Probe Manufacture (epo) Patents (Class 850/60)
  • Patent number: 9229028
    Abstract: The embodiments described herein provide a sensor. In an exemplary embodiment, the sensor includes (1) a resonator, (2) a probe attached to the resonator, and (3) an encasement that encases the resonator, where the encasement includes an opening through which the probe can protrude and where the dimensions of the encasement are on the same order as the dimensions of the resonator.
    Type: Grant
    Filed: August 21, 2012
    Date of Patent: January 5, 2016
    Assignee: The Regents of the University of California
    Inventors: Dominik Ziegler, Paul Ashby
  • Patent number: 9015861
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: April 21, 2015
    Assignee: Consejo Superior de Investigaciones Cientificas (CSIC)
    Inventors: Elisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel
  • Patent number: 8984661
    Abstract: This disclosure provides systems, methods, and apparatus related to probes for multidimensional nanospectroscopic imaging. In one aspect, a method includes providing a transparent tip comprising a dielectric material. A four-sided pyramidal-shaped structure is formed at an apex of the transparent tip using a focused ion beam. Metal layers are deposited over two opposing sides of the four-sided pyramidal-shaped structure.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: March 17, 2015
    Assignee: The Regents of the University of California
    Inventors: Alexander Weber-Bargioni, Stefano Cabrini, Wei Bao, Mauro Melli, Eli Yablonovitch, Peter J. Schuck
  • Patent number: 8961853
    Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: February 24, 2015
    Assignee: Northwestern University
    Inventors: Chad A. Mirkin, Wooyoung Shim, Adam B. Braunschweig, Xing Liao, Jinan Chai, Jong Kuk Lim, Gengfeng Zheng, Zijian Zheng
  • Patent number: 8966661
    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: February 24, 2015
    Assignee: Academia Sinica
    Inventors: Wei-Tse Chang, Ing-Shouh Hwang
  • Publication number: 20140366230
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Application
    Filed: June 16, 2014
    Publication date: December 11, 2014
    Inventors: Weijie Wang, Chanmin Su
  • Patent number: 8898810
    Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: November 25, 2014
    Assignees: UT-Battelle, LLC, University of Tennesse Research Foundation
    Inventors: Barbara R. Evans, Ida Lee
  • Publication number: 20140338075
    Abstract: A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.
    Type: Application
    Filed: May 6, 2014
    Publication date: November 13, 2014
    Applicant: APPLIED NANOSTRUCTURES, INC.
    Inventors: Jeremy J. Goeckeritz, Gary D. Aden, Ami Chand, Josiah F. Willard
  • Patent number: 8819861
    Abstract: The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: August 26, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Joseph W. Lyding, Scott W. Schmucker
  • Publication number: 20140237690
    Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.
    Type: Application
    Filed: October 10, 2012
    Publication date: August 21, 2014
    Applicant: Purdue Research Foundation
    Inventors: Corey P. Neu, Babak Ziaie, Teimour Maleki-Jafarabadi, Charilaos Mousoulis
  • Patent number: 8756710
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: June 17, 2014
    Assignee: Bruker-Nano, Inc.
