Abstract: A piezoelectric vibration element having a favorable drive level characteristic for miniaturization, and a piezoelectric oscillator. The piezoelectric vibration element includes a base made of a piezoelectric material, a plurality of vibration arms extended from the base, a long groove formed along a longitudinal direction of a main surface of each of the plurality of vibration arms, and an exciting electrode provided inside the long groove. A center position in a width dimension of the long groove is decentered in a minus X-axis direction from a center position of an arm width dimension.

Abstract: The packaged piezoelectric resonator comprises a case (170; 270) with a lid (140; 240) and a piezoelectric resonator element (110) housed in said case, The piezoelectric resonator element includes a planar tuning-fork-shaped part with two parallel vibrating arms (112,114), and an additional attachment arm (118) intended for fixing the resonator element (110) to the bottom (172) of the case (170). The inside surface of the lid (140, 240) is stepped in such a way as to form a first portion (142) where the lid has a first thickness and a second portion (144) where the lid has a second thickness substantially greater than the first thickness, the first portion (142) extending at least over distal end portions (166, 168) of the vibrating arms (112, 114), and the second portion (144) extending at least over a part of the attachment arm (118).

Abstract: A system that facilitates damping of mechanical vibration associated with machinery that is subject to such mechanical vibration. The system comprises machinery with at least one moveable part and a piezoelectric actuator that is selectively applied to the machinery. The piezoelectric actuator receives voltages and is employed to facilitate damping of mechanical vibration associated with the machinery.

Abstract: A system for megasonic processing of an article. In one aspect, the system for megasonic processing comprises a rotary support for supporting an article, a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and a transducer assembly. The transducer assembly comprises (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.

Abstract: An ultrasound reactor (30) having a reactor body (1), a reactor tube (9) disposed within the reactor body and a magnetostrictor transducer (11) comprising at least one annular element (28a-d) concentric with, and mounted to an external wall of said tube and a process for ultrasonic treatment of a reaction material are disclosed. The transducer is mounted on the reactor tube in such a way so as to transmit ultrasound radiation to the interior of the tube and to induce an upwardly flowing cavitation stream whose longitudinal axis substantially coincides with a longitudinal axis of said tube, causing physical changes to the reaction material.

Abstract: A thin film piezoelectric resonator includes a substrate having a cavity, and a resonance portion located on the substrate and right above the cavity. The resonance portion includes a lower electrode layer located at a side of the cavity, an upper electrode layer opposite to the lower electrode layer, and a piezoelectric thin film located between the upper electrode layer and the lower electrode layer. A side of the piezoelectric thin film and a side of the lower electrode layer are located in a common plane.

Abstract: A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section.

Abstract: A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

Abstract: Kits and methods for building devices for analyzing or suppressing vibrations in equipment are provided. An electrical-mechanical transducer is configured to be placed in operative contact with the equipment. The transducer may be directly mounted to a base plate that is configured for being mounted to the equipment. A first device (e.g., a printed circuit board) carrying electronic componentry is configured for transmitting vibration drive signals to the electrical-mechanical transducer. A second device (e.g., a printed circuit board) carrying electronic componentry is configured for receiving vibration sensing signals from the electrical-mechanical transducer. The first and second devices can be interchangeably mounted within a housing that can be mounted to the base plate. The housing may comprise an aperture for receiving the electrical-mechanical transducer.

Abstract: Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes.

Abstract: Disclosed are piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film deposited on a carrier substrate. Exemplary resonators comprise a substrate having a smooth diamond layer disposed thereon. A piezoelectric layer is disposed on the diamond layer and top and bottom electrodes sandwich the piezoelectric layer. The resonant structure comprising the diamond layer, piezoelectric layer and electrodes are released from the substrate and are free to vibrate. Additionally, one or more sensing platforms may be coupled to the substrate to form a mass sensor.

