Static Random Access Memory, Sram, Structure (epo) Patents (Class 257/E27.098)
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Patent number: 8710592Abstract: An SRAM cell includes a first PMOS pass transistor comprising a first gate electrode disposed on a first PMOS active region, a first NMOS pass transistor comprising a second gate electrode disposed on a first NMOS active region, a first PMOS pull-up transistor and a first NMOS pull-down transistor sharing a third gate electrode disposed on the first PMOS active region and the first NMOS active region and extending therebetween, a second PMOS pass transistor comprising a fourth gate electrode disposed on a second PMOS active region, a second NMOS pass transistor comprising a fifth gate electrode disposed on a second NMOS active region and a second pull-up transistor and a second pull-down transistor sharing a sixth gate electrode disposed on the second PMOS active region and the second NMOS active region and extending therebetween.Type: GrantFiled: March 5, 2012Date of Patent: April 29, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Sunme Lim, Hanbyung Park, Ho-Kwon Cha
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Patent number: 8704286Abstract: Methods for fabricating integrated circuits include fabricating a logic device on a substrate, forming an intermediate semiconductor substrate on a surface of the logic device, and fabricating a capacitor-less memory cell on the intermediate semiconductor substrate. Integrated circuits with capacitor-less memory cells formed on a surface of a logic device are also disclosed, as are multi-core microprocessors including such integrated circuits.Type: GrantFiled: September 11, 2012Date of Patent: April 22, 2014Assignee: Micron Technology, Inc.Inventor: Gurtej S. Sandhu
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Patent number: 8692317Abstract: An SRAM cell using a vertical MISFET is provided, wherein underside source/drain areas of a first access transistor, a first driving transistor and a first load transistor are connected together, and further connected to gates of a second driving transistor and a second load transistor. Underside source/drain areas of a second access transistor, the second driving transistor and the second load transistor are connected together, and further connected to gates of the first driving transistor and the first load transistor. A first arrangement of the first access transistor, the first driving transistor and the first load transistor, and a second arrangement of the second access transistor, the second driving transistor and the second load transistor are symmetric to each other.Type: GrantFiled: April 14, 2009Date of Patent: April 8, 2014Assignee: NEC CorporationInventor: Kiyoshi Takeuchi
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Patent number: 8680623Abstract: Techniques for combining transistors having different threshold voltage requirements from one another are provided. In one aspect, a semiconductor device comprises a substrate having a first and a second nFET region, and a first and a second pFET region; a logic nFET on the substrate over the first nFET region; a logic pFET on the substrate over the first pFET region; a SRAM nFET on the substrate over the second nFET region; and a SRAM pFET on the substrate over the second pFET region, each comprising a gate stack having a metal layer over a high-K layer. The logic nFET gate stack further comprises a capping layer separating the metal layer from the high-K layer, wherein the capping layer is further configured to shift a threshold voltage of the logic nFET relative to a threshold voltage of one or more of the logic pFET, SRAM nFET and SRAM pFET.Type: GrantFiled: March 29, 2012Date of Patent: March 25, 2014Assignee: International Business Machines CorporationInventors: Martin M. Frank, Arvind Kumar, Vijay Narayanan, Vamsi K. Paruchuri, Jeffrey Sleight
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Publication number: 20140035056Abstract: A Static Random Access Memory (SRAM) cell includes a first pull-up transistor and a second pull-up transistor, and a first pull-down transistor and a second pull-down transistor forming cross-latched inverters with the first pull-up transistor and the second pull-up transistor. A conductive feature includes a first leg having a first longitudinal direction, wherein the first leg interconnects a drain of the first pull-up transistor and a drain of the first pull-down transistor. The conductive feature further includes a second leg having a second extending direction. The first longitudinal direction and the second extending direction are un-perpendicular and un-parallel to each other. The second leg interconnects the drain of the first pull-up transistor and a gate of the second pull-up transistor.Type: ApplicationFiled: November 13, 2012Publication date: February 6, 2014Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Jhon-Jhy Liaw
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Patent number: 8643066Abstract: A method for making a semiconductor device is provided. The method includes forming a first transistor with a vertical active region and a horizontal active region extending on both sides of the vertical active region. The method further includes forming a second transistor with a vertical active region. The method further includes forming a third transistor with a vertical active region and a horizontal active region extending on only one side of the vertical active region.Type: GrantFiled: October 15, 2008Date of Patent: February 4, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Byoung L. Min, James D. Burnett, Leo Mathew
