Non-spm Analyzing Devices, E.g., Scanning Electron Microscope [sem], Spectrometer Or Optical Microscope (epo) Patents (Class 850/9)
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Patent number: 8445846Abstract: The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.Type: GrantFiled: December 13, 2004Date of Patent: May 21, 2013Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbHInventor: Juergen Frosien
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Patent number: 8438660Abstract: The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.Type: GrantFiled: May 26, 2010Date of Patent: May 7, 2013Assignee: Hitachi High-Technologies CorporationInventors: Motoyuki Hirooka, Makoto Okai
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Patent number: 8434160Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.Type: GrantFiled: July 2, 2012Date of Patent: April 30, 2013Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of NevadaInventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
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Patent number: 8434161Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.Type: GrantFiled: July 2, 2012Date of Patent: April 30, 2013Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of NevadaInventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
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Patent number: 8418261Abstract: It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.Type: GrantFiled: June 27, 2008Date of Patent: April 9, 2013Assignees: Nippon Telegraph and Telephone Corporation, Isis Innovation LimitedInventors: Nahoko Kasai, Yuichi Harada, Chandra Sekar Ramanujan
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Patent number: 8368017Abstract: The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample.Type: GrantFiled: December 21, 2006Date of Patent: February 5, 2013Assignee: JPK Instruments AGInventors: Torsten Jahnke, Michael Richard Haggerty
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Patent number: 8353059Abstract: The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light reflected from the object surface, the scanning probe comprising (a) stripe generating means (14) for generating and emitting a light stripe (55); (b) a camera (16) comprising an imaging sensor having an array of pixels to detect the light stripe reflected from the object surface; (c) means for adjusting the intensity of the light stripe (55) during acquisition of the frame, in dependence upon the intensities detected by the camera (16). It also relates to a means to modify the stripe length, a scanner with separate compartment for the processing means, and an attachable dust cover for a scanner.Type: GrantFiled: July 6, 2011Date of Patent: January 8, 2013Assignee: Metris N.V.Inventors: Stephen James Crampton, Peter Champ
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Patent number: 8353061Abstract: To date, the probes of scanning near-field optical microscopes were aimed at creating electromagnetic field characteristics that are maximally localized near a nano-sized point (miniature apertures and tips, fluorescent nano-particles and molecules, dielectric and metal corners). Alternatively, the probe field, which is distributed within a larger area, can ensure the super-resolution as well. For this purpose, the field spectrum should be enriched with high spatial frequencies corresponding to small sample dimensions. As examples of such near-field probes, we propose and theoretically study the models of optical fibers with end-faces containing sharp linear edges and randomly distributed nanoparticles. These probes are more robust than the conventional probes and their fabrication is not concerned with nanoscale precision. The probes enable waveguiding of light to and from the sample with marginal losses distributing and utilizing the incident light more completely.Type: GrantFiled: May 4, 2009Date of Patent: January 8, 2013Assignee: OFS Fitel, LLCInventor: Mikhail Sumetsky
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Patent number: 8286260Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques and includes: (A) an atmospheric pressure or near-atmospheric pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated chamber; (E) an atmospheric pressure interface for connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument; (G) a recording device for recording topography and mass spectrum measurements made during scanning of the sample with the near-field probe; (H) a plotting device for plotting said topography and mass spectrum measurements as separate x-y mappings; and (I) an imaging device for providing images of the x-y mappings.Type: GrantFiled: May 19, 2010Date of Patent: October 9, 2012Assignee: The George Washington UniversityInventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi
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Publication number: 20120185977Abstract: A scanning probe microscopy instrument includes a cantilevered tip that has a nanowire light emitting diode (LED).Type: ApplicationFiled: January 19, 2011Publication date: July 19, 2012Inventors: Kristine A. Bertness, Norman A. Sanford, Pavel Kabos, Thomas M. Wallis
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Patent number: 8220067Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.Type: GrantFiled: March 29, 2010Date of Patent: July 10, 2012Assignee: Board of Regents of the Nevada System of Higher EducationInventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
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Patent number: 8212227Abstract: An electron beam apparatus equipped with a height detection system includes an electron beam unit emitting an electron beam to the specimen, and a height detection system for detecting height of the specimen which is set on a table. The height detection system includes an illumination system configured to direct first and second beams of light through a mask with a multi-slit pattern to a surface of the specimen at substantially opposite azimuth angles and at substantially equal angles of incidence, first and second detectors which respectively detect first and second multi-slit images of the first and second beams reflected from the specimen and generate output signals thereof, and a device which receives the output signals and generates a comparison signal which is responsive to the height of the specimen. An objective lens of the electron beam unit is controlled in accordance with the comparison signal.Type: GrantFiled: April 5, 2010Date of Patent: July 3, 2012Assignee: Hitachi, Ltd.Inventors: Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami
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Publication number: 20120090056Abstract: The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.Type: ApplicationFiled: May 26, 2010Publication date: April 12, 2012Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Motoyuki Hirooka, Makoto Okai
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Patent number: 8117668Abstract: The present invention relates to a scanning probe (2) for capturing data from a plurality of points on the surface of an object by irradiating the object with a light stripe and detecting light reflected from the object surface, the scanning probe comprising (a) stripe generating means (14) for generating and emitting a light stripe (55); (b) a camera (16) comprising an imaging sensor having an array of pixels to detect the light stripe reflected from the object surface: (c) means for adjusting the intensity of the light stripe (55) during acquisition of the frame, in dependence upon the intensities detected by the camera (16). It also relates to a means to modify the stripe length, a scanner with separate compartment for the processing means, and an attachable dust cover for a scanner.Type: GrantFiled: April 26, 2007Date of Patent: February 14, 2012Inventors: Stephen James Crampton, Peter Champ
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Patent number: 8108943Abstract: There is provided in one embodiment of the invention a method for analyzing a sample material using surface enhanced spectroscopy. The method comprises the steps of imaging the sample material with an atomic force microscope (AFM) to select an area of interest for analysis, depositing nanoparticles onto the area of interest with an AFM tip, illuminating the deposited nanoparticles with a spectrometer excitation beam, and disengaging the AFM tip and acquiring a localized surface enhanced spectrum. The method may further comprise the step of using the AFM tip to modulate the spectrometer excitation beam above the deposited nanoparticles to obtain improved sensitivity data and higher spatial resolution data from the sample material. The invention further comprises in one embodiment a system for analyzing a sample material using surface enhanced spectroscopy.Type: GrantFiled: November 26, 2008Date of Patent: January 31, 2012Assignee: California Institute of TechnologyInventor: Mark S. Anderson
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Patent number: 7977633Abstract: The invention concerns a phase plate, in particular for an electron microscope, which is disposed in an electron beam path (4), comprises at least one thin film (8, 8a-h), which thin film is at least partially permeable to electron beams, wherein the thin film (8, 8a-h) comprises electrically conductive material, is connected to a predeterminable electrical voltage (12, 12a-e) and is equipped with at least one through-hole (9, 9a-c).Type: GrantFiled: August 27, 2008Date of Patent: July 12, 2011Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e. V.Inventors: Physiker Bastian Barton, Rasmus R. Schroeder
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Publication number: 20110113516Abstract: An atomic force microscope is provided that includes a micro thermal analyzer with a tip. The micro thermal analyzer is configured for obtaining topographical data from a sample. A raman spectrometer is included and is configured for use in obtaining chemical data from the sample.Type: ApplicationFiled: April 12, 2008Publication date: May 12, 2011Inventors: Samuel D. Fink, Fernando F. Fondeur
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Patent number: 7928409Abstract: A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.Type: GrantFiled: October 11, 2006Date of Patent: April 19, 2011Assignee: The United States of America as represented by the Secretary of CommerceInventors: Thomas T. Perkins, Gavin M. King, Ashley R. Carter
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Publication number: 20110078834Abstract: The present invention provides a microcantilever capable of independently measuring and/or controlling the electrical potential and/or temperature of a surface with nanometer scale position resolution. The present invention also provides methods of manipulating, imaging, and/or mapping a surface or the properties of a surface with a microcantilever. The microcantilevers of the present invention are also capable of independently measuring and/or controlling the electrical potential and/or temperature of a gas or liquid. The devices and methods of the present invention are useful for applications including gas, liquid, and surface sensing, micro- and nano-fabrication, imaging and mapping of surface contours or surface properties.Type: ApplicationFiled: January 30, 2009Publication date: March 31, 2011Applicant: The Board of Trustees of the University of IllinoisInventor: William P. King
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Patent number: 7858935Abstract: A method and system for conducting event-streamed spectrum imaging concurrently collects electron and spectral signals resulting from a raster scan of a sample. The signals are formatted and assembled as a packet stream. The packet stream is transmitted to a host where it is buffered, stored and processed.Type: GrantFiled: June 28, 2007Date of Patent: December 28, 2010Assignee: 4Pi Analysis, Inc.Inventors: Scott David Davilla, Jayanthi Subramanian Suryanarayanan
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Publication number: 20100229263Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probeType: ApplicationFiled: May 19, 2010Publication date: September 9, 2010Applicant: The George Washington UniversityInventors: Akos VERTES, Mark E. Reeves, Fatah Kashanchi
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Patent number: 7770232Abstract: A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.Type: GrantFiled: March 16, 2006Date of Patent: August 3, 2010Assignee: RikenInventors: Akira Saito, Masakazu Aono, Yuji Kuwahara, Jyunpei Maruyama, Ken Manabe
