Abstract: The invention relates to a primary component (2) for an electric motor (1), said primary component (2) being formed from at least one bundle of laminations (3) and comprises at least one flux guiding element (10) on one or both front faces (S1, S2) to reduce the ripple effect, said primary component (2) being separated from a secondary component (7) by a first air gap (?1). The primary component (2) has at least one section (?2) in the region of the flux guiding element (10), said section (?2) being electrically non-conducting (Kel=0) and having a negligibly low magnetic permeability (?r?1).

Abstract: A device for operating a gearbox, which operating device comprises a operating rod, a shift finger connected to the operating rod, and at least two electric motors acting upon the operating rod, the rotors of the electric motors being arranged on the operating rod so that a first electric motor is adapted to moving the operating rod by linear movement in the axial direction of the operating rod along the axis (A) of the operating rod and thus controls the lateral travel of the shift finger, and a second electric motor is adapted to effecting rotary movement to turn the operating rod about the axis (A) of the operating rod and thus controls the longitudinal travel of shift finger, when the respective electric motors are energized.

Abstract: A linear drive including a stator and a rotor configured for linear reciprocal movement along an axis, with the stator having a magnetic-field guide core having a plurality of legs extending each with one foot substantially toward the rotor, with the rotor having a plurality of magnets disposed in a linear array along the direction of the axis, wherein at least one of a respective one of respective lengths of the magnets along the axis and the respective widths of the legs along the axis and the respective spacings of the legs along the axis are different such that force components of the magnets along the axis will substantially compensate each other when the linear drive is in a de-energized state.

Abstract: A linear motor is equipped with a coil body (62), and a yoke (71) that supports a magnetism generating body (72) and that moves relative to the coil body (62). The yoke (71) has a first portion (73) that is formed from a magnetic material and disposed based on the saturation state of the magnetic field, which is generated by the magnetism generating body (72), in the yoke (71).

Abstract: An electric motor assembly includes a rotor rotatable about an axis and a stator spaced radially away from the rotor. An isolation housing, configured to permit magnetic flux to flow therethrough between the rotor and the stator, is disposed between the rotor and the stator and defines an internal rotor chamber, in which the rotor is located. The isolation housing fluidly isolates the internal rotor chamber from the stator. An encapsulating cover is provided that radially and axially surrounds the stator. The cover is formed of a resin material and bonds the stator to the isolation housing to prevent relative movement therebetween.

Abstract: Provided is a method for controlling a plurality of AC linear motors of identical specifications which are connected each other and operated synchronously so that they appear to operate as a single linear motor having desired power. The method for controlling, as an AC linear motor set, a plurality of AC linear motors of identical specifications which are connected to each other, includes the steps of firmly connecting the AC linear motors in such a manner that pole pitches of movers of the AC linear motors and pole intervals of adjacent movers are identical; and setting any one of the AC linear motors to be a master AC linear motor and using a command signal generated based on a feedback signal of the master AC linear motor and current difference information obtained by comparing phase current of the master AC linear motor with phase current of another AC linear motor to control the AC linear motor set.

Abstract: A multi-degree-of-freedom actuator includes a movable element having a plurality of permanent magnets, and a stator including a stator core and a plurality of coils. The permanent magnets are arranged in the X direction such that the number P of poles is an even number of two or more. The coils are of two types: X-direction driving coil and Z-direction driving coil. The Z-direction driving coils the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets. The X-direction driving coil or coils the number of which is P/2 are each disposed at a position opposite to an intermediate point between two adjacent ones of the magnetic poles of the permanent magnets.

Abstract: Disclosed is a linear electric motor having a fixed primary comprising a stator divided into a number of sections, including a translating secondary having an operative length longer than any two adjacent sections of the stator in the form of a reaction plate, and a connecting means for connecting only those sections of the stator that are at least partially covered by the reaction plate. The position of the reaction plate relative to the stator is determined by monitoring current in the active representative sections. Power is supplied to each stator section individually, with power supplied in a modulated manner to end active stator sections only partially covered by the reaction plate. A measurement of the current to the active representative section is used to control output voltage to all energized stator sections and is used to determine the change in position of the reaction plate.

