Abstract: A first dopant impurity producing a conductivity type for formation of an intrinsic base diffusion layer and a dopant impurity producing the opposite conductivity type are implanted into a semiconductor substrate. An exposed surface of the semiconductor substrate is irradiated with a plasma, so that many crystalline defects are produced. Next, a polysilicon film is formed under conditions that cause the grain size to increase. In a portion of the polysilicon film located near the exposed surface of the semiconductor substrate, the grain size becomes relatively small, influenced by the crystalline defects in the substrate surface. In a portion of the polysilicon film located on the silicon oxide film, the grain size becomes relatively large, uninfluenced by the crystalline defects. Thus, degradation of electrical characteristics is suppressed, and variation in resistance of the resistance element is alleviated.

Abstract: The invention relates to a process of forming a compact bipolar junction transistor (BJT) that includes forming a self-aligned collector tap adjacent the emitter stack and an isolation structure. A base layer is formed from epitaxial silicon that is disposed in the substrate.

Abstract: A high density vertical merged MOS-bipolar-capacitor gain cell is realized for DRAM operation. The gain cell includes a vertical MOS transistor having a source region, a drain region, and a floating body region therebetween. The gain cell includes a vertical bi-polar transistor having an emitter region, a base region and a collector region. The base region for the vertical bi-polar transistor serves as the source region for the vertical MOS transistor. A gate opposes the floating body region and is separated therefrom by a gate oxide on a first side of the vertical MOS transistor. A floating body back gate opposes the floating body region on a second side of the vertical transistor. The base region for the vertical bi-polar transistor is coupled to a write data word line.

Abstract: A semiconductor device may include an element isolation region 14, an npn-type bipolar transistor 200, and a p-type field effect transistor 100, which are formed on a SOI substrate. The bi-polar transistor 200 and the field effect transistor 100 are formed in the same element forming region 16. An n-type body region 52a is electrically connected to an n-type collector region 230. A p-type source region 210 is electrically connected to the n-type collector region 230. A p-type drain region 130 is electrically connected to a p-type base region 220.

Abstract: A semiconductor device includes a silicon semiconductor substrate, having a main surface including a first region and a second region side-by-side, an epitaxially grown layer of high resistivity as a first layer on the main surface, and an epitaxially grown layer of low resistivity as a second layer on the first layer, and having a resistivity lower than the resistivity of the first layer. The semiconductor device includes a bipolar transistor at the first region and a passive element at the second region. The second layer is covers at least the first region and is absent from at least a portion of the second region.

Abstract: Disclosed is a circuit layout of a differential amplification circuit that constitutes a Gilbert cell, in which two multiple finger bipolar transistors forming a differential amplifier are positioned substantially axially symmetrical to each other. The longitudinal direction of each finger is orthogonal to the axis of symmetry. A wiring connected to an emitter electrode of each one of the transistors is laid so as to extend in a direction opposite to the other one of the transistors.

Abstract: An ESD robust bipolar transistor (200) that includes first and second bipolar elements (210, 220), wherein a first trigger voltage of the first bipolar element (210) is proximate a second sustaining voltage of the second bipolar element (220). The first and second bipolar elements (210, 220) include first and second bases (214, 224), emitters (216, 226) and collectors (212, 222), respectively. The first and second bases (214, 224) are coupled and the first and second collectors (212, 222) are coupled. The ESD robust bipolar transistor (200) also includes an emitter resistor (250) and a base resistor (260), wherein the emitter resistor (250) couples the first and second emitters (216, 226) and the base resistor (260) couples the second emitter (226) and the first and second bases (214, 224).

Abstract: A technique of improving a reverse recovery characteristic of a semiconductor device which solves a technical problem of breakdown voltage reduction which has conventionally caused in enhancing soft recover. To solve the technical problem, in a PN junction between a P type layer and an N type layer, a heavy metal such as platinum is firstly diffused into an—layer and N+ layer of the N type layer. Subsequently, helium ion is implanted into the inside of the—layer from the interface between the P type layer and the N+ layer to a predetermined depth, so that the N− layer in the vicinity of the junction is damaged to form, in the—layer, a low lifetime region having a carrier lifetime smaller than that of the N type layer and a resistibility that decreases monotonically. Such a technique may be applied to diodes, and particularly, free-wheel diodes in power modules.

