Etching Inorganic Substrate Patents (Class 216/96)
  • Patent number: 10899665
    Abstract: A construction material, a hydrophobic, optionally multi-cellular, inorganic particulate material for use in the construction material, for example, to improve the crush strength and/or stability of the construction material, a method of making the construction material, constructions comprising the construction material, and a method of improving the stability of a construction material.
    Type: Grant
    Filed: June 30, 2017
    Date of Patent: January 26, 2021
    Assignee: ImerTech SAS
    Inventors: Emmanuel Bertin, Christel Careme, Erik Van Dijinen, Anabelle Huguette Reneé Legrix, Lesley Jane Trewolla, Neil Treat, Jarrod Hart, Scott Glover
  • Patent number: 10242929
    Abstract: A method of forming a semiconductor device includes providing a semiconductor substrate and forming amorphous semiconductor layers adjacent a major surface of the substrate. The method includes interposing dielectric layers between the amorphous semiconductor layers. The method includes forming polycrystalline semiconductor layers adjacent the amorphous semiconductor layers. The method includes interposing dielectric layers between the polycrystalline semiconductor layers and between the last amorphous semiconductor layer and the first polycrystalline semiconductor layer. The method includes forming a fine-grain polycrystalline semiconductor layer adjacent the polycrystalline semiconductor layers but is separated from the last polycrystalline semiconductor layer by an additional dielectric layer. The fine-grain polycrystalline semiconductor layer is formed at a higher temperature than the polycrystalline semiconductor layers and the amorphous semiconductor layers.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: March 26, 2019
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: David Lysacek, Viola Krizakova, Jan Sik
  • Patent number: 9748396
    Abstract: As source and drain wiring, a base layer and a cap layer are each formed of a MoNiNb alloy film, and a low-resistance layer is formed of Cu. The resultant laminated metal film is patterned through one-time wet etching to form a drain electrode and a source electrode. Cu serving as a main wiring layer does not corrode because of being covered with a MoNiNb alloy having good corrosion resistance. Further, even when a protective insulating film including an oxide is formed by plasma CVD in an oxidizing atmosphere, Cu is not oxidized. With the wet etching, the sidewall taper angle of the laminated metal film can be controlled to 20 degrees or more and less than 70 degrees.
    Type: Grant
    Filed: December 6, 2016
    Date of Patent: August 29, 2017
    Assignee: Panasonic Liquid Crystal Display Co., Ltd.
    Inventor: Tomoya Kato
  • Patent number: 9005456
    Abstract: Disclosed herein is a method for manufacturing a printed circuit board, wherein a protective film for stripping and a metal layer closely adhered to the protective film for stripping are formed on an inner layer pad to protect the inner layer pad at the time of laser processing related to cavity processing and applying an etchant, thereby making it possible to improve reliability of a product.
    Type: Grant
    Filed: November 1, 2013
    Date of Patent: April 14, 2015
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Kwang Sun You, Seung Ryeol Lee, Sang Hoon Park, Kyung Jin Heo, Jae Ho Shin, Joong Hyuk Jung
  • Patent number: 8999182
    Abstract: A method for manufacturing a liquid discharge head includes a step of preparing a first substrate having an energy generating element at a front surface side thereof; a step of forming a wall member, which is to become a wall for a liquid flow passage, at the front surface side of the first substrate; a step of forming a mask having an opening on the wall member and forming a second substrate, which is composed of silicon and is to become an orifice plate, on the mask; and a step of forming a liquid supply port in the first substrate and a liquid discharge port in the second substrate by supplying an etchant from a back surface side of the first substrate, the back surface being a surface opposite the front surface.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: April 7, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hiroyuki Abo, Keiji Matsumoto
  • Patent number: 8992787
    Abstract: Anode foils suitable for use in electrolytic capacitors, including those having multiple anode configurations, have improved strength, reduced brittleness, and increased capacitance compared to conventional anode foils for electrolytic capacitors. Exemplary methods of manufacturing an anode foil suitable for use in an electrolytic capacitor include disposing a resist material in a predetermined pattern on an exposed surface of an anode foil substrate such that a first portion of the exposed surface of the anode foil substrate is covered by the resist material, and a second portion of the exposed surface remains uncovered; polymerizing the resist material; exposing at least the second portion of the exposed surface to one or more etchants so as to form a plurality of tunnels; stripping the polymerized resist material; and widening at least a portion of the plurality of tunnels. The resist material may be deposited, for example, by ink-jet printing, stamping or screen printing.
    Type: Grant
    Filed: July 29, 2011
    Date of Patent: March 31, 2015
    Assignee: Pacesetter, Inc.
    Inventors: David R. Bowen, Ralph Jason Hemphill, Xiaofei Jiang, Corina Geiculescu, Tearl Stocker
  • Patent number: 8986844
    Abstract: A method for manufacturing a touch screen panel includes reinforcing a glass substrate, the glass substrate to be formed with a plurality of touch screen panels in unit cells, reinforcing the glass substrate including forming a reinforcing layer on an upper and a lower side of the glass substrate by performing a reinforcement treatment on a whole surface of the glass substrate, cutting the reinforced glass substrate in each unit cell, removing a part of the reinforcing layer formed in the upper and the lower side of the glass substrate adjacent to a cut cross section, performing a chemical HF treatment on a cross section of the glass substrate corresponding to the cut cross section and exposing the glass substrate by partially removing the reinforcing layer, and forming a touch screen panel per region of the unit cells, respectively.
    Type: Grant
    Filed: January 4, 2011
    Date of Patent: March 24, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: Byeong-Kyu Jeon, Sung-Ku Kang
  • Patent number: 8974681
    Abstract: A method for balancing a rotor, notably of a turbomachine, includes a step of determining an unbalancing mass, and a step of balancing by chemical machining of the rotor. The chemical machining includes arranging a bath containing a chemical machining agent so that the bath has a capacity of heterogeneous material removal as a function of the depth in the bath, an amount of material removal at a first depth in the bath is greater than an amount of material removal at a second depth in the bath; immersing the rotor in the bath; and orienting the rotor in the bath taking account of the capacity of heterogeneous material removal so that the quantity of material removed from the rotor in a zone of the unbalancing mass is sufficient to balance the rotor.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: March 10, 2015
    Assignee: SNECMA
    Inventors: Gabriela Rodriguez Elizondo, Stephane Vitrac, Marcial Suarez Cabrera, Patrick Momier
  • Patent number: 8951427
    Abstract: A method for manufacturing electrical and/or optical components, wherein a hot melt composition including an alkane based wax and an amorphous material as a masking material is used. The hot melt composition has a melting point of between 40° C. and 85° C. and a viscosity of between 5 and 20 mPa·s at not less than one temperature within the range of between 50° C. and 140° C. A hot melt composition includes between 40 weight % and 89.9 weight % of an alkane based wax; between 10 weight % and 50 weight % of an amorphous material; and between 0.1 weight % and 10 weight % of a phosphonium based ionic liquid. A system and a method for manufacturing electronic and/or optical components is provided, wherein after the etch processes and/or plating processes, the hot melt composition is removed from the substrate with the aid of hot water.
    Type: Grant
    Filed: April 26, 2013
    Date of Patent: February 10, 2015
    Assignee: Oce Technologies B.V.
    Inventors: Björn H. A. J. M. Ketelaars, Hylke Veenstra
  • Patent number: 8945406
    Abstract: A method for manufacturing a symbol on an exterior of an electronic device is provided. The method includes preparing a support layer, preparing a nanograting layer on the support layer, the nanograting layer including a first nanograting area corresponding to a preset symbol and a second nanograting area corresponding to an area other than the preset symbol, wherein each of the first nanograting area and the second nanograting area includes three-dimensional (3D) nanostructures and a pitch between the 3D nanostructures arranged in the first nanograting area is different from a pitch between the 3D nanostructures arranged in the second nanograting area.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: February 3, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seong-eun Chung, Il-yong Jung
  • Patent number: 8940178
    Abstract: A method of texturizing a silicon substrate comprising a) contacting the substrate with an etching solution comprising glycolic acid, b) etching a surface of the substrate thereby forming disruptions in said surface of the substrate, and c) removing the etching solution to yield a texturized substrate, said texturized substrate having a plurality of disruptions in at least one surface with a surface density of disruptions of a minimum of 60 disruptions in a 400 micron square area.
    Type: Grant
    Filed: March 18, 2009
    Date of Patent: January 27, 2015
    Assignee: E I du Pont de Nemours and Company
    Inventors: Seung Jin Lee, Hee Soo Yeo
  • Patent number: 8932476
    Abstract: Apparatuses and methods are provided where porous metal is deposited on a substrate, a mask is provided on the porous metal and then an etching is performed.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: January 13, 2015
    Assignee: Infineon Technologies AG
    Inventors: Thomas Kunstmann, Stefan Willkofer, Anja Gissibl, Johann Strasser, Matthias Mueller, Eva-Maria Hess
  • Patent number: 8932473
    Abstract: The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: January 13, 2015
    Assignee: Universiteit Twente
    Inventors: Johan Willem Berenschot, Niels Roelof Tas
  • Patent number: 8926853
    Abstract: Aspects of the invention are directed to a method of forming graphene structures. Initially, a cluster of particles is received. The cluster of particles comprises a plurality of particles with each particle in the plurality of particles contacting one or more other particles in the plurality of particles. Subsequently, one or more layers are deposited on the cluster of particles with the one or more layers comprising graphene. The plurality of particles are then etched away without substantially etching the deposited one or more layers. Lastly, the remaining one or more layers are dried. The resultant graphene structures are particularly resistant to the negative effects of aggregation and compaction.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: January 6, 2015
    Inventors: Xin Zhao, Yu-Ming Lin
  • Patent number: 8911643
    Abstract: A polishing liquid which is used for chemical mechanical polishing of a body to be polished in a planarization process for manufacturing of a semiconductor integrated circuit, the body to be polished including at least a first layer containing polysilicon or modified polysilicon and a second layer containing at least one selected from the group consisting of silicon oxide, silicon nitride, silicon carbide, silicon carbonitride, silicon oxycarbide, and silicon oxynitride, the polishing liquid having a pH of 1.5 to 7.0, including (1) colloidal silica particles, (2) an organic acid, and (3) an anionic surfactant, and being capable of selectively polishing the second layer with respect to the first layer.
    Type: Grant
    Filed: May 28, 2009
    Date of Patent: December 16, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Tetsuya Kamimura
  • Patent number: 8883033
    Abstract: A method for removing silicon nitride material includes following steps. A substrate having at least a gate structure formed thereon is provided, and at least a silicon nitride hard mask is formed on top of the gate structure. A first removal is performed to remove a portion of the silicon nitride hard mask with a first phosphoric acid (H3PO4) solution. A second removal is subsequently performed to remove remnant silicon nitride hard mask with a second phosphoric acid solution. The first removal and the second removal are performed in-situ. A temperature of the second phosphoric acid solution is lower than a temperature of the first phosphoric acid solution.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: November 11, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chi-Sheng Chen, Shin-Chi Chen, Chih-Yueh Li, Ted Ming-Lang Guo, Bo-Syuan Lee, Tsung-Hsun Tsai, Yu-Chin Cheng
  • Patent number: 8883032
    Abstract: A method of surface treatment for zirconium oxide implants and the etching formula for the same are disclosed. The processes are carried out at room temperature. The average surface roughness Ra and the standard deviation of the implant are measured showing significant improvement while comparing with the un-treated sample and the hydrofluoric acid treated samples. The average contact angle is provided showing an almost hydrophilic surface after etched by the formula according to the present invention.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: November 11, 2014
    Inventors: Sea-Fue Wang, Chung-Kuang Yang, Jen-Chang Yang, Sheng-Yang Lee
  • Patent number: 8877075
    Abstract: In accordance with an embodiment of the present invention, a method of polishing a device includes providing a layer having a non-uniform top surface. The non-uniform top surface includes a plurality of protrusions. The method further includes removing the plurality of protrusions by exposing the layer to a fluid that has gas bubbles and a liquid.
    Type: Grant
    Filed: February 1, 2012
    Date of Patent: November 4, 2014
    Assignee: Infineon Technologies AG
    Inventor: Johann Kosub
  • Patent number: 8871108
    Abstract: A method of removing carbon materials, preferably amorphous carbon, from a substrate includes dispensing a liquid sulfuric acid composition including sulfuric acid and/or its desiccating species and precursors and having a water/sulfuric acid molar ratio of no greater than 5:1 onto an material coated substrate in an amount effective to substantially uniformly coat the carbon material coated substrate. The liquid sulfuric acid composition is exposed to water vapor in an amount effective to increase the temperature of the liquid sulfuric acid composition above the temperature of the liquid sulfuric acid composition prior to exposure to the water vapor. In preferred embodiments, amorphous carbon is selectively removed as compared to a silicon oxide (e.g., silicon dioxide) and/or silicon nitride.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 28, 2014
    Assignee: TEL FSI, Inc.
