Abstract: An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position P1 where the semiconductor wafer is passed to a wafer carrying unit from a wafer carrying robot and centers the semiconductor wafer.

Abstract: A Cartesian robot comprises a base member disposed along an x-axis, a transverse member moveably mounted to the base member, and disposed along a y-axis transverse to the x-axis. The robot has a y-carriage for a measurement probe moveably mounted to the transverse member along the y-axis. The x, y, and z axes define a Cartesian coordinate system. The robot includes an innovative structure that achieves high precision with respect to the z-axis by providing a planarized and stable reference surface along the y-axis (vertical axis). The position of the y-carriage with respect to a z-axis is a predictable function of the measured position of the y-carriage on the reference surface, and rigid-body tilt of the reference surface. High accuracy and precision are achieved by utilizing a granite slab for providing the planarized reference surface disposed along the y-axis for the transverse member.

Abstract: A control of a cooperative object-transporting robot which transports an object in cooperation with a man. The robot shares substantially a half of the weight of the object with the man, while the object is kept in a horizontal posture. A force applied to the robot by the object is detected by a force sensor, and based on the signal from the force sensor, a motion instruction is output for the motion components by the rotational force component &tgr;1 around the horizontal axis and the translational force component Fx1 in the horizontal back-and-forth direction, upon setting a gain to reduce the resistance forces of the robot to small values. The translational force component Fy in the direction of the object short axis is constrained so that no translational motion in the direction of the object short axis occurs.

Abstract: A four-degree-of-freedom parallel robot capable of displacing a traveling plate with four degrees of freedom at a high speed and a high acceleration and positioning the traveling plate with high rigidity and high precision. The four-degree-of-freedom parallel robot has four actuators fixed to a base, four parallel linkages each of which is coupled at its upper end to a tip end of an arm of each of the actuators through a kinematic element such as a universal joint, and a traveling plate whose four corners are coupled to lower ends of the parallel linkages through kinematic elements. By controlling the actuators, a main member of the traveling plate is displaced with four degrees of freedom, i.e., translated in all directions and rotated around a predetermined axis. Only axial forces are applied to rods constituting the parallel linkages. Thus, the traveling plate can be positioned at a high speed and with high rigidity as well as high precision.

Abstract: An improved, versatile robot control system comprises a general purpose computer with a general purpose operating system in electronic communication with a real-time computer subsystem. The general purpose computer includes a program execution module to selectively start and stop processing of a program of robot instructions and to generate a plurality of robot move commands. The real-time computer subsystem includes a move command data buffer for storing the plurality of move commands, a robot move module linked to the data buffer for sequentially processing the moves and calculating a required position for a robot mechanical joint. The real-time computer subsystem also includes a dynamic control algorithm in software communication with the move module to repeatedly calculate a required actuator activation signal from a robot joint position feedback signal.

Abstract: A refuelling robot having a robot tower, which can be moved along a plinth, can be swivelled and has extending from it a robot arm with, at its free end, a filling nozzle, has separate fuel lines for the various types of fuel as far as the robot arm, but combines at least some of these lines into a single line for transition into the arm itself and out through the nozzle. In this way all the usual fuel types can be dispensed while at the same time reducing the outlay on fuel lines.

Abstract: A method and apparatus for control of pivoting machine members propelled by linear actuators so as to permit coordinated motion of the pivoting members with translating machine members. Position commands for the pivoting machine members are given in angular units. The propelling linear actuators are controlled by servomechanism control providing position and velocity control. Position measurements for the pivoting members measure linear displacement of the propelling actuator. Position commands for the pivoting members are compensated according to the non-linear relationship between displacement of the propelling actuator and the angular displacement of the pivoting member.

Abstract: Disclosed is a system and method for detecting the position of a wafer with respect to a calibrated reference position. In one embodiment of the invention, sensors are used to detect the edges of the wafer as the wafer is being passed over the sensors. This wafer detection information is then used to calculate the amount by which the wafer is off-centered such that corrections can be made before the wafer is placed onto a destination location.

Abstract: A haptic pointing device includes a plurality of rigid, elongated proximal members, each connected to a separate rigid, elongated distal member through an articulating joint. The other end of each proximal member is coupled to an actuator such as a motor, causing that member to swing within a separate plane perpendicular to the shaft of the motor in response to a control signal. An end-effector is interconnected to the second end of each distal member through an articulating joint, such that as the actuators move the proximal members, the end-effector moves in space. In a preferred embodiment, the device includes at least three proximal members and three distal members, and the end-effector is coupled to a user-graspable element such as a stylus which retains a preferred orientation in space as the members are driven by the actuators.

