Abstract: A device for measuring mechanical changes includes at least one first resistor which is designed to convert a mechanical change into a change of its resistance value and at least one operational amplifier, wherein the at least first resistor and the operational amplifier are connected such that the at least first resistor serves as input resistance for the operational amplifier and the operational amplifier provides or can provide a measurement result at an output. The first resistor is for example a strain gauge that can be secured to a component.

Abstract: A surgical device for providing haptic feedback includes a housing having a cavity defined therein configured to receive a finger of a user and an elongated shaft configured to extend through the housing and into the cavity and configured to support a spring thereon and a pressure contact. A fluid-filled sensor is included that has a plurality of tubes configured to extend from the cavity, each tube includes a fluid-filled bladder at both ends thereof joined by a fluid channel therebetween. Each tube is configured to contain a fluid therein such that when a user's finger is engaged between the fluid-filled bladder at the proximal end of the tubes and the pressure contact, changes in pressure in the fluid-filled bladders at a distal end of the tubes is correspondingly registered in the fluid-filled bladders at the proximal end of the tubes providing haptic feedback to the user.

Abstract: A polymeric fluid sensor includes an inlet configured to receive fluid and an outlet. A polymeric tube is fluidically interposed between the inlet and the outlet and has a first sensing location with a first sidewall thickness and a second sensing location, spaced from the first sensing location, with a second sidewall thickness. A sleeve is disposed about the polymeric tube. The first sidewall thickness is less than the second sidewall thickness and a first sensing element is disposed at the first location and a second sensing element is disposed at the second location. In another example, the first and second sidewall thicknesses are the same and a fluid restriction is disposed within the polymeric tube between the first and second sensing locations.

Abstract: A strain gauge includes a flexible substrate and a functional layer formed of a metal, an alloy, or a metal compound, directly on one surface of the substrate. The strain gauge includes a resistor formed of a film including Cr, CrN, and Cr2N, on one surface of the functional layer. The substrate has an expansion coefficient in a range of from 7 ppm/K to 20 ppm/K.

Abstract: The invention relates to a pressure sensor (10) comprising a cavity (12) containing a liquid, said cavity (12) being closed at a first end by a first diaphragm (20a) and at a second end by a second diaphragm (20b), and a measuring body (30) which comprises a strain gauge (31) positioned inside said cavity (12), characterized in that the measuring body (30) is mechanically connected only to one diaphragm among the first diaphragm (20a) and the second diaphragm (20b) by a connection member (50), the measuring body (30) comprising a shape having central symmetry and the connection member (50) being fastened to the center of symmetry of said measuring body (30).

Abstract: A system and method is configured for use with an endoscope, a biopsy needle, and a data acquisition system. The system includes a sensor tip and a pressure sensor coupled to the sensor tip and having at least one piezo-resistor component with an internal-facing side and an external-facing side, and an opening adjacent to the at least one piezo-resistor component to allow fluid access to the internal-facing side and the external-facing side. The system also includes a tubing member with a distal end and a proximal end, the sensor tip coupled to the distal end, the sensor tip and the tubing member configured to be routed through the biopsy needle and connection elements coupled to the proximal end of the tubing member, the connection elements configured to mount the tubing member relative to the biopsy needle and to couple the pressure sensor to the data acquisition system.

Abstract: A pressure sensor includes a sensor element, an inner frame configured to receive at least a portion of the sensor element, and a housing configured to receive the inner frame therein. The inner frame is formed of a metal material and includes a printed circuit board assembly to be electrically connected to the sensor element. The housing is formed of a resin material.

Abstract: To obtain a physical-quantity detection device that reduces a variation in mounting position in a main passage. A physical-quantity detection device 20 of the present invention is inserted into and disposed in a main passage 22, and includes a flange 211 fixed to a seat surface 103 of the main passage 22, and the flange 211 includes a press-fitting portion 281 for positioning with respect to a seat surface 103 side.

Abstract: A transmission control apparatus, particularly for a motor vehicle, includes a circuit board element, a signal input element, a base, and a first fixing layer. The base includes a hollow space for receiving at least a part of the signal input element and is fastened on a first surface of the circuit board element. The signal input element is at least partially fastened in the hollow space and is electrically connected to the circuit board element via the base. The circuit board element includes a cut-out for inserting the signal input element into the hollow space through the circuit board element. The first fixing layer is configured for sealing the area between the base and the circuit board element and is arranged on the first surface of the circuit board element and on a part of the base.

Abstract: Provided is a load sensor that can precisely detect a load of pressing force to an object.

