Abstract: A micro-electromechanical system (MEMS) device and a method of forming the same, the MEMS device includes a composite substrate, a cavity, a piezoelectric stacking structure and a proof mass. The composite substrate includes a first semiconductor layer, a bonding layer and a second semiconductor layer from bottom to top. The cavity is disposed in the composite substrate, and the cavity is extended from the second semiconductor layer into the first semiconductor layer and not penetrated the first semiconductor layer. The piezoelectric stacking structure is disposed on the composite substrate, with the piezoelectric stacking structure having a suspended region over the cavity. The proof mass is disposed in the cavity to connect to the piezoelectric stacking structure.

Abstract: A pair of vector sensors are provided and mounted orthogonally to each other. Each vector sensor includes a central structural member having a first end and a second end. The central structural member has four symmetric arms oriented at 90° to each other. A crystalline plate is attached perpendicular to a distal end of each arm of the central structural member. The first end of each vector sensor is embedded in a socket of a proof mass. The second end of each vector sensor is embedded in an aperture of a cubic base.

Abstract: A sensor assembly includes a housing extending from an insertion end to an opposite coupling end, from a sensor end to an opposite back end, and from a top end to an opposite bottom end. The assembly also includes a sensor dish outwardly projecting from the sensor end of the housing and configured to hold one or more sensors. The assembly also includes a radio frequency (RF) transparent sensor cap configured to be secured to the sensor dish to secure the one or more sensors within the sensor dish. The housing also can be secured to a vehicle for the sensors to measure operational conditions of the vehicle. The housing of the sensor assembly may be connected to a drive train of the vehicle by inserting a fastener through a channel in the housing and into a jacking hole of the vehicle.

Abstract: A piezoelectric acceleration sensor provided by the present invention comprises: a housing, wherein the housing is internally molded with an installation chamber, and one side face of the housing is provided with a cable connector; an adjustment structure, configured to adjustably connect the housing position to a to-be-measured object, so as to adjust the relative position between the to-be-measured object and the cable connector; and a charge output structure, installed in the installation chamber and configured to induce vibration and output electric signals, wherein the charge output structure is electrically connected with the cable connector. Through the adjustment structure, the housing position can be adjustably connected to the to-be-measured object, such that the cable connector keeps away from the position of obstacles, and the position of the cable connector can be flexibly adjusted, thereby facilitating installation.

Abstract: A variable capacitor is disclosed. The variable capacitor includes a multi-layer ceramic capacitor member, and a capacitance varying mechanism. The multi-layer ceramic capacitor member includes one or two external electrode(s), a ceramic dielectric, and a plurality of electrode layers positioned inside the ceramic dielectric. The capacitance varying mechanism includes an electrical conductor positioned aside and approximate to the ceramic dielectric. The electrical conductor is deformable responsive to a pressure applied thereon, and an area of the electrical conductor in contact with the ceramic dielectric varies in accordance with the pressure, thus varying a capacitance value between the external electrode(s) and the electrical conductor. In general, the external electrode(s) of the multi-layer ceramic capacitor member serve(s) as fixed electrode(s) of the variable capacitor.

Abstract: A machine health management system incorporates machine measurement units that are connected via Power Over Ethernet (PoE) to a central logic unit. Each measurement unit includes one or more sensor modules to which sensors are connected, or one or more output modules to which output devices are connected, or a combination of sensor modules and output modules. The energy needed to power the measurement units comes through the PoE network. Sensor signals generated by the sensors are digitalized and may be analyzed in the sensor modules. Raw data, and in some cases preprocessed data, are transported over the Ethernet network to the central logic unit, where the data is analyzed and/or combined with other data to perform prediction analysis, build decisions and possibly implement protection solutions, predict performance of the machine/system, or control the machine/system.

