Liquid Applying Means For Electrode (e.g., Projection Type, Etc.) Patents (Class 96/44)
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Patent number: 6488740Abstract: The apparatus includes a wet electrostatic precipitator (ESP) field disposed along a combusted fossil-fuel flue gas stream path downstream of a dry ESP field. The wet ESP field includes a chamber having a flue gas inlet and a flue gas outlet, and at least one collection plate positioned within the chamber. The chamber also includes one or more wash nozzle positioned adjacent the collection plate, and a wet hopper positioned substantially under the collection plate. The apparatus preferably further includes one or more cooling nozzles positioned near the flue gas inlet. The cooling and wash nozzles are fluidly coupled to a water source, while the wet hopper is fluidly coupled to either a pH adjustment module or a treatment processor. A method of removing contaminants from a flue gas stream using the above apparatus is also disclosed.Type: GrantFiled: February 28, 2001Date of Patent: December 3, 2002Assignee: Electric Power Research Institute, Inc.Inventors: Dan V. Patel, Alfred L. Hester, David W. Morris
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Publication number: 20020129704Abstract: Ionizing apparatus includes a housing that supports a plurality of ionizing electrodes disposed within fluid apertures that are connected via tubing conduits to pass fluid therethrough about the electrodes. Gas to be ionized supplied under pressure to the apertures transports gas ions generated at the electrodes in response to high ionizing voltage supplied thereto. To clean the ionizing apparatus, cleaning liquid is supplied under pressure in one flow direction through the tubing conduits and apertures to remove particles from within the tubing conduits and apertures and from surfaces of the electrodes.Type: ApplicationFiled: March 13, 2001Publication date: September 19, 2002Inventor: John E. Menear
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Patent number: 6365112Abstract: Certain contaminants are removed from a stream of contaminant-laden commercial and industrial exhaust gases conducted through an electrostatic precipitator by passing a reagent fluid through corona discharge active zones to activate the reagent fluid as the reagent fluid is injected into the stream such that the activated reagent fluid reacts with the contaminant to be removed. A combination discharge electrode and injector carries a plurality of electrode elements which establish the corona discharge active zones and include injector passages juxtaposed with the corona discharge active zones. The reagent fluid is injected into the stream by delivering the reagent fluid through the injector passages such that the reagent fluid passes through the corona discharge active zones and is activated as the reagent fluid is injected into the stream.Type: GrantFiled: August 17, 2000Date of Patent: April 2, 2002Inventors: Sergei Babko-Malyi, Isaac Ray, Wayne P. Buckley
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Patent number: 6302945Abstract: An electrostatic precipitator for removing sulfur dioxide and other polluting particles has a wet liquid removal area or compartment down stream and in the last section of plates of the electrostatic precipitator.Type: GrantFiled: June 11, 1999Date of Patent: October 16, 2001Assignee: Electric Power Research Institute, IncorporatedInventors: Ralph F. Altman, Richard G. Rhudy
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Patent number: 6254668Abstract: A device for cleaning static precipitator in which hot air and steam are repeatedly filled into an oil-collecting sink of the static precipitator at different times or at the same time for heating and melting the oil dirt attaching to the static panels, making the oil dirt drop down into a collecting section. The static panels can be harmlessly cleaned up without disassembly or using any scraper. Hot air also serves to shorten the drying time for the static panels.Type: GrantFiled: July 19, 2000Date of Patent: July 3, 2001Inventor: Mei-Ling Huang
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Patent number: 6231643Abstract: A membrane is used as a collection substrate in an electrostatic precipitator (ESP). Possible material choices include fibers in the form of woven mats, screens made from stainless steel wires or fiber reinforced polymer composite membranes. The membranes have a tensile bias applied during operation, and have impulse tensile force applied during a dust removal step. By combining a dry ESP membrane field with wet-film cleaning field, it may be possible to improve collection efficiencies both by reducing turbulence and eliminating re-entrainment losses due to rapping. Through implementation of new materials that resist hostile ESP environments, the invention enhances the possibility of using novel technologies, such as pulsed corona and others, suitable for removal of molecules such as NOx and SOx, which is very important for meeting proposed PM2.5 EPA emissions regulations.Type: GrantFiled: May 19, 2000Date of Patent: May 15, 2001Assignee: Ohio UniversityInventors: Hajrudin Pasic, Md Khairul Alam, David J. Bayless