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Patent number: 8633566Abstract: A repairable memory cell in accordance with one or more embodiments of the present disclosure includes a storage element positioned between a first and a second electrode, and a repair element positioned between the storage element and at least one of the first electrode and the second electrode.Type: GrantFiled: April 19, 2011Date of Patent: January 21, 2014Assignee: Micron Technology, Inc.Inventor: Scott E. Sills
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Publication number: 20140015061Abstract: A memory device includes a storage unit formed using a substrate, a true bit line BL0 for carrying a bit of data, and a complementary bit line for carrying the bit of data carried by the first true bit line in complementary form. The true bit line is coupled to the storage unit and runs laterally over the substrate. The true bit line and the complementary bit line are adjacent to each other and are vertically stacked above the substrate.Type: ApplicationFiled: July 13, 2012Publication date: January 16, 2014Inventors: PERRY H. PELLEY, JAMES D. BURNETT
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Patent number: 8614463Abstract: A layout configuration for a memory cell array includes at least a comb-like doped region having a first conductivity type and a fishbone-shaped doped region having a second conductivity type. The second conductivity type and the first conductivity type are complementary. Furthermore, the comb-like doped region and the fishbone-shaped doped region are interdigitated.Type: GrantFiled: November 2, 2011Date of Patent: December 24, 2013Assignee: United Microelectronics Corp.Inventors: Meng-Ping Chuang, Yu-Tse Kuo, Chia-Chun Sun, Yun-San Huang
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Patent number: 8604557Abstract: A semiconductor memory device includes: a first n-type transistor; a first p-type transistor; a first wiring layer having a first interconnecting portion for connecting a drain of the first n-type transistor and a drain of the first p-type transistor; and a second wiring layer having a first conductive portion electrically connected to the first interconnecting portion.Type: GrantFiled: December 10, 2008Date of Patent: December 10, 2013Assignee: Fujitsu Semiconductor LimitedInventor: Narumi Ohkawa
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Patent number: 8587036Abstract: A non-volatile memory is formed on a substrate. The non-volatile memory includes an isolation structure, a floating gate, and a gate dielectric layer. The isolation structure is disposed in the substrate to define an active area. The floating gate is disposed on the substrate and crosses over the active area. The gate dielectric layer is disposed between the floating gate and the substrate. The floating gate includes a first region and a second region. An energy band of the second region is lower than an energy band of the first region, so that charges stored in the floating gate are away from an overlap region of the floating gate and the gate dielectric layer.Type: GrantFiled: December 12, 2008Date of Patent: November 19, 2013Assignee: eMemory Technology Inc.Inventors: Shih-Chen Wang, Wen-Hao Ching
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Publication number: 20130299905Abstract: The present disclosure relates to an SRAM memory cell. The SRAM memory cell has a semiconductor substrate with an active area and a gate region positioned above the active area. A butted contact extends along a length (i.e., the larger dimension of the butted contact) from a position above the active area to a position above the gate region. The butted contact contains a plurality of distinct regions having different widths (i.e., the smaller dimensions of the butted contact), such that a region spanning the active area and gate region has width less than the regions in contact with the active area or gate region. By making the width of the region spanning the active area and gate region smaller than the regions in contact with the active area or gate, the etch rate is reduced at a junction of the gate region with the active area, thereby preventing etch back of the gate material and leakage current.Type: ApplicationFiled: May 14, 2012Publication date: November 14, 2013Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Tzyh-Cheang Lee
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Patent number: 8580632Abstract: To provide a semiconductor device and a method of manufacturing the same capable of suppressing, when a plurality of MIS transistors having different absolute values of threshold voltage is used, the reduction of the drive current of a MIS transistor having a greater absolute value of threshold voltage. The threshold voltage of a second nMIS transistor is greater than the threshold voltage of a first nMIS transistor and the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a second nMIS high-k film included in the second nMIS transistor is lower than the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a first nMIS high-k film included in the first nMIS transistor.Type: GrantFiled: January 25, 2013Date of Patent: November 12, 2013Assignee: Renesas Electronics CorporationInventors: Kazuhiro Onishi, Kazuhiro Tsukamoto
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Patent number: 8575697Abstract: An SRAM-type memory cell that includes a semiconductor on insulator substrate having a thin film of semiconductor material separated from a base substrate by an insulating layer; and six transistors such as two access transistors, two conduction transistors and two charge transistors arranged so as to form with the conduction transistors two back-coupled inverters. Each of the transistors has a back control gate formed in the base substrate below the channel and able to be biased in order to modulate the threshold voltage of the transistor, with a first back gate line connecting the back control gates of the access transistors to a first potential and a second back gate line connecting the back control gates of the conduction transistors and charge transistors to a second potential. The first and second potentials can be modulated according to the type of cell control operation.Type: GrantFiled: March 2, 2011Date of Patent: November 5, 2013Assignee: SoitecInventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
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Patent number: 8546888Abstract: Methods and apparatus are provided. An isolation region is formed by lining a trench formed in a substrate with a first dielectric layer by forming the first dielectric layer adjoining exposed substrate surfaces within the trench using a high-density plasma process, forming a layer of spin-on dielectric material on the first dielectric layer so as to fill a remaining portion of the trench, and densifying the layer of spin-on dielectric material.Type: GrantFiled: June 20, 2011Date of Patent: October 1, 2013Assignee: Micron Technology, Inc.Inventors: Zailong Bian, Xiaolong Fang
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Patent number: 8542514Abstract: A memory structure and method to fabricate the same is described. The memory structure includes a first memory cell having a first pair of non-volatile portions. The memory structure also includes a second memory cell having a second pair of non-volatile portions. The first and second pairs of non-volatile portions are disposed in an inter-locking arrangement.Type: GrantFiled: September 30, 2008Date of Patent: September 24, 2013Assignee: Cypress Semiconductor CorporationInventors: Sethuraman Lakshminarayanan, Myongseob Kim
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Publication number: 20130241000Abstract: A semiconductor memory device includes a semiconductor substrate, an active region including a plurality of unit active regions and disposed over and spaced from the semiconductor substrate, a pair of word lines formed on a top surface and sides of the unit active region, a dummy word line disposed at a contact of the unit active regions and formed on top surfaces and sides of the unit active regions, a source region in the unit active region between the pair of word lines and electrically connected to the semiconductor substrate, drain regions formed in the unit active region between the pair of word lines and the dummy word line, and first storage layers formed on the drain regions and electrically connected to the drain regions.Type: ApplicationFiled: August 29, 2012Publication date: September 19, 2013Inventors: Jang Uk LEE, Sung Cheoul Kim, Kang Sik Choi, Suk ki Kim
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Publication number: 20130240997Abstract: Solutions for forming stress optimizing contact bars and contacts are disclosed. In one aspect, a semiconductor device is disclosed including an n-type field effect transistor (NFET) having source/drain regions; a p-type field effect transistor (PFET) having source/drain regions; a stress inducing layer over both the NFET and the PFET, the stress inducing layer inducing only one of a compressive stress and a tensile stress; a contact bar extending through the stress inducing layer and coupled to at least one of the source/drain regions of a selected device of the PFET and the NFET to modify a stress induced in the selected device compared to a stress induced in the other device; and a round contact extending through the stress inducing layer and coupled to at least one of the source/drain regions of the other device of the PFET and the NFET.Type: ApplicationFiled: March 19, 2012Publication date: September 19, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. Anderson, Andres Bryant, William F. Clark, JR., Edward J. Nowak
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Patent number: 8525270Abstract: The methods and structures described are used to prevent protrusion of contact metal (such as W) horizontally into gate stacks of neighboring devices to affect the work functions of these neighboring devices. The metal gate under contact plugs that are adjacent to devices and share the (or are connected to) metal gate is defined and lined with a work function layer that has good step coverage to prevent contact metal from extruding into gate stacks of neighboring devices. Only modification to the mask layout for the photomask(s) used for removing dummy polysilicon is involved. No additional lithographical operation or mask is needed. Therefore, no modification to the manufacturing processes or additional substrate processing steps (or operations) is involved or required. The benefits of using the methods and structures described above may include increased device yield and performance.Type: GrantFiled: February 26, 2010Date of Patent: September 3, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Lee-Wee Teo, Ming Zhu, Chi-Ju Lee, Sheng-Chen Chung, Kai-Shyang You, Harry-Hak-Lay Chuang
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Patent number: 8513722Abstract: Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.Type: GrantFiled: March 2, 2010Date of Patent: August 20, 2013Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, John K. Zahurak, Werner Juengling
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Patent number: 8507990Abstract: A disclosed semiconductor device includes multiple gate electrodes disposed on a semiconductor substrate; and multiple sidewall spacers disposed on sidewalls of the gate electrodes. The thickness of the sidewall spacers is larger on the sidewalls along longer sides of the gate electrodes than on the sidewalls along shorter sides of the gate electrodes.Type: GrantFiled: November 2, 2011Date of Patent: August 13, 2013Assignee: Fujitsu Semiconductor LimitedInventor: Masaki Okuno
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Patent number: 8507995Abstract: In a static memory cell configured using four MOS transistors and two load resistance elements, the MOS transistors are formed on diffusion layers formed on a substrate. The diffusion layers serve as memory nodes. The drain, gate and source of the MOS transistors are arranged in the direction orthogonal to the substrate, and the gate surrounds a columnar semiconductor layer. In addition, the load resistance elements are formed by contact plugs. In this way, it is possible to form a SRAM cell with a small area.Type: GrantFiled: September 15, 2010Date of Patent: August 13, 2013Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Shintaro Arai
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Patent number: 8502318Abstract: A microelectronic device including, on a substrate, at least one element such as a SRAM memory cell; one or more first transistor(s), respectively including a number k of channels (k?1) parallel in a direction forming a non-zero angle with the main plane of the substrate, and one or more second transistor(s), respectively including a number m of channels, such that m>k, parallel in a direction forming a non-zero angle, or an orthogonal direction, with the main plane of the substrate.Type: GrantFiled: November 7, 2008Date of Patent: August 6, 2013Assignee: Commissariat a l'energie atomique et aux energies alternativesInventors: Olivier Thomas, Thomas Ernst
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Publication number: 20130193516Abstract: SRAM ICs and methods for their fabrication are provided. One method includes forming dummy gate electrodes overlying a semiconductor substrate and defining locations of gate electrodes for two cross coupled inverters and two pass gate transistors. A first insulating layer is deposited overlying the dummy gate electrodes and gaps between the dummy gate electrodes are filled with a second insulating layer. The second insulating layer is etched to form inter-gate openings exposing portions of the substrate. The first insulating layer is etched to reduce the thickness of selected locations thereof, and the dummy gate electrodes are removed. A gate electrode metal is deposited and planarized to form gate electrodes and local interconnections coupling the gate electrodes of one inverter to a node between the pull up and pull down transistors of the other inverter and to a source/drain of one of the pass gate transistors.Type: ApplicationFiled: January 26, 2012Publication date: August 1, 2013Applicant: GLOBALFOUNDRIES INC.Inventors: Matthias Goldbach, Peter Baars
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Publication number: 20130175631Abstract: A semiconductor chip has shapes on a particular level that are small enough to require a first mask and a second mask, the first mask and the second mask used in separate exposures during processing. A circuit on the semiconductor chip requires close tracking between a first and a second FET (field effect transistor). For example, the particular level may be a gate shape level. Separate exposures of gate shapes using the first mask and the second mask will result in poorer FET tracking (e.g., gate length, threshold voltage) than for FETs having gate shapes defined by only the first mask. FET tracking is selectively improved by laying out a circuit such that selective FETs are defined by the first mask. In particular, static random access memory (SRAM) design benefits from close tracking of six or more FETs in an SRAM cell.Type: ApplicationFiled: January 6, 2012Publication date: July 11, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Derick G. Behrends, Todd A. Christensen, Travis R. Hebig, Michael Launsbach, Daniel M. Nelson
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Patent number: 8460991Abstract: A complementary metal-oxide-semiconductor static random access memory cell includes a plurality of P-channel multi-gate transistors and a plurality of N-channel multi-gate transistors. Each transistor includes a gate electrode and source and drain regions separated by the at least one gate electrode. The SRAM cell further includes a plurality of contacts formed within the source and drain regions of at least one transistor. A plurality of contacts of at least one transistor are recessed a predetermined recess amount, wherein a resistance of the at least one transistor is varied based upon the predetermined recess amount.Type: GrantFiled: July 12, 2012Date of Patent: June 11, 2013Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Leland Chang, Chung-Hsun Lin, Jeffrey W. Sleight
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Patent number: 8450783Abstract: The semiconductor device includes a source line, a bit line, a signal line, a word line, memory cells connected in parallel between the source line and the bit line, a first driver circuit electrically connected to the source line and the bit line through switching elements, a second driver circuit electrically connected to the source line through a switching element, a third driver circuit electrically connected to the signal line, and a fourth driver circuit electrically connected to the word line. The memory cell includes a first transistor including a first gate electrode, a first source electrode, and a first drain electrode, a second transistor including a second gate electrode, a second source electrode, and a second drain electrode, and a capacitor. The second transistor includes an oxide semiconductor material.Type: GrantFiled: December 27, 2010Date of Patent: May 28, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Kiyoshi Kato, Shuhei Nagatsuka, Takanori Matsuzaki, Hiroki Inoue
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Patent number: 8421130Abstract: A semiconductor device includes a semiconductor substrate; a gate dielectric layer disposed on the semiconductor substrate; a gate conductive layer doped with impurities selected from nitrogen, carbon, silicon, germanium, fluorine, oxygen, helium, neon, xenon or a combination thereof on the gate dielectric layer; and source/drain doped regions formed adjacent to the gate conductive layer in the semiconductor substrate, wherein the source and drain doped regions are substantially free of the impurities doped into the gate conductive layer. These impurities reduce the diffusion rates of the N-type of P-type dopants in the gate conductive layer, thereby improving the device performance.Type: GrantFiled: April 4, 2007Date of Patent: April 16, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jhon Jhy Liaw, Chih-Hung Hsieh
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Patent number: 8422274Abstract: A semiconductor storage device includes a memory cell array, a plurality of word lines, a plurality of bit lines, a first gate wiring element 3a, 3b, a second gate wiring element 3c, 3d, a first connector 5a, 5b, and a second connector 5c, 5d. Each memory cell 10 has first and second sets having a driver transistor 11, a load transistor 12, and an access transistor 13. The word lines are arranged in parallel to each other along a first direction. The bit lines are arranged in parallel to each other along a second direction perpendicular to the first direction. The first gate wiring element comprises a gate electrode of the first driver transistor and the first load transistor, and has a rectangular shape having straight line on opposite sides. The second gate wiring element comprises a gate electrode of the access transistor and has a rectangular shape having straight line on opposite sides.Type: GrantFiled: November 15, 2011Date of Patent: April 16, 2013Assignee: Renesas Electronics CorporationInventors: Hidemoto Tomita, Shigeki Ohbayashi, Yoshiyuki Ishigaki
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Patent number: 8415722Abstract: A memory device includes an array of memory cells and peripheral devices. At least some of the individual memory cells include carbonated portions that contain SiC. At least some of the peripheral devices do not include any carbonated portions. A transistor includes a first source/drain, a second source/drain, a channel including a carbonated portion of a semiconductive substrate that contains SiC between the first and second sources/drains and a gate operationally associated with opposing sides of the channel.Type: GrantFiled: November 22, 2011Date of Patent: April 9, 2013Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 8405159Abstract: In accordance with an embodiment, a semiconductor device includes an SRAM cell on a substrate. The SRAM cell includes: first and second load transistors each having an n-type source region and a p-type drain region, first and second driver transistors each having a p-type source region and an n-type drain region, and first and second transfer transistors each having an n-type source region and a n-type drain region. The n-type source regions of the first and second load transistors, the n-type drain regions of the first and second driver transistors, and the n-type source regions and the n-type drain regions of the first and second transfer transistors are located in a region other than a region present between any two of the p-type drain regions of the first and second load transistors and the p-type source regions of the first and second driver transistors.Type: GrantFiled: September 16, 2011Date of Patent: March 26, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Kanna Adachi, Shigeru Kawanaka, Satoshi Inaba
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Patent number: 8405129Abstract: A design structure tangibly embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit includes a plurality of bit line structures, a plurality of word line structures intersecting said plurality of bit line structures to form a plurality of cell locations, and a plurality of cells located at said plurality of cell locations, each of said cells being selectively coupled to a corresponding bit line structure under control of a corresponding word line structure, each of said cells comprising a logical storage element having at least a first n-type field effect transistor and at least a first p-type field effect transistor, wherein said at least first n-type field effect transistor is formed with a relatively thick buried oxide layer sized to reduce capacitance of said bit line structures, and said at least first p-type field effect transistor is formed with a relatively thin buried oxide layer.Type: GrantFiled: April 18, 2012Date of Patent: March 26, 2013Assignee: International Business Machines CorporationInventors: Ching-Te K. Chuang, Fadi H. Gebara, Keunwoo Kim, Jente Benedict Kuang, Hung C. Ngo
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Publication number: 20130069168Abstract: An integrated circuit with a SAR SRAM cell with power routed in metal-1. An integrated circuit with a SAR SRAM cell that has power routed in Metal-1 and has metal-1 and metal-2 integrated circuit and SAR SRAM cell patterns which are DPT compatible. A process of forming an integrated circuit with a SAR SRAM cell with DPT compatible integrated circuit and SAR SRAM cell metal-1 and metal-2 patterns.Type: ApplicationFiled: September 19, 2012Publication date: March 21, 2013Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Texas Instruments Incorporated
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Patent number: 8399935Abstract: Circuits and methods for providing a dual gate oxide (DGO) embedded SRAM with additional logic portions, where the logic and the embedded SRAM have NMOS transistors having a common gate dielectric thickness but have different lightly doped drain (LDD) implantations formed using different LDD masks to provide optimum transistor operation. In an embodiment, a first embedded SRAM is a single port device and a second embedded SRAM is a dual port device having a separate read port. In certain embodiments, the second SRAM includes NMOS transistors having LDD implants formed using the logic portion LDD mask. Transistors formed with the logic portion LDD mask are faster and have lower Vt than transistors formed using a SRAM LDD mask. Dual core devices having multiple embedded SRAM arrays are disclosed. Methods for making the embedded SRAM are also disclosed.Type: GrantFiled: July 1, 2010Date of Patent: March 19, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Jhon-Jhy Liaw
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Patent number: 8390066Abstract: According to an embodiment, a semiconductor memory device capable of stably operating even when an element is shrunk is provided. The semiconductor memory device of the embodiment includes: first and second diodes serially connected between power sources of two different potentials, formed by nanowires, and exhibiting negative differential resistances; and a select transistor connected between the first diode and the second diode. The nanowires are preferably silicon nanowires. The thickness of the silicon nanowires is preferably 8 nm or less.Type: GrantFiled: September 14, 2010Date of Patent: March 5, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Hideyuki Nishizawa, Satoshi Itoh
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Patent number: 8384160Abstract: To provide a semiconductor device and a method of manufacturing the same capable of suppressing, when a plurality of MIS transistors having different absolute values of threshold voltage is used, the reduction of the drive current of a MIS transistor having a greater absolute value of threshold voltage. The threshold voltage of a second nMIS transistor is greater than the threshold voltage of a first nMIS transistor and the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a second nMIS high-k film included in the second nMIS transistor is lower than the sum of the concentration of lanthanum atom and the concentration of magnesium atom in a first nMIS high-k film included in the first nMIS transistor.Type: GrantFiled: November 30, 2009Date of Patent: February 26, 2013Assignee: Renesas Electronics CorporationInventors: Kazuhiro Onishi, Kazuhiro Tsukamoto
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Patent number: 8373235Abstract: In a static memory cell comprising six MOS transistors, the MOS transistors have a structure in which the drain, gate and source formed on the substrate are arranged in the vertical direction and the gate surrounds the columnar semiconductor layer, the substrate comprises a first active region having a first conductive type and a second active region having a second conductive type, and diffusion layers constructing the active regions are mutually connected via a silicide layer formed on the substrate surface, thereby realizing an SRAM cell with small surface area. In addition, drain diffusion layers having the same conductive type as a first well positioned on the substrate are surrounded by a first anti-leak diffusion layer and a second anti-leak diffusion layer having a conductive type different from the first well and being shallower than the first well, and thereby controlling leakage to the substrate.Type: GrantFiled: May 21, 2010Date of Patent: February 12, 2013Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Shintaro Arai
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Publication number: 20130026579Abstract: A method for manufacturing a semiconductor device includes forming a first dummy gate on a substrate, performing a doping process to the substrate, thereby forming a source and a drain at sides of the first dummy gate, performing a first high temperature annealing to activate the source and drain, forming an inter-layer dielectric (ILD) material on the substrate, removing the first dummy gate to create an ILD trench, forming a first high-k dielectric layer within the ILD trench, forming a first dummy cap portion within the ILD trench over the first high-k dielectric layer, performing a second high-temperature annealing to reduce defects in the first high-k dielectric layer, and thereafter, replacing the first dummy cap portion with a first metal gate electrode.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wei-Yuan Lu, Kuan-Chung Chen, Chun-Fai Cheng
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Patent number: 8362583Abstract: A pyroelectric detector includes a pyroelectric detection element mounted on a first side of a support member with a second side facing a cavity. The pyroelectric detection element has a capacitor including a first electrode, a pyroelectric body and a second electrode, and an interlayer insulation layer forming first and second contact holes passing respectively through to the first and second electrodes. First and second plugs are respectively embedded in the first and second contact holes, with first and second electrode wiring layers are respectively connected to the first and second plugs. A thermal conductivity of material of the second electrode wiring layer is lower than a thermal conductivity of material of a portion of the second electrode connected to the second plug.Type: GrantFiled: June 23, 2011Date of Patent: January 29, 2013Assignee: Seiko Epson CorporationInventor: Takafumi Noda
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Patent number: 8362584Abstract: A pyroelectric detector includes a pyroelectric detection element, a support member and a support part. The pyroelectric detection element has a capacitor including a first electrode, a second electrode, and a pyroelectric body. The support member includes first and second sides with the pyroelectric detection element being mounted on the first side and the second side facing a cavity. The support part, the support member, and the pyroelectric detection element are laminated in this order in a first direction with the cavity being formed between the support part and the support member. The support member has at least a first insulation layer on the first side contacting the first electrode, with the first insulation layer having a hydrogen content rate smaller than a hydrogen content rate of a second insulation layer positioned further in a second direction than the first insulation layer, the second direction being opposite the first direction.Type: GrantFiled: June 23, 2011Date of Patent: January 29, 2013Assignee: Seiko Epson CorporationInventor: Takafumi Noda
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Publication number: 20130020639Abstract: Some structures and methods to reduce power consumption in devices can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. Some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors. Additional structures, configurations, and methods presented herein can be used alone or in conjunction with the DDC to yield additional and different benefits.Type: ApplicationFiled: September 14, 2012Publication date: January 24, 2013Applicant: Suvolta, IncInventors: Scott E. Thompson, Damodar R. Thummalapally
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Patent number: 8350247Abstract: A resistive random access memory (RRAM) having a solid solution layer and a method of manufacturing the RRAM are provided. The RRAM includes a lower electrode, a solid solution layer on the lower electrode, a resistive layer on the solid solution layer, and an upper electrode on the resistive layer. The method of manufacturing the RRAM includes forming a lower electrode, forming a solid solution layer on the lower electrode, forming a resistive layer on the solid layer and forming an upper electrode on the resistive layer, wherein the RRAM is formed of a transition metal solid solution.Type: GrantFiled: November 15, 2007Date of Patent: January 8, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Myoung-jae Lee, Young-soo Park, Ran-ju Jung, Sun-ae Seo, Dong-chul Kim, Seung-eon Ahn
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Publication number: 20120326239Abstract: An SRAM device has a first tunnel transistor that allows a current to flow in a direction from the non-inverting output terminal to the first bit line when the first tunnel transistor turns on. The SRAM device has a second tunnel transistor allows a current to flow in a direction from the first bit line to the non-inverting output terminal when the second tunnel transistor turns on. The SRAM device has a third tunnel transistor allows a current to flow in a direction from the inverting output terminal to the second bit line when the third tunnel transistor turns on. The SRAM device has a fourth tunnel transistor allows a current to flow in a direction from the second bit line to the inverting output terminal when the fourth tunnel transistor turns on.Type: ApplicationFiled: February 8, 2012Publication date: December 27, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Hiroki Sasaki, Keisuke Nakatsuka
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Patent number: 8338910Abstract: Integrated circuit memory devices include a semiconductor word line having an electrically insulating strain layer directly contacting an upper surface thereof. The strain layer, which has a contact opening therein, has a sufficiently high degree of internal compressive strain therein to thereby impart a net tensile stress within at least a first portion of the semiconductor word line. A P-N junction diode is also provided on the semiconductor word line. The diode includes a first terminal (e.g., cathode, anode) electrically coupled through the opening in the strain layer to the surface of the semiconductor word line. A data storage element (e.g., MRAM, FRAM, PRAM, RRAM, etc.) may also be provided, which has a current carrying terminal electrically coupled to a second terminal of the p-n junction diode.Type: GrantFiled: March 28, 2011Date of Patent: December 25, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Young-nam Hwang
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Patent number: 8330226Abstract: A PRAM device includes a lower electrode, a phase-change nanowire and an upper electrode. The phase-change nanowire may be electrically connected to the lower electrode and includes a single element. The upper electrode may be electrically connected to the phase-change nanowires.Type: GrantFiled: April 25, 2012Date of Patent: December 11, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Tae-Yon Lee
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Publication number: 20120300537Abstract: An integrated circuit containing an SRAM array having a strap row. The strap row has a substrate contact structure that includes a substrate contact plug and a tap layer.Type: ApplicationFiled: November 21, 2011Publication date: November 29, 2012Applicant: TEXAS INSTRUMENTS INCORPORATEDInventors: Robert R. Garcia, Theodore W. Houston
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Publication number: 20120292709Abstract: A static random-access memory circuit includes at least one access device including source and drain sections for a pass region, at least one pull-up device and at least one pull-down device including source-and-drain sections for a pull-down region. The static random-access memory circuit is configured with external resistivity (Rext) for the pull-down region to be lower than Rext for the pass region. Processes of achieving the static random-access memory circuit include source-and-drain epitaxy.Type: ApplicationFiled: July 31, 2012Publication date: November 22, 2012Inventors: Ravi Pillarisetty, Willy Rachmady, Brian Doyle, Robert S. Chau
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Patent number: 8314453Abstract: The memory cell is of SRAM type with four transistors provided with a counter-electrode. It comprises a first area made from semiconductor material with a first transfer transistor and a first driver transistor connected in series, their common terminal defining a first electric node. A second transfer transistor and a second driver transistor are connected in series on a second area made from semiconductor material and their common terminal defines a second electric node. The support substrate comprises first and second counter-electrodes. The first and second counter-electrodes are located respectively facing the first and second semiconductor material areas. The first transfer transistor and second driver transistor are on a first side of a plane passing through the first and second electric nodes whereas the first driver transistor and second transfer transistor are on the other side of the plane.Type: GrantFiled: March 28, 2011Date of Patent: November 20, 2012Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, STMicroelectronics (Crolles 2) SASInventors: Olivier Thomas, Claire Fenouillet-Béranger, Philippe Coronel, Stéphane Denorme
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Patent number: 8304837Abstract: A complementary metal-oxide-semiconductor static random access memory cell that includes a plurality of P-channel multi-gate transistors and a plurality of N-channel multi-gate transistors. Each transistor includes a gate electrode and source and drain regions separated by the at least one gate electrode. The SRAM cell further includes a plurality of contacts formed within the source and drain regions of at least one transistor. A plurality of contacts of at least one transistor are recessed a predetermined recess amount, wherein a resistance of the at least one transistor is varied based upon the predetermined recess amount.Type: GrantFiled: June 16, 2010Date of Patent: November 6, 2012Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Leland Chang, Chung-Hsun Lin, Jeffrey W. Sleight
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Publication number: 20120273842Abstract: A memory array including a plurality of memory cells, a plurality of word lines, a dummy word line, and a plug is provided. Each word line is coupled to corresponding memory cells. A dummy word line is directly adjacent to an outmost word line of the plurality of word lines. The plug is located between the dummy word line and the outmost word line.Type: ApplicationFiled: July 13, 2012Publication date: November 1, 2012Applicant: MACRONIX INTERNATIONAL CO., LTD.Inventors: Chun-Yuan Lo, Cheng-Ming Yih, Wen-Pin Lu