Abstract: A microprobe, measurement system and method are disclosed. The microprobe includes a probe tip mounted at a meeting point of a plurality of flexures. The probe tip is moveable upon flexing of one or more of the flexures, each flexure further comprising one or more actuators controllable to flex the flexure and one or more sensors arranged to sense flexing of the flexure.

Abstract: A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.

Abstract: Disclosed is an electrical-mechanical complex sensor for nanomaterials, including: a detector having a piezoelectric film therein, for measuring a mechanical property of a nanomaterial when a bending or tensile load is applied to the nanomaterial; a first detection film formed at an end of the detector to measure the mechanical property and an electrical property of the nanomaterial) in real time at the same time, when the nanomaterial contacts the first detection film; and a support to which one end of the detector is integrally connected, for supporting the detector.

Abstract: A scanner for a scanning probe microscope (SPM) including a head has a scanner body that houses an actuator, and a sensor that detects scanner movement. The scanner body is removable from the head by hand and without the use of tools and has a total volume of less than about five (5) square inches. Provisions are made for insuring that movement of a probe device coupled to the scanner is restricted to be substantially only in the intended direction. A fundamental resonance frequency for the scanner can be greater than 10 kHz.

Abstract: Provided are atomic force microscope probes, methods for making probes for use in atomic force microscopes and systems using such probes. The probes include at least a body portion and a cantilever portion. The cantilever portion may include a first surface and a second surface opposite the first surface. The cantilever portion further includes a first material arranged on the first surface, such that the cantilever portion twists about a center axis of the cantilever portion when the cantilever portion is heated. The first material may be arranged symmetrically or non-symmetrically on a portion of the first surface, or it may be arranged non-uniformly over the first surface. The cantilever portion of the probe may also include a second material arranged on the second surface of the cantilever portion. The first and second materials have a different thermal expansion than the material forming the cantilever portion.

Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

Abstract: A sensor for scanning a surface with an oscillating cantilever (12), made from piezoelectric material that is suitable for a transverse oscillation of the free end of a beam, holding an electrically conductive probe tip (14) on the free end of the beam in transverse direction, a first deflection electrode (26A, 26B) and an inversely phased second electrode (28A, 28B, 28C) being provided to collect charges that are separated within the space of the deflection electrodes (34, 36). The cantilever (12) is provided with at least one electrode (30) in addition to the deflection electrodes (26A, 26B, 28A, 28B, 28C) that provides electrical contact to the tip (14), the at least one additional electrode being located in a region on the deflecting beam where the surface charge density due to the strain caused by beam deflection (34, 36) is smaller than in the region where the deflection electrodes are located.

Abstract: A device for differentiating a target cell includes a cantilever including a fixed end and a free end, where the cantilever is elastically deformable, a tip disposed on the free end of the cantilever, where the tip contacts a surface of a cell, a measurement unit connected to the fixed end of the cantilever, where the measurement unit measures a degree of a repulsive force based on an elastic deformation of the cantilever, and a conversion unit which converts the repulsive force measured by the measurement unit into a modulus of elasticity derived from the surface of the cell.

Abstract: The present invention provides a fast-operating and stable scanning probe microscope configured to detect the interaction between a probe and a sample to avoid generation of a harmonic component. An oscillation circuit (31) generates an excitation phase signal indicative of the phase of an excitation signal. An excitation signal generation circuit (33) generates an excitation signal from the excitation phase signal. A complex signal generation circuit (35) generates a complex signal from a displacement signal. A vector calculation circuit (37) calculates the argument of the complex signal. A subtracting phase comparator (39) compares the argument with the phase of the excitation phase signal by subtraction. The amount of the interaction between a probe device and a sample is obtained using the subtracting phase comparator (39). The result of the comparison carried out by the subtracting phase comparator (39) may be output as a difference in phase between the displacement signal and the excitation signal.

Abstract: The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.

Abstract: An atomic force microscope (AFM) apparatus for determining a topography of a sample surface is disclosed. The AFM apparatus comprises: a controller having a controller frequency response and being configured to provide a controller output signal. The controller comprises an integrator that provides an integrator output signal, and a filter block. The AFM apparatus also comprises a physical system having a physical system response and being configured to receive the controller output signal and to provide a probe height in response to the controller output signal. The physical system comprises an actuator configured to maintain a deflection of a probe tip relative to the sample surface. The deflection being is indicated by a deflection signal, and the filter block of the controller provides an inverse of the physical system response, such that the probe height is substantially equal to the integrator output signal.

Abstract: An atomic force microscope (AFM) (1) is one type of SPM, and detects a resonance frequency shift as an amount of interaction between a probe and a sample. The AFM (1) performs distance modulation control while performing feedback control of a probe-sample distance so as to keep the amount of interaction constant. The distance modulation control varies the probe-sample distance at a distance modulation frequency higher than a response speed of the feedback control. The AFM (1) further acquires the interaction amounts detected during the variation of the probe-sample distance by the distance modulation control while performing relative scanning between the probe and the sample, and detects a distribution of the interaction amounts in a three-dimensional space having a dimension within a scanning range and a thickness within a variation range of the probe-sample distance.

Abstract: A method, and corresponding apparatus, of imaging sub-surface features at a plurality of locations on a sample includes coupling an ultrasonic wave into a sample at a first lateral position. The method then measures the amplitude and phase of ultrasonic energy near the sample with a tip of an atomic force microscope. Next, the method couples an ultrasonic wave into a sample at a second lateral position and the measuring step is repeated for the second lateral position. Overall, the present system and methods achieve high resolution sub-surface mapping of a wide range of samples, including silicon wafers. It is notable that when imaging wafers, backside contamination is minimized.

Abstract: The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.

Abstract: An electronic control device for a local probe with a piezoelectric resonator and preamplification and processing of its signals, the probe being configured for local measurement of physical properties of a sample in an environment with a particle beam directed towards the probe, in which an excitation voltage generated by an excitation mechanism is applied to the piezoelectric resonator through a first galvanic isolation transformer, and a current for measurement of mechanical oscillations of the piezoelectric resonator is applied through a second galvanic isolation transformer to a preamplification device on the output side.

Abstract: A portion of light emitted from a laser source (11) for detecting a displacement of a cantilever (4) is extracted by a half mirror (20) and guided onto a photodetector (21) having a light-receiving surface divided into four sections. When the direction of the emitted light is inclined due to a change in the ambient temperature or other factors, the light spot formed on the light-receiving surface of the photodetector (21) moves. Accordingly, the amount and direction of the inclination of the emission direction can be recognized from the amount and direction of the movement of the light spot. A drive amount calculator (22) calculates a drive amount according to the amount and direction of the inclination, and operates an actuator (23) to rotate the laser source (11) around each of the Y and Z axes. This operation compensates for the inclination of the direction of the emitted light and thereby prevents the inclination from being falsely recognized as an irregularity on the sample surface.

Abstract: An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.

Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).

Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: The piezo-electric actuator (1) to oscillate the probe of a scanning probe microscope is arranged in the feedback branch (3) of an analog amplifier (4). A current source (10) is provided for feeding a defined alternating current to the input of the amplifier (4). The amplifier (4) strives to adjust the voltage over the actuator (1) such that the current from the current source (10) flows through the actuator (1). As the current through the actuator (1) is proportional to its deflection, this design allows to run the actuator at constant amplitude without the need of complex feedback loops.

Abstract: A method for making a specimen assembly for atom probe analysis in an energetic-beam instrument includes milling a post near a region of interest in a sample in the energetic-beam instrument, so that the post has a free end. The probe tip of a nano-manipulator probe shaft is attached to the free end of the post and the post is cut free from the sample to form a rough specimen, so that the region of interest in the rough specimen is exposed at approximately the location where the post is cut from the sample. A specimen assembly form is provided having an open area inside its perimeter. The probe shaft bearing the specimen is joined to the specimen assembly form, so that the region of interest in the rough specimen is located in the open area. Thereafter, the probe shaft can be cut off outside the perimeter of the specimen assembly form, and the specimen conveniently held and sharpened for atom probe analysis. Specimen assembly forms made by the method are also disclosed.