Abstract: A cross point memory array is fabricated on a substrate with a plurality of memory cells, each memory cell including a diode and an anti-fuse in series. First and second conducting materials are disposed in separate strips on the substrate to form a plurality of first and second orthogonal electrodes with cross points. A plurality of semiconductor layers are disposed between the first and second electrodes to form a plurality of diodes between the cross points of the first and second electrodes. A passivation layer is disposed between the first electrodes and the diodes to form a plurality of anti-fuses adjacent to the diodes at the cross points of first and second electrodes. Portions of the diode layers are removed between the electrode cross points to form the plurality of memory cells with rows of trenches between adjacent memory cells to provide a barrier against crosstalk between adjacent memory cells. The trenches extend substantially to the depth of the n-doped layer in each diode.

Abstract: A semiconductor wafer has a first element forming section, a second element forming section adjoining the first element forming section, and a third element forming section adjoining the second element forming section. The first element forming section has a first supporting substrate, a first buried insulating film formed on the first supporting substrate, and a first active layer formed on the first buried insulating film. The second element forming section has a second supporting substrate, a second buried insulating film formed on the second supporting substrate, and a second active layer formed on the second buried insulating film. The second active layer has a thickness being different from a thickness of the first active layer. The third element forming section has a third active layer.

Abstract: A semiconductor device includes a silicon substrate as a semiconductor substrate, having a main surface including a first region and a second region defined in plane, an epitaxial grown layer of high resistance as a first layer on the main surface, and an epitaxial grown layer of low resistance as a second layer formed at the upper side of the first layer, and having a resistance lower than the resistance of the first layer. The semiconductor device includes a bipolar transistor at the first region and a passive element at the second region. The second layer is arranged so as to cover at least the first region and avoid at least a portion of the second region.

Abstract: Disclosed are a fast, highly-integrated and highly-reliable magnetoresistive random access memory (MRAM) and a semiconductor device which uses the MRAM. The semiconductor device performs the read-out operation of the MRAM using memory cells for storing information by using a change in magnetoresistance of a magnetic tunnel junction (MTJ) element with a high S/N ratio. Each memory cell includes an MTJ element and a bipolar transistor. The read-out operation is carried out by selecting a word line, amplifying a current flowing in the MTJ element of a target memory cell by the bipolar transistor and outputting the amplified current to an associated read data line.

Abstract: A semiconductor device forms a protective diode with a high breakdown voltage at a power terminal of a power IC. An N-type well is formed in a P-type semiconductor substrate, the well electrically connected to a power supply terminal. An N-type channel stopper region is formed in the well. A P-type substrate pickup region is formed outside the well. The distance between the substrate pickup region and the channel stopper region is adjusted such that the breakdown voltage of the parasitic diode is not lower than the rated voltage and not higher than the breakdown voltage of the high voltage PMOSFET fabricated in the well. The protective diode absorbs electrostatic breakdown and electrical noises without an additional circuit protection device or manufacturing process.

Abstract: The present invention provides a method of manufacturing a bipolar transistor. The method includes producing an opening in a dielectric layer located over a substrate and forming a collector in the substrate by implanting a first dopant through the opening. The method further includes creating an intrinsic base region contacting the collector and constructing an emitter contacting the intrinsic base region, both of which are through the opening.

Abstract: A semiconductor device comprises a substrate the surface of which is formed of an insulation region, a high resistance active layer of a first conductivity type formed on the substrate, a first semiconductor region of the first conductivity type having an impurity concentration higher than that of the active layer and selectively formed on a surface of the active layer, an emitter region of the second conductivity type selectively formed on a surface of the semiconductor region, a collector region of the second conductivity type selectively formed on a surface of the active layer, and a base contact region of the first conductivity type selectively formed on a surface of the active layer in separation from the emitter region and the collector region, respectively.

Abstract: A semiconductor device having: a base area of the first conduction type formed on a semiconductor substrate; an emitter area of the second conduction type formed in the base area; and a collector area of the second conduction type formed as joined to the base area. In the collector area, an impurity area of the first conduction type is formed as separated from the base area. A surface resistor is connected to a base electrode connected to the base area. The surface resistor is connected, at other position thereof, to the impurity area.

Abstract: In the present invention, a semiconductor device is formed which includes an MIM capacitor located on the upper surface of a heterostructure from which the emitter, base and collector sections of a nearby HBT are defined. In this way the capacitor and HBT share a substantially common structure, with the base and emitter electrodes of the HBT fashioned from the same metal layers as the upper and lower capacitor plates, respectively. Furthermore, as the insulator region of the capacitor is formed prior to definition of the HBT structure, the dielectric material used can be deposited by means of a plasma enhanced process, without damaging the HBT structure.

Abstract: This invention relates to an insulated gate bipolar transistor, a semiconductor device using such a transistor and manufacturing methods of these, and in particular, its object is to eliminate the necessity of connection to a freewheel diode used for bypassing a circulating current.

Abstract: A high-accuracy current detecting resistor is provided whose resistance does not change greatly according to temperature change and which has an excellent dielectric strength. In a resistor in which an electrical resistance alloy plate and a radiating metallic plate are laminated via a resin insulating layer, the electrical resistance alloy plate is formed of an alloy containing nickel and copper and is adhered to the resin insulating layer by etching a grain boundary of the alloy in the form of a concave.

Abstract: A semiconductor device for an integrated injection logic cell having a pnp bipolar transistor structure formed on a semiconductor substrate, wherein at least one layer of insulating films formed on a base region of the pnp bipolar transistor structure is comprised of a silicon nitride film. The semiconductor device of the present invention is advantageous in that the silicon nitride film constituting at least one layer of the insulating films formed on the base region of the pnp bipolar transistor prevents an occurrence of contamination on the surface of the base region, so that both the properties of the pnp bipolar transistor and the operation of the IIL cell can be stabilized. Further, by the process of the present invention, the above-mentioned excellent semiconductor device can be produced.

Abstract: A semiconductor device comprises a semiconductor body (10) in and on which a power transistor (T; 1, 2, 3) and a suppression diode (D; 100) are integrated. A diode junction (40; 40′) is present between the back metallization (22) and the adjacent region (2) of the power transistor so as to provide the diode in series with this region (2) and adjacent to the back surface (12) of the body. This diode junction (40; 40′) opposes the p-n junction (42) between the collector or drain region (2) of the transistor and its base region (3), so as to suppress reverse current flow in the transistor. The higher doped part (2b) of the adjacent transistor region (2) is sufficiently thick as to prevent any minority charge carriers injected by the diode junction (40; 40′) from reaching the p-n junction (42) with the base region (3). The diode junction may be a p-n junction (40) or a Schottky barrier (40′).

Abstract: The invention describes the fabrication and structure of an ESD protection device for integrated circuit semiconductor devices with improved ESD protection and resiliency. A vertical bipolar npn transistor forms the basis of the protection device. To handle the large current requirements of an ESD incident, the bipolar transistor has multiple base and emitter elements formed in an npn bipolar array. To assure turn-on of the multiple elements of the array the emitter fingers are continuously or contiguously connected with an unique emitter design layout. The contiguous emitter design provides an improved electrical emitter connection for the device, minimizing any unbalance that can potentially occur when using separate emitter fingers and improving the ability for the simultaneous turn on of the multiple emitter-base elements.

Abstract: A semiconductor device is provided with a plurality of hetero junction bipolar transistors arranged in a specified direction. Also, the semiconductor device comprises emitter wiring connected to each emitter of the plural hetero junction bipolar transistors, collector wiring connected to each collector of said plural hetero junction bipolar transistors, and base wiring connected to at least one base of said plural hetero junction bipolar transistors. Bases that are not connected to the base wiring among the bases of the plural hetero junction bipolar transistors are connected to the emitter wiring.

Abstract: A heterojunction bipolar transistor and a protective PIN diode are implemented by two multi-layered compound semiconductor structures epitaxially grown on respective regions of a semi-insulating substrate; the entire upper surface of the base layer is covered with the emitter layer, and the base electrode on the emitter layer projects through the emitter layer into the base layer; although the two multi-layered compound semiconductor structures are covered with a passivation layer, the emitter layer prevents the base layer from direct contact with the passivation layer so that leakage current hardly flows between the base and the emitter.

