Non-spm Analyzing Devices, E.g., Scanning Electron Microscope [sem], Spectrometer Or Optical Microscope (epo) Patents (Class 850/9)
  • Patent number: 10600616
    Abstract: In one embodiment, an apparatus to treat a substrate may include an extraction plate to extract a plasma beam from a plasma chamber and direct the plasma beam to the substrate. The plasma beam may comprise ions forming a non-zero angle of incidence with respect to a perpendicular to a plane of the substrate; and a gas outlet system disposed outside the plasma chamber, the gas outlet system coupled to a gas source and arranged to deliver to the substrate a reactive gas received from the gas source, wherein the reactive gas does not pass through the plasma chamber.
    Type: Grant
    Filed: September 6, 2018
    Date of Patent: March 24, 2020
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell, Richard John Hertel, Alex Kontos
  • Patent number: 10043634
    Abstract: According to one embodiment, an inspection apparatus includes an irradiation device irradiating an inspection target substrate with multiple beams, a detector detecting each of a plurality of charged particle beams formed by charged particles emitted from the inspection target substrate as an electrical signal, and a comparison processing circuitry performing pattern inspection by comparing image data of a pattern formed on the inspection target substrate, the pattern being reconstructed in accordance with the detected electrical signals, and reference image data. The detector includes a plurality of detection elements that accumulate charges, and a detection circuit that reads out the accumulated charges. The plurality of detection elements are grouped into a plurality of groups.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: August 7, 2018
    Assignee: NuFlare Technology, Inc.
    Inventor: Munehiro Ogasawara
  • Patent number: 10002740
    Abstract: An electron beam inspection device includes: a primary electron optical system that irradiates the surface of a sample with an electron beam; and a secondary electron optical system that gathers secondary electrons emitted from the sample and forms an image on the sensor surface of a detector. An electron image of the surface of the sample is obtained from a signal detected by the detector, and the sample is inspected. A cylindrical member that is formed with conductors stacked as an inner layer and an outer layer, and an insulator stacked as an intermediate layer is provided inside a lens tube into which the secondary electron optical system is incorporated. An electron orbital path is formed inside the cylindrical member, and the members constituting the secondary electron optical system are arranged outside the cylindrical member.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: June 19, 2018
    Assignee: EBARA CORPORATION
    Inventors: Masahiro Hatakeyama, Ryo Tajima, Kenichi Suematsu, Kenji Watanabe, Yasushi Toma, Kenji Terao, Takeshi Murakami
  • Patent number: 9990737
    Abstract: An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.
    Type: Grant
    Filed: December 12, 2014
    Date of Patent: June 5, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dieter Weber, Markus Waiblinger
  • Patent number: 9966226
    Abstract: A cross-section processing and observation method performed by a cross-section processing and observation apparatus comprises a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections. In a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material or of a non-specified material that is different from a pre-specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: May 8, 2018
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Atsushi Uemoto, Xin Man, Tatsuya Asahata
  • Patent number: 9829442
    Abstract: Disclosed is a method of inspecting a defect present at a surface portion of a photomask blank which includes an optical film, and a thin film. The method includes: selecting and designating an inspection treatment procedure and a criterion for determination of rugged shape of the defect which correspond to modes of the optical film and the thin film of the photomask blank; applying inspection light to a region including the defect while maintaining a distance between the defect and an objective lens of an inspecting optical system, based on the designated inspection treatment procedure, and collecting reflected light from the region irradiated with the inspection light, as a magnified image of the region, through the inspecting optical system; and determining the rugged shape of the defect, from light intensity distribution of the magnified image, based on the designated criterion for determination.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: November 28, 2017
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Tsuneo Terasawa, Atsushi Yokohata, Daisuke Iwai, Takahiro Kishita, Hiroshi Fukuda
  • Patent number: 9652834
    Abstract: A computer-implemented method for viewing images on an interactive computing device comprises displaying an image from a stack comprising a display image and at least one compressed sub-image of nominally the same scene, each of the sub-images of the stack having been acquired at respective focal distances. Responsive to a user selecting a portion of the displayed image, the selected portion is mapped to a corresponding mapped portion of a sub-image within the stack according to the difference in focal distances between the displayed image and the sub-image. At least one row of compressed image blocks of the at least one sub-image extending across the mapped portion; and a reference value for a point in the compressed image stream of the sub-image preceding the row of compressed image blocks is determined.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: May 16, 2017
    Assignee: FotoNation Limited
    Inventors: Valentin Mocanu, Petronel Bigioi, Peter Corcoran, Christopher Dainty, Ferenc Papai
  • Patent number: 9527732
    Abstract: In certain embodiments, a probe scans a surface to produce a first scan. The first scan is used to estimate a vertical offset for scanning the surface to produce a second scan. In certain embodiments, an AFM device engages a probe to a surface using a piezo voltage. The probe scans the surface to produce a first scan. The first scan is used to estimate a vertical offset such that the probe uses the piezo voltage to engage the surface for a second scan at a different vertical position.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: December 27, 2016
    Assignee: SEAGATE TECHNOLOGY LLC
    Inventors: Huiwen Liu, Peter Gunderson, Lin Zhou
  • Patent number: 9395388
    Abstract: The subject matter described herein includes methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy. One method includes applying an alternating current (AC) bias and a direct current (DC) bias to an atomic force microscopy cantilever, wherein the AC bias has a frequency greater than a fundamental resonance frequency of the cantilever. The method further includes mechanically vibrating the cantilever at a frequency different from the frequency of the AC bias. The method further includes physically and electrostatically scanning a sample in the same pass using the cantilever while vibrating the cantilever and applying the AC and DC biases to the cantilever, and generating a topology image of the sample from the physical scanning and an electrostatic image of charged material under or on a surface of the sample from the electrostatic scanning.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: July 19, 2016
    Assignee: The University of North Carolina at Chapel Hill
    Inventors: Dong Wu, Dorothy Erie
  • Patent number: 9261360
    Abstract: Disclosed is a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. To achieve this, the charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308) and at the same time acquires pattern information (314) using components of a frame image, such as a single frame image or subframe image, as a separated image (309, 310).
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: February 16, 2016
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Nobuhiro Okai, Yasunari Sohda, Junichi Tanaka
  • Patent number: 9236217
    Abstract: A sample observation method uses a charged particle beam apparatus comprising a charged particle optical column irradiating a charged particle beam, a vacuum chamber, and a sample chamber being capable of storing a sample. The method includes maintaining a pressure of the sample chamber higher than that of the vacuum chamber by a thin film which permits the charged particle beam to be transmitted, determining a relation between a height of a lower surface of the thin film and a height of a lower end of a lens barrel of an optical microscope, measuring a distance between the sample and the lens barrel, and setting a distance between the sample and thin film based on the relation and the distance.
    Type: Grant
    Filed: December 5, 2014
    Date of Patent: January 12, 2016
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Yusuke Ominami, Mami Konomi, Sukehiro Ito, Tomohisa Ohtaki, Shinsuke Kawanishi
  • Patent number: 9184025
    Abstract: A method for Transmission Electron Microscopy (TEM) sample creation. The use of a Scanning Electron Microscope (SEM)—Scanning Transmission Electron Microscope (STEM) detector in the dual-beam focused ion beam (FIB)/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create TEM and STEM samples by using a precise endpoint detection method. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide methods for endpointing sample thinning and methods to partially or fully automate endpointing.
    Type: Grant
    Filed: April 6, 2012
    Date of Patent: November 10, 2015
    Assignee: FEI Company
    Inventors: Richard J. Young, Brennan Peterson, Rudolf Johannes Peter Gerardus Schampers, Michael Moriarty
  • Patent number: 9164043
    Abstract: The detecting method and detecting device provided in the present disclosure is used for detecting an array substrate, including: scanning a defect on the array substrate and determining a size of the defect; generating a switching controlling command according to the size of the defect and switching a lens to a magnification adapted to the size of the defect; and capturing an image of the defect using the switched lens. In the embodiment, by analyzing the size of the scanned defect and switching the camera lens according to the size of the defect, the switched lens is allowed to capture a complete and clear image of the defect, which eases the analysis of the type of the defect, effectively improves the analyzing accuracy of the defect, and improves the monitoring effect of the manufacturing process.
    Type: Grant
    Filed: December 13, 2012
    Date of Patent: October 20, 2015
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Yungyu Lin
  • Patent number: 9105444
    Abstract: An electro-optical inspection apparatus is provided that is capable of preventing adhesion of dust or particles to the sample surface as much as possible. A stage (100) on which a sample (200) is placed is disposed inside a vacuum chamber (112) that can be evacuated to vacuum, and a dust collecting electrode (122) is disposed to surround a periphery of the sample (200). The dust collecting electrode (122) is applied with a voltage having the same polarity as a voltage applied to the sample (200) and an absolute value that is the same or larger than an absolute value of the voltage. Thus, because dust or particles such as particles adhere to the dust collecting electrode (122), adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber containing the stage, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: August 11, 2015
    Assignee: EBARA CORPORATION
    Inventors: Kenji Watanabe, Masahiro Hatakeyama, Yoshihiko Naito, Tatsuya Kohama, Kenji Terao, Takeshi Murakami, Takehide Hayashi, Kiwamu Tsukamoto, Hiroshi Sobukawa, Norio Kimura
  • Patent number: 9091133
    Abstract: Systems and methods are provided for swellable material activation and monitoring in a subterranean well. A sensor system for use in a subterranean well includes a swellable material, and at least one sensor which is displaced to a wellbore surface in response to swelling of the swellable material. Another sensor system includes a sensor which detects swelling of a swellable material. A swellable well tool system includes a base pipe, a swellable material on an exterior of the base pipe, and eccentric weighting for inducing rotation of the swellable material about a longitudinal axis of the base pipe.
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: July 28, 2015
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Benjamin B. Stewart, Rutger Evers, Roger L. Schultz, Tom Rune Koloy, John C. Gano
  • Patent number: 9080945
    Abstract: A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections, wherein, in a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.
    Type: Grant
    Filed: November 13, 2013
    Date of Patent: July 14, 2015
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventors: Atsushi Uemoto, Xin Man, Tatsuya Asahata
  • Patent number: 9082585
    Abstract: An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.
    Type: Grant
    Filed: November 27, 2009
    Date of Patent: July 14, 2015
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Go Kotaki, Atsushi Miyamoto, Ryo Nakagaki, Takehiro Hirai
  • Patent number: 9048075
    Abstract: A time-of-flight type mass spectrometer in which, at the time when ions are generated by irradiating a sample with a laser beam, an extraction electric field having a potential gradient that decreases gradually from a sample plate toward an extraction electrode is formed. Ions are roughly separated in accordance with the m/z in the extraction region due to the effect of this electric field, and ions with a large m/z remain near the sample. The voltages applied to the sample plate and an auxiliary electrode are increased after a delay time has passed so as to form an acceleration electric field having a potential gradient with a polygonal line pattern. Since this electric field is similar to an ideal potential gradient curve, it is possible to provide the ions with appropriate potential energy changes for each m/z, improving resolution by appropriately realizing energy convergence over a wide m/z range.
    Type: Grant
    Filed: January 14, 2014
    Date of Patent: June 2, 2015
    Assignee: SHIMADZU CORPORATION
    Inventor: Kei Kodera
  • Patent number: 9009861
    Abstract: Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.
    Type: Grant
    Filed: June 24, 2011
    Date of Patent: April 14, 2015
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Byong Chon Park, Ju Youb Lee, Woon Song, Jin Ho Choi, Sang Jung Ahn, Joon Lyou, Won Young Song, Jae Wan Hong, Seung Hun Baek
  • Patent number: 8884608
    Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: November 11, 2014
    Assignee: Purdue Research Foundation
    Inventors: Corey P. Neu, Babak Ziaie, Teimour Maleki-Jafarabadi, Charilaos Mousoulis
  • Patent number: 8832859
    Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.
    Type: Grant
    Filed: September 18, 2008
    Date of Patent: September 9, 2014
    Inventor: Ali R. Afshari
  • Publication number: 20140237690
    Abstract: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.
    Type: Application
    Filed: October 10, 2012
    Publication date: August 21, 2014
    Applicant: Purdue Research Foundation
    Inventors: Corey P. Neu, Babak Ziaie, Teimour Maleki-Jafarabadi, Charilaos Mousoulis
  • Publication number: 20140223616
    Abstract: The apparatus includes a probe tip configured to scan a substrate having a defect to attach the defect on the probe tip while scanning the substrate, a cantilever configured to integrate a holder holding at least one probe tip, a stage configured to secure the substrate, an electromagnetic radiation source configured to generate the electromagnetic radiation beam, and an electromagnetic radiation detector configured to receive the first electromagnetic radiation signal and the second electromagnetic radiation signal. A first electromagnetic radiation signal is generated while an electromagnetic radiation beam focuses on the probe tip. A second electromagnetic radiation signal is generated while the electromagnetic radiation beam focuses on the sample attached on the probe tip. A chemical analysis of the sample is executed by comparing a difference between the first electromagnetic radiation signal and the second electromagnetic radiation signal.
    Type: Application
    Filed: February 1, 2013
    Publication date: August 7, 2014
    Inventor: Taiwan Semiconductor Manufacturing Company, Ltd.
  • Patent number: 8793811
    Abstract: This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: July 29, 2014
    Assignee: Anasys Instruments
    Inventors: Craig Prater, Markus B. Raschke, Sam Berweger
  • Publication number: 20140165236
    Abstract: The invention refers to a method for analyzing a defect of an optical element for the extreme ultra-violet wavelength range comprising at least one substrate and at least one multi-layer structure, the method comprising the steps: (a) determining first data by exposing the defect to ultra-violet radiation, (b) determining second data by scanning the defect with a scanning probe microscope, (c) determining third data by scanning the defect with a scanning particle microscope, and (d) com-bining the first, the second and the third data.
    Type: Application
    Filed: December 20, 2013
    Publication date: June 12, 2014
    Inventors: Michael Budach, Tristan Bret, Klaus Edinger, Thorsten Hofmann
  • Patent number: 8739311
    Abstract: A new method in microscopy is provided which extends the domain of AFM's to nanoscale spectroscopy. Molecular resonance of nanometer features can be detected and imaged purely by mechanical detection of the force gradient between the interaction of the optically driven molecular dipole/multipole and its mirror image in a Platinum coated scanning probe tip. The method is extendable to obtain nanoscale spectroscopic information ranging from infrared to UV and RF.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: May 27, 2014
    Inventors: H. Kumar Wickramasinghe, Indrajith Rajapaksa
  • Patent number: 8723116
    Abstract: A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method includes acquiring, from a plurality of patterns, a pair of images for each pattern; for each pair of images determining a reference critical dimension via an image obtained by a reference instrumentation and determining an empirical threshold applicable to an image obtained by a CD-SEM instrumentation such that the empirical threshold substantially corresponds to the reference critical dimension; determining a threshold applicable to a category of patterns, the threshold being determined from a plurality of empirical thresholds.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: May 13, 2014
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Johann Foucher, Mazan Saied
  • Publication number: 20140130212
    Abstract: Provided is a fusion measurement apparatus which increases or maximizes the reliability of a measurement. The fusion measurement apparatus includes an atomic microscope for measuring a surface of a substrate at an atomic level, an electron microscope for measuring the atomic microscope and the substrate, and at least one electrode which distorts the path of a secondary electron on the substrate covered by a cantilever of the atomic microscope so that the secondary electron proceeds to an electron detector of the electron microscope.
    Type: Application
    Filed: June 24, 2011
    Publication date: May 8, 2014
    Inventors: Byong Chon Park, Ju Youb Lee, Woon Song, Jin Ho Choi, Sang Jung Ahn, Joon Lyou, Won Young Song, Jae Wan Hong, Seung Hun Baek
  • Publication number: 20140123347
    Abstract: Described herein is the analysis of nanomechanical characteristics of cells. In particular, changes in certain local nanomechanical characteristics of ex vivo human cells can correlate with presence of a human disease, such as cancer, as well as a particular stage of progression of the disease. Also, for human patients that are administered with a therapeutic agent, changes in local nanomechanical characteristics of ex vivo cells collected from the patients can correlate with effectiveness of the therapeutic agent in terms of impeding or reversing progression of the disease. By exploiting this correlation, systems and related methods can be advantageously implemented for disease state detection and therapeutic agent selection and monitoring.
    Type: Application
    Filed: January 3, 2014
    Publication date: May 1, 2014
    Applicant: The Regents of the University of California
    Inventors: James K. Gimzewski, Sarah E. Cross, Yusheng Jin, Jianyu Rao
  • Patent number: 8713711
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: April 29, 2014
    Assignee: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Publication number: 20140090117
    Abstract: The magnetic head inspection method includes, exciting the cantilever of a magnetic force microscope at a predetermined frequency, the cantilever being provided with a magnetic probe on the end thereof, floating the magnetic probe over the writing head of the magnetic head and two-dimensionally scanning a search range, detecting the specific position of the writing head based on the search two-dimensional magnetic field intensity of the writing head with exciting state of the cantilever in the two-dimensional scan, setting a shape detection range smaller than the search range for detecting the shape of the writing head based on the specific position, and floating the magnetic probe over the writing head with exciting state of the cantilever, detecting the shape of the writing head by detecting the detection two-dimensional magnetic field intensity of the writing head in the two-dimensional scan.
    Type: Application
    Filed: August 15, 2013
    Publication date: March 27, 2014
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Teruaki TOKUTOMI, Tsuneo NAKAGOMI, Akira TOBITA, Norimitsu MATSUSITA
  • Patent number: 8656510
    Abstract: An apparatus, system, and method of integrating atomic force microscopy (AFM) and fluorescence microscopy (FM). One particular application is to simultaneous single molecular fluorescence with AFM force spectroscopy. Included is a methodology to align the AFM tip and a molecule or other nanoscale object with high accuracy.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: February 18, 2014
    Assignee: Iowa State University Research Foundation, Inc.
    Inventors: Sanjeevi Sivasankar, Hui Li
  • Publication number: 20130333077
    Abstract: An embodiment includes an integrated microscope including scanning probe microscopy (SPM) hardware integrated with optical microscopy hardware, and other embodiments include related methods and devices.
    Type: Application
    Filed: February 23, 2012
    Publication date: December 12, 2013
    Applicant: RHK Technology , Inc.
    Inventors: Ryan Murdick, Lukas Novotny
  • Patent number: 8601609
    Abstract: Provided is a friction force microscope that can measure a friction force by a cantilever in a quantitative manner. The friction force microscope includes a friction force calculating mechanism that calculates an effective probe height and a torsional spring constant of the cantilever from bending sensitivity determined from displacement information in a bending direction of the cantilever and torsional sensitivity determined from displacement information in a torsional direction of the cantilever, respectively, so as to use the calculated values for calculating the friction force.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: December 3, 2013
    Assignee: SII NanoTechnology Inc.
    Inventors: Masatoshi Yasutake, Masafumi Watanabe
  • Patent number: 8549661
    Abstract: An apparatus for performing magnetic resonance force microscopy on one or more large area samples comprising a base plate, one or more heat sink plates coupled to the base plate, one or more suspension mechanisms coupled to the base plate and the heat sink plates, a probe head suspended from the one or more suspension mechanisms for scanning the one or more samples and a sample cylinder comprising a sample stage coupled to the probe head for sample positioning and an outer drum for isolating the sample stage.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: October 1, 2013
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventor: Doran Smith
  • Patent number: 8533861
    Abstract: Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: September 10, 2013
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: William P. King, Craig Prater, Byeonghee Lee
  • Patent number: 8528111
    Abstract: A method for positioning a tip of an atomic force microscope relative to a intracellular target site in a cell is provided. In general terms, the method comprises: a) positioning a fluorescent tip of an atomic force microscope over a cell comprising a fluorescent intracellular target site so that said tip is above target site; b) moving the tip toward said target site while obtaining images of the distal end of said tip and/or the target site using a fluorescence microscope; and c) arresting the movement of the tip when the target site and the distal end of the tip are both in focus in the fluorescence microscope. A microscope system for performing the method is also provided.
    Type: Grant
    Filed: July 5, 2011
    Date of Patent: September 3, 2013
    Assignee: Agilent Technologies, Inc.
    Inventors: Nazumi Alice Yamada, Bo U. Curry, Chriatian Rankl
  • Publication number: 20130198913
    Abstract: An apparatus for scanning over a surface of an arbitrarily sized sample in magnetic resonance force microscopy comprising a cantilever for holding a magnetic particle at the cantilever tip, an RF antenna, positioned around the cantilever, for emitting an RF magnetic field across a portion of the sample causing spin of particles in the sample to reverse attracting and opposing the magnetic particle at the cantilever tip, an optical fiber, positioned close to the cantilever tip, for measuring displacements of the cantilever tip where the RF antenna, cantilever, magnetic particle and optical fiber are in fixed positions relative to each other and the sample is positionable according to a sample stage.
    Type: Application
    Filed: January 30, 2012
    Publication date: August 1, 2013
    Applicant: U.S. Army Research Laboratory
    Inventor: Doran Smith
  • Patent number: 8495761
    Abstract: According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage.
    Type: Grant
    Filed: August 10, 2011
    Date of Patent: July 23, 2013
    Assignee: Akita Prefecture
    Inventors: Yotsugi Shibuya, Shigeki Mori, Kazuto Miyawaki, Akihiro Naganawa
  • Publication number: 20130180018
    Abstract: Methods and processes for quantitatively determining the ratio of the metallic to semiconductor tubes in the sample single-wall carbon nanotubes is provided. The single-walled carbon nanotubes can be sonicated to debundle the bulk material. The debundled SWNTs can be coated with a polymer, such as sulfonated polystyrene-block-poly(ethylene-ran-butylene)-block-polystyrene (SDPS), and the coated SWNTs can be deposited on a substrate. The total number of tubes can be determined by atomic force microscopy (AFM). The semiconducting nanotubes can be determined by photoluminescence spectroscopy. The combination of photoluminescence and AFM measurements provides a quantitative ratio of the metallic to semiconductor tubes in the sample.
    Type: Application
    Filed: July 29, 2010
    Publication date: July 11, 2013
    Applicant: Honda Motor Co., Ltd
    Inventors: Avetik R. Harutyunyan, Oleg Kuznetsov
  • Publication number: 20130145506
    Abstract: In some embodiments, a system for performing microscopy at hyperbaric pressures includes a hyperbaric chamber that defines a sealed interior space, and an imaging system contained within the interior space that is operated from outside of the hyperbaric chamber to image materials within the interior space at hyperbaric pressures.
    Type: Application
    Filed: November 19, 2012
    Publication date: June 6, 2013
    Inventors: Jay B. Dean, Dominic P. D'agostino, Stephen Reimers, Ramesh K. Dixit
  • Patent number: 8445846
    Abstract: The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: May 21, 2013
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventor: Juergen Frosien
  • Patent number: 8438660
    Abstract: The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.
    Type: Grant
    Filed: May 26, 2010
    Date of Patent: May 7, 2013
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Motoyuki Hirooka, Makoto Okai
  • Patent number: 8434161
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8434160
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8418261
    Abstract: It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: April 9, 2013
    Assignees: Nippon Telegraph and Telephone Corporation, Isis Innovation Limited
    Inventors: Nahoko Kasai, Yuichi Harada, Chandra Sekar Ramanujan
  • Patent number: 8368017
    Abstract: The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample.
    Type: Grant
    Filed: December 21, 2006
    Date of Patent: February 5, 2013
    Assignee: JPK Instruments AG
    Inventors: Torsten Jahnke, Michael Richard Haggerty
  • Patent number: 8353059
    Abstract: The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light reflected from the object surface, the scanning probe comprising (a) stripe generating means (14) for generating and emitting a light stripe (55); (b) a camera (16) comprising an imaging sensor having an array of pixels to detect the light stripe reflected from the object surface; (c) means for adjusting the intensity of the light stripe (55) during acquisition of the frame, in dependence upon the intensities detected by the camera (16). It also relates to a means to modify the stripe length, a scanner with separate compartment for the processing means, and an attachable dust cover for a scanner.
    Type: Grant
    Filed: July 6, 2011
    Date of Patent: January 8, 2013
    Assignee: Metris N.V.
    Inventors: Stephen James Crampton, Peter Champ
  • Patent number: 8353061
    Abstract: To date, the probes of scanning near-field optical microscopes were aimed at creating electromagnetic field characteristics that are maximally localized near a nano-sized point (miniature apertures and tips, fluorescent nano-particles and molecules, dielectric and metal corners). Alternatively, the probe field, which is distributed within a larger area, can ensure the super-resolution as well. For this purpose, the field spectrum should be enriched with high spatial frequencies corresponding to small sample dimensions. As examples of such near-field probes, we propose and theoretically study the models of optical fibers with end-faces containing sharp linear edges and randomly distributed nanoparticles. These probes are more robust than the conventional probes and their fabrication is not concerned with nanoscale precision. The probes enable waveguiding of light to and from the sample with marginal losses distributing and utilizing the incident light more completely.
    Type: Grant
    Filed: May 4, 2009
    Date of Patent: January 8, 2013
    Assignee: OFS Fitel, LLC
    Inventor: Mikhail Sumetsky
  • Patent number: 8286260
    Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques and includes: (A) an atmospheric pressure or near-atmospheric pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated chamber; (E) an atmospheric pressure interface for connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument; (G) a recording device for recording topography and mass spectrum measurements made during scanning of the sample with the near-field probe; (H) a plotting device for plotting said topography and mass spectrum measurements as separate x-y mappings; and (I) an imaging device for providing images of the x-y mappings.
    Type: Grant
    Filed: May 19, 2010
    Date of Patent: October 9, 2012
    Assignee: The George Washington University
    Inventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi