magnetically conductive posts (formed of a ferrous material) located proximate to the trace, a base section formed of the same material as the posts, a non-magnetically conductive post (formed of a glass substrate) connected between the conductive posts, and a magnet attached to the non-magnetically conductive post within a cavity formed in the base section between the two magnetically conductive posts.

Abstract: Apparatus, methods, and systems for sensing acceleration and magnetic fields in all three axes from a first capacitive bridge sensor having a first proof mass; and a second capacitive bridge sensor having a second proof mass located within the first proof mass. The second proof mass is coupled to the first proof mass by springs that permit movement in the second axis. Sensing of the remaining axis of interest may be done by a third and fourth capacitive bridge configured similar to that of the first and second capacitive bridge sensors. The third and fourth capacitive bridge sensors may be oriented 90 degrees off of the first and second capacitive bridge. An alternative is to locate a third capacitive bridge within the second proof mass.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. An example MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass, at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass, at least one pole piece located outside the coil, and at least one magnetic flux concentrator located inside the coil opposite the at least one of the at least one pole pieces. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux concentrator and the pole piece.

Abstract: The invention relates to a miniature sensor for detecting acceleration and deceleration processes, which is characterized—in that it comprises at least one bar-like spring element which is formed by a nanowire (2), which is connected by one end (21) to the detector substrate (5) and projects from the latter and which preferably carries at it free end (22) a coating (3?) emitting a permanent magnetic stray field (ms), or a nanoparticle (3) of this type, wherein the nanowire and magnetic stray field coating, or mass, together form the inertial mass, and—in that a magnetic field detection layer (4), e.g. composed of magnetoresistive material, is arranged at least in the region near the connected end (21) of the nanowire (2),—wherein the substrate is preferably provided with such a layer which preferably, for its part, as sensor component forms a constituent part of a magnetic field detection unit (7).

Abstract: A system and a method for determining an attitude of a device undergoing dynamic acceleration is presented. A first attitude measurement is calculated based on a magnetic field measurement received from a magnetometer of the device and a first acceleration measurement received from a first accelerometer of the device. A second attitude measurement is calculated based on the magnetic field measurement received from the magnetometer of the device and a second acceleration measurement received from a second accelerometer of the device. A correction factor is calculated based at least in part on a difference of the first attitude measurement and the second attitude measurement. The correction factor is then applied to the first attitude measurement to produce a corrected attitude measurement for the device.

Abstract: In a sensing unit according to the present invention, a spring portion having a support portion and a movable portion is conductive. A signal of a sensor portion provided on the movable portion of the spring portion is transmitted via the spring portion. Hence, the sensing unit according to the present invention has a simple constitution with a small number of components, and a wire does not necessarily have to be provided for each sensor portion. As a result, a reduction in manufacturing cost, simplification of the manufacturing process, and so on are achieved.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass, a planar coil on the proof mass, a magnet, a first pole piece positioned proximate a first side of the proof mass, and a second pole piece positioned proximate a second side of the proof mass. A magnetic flux field passes from the magnet, through the first pole piece, through the planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane, and into the second pole piece. The first pole piece may extend into a first recessed area of a first housing layer and the second pole piece may extend into a second recessed area of a second housing layer. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the poof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, and a torsional magnetic rebalancing component. In an example embodiment, the torsional magnetic rebalancing component includes at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass about the at least one torsional flexure and at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Abstract: The present invention generally relates to systems and methods for determining precision vehicle orientation information. The system includes an inertial measurement unit having a chassis with a first interior surface, an inertial sensor assembly disposed within the chassis and having a first exterior surface, and integrated suspension elements mounted to the first interior surface and the first exterior surface. The integrated suspension elements include a first sensor that senses a displacement measurement of the inertial sensor assembly with respect to the chassis. The displacement measurement is used to determine an angular deflection.

Abstract: In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches a maximum. A sensor portion is provided on the movable portion. As a result, the sensing unit according to the present invention has a higher degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction.

Abstract: A heat switch 570 is disclosed as well as a gradiometer having the heat switch. The heat switch is formed from a non-magnetic material such as a semi-conducting material. The semi-conducting material may be provided by way of a Hall effect device. The heat switches are arranged in the gradiometer on a circuit board 856. The circuit board 850 has conducting strips 856 which are connected to conducting strips on a sensor 71 by bridges 852. The heat switch 570 is connected on the opposite side of the circuit board 850 to the strips 856 and processing circuitry 859. A copper substrate 865 is provided on the same side of the circuit board as the heat switch 570 to conduct heat away from the heat switch 570 when the heat switch is closed.

Abstract: There is provided an acceleration sensor that is capable of detecting acceleration with high precision and capable of reducing the size and cost due to its simple structure. The acceleration sensor comprises: a pair of cantilevers arranged on a same straight line or almost in parallel in such a manner that positions of fixed ends and free ends are arranged to face in opposite directions from each other, and each of the free ends has a degree of freedom to deflect along a same direction; a pair of magnetic field generating devices mounted respectively to each of the free ends for generating magnetic fields; and a pair of magnetic field detecting devices arranged to face each of the magnetic field generating devices, respectively, for detecting directions of the magnetic fields generated by each of the magnetic field generating devices.

Abstract: A disc brake, especially for utility vehicles, which includes a caliper enclosing a brake disc, a pneumatically or electromotively operated tensioning device for tensioning the brake, which is located in the caliper, a magnet wheel rotating with the brake disc, and a stationary sensor for detecting the angle of rotation and the speed of the magnet wheel. The sensor is mounted at a distance from the magnet wheel and at least one line is connected to transmit pulses between the sensor and the magnet wheel. As a result, the sensor can be mounted on the housing protected from the action of heat and other environmental influences and so as to be easily accessible.

Abstract: A proof mass for flexure type, magnetic and capacitance circuit accelerometer includes one or more standoff pads integrally formed on a fused silica paddle, such as being etched or patterned on the fused silica paddle. Further, the standoff pads have a thickness sufficient to locate at least a portion of one active coil in proximity to or even within a linear flux region of a magnetic circuit of the accelerometer. As such, the proof mass is configured to function with the magnetic circuit in a consistent and stable manner over a selected operational life of the accelerometer.

Abstract: Apparatus, methods, and systems for incorporating and reading a plurality of bridge sensors is disclosed. The bridge sensors may be capacitive bridge sensors located on the same substrate with a digital processor and signal processing circuits to read the outputs of the sensors. The bridge sensors are accessed by a switch network coupled to the plurality of bridge sensors to selectively provide an output from at least one of the plurality of bridge sensors. The switch network may be a multiplexer, which provides a periodically oscillating voltage to the sensors, to energize the sensors. The multiplexer may also provide output from the energized sensor to the digital processor.

Abstract: A spring member used in an acceleration sensor, for supporting weight members that cooperate as magnetic field generation members or magnetic field detection sensors includes at least one strip-shaped plate spring with a fulcrum and support sections separated from the fulcrum for supporting the weight members. The at least one strip-shaped plate spring is configured to produce a bending stress in response to an external force applied so as to displace the weight members.

Abstract: In a magnetic data processing device, an input part sequentially inputs magnetic data outputted from a two-dimensional or three-dimensional magnetic sensor. The magnetic data is two-dimensional or three-dimensional vector data that is a linear combination of a set of fundamental vectors. The magnetic data processing device stores a plurality of the inputted magnetic data as a data set of statistical population in order to update an old offset of the magnetic data with a new offset. An offset derivation part derives the new offset based on the old offset and the data set of statistical population under a constraint condition that the new offset be obtained as the sum of the old offset and a correction vector.

Abstract: An acceleration sensor includes a housing member, first and second magnetic field generation members with weights, a spring member with a fulcrum attached to the housing member, and first and second magnetic field detection sensors attached to the housing member to face the first and second magnetic field generation members with weights, respectively. The first and second magnetic field detection sensors have two pairs of multi-layered magnetoresistive effect elements. A magnetization fixed layer is magnetically fixed along a direction parallel to a direction of displacement of the first and second magnetic field generation members with weights.

Abstract: An assembly for positioning a torque sensor having a receiver and a transmitter is provided. The assembly includes a first annular member, wherein the receiver is coupled to the first annular member. A second annular member is disposed proximate the first annular member. A bearing assembly is disposed between the first annular member and the second annular member. The bearing assembly includes a first race formed to the first annular member, a second race formed to the second annular member, and a bearing disposed between the first race and the second race for allowing the first race and the second race to rotate relative to one another. A radially extending member is coupled to the second race. The receiver is radially displaced from the bearing assembly and the transmitter is mounted to a mounting surface of the radially extending member opposite the receiver at a predefined axial distance.

Abstract: An acceleration sensor includes a pair of permanent magnets, each having a surface facing a magnetic field detection sensor, arranged in parallel so that the surfaces of the pair of permanent magnets have different magnetic polarities with each other, a spring member for supporting the pair of permanent magnets to displace the pair of permanent magnets when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the pair of permanent magnets. The magnetic field detection sensor has at least one pair of multi-layered MR elements, each including a magnetization fixed layer and a magnetization free layer, the magnetization fixed layer being magnetized in a direction parallel to a displacement detection direction. The pair of permanent magnets are arranged so that a longitudinal direction of each permanent magnet is in parallel with the magnetized direction of the magnetization fixed layer.

Abstract: An acceleration sensor includes at least one permanent magnet, a spring member for supporting the at least one permanent magnet to displace the at least one permanent magnet when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the at least one permanent magnet. The magnetic field detection sensor has at least one multi-layered MR element that includes a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetized in a direction parallel to a displacement detection direction. Each permanent magnet has a multi-layered structure of hard magnetic material layers and nonmagnetic material layers alternately laminated each other in a direction perpendicular to a plane of the magnetic field detection sensor and to the magnetized direction of the magnetization fixed layer.

Abstract: A sensor includes a first X-axis GMR element to a fourth X-axis GMR element fixed on a substrate, and a movable coil movably supported on the substrate. When electric current flows through the movable coil, a magnetic field is generated around the movable coil. The generated magnetic field is applied to the first to fourth X-axis GMR elements. The movable coil moves in accordance with acceleration generated in the sensor. The movement of the movable coil causes variation in the magnetic field applied to the first to fourth X-axis GMR element. While no electric current flows to the movable coil, the sensor measures an external magnetic field on the basis of resistances of the first to fourth X-axis GMR elements. While constant electric current flows through the movable coil, the sensor measures acceleration or the like on the basis of resistances of the first to fourth X-axis GMR elements.

Abstract: An attitude detection sensor includes three magnetic sensing parts that detect magnetic field strength in respective directions along three axes perpendicular to each other, and two tilt sensing parts that detect tilt angles around two axes perpendicular to each other. The tilt sensing parts each include a cantilever having a magnet body that moves in accordance with the tilt angle, and a magnetic detection head that detects a displacement of the magnet body. The three magnetic sensing parts and the two magnetic detection heads are each formed using a magnetic detection element of the same type. At least one electronic circuit for controlling the five magnetic detection elements, the three magnetic sensing parts, and the two tilt sensing parts is disposed in a single package in the form of a module.

Abstract: Devices (1) are provided with sensor arrangements (2) comprising field generators (10) for generating magnetic fields and first/second/third field detectors (11,12,13) comprising first/second/third elements (R1-R4, S1-S4, T1-T4) for detecting first/second/third components of the magnetic fields in a plane and movable objects (14) for, in response to first/second/third accelerations of the movable objects (14) in first/second/third directions, changing the first/second/third components of the magnetic fields (11,12,13) is more sensitive to the first (second, third) acceleration than to the other accelerations. Such devices (1) have a good sensitivity and a good linearity. The elements (R1-R4, S1-S4, T1-T4) form part of bridges. The first elements (R1-R4) surround the second and third elements (S1-S4, T1-T4), or vice versa. The first elements (R1-R4) may be in round or rectangular form and the second and third elements (S1-S4, T1-T4) may be in the form of sun beams leaving a sun.

Abstract: Devices (40) are provided with sensor arrangements (41) comprising field generators (42) for generating magnetic fields, field detectors (43) comprising magnetic field dependent elements (51-58) for detecting components of the magnetic fields in planes of the elements (51-58), and movable objects (44) for, in response to accelerations of the movable objects (44) parallel to the planes, changing the components of the magnetic fields. Length axes of the magnetic field dependent elements (51-58) make angles between minus 80 degrees and plus 80 degrees with the components to be detected. Means for forcing the movable objects (44) into rest positions comprise elastic material (59) or fixed objects (46) whereby one of the objects (44,46) comprises the field generator (42) and the other comprises magnetic material or a further field generator (50).

Abstract: An acceleration sensor includes a housing member, a spring member attached to the housing member, a magnetic field generation member fixed to the housing member, and at least one magnetic field detection sensor and a weight member, fixed to the spring member so that the at least one magnetic field detection sensor faces the magnetic field generation member. The spring member has freedom in at least one direction of acceleration to be detected. The at least one magnetic field detection sensor is provided with at least one multi-layered MR element including a magnetization fixed layer and a magnetization free layer. A magnetic field is applied to the at least one multi-layered MR element from the magnetic field generation member in a direction substantially perpendicular to a lamination plane of the at least one multi-layered MR element when no acceleration is applied.

Abstract: An acceleration sensor includes a housing member, a spring member attached to the housing member and provided with freedom in at least one direction of acceleration to be detected, a magnetic field generation member with weight fixed to the spring member, and at least one magnetic field detection sensor attached to the housing member to face the magnetic field generation member with weight. Each magnetic field detection sensor is provided with at least one pair of multi-layered MR elements each including a magnetization fixed layer and a magnetization free layer. A magnetized direction of the magnetization fixed layers is fixed to a direction parallel to the direction of acceleration to be detected. The magnetic field generation member with weight includes at least one permanent magnet that provides a closed magnetic loop.

Abstract: In an example embodiment, a magnetic sensor has a magnet and a magneto-resistive element, arranged on a substrate such that magnetic field lines through the magneto-resistive element are substantially parallel to a plane of the substrate. Movement of a movable magnetically permeable element (MMPE) near the substrate is detected as it alters the number of field lines through the element. The MMPE can be more sensitive than devices arranged with perpendicular field lines, and can be easier to manufacture and integrate. Applications include analog pointers, pressure sensors and microphones. The MMPE can use magnets placed either side of the element to detect changes in size of a gap above the element. As the gap closes, less of the parallel oriented field passes through the magneto resistive element.

Abstract: A servo compensating accelerometer includes a top housing half and a bottom housing half rigidly connected together, and each having coaxial threaded openings. A sensing element is positioned between the top and bottom halves and affixed to the bottom half. Top and bottom magnetic systems, each of which has a magnetic conductor, a permanent magnet and a field concentrator, the magnetic systems being mounted within the respective top and bottom halves of the housing using the threaded openings. A momentum sensor includes the top and bottom magnetic systems, and also includes two movable coils mounted on a plate and positioned within the magnetic systems. A differential angle sensor includes toroidal excitation coils located on the permanent magnets, the magnetic systems and the coils of the momentum sensor. Zero bias of the accelerometer's angular displacement sensor is tuned by adjusting the position of the magnetic systems by moving them in the threaded openings.

Abstract: A hard drive connecting device for a notebook PC is installed in a case of the notebook PC for connecting a main board and a hard drive in the case, which includes a flexible board having at least a first side, at least a second side, and conductive lines for electrically connecting the first side to the second side; a first connector located in the hard drive bay electrically connected to the first side for electrically connecting the hard drive; and a second connector electrically connected to the second side for electrically connecting the main board. The flexible board facilitates electrical connection of the hard drive that allows reduction of both the size of the hard drive and the installation space required for the hard drive, thus facilitating profile miniaturization of notebook PCs.

Abstract: A cross-component superconducting gravity gradiometer sensitive to off-diagonal components of the gradient tensor includes, for each gradient axis, a pair of closely matched angular accelerometers coupled by superconducting circuitry, including sensing circuits designed to minimize the sensitivity of the instrument to angular acceleration of the platform at which the angular accelerometers are mounted; and a mode-splitting circuitry designed to reduce a nonlinear coupling of angular acceleration to the output of the gravity gradiometer and to attain the operability of the instrument in a broader range in the frequency domain.

Abstract: The accelerometer uses magnetic transducer technology. A mass-block, mounted to a base by an elongate member (shaft), moves relative to the base due to accelerations. The elongate-member has at least one magnetised transducer region (circumferential or longitudinal), which emanates a magnetic field as a function of member flexure due to acceleration of the mass-block. A sensor adjacent the transducer detects the field and derives a acceleration-representing signal. Alternatively, a mass-block is mounted to a central hub of a disc which is radially secured and has an intermediate region that flexes in response to acceleration. The intermediate region is magnetised to provide the magnetic transducer element. Otherwise, the mass-block is supported in an aperture of a reference-base by cores of inductors. The core permeability is a function of the compressive tensile forces on the cores due to acceleration of the mass-block.

Abstract: A rotation angle detecting device is rotated by a rotating object via a gear mechanism to detect a rotation angle of the rotating object. The rotation angle detecting device includes a housing, a magnet rotor unit having a permanent magnet and a central hole, a magnetic sensor unit including a pair of magnetic sensor elements each of which detects magnetic flux density of a magnetic field generated by the permanent magnet in a direction different from the other, and a signal processor that calculates a rotation angle of the rotating object from the magnetic flux density. The magnetic rotor unit includes a mechanism for changing the magnetic flux density as the number of turns of the magnet rotor unit changes.

Abstract: A system for decoding a signal of a rotating portion of a machine. The system includes a sensor configured to output N signals based on signals received from the rotating portion, and a processor configured to derive a value from a plurality of differences between sampled data obtained from the N signals.

Abstract: An actuator having an output shaft, a motor for rotating the output shaft between a first position and a second position, and an electronic control module having a controller and a sensor. The sensor is configured to output a signal to the controller indicative of the position of the output shaft, and the controller is configured to determine whether the output shaft is in the first position or the second position.

Abstract: A rotation angle detector includes a rotator, a detecting rotator, a magnet, an anisotropic magnetoresistive element, an amplifier, and a controller. The controller connects an output terminal of the anisotropic magnetoresistive element to the ground so as to detect a short circuit between adjacent output terminals based on the difference in output voltage from the amplifier. When there is no short circuit, the controller releases the connection from the output terminal to the ground, and detects the rotation angle of the rotator from the output signal that is differentially amplified by the amplifier based on the output signal of the anisotropic magnetoresistive element.

Abstract: Position sensing of movable elements including but not limited to machine components is disclosed. Motion of a movable element can produce motion of a magnetic field, which can be detected by magnetic sensors. The motion and/or variations of a magnetic field and/or a magnetic flux may be produced by any combination of a motion of the sensors, associated magnets, or associated magnetic material. Magnetic sensors maybe capable of measuring either rotary, or linear motion, or both. Such sensors can provide indication of an incremental position change, an absolute position, or both. Absolute position and high-resolution position sensing may be produced for measurement of either linear and/or angular motion. Suitable magnetic sensors include, but are not limited to, Hall effect devices and/or magneto-resistive elements, and may include multi-element magnetic sensors. Suitable signal conditioning and/or control means such as control electronics can be used to receive output signals from the sensors.

