Particular Materials (epo) Patents (Class 850/59)
  • Patent number: 9410982
    Abstract: Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
    Type: Grant
    Filed: July 30, 2013
    Date of Patent: August 9, 2016
    Assignee: INFINITESIMA LIMITED
    Inventors: Andrew Humphris, Bin Zhao
  • Patent number: 9043947
    Abstract: A method is provided for manufacturing near-field optical probes including at least one organo-mineral material with an organic part and a mineral part, the method including steps of irradiating at least partially the organo-mineral material with a radiation beam to polymerize the organic part in the irradiated areas, and polycondensing the mineral part by sol-gel process. Also disclosed are near-field optical probes and AFM and SNOM systems using the probes.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: May 26, 2015
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE MONTPELLIER 2 SCIENCES ET TECHNIQUES
    Inventors: Pascal Falgayrettes, Raphael Kribich, Laurent Nativel, Bachar Mourched, Pascale Gall-Borrut, Benoit Belier
  • Patent number: 9015861
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: April 21, 2015
    Assignee: Consejo Superior de Investigaciones Cientificas (CSIC)
    Inventors: Elisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel
  • Patent number: 8961853
    Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: February 24, 2015
    Assignee: Northwestern University
    Inventors: Chad A. Mirkin, Wooyoung Shim, Adam B. Braunschweig, Xing Liao, Jinan Chai, Jong Kuk Lim, Gengfeng Zheng, Zijian Zheng
  • Publication number: 20140338075
    Abstract: A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.
    Type: Application
    Filed: May 6, 2014
    Publication date: November 13, 2014
    Applicant: APPLIED NANOSTRUCTURES, INC.
    Inventors: Jeremy J. Goeckeritz, Gary D. Aden, Ami Chand, Josiah F. Willard
  • Publication number: 20140196179
    Abstract: Techniques for measuring the topography of a surface using a device including a semiconductor slab having a distal end and a base region, and an air slot therein. A sensor tip can be coupled to the slab below the air-slot. A photonic crystal including a lattice pattern with a cavity region defined by a local perturbation in the lattice pattern can be integrated into the semiconductor slab above and below the air slot, thereby providing a split-cavity photonic crystal resonator integrated into the semiconductor slab.
    Type: Application
    Filed: January 8, 2014
    Publication date: July 10, 2014
    Inventor: Dirk R. ENGLUND
  • Patent number: 8713711
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: April 29, 2014
    Assignee: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8695110
    Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: April 8, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka
  • Patent number: 8695111
    Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: April 8, 2014
    Inventor: Chung Hoon Lee
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Patent number: 8635710
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: January 21, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8621659
    Abstract: In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi
  • Patent number: 8621658
    Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.
    Type: Grant
    Filed: September 5, 2011
    Date of Patent: December 31, 2013
    Assignee: Akita University
    Inventors: Hitoshi Saito, Satoru Yoshimura
  • Patent number: 8601610
    Abstract: An optical electric field enhancement element includes a nanorod which includes a plurality of conductive layers formed therein in a direction parallel to a longitudinal axis of the nanorod. Adjacent conductive layers are isolated from each other via an insulating layer. The nanorod exhibits an effect of enhancing an optical electric field.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: December 3, 2013
    Assignees: Japan Science and Technology Agency, National Institute for Materials Science
    Inventors: Yoshitaka Shingaya, Tomonobu Nakayama, Masakazu Aono
  • Patent number: 8584261
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 12, 2013
    Assignee: SII Nanotechnology Inc.
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8549660
    Abstract: An apparatus may comprise an optical detector configured to detect an optical beam reflected from a cantilever. The apparatus may further comprise an optical fiber probe suspended from the cantilever and a piezotube configured to move a sample substance in proximity to the optical fiber probe. The cantilever may be configured to deflect in response to an interfacial force between the sample substance and the optical fiber probe. The apparatus may further comprise a feedback controller communicatively coupled to the optical detector and a semiconductive circuit element abutting the cantilever. In response to detecting movement of the optical beam reflected from the cantilever, the feedback controller may apply a voltage to the semiconductive circuit element, which may reduce deflection of the cantilever. The voltage applied by the feedback controller may indicate a strength of the interfacial force between the sample substance and the optical fiber probe.
