Patents by Inventor Edward J. Nowak

Edward J. Nowak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11024546
    Abstract: Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: June 1, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10943831
    Abstract: Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: March 9, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10909443
    Abstract: Embodiments of the present disclosure provide a neuromorphic circuit structure including: a first vertically-extending neural node configured to generate an output signal based on at least one input to the first vertically-extending neural node; an interconnect stack adjacent the vertically-extending neural node, the interconnect stack including a first conducting line coupled to the first vertically-extending neural node and configured to receive the output signal, a second conducting line vertically separated from the first conducting line, and a memory via vertically coupling the first conducting line to the second conducting line; and a second vertically-extending neural node adjacent the interconnect stack, and coupled to the second conducting line for receiving the output signal from the first vertically-extending neural node.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: February 2, 2021
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Edward J. Nowak, Siva P. Adusumilli, Ruilong Xie, Julien Frougier
  • Patent number: 10903361
    Abstract: A vertical transport fin field effect transistor (VTFET) with a smaller cross-sectional area at the top of the fin than at the bottom, including, a substrate, a vertical fin on the substrate, wherein the vertical fin has a cross-sectional area at the base of the vertical fin that is larger than a cross-sectional area at the top of the vertical fin, wherein the cross-sectional area at the top of the vertical fin is in the range of about 10% to about 75% of the cross-sectional area at the base of the vertical fin, and a central gated region between the base and the top of the vertical fin.
    Type: Grant
    Filed: February 18, 2020
    Date of Patent: January 26, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10896857
    Abstract: Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
    Type: Grant
    Filed: May 10, 2019
    Date of Patent: January 19, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10879112
    Abstract: A method of forming a via and a wiring structure formed are disclosed. The method may include forming a conductive line in a first dielectric layer; forming a hard mask adjacent to the conductive line after the conductive line forming; forming a second dielectric layer over the hard mask; and forming a via opening to the conductive line in the second dielectric layer. The via opening lands at least partially on the hard mask to self-align the via opening to the conductive line. A via may be formed by filling the via opening with a conductor.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: December 29, 2020
    Assignee: GlobalFoundries Inc.
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Publication number: 20200272880
    Abstract: Embodiments of the present disclosure provide a neuromorphic circuit structure including: a first vertically-extending neural node configured to generate an output signal based on at least one input to the first vertically-extending neural node; an interconnect stack adjacent the vertically-extending neural node, the interconnect stack including a first conducting line coupled to the first vertically-extending neural node and configured to receive the output signal, a second conducting line vertically separated from the first conducting line, and a memory via vertically coupling the first conducting line to the second conducting line; and a second vertically-extending neural node adjacent the interconnect stack, and coupled to the second conducting line for receiving the output signal from the first vertically-extending neural node.
    Type: Application
    Filed: February 25, 2019
    Publication date: August 27, 2020
    Inventors: Edward J. Nowak, Siva P. Adusumilli, Ruilong Xie, Julien Frougier
  • Publication number: 20200251498
    Abstract: Structures for a memory cell and methods associated with forming and using such structures. The structure includes a silicon-on-insulator wafer including a device layer, a substrate, and a buried insulator layer between the device layer and the substrate. The structure further includes a field-effect transistor having first and second source/drain regions and a gate electrode that are over the buried insulator layer. A moat region is arranged in the substrate beneath the field-effect transistor, a well is arranged in the substrate beneath the moat region, and an isolation region extends through the device layer and the buried insulator layer into the substrate. The isolation region is arranged to surround a portion of the device layer defining an active region for the field-effect transistor and a portion of the moat region. A fence region, which extends between the well and the isolation region, surrounds the portion of the moat region.
    Type: Application
    Filed: February 4, 2019
    Publication date: August 6, 2020
    Inventor: Edward J. Nowak
  • Patent number: 10727253
    Abstract: Structures for a memory cell and methods associated with forming and using such structures. The structure includes a silicon-on-insulator wafer including a device layer, a substrate, and a buried insulator layer between the device layer and the substrate. The structure further includes a field-effect transistor having first and second source/drain regions and a gate electrode that are over the buried insulator layer. A moat region is arranged in the substrate beneath the field-effect transistor, a well is arranged in the substrate beneath the moat region, and an isolation region extends through the device layer and the buried insulator layer into the substrate. The isolation region is arranged to surround a portion of the device layer defining an active region for the field-effect transistor and a portion of the moat region. A fence region, which extends between the well and the isolation region, surrounds the portion of the moat region.
    Type: Grant
    Filed: February 4, 2019
    Date of Patent: July 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Edward J. Nowak
  • Patent number: 10714616
    Abstract: A semiconductor device including semiconductor material having a bend and a trench feature formed at the bend, and a gate structure at least partially disposed in the trench feature. A method of fabricating a semiconductor structure including forming a semiconductor material with a trench feature over a layer, forming a gate structure at least partially in the trench feature, and bending the semiconductor material such that stress is induced in the semiconductor material in an inversion channel region of the gate structure.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: July 14, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
  • Patent number: 10714396
    Abstract: The method includes prior to depositing a gate on a first vertical FET on a semiconductor substrate, depositing a first layer on the first vertical FET on the semiconductor substrate. The method further includes prior to depositing a gate on a second vertical FET on the semiconductor substrate, depositing a second layer on the second vertical FET on the semiconductor substrate. The method further includes etching the first layer on the first vertical FET to a lower height than the second layer on the second vertical FET. The method further includes depositing a gate material on both the first vertical FET and the second vertical FET. The method further includes etching the gate material on both the first vertical FET and the second vertical FET to a co-planar height.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: July 14, 2020
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10699961
    Abstract: Structures for switches and methods for forming structures that include a switch. A first well and a section well are arranged in a substrate. Trench isolation regions are arranged in the substrate to define multiple active device regions. Each of the active device regions includes a section of the first well that is surrounded by the trench isolation regions. The second well has an opposite conductivity type from the first well. The active device regions and the trench isolation regions are arranged between the top surface of the substrate and the second well, and the second well is contiguous with the trench isolation regions.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: June 30, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Jagar Singh, Edward J. Nowak
  • Publication number: 20200203527
    Abstract: A vertical transport fin field effect transistor (VTFET) with a smaller cross-sectional area at the top of the fin than at the bottom, including, a substrate, a vertical fin on the substrate, wherein the vertical fin has a cross-sectional area at the base of the vertical fin that is larger than a cross-sectional area at the top of the vertical fin, wherein the cross-sectional area at the top of the vertical fin is in the range of about 10% to about 75% of the cross-sectional area at the base of the vertical fin, and a central gated region between the base and the top of the vertical fin.
    Type: Application
    Filed: February 18, 2020
    Publication date: June 25, 2020
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10658390
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to virtual drains for decreased harmonic generation in fully depleted SOI (FDSOI) RF switches and methods of manufacture. The structure includes one or more active devices on a semiconductor on insulator material which is on top of a substrate; and a virtual drain region composed of a well region within the substrate and spaced apart from an active region of the one or more devices, the virtual drain region configured to be biased to collect electrons which would accumulate in the substrate.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: May 19, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Edward J. Nowak, Richard F. Taylor, Tamilmani Ethirajan
  • Patent number: 10636876
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to devices with channel extension regions and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; and a channel below the gate structure, the channel comprising: a first channel region, adjacent to the source region; and a second channel region, adjacent to the drain region and comprising a lower threshold voltage than the first channel region.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Lars Müller-Meskamp, Luca Pirro, Edward J. Nowak
  • Patent number: 10629703
    Abstract: Embodiments of the present disclosure provide an integrated circuit (IC) structure, which can include: a semiconductor fin; a gate dielectric positioned above a first region of the semiconductor fin; a spacer positioned above a second region of the semiconductor fin and adjacent to the gate dielectric; and a source/drain region contacting a third region of the semiconductor fin; wherein the first region of the semiconductor fin includes substantially vertical sidewalls, and the third region of the semiconductor fin includes sloped sidewalls.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: April 21, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 10622477
    Abstract: A vertical transport fin field effect transistor (VTFET) with a smaller cross-sectional area at the top of the fin than at the bottom, including, a substrate, a vertical fin on the substrate, wherein the vertical fin has a cross-sectional area at the base of the vertical fin that is larger than a cross-sectional area at the top of the vertical fin, wherein the cross-sectional area at the top of the vertical fin is in the range of about 10% to about 75% of the cross-sectional area at the base of the vertical fin, and a central gated region between the base and the top of the vertical fin.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: April 14, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Publication number: 20200075425
    Abstract: Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 5, 2020
    Inventors: Brent A. ANDERSON, Edward J. NOWAK
  • Publication number: 20200075424
    Abstract: Vertical field effect transistors (FETs) with minimum pitch and methods of manufacture are disclosed. The structure includes at least one vertical fin structure and gate material contacting with the at least one vertical fin structure. The structure further includes metal material in electrical contact with the ends of the at least one vertical fin.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 5, 2020
    Inventors: Brent A. ANDERSON, Edward J. NOWAK
  • Patent number: RE48616
    Abstract: A semiconductor structure includes a silicon-on-insulator (SOI) substrate, the SOI substrate comprising a bottom silicon layer, a buried oxide (BOX) layer, and a top silicon layer; a plurality of active devices formed on the top silicon layer; and an isolation region located between two of the active devices, wherein at least two of the plurality of active devices are electrically isolated from each other by the isolation region, and wherein the isolation region extends through the top silicon layer to the BOX layer.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: June 29, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Brent A. Anderson, Edward J. Nowak