Patents Examined by Nicole Ippolito Rausch
  • Patent number: 8110800
    Abstract: The present invention is for providing a scanning electron microscope system adapted to output contour information fitting in with the real pattern edge end of a sample, and is arranged to generate a local projection waveform by projecting the scanning electron microscope image in the tangential direction with respect to the pattern edge at each point of the pattern edge of the scanning electron microscope image, estimate the cross-sectional shape of the pattern transferred on the sample by applying the local projection waveform generated at each point to a library, which has previously been created, correlating the cross-sectional shape with the electron beam signal waveform, obtain position coordinate of the edge end fitting in with the cross-sectional shape, and output the contour of the pattern as a range of position coordinates.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: February 7, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Chie Shishido, Maki Tanaka, Atsushi Miyamoto
  • Patent number: 8110818
    Abstract: A method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system prevents particle absorption by grounding the wafer sample and kept electrically neutral during the transfer-in and transfer-out process.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: February 7, 2012
    Assignee: Hermes Microvision, Inc.
    Inventors: You-Jin Wang, Chung-Shih Pan
  • Patent number: 8110821
    Abstract: A container for transporting a receptacle (2) containing a radioactive substance for medical use. includes a shielded body made up of a belt of side walls connected to a base element and defining a top opening, and a shielded closing lid attachable to the top opening by locking elements shaped so as to be activated by a translational movement of the lid in the top opening, this “locking movement” taking place along the axis of the opening and towards the opposing base element. The lid is further equipped with elements for deactivating the locking elements to enable it to be separated from the container body. In one advantageous embodiment, the lid has a plurality of retractable projecting studs designed to fit by a snap-action type phenomenon into at least one complementary housing formed in the opening of the container body during the locking movement.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: February 7, 2012
    Assignee: Lemer Protection Anti-X Par Abreviation Societe Lemer Pax
    Inventor: Pierre-Marie Lemer
  • Patent number: 8106350
    Abstract: A method of mass spectrometry is disclosed wherein distortions in a mass spectrum are corrected for by determining or estimating the number of ions Qi which arrived in an ith time bin, wherein: Formula (I) and wherein qi is the actual total number of ion arrival events recorded in the ith time bin and x is an integer corresponding to the number of time bins which correspond with an estimated deadtime period.
    Type: Grant
    Filed: February 22, 2006
    Date of Patent: January 31, 2012
    Assignee: Micromass UK Limited
    Inventors: Martin Green, Jason Lee Wildgoose, Marc V. Gorenstein
  • Patent number: 8101909
    Abstract: The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.
    Type: Grant
    Filed: January 26, 2009
    Date of Patent: January 24, 2012
    Assignee: Ionwerks, Inc.
    Inventors: Thomas F. Egan, J. Albert Schultz, Steven R. Ulrich, Kelley L. Waters
  • Patent number: 8080790
    Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: December 20, 2011
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao, Takeshi Mizuno, Yuki Ojima
  • Patent number: 8080812
    Abstract: Systems and methods that provide multi-attribute light effects, including one or more channels for each light effect, preferably both channels being provided in an array of solid state light emitters.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: December 20, 2011
    Assignee: Phoseon Technology, Inc.
    Inventors: Jon Marson, Alex Schreiner
  • Patent number: 8080778
    Abstract: The present invention provides an improved cold-atom system having multiple chambers such that a first of the chambers includes an atom source. The system also includes an atom trap disposed inside a second of the chambers. A fluidic connection is provided between the first of the vacuum chamber and the second of the vacuum chamber.
    Type: Grant
    Filed: February 23, 2009
    Date of Patent: December 20, 2011
    Assignees: SRI International, The Regents of the University of Colorado, a body Corporate
    Inventor: Sterling Eduardo McBride
  • Patent number: 8076654
    Abstract: The present invention provides a surface inspection method and apparatus for inspecting a surface of a sample, in which a resistive film is coated on the surface, and a beam is irradiated to the surface having the resistive film coated thereon, to thereby conduct inspection of the surface of the sample. In the surface inspection method of the present invention, a resistive film having an arbitrarily determined thickness t1 is first coated on a surface of a sample. Thereafter, a part of the resistive film having the arbitrarily determined thickness t1 is dissolved in a solvent, to thereby reduce the thickness of the resistive film to a desired level. This enables precise control of a value of resistance of the resistive film and suppresses distortion of an image to be detected.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: December 13, 2011
    Assignee: Ebara Corporation
    Inventors: Masahiro Hatakeyama, Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji
  • Patent number: 8076635
    Abstract: Embodiments of the present invention are directed to apparatus and methods for performing mass spectrometry. Data pair information is subjected to an ion audit process in which data pair information that relates to scored compounds is subtracted from the data pair information. The depleted information more readily reveals data pair information for compounds present with smaller signals.
    Type: Grant
    Filed: May 24, 2007
    Date of Patent: December 13, 2011
    Assignee: Waters Technologies Corporation
    Inventors: Scott J. Geromanos, Guo-Zhong Li, Jeffrey C. Silva, Marc V. Gorenstein, Hans Vissers
  • Patent number: 8076639
    Abstract: A desorption atmospheric pressure chemical ionization (DAPCI) system delivers a primary ion beam composed of an inert, high velocity gas and solvent ions to a surface to effect desorption and ionization of both volatile and non-volatile species present on surfaces. A electrode having a tapered tip is connected to a high voltage power supply. The tapered tip projects outward from a capillary carrying a high-speed flow of gas. A vapor of a solvent is mixed into the annular gas flow surrounding the needle. The gaseous solvent vapor is ionized in close proximity to the tapered tip by virtue of the high voltage applied to the electrode. The high-speed flow of gas and solvent vapor ions extending outward from the capillary is directed toward a substrate on which an analyte of interest may have been deposited.
    Type: Grant
    Filed: June 9, 2009
    Date of Patent: December 13, 2011
    Assignee: Purdue Research Foundation
    Inventors: Robert G. Cooks, Bogdan Gologan, Zoltan Takáts, Justin M. Wiseman, Ismael Cotte-Rodriguez
  • Patent number: 8071941
    Abstract: A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: December 6, 2011
    Assignee: Inficon GmbH
    Inventors: Martin Wüest, Wolfram Knapp
  • Patent number: 8067750
    Abstract: An ultraviolet area sterilizer or disinfector is incorporated into a building structure where concern exists regarding the presence of pathogenic bacteria on environmental surfaces. Ultraviolet C (UV-C) generators generate UV-C that is directed to architectural partitions of an enclosed area. The architectural partitions reflect UV-C to kill pathogens in the enclosed area. The device transmits a calculated dose of UV-C from a fixture mounted to an architectural partition in the enclosed area. Once an effective cumulative dose of UV-C has been reflected to radiation sensors, as measured by the sensors, the device shuts down.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: November 29, 2011
    Inventor: Jeffery L. Deal
  • Patent number: 8067758
    Abstract: The present (or current) nuclear shielding is bulky and difficult to handle due to the reduced stopping power of the neutral radiations (X, gamma, n) in materials. It is proven that these radiations are reflecting at grazing incidence angles on special substrates called super-mirrors that contain nano-layers of various materials. The usage of nano-structures in an ordered manner or of nano-tubes may create inside the nano-structure the super-mirror reflection conditions and makes these nano-structures act like wave-guide for this neutral radiation driving it and turning at angles greater than 90 degrees requiring a total thickness a few microns only. The usage of ferro or piezo electric nano-structures generates a “shield” structure that has the wave-guides inside with the path dependent on a control voltage.
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: November 29, 2011
    Inventors: Liviu Popa-Simil, Claudiu Iulian Muntele
  • Patent number: 8067730
    Abstract: The field of the invention is atmospheric pressure mass spectrometry (MS), and more specifically a process and apparatus which combine infrared laser ablation (LA) with electrospray ionization (ESI).
    Type: Grant
    Filed: July 18, 2008
    Date of Patent: November 29, 2011
    Assignee: The George Washington University
    Inventors: Akos Vertes, Peter Nemes
  • Patent number: 8063358
    Abstract: A method of mass spectrometry is disclosed wherein voltage signals from an ion detector are analyzed. A second differential of each voltage signal is obtained and the start and end times of observed voltage peaks are determined. The intensity and average time of each voltage peak is then determined and the intensity and time values are stored. An intermediate composite mass spectrum is then formed by combining the intensity and time values which relate to each voltage peak observed from multiple experimental runs. The various pairs of time and intensity data are then integrated to produce a smooth continuum mass spectrum. The continuum mass spectrum may then be further processed by determining the second differential of the continuum mass spectrum. The start and end times of mass peaks observed in the continuum mass spectrum may be determined. The intensity and mass to charge ratio of each mass peak observed in the continuum mass spectrum may then determined.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: November 22, 2011
    Assignee: Micromass UK Ltd.
    Inventors: Robert Harold Bateman, Jeffery Mark Brown, Martin Raymond Green, Jason Lee Wildgoose
  • Patent number: 8053745
    Abstract: A device for circumscribing a target site with a beam. The target site is located within a target body. The path of the beam is varied rotationally so as to form a cone with an isocenter at the cone's apex. The isocenter is fixed on the approximate center of the target site. The target body is rotated about a vertical axis passing approximately through the center of the target site, and the rates of rotation of the beam path and body, respectively correspond so that the beam intersects an axis passing through the target site at an approximately constant angle.
    Type: Grant
    Filed: February 24, 2009
    Date of Patent: November 8, 2011
    Inventor: John F. Moore
  • Patent number: 8049165
    Abstract: A method for determining heavy metal loading in a subject includes collecting a saliva sample from the subject containing a concentration of a heavy metal. The saliva sample is subjected to inductively coupled plasma mass spectrometry to yield a heavy metal loading measurement for the subject. The saliva sample is readily collected on a substrate absorbing a preselected amount of saliva such as filter paper. As the amount of saliva necessary to saturate a given volume of substrate is known, the volume of saliva within a substrate is also known. The resulting heavy metal loading measurement is readily correlated with a blood level for the heavy metal in the subject.
    Type: Grant
    Filed: February 26, 2007
    Date of Patent: November 1, 2011
    Assignee: Coventry Diagnostics LLC
    Inventor: David Schneider
  • Patent number: 8039813
    Abstract: The present invention relates to a particle-optical component comprising a first multi-aperture plate, and a second multi-aperture plate forming a gap between them; wherein a plurality of apertures of the first multi-aperture plate is arranged such that each aperture of the plurality of apertures of the first multi-aperture plate is aligned with a corresponding aperture of a plurality of apertures of the second multi-aperture plate; and wherein the gap has a first width at a first location and a second width at a second location and wherein the second width is by at least 5% greater than the first width. In addition, the present invention pertains to charged particle systems and arrangements comprising such components and methods of manufacturing multi aperture plates having a curved surface.
    Type: Grant
    Filed: September 6, 2006
    Date of Patent: October 18, 2011
    Assignees: Carl Zeiss SMT GmbH, Applied Materials Israel Ltd
    Inventors: Antonio Casares, Thomas Kemen, Rainer Knippelmeyer, Thomas Bayer, Georg Fritz, Johann Greschner, Samuel Kalt
  • Patent number: 8028343
    Abstract: A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.
    Type: Grant
    Filed: January 29, 2009
    Date of Patent: September 27, 2011
    Assignee: Nanonmechanics, Inc.
    Inventors: Warren C. Oliver, John Swindernan, Jennifer Hay, Karmit Parks