Abstract: Disclosed herein is an inertial sensor. An inertial sensor according to preferred embodiments of the present invention is configured to include a membrane, a plurality of first electrodes patterned on the membrane, a plurality of piezoelectric elements patterned on the first electrodes, and a second electrode integrally formed to cover the piezoelectric elements. By the configuration, the piezoelectric element is encapsulated with the second electrode that is integrally formed to prevent water or humidity from being permeated into the piezoelectric element, thereby preventing physical properties of the piezoelectric element from being changed or preventing the piezoelectric element from being delaminated.

Abstract: A MEMS device has a mass supported at least in part by a spring. Among other things, the spring has first and second layers, and first and a second electrodes. The first and second layers are between the first and second electrodes, and the first and second layers, which are oppositely polarized, form a bimorph.

Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

Abstract: A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.

Abstract: A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

Abstract: An accelerometer (102) senses acceleration in a specific direction through the voltages produced by multiple piezoelectric sensors (114, 302, 304) electrically arranged in parallel in response to the acceleration. The main axes of sensitivity of the piezoelectric sensors are aligned and point in the same direction. The parallel arrangement enables to control the thermal noise level of the output signal of the accelerometer that originates in a bias resistor (116) connected in parallel to the parallel arrangement of the piezoelectric sensors.

Abstract: Provided is a driving circuit, system, and driving method for a gyro sensor. The gyro sensor driving circuit includes a charge/voltage conversion unit receiving a charge output from a vibration-type gyro sensor and converting the charge output into a voltage signal; a phase converting unit receiving a signal from the charge/voltage converting unit and converting a phase of the received signal; a pulse generating unit receiving an output signal of the phase converting unit and outputting the output signal as a pulse wave; a pulse converting unit converting the pulse wave output from the pulse generating unit into a pulse signal using a certain voltage level as reference so as to apply the pulse wave as a driving signal; and a control unit controlling the pulse converting unit to generate the pulse signal using the certain voltage level as reference.

Abstract: A portable medical device is provided with an internal accelerometer device. The medical device includes a circuit board, the accelerometer device, and a response module coupled to the accelerometer device. The accelerometer device is mechanically and electrically coupled to the circuit board, and it includes a plurality of mass-supporting arms for a plurality of electrically distinct sensor electrodes, piezoelectric material for the mass-supporting arm, and a proof mass supported by the mass-supporting arms. Each of the mass-supporting arms has one of the sensor electrodes located thereon. Acceleration of the proof mass causes deflection of the piezoelectric material, which generates respective sensor signals at one or more of the sensor electrodes. The response module is configured to initiate an acceleration-dependent operation of the portable medical device in response to generated sensor signals present at the sensor electrodes.

Abstract: This invention is for a hermetic piezoelectric accelerometer sensor that can operates at high temperatures without the degradation observed on the piezoelectric elements, due to Oxygen depletion of the piezoelectric materials, when they are exposed to high temperatures, in reducing atmospheres, or low partial Oxygen pressure, inside a sealed housing. When a piezoelectric element loses Oxygen, becomes more electrically conductive, and this severe loss in resistivity, exacerbated with the increase of the temperature, makes the sensor inoperable, unreliable, or with permanent damage. The accelerometer of this invention operates effectively over a wide range of temperatures, including high temperatures above 1600° F., depending of the piezoelectric element used on the construction. The housing of the accelerometer uses a small section of metal made with Silver (or Silver alloys) to allow Oxygen diffusion through the metal, when it is exposed to high temperature.

Abstract: A tuning fork-type vibrator includes a tuning fork-type vibrating body including a base and legs. The tuning fork-type vibrating body includes two piezoelectric substrates, an intermediate electrode, surface electrodes and an entire-surface electrode that are laminated together. The surface electrodes are separated by separating portions extending from the base to each of the legs. The widths of the separating portions at a point of connection to the circuit board are wider than those of the separating portions at other points. The separating portions are formed by dividing an electrode provided on the entire surface of a piezoelectric substrate in the vibrating body with a dicer or by laser radiation or etching.

Abstract: There is disclosed a dual output compressive mode accelerometer having first and second output channels, comprising: a supporting base; first and second transducers mounted on the supporting base adjacent to one another, each transducer comprising a piezoelectric element and a seismic mass, the piezoelectric element positioned between the supporting base and the seismic mass; and a rigid mechanical coupling between the first and second transducers, the rigid mechanical coupling coupled to both of the first and second transducers above the supporting base.

Abstract: A sensor assembly for measuring movements of a fluid pump driven by an electric motor, the electric motor connectable to a feed voltage, the sensor assembly comprising an accelerometer electrically connected to a bias circuit, the latter comprising a feed terminal electrically connectable to the feed voltage of the motor and a signal terminal electrically connectable to an external measuring terminal. A fluid pump is also described, comprising a cylinder, a piston, a housing comprising a hermetic terminal and hermetically enclosing the cylinder and the piston, thus forming a hermetic assembly, the piston driven by an electric motor, the electric motor connected to an electric voltage by a pair of voltage terminals associated to the hermetic terminal, the fluid pump comprising a sensor assembly associated to the cylinder comprising a feed terminal connected to one of the voltage terminals and a signal terminal electrically connected to an external measuring circuit.

Abstract: A method of collective fabrication of remotely interrogatable sensors, wherein the method may include fabricating fabricating a first series of first resonators exhibiting a first resonant frequency at ambient temperature and a first static capacitance and fabricating a second series of second resonators exhibiting a second resonant frequency at ambient temperature and a second static capacitance. The method may also include performing a series of electrical measurements of the set of the first series of first resonators and of the set of the second series of second resonators, so as to determine first pairs and second pairs of resonant frequency and of capacitance of each of the first and second resonators and performing a series of matching of a first resonator and of a second resonator.

Abstract: An acceleration measuring apparatus that can easily detect acceleration with high accuracy is provided. In the apparatus, positional displacement of a swingable pendulum member is detected, feedback control is performed to maintain the pendulum member in a stationary state using an actuator, and acceleration is measured by measuring the output of the actuator at this time. A movable electrode is provided to the pendulum member, and a loop is formed in which a fixed electrode provided to oppose the movable electrode, and an oscillating circuit, a crystal unit, and the movable electrode are electrically connected in series. By measuring an oscillating frequency of the oscillating circuit at this time, a change in the size of a variable capacitance formed between the movable electrode and the fixed electrode is detected, and thereby the positional displacement of the pendulum member is detected.

Abstract: The invention relates to a process for the collective fabrication of a remotely interrogable sensor having at least one first resonator and one second resonator. Each resonator exhibits respectively a first and a second operating frequency. A first series of first resonators are fabricated. The first resonators each have a first operating frequency belonging to a first set of frequencies centered on a first central frequency. A second series of second resonators are fabricated. The second resonators each having a second operating frequency belonging to a second set of frequencies centered on a second central frequency. A series of pairings of a first resonator and of a second resonator are conducted so as to form pairs of resonators exhibiting a difference of operating frequencies which is equal to the difference of the first and second central frequencies.

Abstract: A smart material actuator having more than two actuating arms, more than two mechanical webs, and being driven by a piezo or other smart material device within an enclosed compensator, and which may be adapted for use as an actuator, an energy capture device, or a sensor. In certain embodiments, the smart material actuator can also operate as the driver for an audio speaker.

Abstract: An actuator driven by a smart material device and suitable for use as an actuator, energy capture device, or sensor, having an enclosed compensator, potting material, at least one actuating arm, and two mechanical webs and a movable supporting member adapted such that application of a suitable electric potential causes a change in shape of the smart material device, thereby flexing the mechanical webs and causing movement of the actuating arm. As an energy capture device or sensor, external motion causes the actuating arm to move, thereby causing the smart material device to generate recoverable electrical energy or an electric signal indicating motion.

Abstract: A motion detector includes a chamber, a resilient cantilever arm, a gimbal joint, an air bearing slider, and at least one piezoresistive sensor. The chamber has a front plate and a back plate located on opposite sides of the chamber, and each of the front plate and the back plate has a first through hole and a plurality of second through hole formed therein. The resilient cantilever arm is arranged in the chamber and has a free distal end. The air bearing slider is moveable coupled to the free distal end of the resilient cantilever arm via the gimbal joint. The at least one piezoresistive sensor is attached on the air bearing slider for sensing pitch, roll and yaw associated with the motion of the motion detector.

Abstract: A method for generating electrical power from an acceleration of an object is provided. The method including: vibrating a mass-spring unit upon an acceleration of an object; transmitting a force resulting from the acceleration from the mass-spring unit to the one or more piezoelectric elements; converting the vibration of the mass-spring unit to an electrical energy; and calculating at least one of the force and acceleration based on an output of the one or more piezoelectric elements.

Abstract: A method for generating electrical power from an acceleration of an object is provided. The method including: vibrating a mass-spring unit upon an acceleration of an object; transmitting a force resulting from the acceleration from the mass-spring unit to the one or more piezoelectric elements; converting the vibration of the mass-spring unit to an electrical energy; and calculating at least one of the force and acceleration based on an output of the one or more piezoelectric elements.

Abstract: An acceleration sensor has a pair of main surface protection members arranged at one end of both main surfaces of a piezoelectric oscillation element, and spaced from the main surfaces through a pair of main surface spacer members. An end surface protection member is arranged on an end surface at the other end of the main surface protection members by having an interval between the end surface protection member and the piezoelectric oscillation element, through a pair of end surface spacer members. A pair of side surface protection members is arranged at one end of the both side surfaces of the piezoelectric vibration element, the pair of main surface protection members, the end surface protection member, the pair of main surface spacer members, and a pair of side surface spacer members arranged on both side surfaces of the end surface spacer members.

Abstract: A sensor assembly includes a sound sensor, an image sensor, an acceleration sensor, and a gyroscope sensor. The sound sensor includes a substrate defining a first cavity, a diaphragm positioned on the substrate and covering the first cavity, a back plate covering the diaphragm and positioned on the substrate, and a capacitance. A first electrode layer is coated on the diaphragm and faces the first cavity. A second cavity is defined between the diaphragm and the back plate. A second electrode layer is coated on the back plate and faces the second cavity. The capacitance is electrically connected between the first and second electrode layers. The image sensor, the acceleration sensor, and the gyroscope sensor are positioned on the substrate.

Abstract: This invention is for a hermetic piezoelectric accelerometer sensor that can operates at high temperatures without the degradation observed on the piezoelectric elements, due to Oxygen depletion of the piezoelectric materials, when they are exposed to high temperatures, in reducing atmospheres, or low partial Oxygen pressure, inside a sealed housing. When a piezoelectric element loses Oxygen, becomes more electrically conductive, and this severe loss in resistivity, exacerbated with the increase of the temperature, makes the sensor inoperable, unreliable, or with permanent damage. The accelerometer of this invention operates effectively over a wide range of temperatures, including high temperatures above 1600° F., depending of the piezoelectric element used on the construction. The housing of the accelerometer uses a small section of metal made with Silver (or Silver alloys) to allow Oxygen diffusion through the metal, when it is exposed to high temperature.

Abstract: A piezoelectric acceleration sensor comprises a piezoelectric element, a metallic sheet and a circuit board. The piezoelectric element is polarized in a predetermined direction. The circuit board includes a circuit portion and a roughly flat shaped base portion. The base portion protrudes from an end portion of the circuit portion. One of surfaces of the metallic sheet is fixed to and supported by a surface of the base portion. The piezoelectric element is fixed to and supported by a remaining one of the surfaces of the metallic sheet in a manner that the piezoelectric element and the base portion do not overlap each other in the predetermined direction.

Abstract: Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.

Abstract: A piezoelectric vibration type yaw rate sensor including driving arms and detection arms. A detection sensitivity spectrum of the detection arms has a first peak with a first resonance frequency in a first detection vibration mode, in which the driving and detection arms vibrate in opposite phases, and a second peak with a second resonance frequency in a second detection vibration mode, in which the driving and detection arms vibrate in the same phase. A detection sensitivity at a frequency higher by ?f than one smaller resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency lower by ?f than the one resonance frequency. A detection sensitivity at a frequency lower by ?f than other larger resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency higher by ?f than the other resonance frequency.

Abstract: An audio electronic device includes a player, an output device, a detector, and an automatic turn-off module. The player is for reproducing audio data. The output device is for transforming the audio data to audible sound. The detector is for detecting positional shift of the output device. The automatic turn-off module is for turning off the player based on the positional shift. An automatic turn-off method is also disclosed.

Abstract: An accelerometer based on the measurement of Casimir force fluctuations is described. The accelerometer comprises a sealed housing containing a vacuum or a liquid, a piezoelectric plate fixed with the sealed housing, and a mass moveable within the sealed housing located in proximity to the piezoelectric plate. The moveable mass and the piezoelectric plate each have conductive surfaces which are located from each other at a distance which creates a Casimir Effect between the movable mass and the piezoelectric plate. Fluctuations in acceleration of the moveable mass cause fluctuations in the Casimir force on the piezoelectric plate. The acceleration fluctuations cause fluctuations in an electric output of the piezoelectric plate. The fluctuations in electric output are measured and used to calculate an acceleration and direction of movement of the accelerometer or a host device in which the accelerometer is carried.