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Patent number: 7735146Abstract: A system and method for analyzing and imaging a sample containing molecules of interest combines modified MALDI mass spectrometer and SNOM devices and techniques, and includes: (A) an atmospheric-pressure or near-atmospheric-pressure ionization region; (B) a sample holder for holding the sample; (C) a laser for illuminating said sample; (D) a mass spectrometer having at least one evacuated vacuum chamber; (E) an atmospheric pressure interface connecting said ionization region and said mass spectrometer; (F) a scanning near-field optical microscopy instrument comprising a near-field probe for scanning the sample; a vacuum capillary nozzle for sucking in particles which are desorbed by said laser, the nozzle being connected to an inlet orifice of said atmospheric pressure interface; a scanner platform connected to the sample holder, the platform being movable to a distance within a near-field distance of the probe; and a controller for maintaining distance information about a current distance between said probeType: GrantFiled: January 26, 2006Date of Patent: June 8, 2010Assignee: The George Washington UniversityInventors: Akos Vertes, Mark E. Reeves, Fatah Kashanchi
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Patent number: 7723681Abstract: For the purpose of repeatedly observing the bottom of a contact hole with a high aspect ratio, the potential of an electrostatic charge in each of a pattern to be observed and a vicinity of a range to be observed is stabilized by pre-charging a range on which to irradiate a beam of electrons while changing the range on a step-by-step basis.Type: GrantFiled: October 12, 2007Date of Patent: May 25, 2010Assignee: Hitachi High-Technologies CorporationInventors: Yuki Ojima, Satoru Iwama, Akira Ikegami
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Patent number: 7709791Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.Type: GrantFiled: October 15, 2007Date of Patent: May 4, 2010Assignee: Park Systems Corp.Inventors: Hyeong Chan Jo, Hong Jae Lim, Seung Jun Shin, Joon Hui Kim, Yong Seok Kim, Sang-il Park
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Patent number: 7694346Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.Type: GrantFiled: September 30, 2005Date of Patent: April 6, 2010Assignee: Board of Regents of the Nevada System of Higher Education on behalf of the University of NevadaInventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
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Patent number: 7663102Abstract: The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating the emitted charged particles into at least two independent charged particle beams; and an objective lens for focusing the at least two independent charged particle beams, whereby the independent charged particle beams are focused onto the same location within the focal plane.Type: GrantFiled: February 17, 2005Date of Patent: February 16, 2010Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbHInventor: Juergen Frosien
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Patent number: 7663103Abstract: A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of secondary electrons obtained respectively by scanning a first irradiation distance with an electron beam at first magnification, and by scanning a second irradiation distance with an electron beam at second magnification, includes the step of adjusting the second electron beam intensity distribution of the electron beam at the second magnification such that the second electron beam intensity distribution is equal to the first electron beam intensity distribution of the electron beam at first magnification. The second electron beam intensity distribution may be adjusted by increasing or decreasing a second irradiation distance when producing the electron beam intensity distribution.Type: GrantFiled: March 23, 2007Date of Patent: February 16, 2010Assignee: Advantest Corp.Inventors: Masayuki Kuribara, Jun Matsumoto
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Patent number: 7655923Abstract: A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.Type: GrantFiled: November 9, 2004Date of Patent: February 2, 2010Assignees: National University Corporation Nara Institute of Science and Technology, Jeol, Ltd.Inventors: Hiroshi Daimon, Hiroyuki Matsuda, Makoto Kato, Masato Kudo
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Patent number: 7638767Abstract: There is provided an electron microscope which can clearly detect a microscopic unevenness in a sample. According to a scanning electron microscope, when luminance signals from one pair of backscattered electron detectors are given by L and R, and when a luminance signal from a scattered electron detector is given by S, an adjustment value Lc of L and an adjustment value Rc of R are calculated by using primary homogeneous expressions of L, R, and S.Type: GrantFiled: January 19, 2007Date of Patent: December 29, 2009Assignee: Hitachi High-Technologies CorporationInventors: Kohei Yamaguchi, Kenji Obara
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Publication number: 20090242763Abstract: The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.Type: ApplicationFiled: March 27, 2009Publication date: October 1, 2009Applicant: FEI COMPANYInventor: Bart Buijsse
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Patent number: 7591858Abstract: A mirror optic (10) is provided for near-field optical measurement of a specimen (1), wherein the mirror optic (10) has a reflector (11) with the shape of a paraboloid with a paraboloid axis (12) and a focal point (13), which can be illuminated along a first illumination beam path (I), whereby the reflector 11 has at least one edge recess (14) in such a way that the focal point (13) can be illuminated along a second illumination beam path (II) which deviates from the first illumination beam path (I). A near-field microscope with such a mirror optic is also provided.Type: GrantFiled: January 16, 2007Date of Patent: September 22, 2009Assignee: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.Inventors: Fritz Keilmann, Rainer Hillenbrand
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Patent number: 7566888Abstract: A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.Type: GrantFiled: May 23, 2007Date of Patent: July 28, 2009Assignee: TEL Epion Inc.Inventor: David Richard Swenson
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Patent number: 7566873Abstract: One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.Type: GrantFiled: December 14, 2006Date of Patent: July 28, 2009Assignee: KLA-Tencor Technologies CorporationInventors: David Walker, Salam Harb, Vassil Spasov, David Stites, Izzy Lewis, Marian Mankos
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Patent number: 7553334Abstract: For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.Type: GrantFiled: October 23, 2007Date of Patent: June 30, 2009Assignee: Hitachi High-Technologies CorporationInventors: Eiichi Hazaki, Yasuhiro Mitsui, Takashi Furukawa, Hiroshi Yanagita, Susumu Kato, Osamu Satou, Osamu Yamada, Yoshikazu Inada