Abstract: An integrated circuit including a resistor that at least partially overlies a first tub of semiconductor material of a first polarity, where the first tub is formed in a second tub of semiconductor material having the opposite polarity, and the second tub is formed in a semiconductor substrate having the first polarity. The second tub forms the base of a vertical bipolar transistor, the first tub forms the emitter of the transistor, and the substrate forms the collector of such transistor. Where the vertical transistor is a PNP transistor, the first tub is the emitter and consists of P-type semiconductor material, the second tub is the base, and the substrate is the collector. Preferably, the resistor is a strip of polysilicon or a set of multiple, series-connected polysilicon segments. Typically, the integrated circuit is an amplifier and the resistor is a gain-setting resistor.

Abstract: A peripheral structure for a monolithic power device, preferably planar, includes front and rear surfaces, connected respectively to a cathode and an anode, two junctions respectively reverse-biased and forward-biased when a direct and adjacent voltage is respectively applied to the two surfaces and at least an insulating box connecting the front and rear surfaces. The structure is such that when a direct voltage or a reverse voltage is applied, generating equipotential voltage lines, the insulating box enables to distribute the equipotential lines in the substrate.

Abstract: An integrated power device having a power transistor made up of a first diode and a second diode that are connected together in series between a collector region and emitter-contact region of the power transistor to define a common intermediate node, a control circuit including a high-voltage region bonded on the emitter-contact region (14) by means of an adhesive layer, and biasing circuit connected between the common intermediate node and the high-voltage region. The biasing circuit including a contact pad electrically connected to the common intermediate node, an electrical connection region that is in electrical contact with the high-voltage region (30), and a wire having a first end soldered on the contact pad and a second end soldered on said electrical connection region.

Abstract: Latch-up of each of parasitic thyristors (T1-T4), which occurs when a circuit element (B1) is formed on a semiconductor substrate in which an IGBT (Z1) has been formed, is prevented by a circuit for preventing the latch-up using Schottky barrier diodes (D2, D3) formed on the semiconductor substrate. Each of the Schottky barrier diodes (D2, D3), which is composed of a junction between a diffused layer used for forming the circuit element and a metal wiring layer, is used in the circuit for preventing the latch-up action of each of the parasitic thyristors (T1-T4). Thereby, the area of the semiconductor device can be made smaller while the semiconductor device can have a higher protection effect.

Abstract: A power semiconductor device has an integral source/emitter ballast resistor. The gate has partial gate structures spaced apart from each other. Emitter resistors are provided beneath sidewall spacers on the ends of the gate structures. The emitter resistors have little effect on the threshold voltage under normal operating conditions, but rapidly saturate the device during short circuit conditions. This in turn increases the short circuit withstand capability o the device.

Abstract: A semiconductor process is disclosed which forms openings in a dielectric layer through which the base region of both high-voltage and high-gain bipolar transistors are formed. In one embodiment of the invention, the openings for the high-gain transistors are first protected by a photoresist layer that is patterned to expose the openings for the high-voltage transistors. A first base implant is performed through the exposed windows in the dielectric layer and into the exposed substrate or epitaxial layer therebelow, and then diffused to a suitable depth. The patterned photoresist is then removed to additionally expose the openings for the high-gain devices, and a second base implant is performed, this time into both base regions, and then diffused to a suitable depth. Emitter regions are then formed within the base regions of both transistor types by traditional implantation and contact techniques.

Abstract: A circuit-incorporating light receiving device includes an integrated circuit and a photodiode. The integrated circuit and the photodiode are provided on a single semiconductor substrate. The integrated circuit includes a transistor having a polycrystalline silicon as an emitter diffusion source and an electrode. Elements included in the integrated circuit are isolated from each other using local oxidization.

Abstract: A diode (QN1) is connected in parallel to one of two bipolar transistors (PB1, NB1) constituting a semiconductor-controlled rectifier or SCR (400) in such a direction as to encourage positive feedback. This enhances current drivability and accelerates a turn-on operation.

Abstract: In order to generate a pulsed signal with a desired active state without a great outlay on circuitry, the circuit according to the invention is characterized by a first and a second transistor (2, 3) in the integrated circuit, which are connected in series between a supply potential (UDD) and ground (GND), firstly a control pulse (A) having the predetermined duration being present at a control connection (G1) of the first transistor (2) and then a control pulse (B) being present at a control connection (G2) of the second transistor (3), with the result that, for the predetermined duration, firstly the first transistor (2) and then the second transistor (3) is turned on, and a resistor (6, 7) for the definition of the active signal state, which is connected outside the integrated circuit in parallel with one of the two transistors (2, 3) in the integrated circuit either between the supply potential (UDD) and the connecting point (4) or between ground (GND) and the connecting point (4).

Abstract: A pnp bipolar junction transistor is formed with improved emitter efficiency by reducing the depth of the p well implant to increase carrier concentration in the emitter and making the emitter junction deeper to increase minority lifetime in the emitter. The high gain BJT is formed without added mask steps to the process flow. A blanket high energy boron implant is used to suppress the isolation leakage in SRAM in the preferred embodiment.

Abstract: A structure for a semiconductor resistive element, applicable in particular to power components, having a high concentration substrate of the n type, a first epitaxial layer of the n type, a region of the p type arranged on said first epitaxial layer so to form the resistive element proper, a second epitaxial layer of n type grown on said first epitaxial layer to make the region of the p type a buried region, and an additional layer of the n type with a higher concentration with respect to the second epitaxial level, positioned on the embedded region. Low resistivity regions of the p type adapted to make low resistivity deep contacts for the resistor are provided. The buried region can be made either with a development that is substantially uniform in its main direction of extension or so to present, at on part of its length, a structure of adjacent subregions in marginal continuity.

Abstract: The present invention discloses a simple and convenient method for fabricating a capacitor device with BiCMOS processes. An electrode of the capacitor device formed according to the present invention is an ion doping region formed in an epitaxy layer so that the thickness of the dielectric layer of the capacitor device decreased relative to a specific ion concentration. Accordingly, the capacitor device formed therein has a high capacitance and good performance.

Abstract: A high withstand voltage diode for protecting a high-voltage transistor has a first region 2 of a second conductivity type formed on the substrate of a first conductivity type, a high-concentration second region 5 of the second type formed on the first region 2, a third region 3 of the first conductivity type formed so as to, be adjacent to the first region 2, a high-concentration fourth region 4 of the first conductivity type formed on the surface of the third region 3, and a gate electrode 7 that straddles the first region 2 and the third region 3 with an intervening gate oxide film, and which is electrically connected to the fourth region.

Abstract: A semiconductor device in which a photoreceptor element and a semiconductor element are formed on a common semiconductor substrate, includes: a substrate of a first conductive type; and a semiconductor layer of a second conductive type formed on the substrate; wherein the photoreceptor element is composed of the substrate and the semiconductor layer; and an impurity concentration region of the first conductive type having an impurity concentration higher than that of the substrate is provided at a position under the semiconductor layer in a region where the semiconductor element is to be formed.

Abstract: A diode (QN1) is connected in parallel to one of two bipolar transistors (PB1, NB1) constituting a semiconductor-controlled rectifier or SCR (400) in such a direction as to encourage positive feedback. This enhances current drivability and accelerates a turn-on operation.

Abstract: A semiconductor device requires a reduced cost, has a decreased substrate mounting area, and ensures that paired transistors, etc., have equivalent characteristics to each other. A separation strip 10 splits a semiconductor substrate 3 of one conductivity type into pairing regions and surrounds the semiconductor substrate, and has a high impurity concentration than a front surface side of the semiconductor substrate 3 but the same conductivity type with semiconductor substrate 3. A pair of vertical type semiconductor elements 1, 2 is disposed which shares the semiconductor substrate as a collector region, and the semiconductor elements 1, 2 comprise base regions 12, 22 of a reverse conductivity type which are formed respectively in the pairing regions and emitter regions 13, 23 of the one conductivity type which are formed within the base regions 12, 22 of the reverse conductivity type.

Abstract: The invention relates to a bipolar ESD protection comprising a protection transistor with a short-circuited base emitter (18, 19). Due to the snap-back effect, the transistor can switch from the normal high-ohmic condition to a low-ohmic condition in the case of ESD. To improve the protection performance, the protection structure is provided with a trigger element comprising a second transistor (26, 27, 28) with a lower breakdown voltage. The base (26) and the emitter (28) of the second transistor are connected to the base of the protection transistor. To increase the current carrying capability of the protection device, the trigger transistor is designed so as to be a vertical transistor.