Abstract: This invention relates to a device which may be permanently attached or removably attached to a material, such as a vehicular glass window. This device may comprise of a converter sub-unit or vibrator and a coupler. These elements may be arranged to propagate mechanical motion generated by the converter sub-unit through the coupler and optionally into the edge of the attached material. The resulting vibration motion in the material, which could take the form of a longitudinal compression/rarefaction wave, transverse wave, or a combination of the two waveforms, may be of a sufficient magnitude so as to cause the adhesive bond between the material's surface and other solid debris, such as ice, to be broken. This allows the debris to fall away while not damaging the material. The vibration motion in the material may be also of sufficient magnitude to remove a liquid such as water from the material surface.

Abstract: An electrical passivation of surfaces of an electronic component which have electrodes is intended to be carried out in simple and effective fashion and also to be stable in chemically and thermally unfavourable environments. For the passivation, a plastic film, for example made of epoxy, is laminated onto the surface. Applications are in fuel injection systems, for example.

Abstract: A piezoelectric expansion actuator for d33 piezoelements, which allows vibrations in structures to be suppressed. An expansion actuator (1) includes a piezoelectric stack (2), which consists of d33 piezoelectric elements and is arranged between output elements (4), which are attached to the surface of the structure (7). The invention applies to a piezoelectric extension actuator, which is used to control vibrations in structures. Alternatively, in order to damp vibrations between the main gearbox of a helicopter rotor and the cellular structure of the cockpit, a power application point of the output element (18, 19, 180, 190; 35, 36) is arranged at a distance from the corresponding end plate of the piezoelectric stack (22, 220; 31, 32, 33) in the axial direction (X).

Abstract: An upper electrode (50) includes a first electrode section (51) formed in a circular shape and a second electrode section (52) and a third electrode section (53) formed in a fan-shaped manner outside of the first electrode section (51). The first, second, and third electrode sections (51 to 53) are electrically separated from one another via an insulating region. A lower electrode (30) includes a fourth electrode section (31) formed in a circular shape and a fifth electrode section (32) and a sixth electrode section (33) formed in a fan-shaped manner outside of the fourth electrode section (31). Similarly, the fourth, fifth, and sixth electrode sections (31 to 33) are electrically separated from one another via an insulating region.

Abstract: A resonator which is capable of modulating frequencies has a main body having a vibrating body and an elastic supporting body supporting the vibrating body and a frequency modulating unit having a movable contacting part that is movable between a first position away from the elastic supporting body and a second position which is contactable with the elastic supporting body. Since there is a variable vibration length of the elastic supporting body during vibration of the vibration body by the contact between the contacting part and the elastic supporting body, it is possible to change the frequency of vibration extracted from the resonator, when it is necessary.

Abstract: A device including a layered heterostructure with an oxygen-containing material, with a carbon layer and an amorphous oxygen diffusion barrier protecting the carbon layer from etching by oxygen. One or more of a metal, a carbide or an oxide may be in contact with the amorphous oxygen diffusion barrier that has the lowest free energy of oxide formation in the device. Various devices are disclosed as are varieties of carbon allotropes. Methods of protecting carbon, such as diamond from the oxygen etching in processes such as device manufacture are also disclosed.

Abstract: A power generation system includes a piezoelectric component, a resilient stress inducer in operable communication with the piezoelectric component, and an actuator in operable communication with the resilient stress inducer to energize and release the resilient stress inducer and method for generating power.

Abstract: An echo sounder includes front and rear masses and a layered product of piezoelectric ceramics sandwiched therebetween, and a hollow space is formed in the front mass for defining a bending vibratory plate portion; a ring-shaped piezoelectric vibrator is accommodated in the hollow space, and has flat major surface or an outer side surface held in contact with the front mass without being fixed to the bending vibratory plate; while the layered product of piezoelectric ceramics gives rise to bending vibrations in the bending vibratory plate, the ring-shaped piezoelectric vibrator is driven for vibrations at the resonant frequency so that an acoustic wave with a large amplitude is radiated from the echo sounder; the bending vibratory plate and ring-shaped piezoelectric vibrator are independently designed so that the echo sounder achieves a high acoustic radiation efficiency without sacrifice of high withstand water pressure.

