Probe Characteristics (epo) Patents (Class 850/56)
  • Patent number: 11156634
    Abstract: A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: October 26, 2021
    Assignees: VMICRO, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE LILLE-1
    Inventors: Benjamin Walter, Marc Faucher, Estelle Mairiaux-Mage
  • Patent number: 10409082
    Abstract: Disclosed herein are systems and techniques related to optical projection systems. In some examples, the system may include a scanning mirror arrangement for receiving a light beam and reflecting the light beam to a projection surface and a dynamic optical lens for focusing the light beam at points on a focal plane. Dynamic optical lens can be adjusted to focus the light beam on multiple points of the focal plane, where some of the points are disposed a different distance from the dynamic optical lens.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: September 10, 2019
    Assignee: NORTH INC.
    Inventors: Lucio Kilcher, Nicolas Abele
  • Patent number: 10261106
    Abstract: A photonic probe for atomic force microscopy includes: a cantilever including: a tip; a wing in mechanical communication with the tip; an extension interposed between the tip and the wing to synchronously communicate motion of the tip with the wing; an optical resonator disposed proximate to the cantilever and that: receives input light; and produces output light, such that: the cantilever is spaced by a gap distance from the optical resonator, wherein the gap distance varies as the cantilever moves relative to the optical resonator, and the output light differs from the input light in response to movement of the cantilever relative to the optical resonator; an optical waveguide in optical communication with the optical resonator and that: provides the input light to the optical resonator; and receives the output light from the optical resonator.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: April 16, 2019
    Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
    Inventors: Vladimir Aksyuk, Marcelo Davanco
  • Patent number: 9354164
    Abstract: There is provided an optical system, including: an extracting section, the refractive index of the extracting section being approximately the same as the refractive index of an observed object, the extracting section being optically coupled with the observed object to thereby extract a terahertz electromagnetic wave generated from the observed object; and an ellipsoidal reflector surface having a first focal point and a second focal point, the observed object being to be arranged on the first focal point, a photoconductive device being on the second focal point, the photoconductive device being configured to detect the terahertz electromagnetic wave extracted by the extracting section, the ellipsoidal reflector surface guiding the extracted terahertz electromagnetic wave to the photoconductive device.
    Type: Grant
    Filed: May 2, 2014
    Date of Patent: May 31, 2016
    Assignee: SONY CORPORATION
    Inventors: Hiroaki Yamana, Masanao Kamata
  • Patent number: 9199435
    Abstract: Inorganic particle/polymer composites are described that involve chemical bonding between the elements of the composite. In some embodiments, the composite composition includes a polymer having side groups chemically bonded to inorganic particles. Furthermore, the composite composition can include chemically bonded inorganic particles and ordered copolymers. Various electrical, optical and electro-optical devices can be formed from the composites.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: December 1, 2015
    Assignee: NanoGram Corporation
    Inventors: Nobuyuki Kambe, Shivkumar Chiruvol
  • Patent number: 9015861
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: April 21, 2015
    Assignee: Consejo Superior de Investigaciones Cientificas (CSIC)
    Inventors: Elisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel
  • Patent number: 8966661
    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: February 24, 2015
    Assignee: Academia Sinica
    Inventors: Wei-Tse Chang, Ing-Shouh Hwang
  • Publication number: 20140366230
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Application
    Filed: June 16, 2014
    Publication date: December 11, 2014
    Inventors: Weijie Wang, Chanmin Su
  • Publication number: 20140331367
    Abstract: A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.
    Type: Application
    Filed: December 17, 2012
    Publication date: November 6, 2014
    Inventors: Amit Lal, Kwame Amponsah
  • Patent number: 8869602
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface by using the AFM probe to detect wavelength dependent IR radiation interaction, typically absorption with the sample in the region of the tip. The tip may be configured to produce electric field enhancement when illuminated by a radiation source. This enhancement allows for significantly reduced illumination power levels resulting in improved spatial resolution by confining the sample-radiation interaction to the region of field enhancement which is highly localized to the tip.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: October 28, 2014
    Assignee: Anasys Instruments Corp.