Abstract: An acceleration sensor includes at least one permanent magnet, a spring member for supporting the at least one permanent magnet to displace the at least one permanent magnet when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the at least one permanent magnet. The magnetic field detection sensor has at least one multi-layered MR element that includes a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetized in a direction parallel to a displacement detection direction. Each permanent magnet has a multi-layered structure of hard magnetic material layers and nonmagnetic material layers alternately laminated each other in a direction perpendicular to a plane of the magnetic field detection sensor and to the magnetized direction of the magnetization fixed layer.

Abstract: An acceleration sensor includes a pair of permanent magnets, each having a surface facing a magnetic field detection sensor, arranged in parallel so that the surfaces of the pair of permanent magnets have different magnetic polarities with each other, a spring member for supporting the pair of permanent magnets to displace the pair of permanent magnets when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the pair of permanent magnets. The magnetic field detection sensor has at least one pair of multi-layered MR elements, each including a magnetization fixed layer and a magnetization free layer, the magnetization fixed layer being magnetized in a direction parallel to a displacement detection direction. The pair of permanent magnets are arranged so that a longitudinal direction of each permanent magnet is in parallel with the magnetized direction of the magnetization fixed layer.

Abstract: An encapsulated measuring device for detecting a velocity and/or acceleration of a rotationally or linearly moved component. The device includes a measuring device housing having a wall, and a scanning unit arranged in the housing, the scanning unit including a scanning head in the form of a Ferraris sensor, and wherein an eddy current body of the Ferraris sensor includes at least a portion of the wall of the measuring device housing.

Abstract: The invention relates to an inertial sensor based on the magnetic levitation of an inertial mass comprising an active magnetic bearing unit arranged in such a way as to levitate the inertial mass and characterized by the fact that it furthermore comprises additional active magnetic bearings units arranged in such a way as to control the position of said inertial mass along three independent axis and to create, for any of said independent axis, restoring forces that can be oriented in any of the two directions of these independent axis.

Abstract: The inventive device for evaluating the sensor signal includes the provider for providing the sensor signal, the processor for processing the sensor signal and for providing an information signal comprising information regarding the amplitude course of the sensor signal and means for comparing the sensor signal to a first and a second comparison value, wherein the first and/or the second comparison value are adjustable based on the information signal such that a difference between the first and the second comparison value comprises a non-linear relation to the amplitude course of the sensor signal.

Abstract: An acceleration sensor includes a housing member, a spring member attached to the housing member, the spring member having freedom in at least one direction of acceleration to be detected, a weight and magnetic field generation member fixed to the spring member, and at least one magnetic field detection sensor attached to the housing member to face the weight and magnetic field generation member. The at least one magnetic field detection sensor is provided with at least one multi-layered MR element including a magnetization fixed layer and a magnetization free layer. A direction of magnetic field applied to the at least one multi-layered MR element from the weight and magnetic field generation member is perpendicular to a lamination plane of the at least one multi-layered MR element when no acceleration is applied.

Abstract: An accelerometer for measuring the displacement of a magnet body using magnetic detecting elements is provided, the accelerometer having superior measurement accuracy by suppressing influence of a peripheral magnetic field. The accelerometer has detecting units each having a cantilever which is elastically deformed so as to rotate around a fixed end thereof, a magnet body provided at a free end of the cantilever, and a magnetic detecting head portion disposed outside the rotation region of the cantilever. In order to correct detection signals output from the magnetic detecting head portions, the accelerometer has peripheral magnetic field detecting portions for measuring a peripheral magnetic field acting on the magnetic detecting head portions and the magnet bodies.