    Inventor: Jeffrey M. Lauerhaas
  • Patent number: 8858813
    Abstract: A patterning process comprises (a) providing at least one substrate having at least one major surface; (b) providing at least one patterning composition comprising at least one functionalizing molecule that is a perfluoropolyether organosulfur compound; (c) applying the patterning composition to the major surface of the substrate in a manner so as to form at least one functionalized region and at least one unfunctionalized region of the major surface; and (d) etching at least a portion of the unfunctionalized region.
    Type: Grant
    Filed: December 2, 2009
    Date of Patent: October 14, 2014
    Assignee: 3M Innovative Properties Company
    Inventors: Lijun Zu, Matthew H. Frey, Suresh S. Iyer
  • Patent number: 8828251
    Abstract: A method for finishing an exterior surface of an injection-molded product is provided, in which a metal layer is formed on the exterior surface of the injection-molded product, a photoresist layer is formed on the metal layer, a photomask is placed on the photoresist layer, light is projected onto the photomask, and remaining parts of the metal layer and the photoresist layer except for parts corresponding to a pattern formed on the photomask are removed by etching.
    Type: Grant
    Filed: May 25, 2011
    Date of Patent: September 9, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Bae Park, Pil-Woo Lee, Jong-Hwa Kim, Hak-Ju Kim, Jung-Won Cho
  • Patent number: 8828258
    Abstract: A method for surface treatment of a stainless steel separator for a fuel cell comprises preparing a stainless steel sheet containing nickel, chrome and iron, and having a passive film on a surface of the stainless steel sheet, and dipping the stainless steel sheet into a mixed etching solution of nitric acid (HNO3) and sulfuric acid (H2SO4) at a temperature of 50-70° C. for 30 seconds to 30 minutes to selectively lower an amount of Fe in the passive film formed on the surface of the stainless steel sheet.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: September 9, 2014
    Assignee: Hyundai Hysco
    Inventors: Yoo Taek Jeon, Yeon Soo Jeong
  • Patent number: 8822346
    Abstract: A reaction block having a plurality of reaction chambers defined therein is provided. A bottom surface of each of the reaction chambers is configured to provide a seal for a corresponding reaction region on the substrate and around a periphery of the substrate. The reaction block includes a plurality of inlet channels and provides a gap between a top surface of the substrate and a bottom surface of the reaction block. The gap accepts a fluid from the inlet channels, wherein the reaction block includes a plurality of vacuum channels having access to the bottom surface of the reaction block to remove the fluid from the gap. A method of selectively etching a substrate for combinatorial processing is also provided.
    Type: Grant
    Filed: June 10, 2008
    Date of Patent: September 2, 2014
    Assignee: Intermolecular, Inc.
    Inventor: Kurt Weiner
  • Patent number: 8821747
    Abstract: A method for manufacturing a glass substrate for a magnetic disk comprises a surface grinding step of processing a mirror-surface plate glass, having a main surface in the form of a mirror surface, to a required flatness and surface roughness using fixed abrasive particles. The method comprises, before the surface grinding step using the fixed abrasive particles, a surface roughening step of roughening the surface of the mirror-surface plate glass by frosting.
    Type: Grant
    Filed: October 5, 2009
    Date of Patent: September 2, 2014
    Assignee: Hoya Corporation
    Inventors: Takanori Mizuno, Yosuke Suzuki
  • Patent number: 8821735
    Abstract: An object of the invention is to effectively remove particles on the glass substrate surfaces, even in the case wherein abrasive particles having a small particle size is used in the polishing step of the glass substrate and a supersonic treatment is performed at a high frequency at the supersonic cleaning step after the polishing step. In a manufacturing method of a glass substrate for a magnetic disk comprising a polishing step for performing polishing of the glass substrate and a supersonic cleaning step for performing supersonic cleaning of the glass substrate after the polishing step, the polishing step uses abrasive particles having a particle size of 10 nm to 30 nm and a first supersonic cleaning is performed at a frequency of 300 kHz to 1,000 kHz to form secondary particles and then a second supersonic cleaning is performed at a frequency of 30 kHz to 100 kHz in the supersonic cleaning step.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: September 2, 2014
    Assignee: Hoya Corporation
    Inventor: Yosuke Suzuki
  • Patent number: 8778209
    Abstract: An apparatus for altering a surface of a cylindrical object includes at least one container containing a fluid resist therein and having at least one opening from which the fluid resist is discharged; at least one roller operatively associated with the at least one container and having a surface sized and shaped to be exposed to the at least one opening, the surface area including a pattern of shapes and upon which the fluid resist is deposited; and at least one support member adjacent the at least one roller for supporting the cylindrical object during transit for contacting the at least one roller. A method is also provided.
    Type: Grant
    Filed: December 10, 2012
    Date of Patent: July 15, 2014
    Assignee: Linde Engineering North America Inc.
    Inventor: Benjamin P. L. Turner
  • Patent number: 8772174
    Abstract: A method for treating silicon to form pillars, especially for use as the active anode material in Li-ion batteries, is disclosed. The process is simple to operate on a commercial scale since it uses a solution containing only a small number of ingredients whose concentration needs to be controlled and it can be cheaper to operate than previous processes. The solution includes: 0.01 to 5M HF 0.002 to 0.2M of metal ions capable of nucleating on and forming a porous layer comprising regions of elemental metal on the silicon surface; 0.001 to 0.7M of an oxidant selected from the group O2, O3, H2O2, the acid, ammonium or alkali metal salt of NO3?, S2O82?, NO2?, B4O72? and ClO4? or a mixture thereof. The treated silicon is suitably removed from the solution.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: July 8, 2014
    Assignee: Nexeon Ltd.
    Inventors: Mino Green, Feng-Ming Liu, Yuxiong Jiang, Valerie Elizabeth Dawn Stevens, Benjamin Odarkwei Mills-Lamptey
  • Patent number: 8765001
    Abstract: Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: July 1, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Michael P. Toben, Robert K. Barr, Corey O'Connor
  • Patent number: 8760807
    Abstract: A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. Etch stop and nonmagnetic etchable layers are provided. A side shield layer is provided between the ABS location and the etch stop and etchable layers. A pole trench is formed in the side shield and etchable layers. The pole trench has a pole tip region in the side shield layer and a yoke region in the etchable layer. A nonmagnetic side gap layer, at least part of which is in the pole trench, is provided. A remaining portion of the pole trench has a location and profile for a pole and in which at least part of the pole is formed. A write gap and trailing shield are provided. At least part of the write gap is on the pole. At least part of the trailing shield is on the write gap.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: June 24, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jinqiu Zhang, Ying Hong, Feng Liu, Zhigang Bai
  • Patent number: 8747683
    Abstract: A mold of an embodiment of the present invention has a surface that has a shape which is inverse of a surface shape of a moth-eye structure. This surface has a plurality of protrusions, a plurality of ridges extending between the plurality of protrusions via saddle portions, and a plurality of holes, each of which is defined by at least any three of the plurality of protrusions and ridges extending between the at least any three of the plurality of protrusions, and an average distance between centers of adjacent holes, p, and an average depth of the saddle portions, r, satisfy the relationship of 0.15?r/p?0.60.
    Type: Grant
    Filed: November 25, 2010
    Date of Patent: June 10, 2014
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Akinobu Isurugi, Kiyoshi Minoura, Tokio Taguchi, Takao Imaoku
  • Patent number: 8747689
    Abstract: There are provided a liquid processing method and a liquid processing apparatus capable of providing a high etching rate and a high etching selectivity for silicon nitride against silicon oxide, and a storage medium storing the method thereon. In the method for etching, by an etching solution, a substrate on which silicon nitride and silicon oxide are exposed, the etching solution is produced by mixing a fluorine ion source material, water and a boiling point adjusting agent; the produced etching solution is heated to a substrate processing temperature equal to or higher than 140° C.; after a temperature of the etching solution reaches the substrate processing temperature, the temperature of the etching solution is maintained at the substrate processing temperature for a first preset time; and after a lapse of the first preset time, the substrate is etched by the etching solution maintained at the substrate processing temperature.
    Type: Grant
    Filed: January 23, 2012
    Date of Patent: June 10, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Hiroki Ohno, Takehiko Orii
  • Patent number: 8741070
    Abstract: Disclosed are a liquid processing method, a liquid processing apparatus, and a recording medium that can prevent convex portions of a target substrate from collapsing when a rinsing liquid is dried. A base surface of a target substrate is hydrophilized and the surfaces of convex portions become water-repellent by surface-processing the target substrate which includes a main body, a plurality of convex portions protruding from the main body, and a base surface formed between the convex portions on the substrate main body. Next, a rinsing liquid is supplied to the target substrate which has been subjected to the surface processing. Thereafter, the rinsing liquid is removed from the target substrate.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: June 3, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Nobutaka Mizutani, Tsutae Omori, Takehiko Orii, Akira Fujita
  • Patent number: 8741167
    Abstract: This invention provides a method of making a photovoltaic cell. The method uses an etching composition comprising one or more onium salts selected from the group consisting of iodonium salts and sulfonium and an organic medium to etch the anti-reflection coating. Also provided is a photovoltaic cell made by this method.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: June 3, 2014
    Assignee: E I du Pont de Nemours and Company
    Inventors: Angel R Cartagena, Feng Gao, Haixin Yang, Lei Zhang
  • Publication number: 20140144881
    Abstract: Provided is a nanowire manufacturing method, comprising forming a plurality of grid patterns on a substrate, forming a nanowire on the grid patterns, and separating the grid pattern and the nanowire. According to the present invention, the width and height of the nanowire can be adjusted by controlling the wet-etching process time period, and the nanowire can be manufactured at a room temperature at low cost, the nanowire can be mass-manufactured and the nanowire with regularity can be manufactured even in case of mass production.
    Type: Application
    Filed: June 28, 2012
    Publication date: May 29, 2014
    Applicant: LG INNOTEK CO., LTD.
    Inventors: Young Jae Lee, Kyoung Jong Yoo, Jun Lee, Jin Su Kim, Jae Wan Park
  • Publication number: 20140144880
    Abstract: A method of surface treatment for zirconium oxide implants and the etching formula for the same are disclosed. The processes are carried out at room temperature. The average surface roughness Ra and the standard deviation of the implant are measured showing significant improvement while comparing with the un-treated sample and the hydrofluoric acid treated samples. The average contact angle is provided showing an almost hydrophilic surface after etched by the formula according to the present invention.
    Type: Application
    Filed: November 28, 2012
    Publication date: May 29, 2014
    Applicant: TAIPEI MEDICAL UNIVERSITY
    Inventors: Sea-Fue Wang, Chung-Kuang Yang, Jen-Chang Yang, Sheng-Yang Lee
  • Patent number: 8722544
    Abstract: A method of simultaneously cleaning inorganic and organic contaminants from semiconductor wafers and micro-etching the semiconductor wafers. After the semiconductor wafers are cut or sliced from ingots, they are contaminated with cutting fluid as well as metal and metal oxides from the saws used in the cutting process. Aqueous alkaline cleaning and micro-etching solutions containing alkaline compounds and mid-range alkoxylates are used to simultaneously clean and micro-etch the semiconductor wafers.
    Type: Grant
    Filed: October 14, 2010
    Date of Patent: May 13, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Robert K. Barr, Raymond Chan
  • Patent number: 8691019
    Abstract: A process for cleaning a compound semiconductor wafer; the compound semiconductor wafer comprises, taking gallium arsenide (GaAs) as a representative, a group III-V compound semiconductor wafer. The process comprises the following steps: 1) treating the wafer with a mixture of dilute ammonia, hydrogen peroxide and water at a temperature not higher than 20° C.; 2) washing the wafer with deionized water; 3) treating the wafer with an oxidant; 4) washing the wafer with deionized water; 5) treating the wafer with a dilute acid solution or a dilute alkali solution; 6) washing the wafer with deionized water; and 7) drying the resulting wafer. The process can improve the cleanliness, micro-roughness and uniformity of the wafer surface.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: April 8, 2014
    Assignee: Beijing Tongmei Xtal Technology Co., Ltd.
    Inventors: Diansheng Ren, Qinghui Liu
  • Patent number: 8685260
    Abstract: A known method of forming organic semiconductor devices employs the deposition of a conductive polymer onto a substrate to form electrodes or conductive tracks and then to apply an electrical material such as an organic semiconductor on top of these tracks. Although the conductive polymer serves as a highly efficient injector of electrons into the semiconductor, it is not a good conductor. This introduces undesirable inefficient in the supply of current to and from the semiconductor. Worse still the conductivity may deteriorate with time. A solution to this problem has been found by printing the polymer (7) onto a conductive layer (6) carried on a substrate (5). The printed polymer (7) is then used as a resist during a process in which parts of the conductive polymer not protected by the polymer are removed. The resulting device benefits from the good electron injection qualities of the conductive polymer (7) and efficient conduction by virtue of the underlying conductive layer (6).
    Type: Grant
    Filed: April 11, 2007
    Date of Patent: April 1, 2014
    Assignee: Novalia Ltd.
    Inventor: Kate Jessie Stone
  • Patent number: 8685273
    Abstract: This disclosure involves a formula, mixing procedure, etching technique and application of an etchant for revealing defects in T2SL's grown lattice matched to (100) GaSb. The etching agent comprises a (2.5:4.5:16.5:280) solution by volume or (1%:2%:9%:88%) by weight, of HF:H2O2:H2SO4:H2O. The etchant is made by mixing (49%) hydrofluoric aqueous solution with (30%) water-based peroxide, followed by sulfuric acid, and diluted with de-ionized H2O (DI-water).
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: April 1, 2014
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventors: Edward H Aifer, Sergey I Maximenko
  • Patent number: 8658053
    Abstract: Disclosed is an etchant composition employed for selectively etching a metallic material in production of a semiconductor device, which is an aqueous solution containing a fluorine compound, and a chelating agent having, in the molecular structure thereof, a phosphorus oxo-acid as a functional group; or is an aqueous solution containing a fluorine compound, a chelating agent having, in the molecular structure thereof, a phosphorus oxo-acid as a functional group, and an inorganic acid and/or an organic acid. Also disclosed is a method for producing a semiconductor device employing the etchant composition.
    Type: Grant
    Filed: June 22, 2006
    Date of Patent: February 25, 2014
    Assignee: Mitsubishi Gas Chemical Company, Inc.
    Inventors: Kazuyoshi Yaguchi, Kojiro Abe, Masaru Ohto
  • Patent number: 8658049
    Abstract: A method for manufacturing a touch panel includes the following steps. A mother plate is provided. A plurality of adhesive materials are formed on the mother plate. A plurality of cover glasses are disposed on the adhesive materials respectively. The adhesive materials are cured, whereby the cover glasses are attached to the mother plate. A plurality of circuit units are formed on the cover glasses respectively. The cover glass having the circuit unit is removed from the mother plate, wherein the bonding strength of the cured adhesive material is within a range about between 5 g/25 mm and 600 g/25 mm, whereby the adhesive material provides enough adhesive force between the cover glass and the mother plate, and the adhesive material cannot be stayed on a surface of the cover glass during a removing process.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: February 25, 2014
    Assignee: HannStar Display Corporation
    Inventor: Tsung-Hsien Yen
  • Patent number: 8647526
    Abstract: The object of the present invention is a new inkjet printable etching composition comprising an etchant, which is activated by a second component. Thus, a further object is the use of this new composition in a process for the etching of surfaces semiconductor devices or surfaces of solar cell devices.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: February 11, 2014
    Assignee: Merck Patent Gesellschaft mit Beschrankter Haftung
    Inventors: Oliver Doll, Edward Plummer, Mark James, Ingo Koehler
  • Patent number: 8641998
    Abstract: A method for manufacturing graphene oxide nanoplatelets and derivative products and the graphene oxide nanoplatelets obtained, comprising two distinct phases, a first phase for obtaining an intermediate material consisting of carbon nanofilaments, each one having a structure comprising continuous ribbon of graphitic material with a small number of stacked monoatomic graphene layers and spirally rolled around and along the main axis of said nanofilaments, and a second phase wherein said carbon nanofilaments are subjected to a high-temperature treatment in order to clean said filaments and increase their degree of crystallinity. Once these nanofilaments are treated, a chemical etching is performed on them comprising an oxidation that causes the fragmentation of the carbon nanofilaments and starts a cleaving method that is completed by physical means in order to obtain graphene oxide nanoplatelets.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: February 4, 2014
    Assignee: Grupo Antonlin-Ingerieria, S.A.
    Inventors: Cesar Merino Sanchez, Ignacio Martin Gullon, Helena Varela Rizo, Maria Del Pilar Merino Amayuelas
  • Patent number: 8637409
    Abstract: An etching method includes: applying a radiation to an etching aqueous solution; and etching a material to be etched by using the etching aqueous solution irradiated with the radiation.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: January 28, 2014
    Assignee: Fujitsu Limited
    Inventors: Shirou Ozaki, Masayuki Takeda
  • Patent number: 8632691
    Abstract: Disclosed herein is an interface treatment method for germanium-based device, which belongs to the field of manufacturing technologies of ultra large scaled integrated (ULSI) circuits. In the method, the natural oxide layer on the surface of the germanium-based substrate is removed by using a concentrated hydrochloric acid solution having a mass percentage concentration of 15%˜36%, and dangling bonds of the surface are performed a passivation treatment by using a diluted hydrochloric acid solution having a mass percentage concentration of 5%˜10% so as to form a stable passivation layer on the surface. This method makes a good foundation for depositing a high-K (high dielectric constant) gate dielectric on the surface of the germanium-based substrate after cleaning and passivating, enhances quality of the interface between the gate dielectric and the substrate, and improves the electrical performance of germanium-based MOS device.
    Type: Grant
    Filed: June 14, 2012
    Date of Patent: January 21, 2014
    Assignee: Peking University
    Inventors: Ru Huang, Min Li, Xia An, Ming Li, Meng Lin, Xing Zhang
  • Patent number: 8632836
    Abstract: The invention relates to a method for modification of a biocompatible component comprising the steps of a) providing a biocompatible component at least partly covered by metallic oxide; and b) treating at least a part of said component, which part is covered by said metallic oxide, with an aqueous composition comprising oxalic acid; whereby a modified metallic oxide is obtained. The invention also relates to a biocompatible component comprising a substrate having a surface comprising a) a microstructure comprising pits separated by plateus and/or ridges; and b) a primary nanostructure being superimposed on said microstructure, said primary nanostructure comprising depressions arranged in a wave-like formation.
    Type: Grant
    Filed: July 8, 2008
    Date of Patent: January 21, 2014
    Assignee: Astra Tech AB
    Inventors: Anette Fredriksson, Ingela Petersson
  • Patent number: 8628674
    Abstract: A method for trimming a structure obtained by bonding a first wafer to a second waver on contact faces and thinning the first waver, wherein at least either the first wafer or the second wafer is chamfered and thus exposes the edge of the contact face of the first wafer, wherein the trimming concerns the first wafer. The method includes a) selecting the second wafer from among wafers with a resistance to a chemical etching planned in b) that is sufficient with respect to the first wafer to allow b) to be carried out; b) after bonding the first wafer to the second wafer, chemical etching the edge of the first wafer to form in the first wafer a pedestal resting entirely on the contact face of the second wafer and supporting the remaining of the first wafer; and c) thinning the first wafer until the pedestal is reached and attacked, to provide a thinned part of the first wafer.
    Type: Grant
    Filed: November 20, 2012
    Date of Patent: January 14, 2014
    Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, Soitec
    Inventors: Marc Zussy, Bernard Aspar, Chrystelle Lagahe-Blanchard, Hubert Moriceau
  • Patent number: 8623231
    Abstract: A method for etching an ultra thin film is provided which includes providing a substrate having the ultra thin film formed thereon, patterning a photosensitive layer formed over the ultra thin film, etching the ultra thin film using the patterned photosensitive layer, and removing the patterned photosensitive layer. The etching process includes utilizing an etch material with a diffusion resistant carrier such that the etch material is prevented from diffusing to a region underneath the photosensitive layer and removing portions of the ultra thin film underneath the photosensitive layer.
    Type: Grant
    Filed: June 11, 2008
    Date of Patent: January 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: George Liu, Kuei Shun Chen, Vencent Chang, Chih-Yang Yeh
  • Patent number: 8613864
    Abstract: The invention includes methods in which silicon is removed from titanium-containing container structures with an etching composition having a phosphorus-and-oxygen-containing compound therein. The etching composition can, for example, include one or both of ammonium hydroxide and tetra-methyl ammonium hydroxide. The invention also includes methods in which titanium-containing whiskers are removed from between titanium-containing capacitor electrodes. Such removal can be, for example, accomplished with an etch utilizing one or more of hydrofluoric acid, ammonium fluoride, nitric acid and hydrogen peroxide.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: December 24, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Prashant Raghu
  • Patent number: 8585910
    Abstract: A process for producing a micromachined tube (microtube) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure by bonding the first substrate to a second substrate so that the second substrate overlies and encloses the channel to define a passage having a cross-sectional profile of which at least half is arcuate. The substrate structure can optionally then be thinned to define a microtube and walls thereof that surround the passage.
    Type: Grant
    Filed: March 3, 2009
    Date of Patent: November 19, 2013
    Assignee: Integrated Sensing Systems Inc.
    Inventors: Douglas Ray Sparks, Nader Najafi