Abstract: A linear actuator includes a coil portion and a shaft portion. The coil portion includes a plurality of coils respectively applied with AC currents having different phases from one another. The shaft portion passes through an inside of the plurality of coils. The shaft portion includes: a plurality of permanent magnets and a plurality of intermediate members. The plurality of permanent magnets is arranged along a central axis C such that opposite magnetization directions face to each other in a direction of the central axis C. Each of the plurality of intermediate members is arranged between adjacent two of the plurality of permanent magnets. A saturation magnetic flux density of each of the plurality of intermediate members is higher than a saturation magnetic flux density of each of the plurality of permanent magnets.

Abstract: A charged-particle optical system (100) such as an electron microscope has a vacuum chamber (102) with a space (104) for accommodating a specific one (114) of multiple specimens in operational use. The charged-particle optical system has a loader (106) with a part (108) that is moveable into and out of the space. The part is configured for attaching a specimen carrier (110), brought from outside the system, to a first holder (112) or to detach the carrier from the first holder and to remove the carrier from inside the system. The carrier accommodates a first specimen. The system has an interface (116) in a wall of the chamber for removably accommodating the first holder (112) or a second holder (118) with a second specimen (120) mounted thereon.

Abstract: In the field of electrical linear motors, it is known to make more than one laminate core (20) having teeth (22), wherein grooves (24) are designed between the teeth (22). Until now, coils assigned to the laminate core are arranged on each laminate core. The invention is based on this background. Instead, each coil (18) is arranged with a first section in a groove (24) of a first laminate core (20a) and with a second section in a groove (24) of a second laminate core (20b). The coils are consequently wound in an entirely different direction and now lie in a plane perpendicular to the direction of movement of the secondary part of the electrical linear motor.

Abstract: An electrical linear drive device comprises an outer housing consisting of a housing tube and two housing covers disposed at the ends thereof The outer housing defines in the interior thereof a receiving space, into which the drive part of a drive unit in the form of an electrodynamic linear direct drive like a cartridge is placed, and an output drive rod extends outward through the front housing cover. From a drive coil arrangement of the drive unit an electrical operation cable extends to an central electrical interface means. The electrical interface means is disposed laterally on the housing tube and the operation cable and the signal cable extend in a cable channel formed in the wall of the housing tube.

Abstract: A cooling device of a linear motor to cool a primary side of the linear motor including an iron core and a coil accommodated in slots of the iron core, including an elongate cover covering coil end portions exposed from both side faces of the iron core in a longitudinal direction, an air channel serving as blower for forcing a current of cooling air inside the cover, and a partition plate dividing the inside of the cover into upper and lower spaces. It is configured in such a manner that the upper space divided by the partition plate is used as a ventilation portion through which a current of cooling air is forced and the lower space is used as a cooling portion in which the coil end portions are accommodated and cooled. A slit is formed almost along a full length of the partition plate on a side closer to the iron core for bringing the ventilation portion and the cooling portion into communication with each other, and a vent is provided in a lower portion of the cooling portion.

Abstract: An apparatus and method of generating motion including a track having at least one incline portion and at least one decline portion, a cart movably coupled to the track, and one or more magnets arranged along the track such that cart moves along the track by a combination of gravitational and magnetic forces. The motion generator may be used as a power source for a motor or electric generator.

Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.

Abstract: The object of invention is the method of sizing, selection and comparison of linear and rotary electrical machines. According to the invention, the machines can be sized, selected and compared by new specific parameters: electromagnetic specific motor constant kEMS, specific motor constant kS, electromagnetic normal motor constant kEMN, normal motor constant kN, electromagnetic specific volume motor constant kEMSV, specific volume motor constant kSV, electromagnetic specific mass motor constant kEMSM specific mass motor constant kSM and relative continuous force FRC. These parameters slightly depend on machine overall dimensions but mostly depend on machine design.

Abstract: A solid-state actuator drive apparatus has—a shaft, —a pivot bearing for supporting the shaft, —a drive body, —at least two actuators for the excitation of the drive body and the shaft relative to each other for causing the shaft to rotate relative to the drive body, and—a base element, on which these components are attached. Either the drive body is configured such that it has a drive body opening, and the shaft at least leads into the drive body opening, —or the shaft is configured as a hollow shaft, and an element of the drive body having an annular or discoid circumference is disposed therein. The drive body is disposed stationary relative to the base element. The shaft is disposed in the pivot bearing and is adjustably disposed in the radial direction of the shaft relative to the base element by the solid-state actuators.

Abstract: The invention relates to a linear drive having a stationary active unit (1), a stationary return flow element (11), a movably mounted passive unit in the form of a thin tooth rack (10) and a bearing unit (15), which allows the relative movement between the active unit and the passive unit. A lateral guidance plate (30) is attached to the tooth rack (10), extends at an angle with respect to the plane of the tooth rack (10) into a guide gap (31) and is guided there, the guide map (31) running in the return flow element (11) or in the active unit (1).

Abstract: A device for sensing a position of a spoiler on a motor vehicle, where the spoiler is moved with a drive unit between a retracted setpoint base position and an extended setpoint operating position. At least one sensor is provided with which at least one of the setpoint positions of the spoiler can be sensed, and which generates first position signals on the basis of the sensed setpoint position. An adjustment position sensing device is provided which senses a current position of the spoiler, and which generates second position signals on the basis of the sensed current position. An evaluation unit evaluates the first position signals and the second position signals, and which actuates, on the basis of the evaluation result, an information device which provides the driver with information about the state of at least one of the position sensing devices and/or actuates the drive unit.

Abstract: An angle adjusting mechanism or a linear axis of a processing machine is provided with a reciprocation device. A tool and a tool cutting mechanism are mounted on a moving part of the reciprocation device. A workpiece is processed by the tool based on a combination of the drive of the processing machine and the drive of the reciprocation device.

Abstract: The present invention provides a linear motor device that can reduce a variation in thrust caused by a variation in attractive force. The linear motor device includes a linear motor 1 and a control section 30 that controls the linear motor 1. The linear motor 1 includes a magnet member 2 composed of permanent magnets having respective N poles and S poles alternately arranged in an axial direction, and a coil member 3 which is located orthogonally to the axial direction with respect to the magnet member 2 and through which the magnet member 2 is movable in the axial direction relative to the coil member 3. The control section 30 controls current conducted through the coil member 3 so that a moving one of the magnet member 2 and the coil member 3 reciprocates within a use range L corresponding to a part of a pitch p between the magnetic poles N and S in the magnet member 2.

Abstract: The aim of the invention is to simplify and to secure the mounting and adjusting of sensors on built-in motors. As a result, a direct drive built-in motor is equipped with a first motor component (2) which comprises at least one motor mounting element (21) for securing the first motor component (2) to a first machine part (4), and a second motor component which cooperates with the first motor component (2) for carrying out an opposite-sided movement. Also, a sensor device (5, 6) can be secured to the first motor component (2). Said sensor device comprises at least one sensor mounting bore (61) which is arranged in a predetermined manner through the motor mounting part and can be connected to the first machine part Also, the position and/or orientation of the sensor device (5, 6) are predetermined in a mounted state on the first machine part (2).

Abstract: The drive system for a personal care appliance, such as a toothbrush, includes a first opposing pair of permanent magnet assemblies positioned longitudinally along the length of the internal surface of a cylindrical appliance housing, each first permanent magnet assembly having one portion with a north polarity and the other portion a south polarity, and a second pair of permanent magnet assemblies which are orthogonal to the first pair of permanent magnet assemblies, one second permanent magnet assembly having a plurality of abutting first parts along the length thereof, the parts alternating between a north polarity and a south polarity, the other second permanent magnet assembly having similar parts with reversed polarity. First and second armatures are mounted on, or a portion thereof forms, a spindle element which extends along the length of and outward from the cylindrical housing.

Abstract: A magnetic levitation wafer stage is used to align a wafer in an exposure apparatus of photolithographic equipment. The wafer stage includes a base, a table supported on the base and whose entire top surface exhibits magnetism of a single polarity, and motors for moving the table in the X and Y directions relative to the base. Alternatively, the wafer stage includes a wafer table having a main body and a number of electromagnets disposed in an upper portion of the main body, and electronics that selectively supply current in either direction through coils of the electromagnets respectively and independently of one another. In the exposure process, the bottom surface of the substrate is provided with a magnetic substance such that the substrate exhibits magnetism of a given polarity. The substrate is delivered to and set on the table of the stage. There, the substrate is levitated by a magnetic force of repulsion between the substrate and the table.

Abstract: The aim of the invention is to provide a robust, simple woodworking machine. To achieve this, the invention provides a machine comprising at least one linear direct drive, which contains a primary part (3, 3a, 3b, 4, 4a, 4b) with a first element (9, 10, 12, 14) for generating a first magnetic field and at least one additional element (17, 18, 20, 27, 28, 29, 30) for generating an additional magnetic field. The first element (9) for generating the first magnetic field is positioned, in particular, in such a way in relation to the additional element (17, 18, 20, 27, 28, 29, 30) for generating the additional magnetic field that the first magnetic field overlaps the additional magnetic field. The machine also comprises a secondary part (5, 6, 6a, 6b), which comprises magnetic return elements and is devoid of magnetic sources.

Abstract: There is provided an apparatus for preventing displacement of a retainer in a rolling guide by making use of the property of the retainer of moving half the distance of a moving object, such as a table.

Abstract: The invention relates to a secondary part (2, 3) of a linear electrical machine (5), wherein the secondary part (2, 3) has permanent magnets (11) and a mount (13). The secondary part (2, 3) has spacer elements (9), wherein an installation height of the secondary part (2, 3) is also determined by means of the spacer elements (9). Tolerances of the installation height can be maintained more easily by means of the spacer elements. In a method for manufacturing a secondary part (2, 3) of a linear electrical machine (5), the spacer elements (9) are cast together with the mount (13) on which the permanent magnets (9) are arranged such that the permanent magnets (9) are embedded in the casting compound (15) and the casting compound (15) forms the surface of the secondary part (2, 3) in the region of the permanent magnets (11), wherein the spacer elements (9) protrude out of the casting compound (15) such that part of the surface of the secondary part (2, 3) is also formed by the spacer elements (9).

Abstract: In a linear motor, the stators and sliders are arranged to fill a predetermined relationship. In one configuration, two stators each include a plurality of stator blocks arranged in a moving direction of sliders so that projecting poles are maintained at predetermined intervals. Boundary surfaces are formed in adjacent stator blocks so as to be displaced relative to one another between the two opposite blocks by a distance Ld in the moving direction of the sliders. When a distance between end surface of the slider blocks is defined as L and the overall length of one stator block is defined as L0, the components are arranged such that Ld>L/3 and (L0?Ld)>L/3.

Abstract: When a pitch between centers of two adjacent magnetic pole portions disposed on an armature is defined as ?s, the length W of permanent magnets disposed in the middle is equal to the pitch ?s (W=?s). The length of each of the two end permanent magnets respectively disposed at either end of a permanent magnet magnetic pole row is denoted by W1. A ratio w1/W of the length W1 to the length W is defined as 0.43<W1/W<0.49. With this definition, cogging torque of a linear motor may sufficiently be reduced.

Abstract: The invention proposes an electric linear drive unit with an electric linear motor that is arranged in or on a basic housing. A sensor device arranged in or on the basic housing serves for determining at least one position of a driving element that is driven by the linear motor. Electric lines are routed from a coil system of the linear motor and from the sensor device to a common connecting point on the basic housing through at least one duct that extends within the basic housing, wherein said electric lines extend through the connecting point to a connector that is arranged at the connecting point and contains connecting means for producing a connection with external lines or cables. The connecting point is sealed by means of an insulating casting- or injection-molding compound at least in the region in which the lines extend from the connecting point.

Abstract: The invention relates to a synchronous linear motor comprising a mobile primary part (3) and a fixed secondary part (1, 2). The primary part (3) comprises conductive coils (4) and permanent magnets, and the secondary part (1, 2) has a ferrous structure comprising teeth (6, 7) which are oriented towards the primary part (3). The secondary part (1, 2) comprises at least one active region (2) which is characterized in that all of the teeth (7) of an active region (2) also comprise conductive coils (5).

Abstract: By reviewing a material of a forcer housing and an assembly structure of a coil member with respect to the forcer housing, a thrust force is increased, an optimum shape can be easily given to the forcer housing depending on a purpose of use, and a linear motor can be manufactured at low cost. The linear motor includes a magnet rod composed of a large number of magnetic poles arranged with predetermined pitches along an axial direction and a forcer having a through-hole into which the magnet rod is loosely inserted and reciprocatable relatively to the magnet rod according to an applied electric signal. The forcer is composed of a forcer housing in which the through-hole is defined and a coil member which is arranged on an inner peripheral surface of the through-hole of the forcer housing and to which the electric signal is applied. The forcer housing is formed by mold forming with an insulating nonmetal inorganic material.

Abstract: The aim of the invention is to improve the precision of measuring leakage field sensitive sensors on electric machines. According to the invention, the electric machine comprises a sensor device (4) which is sensitive to magnetic leakage fields mounted on one of the two active parts (1) or in a defined relative position in relation to the active parts. A magnetic screening device is arranged between the sensor device (4) and one of the two active parts (1). Also, the magnetic leakage fields no longer have an influence on the sensor device such that measuring precision is increased.

Abstract: A two-dimension linear platform comprises a first displacement module and a second displacement module. The first displacement module includes a carrying member, at least one active linear module and at least one passive linear module. The active linear module and the passive linear module of the first displacement are parallel and opposite each other and are both disposed on the carrying member of the first displacement module. The second displacement module includes a carrying member, at least one active linear module and at least one passive linear module. The carrying member of the second displacement module is disposed on the active linear module and the passive linear module of the first displacement module. The active linear module and the passive linear module of the second displacement module are parallel and opposite each other and are disposed on the carrying member of the second displacement module.

Abstract: A position sensing system for positioning a linear motor that includes a stator and an armature having magnets, the armature moving relative to the stator along a path. A sensor determines a position of the armature based on measurements of a magnetic field generated by the magnets of the armature.

Abstract: A linear or rotating electric synchronous machine includes a reluctance-secondary part, and a primary part, provided with a coil and permanent magnets. The primary part has teeth, with each tooth surrounded by a coil defining a coil axis. Arranged in each tooth is a permanent magnet which is surrounded by the coil and extends extending in parallel relationship to the coil axis of the coil. The secondary part is constructed for guiding a magnetic field and has teeth which define with the teeth of the primary part an air gap. The permanent magnet defines a magnetization direction in parallel to an air gap plane of the air gap, with the magnetization direction reversing from tooth to tooth.

Abstract: A driving apparatus includes a mover having a magnet, and a stator having a coil. The driving apparatus is adapted to control the electric current to be applied to the coil to cause relative movement between the mover and the stator. The stator includes a coil holding member configured to hold the coil, a supporting member configured to support the coil holding member movably in first and second directions, a restriction member configured to restrict movement of the coil holding member in the first direction and to allow movement of the coil holding member in the second direction, and a biasing unit configured to press the coil holding member against the restriction member.

Abstract: A position-data converter and a motor-drive control device are connected. The position-data converter receives two-phase, sine-wave analog signals da and db from two first magnetic detectors, respectively, and converts these signals da and db to position data. On receiving a positioning instruction, the motor-drive control device calculates the value of current, from the current position signal generated by the position-data converter. The permanent magnets incorporated in a linear motor are used as components of a linear scale, as well.

Abstract: A linear motor includes a primary part arranged as a guideway stator and at least one secondary part that is movable with respect to the primary part, the at least one secondary part having device(s) for controlling the generation of a magnetic field, causing its motion, in the primary part. It is possible to avoid costly control devices for the application of current to the stator.

Abstract: Provided is a linear actuator unit capable of suppressing flexure of a magnet rod (30) as much as possible and of obtaining smooth motion and high positioning accuracy of a slide member (2) while achieving downsizing thereof by using a rod-type linear motor (3).

Abstract: The invention concerns a stand (12) for a linear electric motor (14) comprising a primary winding (18) and a secondary winding (20), characterized in that the stand (12) comprises compensating means (52) consisting of elongated slots (58) delimiting connecting bridges (60) and in that said slots (58) constitute cooling openings through which is provided a forced air flow when the stand (12) is moving enabling the primary winding (18) to be cooled.

Abstract: The invention relates to a linear motor and in particular a primary part of the linear motor for the movement of a secondary part, with a plurality of coils for inducing a magnetic field transmitting force along an axis between the primary part and the secondary part and with teeth, which are made from a magnetizable material, are arranged between adjacent coils and have a base section remote from the axis and an end section facing the axis, the teeth on the end section being wider than on the base section. In order to provide a primary part or a linear motor which also allow for high force densities given a compact design, the coils also extend in the interspace between the end sections of adjacent teeth so as to increase the magnetic flux density.

Abstract: A base for planar servo motor which is defined with a hollow space for reducing the weight of the base. Thereby, when the base is hung upside down, the base can be prevented from being deformed by its own weight, and the load of a machine table for supporting the base can be relatively reduced, so as to avoid causing vibration of the machine table. In addition, the hollow space can reduce the material for manufacturing the base, so that the cost is reduced.

Abstract: A linear motor with an integrated guidance comprising a base plate comprising at least two side walls, and a travel plate guideably connected to the base plate in a linearly movable manner, wherein the travel plate comprises at least two rails and is connected to a plurality of rollers, wherein the plurality of rollers travel on the at least two rails.

Abstract: A stage apparatus includes a base, a stage that can move on a surface of the base, a first imparting unit arranged inside the base, which has a mass body and an actuator that is fixed to the base and moves the mass body in a direction vertical to the surface, the first imparting unit being configured to apply a force to the base by moving the mass body, and a controlling unit that controls the movement of the mass body in the vertical direction in the first imparting unit in accordance with movement of the stage, so that a force, which is generated in the base by the movement of the stage in a rotational direction around an axis parallel to the surface, is reduced.

Abstract: A radiator for a linear or curved mobile motor for removing the thermal distortion of a mover and a transporting member of a linear or curved mobile motor, and a high-accuracy, high-reliability linear or curved mobile motor using it. The linear or curved mobile motor includes a field pole having a plurality of permanent magnets with different magnetic poles arranged alternately along a field yoke, and an armature arranged opposite to the field pole via a magnetic gap and formed by winding a single or a plurality of coils around a core. The field pole is used as a stator and the armature being used as a mover that is relatively moved along the longitudinal direction of the stator.

Abstract: A vibration actuator having a simple small-sized structure capable of obtaining vibration enough to sense without use of suspension or the like is provided. Amplitude of a moving part is restrained by a magnetic gap formed by cup-shaped yokes which are formed to interpose a magnet, and the moving part is vibrated without collision of the moving part with an inner wall of a fixed part. Therefore, magnetic force exerted between the moving part and the fixed part is allowed to function as a suspension. Therefore, it is possible to solve a problem, that is, reduction in the amplitude caused from the suspension. In addition, an air damper structure that air in upper and lower space of the moving part is used as a damper is provided, so that it is possible to obtain a wide frequency band.

Abstract: A vertical actuator has a stationary part that includes an upper part made of magnetic material which is magnetically separated from a yoke which bears a coil. The upper magnetic part generates an overall reluctance force on the movable part of the actuator which, over the entire functional range of the actuator, is slightly greater than the gravitational force. When the coil is not energized, the movable part has a position of stable equilibrium which is in the upper section of this functional range.

Abstract: When a pitch between centers of two adjacent magnetic pole portions disposed on an armature is defined as ?s, the length W of permanent magnets disposed in the middle is equal to the pitch ?s (W=?s). The length of each of the two end permanent magnets respectively disposed at either end of a permanent magnet magnetic pole row is denoted by W1. A ratio w1/W of the length W1 to the length W is defined as 0.43<W1/W<0.49. With this definition, cogging torque of a linear motor may sufficiently be reduced.

Abstract: Movable-body apparatus, notably configured as stages, are disclosed that include at least one movable body and at least one respective actuator. The actuator drives the movable body in the direction of at least one axis in a predetermined plane. A waste-heat member is situated in a non-contacting manner with the movable body. The waste-heat member absorbs heat radiated from the movable body. Thus, adverse thermal influences of the movable body are suppressed without a need to connect a coolant conduit to the movable body, which eliminates decreases in movement accuracy conventionally caused by tension of such a conduit on the movable body.