    Inventors: Mikhail Belkin, Feng Lu, Vladislav V. Yakolev, Craig Prater, Kevin Kjoller, Markus Raschke
  • Publication number: 20140250553
    Abstract: The embodiments described herein provide a sensor. In an exemplary embodiment, the sensor includes (1) a resonator, (2) a probe attached to the resonator, and (3) an encasement that encases the resonator, where the encasement includes an opening through which the probe can protrude and where the dimensions of the encasement are on the same order as the dimensions of the resonator.
    Type: Application
    Filed: August 21, 2012
    Publication date: September 4, 2014
    Applicant: The Regents of the University of California
    Inventors: Dominik Ziegler, Paul Ashby
  • Patent number: 8819861
    Abstract: The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: August 26, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Joseph W. Lyding, Scott W. Schmucker
  • Patent number: 8756710
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: June 17, 2014
    Assignee: Bruker-Nano, Inc.
    Inventors: Weijie Wang, Chanmin Quanmin Su
  • Publication number: 20140130215
    Abstract: The present invention discloses a method of fabricating a scanning probe microscopy probe including positioning a pattern probe over a mold substrate; indenting the pattern probe into the mold substrate material to form a mold pit; depositing a film onto the mold substrate including the mold pit; removing a portion of the deposited film to form a probe, and releasing the probe from the mold substrate material.
    Type: Application
    Filed: November 7, 2012
    Publication date: May 8, 2014
    Applicant: RAVE, LLC
    Inventors: David Brinkley, Roy L. White
  • Patent number: 8713711
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: April 29, 2014
    Assignee: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8701211
    Abstract: A method of producing sharp tips useful for scanning probe microscopy and related applications is described. The tips are formed by deposition into a mold(s) formed in a sacrificial crystalline semiconductor substrate with an exposed {311} surface which has been etched with a crystallographic etchant to form a 3-sided, trihedral or trigonal pyramidal mold(s) or indentation(s). The resultant tips, when released from the sacrificial mold material or substrate, are typically formed in the shape of a trigonal pyramid or a tetrahedron. Another embodiment involves starting with a {100} surface and the formation of two tips on opposite ends of a wedge at trigonal or trihedral points of the wedge. These tips are less susceptible to the tip wedge effect typical of tips formed using known methods.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: April 15, 2014
    Assignee: Advanced Diamond Technologies, Inc.
    Inventor: Nicolae Moldovan
  • Patent number: 8695111
    Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: April 8, 2014
    Inventor: Chung Hoon Lee
  • Patent number: 8695110
    Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
    Type: Grant
    Filed: August 15, 2012
    Date of Patent: April 8, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka
  • Patent number: 8680467
    Abstract: A method of obtaining submicron resolution IR absorption data from a sample surface. A probe microscope probe interacts with the sample surface while a tunable source of IR radiation illuminates the sample-tip interaction region. The source is modulated at a frequency substantially overlapping the resonant frequency of the probe and may be modulated at the contact resonance frequency of the probe when the probe is in contact with the sample surface. The modulation frequency is continually adjusted to account for shifts in the probe resonant frequency due to sample or other variations. A variety of techniques are used to observe such shifts and accomplish the adjustments in a rapid manner.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: March 25, 2014
    Assignee: Anasys Instruments Corp.
    Inventors: Craig Prater, Kevin Kjoller
  • Publication number: 20140068823
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Application
    Filed: August 31, 2012
    Publication date: March 6, 2014
    Inventors: Wiejie Wang, Chanmin Quanmin Su
  • Patent number: 8661561
    Abstract: A metal tip (1) for scanning probe applications is provided. The tip (1) has an axial extension (I), a radial extension (d), a pointy section (B) that extends axially from a section of maximum radial extension (5) to an atomically sharp end (9), and a blunt section (A) that extends axially from the section of maximum radial extension (5) to a blunt end (7), where the axial extension of the pointy section (B) is larger than the axial extension of the blunt section (A) The metal tip (1) has a mass of 10 ?g or less.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: February 25, 2014
    Assignee: SPECS Surface Nano Analysis GmbH
    Inventor: Erik Laegsgaard
  • Patent number: 8661560
    Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.
