Capacitive Sensor Patents (Class 73/514.32)
  • Patent number: 10845262
    Abstract: A micromechanical component for a pressure sensor device, including a diaphragm, which separates a reference pressure from an external pressure, at least one first stator electrode, at least one second stator electrode, and a rocker-arm structure, which is tiltable about an axis of rotation and has at least one first actuator electrode and at least one second actuator electrode; the rocker-arm structure being joined to the diaphragm so that when the external pressure and the reference pressure are equal, the rocker-arm structure and its actuator electrodes are present in their starting positions; if the rocker-arm structure and its actuator electrodes are in their starting positions, a first capacitance between the at least one first actuator electrode and the at least one first stator electrode differing from a second capacitance between the at least one second actuator electrode and the at least one second stator electrode.
    Type: Grant
    Filed: May 10, 2017
    Date of Patent: November 24, 2020
    Assignee: Robert Bosch GmbH
    Inventor: Jochen Reinmuth
  • Patent number: 10823568
    Abstract: This disclosure describes a capacitive micromechanical accelerometer with at least a first sensor which comprises a rotor which is a two-sided seesaw frame. The rotor comprises one or more first damping plates on the first side of its rotation axis and one or more first damping plates on the second side of its rotation axis. One or more second damping plates are fixed to the inner package plane above or below at least some of the one or more first damping plates, so that at least one first damping plate overlaps with the projection of a second damping plate on each side of the axis. The frame-shaped rotor may surround second and third acceleration sensors located in the substrate plane.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: November 3, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Matti Liukku, Ville-Pekka Rytkönen
  • Patent number: 10809279
    Abstract: A micromechanical accelerometer comprises a sensor for measuring acceleration along a vertical axis perpendicular to a substrate plane, and an accelerometer package with at least one inner package plane adjacent and parallel to the substrate plane. The first sensor comprises a rotor which is mobile in relation to the substrate, a rotor suspender and one or more stators which are immobile in relation to the substrate. The rotor is a seesaw frame where longitudinal rotor bar comprise one or more first deflection electrodes, and second deflection electrodes are fixed to the inner package plane above or below each of the one or more first deflection electrodes, so that they overlap. The accelerometer can perform a self-test by applying a test voltage to at least one first deflection electrode and at least one second deflection electrode. A self-test response signal can be read with a measurement between rotor and stator electrodes.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: October 20, 2020
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventors: Matti Liukku, Ville-Pekka Rytkönen
  • Patent number: 10809278
    Abstract: A physical quantity sensor includes a substrate, a movable body that faces the substrate, a fixed portion that is fixed to the substrate, and a support beam that couples the movable body to the fixed portion. The movable body is displaceable with the support beam as a rotation axis, and includes, in a plan view, a first mass that is located on one side of a second direction with respect to the rotation axis, and a second mass that is located on the other side. Each of the first mass and the second mass has a plurality of through-holes which penetrate through the movable body and each of which has a square shape as an opening shape. When damping is indicated by C, and a minimum value of the damping is indicated by Cmin, C?1.5?Cmin.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: October 20, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10802042
    Abstract: An acceleration measuring device is disclosed, for use as a gravimeter or gradiometer for example. The device has a support and a proof mass, connected to each other by at flexures allowing displacement of the proof mass relative to the support. The support defines a space for displacement of the proof mass. The device is configured so that the modulus of the gradient of the force-displacement curve of the proof mass decreases with increasing displacement, for at least part of the force-displacement curve. This is the so-called anti-spring effect. The resonant frequency of oscillation of the proof mass is determined at least in part by the orientation of the device relative to the direction of the force due to gravity. The proof mass is capable of oscillating with a resonant frequency of 10 Hz or less. The proof mass has a mass of less than 1 gram.
    Type: Grant
    Filed: August 26, 2015
    Date of Patent: October 13, 2020
    Assignee: The University Court of the University of Glasgow
    Inventors: Paul Campsie, Giles Dominic Hammond, Richard Paul Middlemiss, Douglas John Paul, Antonio Samarelli
  • Patent number: 10802041
    Abstract: In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: October 13, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma, Tomonori Sekiguchi
  • Patent number: 10802040
    Abstract: An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: October 13, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Takashi Shiota, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma
  • Patent number: 10794701
    Abstract: An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.