    Inventors: Weijie Wang, Chanmin Quanmin Su
  • Patent number: 8689361
    Abstract: A probe for atomic force microscopy may be provided by depositing a thin film onto a wafer substrate and etching the substrate to leave the thin film behind in the form of a handle, a cantilever, and a probe tip in the cantilever. In some embodiments, a thin film substrate for the probe may be accomplished by forming the probe mold on a first wafer, bonding a second wafer onto the first wafer, and patterning out the second wafer to define the substrate for the probe on the first wafer. The thin film may be deposited onto the exposed portions of the first wafer. Thereafter, portions of the first and second wafers may be removed to leave behind the probe.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: April 1, 2014
    Assignee: Oicmicro, LLC
    Inventor: Salleh Ismail
  • Publication number: 20140068823
    Abstract: Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
    Type: Application
    Filed: August 31, 2012
    Publication date: March 6, 2014
    Inventors: Wiejie Wang, Chanmin Quanmin Su
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Publication number: 20140033374
    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
    Type: Application
    Filed: July 23, 2013
    Publication date: January 30, 2014
    Applicant: ACADEMIA SINICA
    Inventors: WEI-TSE CHANG, ING-SHOUH HWANG
  • Patent number: 8635711
    Abstract: A method for functionalizing cantilevers is provided that includes providing a holder having a plurality of channels each having a width for accepting a cantilever probe and a plurality of probes. A plurality of cantilever probes are fastened to the plurality of channels of the holder by the spring clips. The wells of a well plate are filled with a functionalization solution, wherein adjacent wells in the well plate are separated by a dimension that is substantially equal to a dimension separating adjacent channels of the plurality of channels. Each cantilever probe that is fastened within the plurality of channels of the holder is applied to the functionalization solution that is contained in the wells of the well plate.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: January 21, 2014
    Assignees: UT-Battelle, LLC, University of Tennessee Research Foundation
    Inventors: Barbara R. Evans, Ida Lee
  • Patent number: 8601610
    Abstract: An optical electric field enhancement element includes a nanorod which includes a plurality of conductive layers formed therein in a direction parallel to a longitudinal axis of the nanorod. Adjacent conductive layers are isolated from each other via an insulating layer. The nanorod exhibits an effect of enhancing an optical electric field.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: December 3, 2013
    Assignees: Japan Science and Technology Agency, National Institute for Materials Science
    Inventors: Yoshitaka Shingaya, Tomonobu Nakayama, Masakazu Aono
  • Patent number: 8601611
    Abstract: The present invention is directed to methods of preparing nanoprobes, including multifunctional cellular endoscope-like devices, comprising nanotubes, nanorods, and/or nanowires.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: December 3, 2013
    Assignee: Drexel University
    Inventors: Yury Gogotsi, Gennady Friedman, Riju Singhal
  • Patent number: 8584261
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 12, 2013
    Assignee: SII Nanotechnology Inc.
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8539611
    Abstract: A method of creating a probe for scanned probe microscopy is disclosed. The method includes providing a wafer having a support wafer layer and a device layer. The method includes masking the wafer with a masking layer. The method includes removing a portion of the masking layer at the device layer. The method includes etching the wafer along the portion of the masking layer that has been removed to create a crystal facet surface that is oriented at a tilt angle. The method includes epitaxially growing a tip along the crystal facet surface.
    Type: Grant
    Filed: July 12, 2012
    Date of Patent: September 17, 2013
    Assignees: International Business Machines Corporation, Cornell University
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Patent number: 8505111
    Abstract: Provided is a cantilever excitation device capable of preventing complication of resonance characteristics by a simple configuration. A cantilever excitation device (1) is provided with a cantilever (7), a cantilever holder (3) for holding the cantilever (7), and a piezoelectric vibrator (5) attached to the cantilever holder (3). The cantilever holder (3) includes a holder main part (11) (first part) having an acoustic impedance different from that of the piezoelectric vibrator (5) for transmitting vibration of the piezoelectric vibrator by elastic deformation and an attachment piece (13) (second part) having the acoustic impedance different from that of the first part for forming a material boundary to block propagation of an acoustic wave between the same and the first part. The first and second parts are interposed between the piezoelectric vibrator (5) and the cantilever (7).
    Type: Grant
    Filed: August 6, 2010
    Date of Patent: August 6, 2013
    Assignee: National University Corporation Kanazawa University
    Inventors: Hitoshi Asakawa, Takeshi Fukuma
  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Patent number: 8474061
    Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: June 25, 2013
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8458811
    Abstract: An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
    Type: Grant
    Filed: March 25, 2011
    Date of Patent: June 4, 2013
    Assignees: The Governors of the University of Alberta, The Regents of the University of California
    Inventors: Erik J. Luber, Colin Ophus, David Mitlin, Brian Olsen, Christopher Harrower, Velimir Radmilović
  • Publication number: 20130097739
    Abstract: To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.