    Type: Grant
    Filed: April 9, 2010
    Date of Patent: October 1, 2013
    Assignee: Boise State University
    Inventor: Byung Kim
  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Patent number: 8458811
    Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
    Type: Grant
    Filed: March 25, 2011
    Date of Patent: June 4, 2013
    Assignees: The Governors of the University of Alberta, The Regents of the University of California
    Inventors: Erik J. Luber, Colin Ophus, David Mitlin, Brian Olsen, Christopher Harrower, Velimir Radmilović
  • Patent number: 8434161
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8434160
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8393011
    Abstract: A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
    Type: Grant
    Filed: May 13, 2009
    Date of Patent: March 5, 2013
    Assignee: NanoInk, Inc.
    Inventors: Joseph S. Fragala, Albert K. Henning, Raymond R. Shile
  • Patent number: 8327460
    Abstract: The present invention allows simple and sensitive detection of microimpurities, microdefects, and corrosion starting points which may be present in a material. A probe microscope has a function to sense ions diffused from a specimen in a liquid. A probe is caused to scan over a predetermined range on a specimen. Then, the probe is fixed to a particular position in a liquid so as to set the distance between the specimen and the probe to a given value at which the microstructure of the specimen surface cannot be observed. Thereafter, one of the current between the probe and a counter electrode and the potential between the probe and a reference electrode is controlled, and the other of the current and potential which varies in accordance with the control is measured. Thus, ions diffused from the specimen are sensed.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: December 4, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Kyoko Honbo, Katsumi Mabuchi, Motoko Harada
  • Patent number: 8272068
    Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: September 18, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka
  • Patent number: 8220067
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 29, 2010
    Date of Patent: July 10, 2012
    Assignee: Board of Regents of the Nevada System of Higher Education
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Publication number: 20120167262
    Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
    Type: Application
    Filed: June 4, 2010
    Publication date: June 28, 2012
    Applicant: Northwestern University
    Inventors: Chad A. Mirkin, Wooyoung Shim, Adam B. Braunschweig, Xing Liao, Jinan Chai, Jong Kuk Lim, Gengfeng Zheng, Zijian Zheng
  • Patent number: 8201268
    Abstract: An optical tip for a Near-field Scanning Optical Microscope (NSOM) is provided. The optical tip includes a waveguide with a semiconductor or metal core and a cladding. The refractive-index-square-ratio contrast between the core and the cladding is at least 0.3. The optical tip may also include a light detector and a light source. The waveguide, the light source and the light detector may be integrated to form a single chip.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: June 12, 2012
    Assignee: Optonet Inc.
    Inventors: Seng-Tiong Ho, Yingyan Huang
  • Patent number: 8181268
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: May 15, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8166568
    Abstract: It is an object to provide a contact probe pin for a semiconductor test apparatus, including an amorphous carbon type conductive film formed on the probe pin base material surface. The conductive film is excellent in tin adhesion resistance of preventing tin which is the main component of solder from adhering to the contact part of the probe pin during contact between the probe pin and solder. The contact probe pin for a semiconductor test apparatus, includes an amorphous carbon type conductive film formed on the conductive base material surface. The amorphous carbon type conductive film has an outer surface with a surface roughness (Ra) of 6.0 nm or less, a root square slope (R?q) of 0.28 or less, and a mean value (R) of curvature radii of concave part tips of the surface form of 180 nm or more, in a 4-?m2 scan range by an atomic force microscope.
    Type: Grant
    Filed: July 30, 2010
    Date of Patent: April 24, 2012
    Assignee: Kobe Steel, Ltd.
    Inventors: Hirotaka Ito, Kenji Yamamoto
  • Patent number: 8104332
    Abstract: To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 ?m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: January 31, 2012
    Assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
    Inventors: Kouji Koyama, Toshiro Kotaki, Kazuhiko Sunagawa
  • Publication number: 20120000770
    Abstract: Probe-based methods are provided for formation of one or more nano-sized or micro-sized elongated structures such as wires or tubes. The structures extend at least partially upwards from the surface of a substrate, and may extend fully upward from the substrate surface. The structures are formed via a localized electrodeposition technique. The electrodeposition technique of the invention can also be used to make modified scanning probe microscopy probes having an elongated nanostructure at the tip or conductive nanoprobes. Apparatus suitable for use with the electrodeposition technique are also provided.
    Type: Application
    Filed: June 7, 2011
    Publication date: January 5, 2012
    Applicant: The Board of Trustees of the University of Illinois
    Inventors: Min-Feng Yu, Abhijit P. Suryavanshi
  • Patent number: 7997125
    Abstract: A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: August 16, 2011
    Assignees: Nanoscale Systems, Nanoss GmbH, Johann Wolfgang Goethe-Universitaet
    Inventors: Alexander Kaya, Michael Huth
  • Patent number: 7945966
    Abstract: The invention relates to a nanoprobe comprising a silica fiber (2) with an end opening having a diameter of less than 100 nm, and a metallic sheath (11). The total diameter of the silica part and the metallic sheath (11) is less than 300 nm. The invention also relates to a method for producing one such nanoprobe.
    Type: Grant
    Filed: June 6, 2006
    Date of Patent: May 17, 2011
    Inventors: Tiberiu Minea, Guy Louarn, Guirec Ollivier, Marc Chaigneau
  • Publication number: 20110107473
    Abstract: Diamond-like carbon (DLC) coated nanoprobes and methods for fabricating such nanoprobes are provided. The nanoprobes provide hard, wear-resistant, low friction probes for use in such applications as atomic force microscopy, nanomachining, nanotribology, metrology and nanolithography. The diamond-like carbon coatings include a carbon implantation layer which increases adhesion of a deposited DLC layer to an underlying nanoprobe tip.
    Type: Application
    Filed: March 14, 2007
    Publication date: May 5, 2011
    Inventors: Robert W. Carpick, Kumar Sridharan, Anirudha V. Sumant
  • Publication number: 20110078835
    Abstract: Embodiments of a process comprising forming one or more micro-electro-mechanical (MEMS) probe on a conductive metal oxide semiconductor (CMOS) wafer, wherein each MEMS probe comprises a cantilever beam with a fixed end and a free end and wherein the CMOS wafer has circuitry thereon; forming an unsharpened tip at or near the free end of each cantilever beam; depositing a silicide-forming material over the tip; annealing the wafer to sharpen the tip; and exposing the sharpened tip.
    Type: Application
    Filed: December 7, 2010
    Publication date: March 31, 2011
    Applicant: INTEL CORPORATION
    Inventor: John Heck
  • Patent number: 7917966
    Abstract: Techniques for fabricating carbon nanotubes aligned on a tip are provided. In one embodiment, a method for fabricating carbon nanotubes aligned on a tip includes forming nanostructures on the tip, and aligning the nanostructures on the tip using a fluid flowing on the tip.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: March 29, 2011
    Assignee: SNU R&DB Foundation
    Inventors: Yong Hyup Kim, Wal Jun Kim
  • Publication number: 20110067151
    Abstract: It is an object to provide a contact probe pin for a semiconductor test apparatus, including an amorphous carbon type conductive film formed on the probe pin base material surface. The conductive film is excellent in tin adhesion resistance of preventing tin which is the main component of solder from adhering to the contact part of the probe pin during contact between the probe pin and solder. The contact probe pin for a semiconductor test apparatus, includes an amorphous carbon type conductive film formed on the conductive base material surface. The amorphous carbon type conductive film has an outer surface with a surface roughness (Ra) of 6.0 nm or less, a root square slope (R?q) of 0.28 or less, and a mean value (R) of curvature radii of concave part tips of the surface form of 180 nm or more, in a 4-?m2 scan range by an atomic force microscope.
    Type: Application
    Filed: July 30, 2010
    Publication date: March 17, 2011
    Applicant: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel Ltd.)
    Inventors: Hirotaka ITO, Kenji Yamamoto
  • Publication number: 20110010808
    Abstract: The present invention generally relates to a protected metallic or metallized scanning probe microscopy tip for apertureless near-field optical applications which comprise a metallic tip or a metallic structure covering a scanning probe microscopy tip, protected by an ultrathin dielectric layer. In one embodiment, the protective layer is comprised of SiOx, AI2O3, or any other hard ultrathin dielectric layer that extends the lifetime of the tip by providing mechanical, chemical, and thermal protection to the entire structure.
    Type: Application
    Filed: December 18, 2008
    Publication date: January 13, 2011
    Applicant: THE UNIVERSITY OF AKRON
    Inventors: Carlos A. Barrios, Mark D. Foster, Alexei Sokolov, Audrey Malkovskiy, Ryan Hartschuh
  • Patent number: 7854016
    Abstract: A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: December 14, 2010
    Assignee: STMicroelectronics S.r.l.
    Inventor: Agostino Pirovano
  • Publication number: 20100275335
    Abstract: A method for attaching a conductive particle to the apex of a probe tip comprises the steps of: moving the apex of a probe tip close to a conductive particle and applying a bias voltage between the probe tip and the conductive particle so that the conductive particle can permanently attach to the apex. The method uses only a bias voltage to transfer and attach conductive particles to the apex of a probe tip, and no surface treatment of the probe tip is required.
    Type: Application
    Filed: April 20, 2010
    Publication date: October 28, 2010
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: FAN GANG TSENG, HUI WEN CHENG, WUN YUAN JHENG
  • Patent number: 7765607
    Abstract: Probes and methods of making probes are provided, particularly probes or nano-tools having tip active areas of extremely small dimensions, e.g., on the order of one angstrom to a few nanometers. One method of making a nano-tool includes forming a composite including a tool layer less than 10 nm thick on a substrate layer, subtracting a region of the substrate layer at least partially through the thickness of the substrate layer, thereby exposing a well surface, and folding the composite so that portions of the tool layer surface diverge and portions of the well surface converge, wherein an outer crease of the folded tool layer is a nanotool active area.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: July 27, 2010
    Inventor: Sadeg M. Faris
  • Publication number: 20100154087
    Abstract: The invention relates to a method for the catalytic growth of carbon nanotubes on nanometric tips by chemical vapour deposition assisted by a hot filament, that comprises a first step of applying a preliminary dual-layer coating of cobalt and titanium on said tip, the titanium layer having a thickness of between 0.1 nm and 0.2 nm and cobalt layer having a thickness of between 0.3 nm and 2 nm.
    Type: Application
    Filed: February 1, 2008
    Publication date: June 17, 2010
    Applicant: Centre National De La Rechereche Scientifique (C.N.R.S
    Inventors: Anne-Marie Bonnot, Frederic Gay, Pierre Henri Perrier
  • Publication number: 20100154085
    Abstract: A microscope including both an atomic force microscope and a near-field optical microscope and capable of performing electrochemical measurements and a cantilever for the microscope are disclosed. A pointed light transmitting material employed as the probe of an atomic force microscope is coated with a metal layer; the metal layer is further coated with an insulating layer; the insulating layer is removed only at the distal end to expose the metal layer; the slightly exposed metal layer is employed as a working electrode; and the probe can be employed not only as the probe of the atomic force microscope and the near-field optical microscope but also as the electrode of an electrochemical microscope. Consequently, the microscope can have the functions of an atomic force microscope, a near-field optical microscope and an electrochemical microscope.
    Type: Application
    Filed: March 30, 2006
    Publication date: June 17, 2010
    Inventors: Kenichi Maruyama, Koji Suzuki, Masato Iyoki
  • Patent number: 7737414
    Abstract: A method for preparing an iridium tip with atomic sharpness. The method includes tapering an iridium wire to a needle shape and heating the iridium needle in an oxygen atmosphere. Also disclosed is an iridium needle having a pyramidal structure which terminates with a small number of atoms prepared by the methods.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: June 15, 2010
    Assignee: Academia Sinica
    Inventors: Hong-Shi Kuo, Ing-Shouh Hwang, Tien T. Tsong, Tsu-Yi Fu
  • Patent number: 7694346
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: April 6, 2010
    Assignee: Board of Regents of the Nevada System of Higher Education on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Publication number: 20100011472
    Abstract: A force microscope for the detection of forces in the sub-micronewton range has a measurement head which is used to carry out a relative movement with respect to a sample holder and to which a carrier molecule is attached on which probe molecules are placed.
    Type: Application
    Filed: July 2, 2009
    Publication date: January 14, 2010
    Inventors: Thorsten Hugel, Michael Geisler
  • Patent number: 7637960
    Abstract: Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers that are used for reducing the variation of thickness of the cantilevers. In one example, the fabrication process provided SOI chips containing 40 silicon cantilevers integrating with an ultra-sharp Si tip. The resolution of images obtained with these tips was much higher than those obtained with the commercial tips, while the force constants were much less, that is, more suitable for imaging soft samples.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: December 29, 2009
    Assignee: University of Houston
    Inventors: Chengzhi Cai, Chi-Ming Yam, Guoting Qin, Steven Pei, Qingkai Yu
  • Patent number: 7618465
    Abstract: The invention relates to a near-field antenna comprising a dielectric shaped body having a tip. The shaped body is characterized in that at least the surface of the tip is metallized, thereby enhancing the sensitivity of devices comprising the near-field antenna, for example, spectroscopes, microscopes or read-write heads.
    Type: Grant
    Filed: November 19, 2005
    Date of Patent: November 17, 2009
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Norbert Klein, Filip Kadlec, Petr Kuźel
  • Publication number: 20090172846
    Abstract: The invention relates to a nanoprobe comprising a silica fibre (2) with an end opening having a diameter of less than 100 nm, and a metallic sheath (11). The total diameter of the silica part and the metallic sheath (11) is less than 300 nm. The invention also relates to a method for producing one such nanoprobe.
    Type: Application
    Filed: June 6, 2006
    Publication date: July 2, 2009
    Applicants: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE- CNRS, UNIVERSITE DE NANTES
    Inventors: Tiberiu Minea, Guy Louarn, Guirec Ollivier, Marc Chaigneau
  • Patent number: 7553335
    Abstract: A scanning probe microscope probe is produced by depositing a raw-material film on the surface of a cone made of Si, etc. and growing a needle-like crystal by using the raw-material film by irradiating an energy beam to a point on the cone at a predetermined distance along the side surface from the cone tip under such conditions as not to melt the cone. Also, a charge density wave quantum phase microscope is provided which uses a probe made of a charge density wave crystal. Also, a charge density wave quantum interferometer is provided which uses the needle-like crystal formed from the charge density wave crystal. Also, the scanning probe microscope probe is formed from a pressure-induced superconducting substance.
    Type: Grant
    Filed: April 22, 2005
    Date of Patent: June 30, 2009
    Assignee: Japan Science and Technology Agency
    Inventors: Satoshi Tanda, Migaku Oda, Katsuhiko Inagaki, Hiroyuki Ohkawa, Takeshi Toshima, Naoki Momono, Munehiro Nishida, Masayuki Ido