    Type: Grant
    Filed: May 1, 2018
    Date of Patent: October 6, 2020
    Assignee: NXP USA, Inc.
    Inventor: Andrew C. McNeil
  • Patent number: 10768020
    Abstract: The present invention is directed to a CV conversion amplifier which is small in current consumption and capable of securing a sufficient capacitance-voltage conversion gain and a sufficient amplitude range of an output voltage and a capacitive sensor using the same which is low power consumption, low in noise, and wide in an input signal allowable range. A capacitive sensor includes first and second detection capacitors, a CV conversion circuit includes first and second feedback capacitors and obtains a voltage based on capacitance values of the first and second feedback capacitors, an AD converter performs analog digital conversion on an input voltage and obtains a digital signal, a digital control unit receives the digital signal as an input, and first and second digitally controlled variable capacitors have capacitance values that are controlled by the digital control unit.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: September 8, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Yuki Furubayashi, Takashi Oshima, Makoto Takahashi
  • Patent number: 10739376
    Abstract: There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: August 11, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Atsushi Isobe, Takashi Shiota, Yuudai Kamada, Chisaki Takubo, Noriyuki Sakuma
  • Patent number: 10732196
    Abstract: A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: August 4, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Patent number: 10697773
    Abstract: A physical quantity sensor includes a driven section and a drive spring that supports the driven section so that the driven section is displaceable in a first direction. The drive spring has a serpentine shape and includes a plurality of spring structures extending in a second direction that intersects a first direction. At least one of the spring structures has a thin section that is thinner in a third direction that intersects the first and second directions than the other portions of the drive spring.
    Type: Grant
    Filed: April 9, 2018
    Date of Patent: June 30, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Makoto Furuhata, Kei Kanemoto
  • Patent number: 10669150
    Abstract: [Object] To provide an electrostatic device capable of improving device characteristics. [Solving Means] An electrostatic device according to an embodiment of the present technology includes an electrically conductive base material, a first conductor layer, a second conductor layer, and a bonding layer. The first conductor layer includes a first electrode portion and a first base portion and is connected to a signal line. The first base portion supports the first electrode portion and is disposed on the base material. The second conductor layer includes a second electrode portion and a second base portion and is connected to a reference potential. The second electrode portion is opposed to the first electrode portion in a first axis direction and configured to be movable relative to the first electrode portion in the first axis direction. The second base portion supports the second electrode portion and is disposed on the base material.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: June 2, 2020
    Assignee: Sony Corporation
    Inventors: Akira Akiba, Mitsuo Hashimoto, Shinya Morita, Munekatsu Fukuyama
  • Patent number: 10663481
    Abstract: A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section.
    Type: Grant
    Filed: January 24, 2019
    Date of Patent: May 26, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10656173
    Abstract: A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.
    Type: Grant
    Filed: November 14, 2016
    Date of Patent: May 19, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Johannes Classen, Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther, Timm Hoehr
  • Patent number: 10598686
    Abstract: A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.
    Type: Grant
    Filed: October 17, 2017
    Date of Patent: March 24, 2020
    Assignee: Robert Bosch GmbH
    Inventors: Antoine Puygranier, Denis Gugel, Guenther-Nino-Carlo Ullrich, Markus Linck-Lescanne, Sebastian Guenther, Timm Hoehr
  • Patent number: 10591721
    Abstract: A method for manufacturing a protective wafer including a frame wafer and an optical window, and to a method for manufacturing a micromechanical device including such a protective wafer having an inclined optical window. Also described are a protective wafer including a frame wafer and an optical window, and a micromechanical device including a MEMS wafer and such a protective wafer, which delimit a cavity, the protective wafer including an inclined optical window.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: March 17, 2020
    Assignee: Robert Bosch GmbH
    Inventor: Stefan Pinter
  • Patent number: 10591508
    Abstract: A method for forming an MEMS inertial sensor is provided, comprising: providing a first substrate having a first surface and a second surface, wherein providing the first substrate comprises providing a first base substrate and forming at least one conductive layer; providing a second substrate having a third surface and a fourth surface; bonding the first surface of the first substrate and the third surface of the second substrate together to form a first bonding interface; thinning the first base substrate from the second surface of the first substrate to remove part of the first base substrate; and forming a movable element of the MEMS inertial sensor, wherein the at least one conductive layer comprises a shielding layer, and the shielding layer is located between the first base substrate and the first bonding interface.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: March 17, 2020
    Assignee: MEMSEN ELECTRONICS INC.
    Inventor: Lianjun Liu
  • Patent number: 10571268
    Abstract: A MEMS sensor includes a MEMS layer, a cap layer, and a substrate layer. The MEMS layer includes a suspended spring-mass system that moves in response to a sensed inertial force. The suspended spring-mass system is suspended from one or more anchors. The anchors are coupled to each of the cap layer and the substrate layer by anchoring components. The anchoring components are offset such that a force applied to the cap layer or the substrate layer causes a rotation of the anchor and such that the suspended spring-mass system substantially remains within the original MEMS layer.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: February 25, 2020
    Assignee: InvenSense, Inc.
    Inventors: Matthew Thompson, Houri Johari-Galle, Leonardo Baldasarre, Sarah Nitzan, Kirt Williams
  • Patent number: 10571485
    Abstract: In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202).
    Type: Grant
    Filed: June 5, 2015
    Date of Patent: February 25, 2020
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventors: Michael Durston, Kevin Townsend
  • Patent number: 10545254
    Abstract: A seismic sensor comprises a central mass having three principal axes and disposed within a frame. A plurality of transducers is mechanically coupled between the frame and the central mass. The transducers are arranged in pairs, with the transducers in each pair being coupled to opposing sides of the central mass, as defined along each of the three principal axes. Electronics can be provided to combine signals of the transducers in each pair to generate output characterizing acceleration and rotation of the frame.
    Type: Grant
    Filed: October 31, 2016
    Date of Patent: January 28, 2020
    Assignee: ION GEOPHYSICAL CORPORATION
    Inventors: Cornelis A. M. Faber, Andre W. Olivier, Lawrence Philip Behn
  • Patent number: 10527642
    Abstract: An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: January 7, 2020
    Assignee: HITACHI, LTD.
    Inventors: Atsushi Isobe, Noriyuki Sakuma, Chisaki Takubo, Yuudai Kamada, Takashi Shiota
  • Patent number: 10527644
    Abstract: A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: January 7, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Shota Kigure
  • Patent number: 10520526
    Abstract: A microelectromechanical systems (MEMS) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite segment of the folded tether provides the tether with increased stiffness without altering the fundamental resonance frequency of the tether. The increased stiffness can beneficially lower the occurrence of stiction. Moreover, such a tether configuration provides larger separation between the tether's fundamental resonance frequency and higher order resonant mode frequencies, meaning that the higher order modes may be suppressed in typical operation of the MEMS sensor device.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: December 31, 2019
    Assignee: Analog Devices, Inc.
    Inventor: Jianglong Zhang
  • Patent number: 10473686
    Abstract: An inertia measurement module and three-axis accelerometer, comprising a first pole piece (4) located on a substrate and a mass block (1) suspendingly connected above the substrate via elastic beams (11, 12); the elastic beams (11, 12) includes a first elastic beam (12) and a second elastic beam (11), two ends of the second elastic beams (11) being connected to an anchor point (6) of the substrate, two ends of the first elastic beam (11) being connected to the mass block (1); a center of the first elastic beam (12) and/or the second elastic beam (11) deviates from a center of gravity of the mass block (1); the mass block (1) is further provided with a first movable electrode (9) and a second movable electrode (10) in a Y-axis and an X-axis direction; the movement of one axis in a plane of the inertia measurement module cannot be affected by an eccentric structure feature, such that both X-axis movement and Y-axis movement are linear movements, thus not intensifying an inter-axis coupling, and also not reducin
    Type: Grant
    Filed: July 23, 2015
    Date of Patent: November 12, 2019
    Assignee: Goertek Inc.
    Inventor: Tingkai Zhang
  • Patent number: 10466267
    Abstract: The present invention provides a sensor with a simple structure which can precisely sense movement, etc., the sensor comprising: a head; and a support which is disposed to support one side of the head, wherein the support comprises: a first support portion for supporting the head; a second support portion which supports the head and is spaced apart from the first support portion; a first extension portion which is extended from the first support portion; a second extension portion which is extended from the second support portion; and a sensing portion which senses the deformation of the first extension portion and the second extension portion.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: November 5, 2019
    Assignee: SPHEREDYNE CO., LTD.
    Inventor: Sug Whan Kim
  • Patent number: 10436812
    Abstract: A MEMS acceleration device for measurement of the acceleration along three axes. The device includes capacitors, which capacitance changes under the influence of an acceleration acting upon the device. The change of capacitance for acceleration parallel to the substrate are, normally used with distinct capacitors. This device combines capacitors for using the change in capacitance for sensing in two independent and different directions parallel to the substrate thereby reusing the capacitor. Thereby allowing shrinking of the device while maintaining substantially the same sensitivity.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: October 8, 2019
    Assignee: NXP USA, Inc.
    Inventor: Jerome Romain Enjalbert
  • Patent number: 10429406
    Abstract: A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure includes a mobile element with a rotor suspended to a support, a first frame anchored to the support and circumscribing the mobile element, and a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: October 1, 2019
    Assignee: MURTA MANUFACTURING CO., LTD.
    Inventor: Ville Pekka Rytkönen
  • Patent number: 10421661
    Abstract: An acceleration sensor includes a substrate, a support beam, a weight body a stationary section and an engaging section. The weight body is divided into a first weight section and a second weight section based on the support beam as a boundary line, and the first weight section and the second weight section have different weights from each other. The first weight section and the second weight section include a facing section which faces a side of the engaging section opposite to a side facing the support beam. In an X axis direction intersecting the Y axis direction, if a distance between a corner section of the engaging section in the vicinity of one end portion and the support beam is L1 and a distance between the engaging section and the facing section is L2, a relational expression, L1>L2 is satisfied.
    Type: Grant
    Filed: October 30, 2017
    Date of Patent: September 24, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10393770
    Abstract: Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.
    Type: Grant
    Filed: April 13, 2017
    Date of Patent: August 27, 2019
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Cenk Acar, Brenton Simon, Sandipan Maity
  • Patent number: 10358339
    Abstract: The invention provides a micro-electro-mechanical device which is manufactured by a CMOS manufacturing process. The micro-electro-mechanical device includes a stationary unit, a movable unit, and a connecting member. The stationary unit includes a first capacitive sensing region and a fixed structure region. The movable unit includes a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass region consists of a single material. The connecting member is for connecting the movable unit in a way to allow a relative movement of the movable unit with respect to the stationary unit.
    Type: Grant
    Filed: March 6, 2018
    Date of Patent: July 23, 2019
    Assignee: PIXART IMAGING INCORPORATION
    Inventors: Ming-Han Tsai, Yu-Chia Liu, Wei-Leun Fang
  • Patent number: 10322926
    Abstract: A structure for a MEMS device includes a MEMS layer comprising a mass portion and a spring portion, a substrate coupled to the MEMS layer, wherein the substrate comprises a planar region and an stopper region, wherein the MEMS device and the substrate are oriented in a plurality of relative orientations in response to an external force, wherein the spring portion and the stopper region are configured to disengagingly impact when the external force exceeds a first threshold force, wherein the mass portion and the planar region are configured to disengagingly impact when the external force exceeds a second threshold force, and wherein the second threshold force exceeds the first threshold force.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: June 18, 2019
    Assignee: mCube, Inc.
    Inventors: Sudheer Sridharamurthy, Te-Hsi Terrence Lee, Wenhua Zhang
  • Patent number: 10317425
    Abstract: A functional element includes: a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body; a first fixed electrode portion that is disposed on the substrate and a portion of which faces a first portion as one of portions of the movable body; a second fixed electrode portion that is disposed on the substrate and a portion of which faces a second portion as the other portion of the movable body; and a third fixed electrode portion that is disposed on the substrate and a portion of which faces the first portion. An opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.