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Patent number: 6228148Abstract: A method and an apparatus for separating solid or drop-like particles from an air flow is provided. The air flows through a separator chamber between an electrode, ion generating means or like particle charging device disposed in the separator chamber, and a grounded collector surface, so that the particles are charged by the charging device and accumulate on the collector surface. The air flows along a substantially spiral path around the charging device in at least a part of the separator chamber so that due to the action of centrifugal force at least a portion of the particles pass toward the grounded collector surface at the periphery of the chamber. A small flow of purified air flows downwardly in a central part of the separator chamber so that it washes the charging device in the separator chamber.Type: GrantFiled: May 19, 1999Date of Patent: May 8, 2001Assignee: Velmet CorporationInventors: Rami Aaltonen, Juha Leimu, Petri Norri
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Patent number: 6126727Abstract: An electrode panel-drawing device of a static ion discharger, including a box body. A top section of the box body is formed with an opening. A bottom section of the box body is disposed with a connecting seat. The box body is disposed with ventilators, an activating switch and an adjustment button. A motor, a fan and an AC-to-DC circuit board are disposed in the box body. A drawer body is fitted into the opening of the box body. The drawer body is disposed with discharge needles and electrode panels at equal intervals. The positive terminal of the circuit board is connected to the discharge needles, while the negative terminal of the circuit board is connected to the electrode panels. The positive discharge needles ionize the air to eliminate the static electricity. The drawer body can be drawn out of the box body for directly washing the discharge needles and the electrode panels.Type: GrantFiled: January 28, 1999Date of Patent: October 3, 2000Inventor: Ching-Hsiang Lo
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Patent number: 6110256Abstract: Apparatus and method for removing particulates and corrosive gases from a gas stream includes the serial use of a condensing wet electrostatic precipitator section for removing smaller particulates, in the submicron range, in conjunction with a vertically aligned preliminary scrubber section which removes larger particulates, in the micron range, and corrosive gases, in an integrated unit in which the temperature and moisture conditions in the gas stream are controlled for assuring effective and efficient operation of the condensing wet electrostatic precipitator section. Discharge electrodes of the electrostatic precipitator are supported by insulators which are protected against deleterious deposits of particulates by discharge electrode elements and collector electrode elements placed between the gas stream and the insulators.Type: GrantFiled: June 17, 1998Date of Patent: August 29, 2000Assignee: Croll Reynolds Clean Air Technologies, Inc.Inventors: Philip E. Reynolds, Isaac Ray
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Patent number: 6106592Abstract: The present invention relates to a gas cleaning process and apparatus for removing solid and liquid aerosols entrained in a gas stream. The gas to be treated is passed through a wetted, electrostatically charged filter media. In accordance with a preferred embodiment of the present invention, the polarity of the electrostatic charge on the filter media is selected to enhance the removal of captured solid particles from the filter media. The apparatus is readily adaptable to a modular gas cleaning system configuration wherein varying numbers of the apparatus may be operated in parallel to provide a gas cleaning system of any desired gas flow capacity.Type: GrantFiled: March 16, 1999Date of Patent: August 22, 2000Assignee: Monsanto CompanyInventors: Prabhakar D. Paranjpe, Lawrence F. Paschke
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Patent number: 5855652Abstract: Apparatus is disclosed for rapidly collecting aerosols containing solid particles and micro organisms, such as viruses and bacteria, from relatively large volumes of air and concentrating these particulates as samples in water. This apparatus operates under conditions conducive to preserving the integrity and viability of the collected micro organisms. Ambient air containing aerosols drawn into and through the collector's interior by an air mover, is mixed with very warm air saturated with moisture and then with cold air, to cause the resulting vapor mixture to become supersaturated. This supersaturated water vapor rapidly condenses onto the incoming aerosol particles to form droplets with particles at their centers. The airstream carrying these droplets enters a cloud of air ions produced by a corona generator or, alternately, by a radioactive source emitting alpha particles.Type: GrantFiled: January 31, 1997Date of Patent: January 5, 1999Assignee: Topaz 2000, Inc.Inventor: Robert Talley
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Patent number: 5797978Abstract: An air filter body includes a plurality of discs of electrically insulating material arranged in a stack and having ribbed contacting faces defining small filtering passageways between the contacting faces of adjacent discs. Each disc has an electrode layer insulated by the respective disc from the electrodes of the adjacent discs. Each electrode is electrically connected to an electrical terminal at an edge of the respective discs. Electrical conductors connect the electrical terminals of alternating discs to one side of a voltage source, and the electrical terminals of the remaining alternating discs to the other side of the voltage source.Type: GrantFiled: November 27, 1995Date of Patent: August 25, 1998Inventors: Gideon Rosenberg, Ilan Leskly
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Patent number: 5476539Abstract: A low-profile gas purifying apparatus includes a plurality of conductive plates each having a serrated portion at the periphery thereof. The plates are disposed opposite a flat electrode which is coated with a dielectric layer and are separated from the flat electrode by a predetermined gap. A high voltage A.C. power source is connected between the plates and the flat electrode. The plane surfaces of the conductive plates are slanted with respect to the gas flow direction to reduce flow resistance through the apparatus.Type: GrantFiled: March 30, 1994Date of Patent: December 19, 1995Inventors: Nagatoshi Suzuki, Manabu Higashi, Kanichi Fujii
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Patent number: 5264014Abstract: An arrangement for cleaning ventilation air coming from a paint spray booth and polluted with paint particles is provided with a liquid flow for separating part of the paint particles from the ventilation air and a wet electrostatic precipitator for separating any remaining paint particles and liquid droplets from the ventilation air. The electrostatic precipitator is located in an enclosure underneath the floor of the spray booth, with a surface of the enclosure being poured over with the liquid flow to remove part of the paint particles. The enclosure is further designed so that the ventilation air from the spray booth is caused to be deflected through an angle of 10.degree.-170.degree. in relation to the substantially vertical direction of flow through the spray booth before passing through the liquid flow and into the electrostatic precipitator.Type: GrantFiled: October 23, 1991Date of Patent: November 23, 1993Assignee: ABB Flakt AktiebolagInventors: Hans Lannefors, Leif Lindau, Mikael Kihlbert
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Patent number: 5254155Abstract: A wet electrostatic precipitator device is provided which has a plurality of hexagonal honeycomb collector passage ways, a corresponding mating plurality of stationary rod elements to be centrally located at axes of each said hexagonal honeycomb collector passage ways and a set of bands integrally formed with a multiplicity of the ionizing blades which protrude from the surfaces of each of the stationary rod elements. The geometry of the design has a high degree of efficiency, while at the same time causes the ionizing blades to maintain their electrostatic charging characteristics under a harsh set of environmental conditions.Type: GrantFiled: April 27, 1992Date of Patent: October 19, 1993Inventor: Fred E. Mensi
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Patent number: 4153855Abstract: An unetched microchannel plate is coated on one side with an etchant-resint mask having a pattern of open areas. The core fibers in the open areas are then etched out to form a pattern of microchannels. The microchannels and the mask are metallized, after which the mask and its metal are stripped. When the other side of the plate is metallized in the usual manner, a microchannel intensifier plate with a pattern of microchannels results.Type: GrantFiled: December 16, 1977Date of Patent: May 8, 1979Assignee: The United States of America as represented by the Secretary of the ArmyInventor: Robert M. Feingold
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Patent number: 4150991Abstract: Methods are described for the preparation of a light sensitive collection surface for use in directly or indirectly printing copies on which text and images are arranged according to a predetermined layout.Type: GrantFiled: January 26, 1976Date of Patent: April 24, 1979Assignee: Misomex AktiebolagInventor: Brian St. P. Dillow
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Patent number: 4141731Abstract: A video disc master of glass, having a metal surface with microscopic apertures therein representing information, is coated with a photosensitive resist. The resist is uniformly exposed through the glass disc. The unexposed resist is removed. The resulting disc having surface irregularities can be used in a first process to produce "stampers" for embossing replicas and, in a second process, to produce a mold for casting replicas.Type: GrantFiled: January 2, 1976Date of Patent: February 27, 1979Assignee: MCA Disco-Vision, Inc.Inventor: Manfred H. Jarsen
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Patent number: 4138253Abstract: A method for making an improved member of a position measuring transducer is disclosed, wherein the member has a pattern of uniformly pitched bars thereon. The method comprises the steps of superimposing a plurality of positionally shifted latent images of an initial pattern of bars having approximately uniform pitch upon a photo-sensitive material, and then processing the photo-sensitive material to produce a production pattern of bars having a significantly more uniform pitch than the initial pattern. The production pattern is used to produce an improved member of a position measuring transducer having a correspondingly greater accuracy than a transducer incorporating a member made directly from the initial pattern. A procedure for selection of the processing parameters to control the uniformity of spacing between bars and to adjust the width and relative position of the "gray" transition region at the bar edges is also taught. Finally, the production of improved scale members of INDUSTOSYN.RTM.Type: GrantFiled: January 20, 1978Date of Patent: February 6, 1979Assignee: Farrand Industries, Inc.Inventor: Clair L. Farrand
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Patent number: 4137078Abstract: A continuous tone dry process imaging film includes a solid, high optical density and substantially opaque film of dispersion imaging material deposited on a substrate. Energy is applied to the film of dispersion imaging material, in an amount sufficient to increase the absorbed energy in the material above a certain critical value, to change the same to a substantially fluid state in which the surface tension of the material acts to cause the film, where subject to the applied energy, to disperse and change to a discontinuous film comprising openings and deformed material which are frozen in place following the application of said energy and through which openings light can pass.Type: GrantFiled: March 30, 1978Date of Patent: January 30, 1979Assignee: Energy Conversion Devices, Inc.Inventors: Masatsuga Izu, Stanford R. Ovshinsky
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Patent number: 4131472Abstract: An improvement in the process of manufacturing integrated circuits to enhance the yield, including the steps of tracking which of the individual dies on a photomask or related series of photomasks has produced a predominance of defective chips on the semiconductor wafer, then correcting the die images on the master photomasks and then producing new working masks. This procedure may be repeated several times, each time reducing the number of defect-bearing die images on the photomask and thereby providing a means by which a semiconductor device manufacturer can obtain better yields.Type: GrantFiled: September 15, 1976Date of Patent: December 26, 1978Assignee: Align-Rite CorporationInventors: James L. MacDonald, Jr., Richard A. Mink
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Patent number: 4121937Abstract: In order to increase the contrast of a picture such as an X-ray picture over a selected range of densities, a negative transparency of the original picture of selected density value at one end of the selected range and a positive transparency of the original picture at the other end of the selected range are superimposed to form a transparency sandwich and the image produced by illuminating such a transparency sandwich is photographed or displayed. A number of selected density ranges may be superimposed on a single display by making a respective transparency sandwich for each range in a different color and superimposing such transparency sandwiches.Type: GrantFiled: February 18, 1977Date of Patent: October 24, 1978Assignee: STB Strahlentechnische Bilddiagnostik Heinz FleckInventor: Karl Heinz Lohse
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Patent number: 4113485Abstract: A photograph of an object is made on color film in a conventional manner. Then the object is back-lighted only to silhouette it and a second photograph is made using the same film. The two films are developed simultaneously so as to subject them to identical processing conditions. Using the photograph taken while the object was back-lighted, a contact exposure is made on a high contrast film to produce a negative. After development of this negative, it and the initial, front-lighted, photograph of the object are employed on a scanner to produce the color separations for printing purposes.Type: GrantFiled: June 2, 1977Date of Patent: September 12, 1978Inventor: Vincent M. Maselli
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Patent number: 4111696Abstract: A method of visually portraying an image of an assumed scene comprising portions of each of a plurality of scenes. Photographs, preferably in the form of transparent slides, are made of a relatively large number of diverse scenes. Portions are selected from each of two or more slides for combination to form the assumed scene. The composite scene is recorded in a single photograph by making repeated exposures of a single frame of film as the images are sequentially projected with their corresponding masks positioned on the viewing surface. All except the selected portions are covered by opaque masks as the individual images are projected sequentially on the single viewing surface.Type: GrantFiled: January 29, 1976Date of Patent: September 5, 1978Inventor: Jerome Sirlin