Abstract: Proposed is a procedure for carrying out a scanning probe microscopic or atomic force spectroscopic measurement within predetermined parameters, which said procedure encompasses the following steps: a determination of a value variance of at least one of the parameters, and control of an adjustment member in relation to said variance, so that the variance is at least partially compensated for.

Abstract: A microscope, in particular a scanning probe microscope, comprising a programmable logic device.

Abstract: A method of measuring vibration characteristics of a cantilever includes: generating a forward and backward high speed frequency sweep signal in a frequency range including a resonance frequency of the cantilever by an excitation signal generator; vibrating the cantilever; measuring frequencies at the largest amplitude in a forward path and in a backward path; and detecting an intermediate value between the measured frequencies as the resonance frequency of the cantilever. The method may further include checking whether or not there is a secondary resonance frequency that is 6.3 times the primary resonance frequency when the primary resonance frequency is detected, so as to prevent a detection error of the resonance frequency.

Abstract: A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval ?t0, so that the electrode finally receives a voltage pulse of duration ?t0.

Abstract: Provided are a displacement detection mechanism for a cantilever which does not use an optical cantilever method or self-detection type displacement detection, and a scanning probe microscope using the same. A cantilever displacement detector constituted of an LC resonator and an F-V converter detects a change of capacitance between a cantilever and a sample surface so that a displacement of the cantilever can be detected. Thus, shape measurement and physical property measurement can be performed in a state in which light is blocked. Further, a change of a sample shape and physical property information can be measured between presence and absence of the light.

Abstract: Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.

Abstract: Devices for performing nanofabrication are provided which provide small volume reaction space and high reaction versatility. A device may include a reaction chamber adapted for nanoscale modification of a substrate and vacuum conditions; a scanning probe tip assembly enclosed within the reaction chamber; a first port coupled to the reaction chamber for delivering a gas; a second port coupled to the reaction chamber for applying a vacuum; and a substrate assembly insertedly mounted to the reaction chamber. The reaction chamber may include a body having one or more flexible walls and one or more supports to prevent the reaction chamber from collapsing under a vacuum. The device may further include an electrical conduit for coupling the tips of the scanning probe tip assembly to electrical components outside the reaction chamber. Also provided are apparatuses incorporating the devices and methods of using the devices and apparatuses.

Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.

Abstract: A microcantilever system comprising a paddle, its use and a method of simultaneously acquiring the topography and measuring the tip-sample interactions of a sample with it.

Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.

Abstract: An atomic force microscopy system includes an imaging probe having a first thermal displacement constant and a sample placement surface. At least a portion of the sample placement surface has a second thermal displacement constant. The sample placement surface is spaced apart from the imaging probe at a predetermined displacement. The sample placement surface is configured so that the second thermal displacement constant matches the first thermal displacement constant so that when the imaging probe and the sample placement surface are subject to a predetermined temperature, both the portion of the sample placement surface and the imaging prove are displaced by a same distance.

Abstract: Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Abstract: A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.

Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.

Abstract: A method and a device permit scanned probe microscopes with a non-optical feedback mechanism (1.2), such as a tuning fork, to be used in air or in liquid. The embodiments of the invention require geometric construction of the scanning device that can incorporate the non-optical feedback mechanism in a way that does not obstruct geometrically essentially any lens (1.3) from above or below and permits free access to the probe that is interacting with the sample. In one such embodiment, a scanner (1.1) in x, y and z can move the probe with a structure in which either the non-optical feedback mechanism is in the liquid or in the air and can use either a cantilevered or straight probe. The system can also be constructed with multiple independent scanned probe microscopy probes that can work in liquid and/or in air.

Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface.

Abstract: An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

Abstract: At least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein, are stacked such that those layers intersect each other and that the edges of the conductor layers face with a gap, and the stacked structure is cut along a dividing plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersection angle of the layers to produce a probe. A magnetic head is produced using magnetic layers as conductor layers.