Abstract: A pressure sensing system includes a pressure transducer, a pressure manifold, and a heater assembly. The pressure transducer is configured to measure pressures at one or more locations of a vehicle engine. The pressure manifold is configured to cover a face of the pressure transducer and provide an interface for transferring air or gas generated at the one or more locations of the vehicle engine. The heater assembly is configured to heat one or more portions of the pressure transducer and one or more portions of the pressure manifold and maintain a temperature of each of the pressure transducer and the pressure manifold above a predetermined temperature level.

Abstract: Technologies are generally described that relate to managing and/or generating sensor data. An example method may include receiving output data generated by a pressure sensor. The method may also include determining surface data, indicative of a surface type associated with a force applied to a surface of the pressure sensor, based on the output data. Furthermore, the method may include adjusting the output data based on the surface data to facilitate generating adjusted output data indicative of an adjusted pressure value generated by the pressure sensor.

Abstract: A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.

Abstract: A sensor device is constructed to maintain a high glass strength to avoid the glass failure at low burst pressure, resulting from the sawing defects located in the critical high stress area of the glass pedestal as one of the materials used for construction of the sensor. This is achieved by forming polished recess structures in the critical high stress areas of the sawing street area. The sensor device is also constructed to have a robust bonding with the die attach material by creating a plurality of micro-posts on the mounting surface of the glass pedestal.

Abstract: A mechanical device is provided for amplifying relative displacement between first and second mechanical structures operatively connected to opposite sides of a bearing. The relative displacement is caused by a thrust load on the bearing. The device includes a first bracket portion attachable to the first mechanical structure. The device further includes a compliant mechanism which extends from the first bracket portion to make contact with the second mechanical structure. The compliant mechanism is configured such that a measurement end of the mechanism moves in response to relative displacement between the first and second mechanical structures. The compliant mechanism is further configured such that the movement of the measurement end amplifies the relative displacement. The device further includes a sensor which measures the mechanically amplified movement of the measurement end.

Abstract: There is provided a pressure detection device (10) including: a pressure detection element (21) which receives pressure (P) so as to output a detection signal (Qi) corresponding to the pressure (P); and a processing circuit (30) which processes and outputs the detection signal (Qi) output from the pressure detection element (21), where on a circuit board (40) on which a conductor pattern is formed, an integrated circuit (IC1) including an analog circuit which uses a reference voltage (Vr) set to a predetermined voltage value as an operation reference and converts the detection signal (Qi) into a voltage waveform is mounted, and the processing circuit (30) includes an input circuit 50 which feeds the detection signal (Qi) to the integrated circuit (IC1) and a shield pattern (SHP1) which surrounds the region of at least a part of the input circuit (50) and to which the reference voltage (Vr) is applied.

Abstract: Pressure sensors and their methods of manufacturing, where the pressure sensors have a small, thin form factor and may include features designed to improve manufacturability and where the method of manufacturing may improve yield and reduce overall costs.

Abstract: Techniques for providing a tamper mechanism for semiconductor devices are disclosed herein. The techniques include, for example, providing at least one die and at least one strain gauge, orienting the at least one strain gauge to the die, forming an encapsulated semiconductor device by encapsulating the die and each strain gauge within a mold compound to maintain respective orientation, and measuring an initial strain value for the at least one strain gauge after forming the encapsulated semiconductor device.

Abstract: A pressure sensor includes a diaphragm, a coupling portion coupled to the diaphragm, and two pressure receiving elements. Each pressure receiving element outputs an output signal that changes according to the temperature and the pressure applied to a pressure receiving surface and has an output characteristic that represents the relationship of the output signal to the pressure and the temperature. The two pressure receiving elements have the same output characteristics. The pressure receiving surface of one of the two pressure receiving elements is connected to the diaphragm through the coupling portion, and the pressure receiving surface of the other pressure receiving element is disconnected from the diaphragm. The pressure sensor outputs a signal that is in accordance with the difference between voltages of the two pressure receiving elements.

Abstract: A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element; resistor element electrodes, which are overlapped and connected with mutually opposed parts of the resistor element; and a linear conductor connected with the resistor element electrodes. The resistor element electrodes each include: a linear portion having a linear inner side facing an inner side of paired one of the resistor element electrodes; and peripheral portions defined at both ends of the linear portion, at least one of the peripheral portions being connected with the linear conductor. All of the linear portions are arranged so that inner sides are arranged mutually in parallel. The resistor element is connected with the linear portion. The peripheral portions are exposed without being connected with the resistor element.