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Patent number: 4097280Abstract: A web with overlays for use in the document presentation device of a photographic copying machine has several sheet-like sections with overlapping portions which are separably coupled to each other by snap fasteners and carry overlays which are welded thereto by the application of heat and pressure. The overlays are applied to those sides of the sections which are coated with layers of photographic emulsion.Type: GrantFiled: August 9, 1976Date of Patent: June 27, 1978Assignee: AGFA-Gevaert AGInventors: Annemarie Mannhardt, Rudolf Eppe, Josef Pfeifer
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Patent number: 4093460Abstract: A method and apparatus for improving the quality of photographic images by projection through a linear radial transmission filter. The invention yields small detail blending or contrast enhancement of small details with a minimum loss of sharpness. A simple enlarger and a linear radial transmission filter are used to process a wide variety of images and are capable of simple adjustment to vary the resulting degree of blending or enhancement.Type: GrantFiled: April 15, 1976Date of Patent: June 6, 1978Inventor: Leonard M. Weinstein
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Patent number: 4082861Abstract: A continuous tone dry process imaging film includes a solid, high optical density and substantially opaque film of dispersion imaging material deposited on a substrate. Energy is applied to the film of dispersion imaging material, in an amount sufficient to increase the absorbed energy in the material above a certain critical value, to change the same to a substantially fluid state in which the surface tension of the material acts to cause the film, where subject to the applied energy, to disperse and change to a discontinuous film comprising openings and deformed material which are frozen in place following the application of said energy and through which openings light can pass.Type: GrantFiled: September 23, 1976Date of Patent: April 4, 1978Assignee: Energy Conversion Devices, Inc.Inventors: Masatsuga Izu, Stanford R. Ovshinsky
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Patent number: 4066458Abstract: Exposure images may be synthesized on a radiation responsive surface by causing effective relative motion between a mask and the surface. The mask contains at least two distinct exposure areas, each having a plurality of apertures arranged in different patterns from which at least two different images can be simultaneously synthesized. Radiation is directed through the plurality of apertures in a mask during a given period to expose a plurality of similarly shaped areas on a surface. During a second period electrons are similarly directed through the same mask which has been effectively displaced and a second plurality of contiguous areas are exposed. During third and fourth succeeding periods, third and fourth pluralities of contiguous areas are exposed. Thus, the image in each exposure area is synthesized from a plurality of contiguous four step exposure images which makes it possible to eliminate the "stencil problem" and permit exposure of areas whose length is very much greater than their width.Type: GrantFiled: May 8, 1975Date of Patent: January 3, 1978Assignee: International Business Machines CorporationInventor: Paul E. Stuckert
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Patent number: 4047951Abstract: A method of making both full size and miniature replicas of patterns on photographic film from conventional paperboard clothing patterns. The full size clothing pattern replicas on film may be arranged directly on a conventional marker sheet in place of the paperboard clothing patterns. The miniature pattern replicas may be arranged on miniature marker sheet replicas constructed to the same scale as the miniature pattern replicas. The layout may be copied and the copy of the miniature pattern layout may be used as a guide in laying out full size patterns or pattern replicas on a marker sheet or the copy may be enlarged and reproduced to its original scale on a light sensitive marker sheet. The clothing pattern replicas may be formed with integral blocking borders or blocking lines.Type: GrantFiled: December 1, 1975Date of Patent: September 13, 1977Assignee: Hart Schaffner & MarxInventors: Shannon L. Cooper, Frank C. Adams
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Patent number: 4028109Abstract: An apparatus and method are disclosed by which a processed photosensitive material can be provided with a lenticular surface with each lenticule having a predetermined profile. The lenticules are arranged relative to one another with such a degree of accuracy that any speckle and scintillation that might be produced when the processed material is utilized as an element of a transmission or reflection type screen is reduced to a minimum, if not completely eliminated. Once the exposure factors for the emulsion have been established, the exposure profile can be determined for a particular lenticule profile to be imaged onto the photographic material or emulsion. The exposure profile can be utilized to provide a transparency master target pattern which can be of a relatively large size.Type: GrantFiled: November 7, 1975Date of Patent: June 7, 1977Assignee: Eastman Kodak CompanyInventors: Robert L. Lamberts, Nelson R. Nail
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Patent number: 4021239Abstract: In the method of exposing a relatively large number of parallel, spaced apart stripe-like areas on the surface of a photo-sensitive member by directing light against such surface through an original photo-mask having a light-permeable pattern comprised of a relatively small number of parallel, spaced apart transparent stripes of lengths substantially smaller than the length of the areas to be exposed, and by effecting repeated relative scanning movements of the photo-sensitive member and photo-mask in the direction of the transparent stripes and relatively shifting the photo-sensitive member and the photo-mask in the direction transverse to the transparent stripes for each of the relative scanning movements so that, upon the completion of the repeated movements, light passing through the light-permeable pattern of the photo-mask will have scanned the desired relatively large number of stripe-like areas to be exposed on the surface of the photo-sensitive member; the transparent stripes of the original photo-maType: GrantFiled: May 17, 1976Date of Patent: May 3, 1977Assignee: Sony CorporationInventor: Kazuaki Ogawa
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Patent number: 4012257Abstract: A method of producing gravure printing surfaces is disclosed. The method utilizes a separately produced screened negative made on orthochromatic film and a continuous tone negative. Both negatives are superimposed to produce a positive with variable size dots and variable tone densities which are then utilized to expose the carbon tissue resist used to etch the printing surface. Alternatively, the negatives are utilized to produce corresponding positives each of which is used to expose the carbon tissue.Type: GrantFiled: February 13, 1976Date of Patent: March 15, 1977Inventor: Frank T. Geris
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Patent number: 4004925Abstract: A photomask comprising a support that is transparent to ultra-violet radiation and visible light and a layer incorporating a photomask image, the image parts of which contain a complex compound of a silver halide and a diazonium, pyrylium, or thiapyrylium salt, wherein said complex compound is substantially opaque to ultra-violet radiation and blue light but substantially transmitting visible light in the wavelength range above 500 nm.Type: GrantFiled: February 18, 1975Date of Patent: January 25, 1977Assignee: AGFA-GEVAERT N.V.Inventors: Jan Frans Van Besauw, Albert Lucien Poot
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Patent number: 3999988Abstract: A method of real-time color masking is disclosed wherein pairs of color filters are inserted at specific locations in the optical paths of an electro-optical image multiplication system to thereby produce a modulated radiation pattern representative of the product of the reflectance of the positive of one color component and the negative of other color components of the original.Type: GrantFiled: July 29, 1974Date of Patent: December 28, 1976Assignee: Xerox CorporationInventors: Paul G. Roetling, Dorian Kermisch
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Patent number: 4000334Abstract: A dispersion imaging material, such as tellurium, which disperses upon the absorption of energy above a certain threshold is provided in the form of a thin, continuous film, preferably on a substrate. Energy, in the form of a pulse, is applied to the continuous film in a pattern, which includes a plurality of regions, in an amount and for a length of time sufficient to cause dispersion of the dispersion imaging material simultaneously in all those regions which receive the energy. Preferably, the energy is applied through an imaging mask to produce a duplicate of the image. Sensitizing materials advantageously can be employed to form an indigenous mask on the dispersion imaging material. In addition, dispersion promoting materials can be utilized to enhance and accelerate the formation of a stable image. In the preferred embodiment of the method, the dispersion imaging material is carried on a substrate having a low heat conductivity.Type: GrantFiled: October 19, 1973Date of Patent: December 28, 1976Assignee: Energy Conversion Devices, Inc.Inventors: Robert W. Hallman, Stanford R. Ovshinsky, John P. DENeufville
