Abstract: A flexible conductive material includes an elastomer, a conductive agent filled in the elastomer, and an adsorbent fixed inside the elastomer and able to adsorb ionic material. With the flexible conductive material, ionized impurities are unlikely to transfer to an adherend such as a dielectric film. Thus, leakage current during application of voltage decreases. Accordingly, by forming an electrode and a wiring with the flexible conductive material, leakage current can be reduced, and a transducer and a flexible wiring board having excellent durability can be produced. In addition, using the flexible conductive material, an electromagnetic shield can be produced having a small leakage current.

Abstract: Apparatus and method that includes providing a variable-parameter electrical component in a high-field environment and based on an electrical signal, automatically moving a movable portion of the electrical component in relation to another portion of the electrical component to vary at least one of its parameters. In some embodiments, the moving uses a mechanical movement device (e.g., a linear positioner, rotary motor, or pump). In some embodiments of the method, the electrical component has a variable inductance, capacitance, and/or resistance. Some embodiments include using a computer that controls the moving of the movable portion of the electrical component in order to vary an electrical parameter of the electrical component. Some embodiments include using a feedback signal to provide feedback control in order to adjust and/or maintain the electrical parameter.

Abstract: An actuator capable of generates force by leveraging the changes in capillary pressure and surface tension that result from the application of an electrical potential. The device, which will be referred to as a Capillary Force Actuator (CFA), and related methods, employs a conducting liquid bridge between two (or more) surfaces, at least one of which contains dielectric-covered electrodes, and operates according to the principles of electrowetting on dielectric.

Abstract: This disclosure provides systems, methods and apparatus for forming raised anchor structures in a seal area. In one aspect, the anchor structures include a receiving space. Sealant can flow into the receiving spaces. In one aspect the receiving space is formed by an overhang section. In one aspect, the overhang can be formed in part by removing a sacrificial layer. The raised anchor structures in the seal area can improve adhesion between two plates by acting as mechanical hooks, further securing the plates together.

Abstract: According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit.

Abstract: A Tape Muscle is described where multiple tape loops are independently driven by synchronized grasp and pull actions from a tandem of Clamp, Clamp & Drive modules. Each tape loop is elastically bent, with its open ends threaded through individual passageways in both modules. Tape loops are nested inside each other with all tape open ends on the same side. Each loop moves its open ends in equal, opposite directions, while the loop position remains fixed. Tape movements do not interfere with each other. The open ends of each loop attach to a shared appendage, which is pulled back and forth using tensile forces. Drive and hold forces use small angle flexure bending mechanical advantage and high force density electrostatic induction methods. Tape speed results from high frequency clock speed and novel hand-off methods. Governing equations, design details and performance estimates are provided.

Abstract: A driving apparatus (100) is provided with: a base part (110); a driven part (130) capable of rotating around an axis which is along one direction (Y-axis); an elastic part (120) which connects the base part and the driven part and which extends along the one direction; and an applying part (140) for applying a force for expanding and contracting the elastic part along the one direction as an excitation force for rotating the driven part such that the driven part resonates at a resonance frequency determined by the elastic part and the driven part.

Abstract: A temperature compensated resonator including a body used in deformation, the core of the body including a first material. The body includes at least a first and second coating allowing the resonator to have substantially zero first and second order temperature coefficients. The temperature compensated regulator can be used in the field of time and frequency bases.

Abstract: In one embodiment, an actuator has a movable member, a frame, and first and second electrodes. Each of the first electrodes has a pair of first and second planes perpendicular to a third direction which is orthogonal to the first and the second directions approximately. The second electrodes are provided alternately with the first electrode respectively and with a distance from the first electrode. Each of the second electrodes has a pair of third and fourth planes perpendicular to the third direction. The first and the second planes have a deviation in the third direction with respect to the third and the fourth planes, respectively. The amount of the deviation is larger than a maximum value of the amount of displacement of the movable member in the third direction. The amount of displacement is produced by gravity when a component of the gravity in the third direction is maximum.

Abstract: The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.