    Type: Application
    Filed: October 12, 2012
    Publication date: April 18, 2013
    Inventor: Hitachi High-Technologies Corporation
  • Publication number: 20130091607
    Abstract: The present invention is directed to methods of preparing nanoprobes, including multifunctional cellular endoscope-like devices, comprising nanotubes, nanorods, and/or nanowires.
    Type: Application
    Filed: October 5, 2012
    Publication date: April 11, 2013
    Applicant: DREXEL UNIVERSITY
    Inventor: DREXEL UNIVERSITY
  • Publication number: 20130061357
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Application
    Filed: July 10, 2012
    Publication date: March 7, 2013
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8321961
    Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: November 27, 2012
    Assignees: International Business Machines Corporation, King Abdulazlz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Publication number: 20120297509
    Abstract: Massive parallel printing of structures and nanostructures at high speed with high resolution and high quality using two dimensional arrays comprising cantilevers and tip-based transfer of material to a surface. The array is designed so only tips touch the surface. This can be accomplished by long tips and bent cantilevers and alignment. An article comprising: a two-dimensional array of a plurality of cantilevers, wherein the array comprises a plurality of base rows, each base row comprising a plurality of cantilevers, wherein each of the cantilevers comprise tips at the cantilever end away from the base, wherein the number of cantilevers is greater than 250, and wherein the tips have an apex height relative to the cantilever of at least four microns, and a support for the array. Combinatorial arrays and bioarrays can be prepared. The arrays can be manufactured by micromachining methods.
    Type: Application
    Filed: June 21, 2012
    Publication date: November 22, 2012
    Inventors: Chad A. Mirkin, Khalid Salaita, Yuhuang Wang, Joseph S. Fragala, Raymond R. Shile
  • Publication number: 20120291161
    Abstract: In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
    Type: Application
    Filed: May 3, 2012
    Publication date: November 15, 2012
    Inventors: Kaifeng ZHANG, Takenori Hirose, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi
  • Patent number: 8307461
    Abstract: A microwave probe having a metal tip on the free end of a microcantilever. In one embodiment, a pyramidal pit is isotropically etched in a device wafer of monocrystalline silicon. Oxidation may sharpen the pit. Deposited metal forms the metal tip in the pit and a bottom shield. Other metal sandwiched between equally thick dielectric layers contact the tip and form a conduction path along the cantilever for the probe and detected signals. Further metal forms a top shield overlying the conduction path and the dielectrically isolated tip and having equal thickness to the bottom shield, thus producing together with the symmetric dielectric layers a balanced structure with reduced thermal bending. The device wafer is bonded to a handle wafer. The handle is formed and remaining silicon of the device wafer is removed to release the cantilever.
    Type: Grant
    Filed: January 20, 2011
    Date of Patent: November 6, 2012
    Assignee: PrimeNano, Inc.
    Inventors: Xinxin Li, Yongliang Yang
  • Patent number: 8287745
    Abstract: Disclosed is a method for fabricating a probe tip, capable of preventing a rapid increase of a surface size of a front end of the probe tip as the probe tip is worn out by a frequent contact with a wafer chip and, also, capable of improving the precision of the front end of the probe tip. The method for fabricating a probe tip includes forming a front end of the probe tip on a silicon wafer; forming a first protective layer which is patterned to expose a part of the front end of the probe tip; and forming a body of the probe tip in a portion opened by the pattern of the first protective layer.
    Type: Grant
    Filed: May 29, 2008
    Date of Patent: October 16, 2012
    Assignee: M2N Inc.
    Inventors: Ki Pil Hong, Jong Hyeon Chae, Hac Ju Lee
  • Patent number: 8256018
    Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: August 28, 2012
    Assignee: NanoInk, Inc.
    Inventors: Jason Haaheim, Vadim Val-Khvalabov
  • Patent number: 8245316
    Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: August 14, 2012
    Assignee: Specs Zürich GmbH
    Inventor: Jörg Rychen
  • Patent number: 8245318
    Abstract: Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: August 14, 2012
    Assignee: The Regents of the University of California
    Inventors: Sungho Jin, Li-Han Chen, Gregory Dahlen, Hao-Chih Liu
  • Publication number: 20120174268
    Abstract: An assembly of microcantilever-based sensors with enhanced deflections. A deflection profile of an ?-assembly can be compared with that of a rectangular microcantilever and a modified triangular microcantilever. Various force-loading conditions can also be considered. A theorem of linear elasticity for thin beams is utilized to obtain the deflections. The obtained defections can be validated against an accurate numerical solution utilizing a finite element method with a maximum deviation of less than 10 percent. The ?-assembly produces larger deflections than the rectangular microcantilever under the same base surface stress and same extension length. Also, the ?-microcantilever assembly produces a larger deflection than a modified triangular microcantilever. The deflection enhancement increases as the ?-assembly's free length decreases for various types of force loading conditions.
    Type: Application
    Filed: September 28, 2011
    Publication date: July 5, 2012
    Inventors: Kambiz Vafai, Abdul Rahlm A. Khaled
  • Publication number: 20120174269
    Abstract: A metal tip (1) for scanning probe applications is provided. The tip (1) has an axial extension (I), a radial extension (d), a pointy section (B) that extends axially from a section of maximum radial extension (5) to an atomically sharp end (9), and a blunt section (A) that extends axially from the section of maximum radial extension (5) to a blunt end (7), where the axial extension of the pointy section (B) is larger than the axial extension of the blunt section (A) The metal tip (1) has a mass of 10 ?g or less.
    Type: Application
    Filed: August 2, 2010
    Publication date: July 5, 2012
    Applicant: SPECS SURFACE NANO ANALYSIS GMBH
    Inventor: Erik Laegsgaard
  • Publication number: 20120167262
    Abstract: Disclosed are methods of lithography using a tip array having a plurality of pens attached to a backing layer, where the tips can comprise a metal, metalloid, and/or semi-conducting material, and the backing layer can comprise an elastomeric polymer. The tip array can be used to perform a lithography process in which the tips are coated with an ink (e.g., a patterning composition) that is deposited onto a substrate upon contact of the tip with the substrate surface. The tips can be easily leveled onto a substrate and the leveling can be monitored optically by a change in light reflection of the backing layer and/or near the vicinity of the tips upon contact of the tip to the substrate surface.
    Type: Application
    Filed: June 4, 2010
    Publication date: June 28, 2012
    Applicant: Northwestern University
    Inventors: Chad A. Mirkin, Wooyoung Shim, Adam B. Braunschweig, Xing Liao, Jinan Chai, Jong Kuk Lim, Gengfeng Zheng, Zijian Zheng
  • Patent number: 8209768
    Abstract: A method of manufacturing an SPM probe having a support element, a cantilever, and a scanning tip on an underside of the cantilever, and having a mark located on the top side of the cantilever opposite the scanning tip. The mark on the top side of the cantilever is located exactly opposite the scanning tip on the underside of the cantilever. This makes it possible to identify the exact position of the scanning tip in the scanning probe microscope from the upward-pointing top side of the cantilever, which significantly simplifies the alignment of the SPM probe. The support element with the cantilever may be prefabricated conventionally and the scanning tip and the mark are then produced on the cantilever in a self-aligning way by means of a particle-beam-induced material deposition based on a gas-induced process.
    Type: Grant
    Filed: October 9, 2009
    Date of Patent: June 26, 2012
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Oliver Krause, Mathieu Burri, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer
  • Publication number: 20120121935
    Abstract: At least two thin pieces, each of which is composed of a structure having conductor layers and dielectric layers laminated therein, are stacked such that those layers intersect each other and that the edges of the conductor layers face with a gap, and the stacked structure is cut along a dividing plane passing the intersecting section of the layers or the vicinity of the intersecting section and dividing the intersection angle of the layers to produce a probe. A magnetic head is produced using magnetic layers as conductor layers.
    Type: Application
    Filed: June 25, 2010
    Publication date: May 17, 2012
    Applicant: NATIONAL UNIVERSITY CORPORATION HOKKAIDO UNIVERSITY
    Inventors: Akira Ishibashi, Hideo Kaiju
  • Publication number: 20120117696
    Abstract: An integrated coupon structure for atom probe tomography (APT) analysis includes a base portion and an array of microtip posts protruding from the base portion. Both the base portion and the microtip posts formed from a same metal material, and the microtip posts being shaped at an apex thereof so as to be adapted to receive a sample attached thereto.
    Type: Application
    Filed: November 9, 2010
    Publication date: May 10, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael Hatzistergos, Christopher M. Molella, Paul Ronsheim, Matthew F. Stanton
  • Publication number: 20120090058
    Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
    Type: Application
    Filed: October 18, 2011
    Publication date: April 12, 2012
    Inventor: Chung Hoon Lee
  • Patent number: 8104332
    Abstract: To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 ?m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: January 31, 2012
    Assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
    Inventors: Kouji Koyama, Toshiro Kotaki, Kazuhiko Sunagawa
  • Patent number: 8046843
    Abstract: An instrument includes a probe having a porous tip, a tip positioning apparatus to position the tip with respect to a sample material, a probe positioning apparatus to position the probe and sample material with respect to each other, and a controller. The controller controls the probe positioning apparatus in positioning the probe over the sample and controls the tip positioning apparatus in lowering the tip into the sample material to produce an interaction between the porous tip and the sample material.
    Type: Grant
    Filed: April 14, 2009
    Date of Patent: October 25, 2011
    Assignee: General Nanotechnology LLC
    Inventor: Victor B. Kley
  • Patent number: 8028567
    Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: October 4, 2011
    Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.
    Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
  • Patent number: 8020216
    Abstract: Probe structures and fabrication techniques are described. The described probe structures can be used as probes for various applications such as conductance measurement probes, field emitter probes, nanofabrication probes, and magnetic bit writing or reading probes.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: September 13, 2011
    Assignee: The Regents of the University of California
    Inventor: Sungho Jin
  • Patent number: 8011016
    Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: August 30, 2011
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Christoph Richter
  • Publication number: 20110203021
    Abstract: The present invention relates to SPM nanoprobes and the preparation method thereof, more particularly, to SPM nanoprobes comprising a spheroid deposit capped-nanoneedle bonded to one end of a mother tip, wherein the spheroid deposit is formed by particle beam induced deposition and is characterized in that the ratio of the diameter of the spheroid deposit to that of the nanoneedle is in the range of 1.5 to 8.5. The SPM nanoprobe according to the present invention is capable of imaging or measuring an irregularly curved or complicated surface, pattern and/or a frictional or adhesive force thereof and controlling size of a spheroid deposit formed at the end portion of nanoneedle and the ratio of the diameter of the spheroid deposit to that of the nanoneedle arbitrarily.
    Type: Application
    Filed: July 31, 2009
    Publication date: August 18, 2011
    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
    Inventors: Sang Jung An, Buong Chon Park, Yung-ho Kahng, Jin Ho Choi, Kwang Hoon Jeong
  • Patent number: 7997123
    Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: August 16, 2011
    Assignee: Northwestern University
    Inventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
  • Patent number: 7997125
    Abstract: A miniaturized spring element is intended to be particularly suitable for use as a beam probe or cantilever for detecting atomic or molecular forces, in particular in an atomic force microscope, and, to this end, is intended to make it possible to detect its deflection in a particularly reliable manner and with high resolution. For this purpose, the spring element contains a basic body which is formed from a matrix containing embedded nanoparticles or defects. The spring element is produced using the principle of local deposition with focused energetic particles or electromagnetic waves or by pyrolytically induced deposition.
    Type: Grant
    Filed: August 1, 2008
    Date of Patent: August 16, 2011
    Assignees: Nanoscale Systems, Nanoss GmbH, Johann Wolfgang Goethe-Universitaet
    Inventors: Alexander Kaya, Michael Huth