    Type: Grant
    Filed: February 23, 2015
    Date of Patent: June 11, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10295346
    Abstract: A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: May 21, 2019
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Seiichiro Ogura, Ryuta Nishizawa
  • Patent number: 10288658
    Abstract: Described example user interface control apparatus includes a first structure, with a first side, conductive capacitor plate structures spaced along a first direction on the first side, a movable second structure with an auxiliary conductive structure, and an interface circuit to provide excitation signals to, and receive sense signals from, the conductive capacitor plate structures to perform a mutual capacitance test and a self-capacitance test of individual ones of the conductive capacitor plate structures to determine a position of the second structure or a user's finger relative to the first structure along the first direction.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: May 14, 2019
    Assignee: Texas Instruments Incorporated
    Inventor: Peter Spevak
  • Patent number: 10247753
    Abstract: A microelectromechanical systems (MEMS) device, such as a single axis accelerometer, includes a movable mass suspended from a substrate. The movable mass has a first portion and a second portion. A first spring system interconnects the first portion of the movable mass with the second portion of the movable mass. A second spring system interconnects the first portion with an anchor system. The first spring system enables movement of the second portion of the movable mass in response to a shock event force imposed on the movable mass in a first direction that is orthogonal to a sense direction, wherein the first spring system inhibits movement of the first portion of the movable mass in the first direction in response to the shock event force. However, the first and second movable masses move together in response to an acceleration force in the sense direction.
    Type: Grant
    Filed: February 14, 2017
    Date of Patent: April 2, 2019
    Assignee: NXP USA, Inc.
    Inventors: Aaron A. Geisberger, Fengyuan Li
  • Patent number: 10234478
    Abstract: A method for detecting a malfunction or defect of a sensor of a vehicle safety device uses a control unit of the vehicle safety device and at least one self-testing sensor which is separate from the control unit and transmits measuring values to the control unit.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: March 19, 2019
    Assignee: TRW AUTOMOTIVE GmbH
    Inventors: Dominik Weiland, Paul Melton, Carl A. Munch, Oliver Buntz, Matthias Webert
  • Patent number: 10228386
    Abstract: A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section.
    Type: Grant
    Filed: August 4, 2015
    Date of Patent: March 12, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10214414
    Abstract: An integrated MEMS system having a MEMS chip, including a MEMS transducer, and at least one IC chip, including MEMS processing circuitry, and additional circuitry to process electrical signals. The MEMS chip can include first and second insulated conducting pathways. The first pathways conduct the MEMS-signals between the transducer and the IC chip, for processing; and the second conducting pathways can extend through the entire thickness of the MEMS chip, to conduct electrical signals to the IC chip, to be processed by additional circuitry.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: February 26, 2019
    Assignee: Motion Engine, Inc.
    Inventors: Robert Mark Boysel, Louis Ross
  • Patent number: 10203351
    Abstract: In some exemplary embodiments, a MEMS accelerometer includes a device wafer having a proof mass and a plurality of tracking anchor points attached to a substrate. Each tracking anchor is configured to deflect in response to asymmetrical deformation in the substrate, and transfer mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.
    Type: Grant
    Filed: October 3, 2014
    Date of Patent: February 12, 2019
    Assignee: Analog Devices, Inc.
    Inventor: Xin Zhang
  • Patent number: 10197591
    Abstract: A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: February 5, 2019
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10187120
    Abstract: A tunable microwave network and its application in a radio transceiver transmit signal cancellation network is described. The tunable microwave network realizes a large set of reflection coefficients over a predefined area in the complex reflection coefficient plane for the purpose of reflecting a variable cancellation signal which, when properly configured, results in the substantial attenuation of transmit reflection and transmit leakage signal at the radio transceiver receiver input. A relevant building block of the proposed tunable microwave network is a shunt tunable capacitive element coupled to another shunt tunable capacitive element through a phase shifting element with phase shift greater than 30 degrees divided by a quantity substantially similar to the total number of said tunable capacitive elements and less than 60 degrees at a predefined frequency.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: January 22, 2019
    Assignee: SUPERLATIVE SEMICONDUCTOR, LLC
    Inventor: Edward A. Keehr
  • Patent number: 10167191
    Abstract: A method of fabricating a semiconductor device, includes, in part, growing a first layer of oxide on a surface of a first semiconductor substrate, forming a layer of insulating material on the oxide layer, patterning and etching the insulating material and the first oxide layer to form a multitude of oxide-insulator structures and further to expose the surface of the semiconductor substrate, growing a second layer of oxide in the exposed surface of the semiconductor substrate, and removing the second layer of oxide thereby to form a cavity in which a MEMS device is formed. The process of growing oxide in the exposed surface of the cavity and removing this oxide may be repeated until the cavity depth reaches a predefined value. Optionally, a multitude of bump stops is formed in the cavity.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: January 1, 2019
    Assignee: KIONIX, INC.
    Inventors: Martin Heller, Jonah deWall, Andrew Hocking, Kristin Lynch, Sangtae Park
  • Patent number: 10161957
    Abstract: A method for closed loop operation of a capacitive accelerometer comprising: a proof mass; first and second sets of both fixed and moveable capacitive electrode fingers, interdigitated with each other; the method comprising: applying PWM drive signals to the fixed fingers; sensing displacement of the proof mass and changing the mark:space ratio of the PWM drive signals, to provide a restoring force on the proof mass that balances the inertial force of the applied acceleration and maintains the proof mass at a null position; detecting when the mark:space ratio for the null position is beyond a predetermined upper or lower threshold; and further modulating the PWM drive signals by extending or reducing x pulses in every y cycles, where x>1 and y>1, to provide an average mark:space ratio beyond the upper or lower threshold without further increasing or decreasing the mark length of the other pulses.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: December 25, 2018
    Assignee: ATLANTIC INERTIAL SYSTEMS, LIMITED
    Inventors: Kevin Townsend, Michael Terence Durston
  • Patent number: 10151771
    Abstract: A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: December 11, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Shota Kigure, Satoru Tanaka
  • Patent number: 10139229
    Abstract: A gyroscope includes drive electrodes that drive a drive mass at a drive frequency. A sense mass is responsive to a Coriolis force caused by rotation of the gyroscope and oscillates based on the drive frequency. Electrodes adjacent to the sense mass drive the sense mass at test frequencies. The response to the driving at the test frequencies is measured and a gyroscope failure is identified based on this response.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: November 27, 2018
    Assignee: PANASONIC CORPORATION
    Inventors: Luca Coronato, Giacomo Gafforelli, Jaakko Ruohio
  • Patent number: 10139427
    Abstract: A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate.
    Type: Grant
    Filed: July 14, 2014
    Date of Patent: November 27, 2018
    Assignee: Seiko Epson Corporation
    Inventor: Satoru Tanaka
  • Patent number: 10132826
    Abstract: A physical quantity sensor includes a base substrate and an element piece bonded to the base substrate. The element piece includes fixed portions fixed to the base substrate, a first fixed electrode finger supported on the fixed portion, a second fixed electrode finger supported on the fixed portion, a fixed portion that is positioned between the fixed portions and is fixed to the base substrate, a movable portion that is displaceable with respect to the fixed portion, an elastic portion that links the fixed portion and the movable portion, a first movable electrode finger that is supported on the movable portion and that is arranged facing the first fixed electrode finger, and a second movable electrode finger that is supported on the movable portion and is arranged facing the second fixed electrode finger.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: November 20, 2018
    Assignee: Seiko Epson Corporation
    Inventor: Shota Kigure
  • Patent number: 10107701
    Abstract: A MEMS pressure sensor device is provided that can provide both a linear output with regard to external pressure, and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass that generates capacitive output from electrodes configured at both ends of the rotating proof mass. Sensor output can then be generated using a difference between the capacitances generated from the ends of the rotating proof mass. An additional benefit of such a configuration is that the differential capacitance output changes in a more linear fashion with respect to external pressure changes than does a capacitive output from traditional MEMS pressure sensors.
    Type: Grant
    Filed: February 23, 2016
    Date of Patent: October 23, 2018
    Assignee: NXP USA, Inc.
    Inventors: Andrew C. McNeil, Yizhen Lin
  • Patent number: 10088315
    Abstract: A gyroscope is driven at a drive frequency and senses a Coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given Coriolis force may change due to changes in the gyroscope over time. A plurality of test frequencies are applied to the gyroscope, and the response of the gyroscope to those test frequencies is analyzed in order to track changes in the response of the gyroscope. Operational parameters of the gyroscope may be altered in order to compensate for those changes.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: October 2, 2018
    Assignee: InvenSense, Inc.
    Inventors: Luca Coronato, Giacomo Gafforelli, Jaakko Ruohio