Capacitive Sensor Patents (Class 73/514.32)
  • Patent number: 11156459
    Abstract: Microelectromechanical sensor comprising a fixed part and a mobile part suspended from the fixed part such that the mobile part can move at least in an out-of-plane displacement direction, the fixed part comprising at least first electrodes extending parallel to the displacement direction of the mobile part, the mobile part comprising a seismic mass and at least second electrodes extending parallel to the out-of-plane displacement direction, the first electrodes and the second electrodes being located relative to each other so as to be interdigitated, in which the second electrodes are directly connected to the inertial mass and only part of the face of each mobile electrode is facing an electrode fixed at rest.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: October 26, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Federico Maspero, Loic Joet
  • Patent number: 11150265
    Abstract: The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: October 19, 2021
    Assignee: MEMSIC Semiconductor (TIANJIN) Co., Ltd.
    Inventors: Leyue Jiang, Yang Zhao
  • Patent number: 11125771
    Abstract: A micromechanical z-inertial sensor includes a substrate; a movable seismic mass in a micromechanical functional layer; a torsion spring connected to the movable seismic mass and about which the seismic mass able to rotate; an electrode layer below the seismic mass and that, in an outer region is connectible to a potential of the substrate and is connected to the seismic mass via an insulating layer; and electrodes at a distance above and below an inner region of the electrode surface.
    Type: Grant
    Filed: June 13, 2019
    Date of Patent: September 21, 2021
    Assignee: Robert Bosch GmbH
    Inventor: Jochen Reinmuth
  • Patent number: 11104012
    Abstract: A capacitive sensor for characterizing force or torque includes a first plurality of non-patterned conductive regions and a first plurality of patterned conductive regions, and a second plurality of non-patterned conductive regions and a second plurality of patterned conductive regions. The first and second pluralities of non-patterned conductive regions are facing and the first and second pluralities of patterned conductive regions are facing.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: August 31, 2021
    Assignee: Verb Surgical Inc.
    Inventors: Jose Luis Cordoba, Pablo E. Garcia Kilroy, Xin Liu
  • Patent number: 11105828
    Abstract: The disclosure relates to a microelectromechanical device where the device structure includes a rotating mass structure and a linear mass structure. The rotating mass structure is formed of two rotating mass parts elastically coupled to the support through one or more springs that enable rotary motion of each of the rotating mass parts about respective rotary axes that extend parallel to each other along a first in-plane direction (IP1). The linear mass structure includes at least one elongate rigid body that extends in a second in-plane direction (IP2). One end of the linear mass structure is coupled to the first rotating mass part and the other end of the linear mass structure is coupled to the second rotating mass part such that rotary motions of the first and second masses result into linear motion of the linear mass structure in the out-of-plane direction (OP).
    Type: Grant
    Filed: July 16, 2019
    Date of Patent: August 31, 2021
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Matti Liukku, Ville-Pekka Rytkönen
  • Patent number: 11099207
    Abstract: Microelectromechanical system (MEMS) accelerometers are described. The MEMS accelerometers may include multiple proof mass portions collectively forming one proof mass. The entirety of the proof mass may contribute to detection of in-plane acceleration and out-of-plane acceleration. The MEMS accelerometers may detect in-plane and out-of-plane acceleration in a differential fashion. In response to out-of-plane accelerations, some MEMS accelerometers may experience butterfly modes, where one proof mass portion rotates counterclockwise relative to an axis while at the same time another proof mass portion rotates clockwise relative to the same axis. In response to in-plane acceleration, the proof mass portions may experience common translational modes, where the proof mass portions move in the plane along the same direction.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: August 24, 2021
    Assignee: Analog Devices, Inc.
    Inventor: Xin Zhang
  • Patent number: 11085946
    Abstract: A physical quantity sensor includes a substrate, a fixed member fixed to the substrate, a movable member displaceable in a first direction with respect to the fixed member, a movable electrode assembly provided in the movable member, a fixed electrode assembly fixed to the substrate and opposing the movable electrode assembly in the first direction, and a restrictor configured to restrict a movable range of the movable member in the first direction. The movable member includes a first outer edge disposed on one side in the first direction and a second outer edge disposed on the other side. The restrictor includes at least one of a first restrictor facing the first outer edge across a gap and a second restrictor facing the second outer edge across another gap.
    Type: Grant
    Filed: August 24, 2018
    Date of Patent: August 10, 2021
    Inventor: Satoru Tanaka
  • Patent number: 11085766
    Abstract: In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: August 10, 2021
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Cenk Acar, Brenton Simon, Sandipan Maity
  • Patent number: 11073392
    Abstract: A physical quantity sensor includes: a movable body that includes a beam, a coupling portion that is connected with the beam and is provided in a direction intersecting with the beam, and a first and second mass portions that are connected with the coupling portion at connection positions; a first and second fixed electrodes are opposed to the first and second mass portions; and a protrusion are provided and protrude toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions of the first and second mass portions opposite to the beam is L, and a distance from the protrusions to end portions of the first and second mass portions opposite to the beam is L1, the distance L1 is 0.5 L or longer and 3.1 L or shorter.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: July 27, 2021
    Inventor: Satoru Tanaka
  • Patent number: 11073534
    Abstract: A component is described, in particular an inertial sensor for detecting acceleration forces, including a substrate, a mass structure, and a spring unit, the mass structure being pivotable along an axis in relation to the substrate with the aid of the spring unit, the spring unit including a first spring web and a second spring web, which are spaced apart from one another along a z direction. Furthermore, a method for manufacturing a spring unit is described.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: July 27, 2021
    Assignee: Robert Bosch GmbH
    Inventor: Johannes Classen
  • Patent number: 11054947
    Abstract: In keystroke recognition technologies, a method and a module for updating a keystroke reference, and a terminal device are provided. The method for updating a keystroke reference includes: receiving a pressing interrupt sent by a keystroke chip; obtaining a plurality of pressing capacitance values from the keystroke chip, where the plurality of pressing capacitance values include a capacitance value of the keystroke chip at a generation moment of the pressing interrupt and a capacitance value of the keystroke chip at a scanning moment next to the generation moment of the pressing interrupt; and setting a release reference of the keystroke chip according to the plurality of pressing capacitance values, to improve interchangeability and anti-interference of the keystroke chip with no extra burden on a main control chip.
    Type: Grant
    Filed: October 12, 2018
    Date of Patent: July 6, 2021
    Assignee: SHENZHEN GOODIX TECHNOLOGY CO., LTD.
    Inventors: Jinhui Lin, Dan Wu, Yunfang Long
  • Patent number: 11035876
    Abstract: Provided is a sensor that is highly accurate while ensuring reduced power consumption. A sensor is an electronic circuit that includes a sensor element, an analog filter, an A/D converter, and first and second electronic circuit. The analog filter filters a waveform that includes a sensor signal from the sensor element and noise based on a servo signal. The A/D converter converts the waveform filtered by the analog filter into a first digital signal. The first electronic circuit includes a digital filter and acquires a second digital signal by performing signal processing including at least a filtering process on the servo signal by using the digital filter. The second electronic circuit acquires a third digital signal by subtracting the second digital signal from the first digital signal. A setting for the signal processing for acquiring the second digital signal is changed on the basis of the third digital signal.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: June 15, 2021
    Assignee: HITACHI, LTD.
    Inventors: Takashi Oshima, Yuki Furubayashi, Keijiro Mori, Naoki Mori, Akira Matsumoto
  • Patent number: 11029327
    Abstract: An inertial sensor includes a substrate, a movable element having an edge, and a suspension system retaining the movable element in spaced apart relationship above a surface of the substrate. The suspension system includes an anchor attached to the surface of the substrate, the anchor having a first side laterally spaced apart from the edge of the movable element, and a spring structure having a first attach point coupled to the first side of the anchor and a second attach point coupled to the edge of the movable element. The spring structure includes beam sections serially adjoining one another, the beam sections extending from the first side of the anchor and surrounding the anchor to couple to the edge of the movable element. The spring structure makes no more than one coil around the anchor to position the first attach point in proximity to the second attach point.
    Type: Grant
    Filed: October 31, 2018
    Date of Patent: June 8, 2021
    Assignee: NXP USA, Inc.
    Inventor: Andrew C. McNeil
  • Patent number: 11009521
    Abstract: A physical quantity sensor includes a substrate, a pair of first elements detecting acceleration in a first direction, and a pair of second elements detecting an acceleration in a second direction. The first element portion includes a first movable portion displaceable in the first direction, first and second movable electrode fingers disposed in the first movable portion, first and second fixing electrode fingers disposed to face the first and second movable electrode fingers, and first and second support portions supporting the first and second fixing electrode fingers. The second element includes a second movable portion displaceable in the second direction, third and fourth movable electrode fingers disposed in the second movable portion, third and fourth fixing electrode fingers disposed to face the third and fourth movable electrode fingers, and third and fourth support portions supporting the third and fourth fixing electrode fingers.
    Type: Grant
    Filed: September 21, 2018
    Date of Patent: May 18, 2021
    Inventor: Satoru Tanaka
  • Patent number: 11003054
    Abstract: A control unit generates a first control signal for camera shake correction on the basis of a first acceleration detection signal, a second acceleration detection signal, and an angular velocity signal. The first acceleration detection signal including information relating to an acceleration acting on a camera and has an alternating current (AC) waveform corresponding to the acceleration. The second acceleration detection signal including information relating to the acceleration and has an output waveform. An AC component corresponding to the acceleration is superimposed on a direct current (DC) component in the output waveform. The angular velocity signal including information relating to an angular velocity acting on the camera.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: May 11, 2021
    Assignee: SONY CORPORATION
    Inventors: Hidetoshi Kabasawa, Kosei Yamashita, Sho Murakoshi, Tomohiro Matsumoto, Masahiro Segami
  • Patent number: 10989731
    Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: April 27, 2021
    Assignee: HITACHI AUTOMOTIVE SYSTEMS, LTD.
    Inventors: Masatoshi Kanamaru, Daisuke Maeda, Masahide Hayashi, Masashi Yura, Akihiro Okamoto
  • Patent number: 10983141
    Abstract: A system includes a capacitive transducer, an excitation circuit, and a measuring circuit. The excitation circuit is configured to excite the capacitive transducer and the measuring circuit measures an output signal from the capacitive transducer responsive to the excitation voltage. The excitation circuit includes a voltage source for providing a first voltage in response to receipt of a supply voltage, a voltage generator coupled to the voltage source for receiving the first voltage and generating a second voltage that is greater than the supply voltage, and a control circuit coupled to the voltage source and the voltage generator. The control circuit is configured to provide any of a system ground, the first voltage, and the second voltage to first and second terminals of the capacitive transducer, and particularly, being configured to apply the system ground and the second voltage in the form of two consecutive stimuli with opposite polarities.
    Type: Grant
    Filed: April 12, 2018
    Date of Patent: April 20, 2021
    Assignee: NXP USA, Inc.
    Inventors: Thierry Dominique Yves Cassagnes, Joel Cameron Beckwith, Jerome Romain Enjalbert, Jalal Ouaddah
  • Patent number: 10976340
    Abstract: An electronic measuring device for measuring a physical parameter includes a differential analogue sensor formed from two capacitances—an excitation circuit of the differential analogue sensor providing to the sensor two electrical excitation signals which are inverted—a measuring circuit which generates an analogue electrical voltage which is a function determined from the value of the sensor, and a circuit for compensating for a possible offset of the sensor, which is formed from a compensation capacitance, which is excited by its own electrical excitation signal. The excitation circuit is arranged in order to be able to provide to an additional capacitance of the compensation circuit its own electrical excitation signal having a linear dependence on the absolute temperature with a determined proportionality factor in order to compensate for a drift in temperature of an electrical assembly of the measuring device comprising at least the compensation capacitance.
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: April 13, 2021
    Assignee: EM Microelectronic-Marin SA
    Inventors: Sylvain Grosjean, Yonghong Tao, Alexandre Deschildre, Hugues Blangy
  • Patent number: 10974957
    Abstract: A physical quantity sensor includes: a movable body that includes a beam portion as a rotation shaft, a coupling portion that is connected with the beam portion and is provided in a direction intersecting with the beam portion, and a first and a second mass portions as a mass portion that are connected with the coupling portion; a first and a second fixed electrodes as a measurement electrode that are provided on a support substrate and are opposed to the first and the second mass portions; and a protrusion that is provided in a region where the first and the second fixed electrodes are provided and protrudes from the support substrate toward the first and the second mass portions, in which a length of the coupling portion in the intersecting direction is 1.4 or more times a length from the beam portion to the first and the second mass portions.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: April 13, 2021
    Inventor: Satoru Tanaka
  • Patent number: 10908012
    Abstract: A test apparatus that guides an end user through visualization of a user interface on a web browser that is easy to operate for individuals with limited knowledge of the devices or test protocols for gas meters. The test apparatus may include the executable instructions having instructions that configure the processor to, receive input data from the web browser; compare the input data to data in a data table; select an entry from the data table that reflects a match between the input data and data associated with the entry in the data table; and generate a first output that defines a configuration for a user interface that renders on the web browser, the configuration representing a stage of a test initialization process to configure operating parameters on the controller to work with a meter-under-test that couples with the fluid moving unit for purposes of conducting a meter proof.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: February 2, 2021
    Assignee: Natural Gas Solutions North America, LLC
    Inventors: Mihir Subhash Bawal, Cristina Alfonso Lancelot, Jason Lee Mamaloukas, Jeff Thomas Martin
  • Patent number: 10900994
    Abstract: An accelerometer closed loop control system comprising: a capacitive accelerometer comprising a proof mass moveable relative to first and second fixed capacitor electrodes; a PWM generator to generate in-phase and anti-phase PWM drive signals with an adjustable mark/space ratio, wherein said drive signals are applied to the first and second electrodes such that they are charged alternately; an output signal detector to detect a pick-off signal from the accelerometer representing a displacement of the proof mass from a null position to provide an error signal, wherein the null position is the position of the proof mass relative to the fixed electrodes when no acceleration is applied; a PWM servo operating in closed loop to vary the mark/space ratio of said PWM drive signals in response to the error signal so that mechanical inertial forces are balanced by electrostatic forces.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: January 26, 2021
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventor: Alan Malvern
  • Patent number: 10900985
    Abstract: A physical quantity sensor includes a substrate, a first sensor element that is positioned on one main surface of the substrate and includes a first fixed portion fixed to the substrate, a second sensor element that is positioned on the one main surface of the substrate and includes a second fixed portion fixed to the substrate, a first recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the first fixed portion in plan view of the substrate, and a second recess portion that is open to the other main surface of the substrate and is disposed so as to overlap the second fixed portion in plan view of the substrate, and in which the first recess portion and the second recess portion are disposed so as to be separated from each other.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: January 26, 2021
    Inventor: Shota Kigure
  • Patent number: 10895457
    Abstract: A MEMS resonant accelerometer includes two proof masses configured to resonate when driven with periodic signals. Each proof mass includes a resonator structure that vibrates relative to the proof mass and a dummy structure that does not resonate. When driven by a periodic drive signal, the resonator structures of the two proof masses may be used to determine the magnitude of acceleration in the direction perpendicular to the planes of the proof masses by sensing the frequency at which the resonators vibrate. For example, a differential oscillation frequency may be computed from the two sensed frequencies. The dummy structures are used to make the mass distribution of the two proof masses similar.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: January 19, 2021
    Assignee: Analog Devices, Inc.
    Inventor: Mehrnaz Motiee
  • Patent number: 10845262
    Abstract: A micromechanical component for a pressure sensor device, including a diaphragm, which separates a reference pressure from an external pressure, at least one first stator electrode, at least one second stator electrode, and a rocker-arm structure, which is tiltable about an axis of rotation and has at least one first actuator electrode and at least one second actuator electrode; the rocker-arm structure being joined to the diaphragm so that when the external pressure and the reference pressure are equal, the rocker-arm structure and its actuator electrodes are present in their starting positions; if the rocker-arm structure and its actuator electrodes are in their starting positions, a first capacitance between the at least one first actuator electrode and the at least one first stator electrode differing from a second capacitance between the at least one second actuator electrode and the at least one second stator electrode.
    Type: Grant
    Filed: May 10, 2017
    Date of Patent: November 24, 2020
    Assignee: Robert Bosch GmbH
    Inventor: Jochen Reinmuth
  • Patent number: 10823568
    Abstract: This disclosure describes a capacitive micromechanical accelerometer with at least a first sensor which comprises a rotor which is a two-sided seesaw frame. The rotor comprises one or more first damping plates on the first side of its rotation axis and one or more first damping plates on the second side of its rotation axis. One or more second damping plates are fixed to the inner package plane above or below at least some of the one or more first damping plates, so that at least one first damping plate overlaps with the projection of a second damping plate on each side of the axis. The frame-shaped rotor may surround second and third acceleration sensors located in the substrate plane.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: November 3, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Matti Liukku, Ville-Pekka Rytkönen
  • Patent number: 10809279
    Abstract: A micromechanical accelerometer comprises a sensor for measuring acceleration along a vertical axis perpendicular to a substrate plane, and an accelerometer package with at least one inner package plane adjacent and parallel to the substrate plane. The first sensor comprises a rotor which is mobile in relation to the substrate, a rotor suspender and one or more stators which are immobile in relation to the substrate. The rotor is a seesaw frame where longitudinal rotor bar comprise one or more first deflection electrodes, and second deflection electrodes are fixed to the inner package plane above or below each of the one or more first deflection electrodes, so that they overlap. The accelerometer can perform a self-test by applying a test voltage to at least one first deflection electrode and at least one second deflection electrode. A self-test response signal can be read with a measurement between rotor and stator electrodes.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: October 20, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Matti Liukku, Ville-Pekka Rytkönen
  • Patent number: 10809278
    Abstract: A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C?1.5?Cmin.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: October 20, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10802040
    Abstract: An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: October 13, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Takashi Shiota, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma
  • Patent number: 10802042
    Abstract: An acceleration measuring device is disclosed, for use as a gravimeter or gradiometer for example. The device has a support and a proof mass, connected to each other by at flexures allowing displacement of the proof mass relative to the support. The support defines a space for displacement of the proof mass. The device is configured so that the modulus of the gradient of the force-displacement curve of the proof mass decreases with increasing displacement, for at least part of the force-displacement curve. This is the so-called anti-spring effect. The resonant frequency of oscillation of the proof mass is determined at least in part by the orientation of the device relative to the direction of the force due to gravity. The proof mass is capable of oscillating with a resonant frequency of 10 Hz or less. The proof mass has a mass of less than 1 gram.
    Type: Grant
    Filed: August 26, 2015
    Date of Patent: October 13, 2020
    Assignee: The University Court of the University of Glasgow
    Inventors: Paul Campsie, Giles Dominic Hammond, Richard Paul Middlemiss, Douglas John Paul, Antonio Samarelli
  • Patent number: 10802041
    Abstract: In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: October 13, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma, Tomonori Sekiguchi
  • Patent number: 10794701
    Abstract: An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.
    Type: Grant
    Filed: May 1, 2018
    Date of Patent: October 6, 2020
    Assignee: NXP USA, Inc.
    Inventor: Andrew C. McNeil
  • Patent number: 10768020
    Abstract: The present invention is directed to a CV conversion amplifier which is small in current consumption and capable of securing a sufficient capacitance-voltage conversion gain and a sufficient amplitude range of an output voltage and a capacitive sensor using the same which is low power consumption, low in noise, and wide in an input signal allowable range. A capacitive sensor includes first and second detection capacitors, a CV conversion circuit includes first and second feedback capacitors and obtains a voltage based on capacitance values of the first and second feedback capacitors, an AD converter performs analog digital conversion on an input voltage and obtains a digital signal, a digital control unit receives the digital signal as an input, and first and second digitally controlled variable capacitors have capacitance values that are controlled by the digital control unit.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: September 8, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Yuki Furubayashi, Takashi Oshima, Makoto Takahashi
  • Patent number: 10739376
    Abstract: There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: August 11, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Atsushi Isobe, Takashi Shiota, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma
  • Patent number: 10732196
    Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: August 4, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Patent number: 10697773
    Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: June 30, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Makoto Furuhata, Kei Kanemoto
  • Patent number: 10669150
    Abstract: [Object] To provide an electrostatic device capable of improving device characteristics. [Solving Means] An electrostatic device according to an embodiment of the present technology includes an electrically conductive base material, a first conductor layer, a second conductor layer, and a bonding layer. The first conductor layer includes a first electrode portion and a first base portion and is connected to a signal line. The first base portion supports the first electrode portion and is disposed on the base material. The second conductor layer includes a second electrode portion and a second base portion and is connected to a reference potential. The second electrode portion is opposed to the first electrode portion in a first axis direction and configured to be movable relative to the first electrode portion in the first axis direction. The second base portion supports the second electrode portion and is disposed on the base material.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: June 2, 2020
    Assignee: Sony Corporation
    Inventors: Akira Akiba, Mitsuo Hashimoto, Shinya Morita, Munekatsu Fukuyama
  • Patent number: 10663481
    Abstract: A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: May 26, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10656173
    Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.
    Type: Grant
    Filed: November 14, 2016
    Date of Patent: May 19, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Johannes Classen, Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther, Timm Hoehr
  • Patent number: 10598686
    Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: March 24, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther, Timm Hoehr
  • Patent number: 10591508
    Abstract: A method for forming an MEMS inertial sensor is provided, comprising: providing a first substrate having a first surface and a second surface, wherein providing the first substrate comprises providing a first base substrate and forming at least one conductive layer; providing a second substrate having a third surface and a fourth surface; bonding the first surface of the first substrate and the third surface of the second substrate together to form a first bonding interface; thinning the first base substrate from the second surface of the first substrate to remove part of the first base substrate; and forming a movable element of the MEMS inertial sensor, wherein the at least one conductive layer comprises a shielding layer, and the shielding layer is located between the first base substrate and the first bonding interface.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: March 17, 2020
    Assignee: MEMSEN ELECTRONICS INC.
    Inventor: Lianjun Liu
  • Patent number: 10591721
    Abstract: A method for manufacturing a protective wafer including a frame wafer and an optical window, and to a method for manufacturing a micromechanical device including such a protective wafer having an inclined optical window. Also described are a protective wafer including a frame wafer and an optical window, and a micromechanical device including a MEMS wafer and such a protective wafer, which delimit a cavity, the protective wafer including an inclined optical window.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: March 17, 2020
    Assignee: Robert Bosch GmbH
    Inventor: Stefan Pinter
  • Patent number: 10571485
    Abstract: In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202).
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: February 25, 2020
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventors: Michael Durston, Kevin Townsend
  • Patent number: 10571268
    Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: February 25, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Patent number: 10545254
    Abstract: A seismic sensor comprises a central mass having three principal axes and disposed within a frame. A plurality of transducers is mechanically coupled between the frame and the central mass. The transducers are arranged in pairs, with the transducers in each pair being coupled to opposing sides of the central mass, as defined along each of the three principal axes. Electronics can be provided to combine signals of the transducers in each pair to generate output characterizing acceleration and rotation of the frame.
    Type: Grant
    Filed: October 31, 2016
    Date of Patent: January 28, 2020
    Assignee: ION GEOPHYSICAL CORPORATION
    Inventors: Cornelis A. M. Faber, Andre W. Olivier, Lawrence Philip Behn
  • Patent number: 10527644
    Abstract: A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: January 7, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Shota Kigure
  • Patent number: 10527642
    Abstract: An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: January 7, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Noriyuki Sakuma, Chisaki Takubo, Yuudai Kamada, Takashi Shiota
  • Patent number: 10520526
    Abstract: A microelectromechanical systems (MEMS) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite segment of the folded tether provides the tether with increased stiffness without altering the fundamental resonance frequency of the tether. The increased stiffness can beneficially lower the occurrence of stiction. Moreover, such a tether configuration provides larger separation between the tether's fundamental resonance frequency and higher order resonant mode frequencies, meaning that the higher order modes may be suppressed in typical operation of the MEMS sensor device.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: December 31, 2019
    Assignee: Analog Devices, Inc.
    Inventor: Jianglong Zhang
  • Patent number: 10473686
    Abstract: An inertia measurement module and three-axis accelerometer, comprising a first pole piece (4) located on a substrate and a mass block (1) suspendingly connected above the substrate via elastic beams (11, 12); the elastic beams (11, 12) includes a first elastic beam (12) and a second elastic beam (11), two ends of the second elastic beams (11) being connected to an anchor point (6) of the substrate, two ends of the first elastic beam (11) being connected to the mass block (1); a center of the first elastic beam (12) and/or the second elastic beam (11) deviates from a center of gravity of the mass block (1); the mass block (1) is further provided with a first movable electrode (9) and a second movable electrode (10) in a Y-axis and an X-axis direction; the movement of one axis in a plane of the inertia measurement module cannot be affected by an eccentric structure feature, such that both X-axis movement and Y-axis movement are linear movements, thus not intensifying an inter-axis coupling, and also not reducin
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: November 12, 2019
    Assignee: Goertek Inc.
    Inventor: Tingkai Zhang
  • Patent number: 10466267
    Abstract: The present invention provides a sensor with a simple structure which can precisely sense movement, etc., the sensor comprising: a head; and a support which is disposed to support one side of the head, wherein the support comprises: a first support portion for supporting the head; a second support portion which supports the head and is spaced apart from the first support portion; a first extension portion which is extended from the first support portion; a second extension portion which is extended from the second support portion; and a sensing portion which senses the deformation of the first extension portion and the second extension portion.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: November 5, 2019
    Assignee: SPHEREDYNE CO., LTD.
    Inventor: Sug Whan Kim
  • Patent number: 10436812
    Abstract: A MEMS acceleration device for measurement of the acceleration along three axes. The device includes capacitors, which capacitance changes under the influence of an acceleration acting upon the device. The change of capacitance for acceleration parallel to the substrate are, normally used with distinct capacitors. This device combines capacitors for using the change in capacitance for sensing in two independent and different directions parallel to the substrate thereby reusing the capacitor. Thereby allowing shrinking of the device while maintaining substantially the same sensitivity.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: October 8, 2019
    Assignee: NXP USA, Inc.
    Inventor: Jerome Romain Enjalbert