Abstract: An apparatus including a bypass structure for complementary metal-oxide-semiconductor (CMOS) and/or microelectromechanical system (MEMS) devices, and method for fabricating such apparatus, is disclosed. An exemplary apparatus includes a first substrate; a second substrate that includes a MEMS device; an insulator disposed between the first substrate and the second substrate; and an electrical bypass structure disposed in the insulator layer that contacts a portion of the first substrate, wherein the electrical bypass structure is electrically isolated from the MEMS device in the second substrate and any device included in the first substrate.

Abstract: A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film.

Abstract: A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator.

Abstract: The present invention provides methods and devices directed to the use of flexure assemblies to assist components driven by actuators, including but not limited to electroactive polymer transducers for providing sensory feedback. The present invention may be employed in any type of user interface device including, but not limited to, touch pads, touch screens or key pads or the like for computer, phone, PDA, video game console, GPS system, kiosk applications, etc.

Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

Abstract: A method of designing/making an acoustic side branch resonator structured to be coupled to a standpipe of, for example, a nuclear power plant, wherein the acoustic side branch resonator includes a plurality of wire mesh elements for damping purposes. The method includes determining a resonant frequency of the standpipe, determining an active length of the acoustic side branch resonator using the resonant frequency, and determining a particular number of the wire mesh elements to be used in the acoustic side branch resonator and a pitch of each of the wire mesh elements using momentum and continuity equations of a compressible fluid.

Abstract: A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium.

Abstract: An electronic device has an electronic signal source electrically connected to a signal routing circuit, an electrically activated transducer to receive electronic signals through the signal routing circuit, and an anisotropic conductive film to provide electrical continuity between the signal routing circuit and the transducer, the anisotropic conductive film having material removed adjacent the transducer to reduce mechanical loading of the transducer.

Abstract: This disclosure provides systems, methods and apparatuses for supporting a mechanical layer. In one aspect, an electromechanical systems device includes a substrate, a mechanical layer, and a post positioned on the substrate for supporting the mechanical layer. The mechanical layer is spaced from the substrate and defines one side of a gap between the mechanical layer and the substrate, and the mechanical layer is movable in the gap between an actuated position and a relaxed position. The post includes a wing portion in contact with a portion of the mechanical layer, the wing portion positioned between the gap and the mechanical layer. The wing portion can include a plurality of layers configured to control the curvature of the mechanical layer.

Abstract: Embodiments of the subject invention relate to a method and apparatus for stabilizing a moveable element of a device. In an embodiment, a device is provided including a base, an element capable of moving relative to the base, and at least one actuator. Each actuator of the at least one actuator is configured such that when the actuator is driven the actuator moves into a hold position, wherein the actuator limits movement of the element. In a particular embodiment, the at least one actuator holds the element, or a portion of the element, at a particular position, angle, and/or attitude. In an embodiment, the at least one actuator is used to limit movement of the element when the device is turned off. The at least one actuator can be positioned to allow greater movement of the element when the device is turned on.

Abstract: An electromechanical systems array includes a substrate and a plurality of electromechanical systems devices. Each electromechanical systems device includes a stationary electrode, a movable electrode, and an air gap defined between the stationary electrode and the movable electrode, where the air gap defines open and collapsed states. At least two different electromechanical systems device types correspond to finished devices having different sized air gaps when in the open state. Each electromechanical systems device further includes a primary mechanical layer of a common thickness along with one or more mechanical sub-layers with a different cumulative thickness for each of the at least two different electromechanical systems device types. The mechanical sub-layers can be deposited for use as etch stops during processing of the air gap. The different air gap sizes of each electromechanical systems device type can correspond to a different mechanical sub-layer thickness.

Abstract: The present invention provides meta-materials with an actively controllable mechanical property. The meta-material includes a deformable structure and a set of activation elements. The activation elements are controllable between multiple states. The meta-material includes a first value for a mechanical property when one or more of the activation elements is in the first activation state and includes a second value for the mechanical property when the activation elements have been activated to the second activation state. In one aspect, the meta-material resembles a composite material where the connectivity between the component materials or shape and arrangement of the component materials is dynamically controllable so as to affect a mechanical property of the meta-material.

Abstract: Devices and methods for providing electrochemical actuation are described herein. In one embodiment, an actuator device includes an electrochemical cell including a negative electrode and a positive electrode At least a portion of the negative electrode is formed with a material formulated to at least one of intercalate, de-intercalate, alloy with, oxidize, reduce, or plate with a first portion of the positive electrode to an extent different than with a second portion of the positive electrode such that a differential strain is imparted between the first portion and the second portion of the positive electrode and such that at least a portion of the electrochemical cell is displaced. The electrochemical cell includes a portion that is pre-bent along an axis of the electrochemical cell to define a fold axis and the displacement of the at least a portion of the electrochemical cell is maximized along the fold axis.

Abstract: The present disclosure provides a system and method for controlling positioning of a movable member of a MEMS microactuator to reduce bouncing and ringing. The system includes control circuitry in communication with the MEMS microactuator. The control circuitry is adapted to linearly increase an actuation signal from a first state to a second state to urge the movable member from a first position to a second position and hold the movable member in the second position. The control circuitry is further adapted to linearly decrease the actuation signal from the second state to the first state to release the movable member to the first position. A transition time is not less than the inverse of one quarter of a natural frequency of the movable member as the movable member moves to the first position.

Abstract: An acoustic transducer includes a first driving unit group including at least one electrode and a second driving unit group including at least one electrode. The first driving unit group is driven at a first phase, and the second driving unit group is driven at a second phase that is different from the first phase.

Abstract: On an upper surface of a fixed substrate, a plurality of strap-shaped base electrodes are arranged in parallel to each other. On each of the base electrodes, an electret is formed. The electret has a width wider than the width of each base electrode, and the electret covers an exposed surface of the base electrode. A movable substrate is disposed in parallel to and facing the surface of the fixed substrate where the electrets and others are formed. The movable substrate is movable relatively to the fixed substrate. On a facing surface of the movable substrate, strip-shaped counter electrodes are each formed so as to face each base electrode.

Abstract: The present invention provides an actuator which uses a cationically conductive polymer electrolyte and shows a large deformation response. The actuator has a pair of opposing electrodes and an intermediate layer arranged between the pair of the electrodes, which actuator being curved and displaced when voltage is applied to the electrodes, wherein the intermediate layer has at least: the cationically conductive polymer electrolyte having an ether bond site and an anion site in its molecule; and a weakly acidic material which interacts with the ether bond site.

Abstract: A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on one or more surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning.

Abstract: A MEMS transducer has a micromechanical sensing structure and a package. The package is provided with a substrate, carrying first electrical-connection elements, and with a lid, coupled to the substrate to define an internal cavity, in which the micromechanical sensing structure is housed. The lid is formed by: a cap layer having a first surface and a second surface, set opposite to one another, the first surface defining an external face of the package and the second surface facing the substrate inside the package; and a wall structure, set between the cap layer and the substrate, and having a coupling face coupled to the substrate. At least a first electrical component is coupled to the second surface of the cap layer, inside the package, and the coupling face of the wall structure carries second electrical-connection elements, electrically connected to the first electrical component and to the first electrical-connection elements.

Abstract: According to one embodiment, a apparatus for driving a capacitance-type actuator includes a first voltage source, a second voltage source, and a driver. The first voltage source outputs a first voltage to charge the capacitance-type actuator. The second voltage source outputs a second voltage to charge the actuator. The driver switches between first and second charges and first and second discharges. The first charge supplies the first voltage to the actuator. The second charge supplies the sum of the first voltage and the second voltage to the actuator. The first discharge emits a charge accumulated in the actuator and guides the charge to the second voltage source. The second discharge emits the charge accumulated in the actuator without guiding the charge to the second voltage source.

Abstract: A manufacturing method of the MEMS device disposes a conductive circuit to maintain various elements of the MEMS equi-potential thereby preventing electrostatic damages to various elements of the MEMS during the manufacturing process.

Abstract: The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example.