Abstract: To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope 30 comprises a cantilever support part 2 for supporting a cantilever 1; displacement measurement parts 3, 4, 5 and 6 for measuring the displacement of the cantilever 1; a specimen container 11 comprising sidewalls 19 and bottom surface 18 and containing a fluid 10 and a specimen S; a carrying stage 40 on which the specimen container 11 is placed; and a scanning means 7 for moving and scanning the carrying stage 40. While the cantilever 1 is immersed in the fluid 10 that is contained in the specimen container 11, the carrying stage 40 is moved, and the displacement of the cantilever 1 is measured. The scanning probe microscope 30 further comprises a ring-shaped protective mat 50 that is capable of absorbing the fluid 10. A mounting mechanism 43 is formed on the outer peripheral surface of the carrying stage 40 for removably attaching the protective mat 50 by its inner peripheral area.

Abstract: A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.

Abstract: This invention addresses a contact mode hybrid scanning system (HSS), which can be used for measuring topography. The system consists of a cantilever or a cantilever array, a scanning stage, a light source, and instrumentation to synchronize and control the individual components. Detection of the cantilever's movement is achieved by directly measuring the change in disposition of the cantilever including its height, rotation at one or more points on the cantilever thereby providing a partial three-dimensional reconstruction without the need for actuating the cantilever. This is achieved by employing a displacement meter such as a triangulation meter or a confocal meter.

Abstract: A dynamic mode AFM apparatus for allowing high-speed identification of atoms of a sample surface, which comprises a scanner for performing three-dimensional scanning; an AC signal of a resonance frequency in a mode with flexural vibration of a cantilever; an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a probe-sample distance modulated with the second frequency; a detector for detecting fluctuation of the resonance frequency; a detector for detecting vibration of the cantilever; and a detector for detecting a fluctuation component which is contained in a detected signal by detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe-sample distance, wherein an inclination of the resonance frequency against the probe-sample distance is obtained from the strength and polarity of the fluctuation component.

Abstract: An Improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe.

Abstract: A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately.

Abstract: A method and an apparatus for detecting a normal force component and a friction force component between a probe and a sample substance using an interfacial force microscope is disclosed herein. According to one embodiment, a method of measuring normal and friction forces with an interfacial force microscope includes positioning a sample substance on a piezotube and in proximity to a probe suspended from a cantilever such that a molecular force between the sample substance and the probe causes the cantilever to deflect. The method may include converting the deflection of the cantilever into an electrical signal comprising a normal force and a friction force component, and measuring the normal and friction force components.

Abstract: A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.

Abstract: To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope 30 comprises a cantilever support part 2 for supporting a cantilever 1; displacement measurement parts 3, 4, 5 and 6 for measuring the displacement of the cantilever 1; a specimen container 11 comprising sidewalls 19 and bottom surface 18 and containing a fluid 10 and a specimen S; a carrying stage 40 on which the specimen container 11 is placed; and a scanning means 7 for moving and scanning the carrying stage 40. While the cantilever 1 is immersed in the fluid 10 that is contained in the specimen container 11, the carrying stage 40 is moved, and the displacement of the cantilever 1 is measured. The scanning probe microscope 30 further comprises a ring-shaped protective mat 50 that is capable of absorbing the fluid 10. A mounting mechanism 43 is formed on the outer peripheral surface of the carrying stage 40 for removably attaching the protective mat 50 by its inner peripheral area.

Abstract: A scanning probe microscope and method for operating the same to correct for errors introduced by a repetitive scanning motion are disclosed. The microscope includes an actuator that moves the probe tip relative to the sample in three directions. The actuator executes a repetitive motion, characterized by a repetitive motion frequency, in one of the directions, and changes a distance between the sample and the probe tip in a second one of the directions. A probe position signal generator generates a probe position signal indicative of a position of the probe tip relative to the cantilever arm. A probe signal correction generator generates a corrected probe position signal by correcting the probe position signal for errors introduced by the repetitive motion. A controller maintains the probe tip in a fixed relationship with respect to the sample in the second one of the dimensions based on the corrected probe position signal.

Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.