Abstract: An acceleration sensor includes a piezoelectric layer formed on a substrate, and sensing electrodes formed in the piezoelectric layer. In the acceleration sensor, the piezoelectric layer interposing between the sensing electrodes is polarized in a film thickness direction of the piezoelectric layer.

Abstract: Systems and methods are provided for determining mechanical resonance of a sensor. In one embodiment, a system is provided that comprises a bias voltage source configured to apply a bias voltage impulse signal to a terminal of the sensor and a zero crossing detector configured to detect zero crossing cycles of a sensor output signal response to the bias voltage impulse signal. The system further comprises a controller configured to determine the resonance frequency of the sensor based on the detected zero crossing cycles of the sensor output signal response.

Abstract: A multi-axis accelerometer or a multi-axis angular rate sensor which can be made by an easy process and the size of which can be greatly reduced is provided. An inertia sensor has a substrate, a flat proofmass formed on the substrate and a stacked structure including at least a lower electrode, a piezoelectric film, and an upper electrode, an anchor unit formed in a cutout inside of the proofmass and fixed on the substrate, and a plurality of flat piezoelectric beams each having one end connected to the proofmass, the other end connected to the anchor unit, and a stacked structure formed in a cutout inside of the proofmass and including at least a lower electrode, a piezoelectric film, and an upper electrode, wherein the inertia sensor enables to detect an acceleration applied on the proofmass based on charges generated to the electrodes of the piezoelectric beams.

Abstract: A piezoelectric sensor having a plurality of electrodes deposited on a single surface of the dielectric medium is generally provided. The plurality of electrodes can define a plurality of square-shaped electrodes forming a grid on the first surface of the dielectric medium while the second electrode defines a continuous electrode. An electrode border surrounding the plurality of electrodes can be deposited on the first surface of the dielectric medium. Alternatively, the plurality of electrodes can define column-shaped electrodes, while the second electrode defines a plurality of row-shaped electrodes separated by etchings. The direction of orientation of each column-shaped electrode and the direction of orientation of each row-shaped electrode can be substantially perpendicular. A method of making a piezoelectric sensor is also provided.

Abstract: Systems and processes for accessing acceleration data may include an accelerometer coupled to a nonvolatile memory. The nonvolatile memory may be coupled to a processor. Acceleration data may be obtained from the accelerometer via a bus coupling the nonvolatile memory to the accelerometer. Acceleration data may be sent from the nonvolatile memory to a processor. One or more operations may be performed based on the acceleration data.

Abstract: An ultrasonic sensor, in particular for a vehicle, including a housing, includes the following: a transducer element which is attached to the bottom of the housing for generating ultrasonic oscillations; a first damping element situated in the housing for damping oscillations of the bottom; and a cover for sealing the housing, the cover being provided with a second damping element and having continuous tapering of the cover thickness in the region of the second damping element.

Abstract: The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.

Abstract: Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of Al2O3; a ferroelectric layer formed in a predetermined area on the ceramic substrate by screen printing, the ferroelectric layer being made of BaTiO3; a proof mass disposed so as to face the ferroelectric layer, the proof mass being formed at a predetermined distance d from the ferroelectric layer; and a first electrode and a second electrode that are formed on that side of the proof mass which faces the ferroelectric layer, so as to be fixed thereto. The first electrode and the second electrode are each formed in the shape of comb teeth, and comb tooth portions and thereof are arranged in an alternating manner.

Abstract: A MEMS or NEMS device for detecting a force following a given direction, comprising a support (4) and at least one seismic mass (2) capable of moving under the effect of the force to be measured in the direction of said force, and means (10) for detecting the movement of said seismic mass (2), said seismic mass being articulated relative to the support by at least one pivot link, and means capable of varying the distance between the axis (Z) of the pivot link and the center of gravity (G) of the exertion of the force on said seismic mass.

Abstract: The sensor device includes a dead-weight portion, a frame portion disposed so as to surround the dead-weight portion, a supporting portion provided at the frame portion via a first insulating layer, a mass portion provided at the dead-weight portion via a second insulating layer, a beam portion connecting the supporting and mass portions, a first concave portion, and a second concave portion, wherein a depth of the first or second concave portion is from 3.3% or more to 5.0% or less of the width of the frame portion.

Abstract: Subject matter disclosed herein may relate to energy harvesting piezoelectric modules as may be used, for example, in power supplies for tire pressure monitoring systems.

Abstract: The disclosure may relate to example embodiments of an electronic tongue sensor that may include an array of piezoelectric quartz crystal sensors with at least one coating specific for sensing a specific taste-producing molecule. In an example embodiment, a coating may include molecularly imprinted polymers of a specific taste-producing molecule.

Abstract: An acceleration sensor for measuring an acceleration comprises a housing including a measuring-plate, which has a first surface. The measuring plate has a second surface in parallel with and opposite to the first surface. A post is bonded via a post-bonding-face to the first surface. A temperature-compensating-element for compensating a temperature-effect caused by a temperature acting on the measuring-plate, is bonded via an element-bonding-face to the second surface of the measuring-plate. In addition, a sensor as described above is in a measuring device.

Abstract: An acceleration sensor includes a piezoelectric sensor and a support plate including a first support surface and a second support surface for supporting the piezoelectric sensor, wherein the support plate includes a first plate piece, a second plate piece, and a hinge portion connecting opposite side edges of the first plate piece and the second plate piece, wherein the piezoelectric sensor element has a longitudinal shape extending in a direction perpendicular to the sensing axis direction and is separated from the support surfaces in the longitudinal direction of the hinge portion so that the center of the sensor element in the lateral direction is located within the width of the hinge portion in the lateral direction.

Abstract: Methods and devices for a miniature, ultra-low power impact recorder for detecting, quantifying and recording the energy of an explosive blast or ballistic projectile impact. In one embodiment, the impact recorder can included a sensor comprised of an array of electromechanical resonators that is sensitive to the vibrations produced in selected, discrete frequency ranges that approximate the spectral signature characteristics of the shockwave resulting from the ballistic impact event, even after traveling through impacted material or body tissues.

Abstract: Disclosed herein is an inertial sensor, which includes a diaphragm having a piezoelectric element or a piezoresistive element formed on one surface thereof, a mass element integrated with the center of the other surface of the diaphragm in which the distal end of the mass element has a larger width than the width of the proximal end in contact with the diaphragm, and a supporter formed along the edge of the other surface of the diaphragm, so that the use of the mass element having the above shape results in decreased spring constant and increased distance from the center of the diaphragm to the center of the mass element, thereby simultaneously realizing a reduction in the size of the inertial sensor and an increase in performance thereof. A method of manufacturing the inertial sensor is also provided.

Abstract: An accelerator sensor includes a semiconductor substrate having a main front surface and a main rear surface, a first groove portion being formed along a front surface pattern, in the main front surface, a second groove portion being formed along a rear surface pattern, in the main rear surface, a through-hole being formed because of connection between at least parts of the first groove portion and the second groove portion and at least one groove width variation portion being formed in at least one of inner walls of the first groove portion. An offset of the rear surface pattern to the front surface pattern can be inspected easily by existence of the groove width variation portion.

Abstract: An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on the vibration section, the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency, and the detection circuit detects a change in the frequency of vibration of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the vibration section extends, and outputs a signal corresponding to the acceleration based on the change in the frequency.

Abstract: An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer and having a base section affixed to the vibration section forming layer and two beam sections extending from the base section, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on each of the beam sections; the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency; and the detection circuit detects a change in the frequency of vibrations of the piezoelectric vibration device which is caused by an acceleration applied in a direction i

Abstract: Disclosed is an acceleration sensor having a small variation in detection sensitivity, in which one end portion of an oscillation detecting element is fixed so that the free length thereof does not vary. Supporting resins 4a, 4b are formed in one end portion of the oscillation detecting element 3. With the oscillation detecting element being inserted into a through hole 2h of a holding member 2 provided in a case 1, the supporting resins 4a, 4b are in close contact with the inner periphery of the through hole 2h. As a result, the oscillation detecting element 3 is fixed to and held by the holding member 2.

Abstract: A portable medical device is provided with an internal accelerometer device. The medical device includes a circuit board, the accelerometer device, and a response module coupled to the accelerometer device. The accelerometer device is mechanically and electrically coupled to the circuit board, and it includes a plurality of mass-supporting arms for a plurality of electrically distinct sensor electrodes, piezoelectric material for the mass-supporting arm, and a proof mass supported by the mass-supporting arms. Each of the mass-supporting arms has one of the sensor electrodes located thereon. Acceleration of the proof mass causes deflection of the piezoelectric material, which generates respective sensor signals at one or more of the sensor electrodes. The response module is configured to initiate an acceleration-dependent operation of the portable medical device in response to generated sensor signals present at the sensor electrodes.