Patents Examined by Hajar Kolahdouzan
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Patent number: 11127760Abstract: Embodiments of the present disclosure provide an apparatus and methods for forming stair-like structures with accurate profiles and dimension control for manufacturing three dimensional (3D) stacked memory cell semiconductor devices. In one embodiment, a memory cell device includes a film stack comprising alternating pairs of dielectric layers and conductive structures horizontally formed on a substrate, an opening formed in the film stack, wherein the opening is filled with a channel layer and a center filling layer, and a protective liner layer disposed between the conductive structure and the channel layer.Type: GrantFiled: February 1, 2019Date of Patent: September 21, 2021Assignee: Applied Materials, Inc.Inventors: Jaesoo Ahn, Thomas Kwon, Mahendra Pakala
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Patent number: 11102879Abstract: A transition between a printed circuit board and a dielectric layer with controlled impedance and reduced and/or mitigate crosstalk for quantum applications are provided. A quantum device can comprise a microwave quantum circuit on a dielectric substrate and a printed circuit board comprising a via that comprises a transmission line. A wirebond between the transmission line of the printed circuit board and a transmission line of the microwave quantum circuit operatively couples the microwave quantum circuit to the printed circuit board. The via comprises a defined characteristic impedance. The wirebond provides a microwave signal connection between the printed circuit board and the microwave quantum circuit.Type: GrantFiled: September 20, 2018Date of Patent: August 24, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Salvatore Bernardo Olivadese, Patryk Gumann, Nicholas Torleiv Bronn
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Patent number: 11088124Abstract: A package includes a first redistribution structure, a bridge structure, an adhesive layer, a plurality of conductive pillars, an encapsulant, a first die, and a second die. The bridge structure is disposed on the first redistribution structure. The adhesive layer is disposed between the bridge structure and the first redistribution structure. The conductive pillars surround the bridge structure. A height of the conductive pillars is substantially equal to a sum of a height of the adhesive layer and a height of the bridge structure. The encapsulant encapsulates the bridge structure, the adhesive layer, and the conductive pillars. The first die and the second die are disposed over the bridge structure. The first die is electrically connected to the second die through the bridge structure. The first die and the second die are electrically connected to the first redistribution structure through the conductive pillars.Type: GrantFiled: August 14, 2018Date of Patent: August 10, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shing-Chao Chen, Ching-Hua Hsieh, Chih-Wei Lin, Sheng-Chieh Yang
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Patent number: 11081546Abstract: A method for manufacturing a semiconductor device includes forming a first vertical transistor on a semiconductor substrate, and forming a second vertical transistor stacked on the first vertical transistor. In the method, an isolation layer is formed between the first and second vertical transistors. The isolation layer includes a rare earth oxide.Type: GrantFiled: April 17, 2019Date of Patent: August 3, 2021Assignee: International Business Machines CorporationInventors: Juntao Li, Kangguo Cheng, Chen Zhang, Zhenxing Bi
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Patent number: 11075132Abstract: An integrated fan-out package includes a first redistribution structure, a die, an encapsulant, a plurality of conductive structures, and a second redistribution structure. The first redistribution structure has a first surface and a second surface opposite to the first surface. The die is disposed over the first surface of the first redistribution structure and is electrically connected to the first redistribution structure. The encapsulant encapsulates the die. The conductive structures are disposed on the first surface of the first redistribution structure and penetrates the encapsulant. The conductive structures surround the die. The second redistribution structure is disposed on the encapsulant and is electrically connected to the first redistribution structure through the conductive structures. The second redistribution structure includes at least one conductive pattern layer that is in physical contact with the encapsulant.Type: GrantFiled: March 29, 2018Date of Patent: July 27, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shin-Puu Jeng, Hsien-Wen Liu, Shih-Ting Hung, Yi-Jou Lin, Tzu-Jui Fang, Po-Yao Chuang