    Type: Grant
    Filed: November 5, 2012
    Date of Patent: February 25, 2014
    Assignee: PrimeNano, Inc.
    Inventors: Xinxin Li, Yongliang Yang
  • Publication number: 20140047585
    Abstract: An apparatus and method directed to a scanning probe microscopy cantilever. The apparatus includes body and an electromagnetic sensor having a detectable electromagnetic property varying upon deformation of the body. The method includes scanning the surface of a material with the cantilever, such that the body of the cantilever undergoes deformations and detecting the electromagnetic property varying upon deformation of the body of the cantilever.
    Type: Application
    Filed: August 9, 2012
    Publication date: February 13, 2014
    Applicant: International Business Machines Corporation
    Inventors: Jens Hofrichter, Felix Holzner, folkert Horst, Philip Paul
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Patent number: 8646111
    Abstract: A novel way for constructing and operating scanning probe microscopes to dynamically measure material properties of samples, mainly their surface hardness, by separating the functions of actuation, indentation and sensing into separate dynamic components. The amplitude and phase shift of higher modes occurring at periodic indentations with the sample are characteristic values for different sample materials. A separate sensor cantilever, connected to the indentation probe tip, has the advantage of a high mechanical amplification of a desired higher mode while suppressing the actuation signal itself. The operational range of the sensor can be extended just by switching the actuation signal to another submultiple of the sensor cantilever's resonance frequency and/or by using more than one sensor cantilever for each indentation tip.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: February 4, 2014
    Assignee: The Regents of the University of California
    Inventors: Kimberly L. Turner, Benedikt Zeyen
  • Patent number: 8635710
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: January 21, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8631511
    Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: January 14, 2014
    Inventor: Victor B. Kley
  • Publication number: 20140007308
    Abstract: A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
    Type: Application
    Filed: July 2, 2012
    Publication date: January 2, 2014
    Applicants: CORNELL UNIVERSITY, INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Patent number: 8621660
    Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8621658
    Abstract: A magnetic-field-observation device and method for measuring magnetic force near a magnetic material specimen's surface with high resolution and detecting the polarity of the magnetic pole of specimen's surface.
    Type: Grant
    Filed: September 5, 2011
    Date of Patent: December 31, 2013
    Assignee: Akita University
    Inventors: Hitoshi Saito, Satoru Yoshimura
  • Patent number: 8621659
    Abstract: In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kaifeng Zhang, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi
  • Patent number: 8584261
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 12, 2013
    Assignee: SII Nanotechnology Inc.
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8578511
    Abstract: A thermal probe includes a support element, a conductive pattern and a tip. The support element has a slit or a through hole and has a first surface and a second surface which is opposite to the first surface. The conductive pattern is disposed at the first surface. The tip has a base and a pinpoint. The pinpoint is disposed at the base and passes through the slit or the through hole and highlights from the first surface. The base is connected with the second surface. The tip of the thermal probe of the invention can be replaced, and user can choose the best combination of the tip, conductive pattern and support element according to their needs.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 5, 2013
    Assignee: National Cheng Kung University
    Inventors: Bernard HaoChih Liu, Fang-Yi Liao, Jian-Hong Chen
  • Publication number: 20130291236
    Abstract: A structure for the characterization of a tip of an atomic force microscope, the structure being produced on a substrate and including a first support element located above the substrate; a first characterization element with a constant thickness, the first characterization element being located above the first support element and having an upper flat surface and a lower flat surface covering the upper surface of the first support element with two zones extending beyond the upper surface of the first support element, each zone having a characterization surface at one end which is capable of coming into contact with a tip to be characterized, the upper surface and the lower surface of said first characterization element being parallel to the upper surface of the substrate.
    Type: Application
    Filed: April 24, 2013
    Publication date: October 31, 2013
    Inventors: Johann Foucher, Bernd Irmer
  • Patent number: 8495760
    Abstract: Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: July 23, 2013
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Manish J Butte, Marc Amor Bruce, Jianwei Liu
  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Patent number: 8458811
    Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
    Type: Grant
    Filed: March 25, 2011
    Date of Patent: June 4, 2013
    Assignees: The Governors of the University of Alberta, The Regents of the University of California
    Inventors: Erik J. Luber, Colin Ophus, David Mitlin, Brian Olsen, Christopher Harrower, Velimir Radmilović
  • Publication number: 20130139285
    Abstract: The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.
    Type: Application
    Filed: January 29, 2013
    Publication date: May 30, 2013
    Applicant: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada
    Inventor: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada, Reno
  • Publication number: 20130111636
    Abstract: This system includes non-linear interaction imaging and spectroscopy (“NIIS”) for scanning probe microscopy. Scanning probe microscopy operates with an oscillating tip and cantilever to monitor characteristics of the oscillation and NIIS measures both the linear and non-linear components of the interactions between the probe tip and the surface.
    Type: Application
    Filed: October 28, 2011
    Publication date: May 2, 2013
    Applicant: UT-BATTELLE, LLC
    Inventor: Stephen Jesse
  • Patent number: 8434160
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8434161
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Publication number: 20130097739
    Abstract: To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.
    Type: Application
    Filed: October 12, 2012
    Publication date: April 18, 2013
    Inventor: Hitachi High-Technologies Corporation
  • Patent number: 8407811
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: March 26, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Publication number: 20130061357
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Application
    Filed: July 10, 2012
    Publication date: March 7, 2013
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8393011
    Abstract: A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
    Type: Grant
    Filed: May 13, 2009
    Date of Patent: March 5, 2013
    Assignee: NanoInk, Inc.
    Inventors: Joseph S. Fragala, Albert K. Henning, Raymond R. Shile
  • Patent number: 8393009
    Abstract: A sensor for scanning a surface with an oscillating cantilever (12), made from piezoelectric material that is suitable for a transverse oscillation of the free end of a beam, holding an electrically conductive probe tip (14) on the free end of the beam in transverse direction, a first deflection electrode (26A, 26B) and an inversely phased second electrode (28A, 28B, 28C) being provided to collect charges that are separated within the space of the deflection electrodes (34, 36). The cantilever (12) is provided with at least one electrode (30) in addition to the deflection electrodes (26A, 26B, 28A, 28B, 28C) that provides electrical contact to the tip (14), the at least one additional electrode being located in a region on the deflecting beam where the surface charge density due to the strain caused by beam deflection (34, 36) is smaller than in the region where the deflection electrodes are located.
    Type: Grant
    Filed: November 21, 2011
    Date of Patent: March 5, 2013
    Inventor: Franz Josef Giessibl
  • Publication number: 20130047303
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Application
    Filed: November 23, 2011
    Publication date: February 21, 2013
    Inventors: William P. King, Craig Prater, Byeonghee Lee
  • Publication number: 20130036521
    Abstract: A method of obtaining submicron resolution IR absorption data from a sample surface. A probe microscope probe interacts with the sample surface while a tunable source of IR radiation illuminates the sample-tip interaction region. The source is modulated at a frequency substantially overlapping the resonant frequency of the probe and may be modulated at the contact resonance frequency of the probe when the probe is in contact with the sample surface. The modulation frequency is continually adjusted to account for shifts in the probe resonant frequency due to sample or other variations. A variety of techniques are used to observe such shifts and accomplish the adjustments in a rapid manner.
    Type: Application
    Filed: September 19, 2011
    Publication date: February 7, 2013
    Inventors: Craig Prater, Kevin Kjoller
  • Patent number: 8365311
    Abstract: Provided is a highly selective and non-destructive method and apparatus for the measurement of one or more target molecules within a target environment. The apparatus comprises of a modified AFM (atomic force microscope) tip to create a tapered nanoscale co-axial cable, and wherein the application of an alternating potential between the inner and outer electrodes of the co-axial cable creates a dielectrophoretic force for attracting molecules toward the tip-end which is pre-treated with one or more specific ligands.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: January 29, 2013
    Assignee: The Regents of the University of California
    Inventors: Dharmakeerthi Nawarathna, H. Kumar Wickaramsinghe
  • Publication number: 20120291161
    Abstract: In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
    Type: Application
    Filed: May 3, 2012
    Publication date: November 15, 2012
    Inventors: Kaifeng ZHANG, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi