Substrate supporter for semiconductor deposition apparatus
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Description
Claims
The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.
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Patent History
Patent number: D716742
Type: Grant
Filed: Mar 12, 2014
Date of Patent: Nov 4, 2014
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Dae Youn Kim (Daejeon), Jeong Ho Lee (Seoul), Seung Seob Lee (Seoul), Hak Yong Kwon (Osan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/484,670
Type: Grant
Filed: Mar 12, 2014
Date of Patent: Nov 4, 2014
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Dae Youn Kim (Daejeon), Jeong Ho Lee (Seoul), Seung Seob Lee (Seoul), Hak Yong Kwon (Osan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/484,670
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)