Abstract: A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. A capacitive electromechanical transducer apparatus 100 includes cells 102 that include a first electrode 104 and second electrodes 106, each of which is disposed so as to be opposite the first electrode 104 with a cavity 105 therebetween. In the capacitive electromechanical transducer apparatus 100, at least one of the cells 102 includes a processed unit on which at least either addition of a material or removal of a material is performed as processing.

Abstract: An actuator includes a housing, a movable part, and an advancing unit that is at least temporarily connected to the movable part. The advancing unit includes a deformation unit and a deformer configured to deform the deformation unit with a vector component perpendicular to an effective direction of the actuator so that a total length of the deformation unit changes in the effective direction of the actuator as a result of the deformation. The movable part is configured to move in the effective direction of the actuator upon a removal of the vector component on the deformation unit and the deformation unit is disposed along the effective direction of the actuator upon the removal of the vector component on the deformation unit.

Abstract: A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.

Abstract: Microelectronic devices for harvesting kinetic energy and associated systems and methods. Particular embodiments include an energy harvesting device for generating electrical energy for use by microelectronic devices, where the energy harvesting device converts to electrical energy the kinetic energy among or within the microelectronic devices and their packaging, and provides this electrical energy to power the microelectronic devices.

Abstract: A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.

Abstract: There is provided an actuator including a displacement unit made of a mixture of a silicone-containing elastomer and an ionic liquid; and multiple electrodes provided to apply an electric field to a part or whole of the displacement unit. Here, the displacement unit is deformed by applying a voltage between the multiple electrodes.

Abstract: A power generating device includes a first substrate having a first electrode and a first positioning electrode being chargeable with a first polarity on a first surface, and a second substrate movable within a predetermined range from a static position in the planar direction of the first substrate and having a second electrode and a second positioning electrode being chargeable with a second polarity opposite to the first polarity on a second surface opposing the first surface. Overlapping the first positioning electrode and the second positioning electrode at least partially in plan view of the first substrate in the static position can cause the second substrate to return to the static position due to electrostatic attraction generated between the first positioning electrode and the second positioning electrode.

Abstract: A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract: A lens barrel for, e.g., a miniature camera or another device, includes an annular barrel, a plurality of first optical elements disposed coaxially within the barrel, an actuator device disposed coaxially within the barrel in front of the first optical elements, a front cover attached coaxially to a front surface of the actuator device, and a second optical element mounted coaxially in a central opening of a moving platform of the actuator device such that rotational movement of actuators in the actuator device causes the moving platform and second optical element to move conjointly with a purely translation movement along the optical axis of the second optical element and relative to the first optical elements.

Abstract: A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.

Abstract: An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.

Abstract: A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar actuator device of an electrically conductive material, e.g., a semiconductor, to include an outer frame, a fixed frame coupled to the outer frame for rotational movement relative thereto, a moveable frame coupled to the outer frame for rotational movement relative thereto, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame. The fixed frame is then rotated to a deployed position relative to the outer frame such that the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth, and the position of the fixed frame relative to the outer frame is then fixed at the deployed position.

Abstract: A device may have an outer frame, a platform, and a plurality of actuators configured to move the platform with respect to the outer frame. Each of the actuators may have a movable frame and a fixed frame. A motion control mechanism may be configured to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame.

Abstract: A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

Abstract: A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.

Abstract: A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Abstract: An ultrasonic transducer cell, an ultrasonic transducer channel, and an ultrasonic transducer including the ultrasonic transducer channel are provided. The ultrasonic transducer cell includes a substrate, at least three columns arranged on the substrate at regular intervals, and a thin film arranged on the at least three columns.

Abstract: A method and a device for converting energy uses chemical reactions in close proximity to or on a surface to convert a substantial fraction of the available chemical energy of the shorter lived energized products, such as vibrationally excited chemicals and hot electrons, directly into a useful form, such as longer lived charge carriers in a semiconductor. The carriers store the excitation energy in a form that may be converted into other useful forms, such as electricity, nearly monochromatic electromagnetic radiation or carriers for stimulating other surface reactions.