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Patent number: 11075263Abstract: [Object] To provide a semiconductor device capable of improving a discharge starting voltage when measuring electric characteristics, and widening a pad area of a surface electrode or increasing the number of semiconductor devices (number of chips) to be obtained from one wafer, and a method for manufacturing the same. [Solution Means] A semiconductor device 1 includes an n-type SiC layer 2 having a first surface 2A, a second surface 2B, and end faces 2C, a p-type voltage relaxing layer 7 formed in the SiC layer 2 so as to be exposed to the end portion of the first surface 2A of the SiC layer 2, an insulating layer 8 formed on the SiC layer 2 so as to cover the voltage relaxing layer 7, and an anode electrode 9 that is connected to the first surface 2A of the SiC layer 2 through the insulating layer 8 and has a pad area 95 selectively exposed.Type: GrantFiled: January 8, 2019Date of Patent: July 27, 2021Assignee: ROHM CO, , LTD.Inventor: Katsuhisa Nagao
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Patent number: 11075280Abstract: Self-aligned gate/junction for VTFET devices are provided. In one aspect, a method of forming a VTFET device includes: forming a stack on a wafer including a first c-SiGe layer, a c-Si layer, and a second c-SiGe layer, wherein the first c-SiGe layer serves as a bottom source/drain; forming fin hardmasks on the stack; partially recessing the second c-SiGe layer to form a fin(s) in the second c-SiGe layer, wherein the second c-SiGe layer that is partially recessed/fin(s) serve as a top source/drain; amorphizing the c-Si layer to form a-Si regions in between c-Si regions that serve as vertical channels; selectively removing the a-Si regions to form gate trenches; forming bottom/top spacers in the gate trenches; and forming gates in the gate trenches that are offset from the bottom/top source/drain by the bottom/top spacers. A VTFET device is also provided. The VTFET device is suitable for 3D monolithic integrated circuits.Type: GrantFiled: April 17, 2019Date of Patent: July 27, 2021Assignee: International Business Machines CorporationInventors: Zuoguang Liu, Kangguo Cheng, Oleg Gluschenkov, Muthumanickam Sankarapandian
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Patent number: 11075265Abstract: After forming a laterally contacting pair of a semiconductor fin and a conductive strap structure overlying a deep trench capacitor embedded in a substrate and forming a gate stack straddling a body region of the semiconductor fin, source/drain regions are formed in portions the semiconductor fin located on opposite sides of the gate stack by ion implantation. Next, a metal layer is applied over the source/drain region and subsequent annealing consumes entire source/drain regions to provide fully alloyed source/drain regions. A post alloyzation ion implantation is then performed to introduce dopants into the fully alloyed source/drain regions followed by an anneal to segregate the implanted dopants at interfaces between the fully alloyed source/drain regions and the body region of the semiconductor fin.Type: GrantFiled: April 8, 2019Date of Patent: July 27, 2021Assignee: International Business Machines CorporationInventors: Michael A. Guillorn, Fei Liu, Zhen Zhang
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Patent number: 11069575Abstract: A semiconductor device and its manufacturing method are presented, relating to semiconductor technology. The manufacturing method comprises: providing a substrate structure comprising a substrate, a source region on the substrate, and a gate structure on the source region; forming cavities on two opposing sides of the gate structure; epitaxially growing electrodes in the cavities, with each electrode comprising an electrode body and an amorphous layer on the electrode body; forming an dielectric layer on the substrate structure covering the electrodes and the gate structure; etching the dielectric layer to form a contact hole exposing the amorphous layer; forming a conductive adhesive layer on the bottom and on the side of the contact hole; and forming a contact component on the conductive adhesive layer filling the contact hole. In this semiconductor device, the adhesive layer may be directly formed on the amorphous layer, resulting in improved performance of the device.Type: GrantFiled: August 22, 2018Date of Patent: July 20, 2021Inventor: Jiquan Liu
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Patent number: 11018200Abstract: A display device including color filters overlapping each other on a non-emitting area of an upper substrate which is opposite to a lower substrate is provided. In the display device, color filters disposed close to a white emitting area include a same material, and the color filters extend a greater distance onto a non-emitting area disposed near the white emitting area, relative to distances extended onto other non-emitting areas. Thus, the display device may prevent light-leakage from the white emitting area.Type: GrantFiled: October 24, 2017Date of Patent: May 25, 2021Assignee: LG Display Co., Ltd.Inventors: Ho-Won Choi, Moon-Bae Gee
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Patent number: 11011501Abstract: A package structure including a first redistribution layer, a semiconductor die, through insulator vias, an insulating encapsulant and a second redistribution layer. The first redistribution layer includes a dielectric layer, a conductive layer, and connecting portions electrically connected to the conductive layer. The dielectric layer has first and second surfaces, the connecting portions has a first side, a second side, and sidewalls joining the first side to the second side. The first side of the connecting portions is exposed from and coplanar with the first surface of the dielectric layer. The semiconductor die is disposed on the second surface of the dielectric layer. The through insulator vias are connected to the conductive layer. The insulating encapsulant is disposed on the dielectric layer and encapsulating the semiconductor die and the through insulator vias. The second redistribution layer is disposed on the semiconductor die and over the insulating encapsulant.Type: GrantFiled: August 14, 2018Date of Patent: May 18, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hsuan Tai, Hao-Yi Tsai, Yu-Chih Huang, Chia-Hung Liu, Ting-Ting Kuo, Ban-Li Wu, Ying-Cheng Tseng, Chi-Hui Lai
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Patent number: 10998332Abstract: A semiconductor memory includes a stack section comprising a first area including a plurality of first conductors and a plurality of first insulators alternately stacked in a first direction and memory cells, and a second area including respective end portions of the plurality of stacked first conductors and the plurality of stacked first insulators, a plurality of contact plugs respectively reaching the plurality of first conductors in the second area, first and second supporting portions configured respectively to pass through the stack section in the first direction and arranged in a second direction, which crosses the first direction, in the second area, and a layer between respective adjacent first insulators, among the plurality of first insulators that are stacked, between the first supporting portion and the second supporting portion, wherein the layer is made of a material that is different from that of the first conductors.Type: GrantFiled: August 22, 2018Date of Patent: May 4, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventor: Tsuyoshi Sugisaki
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Patent number: 10930831Abstract: The invention provides a light emitting chip comprising a conductive carrier, a semiconductor layer body having a first semiconductor layer, a second semiconductor layer, and a radiation emitting layer, wherein the semiconductor layer has a concave part extending from the surface of the first semiconductor layer through the radiation emitting layer toward the second semiconductor layer; a first electrical connection layer electrically connected between the first semiconductor layer and the first electrode; a second electrical connection layer electrically connected between the second semiconductor layer and the conductive carrier, wherein the second electrical connection layer includes a continuous electrode structure connected to the second semiconductor layer, the continuous electrode structure being constituted by at least a frame structure distributed at the edge of the light emitting chip; and a second electrode electrically connected to the conductive carrier.Type: GrantFiled: September 20, 2018Date of Patent: February 23, 2021Assignee: High Power Opto, Inc.Inventors: Li-Ping Chou, Wan-Jou Chen, Wei-Yu Yen
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Patent number: 10923600Abstract: A transistor with stable electrical characteristics. A semiconductor device includes a first insulator over a substrate, a second insulator over the first insulator, an oxide semiconductor in contact with at least part of a top surface of the second insulator, a third insulator in contact with at least part of a top surface of the oxide semiconductor, a first conductor and a second conductor electrically connected to the oxide semiconductor, a fourth insulator over the third insulator, a third conductor which is over the fourth insulator and at least part of which is between the first conductor and the second conductor, and a fifth insulator over the third conductor. The first insulator contains a halogen element.Type: GrantFiled: July 25, 2018Date of Patent: February 16, 2021Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tetsuhiro Tanaka, Mitsuhiro Ichijo, Toshiya Endo, Akihisa Shimomura, Yuji Egi, Sachiaki Tezuka, Shunpei Yamazaki
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Patent number: 10916551Abstract: Provided is a method of forming a memory cell including a rectangular shaped via for at least one Vss node connection. In some embodiments, the rectangular shaped via has a length/width of greater than 1.5. The rectangular shaped via may be disposed on the Via0 and/or Via1 layer interfacing a first metal layer (e.g., M1). The memory cell may also include circular/square shaped vias having a length/width of between approximately 0.8 and 1.2. The circular/square shaped vias may be coplanar with the rectangular shaped vias.Type: GrantFiled: October 28, 2019Date of Patent: February 9, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Jhon Jhy Liaw
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Patent number: 10903305Abstract: A capacitor includes a shallow trench isolation (STI) layer disposed on top of a substrate. The capacitor also includes a first dielectric layer disposed on top of the STI layer. The capacitor further includes a metallization diffusion (MD) layer disposed within both of the STI layer and the first dielectric layer.Type: GrantFiled: August 22, 2018Date of Patent: January 26, 2021Assignee: Avago Technologies International Sales Pte. LimitedInventors: Qing Liu, Akira Ito
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Patent number: 10886178Abstract: A device including a triple-layer EPI stack including SiGe, Ge, and Si, respectively, with Ga confined therein, and method of production thereof. Embodiments include an EPI stack including a SiGe layer, a Ge layer, and a Si layer over a plurality of fins, the EPI stack positioned between and over a portion of sidewall spacers, wherein the Si layer is a top layer capping the Ge layer, and wherein the Ge layer is a middle layer capping the SiGe layer underneath; and a Ga layer in a portion of the Ge layer between the SiGe layer and the Si layer.Type: GrantFiled: August 22, 2018Date of Patent: January 5, 2021Assignee: GLOBALFOUNDRIES INC.Inventors: Tek Po Rinus Lee, Annie Levesque, Qun Gao, Hui Zang, Rishikesh Krishnan, Bharat Krishnan, Curtis Durfee
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Patent number: 10886187Abstract: An encapsulated integrated circuit is provided that includes an integrated circuit (IC) die. An encapsulation material encapsulates the IC die. A phononic bandgap structure is included within the encapsulation material that is configured to have a phononic bandgap with a frequency range approximately equal to a range of frequencies of thermal phonons produced by the IC die when the IC die is operating.Type: GrantFiled: October 24, 2017Date of Patent: January 5, 2021Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Benjamin Stassen Cook, Daniel Lee Revier
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Patent number: 10875127Abstract: The present disclosure provides a method for bonding an electronic component and a method for manufacturing a bonded body, which are capable of sintering a silver paste at a comparatively low temperature. Disclosed is a method for bonding an electronic component using a silver paste containing silver particles, the method including: applying a silver paste containing silver particles on a surface of a substrate and setting electronic components on the silver paste applied, heating in a reducing atmosphere at a temperature of lower than 300° C., and after heating in the reducing atmosphere, heating in an oxidizing atmosphere at a temperature of 300° C. or lower.Type: GrantFiled: September 20, 2018Date of Patent: December 29, 2020Assignee: NICHIA CORPORATIONInventor: Teppei Kunimune
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Patent number: 10868198Abstract: A semiconductor device, including an insulator formed on a top surface of a semiconductor substrate, a semiconductor layer, containing a first region of a first conductivity type, formed on the insulator layer, wherein the first region is a P+ region or an N+ region, a second region of a second conductivity type in direct contact with the first region and forming a P-N junction with the first region, wherein the P-N junction comprises a first portion parallel to the top surface of the semiconductor substrate, and the second region is the semiconductor substrate and partially covered by the semiconductor layer, a first metallization region in electrical contact with the first region and a second metallization region in electrical contact with the second region.Type: GrantFiled: February 14, 2018Date of Patent: December 15, 2020Assignee: Vanguard International Semiconductor CorporationInventors: Priyono Tri Sulistyanto, Manoj Kumar, Chia-Hao Lee, Chih-Cherng Liao, Shang-Hui Tu