Abstract: A patient care system is configured for infusing fluid to a patient. The system includes a plurality of modular fluid infusion pumps that each has a connector for connecting to a modular programming unit or to one another. Systems and methods are configured for verifying that the connectors are reliably performing their functions or communicatively connecting the pumps to one another or to the programming unit.

Abstract: A multilayer capacitor includes an element assembly, a first external electrode, a second external electrode, and a plurality of internal electrodes which are disposed at the inside of the element assembly. The plurality of internal electrodes include a first internal electrode that is electrically connected to the first external electrode, a second internal electrode that is electrically connected to the second external electrode, and a plurality of third internal electrodes. The plurality of third internal electrodes are electrically connected to each other by a first connection conductor and a second connection conductor, a first capacitance portion is constituted by the first internal electrode and the third internal electrodes, a second capacitance portion is constituted by the second internal electrode and the third internal electrodes, and the first capacitance portion and the second capacitance portion are electrically connected in series.

Abstract: A sensor assembly includes a housing extending from an insertion end to an opposite coupling end, from a sensor end to an opposite back end, and from a top end to an opposite bottom end. The assembly also includes a sensor dish outwardly projecting from the sensor end of the housing and configured to hold one or more sensors. The assembly also includes a radio frequency (RF) transparent sensor cap configured to be secured to the sensor dish to secure the one or more sensors within the sensor dish. The housing also can be secured to a vehicle for the sensors to measure operational conditions of the vehicle. The housing of the sensor assembly may be connected to a drive train of the vehicle by inserting a fastener through a channel in the housing and into a jacking hole of the vehicle.

Abstract: A displacement detection sensor has a plate member and piezoelectric sensors with a piezoelectric film of PLLA. The piezoelectric sensors are mounted on the face of the plate member on the opposite side of the operation surface thereof. Tensile stresses are generated in the entire face of the plate member at pressing the operation surface. The piezoelectric sensor is mounted so that the direction of macro tensile stress in the plate member in the region in which the piezoelectric sensor is mounted and molecular orientation direction of the piezoelectric film intersect each other at an angle of 45°. The piezoelectric sensor is mounted so that the direction of macro tensile stress in the plate member in the region in which the piezoelectric sensor is mounted and molecular orientation direction of the piezoelectric film intersect each other at an angle of approximately 45°.

Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.

Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.

Abstract: The present invention relates to a suspension structure for a high power micro speaker and, more particularly, to a shape of a suspension which ensures a lightweight of the suspension as well as high reliability and a conductive pattern which applies electric signals. The present invention provides a suspension for a high power micro speaker that includes an outer peripheral portion, a central portion and a connection portion, is provided with a conductive pattern, and is formed in a rectangular shape, wherein land portions for use in soldering or welding lead-in wires of a voice coil are formed on long connection portions disposed on long sides.

Abstract: A system includes a controller to control movement of a linear resonant actuator (LRA). The system includes a monitor in the controller to monitor a back electromotive force (BEMF) signal from the LRA representing the movement of the LRA. The monitor generates an indicator that indicates whether or not movement of the LRA has occurred. A primary loop module in the controller controls acceleration and braking of the LRA based on the monitored BEMF signal if the indicator from the monitor indicates that LRA movement has occurred. An alternate cycle module in the controller pushes the LRA at a predetermined frequency if the indicator from the monitor indicates that LRA movement has not occurred. The push is employed to move the LRA when the BEMF signal is undetectable by the monitor with respect to a predetermined threshold.

Abstract: The present invention relates to a suspension structure for a high power micro speaker and, more particularly, to a shape of a suspension which ensures a lightweight of the suspension as well as high reliability and a conductive pattern which applies electric signals. The present invention provides a suspension for a high power micro speaker that includes an outer peripheral portion, a central portion and a connection portion, is provided with a conductive pattern, and is formed in a rectangular shape, wherein land portions for use in soldering or welding lead-in wires of a voice coil are formed on long connection portions disposed on long sides.

Abstract: A measurement amplifying circuit (400) for a piezo-electric sensor (100) positioned in an internal combustion engine supplying a signal to be measured, includes: a module (420) for generating a common mode voltage; a differential amplifier (410); and a subtraction module (430). The module (420) for generating a common mode voltage is to be connected to a wall (111) of the engine, the module (420) for generating a common mode voltage being suitable for supplying a common mode voltage signal (Vcm) reproducing the variations of an engine signal (Sb) received from the wall (111) of the engine.

Abstract: An accelerometer (102) senses acceleration in a specific direction through the voltages produced by multiple piezoelectric sensors (114, 302, 304) electrically arranged in parallel in response to the acceleration. The main axes of sensitivity of the piezoelectric sensors are aligned and point in the same direction. The parallel arrangement enables to control the thermal noise level of the output signal of the accelerometer that originates in a bias resistor (116) connected in parallel to the parallel arrangement of the piezoelectric sensors.

Abstract: A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.

Abstract: A touch panel capable of detecting a pen and a finger, capable of corresponding to multi-touch, capable of detecting pressing force, and capable of reducing the use amount of a transparent electrode as much as possible. The touch panel has a piezoelectric sheet of poly-L-lactic acid having a predetermined stretching axial direction, electrodes that are opposed to each other and formed on the piezoelectric sheet do not cover the entire surface of the piezoelectric sheet and are formed so that they are discretely distributed in plural positions. The piezoelectric sheet is brought into the condition that tension is imparted in directions not coincident with the stretching axial direction.

Abstract: A force sensor includes a transducer with a measuring element operatively connected to a measuring object for generating measuring signals of a force acting on the measuring object, and two in parallel transmission channels transmit mutually corresponding signals of the measuring signals independently from one another and connected in parallel to the same transducer. A test signal is evaluated in a transmission channel in which the test signal has been injected and in another transmission channel in which the test signal has not been injected. In another testing method, the transmitted signals are compared.

Abstract: A piezoelectric microspeaker and a method of fabricating the same are provided. The piezoelectric microspeaker includes a substrate having a through hole therein; a diaphragm disposed on the substrate and covering the through hole; and a plurality of piezoelectric actuators including a piezoelectric member, a first electrode, and a second electrode, wherein the first and second electrodes are configured to induce an electric field in the piezoelectric member. The piezoelectric actuators include a central actuator, which is disposed on a central portion of the diaphragm and a plurality of edge actuators, which are disposed a predetermined distance apart from the central actuator and are formed on a plurality of edge portions of the diaphragm.

Abstract: An inertial force sensor includes a base, a connection electrode on the base; a flexible section supported by the base, a driving section on an upper surface of the flexible section, a detection section on the upper surface of the flexible section, an interlayer insulating layer on the upper surface of one of the driving section and the detection section, and a wiring electrically connecting another of the driving section and the detection section to a connection electrode via an upper surface of the interlayer insulating layer. This inertial force sensor can have improved sensitivity and a small size.

Abstract: Biometric monitoring devices, including various technologies that may be implemented in such devices, are discussed herein. Additionally, techniques for utilizing altimeters in biometric monitoring devices are provided. Such techniques may, in some implementations, involve recalibrating a biometric monitoring device altimeter based on location data; using altimeter data as an aid to gesture recognition; and/or using altimeter data to manage an airplane mode of a biometric monitoring device.

Abstract: A piezoelectric acceleration sensor comprises a piezoelectric element, a metallic sheet and a circuit board. The piezoelectric element is polarized in a predetermined direction. The circuit board includes a circuit portion and a roughly flat shaped base portion. The base portion protrudes from an end portion of the circuit portion. One of surfaces of the metallic sheet is fixed to and supported by a surface of the base portion. The piezoelectric element is fixed to and supported by a remaining one of the surfaces of the metallic sheet in a manner that the piezoelectric element and the base portion do not overlap each other in the predetermined direction.

Abstract: A motion sensing transducer includes an electrically conductive substrate having a major surface that defines a substrate plane, and a first compliant structure including a piezoelectric material and having greater compliance to inertial forces oriented out of the substrate plane than to inertial forces oriented in the substrate plane. The first compliant structure includes a piezoelectric material. The motion sensing transducer includes a second compliant structure having greater compliance to inertial forces oriented in the substrate plane than to inertial forces oriented out of the substrate plane. The second compliant structure includes a first surface that is electrically isolated from the substrate. The first surface faces a surface of the substrate. The motion sensing transducer includes a first electrically conductive lead that is electrically connected to the first surface, and a second electrically conductive lead that is electrically connected to the piezoelectric material.

Abstract: A sensor includes a housing and a mass, suspended in the housing. The motion of the mass emulates dynamic behavior of a brain of the wearer along a plurality of axes. At least one sensing element is coupled to generate sensor data based on the motion of the mass, in response to an impact to a protective helmet.

Abstract: Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

Abstract: An accelerometer. At least some of the example embodiments include an accelerometer having a first piezoelectric element having a first polarization, the first piezoelectric element defining an upper surface and a second piezoelectric element having a second polarization, the second piezoelectric element defines a lower surface parallel to the upper surface of the first piezoelectric element; the first polarization being aligned with the second polarization. The accelerometer further includes a first mounting plate that defines a first aperture, the first and second piezoelectric elements extending through the first aperture such that the first mounting plate transects the first and second piezoelectric elements. The piezoelectric elements define a first cantilever portion on a first side of the first mounting plate, and the piezoelectric elements define a second cantilever portion on a second side of the first mounting plate opposite the first side.

Abstract: An accelerometer device having a proof mass, a support base, a hinge that flexibly connects the proof mass to the support base, a double-ended fork (DETF) having two tines. The tines are made of only piezoelectric material. A plurality of electrode surfaces surround at least portions of the tines for inducing electric fields at the first tine is opposite a direction of the induced electric field at the second tine at similar locations along a longitudinal axis of the tines. This causes the tines to resonate in-plane and out of phase.

Abstract: An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Abstract: An acceleration measuring apparatus that can easily detect acceleration with high accuracy is provided. In the apparatus, positional displacement of a swingable pendulum member is detected, feedback control is performed to maintain the pendulum member in a stationary state using an actuator, and acceleration is measured by measuring the output of the actuator at this time. A movable electrode is provided to the pendulum member, and a loop is formed in which a fixed electrode provided to oppose the movable electrode, and an oscillating circuit, a crystal unit, and the movable electrode are electrically connected in series. By measuring an oscillating frequency of the oscillating circuit at this time, a change in the size of a variable capacitance formed between the movable electrode and the fixed electrode is detected, and thereby the positional displacement of the pendulum member is detected.

Abstract: A cantilever beam accelerometer design is disclosed that obviates the need of attaching electrical leads directly to the piezoelectric plates. According to one aspect of the invention, two identical proof-masses are positioned on top of each piezoelectric plate in a symmetrical fashion. In advance of attaching the masses to the plates, electrical leads are attached to the masses by some suitable technique such as soldering. Each proof-mass is positioned on its respective piezoelectric plate as close to the free-end of the beam as practical, to keep the size of the mass reasonably small. The disclosed concept is useful for both series and parallel configurations of the piezoelectric plates, wherein the polarization vectors are in opposite directions for two plates connected in series and the polarization vectors are in the same direction for two plates connected in parallel.

Abstract: Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.

Abstract: A dual output accelerometer having first and second output channels, comprises a supporting base, a first transducer comprising a plurality of inter-connected first piezoelectric elements, a second transducer comprising a plurality of inter-connected second piezoelectric elements and a seismic mass. Each of the first piezoelectric elements and the second piezoelectric elements are interleaved with one another, and are co-located with the seismic mass, the co-located first and second piezoelectric elements and the seismic mass being fastened to the supporting base by a rigid mechanical coupling. The interleaved first and second piezoelectric elements provide an improved first output channel to second output channel matching.

Abstract: An autonomous, self-powered device includes a radioisotope-powered current impulse generator including a spring assembly comprising a cantilever, and a piezoelectric-surface acoustic wave (P-SAW) structure connected in parallel to the current impulse generator. Positive charges are accumulated on an electrically isolated 63Ni thin film due to the continuous emission of ?-particles (electrons), which are collected on the cantilever. The accumulated charge eventually pulls the cantilever into the radioisotope thin-film until electrical discharge occurs. The electrical discharge generates a transient magnetic and electrical field that can excite the RF modes of a cavity in which the electrical discharge occurs. A piezoelectric-SAW resonator is connected to the discharge assembly to control the RF frequency output.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.

Abstract: An actuator driven by a smart material device and suitable for use as an actuator, energy capture device, or sensor, having an enclosed compensator, potting material, at least one actuating arm, and two mechanical webs and a movable supporting member adapted such that application of a suitable electric potential causes a change in shape of the smart material device, thereby flexing the mechanical webs and causing movement of the actuating arm. As an energy capture device or sensor, external motion causes the actuating arm to move, thereby causing the smart material device to generate recoverable electrical energy or an electric signal indicating motion.

Abstract: An accelerometer including a metal housing and at least one of an integrated piezoelectric sensor and an integrated electronic piezoelectric (IEPE) amplified sensor within the housing. A metal boot extends from the housing and a plurality of sensor wires extends from the sensor into the boot. The accelerometer also includes a metal cable sheath connected to the boot having a plurality of cable wires insulated by a metal oxide powder contained by the sheath. At least one of the plurality of sensor wires is connected to at least one of the plurality of cable wires within the boot. The housing, the boot, and the metal cable sheath provide a sealed enclosure for the at least one sensor, the plurality of sensor wires and the plurality of cable wires.

Abstract: The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).

Abstract: A portable medical device is provided with an internal accelerometer device. The medical device includes a circuit board, the accelerometer device, and a response module coupled to the accelerometer device. The accelerometer device is mechanically and electrically coupled to the circuit board, and it includes a plurality of mass-supporting arms for a plurality of electrically distinct sensor electrodes, piezoelectric material for the mass-supporting arm, and a proof mass supported by the mass-supporting arms. Each of the mass-supporting arms has one of the sensor electrodes located thereon. Acceleration of the proof mass causes deflection of the piezoelectric material, which generates respective sensor signals at one or more of the sensor electrodes. The response module is configured to initiate an acceleration-dependent operation of the portable medical device in response to generated sensor signals present at the sensor electrodes.

Abstract: A physical quantity sensor includes a beam-like vibrating body and a fixing part supporting both ends of the beam-like vibrating body. A driving element is formed on a central portion of the beam-like vibrating body, and feedback elements are formed on both ends. A physical quantity acting on the beam-like vibrating body is detected by causing natural vibration in the beam-like vibrating body and detecting a natural frequency of the vibrating body. This enables reliable detection of a physical quantity, such as a strain or load, acting on an object.

Abstract: An accelerometer based on the measurement of Casimir force fluctuations is described. The accelerometer comprises a sealed housing containing a vacuum or a liquid, a piezoelectric plate fixed with the sealed housing, and a mass moveable within the sealed housing located in proximity to the piezoelectric plate. The moveable mass and the piezoelectric plate each have conductive surfaces which are located from each other at a distance which creates a Casimir Effect between the movable mass and the piezoelectric plate. Fluctuations in acceleration of the moveable mass cause fluctuations in the Casimir force on the piezoelectric plate. The acceleration fluctuations cause fluctuations in an electric output of the piezoelectric plate. The fluctuations in electric output are measured and used to calculate an acceleration and direction of movement of the accelerometer or a host device in which the accelerometer is carried.

Abstract: An acceleration sensor where the accuracy of acceleration detection is unlikely to fall even when the ambient temperature changes. A piezoelectric substrate includes a polarized central portion and first and second end portions. A first electrode is formed on a first main surface of the piezoelectric substrate so as to extend from the first end portion to the second end portion. A second electrode is formed inside the piezoelectric substrate so as to extend across the second end portion and the central portion. The second electrode opposes the first electrode in the central portion in a thickness direction. A supporting member clamps the second end portion. The piezoelectric substrate is formed such that a distance between the first electrode and the second electrode in the second end portion is greater than a distance between the first electrode and the second electrode in the central portion.

Abstract: Methods and apparatuses are disclosed that assist in sensing underwater signals in connection with geophysical surveys. One embodiment relates to a transducer including a cantilever coupled to a base. The cantilever may include a beam and a first coupling surface angularly oriented from the beam, and the base may include a second coupling surface angularly oriented from the beam and substantially parallel to the first coupling surface of the cantilever. The transducer may further include a sensing material coupled between the first coupling surface of the cantilever and the second coupling surface of the base.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes a sensor unit provided with an electrode layer and including piezo-electric elements so as to detect a movement of a driving unit supported to be able to be displaced to detect inertial force; an IC electrically connected to the sensor unit; and a switch connected between the sensor unit and an IC so as to control electrical connection between the sensor unit and the IC.

Abstract: An accelerometer comprises an elastic substrate beam having a first end and a second end and having upper and lower surfaces; supports to support the first and second ends of the substrate beam; sensing elements comprising piezoelectric material bonded onto the upper, lower or both the upper and lower surfaces of the substrate beam; and force applying elements for applying forces at two locations between the first and second ends. The substrate beam and the piezoelectric materials operate in a four-point bending configuration. Optionally the first and second ends of the substrate beam are formed by bending the substrate beam to reduce the physical dimensions of the device.

Abstract: An inertial sensor includes driving piezoelectric transducers for enabling an oscillation of a resonator, sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, and piezoelectric compensating elements substantially equidistantly among the driving and the sensing piezoelectric transducers, wherein the compensating elements and the resonator form corresponding capacitors having capacitive gaps, and wherein, during the oscillation of the resonator, changes in electrostatic charges stored in the capacitors are measured with the compensating elements and are modified so as to modify the oscillation of the resonator.

Abstract: A micro-electro-mechanical sensing device including a substrate, a semiconductor layer, a supporting pillar, a first suspended arm, a connecting member, a second suspended arm, and a proof mass is provided. The semiconductor layer is disposed on or above the substrate. The supporting pillar is disposed on or above the semiconductor layer. The first suspended arm is disposed on the supporting pillar. The supporting connects a portion of the first suspended arm. The connecting member directly or indirectly connects another portion of the first suspended arm. The second suspended arm has a first surface and a second surface opposite to the first surface. The connecting member connects a portion of the first surface. The proof mass connects the second suspended arm and it includes a portion of the second suspended arm as a portion of the proof mass. A method for manufacturing the device is also provided.

Abstract: Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.

Abstract: A portable medical device is provided with an internal accelerometer device. The medical device includes a circuit board, the accelerometer device, and a response module coupled to the accelerometer device. The accelerometer device is mechanically and electrically coupled to the circuit board, and it includes a plurality of mass-supporting arms for a plurality of electrically distinct sensor electrodes, piezoelectric material for the mass-supporting arm, and a proof mass supported by the mass-supporting arms. Each of the mass-supporting arms has one of the sensor electrodes located thereon. Acceleration of the proof mass causes deflection of the piezoelectric material, which generates respective sensor signals at one or more of the sensor electrodes. The response module is configured to initiate an acceleration-dependent operation of the portable medical device in response to generated sensor signals present at the sensor electrodes.