Abstract: A sensor device is constructed to maintain a high glass strength to avoid the glass failure at low burst pressure, resulting from the sawing defects located in the critical high stress area of the glass pedestal as one of the materials used for construction of the sensor. This is achieved by forming polished recess structures in the critical high stress areas of the sawing street area. The sensor device is also constructed to have a robust bonding with the die attach material by creating a plurality of micro-posts on the mounting surface of the glass pedestal.

Abstract: A low-cost, compact, high-precision axial force sensor is provided. The axial force sensor includes a pair of parallel pressing plates and a strain gauge sandwiched therebetween. The strain gauge includes a plurality of strain-sensitive resistive elements around its periphery, and is provided with a spacer that transmits a pressing force from the pressing plates to some of the strain-sensitive elements but blocks the pressing force to the rest of the strain-sensitive elements. The output signal of the strain-sensitive elements blocked from the pressing force provide an accurate baseline to compare the output signal of the strain-elements subjected to the pressing force. The spacer has a uniform pattern of open and closed portions. On the strain gauge, the strain-sensitive elements are provided at both the open and closed portions of the spacer.

Abstract: A pressure transducer for a hammer union installation includes a lower body capable of withstanding the stresses of the hammer union installation. The lower body includes a cylindrical wall, a diaphragm, and a pressure port for exposing the diaphragm to pressure. The pressure transducer also includes one or more transducer elements mounted on the diaphragm that are operable to provide a signal related to pressure. A cap is received by the cylindrical wall and is slidable along the wall. The cap includes comprising an antenna for transmitting the signal. A spring is arranged in the lower body for dampening forces applied to the cap.

Abstract: According to one embodiment, a pressure sensor includes a support, a film unit supported by the support, having an upper surface, and capable of being deformed, and a first sensing element provided on the upper surface. The first sensing element includes a first magnetic layer, a second magnetic layer provided apart from the first magnetic layer and a first intermediate unit including a first intermediate layer including a portion provided between the first and second magnetic layers. The first magnetic layer extends in a first direction parallel to the upper surface, and a first major axis length of the first magnetic layer is longer than a first minor axis length. The second magnetic layer extends in a second direction parallel to the upper surface and crossing the first direction, and a second major axis length of the second magnetic layer is longer than a second minor axis length.

Abstract: A pressure sensor measuring element for a pressure sensor operates to detect pressure in a combustion space of an internal combustion engine. The pressure sensor measuring element includes a separating diaphragm, a plunger for the transmission of deflections of the separating diaphragm to a force measuring element, and with a sleeve which receives the plunger. The sleeve is closed by the separating diaphragm at a first end intended to face the combustion space and is designed to hold the force measuring element at the opposite second end. Accordingly, the pressure sensor measuring element can be produced more cost-effectively. Furthermore, the plunger can be produced in one piece with the separating diaphragm as a diaphragm/plunger unit, and the sleeve and the diaphragm/plunger unit can be formed from the same metal material.

Abstract: A pressure transducer using a ceramic diaphragm which is not easily damaged so that there is no risk of leakage of a target medium to be measured, having a superior mass-production capability and a reduced volume and enabling low-price by simplifying a flexible cable and a printed circuit board (PCB) to connect the transducer and a signal processing chip. The pressure transducer includes the ceramic diaphragm formed as a rectangular planar ceramic diaphragm and having a surface having formed thereon a pattern made of an electrically conductive material and strain gages; a base plate configured to face the surface of the ceramic diaphragm having formed thereon the pattern; and an adhesive layer configured to be formed along edges of a contacting surface of the ceramic diaphragm and the base plate so as to bond the ceramic diaphragm and the base plate and form a space for the strain gages.

Abstract: A fluidic chip device configured for processing a fluid, wherein the fluidic chip device comprises a plurality of layers laminated to one another, wherein at least a part of the layers comprises a patterned section of an alternating sequence of bars and fluidic channels for conducting the fluid under pressure, the patterned section being configured for being displaceable in response to the pressure, and a pressure detector responding to the displacement of the patterned section by generating a detector signal being indicative of a value of the pressure.

Abstract: A pressure gauge mounted to a pump or a back pressure regulator in an HPLC, SFC, or SFE system provides improved solvent exchange and improved measurement precision. A through hole having an inside diameter of 1.0 mm is made in a hexagonal member similar in shape to a pipe joint. A part of the hexagonal member is cut away to form a flat surface such that the distance to the outside periphery of the through hole is 0.5 mm to serve as a strain-measurement strain gauge attaching surface. One strain gauge is attached to the center of the strain-measurement strain gauge attaching surface, and two strain gauges are attached for temperature correction, one on the same surface as the strain-measurement strain gauge attaching surface and the other on an outside surface of the hexagonal member.

Abstract: A pressure sensor 100 may comprise a nylon socket 200, an upper PCB 320, a lower PCB 340, and a hex housing 400. The nylon socket 200 may include co-molded electrical pin conductors 230a, 230b, 230c extending axially from electrical connectors 240a, 240b, 240c defined within a top end of the nylon socket 200 to a bottom end of the nylon socket 200. The upper PCB 320 may have contacts configured to contact the electrical pin conductors 230a, 230b, 230c. The lower PCB 340 may be electrically coupled to the upper PCB 320 and to strain gauges 355 coupled to a diaphragm 360. The hex housing 440 may have an interior axial port 430 extending from a bottom of said hex housing 400 to a counterbore 440 for holding the diaphragm 360, thereby exposing a first side of said diaphragm 360 to the fluid within the axial port 430.

Abstract: A pressure transducer using a ceramic diaphragm which is not easily damaged so that there is no risk of leakage of a target medium to be measured, having a superior mass-production capability and a reduced volume and enabling low-price by simplifying a flexible cable and a printed circuit board (PCB) to connect the transducer and a signal processing chip. The pressure transducer includes the ceramic diaphragm formed as a rectangular planar ceramic diaphragm and having a surface having formed thereon a pattern made of an electrically conductive material and strain gages; a base plate configured to face the surface of the ceramic diaphragm having formed thereon the pattern; and an adhesive layer configured to be formed along edges of a contacting surface of the ceramic diaphragm and the base plate so as to bond the ceramic diaphragm and the base plate and form a space for the strain gages.

Abstract: A vertical pressure sensor having a fluid deforming pressure application unit, a sensor housing, a socket, a circuit board, a plurality of electrode terminals, and a plurality of electrical signal transmitting electrode rods. The pressure application unit includes a diaphragm to which strain gauges are attached. The socket surrounds a circumference of the diaphragm of the pressure application unit and includes a receiving passageway. The plurality of electrode terminals are provided at the upper end of the socket in a Wheatstone bridge circuit pattern. The plurality of electrode terminals protrude from the upper end of the socket to constitute an electrode tip. The circuit board connects to the plurality of electrode terminals to convert a pressure value into an electrical signal, and the plurality of electrode rods are connected to the circuit board to transmit the electrical signal outside.

Abstract: A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

Abstract: According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.

Abstract: A pressure sensor micromachined by using microelectronics technologies includes a cavity hermetically sealed on one side by a silicon substrate and on the other side by a diaphragm that is configured to be formed under the effect of the pressure outside the cavity. The sensor includes at least one resistance strain gage fastened to the diaphragm and has resistance that varies as a function of the deformation of the diaphragm. The diaphragm is fastened to the resistance strain gages. The gages are located inside the sealed cavity. The diaphragm has an insulting layer deposited on a sacrificial layer and may cover integrated measurement circuits in the silicon substrate.

Abstract: An external pressure measuring device having a base and a tubing system bent with various radii. Pressure inside the bent tubing causes the tubing to move in such a way that can be measured and can provide an indication of internal pressure.

Abstract: A pressure sensor of the present invention includes a substrate inside which a reference pressure chamber is formed, a closing body filled in a through-hole formed in the substrate such that the closing body penetrates through a portion between the surface of the substrate and the reference pressure chamber, and hermetically closes the reference pressure chamber, and a strain gauge provided inside the substrate between the surface of the substrate and the reference pressure chamber, and the electric resistance thereof being capable of changing by strain deformation of the substrate.

Abstract: A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.

Abstract: A high pressure tank that has particular application for storing hydrogen gas on a vehicle for a fuel cell system. The tank includes a gas tight inner liner layer and a fiber bundle outer composite structural layer. A first strain gauge is provided in the outer layer and a second strain gauge is provided in the inner liner layer both proximate a transition between the layers. The strain gauges are calibrated relative to each other to identify the pressure where the inner liner layer begins to shrink and separate from the outer composite layer.

Abstract: A multipurpose transducer for an appliance using water, like a washing machine, a dishwasher or a hot-water tank converts physical parameters like water temperature, cleanness and pressure in said appliance into electric signals. It is provided with a temperature transducer (TT), a turbidity transducer (TurbT) and a pressure transducer (PT), all of them being fixed on an electrically insulating mounting support (MS). The pressure transducer (PT) is made as an uncompensated strain gauge in a thick film technology. The temperature transducer (TT) made as a termistor is also manufactured in the thick film technology. The multipurpose transducer (MPT) of the invention requires less work steps to be manufactured, mounted and connected in the appliance of said type than earlier transducers.

Abstract: A gauge includes a housing and a fitting having an inlet, an internal flow path, and an outlet. A sensor is in fluidic communication with the internal flow path and measures a characteristic of a fluid in the flow path. A control unit is in electrical communication with the pressure sensor, receives an output from the pressure sensor and generates a command based on the output received. A stepper motor has a rotor shaft with an indicator needle operatively connected thereto, and is in electrical communication with the control unit. A power supply is in electrical communication with the pressure sensor, the motor and the control unit for supplying power thereto. The control unit transmits the command to the stepper motor, which receives the command from the control unit and drives the rotor shaft according to the command, displaying the sensed characteristic via the needle.

Abstract: A high temperature thin film strain gage sensor capable of functioning at temperatures above 1400° C. The sensor contains a substrate, a nanocomposite film comprised of an indium tin oxide alloy, zinc oxide doped with alumina or other oxide semiconductor and a refractory metal selected from the group consisting of Pt, Pd, Rh, Ni, W, Ir, NiCrAlY and NiCoCrAlY deposited onto the substrate to form an active strain element. The strain element being responsive to an applied force.

Abstract: An implantable intraocular pressure sensor system has a sealed geometric shape with an internal pressure at a first value. A strain gauge wire is embedded in a surface of the sealed geometric shape. When the surface is deflected by intraocular pressure, a measured resistance of the strain gauge wire indicates the intraocular pressure. The system also has a processor coupled to a power source and memory. The processor is configured to read the measured resistance and write values corresponding to intraocular pressure to the memory.

Abstract: A pressure gauge mounted to a pump or a back pressure regulator in an HPLC, SFC, or SFE system provides improved solvent exchange and improved measurement precision. A through hole having an inside diameter of 1.0 mm is made in a hexagonal member similar in shape to a pipe joint. A part of the hexagonal member is cut away to form a flat surface such that the distance to the outside periphery of the through hole is 0.5 mm to serve as a strain-measurement strain gauge attaching surface. One strain gauge is attached to the center of the strain-measurement strain gauge attaching surface, and two strain gauges are attached for temperature correction, one on the same surface as the strain-measurement strain gauge attaching surface and the other on an outside surface of the hexagonal member.

Abstract: A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second reference element in the second branch. The semiconductor device includes a circuit configured to switch the first sensor element to the second branch and the second sensor element to the first branch.

Abstract: There is provided a method for producing a force sensor including: a force sensor chip; and an attenuator, in which the force sensor chip and the attenuator are joined at joint portions with a glass layer sandwiched therebetween. The method includes: a film forming step in which a glass film as the glass layer is formed on regions of the attenuator containing the joint portions or on regions of the force sensor chip containing the joint portions; and an anodic bonding step in which the force sensor chip and the attenuator are stacked as a stacked body in close contact with each other at the joint portions, and the glass film and the force sensor chip, or the glass film and the attenuator, are joined.

Abstract: A device (20) comprising a pressure measurement surface (28) functionally attached to a proof body (22) and a rigid component (30), functionally attached to the proof body (22), the measurement surface (28) forming a surface of the rigid component (30). In addition, the device comprises a support (38), functionally separated from the proof body (22), of generally annular shape, housing the rigid component (30) and a flexible mass (40) radially inserted between the support (38) and the rigid component (30) such that the contour of the measurement surface (28) is bounded by the flexible mass (40), this flexible mass (40) adhering to the support (38) and to the rigid component (30).

Abstract: A high-temperature pressure sensor element for power units includes a substrate, in which an interior space is developed, a deformable membrane, which separates the interior space from the exterior space in order to deform when the exterior pressure changes, and a strain measuring element, which is arranged on the membrane, for measuring the deformation of the membrane. The substrate, the membrane, and the strain measuring element are manufactured from the same high-temperature-stable material, such as an alloy. By way of example a nickel base alloy may be used. A component for a power unit, such as a turbine blade for an airplane or rocket engine, includes an integrated high-temperature pressure sensor element of this type.

Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. The combined pressure and temperature sensor includes a sensor element in which at least one channel is developed for accommodating a temperature sensor and at least one channel is developed for recording a pressure. The at least one channel, for recording a pressure, opens out under a pressure sensor. The at least one channel for the temperature sensor runs centrically in the sensor element.

Abstract: A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second reference element in the second branch. The semiconductor device includes a circuit configured to switch the first sensor element to the second branch and the second sensor element to the first branch.

Abstract: There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge.