Patents Assigned to Camtek Ltd.
  • Patent number: 10197505
    Abstract: A method for macro inspection, the method includes: (i) concurrently illuminating a current group of spaced apart object sub areas; wherein light reflected in a specular manner from a certain object sub area of the current group of object sub areas is expected to be detected by a certain sensor element of a current group of spaced apart sensor elements that correspond to the current group of spaced apart object sub areas; wherein the object sub areas are spaced apart so as to reduce a probability of a detection of non-specular light from the object; wherein each image sub area comprises multiple pixels; (ii) obtaining image information from the current group of spaced apart sensor elements; and (iii) processing at least a portion of the image information to provide an inspection result.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: February 5, 2019
    Assignee: CAMTEK LTD.
    Inventor: Zehava Ben Ezer
  • Patent number: 10042974
    Abstract: A method for inspecting a group of dies of a wafer, wherein the wafer comprises a group of wafer segments, wherein each wafer segment comprises a die of the group of dies, a molded material that surrounds the die and redistribution layer (RDL) conductors that are coupled to the die and are positioned above the die and the molded material, wherein the method includes the steps of: receiving design information about the RDL conductors of each wafer segment of the group of wafer segments; obtaining, during a setup process, first images of the group of wafer segments; wherein the obtaining of the first images comprises illuminating the group of wafer segments with radiation and detecting radiation scattered or reflected from the group of wafer segments as a result of the illuminating; generating reference information based on the design information about the RDL conductors of one or more wafer segments of the group of wafer segments and at least one first image of the one or more first images; acquiring, during a
    Type: Grant
    Filed: March 12, 2017
    Date of Patent: August 7, 2018
    Assignee: CAMTEK LTD.
    Inventors: Yuri Postolov, Menachem Regensburger
  • Patent number: 9989480
    Abstract: An inspection system having an expanded angular coverage, the inspection system may include a line camera; a first curved mirror; a second curved mirror; a first focusing lens that is positioned between the first mirror and an object; a second focusing lens that is positioned between the second mirror and the object; a first light source that is configured to direct a first part of a first light beam towards the first curved mirror and a second part of the first light beam towards the first focusing lens; a second light source that is configured to direct a first part of a second light beam towards the second curved mirror and a second part of the second light beam towards the second focusing lens.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: June 5, 2018
    Assignee: CAMTEK LTD.
    Inventors: Noam Gordon, Itay Cohen
  • Patent number: 9857312
    Abstract: An optical inspection system, the system includes: (i) an image sensor; and (ii) a single optical element, that at least partially surrounds an edge of an inspected object; wherein the optical element is adapted to direct light from different areas of the edge of the inspected object towards the image sensor so that the image sensor concurrently obtains images of the different areas.
    Type: Grant
    Filed: June 15, 2008
    Date of Patent: January 2, 2018
    Assignee: CAMTEK LTD.
    Inventors: Michael Lev, Ehud Efrat, Roni Flieswasser
  • Patent number: 9808915
    Abstract: A system that may include a apertured structure that is configured to support a substrate and a vacuum supply unit that is configured to (i) prevent a supply of vacuum to a first area of the substrate during a first processing period during which the first area is processed and a second area of the substrate is not processed; (ii) provide vacuum to the second area during the first processing period; (iii) prevent the supply of vacuum to the second area during a second processing period during which the second area is processed and the first area is not processed; and (iv) provide vacuum to the first area during the second processing period.
    Type: Grant
    Filed: November 17, 2015
    Date of Patent: November 7, 2017
    Assignee: CAMTEK LTD.
    Inventor: Yehuda Ben-Abu
  • Patent number: 9759555
    Abstract: A system for measuring heights of multiple structures of an object, the system may include an illumination module that is configured to illuminate the object by a light strip that is spatially incoherent; multiple cameras; a collection module that is configured to collect light that is reflected from the object and to distribute the light to the multiple cameras; wherein the collection module has an elongated field of view that has a longitudinal axis that is parallel to the light strip; wherein the multiple cameras are configured to generate, during a height measurement process, detection signals indicative of heights of the multiple structures; a mechanical stage for introducing a movement, during the height measurement process, between the object and each one of the illumination module and the collection module; and a processor that is configured to process the detection signals to determine the heights of the multiple structures.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: September 12, 2017
    Assignee: CAMTEK LTD.
    Inventors: Shimon Koren, Tomer Gilad
  • Patent number: 9756313
    Abstract: A triangulation system comprising an area camera, a communication interface, a first image processing module, a second image processing module; wherein the area camera is arranged to obtain, at an acquisition rate, a stream of images of illuminated regions of an object; wherein the area camera is prevented from performing height calculations; wherein the communication interface is arranged to convey, in real time thereby in correspondence to the acquisition rate, the stream of images from the area camera to the first image processing module; wherein the first image processing module is arranged to process, in real time, the stream of images to provide first compressed information; wherein the second image processing module is arranged to process, at a non-real time image processing rate, the first compressed information to provide height information indicative of heights of at least the illuminated regions of the object.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: September 5, 2017
    Assignee: CAMTEK LTD.
    Inventors: Shimon Koren, Eldad Langmans, Menachem Regensburger, Uri Weinar
  • Patent number: 9754812
    Abstract: An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates.
    Type: Grant
    Filed: February 18, 2016
    Date of Patent: September 5, 2017
    Assignee: CAMTEK LTD.
    Inventor: Arnon Ben-Natan
  • Patent number: 9723722
    Abstract: A method for printing on a substrate, the method may include determining actual locations of substrate holes; printing a first ink on an object at locations that correspond to the actual locations of the substrate holes and curing the first ink to provide a holes mask; and wherein after the substrate is positioned on the object so that holes mask seals bottoms of the substrate holes then printing the second ink on the substrate thereby forming a predefined pattern on the substrate.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: August 1, 2017
    Assignee: CAMTEK LTD.
    Inventors: Yehuda Ben-Abu, Yair Ozeri
  • Patent number: 9661755
    Abstract: A system and a method for inspection aided printing, the method may include printing, by a printing unit of a system, a pattern on an area of a substrate, during a printing process; inspecting, by an inspection unit of the system, the area to provide inspection results; searching, by a processor of the system, for a defect, based upon the inspection results; and wherein if a defect is found—determining whether to (a) repair the substrate, (b) perform a corrective measure for improving the printing process, or (c) perform no corrective measure in response to the defect.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: May 23, 2017
    Assignee: CAMTEK LTD.
    Inventors: Yosi Cherbis, Noam Rozenshtein, Tomer Segev, Avi Levy
  • Patent number: 9638644
    Abstract: A multiple mode evaluation system that includes a multiple mode imager that is arranged to perform a single scan of a substrate while alternating between different optical modes thereby producing different sets of images of areas of the substrate, each set of images being associated with a single optical mode of image acquisition; wherein the different optical modes differ from each other by at least one optical characteristic.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: May 2, 2017
    Assignee: CAMTEK LTD.
    Inventor: Moshe Cohen-Erner
  • Patent number: 9603261
    Abstract: A system and a method, the method includes determining or receiving a multiple iteration printing scheme indicative of multiple printing iterations of a coating material to be applied on an electrical circuit that comprises at least one three dimensional structure to be coated by the coating material; wherein the multiple iteration printing scheme is responsive to a shape and size of the at least one three dimensional structure; and performing multiple printing iterations of the coating material, according to the multiple iteration printing scheme; wherein at least one printing iteration is followed by at least partially curing the coating material printed during the at least one printing iteration.
    Type: Grant
    Filed: December 12, 2011
    Date of Patent: March 21, 2017
    Assignee: CAMTEK LTD.
    Inventors: Muhammad Iraqi, Noam Rozenstein, Eva Igner, Michael Litvin, Yaron Mazor
  • Patent number: 9418413
    Abstract: A system, a non-transitory computer program product and a method for selecting an inspection recipe, the method includes: (i) obtaining an image of a structural element of the semiconductor device; (ii) calculating multiple types of distances between the image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes; and (iii) automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
    Type: Grant
    Filed: July 5, 2010
    Date of Patent: August 16, 2016
    Assignee: CAMTEK LTD.
    Inventors: Shimon Koren, Or Shur
  • Publication number: 20150359094
    Abstract: Methods, systems and produced printed substrates are provided, which include substrates composed of one or more materials which are treated by an intermediate layer for normalizing surface energies and a digitally printed formulation adapted to the normalized surface energies. Surface energy normalization may be carried out by physical processes or by selective chemical processes. In an example, a self-assembled monolayer is applied to the surface of a printed circuit board to control ink jet dots by reducing copper surface energy and to improve ink adhesion. The self-assembled monolayer binds via an ? group selectively and covalently to the copper on the board and binds via a hydrophobic co group to solder mask ink that is applied to the board. The co group participates in the solidification process of the ink.
    Type: Application
    Filed: January 21, 2014
    Publication date: December 10, 2015
    Applicant: CAMTEK LTD.
    Inventor: Boaz NITZAN
  • Patent number: 9147102
    Abstract: A method and device for measuring a height of a microscopic structure such as solder bumps. For simplicity of explanation, the invention is described with respect to phase information and amplitude information wherein phase detection and calculation algorithms are being used.
    Type: Grant
    Filed: January 2, 2012
    Date of Patent: September 29, 2015
    Assignee: CAMTEK LTD.
    Inventors: Shimon Koren, Or Shur, Gilad Golan
  • Patent number: 9097685
    Abstract: An illumination module that may include a LED driver; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: August 4, 2015
    Assignee: CAMTEK LTD.
    Inventors: Amnon Menachem, Yossi Cherbis, Arnon Ben Natan
  • Patent number: 9042635
    Abstract: A system, that includes a hybrid sensor that comprises: a monochromatic portion that is arranged to obtain a monochromatic image of a first area of an object; a multiple-color portion that is arranged to obtain a multi-colored image of a second area of the object; wherein the monochromatic portion comprises monochromatic sensing elements that sense radiation of a same frequency band; wherein the multiple-color portion comprises color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands.
    Type: Grant
    Filed: October 13, 2013
    Date of Patent: May 26, 2015
    Assignee: CAMTEK LTD.
    Inventors: Yosi Cherbis, Yacov Malinovitch, Gilad Golan
  • Publication number: 20140362208
    Abstract: A triangulation system comprising an area camera, a communication interface, a first image processing module, a second image processing module; wherein the area camera is arranged to obtain, at an acquisition rate, a stream of images of illuminated regions of an object; wherein the area camera is prevented from performing height calculations; wherein the communication interface is arranged to convey, in real time thereby in correspondence to the acquisition rate, the stream of images from the area camera to the first image processing module; wherein the first image processing module is arranged to process, in real time, the stream of images to provide first compressed information; wherein the second image processing module is arranged to process, at a non-real time image processing rate, the first compressed information to provide height information indicative of heights of at least the illuminated regions of the object.
    Type: Application
    Filed: May 22, 2014
    Publication date: December 11, 2014
    Applicant: CAMTEK LTD.
    Inventors: Shimon Koren, Eldad Langmans, Menachem Regensburger, Uri Weinar
  • Publication number: 20140327906
    Abstract: According to an embodiment of the invention there is provided a system that may include a pivot chuck that may include : a lower chuck portion; an upper chuck portion; a first distance changing module that may include a pivot mechanism and an angle changing element; wherein the pivot mechanism pivotally couples the lower chuck portion to the upper chuck portion; wherein the angle changing element is coupled between the upper and lower chuck portions; wherein the upper chuck portion may be arranged to support a substrate; wherein the angle changing element may be arranged to induce a rotation of the upper chuck portion in relation to the pivot mechanism in response to first focus correction signals.
    Type: Application
    Filed: May 4, 2014
    Publication date: November 6, 2014
    Applicant: CAMTEK LTD.
    Inventors: Guy Kafry, Arnon Ben-Natan
  • Patent number: 8836780
    Abstract: A system and method for monitoring a manufacturing process of a fan-out wafer, the method may include acquiring a first set of images of dies after a completion of a first manufacturing stage of a manufacturing process of the fan-out wafer; processing the first set of images to detect defects; performing at least one corrective operation in response to at least one defect detected by processing the first set of images; acquiring a second set of images of dies after a completion of a second manufacturing stage of the manufacturing process of the fan-out wafer, the second manufacturing process follows the first manufacturing process; processing the second set of images to detect defects; and performing at least one corrective operation in response to at least one defect detected by processing the second set of images.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: September 16, 2014
    Assignee: Camtek Ltd.
    Inventors: Tommy Weiss, Nevo Laron, Thomas Molders, Aki Shoukrun, Nadav Wertsman