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Patent number: 3984242Abstract: An apparatus and method are disclosed by which a processed photosensitive material can be provided with a lenticular surface with each lenticule having a predetermined profile. The lenticules are arranged relative to one another with such a degree of accuracy that any speckle and scintillation that might be produced when the processed material is utilized as an element of a transmission or reflection type screen is reduced to a minimum, if not completely eliminated. Once the exposure factors for the emulsion have been established, the exposure profile can be determined for a particular lenticule profile to be imaged onto the photographic material or emulsion. The exposure profile can be utilized to provide a transparency master target pattern which can be of a relatively large size.Type: GrantFiled: March 28, 1974Date of Patent: October 5, 1976Assignee: Eastman Kodak CompanyInventors: Robert L. Lamberts, Nelson R. Nail
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Patent number: 3970382Abstract: An optical system in which a light image of an original document is filtered to form a single color light image which is transmitted through a photochromic filter. The photochromic filter is responsive to the intensity of the single color light image to automatically regulate the intensity of the single color light image transmitted therethrough.Type: GrantFiled: September 16, 1974Date of Patent: July 20, 1976Assignee: Xerox CorporationInventors: Donald H. Fisher, Vincent J. Crociata
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Patent number: 3950170Abstract: A method of photographic transfer of an original pattern onto a substrate having a photo-sensitive coating comprises carrying out repeated partial exposures which together make up a complete exposure, with the pattern being renewed after each partial exposure. Such renewing includes either relative movement between pattern and substrate or exchange of pattern members having the same pattern.Type: GrantFiled: January 20, 1975Date of Patent: April 13, 1976Assignee: Licentia Patent-Verwaltungs-G.m.b.H.Inventor: Rainer Grosholz
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Patent number: 3942981Abstract: A method for forming micropatterns comprising, superposing a transparent raised image formed on a transparent substrate on a photosensitive layer of a photographic material or forming a transparent raised image on the photosensitive layer of the photographic material, uniformly exposing the photosensitive layer through the transparent raised image to light to which the photosensitive layer is sensitive so that the light intensity at edges of the transparent image is non-uniform, and developing the photosensitive layer to form a micropattern corresponding to the outlines of the transparent raised image.Type: GrantFiled: May 6, 1974Date of Patent: March 9, 1976Assignee: Fuji Photo Film Co., Ltd.Inventor: Masamichi Sato
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Patent number: 3940273Abstract: A method is disclosed for preparing masks for photo etch purposes. Preselected circuit combinations are scribed in an opaque film supported by a translucent film. Beginning with the most simple circuit combination, the scribed opaque film is peeled away and the resultant circuit is photographed. The next most simple circuit combination of scribed film is peeled away and the new circuit is photographed. This stripping and photographing process is continued until all circuit combinations are photographed from a single art work.Type: GrantFiled: May 8, 1973Date of Patent: February 24, 1976Inventors: Loyd L. Woodham, Raymon H. Aldridge
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Patent number: 3936301Abstract: In contact type photolithographic masking processes for fabricating planar structures, a photoresist is applied to a wafer and a mask is placed over the photoresist. Illumination through the mask, which has a pattern of opaque areas, produces a photochemical reaction in the photoresist which upon developing creates a duplicate of the mask pattern. However, the photoresist is conventionally applied by a spinning process and the rotation produces a build-up of the photoresist around the edges of the wafer. This build-up prevents the pattern portion of the mask from making good physical contact with the photoresist with a resultant decrease in reproducibility and accuracy of the fabricated pattern. A modified mask is formed with a channel corresponding to the peripheral build-up. The channel accepts the build-up so that good contact may be maintained between the photoresist and the patterned portion of the mask.Type: GrantFiled: April 1, 1974Date of Patent: February 3, 1976Assignee: Bell Telephone Laboratories, IncorporatedInventor: Martin Victor Schneider
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Patent number: 3936172Abstract: An apparatus in which an original document is housed. The support on which the original document is positioned becomes selectively opaque so as to mask portions of the original document disposed thereon.Type: GrantFiled: March 29, 1974Date of Patent: February 3, 1976Assignee: Xerox CorporationInventor: James H. McVeigh
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Patent number: 3935011Abstract: By using two or more masks in a microscope having an optical system with an intermediate image plane therein in combination with a camera, composite photomicrographs can be prepared with two or more images.Type: GrantFiled: April 18, 1973Date of Patent: January 27, 1976Assignee: C. Reichert Optische Werke AGInventor: Klaus P. Schindl