Abstract: To provide a semiconductor device that has a positive ON-voltage temperature coefficient and a high switching speed at the current densities provided during actual operation. A (p) anode layer 1 is formed on one surface of an (n) base layer 3 having high resistance, and an (n) cathode layer 2 is formed on the other surface. The surface of the (p) anode layer 1 is coated with an insulating film having contact slots formed therein, and the anode electrode 5 is formed on the (p) anode layer 1 and is fixed to the (p) anode layer 1 at the locations of the contact slots 7. A cathode electrode 6 is formed on the (n) cathode layer 2. In addition, the planar pattern of the contact slots 7 is shaped like stripes. The area ratio S1/S2 is 5 or more and 30 or less, where area S1 constitutes the (p) anode layer 1 that is occupied by an insulating film 4 (the area of a non-secured portion), and area S2 represents the locations of the contact slots 7 (the area of the secured portion).

Abstract: In a method for producing a high-speed power diode with soft recovery, in which method the carrier life within the associated semiconductor substrate (10) is governed by first, unmasked bombardment (14) with an axial profile and by subsequent, second, masked bombardment (15) with a lateral profile, improved reverse characteristics are achieved in that the first, unmasked bombardment is ion bombardment (14) which governs the switching response of the power diode and in that the second, masked bombardment is electron bombardment (15), which reduces the active area of the power diode.

Abstract: A semiconductor includes a buried conducting layer, such as a buried collector, comprises a trench, the walls of which are covered with a layer of a material in which dopant ions diffuse faster than in monocrystalline silicon. A contact area is doped in close proximity to the trench wall. The dopants will diffuse through the layer and form a low resistance connection to the buried layer. The layer may comprise polysilicon or porous silicon, or a silicide. If the material used in the layer is not in itself conducting, the size of the component may be significantly reduced.

Abstract: A monolithically integrated semiconductor device comprises: a hetero-junction bipolar transistor having at least an electrode contact layer which contacts directly with at least one of collector, base and emitter electrodes; and at least a passive device having at least a passive device electrode and at least a resistive layer, wherein the electrode contact layer and the resistive layer comprise the same compound semiconductor layer.

Abstract: A semiconductor device for an integrated injection logic cell having a pnp bipolar transistor structure formed on a semiconductor substrate, wherein at least one layer of insulating films formed on a base region of the pnp bipolar transistor structure is comprised of a silicon nitride film. The semiconductor device of the present invention is advantageous in that the silicon nitride film constituting at least one layer of the insulating films formed on the base region of the pnp bipolar transistor prevents an occurrence of contamination on the surface of the base region, so that both the properties of the pnp bipolar transistor and the operation of the IIL cell can be stabilized. Further, by the process of the present invention, the above-mentioned excellent semiconductor device can be produced.

Abstract: In a semiconductor device comprising a resistance element electrically connected to a bipolar transistor, the bipolar transistor is formed on a silicon substrate and a predetermined resistance element is formed on an insulation film formed on the bipolar transistor based on results of measurements monitored for this transistor, in such a manner that the semiconductor device has prescribed characteristics.

Abstract: The resistance to current flow through an MOS-gated semiconductor device is reduced by providing a high conductivity region in the path of current through the drain region, but so positioned relative to the p-n voltage blocking junction of the device so as not to adversely affect the voltage blocking capability of the p-n junction. In one embodiment, the drain region is made of higher than normal electrical conductivity, but a diffused, graded p-n junction is provided for extending the low conductivity portion of the drain region bordering the p-n junction further than usual into the drain region.

Abstract: A semiconductor device comprises a semiconductor body (10) in and on which a power transistor (T; 1, 2, 3) and a suppression diode (D; 100) are integrated. A diode junction (40; 40′) is present between the back metallisation (22) and the adjacent region (2) of the power transistor so as to provide the diode in series with this region (2) and adjacent to the back surface (12) of the body. This diode junction (40; 40′) opposes the p-n junction (42) between the collector or drain region (2) of the transistor and its base region (3), so as to suppress reverse current flow in the transistor. The higher doped part (2b) of the adjacent transistor region (2) is sufficiently thick as to prevent any minority charge carriers injected by the diode junction (40; 40′) from reaching the p-n junction (42) with the base region (3). The diode junction may be a p-n junction (40) or a Schottky barrier (40′).

Abstract: A semiconductor integrated circuit has a protective NMOS transistor having a drain and a source respectively electrically connected to a first interconnection (electrically connected to a base electrode of a bipolar transistor or a gate electrode of a MOS transistor) and ground and a gate electrode in a floating state, upon formation of the first interconnection. The first interconnection is formed by patterning using plasma etching and is connected to ground after the formation of the first interconnection.