Abstract: An arm structure for anthropomorphic robots minimizes the occurrence of a singularity state of a shoulder joint assembly while the arm of the anthropomorphic robot is normally working, for thereby allowing the arm to operate smoothly. The position and posture of first through third joints (11), (13), (15) of a shoulder joint assembly (5) and the position of an elbow joint assembly (6) with respect to the third joint (15) are established such that the elbow joint assembly (6) is located above a horizontal plane lying through the point of intersection of the axes (10), (12), (14) of the first through third joints (11), (13), (15), while the shoulder joint assembly (5) is operated into a singularity state wherein the first axis (10) of the first joint (11) and the third axis (14) of the third joint (15) are aligned with each other and the elbow joint assembly (6) is positioned laterally of a torso (1).

Abstract: A method and an apparatus for automatically replacing a used polishing pad in a chemical mechanical polishing system are described. A controller places a mechanical device against the used polishing pad while the pad is on the polishing platen and activates a pad chucking mechanism that affixes the used pad to the mechanical device. The controller then moves the mechanical device and the pad toward a used pad receptacle, where the pad chucking mechanism is deactivated to release the used pad into the receptacle. The controller then places the mechanical device against a clean polishing pad in a clean pad dispenser and reactivates the pad chucking mechanism to affix the clean pad to the mechanical device. The mechanical device and the clean pad are moved toward the platen, where the pad chucking mechanism is deactivated to release the clean polishing pad onto the platen.

Abstract: The present invention relates to a circuit board carrier including a carrier sliding between a conveyor and a holder disposed at the lower part of a main machine. The carrier includes a sliding rail disposed at the top of a main machine above the conveyor and the holder; a sliding base being on the sliding rail by means of a sliding recess thereof; a sliding rod disposed above the sliding base and being vertically spaced to the sliding rail; a sliding seat being slid on the sliding rod by means of a sliding piece and having a shaft post at the top thereof; a pivot sleeve pivoted on the shaft post of the sliding seat by means of a bearing thereof and having a connection groove; a turning arm, one end of which is connected to the connection groove of the pivot sleeve while the other end thereof is connected to a motor and a driving axle of a reduction machine; and a suction unit installed under the sliding base.

Abstract: A control system for a backhoe apparatus is disclosed. Backhoe apparatus control system includes a kinematic optimal control including the augmentation of additional tasks that can be formulated into the optimal control problem. Further, the control system may include a dynamic adaptive control that accounts for the backhoe linkage dynamics. Still further, the control system is configured to control the flow of hydraulic fluid into and out of the hydraulic actuators.

Abstract: In order to register a robot, the operative parts of the robot are placed in a first condition. An image acquiring arrangement carried by the robot is directed towards an item, and the image of that item is acquired and stored. Subsequently the component parts of the robot are moved so that the image acquiring arrangement can acquire a second different image of the item. The process is repeated to acquire data including a plurality of images and, for each image, data concerning the position of the component parts of the robot when the image was acquired.

Abstract: Arm consisting of angularly displaceable linkages (1, 2, 3), such as a manipulator, having a fixed end carried by a support (4) and a free end carrying a tool or workpiece (7), whereby each hinge is provided with controllable blocking means for the purpose of immobilizing said linkages relative to each other, wherein a member counter-balancing the torque is arranged at one or more pivot axes to compensate the weight of said linkages freely movable relative to a hinge towards said free end.

Abstract: An arm structure for anthropomorphic robots minimizes the occurrence of a singularity state of a shoulder joint assembly while the arm of the anthropomorphic robot is normally working, for thereby allowing the arm to operate smoothly. The position and posture of first through third joints (11), (13), (15) of a shoulder joint assembly (5) and the position of an elbow joint assembly (6) with respect to the third joint (15) are established such that the elbow joint assembly (6) is located above a horizontal plane lying through the point of intersection of the axes (10), (12), (14) of the first through third joints (11), (13), (15), while the shoulder joint assembly (5) is operated into a singularity state wherein the first axis (10) of the first joint (11) and the third axis (14) of the third joint (15) are aligned with each other and the elbow joint assembly (6) is positioned laterally of a torso (1).

Abstract: A system and an associated method for positioning a substrate includes transferring a substrate along a path intersecting a plane of a sensor beam; determining a center point and an orientation indicator of the substrate utilizing signals from the sensor beam; and positioning a substrate according to the center point and the orientation indicator of the substrate.

Abstract: The apparatus has four links pivotally coupled together. First and second links each includes a first portion having an angular portion extending therefrom at an angle of between 120-135 degrees. The first link is pivotally coupled to the angular portion of the second link; the third link is pivotally coupled to the second link at about the juncture of its angular portion and its first portion; and the fourth link is pivotally coupled to the third link and to the first link at about the juncture of its angular portion and its first portion. The first portion of the second link is employed for holding a tool or a utility device thereto. A first linear actuator is pivotally coupled to the pivotal connection between the third and fourth links and a second linear actuator is pivotally coupled to the angular portion of the first link.

Abstract: The present invention provides an assembly system employing at least a robotic or automated assembly apparatus to manipulate the components to be assembled and at least a first vision alignment system to align the components prior to their assembly. An adhesive dispense system is provided to connect, attach or otherwise adhere the components together. In a method in accord with the present invention for assembling components, a source of the components is provided is located relative to a global reference system. The components held by the source are then located relative to the global reference system based upon the determined location of the source. An adhesive is dispensed onto a first of the components and a second component is manipulated into an initial attachment position relative to the first component.

Abstract: The present invention is an industrial robot which has a feed screw that can be easily position in relation to the direct-acting guide. It has a power transmission device that can be removed from the supporting frame which the feed screw is left attached to the supporting frame, so that positioning of the feed screw is very easy. As a result if the simplicity in design machining is only required for the attaching surface for the direct-acting guide, the middle plate, the top plate, and the bottom plate, the cost of production is reduced.

Abstract: A gripper housing (16) of a gripper (14) is suspended from two rotatable sliding bars the ends of which are connected to sleeves (50, 51). One of these is provided with a turning wheel (47) meshing with a turning pinion (48) nonrotatably connected with a tong housing (17) rotatably supported on the gripper housing (16). The other is provided with a gripper wheel (33) meshing with a gripper pinion (34) which is connected with gear wheels (38a, 38b) in the tong housing (17) via a gripper bolt (37) passing coaxially through the turning pinion (48). The gear wheels (38a, 38b) mesh with gear racks (52b) on sliders (39a, 39b) which are displaceably supported in the tong housing (17) and have gripping fingers (40a, 40b).

Abstract: An electronic-component mounting system, including a printed-circuit-board supporting device which positions and supports a printed circuit board, a movable table which is movable, relative to the printed-circuit-board supporting device, in at least one of an X direction and a Y direction which are perpendicular to each other and cooperate with each other to define an X-Y plane parallel to a board-support plane on which the printed circuit board is supported by the supporting device, an electronic-component supplying device which is mounted on the movable table and which includes a component-supply portion from which electronic components are supplied one by one, and an electronic-component mounting device which is mounted on the movable table together with the electronic-component supplying device and which receives the electronic components one by one from the component-supply portion of the supplying device and mounts at least one of the electronic components on the printed circuit board positioned and sup

Abstract: A robotic parts handler system for removing containers filled with articles from a sorting, feeding and/or stacking apparatus such as a mail or package sorting apparatus, and moving the container to a selected location for insertion into another conveying system, transport device, carrier, or other apparatus at extremely high speeds.

Abstract: Positioning apparatus to place a reference point at selected locations in a plane. Two carriages are independently mounted to a carriage rail. The rail bears location references and the carriage carry sensors responsive to them to learn their positions along the carriage rail. Guideways and guide rails are mounted in pairs to a respective carriage and to an interface member bearing the reference point. They form an angle between them such that the interface member moves in the plane as a function of the locations of the carriages along the axis and relative to each other. Drivers drive the carriages in response to commands related to the location of the carriages.

Abstract: The robot includes a vertically disposed Y-axis support having an elongated first drive belt and an elongated linear bearing way at one side thereof. A traverse carriage is vertically movably mounted on the Y-axis bearing way and a motor mount is provided on the traverse carriage for movement therewith. The traverse carriage has an X-axis bearing block provided thereon which movably supports an elongated and substantially horizontally disposed X-axis support. The X-axis support has an elongated, flat X-axis drive belt provided thereon positioned between the ends thereof. A drive motor is mounted on the motor mount and has a driven shaft extending horizontally therefrom which is operatively received by a differential drive means. The differential drive means includes an X-axis drive pulley and a Y-axis drive pulley. A Y-axis brake is provided for selective engagement with the Y-axis drive pulley for selectively preventing rotation of the Y-axis drive pulley.

Abstract: A coordinate positioning machine comprises a fixed structure including a table and a supporting frame (314), rigidly connected together. A moveable arm (310) is suspended from the frame by means of three powered telescopic struts (316), each of which is universally pivotally connected to both the arm and the frame. As a consequence the moveable arm is able to move with three rotational degrees of freedom. Movement of the arm with each of these degrees of freedom is constrained by a passive device (340), connected to the arm and the fixed structure, and which eliminates all rotational movement of the arm, while simultaneously permitting translation thereof.

Abstract: An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam.

Abstract: A manipulator having six degrees of freedom includes a moving plate having six moving points arranged with substantial equal angles therebetween, an upper fixed plate having six upper fixed points arranged with substantial equal angles therebetween, the upper fixed plate being positioned above the moving plate and being spaced apart from the moving plate, a lower fixed plate having six lower fixed points arranged with substantial equal angles therebetween, the lower fixed plate being positioned under the moving plate and being spaced apart from the moving plate.

Abstract: A substrate transferring apparatus comprising a substrate support member for supporting a substrate, a base member for holding the substrate support member to be movable horizontally, a lifting member, having one end and another end, for holding the base member at the one end to be rotatable in a horizontal plane, the lifting member being movable upward and downward, and a hold-and-guide member for holding the lifting member at the another end and for guiding the lifting member when the lifting member is moved upward and downward.

Abstract: In order to configure a handling device, provided with an actuator for gripping a work piece, as well as at least two movement axes that are operatively connected to a drive and which allow the actuator to be positioned in different positions on a coordinate system, such that it has a relatively inexpensive design but can still be used for a multitude of purposes, a design is suggested for said handling system where the handling device is adapted to at least one workpiece carrier, provided with several workpiece holders on which a workpiece can be arranged, such that the handling device (1) is provided with means for positioning a reference point of the handling device (1) with the aid of the movement axes in such a way that it is located only in fixedly predetermined positions, so that at least in some of these positions the reference point is located respectively on one reference axis for one of the holders (31, 32, 33, 34, 35, 36, 37, 38).

Abstract: A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z-axis of a universally tiltable robot base or in another manner, based on the data provided by the planarity teaching station. The adjustment of the substrate or end effector plane allows substrates to be removed from and delivered to various cassettes and workstations of a substrate processing system without damage to the substrate caused by end effector misalignment.

Abstract: A thermal processor for treating a plurality of semiconductor articles introduced into the processor and pods includes a work-in-process stocker and furnace combination. The stocker includes a loading port, shelves for storing pods and a loadport. The loadport includes a pod opener and is positioned at a port through to the furnace housing. The pod opener may be an indexer for an SMIF pod or a FOUP loadport for handling a 300 mm. wafer pod. A manipulator within the stocker operates to receive and output pods from the processor, present pods to the loadport for loading and unloading and warehousing pods between such operations. In one embodiment, the manipulator operates in an X-axis, Y-axis horizontal plane as well as in a Z-axis direction and rotation about the Z-axis. In the other, the Y-axis degree of freedom is eliminated.

Abstract: A leno selvage former is supported by a mounting for position adjustments in the three directions of a three-dimensional rectangular coordinate system and preferably also for an angular position adjustment about at least one rotational axis. For this purpose the mounting has three sections. A first section carries a second section which carries a third section. The first section is, for example adjustable in the Y-direction, while the second section is adjustable in the X-direction and the third section is adjustable in the Z-direction of the rectangular coordinate system. At least one of the three sections is preferably also angularly adjustable. At least one lock such as a screw is provided for locking-in an adjusted position.

Abstract: The present invention is an automated sealant applicator held by a gantry tool and is computer directed and controlled for performing sealant operations on workpieces. The automated sealant applicator is computer directed and controlled for moving around a workpiece and for applying controlled amounts of sealants along precise paths, and with desired sealant patterns. The amount, path, and pattern of sealant are derived from engineering data. A CCD advanced vision system and/or a cutter chuck with a positioning and locating system can be used to precisely locate and apply sealant to the workpiece.

Abstract: An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) difection and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam.

Abstract: Stacks of blanks (10) comprising a largish number of pre-fabricated blanks made of (thin) cardboard are usually made available on pallets (12). The stacks of blanks (10), provided if necessary with a band label (11), are aligned on the pallet (12) in rows (13) and disposed in a plurality of layers (16) the one above the other. A pick-up head (18) serves to unload the stacks and is movable on a support structure (19), configured like a portal, in a vertical and in a horizontal direction. The pick-up head (18) grasps respectively one group of stacks of blanks (10) and sets same down on an onward conveyor (14).

Abstract: A machine for stacking articles such as wooden pallets comprises a frame for supporting a carriage assembly that can be raised and lowered under control of a motor and where the carriage assembly supports an article grasping machine that is slidably mounted on the carriage assembly allowing horizontal movement of the article grasping assembly relative to the carriage. When using the machine to stack wooden pallets, a pallet may be picked up at a first location and elevated and translated so as to overlay a top pallet on a stack of pallets before the one being carried is released.

Abstract: A controlled relative motion system comprising a base support, a pivot holder and a plurality of pivoting links with the pivoting links rotatably coupled to both the base support and to members of the pivot holder to rotate about axes which extend in different directions for each of these rotatable couplings in a link, typically in accord with specific geometrical arrangements, and in different directions from similar axes in another of such links. Such systems can incorporate a variety of force imparting members to control movements of various ones of the pivoting links or pivot holder members. The pivoting links can be bent, and the pivot holder members can be hinged.

Abstract: An apparatus and a method for baking and cooling silicon substrates are disclosed. Both baking and cooling of silicon substrates are done in a single integrated thermal process module. Each thermal process module includes two hot plate assemblies, a cool plate assembly, two local linear transfer arms and a micro-processor based module controller. Both transfer arms are capable of transferring substrates among the cool and hot plate assemblies. The module controller ensures that there are no conflicts in use of the transfer arms or in use of the hot and cool plate assemblies and so that a transfer arm is always available when a substrate is finished baking. A central substrate handling robot transports substrates only from and to the cool plate assembly of the thermal process module. Also, the vacuum tubing is routed via a unique pulley arrangement to achieve compact mounting and eliminate loose tubing.

Abstract: A two-axis Cartesian robot comprising a vertically disposed Y-axis support having a traverse carriage selectively vertically movably mounted thereon. An X-axis support is movably mounted on the carriage. A reversible drive motor is mounted on the carriage and has a driven shaft extending therefrom upon which is mounted a planetary gear drive including an X-axis drive gear and a Y-axis drive gear which are in engagement with gear racks on the X-axis and Y-axis supports, respectively. A Y-axis brake is provided for selective engagement with the Y-axis drive gear for selectively preventing rotation of the Y-axis drive gear and an X-axis brake is provided for selective engagement with the X-axis drive gear for selectively preventing rotation of the X-axis drive gear. A workpiece manipulator is secured to the X-axis support for movement therewith.

Abstract: A wrist mechanism of an industrial robot comprises: spline teeth (2A) formed in the outer circumference of the end portion of a bending drive shaft (2) which is provided inside of an arm (1); spline grooves (2B) which are formed in the inner circumference of a first bevel gar (21) and are engaged with the spline teeth (2A); spline teeth (3A) formed in the outer circumference of the end portion of a revolving drive shaft (3); a hollow cylindrical intermediate shaft (30) having one end portion in the inner circumference of which spline grooves (3B), which are engaged with the spline teeth (3A); are formed, and the other end portion to the outer circumference of which a second bevel gear (31) is secured; a bearing (301) through which the one end portion of the intermediate shaft (30) is supported on the first bevel gear (21); and bearings (22 and 24) through which the other end portion of the intermediate shaft (30) is supported on a stationary gear box (45).

Abstract: A manipulator for a test head connected to automatic test equipment through a heavy, inflexible cable. The manipulator includes a telescoping column assembly to which is mounted a vertical member. A cradle holding the test head is mounted to the vertical member. The cable is clamped at the vertical member to reduce the amount of force exerted by the cable on the test head. The cradle includes movable members to allow fine positioning of the test head, while maintaining the test head isolated from cable force. Course motion of the test head may be made by moving portions of the manipulator on the opposite side of the cable clamp from the test head. Precise positioning of the test head relative to a handling device is accomplished through a positioning mechanism at the interface between the test head and the handling device. To allow the positioning mechanism to operate, the manipulator has compliance which allows the test head to be forced into position by the positioning mechanism.

Abstract: A substrate transport having a housing, a drive assembly connected to the housing, and a moveable arm assembly operably connected to the drive assembly. The drive assembly has a frame stationarily connected to the housing forming a cage with an open side. The drive assembly has a rotational drive and a vertical drive. The rotational drive is movably mounted to the frame inside the cage by a carriage. The vertical drive is mounted to the bottom of the frame and is attached to the rotational drive to move the rotational drive up and down on the frame. The rotational drive has two mirror image drive units.

Abstract: An actuator for performing work in a nuclear reactor is described. In one embodiment, the actuator includes an x-axis linear slide assembly, a y-axis linear slide assembly, and a z-axis linear slide assembly. The x-axis linear slide assembly is mounted to a junction box, the y-axis linear slide assembly is mounted on a carriage of the x-axis assembly, and the z-axis linear slide assembly is mounted on a carriage of the y-axis assembly. The actuator also includes motor assemblies coupled to respective linear slide assemblies. Each motor assembly includes a motor and a resolver sealed in a leakproof can. Pulley-timing belt assemblies couple each motor to a respective lead screw. Specifically, a drive pulley is connected to a rotor shaft of each motor, and a lead screw pulley is secured to an end of each lead screw. Each pulley-timing belt assembly also includes an idler pulley, and a belt extends around the lead screw pulley, the idler pulley, and the drive pulley.

Abstract: A manipulator with six degrees of freedom includes a moving plate having three points arranged with substantial equal angles therebetween, a fixed plate having three protruding portions arranged with substantial equal angles therebetween, the fixed plate being positioned under the moving plate and being spaced apart from the moving plate, and three frames rotatably mounted on the protruding portions, respectively, each of the three frames having a first and a second points opposite from each other about the protruding portion.

Abstract: There are provided carrying device and method capable of high-speed pick-up and travelling operation of a carrier. The carrier is provided with a holder bracket movable back and forth, in which claw members for grasping a material are held, and a driver mechanism for stroking g the holder bracket and a driver mechanism for opening and closing the claw members are attached to the carrier body. A movable portion in the carrier can be made lighter in weight. An electric wiring cord to be connected to the movable portion can be eliminated or made thin and light enough. This allows the carrier to move at a high speed. The carrier is held at the intersection of a pair of crossing moving bars and moved to a target position by moving both the moving bars. No motor needs to be provided in the carrier for driving the carrier, so that the movable portion moving together with the carrier can be made lighter in weight, thereby speeding up the movement of the carrier.

Abstract: An actuator structural body is constructed of standardized columnar bodies connected for moving a workpiece. The Actuator structural body includes actuators shaped as columnar bodies and having T-shaped grooves defined in outer side surfaces thereof, columnar member shaped as columnar bodies and having T-shaped grooves defined in outer side surfaces thereof and through holes defined therein, and joint members for joining the columnar members and the actuators bodies 204, 206, 208, 210 by engaging in the T-shaped grooves or fitting in the through holes in the columnar bodies. The columnar members 202 and the actuators bodies may be assembled or reassembled into a desired shape by the joint members.

Abstract: Automatic distribution equipment for connecting and disconnecting lines includes a frame body, a plurality of matrix-switch-board units arranged in the frame body in a stack formation, and a robot provided in a side of the frame body. Each of the matrix-switch-board units has two wiring-pattern arrays which are respectively formed in opposite sides of each of the units so as to be electrically isolated from each other and to cross each other, wherein when a connection pin is inserted into one of through holes formed at cross points of the two wiring-pattern arrays, respective wiring patterns of the two wiring-pattern arrays are connected to each other. The robot moves between two of the matrix-switch-board units, and inserts-and-extracts the connection pin into-and-from a designated through hole to connect-and-disconnect designated lines.

Abstract: A motor, a ball screw shaft, etc. are accommodated within a frame that forms an outer frame. Direct-acting guides are provided on both sides of a groove-shaped opening defined in the frame. The ball screw shaft is centrally disposed within the frame. A table slides along the direct-acting guides under the action of rotation of the ball screw shaft. The ball screw shaft has ball-screw splines formed over its entire length and both ends thereof supported by the motor and a bearing. The center of rotation of the ball screw shaft is brought into alignment with the centers of rotation of the motor and the bearing by balls inserted into the ball-screw splines.

Abstract: A docking arrangement for the automatic fueling of automotive vehicles, primarily cars, where a robot is provided including a robot head that can be moved in relation to the robot and positioned in relation to an adapter (3), the adapter being arranged for fastening to the upper orifice of the fuel-tank pipe (2) of a vehicle.