Abstract: A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.

Abstract: A piezoelectric resonator element, comprises: a base made of a piezoelectric material; at least a pair of resonating arms provided in a unified manner with the base and extending in parallel with each other from the base; a portion defining a long groove provided to each of the resonating arms along a longitudinal direction; and a driving electrode provided to the long groove. Each of the resonating arms includes a structure to adjust hardness balance between right and left structures with respect to a virtual central line extending in the longitudinal direction.

Abstract: A vibratory gyroscope including a vibrator (10) integrally having a plate-like body portion (11) spreading along a reference plane, three drive arms (12, 13, 14) extending in a first direction from the body portion along the reference plane, and two detection arms (15, 16) extending in a second direction opposite to the first direction from the body portion along the reference plane. The three drive arms are composed of two exciting drive arms (12, 13) that are excited in mutually opposite phases in the reference plane and a non-exciting drive arm (14) located between the two exciting drive arms. Each of the three drive arms has an arm width in a width direction along the reference plane and perpendicular to the first direction. Each of the two detection arms has an arm width greater than that of the drive arm in the width direction, thereby suppressing generation of vibrations along the reference plane.

Abstract: An apparatus comprises a signal source, a driver and an electro-mechanical transducer. The signal source is configured to output a haptic feedback signal. The driver is configured to receive the haptic feedback signal and output a drive signal. The electro-mechanical transducer is configured to receive the drive signal. The electro-mechanical transducer is configured to have a set of operational modes. Each operational mode from the set of operational modes has at least one resonant mode from a set of resonant modes.

Abstract: In order to improve the sound pressure level and the sound quality of a piezoelectric electroacoustic transducing device without impairing the size, the productivity, the cost, and the like of the device, the piezoelectric electroacoustic transducing device 1 has: a frame 20; a piezoelectric vibrator 10 in which piezoelectric elements 12, 13 are bonded to a metal plate 11; and a support member 30 which supports a peripheral portion of the piezoelectric vibrator 10 on the frame 20, and which is made of a resin film such as a ring-like PET resin, and a mesh or embossed concave and convex structure is formed on the surface of the support member 30. While maintaining the external shape of the support member 30, the support member 30 is provided with a flexibility at which a large displacement of the piezoelectric vibrator 10 is not impeded.

Abstract: An object of the present invention is to provide an inexpensive thin film piezoelectric bulk acoustic wave resonator that allows fine-tuning of a resonant frequency. Another object is to provide an inexpensive filter with dramatically improved frequency characteristics, using thin film piezoelectric bulk acoustic wave resonators that can be formed on one substrate.

Abstract: A method for producing a piezoelectric component comprising at least two stacked crystal filters comprises the steps of depositing of the layer stack above the bottom electrode and the subsequent patterning of the upper electrically conductive layer and, if appropriate, second piezoelectric layers. Thus, it is possible, in a simple manner, with a minimum of process steps, to produce a piezoelectric component comprising two stacked crystal filters which are directly connected to one another via their bottom and central electrodes. The piezoelectric component furthermore has the advantage that applications in which a high stop band attenuation is important can be realized with a relatively small number of filter stages. In this case, through the use of at least two stacked crystal filters, it is possible to achieve an excellent out-of-band rejection also for “single-ended signals”.

Abstract: Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.

Abstract: A transducer assembly for the megasonic processing of an article and apparatus incorporating the same. The transducer assembly comprises a vibration transmitter having a portion configured to be positioned adjacent to and spaced from the surface of an article so that when fluid is applied to the surface of the article, a meniscus of the fluid forms between the surface of the article and the portion of the vibration transmitter. The transducer assembly also comprises a transducer coupled to the vibration transmitter, where the transducer can oscillate to propagate megasonic energy through the vibration transmitter and through the meniscus of the fluid. In one embodiment, the transducer is located within an enclosed space and at least one passageway is provided for flowing a gas in and/or out of the enclosed space. In an another embodiment, the portion of the vibration transmitter includes an elongated edge that is positioned close to and generally parallel to a surface of the article.

Abstract: A torsional hinged resonant device having an improved anchor support for providing inertia drive. The area by the anchors connecting the torsional hinges to the support member are thinned to have a reduced cross section. The reduced or thinned area increases flexibility such that less force is required to generate a desired angular rotation.

Abstract: A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

Abstract: A system having a harmonic frequency actuator system is provided including providing an actuator body, the actuator body having more than one set of fingers for generating a motion for a semi-rigid element, and attaching a high frequency actuator to the actuator body forming a harmonic frequency actuator to provide motion at predetermined frequency pairs.

Abstract: A receiver of an ultrasonic sensor includes reception elements, each of which has a shape of a flat rectangular plate. The reception elements are arranged one-dimensionally on a plane so that the reception surfaces face the same direction and that the reception elements are aligned with small intervals in the width direction thereof while longitudinal ends of the reception elements at a certain side are aligned in a straight line. The widths and the thicknesses of the reception elements are even, while the longitudes of the reception elements are uneven. The both longitudinal ends of the reception elements are fixed to prohibit the vibration of the ends. The longitudes are designed so that the primary resonance frequencies of the reception elements are uneven.

Abstract: A piezoelectric resonator is provided which is capable of acquiring an excellent Q characteristic while letting a film thickness of an upper electrode be larger. The piezoelectric resonator has a lower electrode and an upper electrode with a piezoelectric film being sandwiched between them. By applying a voltage between the lower and upper electrodes to let a bulk acoustic wave propagate through inner portions of the piezoelectric layer, a signal having a specified resonant frequency is obtained. The standing wave has a first wave loop at an interface on a side opposite to the piezoelectric film of the upper electrode and a wave node and a second wave loop in inner portions of the upper electrode directing from the interface toward the piezoelectric film. The film thickness of the upper electrode obtained when a wavelength of a standing wave is defined as “?” is 0.4? to 0.7?.

Abstract: The vibration-type piezoelectric acceleration sensor element includes a frame; and a diaphragm, support, and retentive part, provided in the frame. The diaphragm includes a bottom electrode layer, a piezoelectric thin-film layer formed on the bottom electrode layer, and a top electrode layer formed on the piezoelectric thin-film layer. A first end of the diaphragm is connected to the frame. The support retains a second end of the diaphragm. The retentive part retains the support so that the support is reciprocable only in a direction through the first end and the second end of the diaphragm.

Abstract: A piezoelectric/electrostrictive device includes a base 11 having a pair of movable parts 11a, 11b opposing each other and a connecting part 11c that connects movable parts 11a, 11b with each other at one end thereof as well as piezoelectric/electrostrictive elements 12a, 12b disposed on the side surfaces of movable parts 11a, 11b of base 11. The piezoelectric/electrostrictive device is constructed in a simple structure with fewer components. Base 11 is integrally formed in an open-box shape or in a horseshoe shape by bending one sheet of band-shaped flat plate. Movable parts 11a, 11b extend for a predetermined length from respective ends of connecting part 11c to the other ends. The other ends of movable parts 11a, 11b constitute a mounting site for mounting a component to be controlled or a component to be tested.

Abstract: A sensor system including a plurality of transducer groups, with each transducer group having a plurality of transducers. The transducers of each group are adapted to be placed in operative proximity with a sample material. Within each transducer group, each transducer is actuable via application of a different phase-shifted variant of a local oscillator signal to the transducer. The sensor system is also configured so that, for each transducer group, the phase-shifted variants of the local oscillator signal are selectively employed during output processing to inhibit cross-transducer interference occurring between simultaneously active transducers.

Abstract: The invention relates to a filter device equipped with at least one bulk acoustic wave resonator, which comprises a resonator unit and a reflection element (2) comprising several layers (6, 7, 8). The layers (6, 7, 8) each comprise a mixture of at least two materials. Within each layer (6, 7, 8), the composition of the mixture varies continuously and periodically relative to the layer thickness.

Abstract: A sound/vibration resonance separating device for resonance-separating and instantly visualizing sound and vibration having one of various frequencies by fixing vibrators such as a plurality of piano wires to a rigid body. In other words, the device is an auditory model for executing Fourier transform instantly. In FIG. 2, numerals 1–20 designate vibrators having various natural vibrations. When a sound is inputted from a microphone for converting it into an electric signal to a device body, as shown in FIG. 4, the electric signal is amplified/controlled by an electronic circuit (28) and outputted to a speaker (24) acting as a vibration converting device, and the sound becomes amplified longitudinal vibration to vibrate a rigid body (21) longitudinally. The vibration is transmitted to the vibrators (I–20) fixed to the rigid body and having the natural vibration, and only the vibrator corresponding to the frequency vibrates. A volume knob (25) is provided for adjusting the amplitude of the vibration.

Abstract: An electron-emitting element includes an electric field applying portion comprising of a dielectric formed on a substrate, a first electrode formed on one surface of the electric field applying portion, a second electrode being formed on the surface of the electric filed applying portion, and a slit formed in cooperation with the first electrode.

Abstract: This invention relates to a device which is either permanently attached or removable to the edge of a material such as a vehicular glass window. This device may be comprised of a converter sub-unit (vibrator) and an amplifying coupler. These elements are arranged so as to propagate mechanical motion generated by the converter sub-unit through the amplifying coupler and into the edge of the attached material. The resulting vibration motion in the material, which could take the form of a longitudinal compression/rarefaction wave, transverse wave, or a combination of the two waveforms, is of a sufficient magnitude so as to cause the adhesive bond between the material's surface and other solid debris, such as ice, to be quickly broken. This allows the debris to fall away while not damaging the material. The vibration motion in the material is also of sufficient magnitude to remove a liquid such as water from the material surface.

Abstract: A motion sensing system utilizing piezoelectric laminates with predetermined surface electrode patterns disposed thereon utilizes a frequency selector to pass motion waves of predetermined frequencies and an electrical circuit for processing the electrical signals for transmission to an activating device for appropriate activation. In particular, the frequency selector is a low frequency bandpass filter for free-fall acceleration wave frequencies. By directing appropriate action, the present invention increases the applicability of the device upon which it is mounted (e.g., for military or other hostile environment use), decreases the possibility of damage, and lengthens its useful life.

Abstract: A mathod of manufacturing a piezoelectric/electrostrictive divice includes an additional member that is provided at a border between an inner wall surface of a thin plate section formed by a long ceramic plate and a side surface (cutout surface) formed by a short ceramic plate. Assuming that a surface of the additional member forms a curve C as viewed in vertical cross section, the curve C is a free curve having one inflection point. The additional member has a portion C2 which extends along the inner wall surface of the thin plate section with its surface extending substantially in parallel toward the border, and a curved portion C3 which is disposed at a part corresponding to the border.

Abstract: A method of producing a ceramic stack is provided, including the steps of providing at least a first ceramic green sheet to be formed into a long ceramic plate and having a principal surface, providing at least a second ceramic green sheet to be formed into a short ceramic plate and having a length that is less than a length of the principal surface of the first ceramic green sheet, and laminating the second ceramic green sheet to the principal surface of the first ceramic green sheet to form a ceramic green sheet laminate having a lamination border defined between at least a side surface of the second ceramic green sheet and the principal surface of the first ceramic green sheet. The method also includes the steps of forming a member having a curved surface at the lamination border by applying a paste to the lamination border such that the curved surface includes at least one inflection point when viewed in cross-section, and sintering the laminate into an integral unit to form the ceramic stack.

Abstract: A piezoelectric resonator element of crystallographic point group 32, which can be operated as a thickness shear resonator contacting a carrier medium includes a singly rorated Y-cut (S1,S2) that is essentially rotated through an angle ?about the crystallographic x-axis, which differs from crystal cuts that are temperature-compensated in air or vacuum, wherein the cut has a negative temperatue coeffcient of the resonace frequency f(T) in a predetermined temperature range, preferably between 10° C. and 40° C., when there is no contact with the carrier medium, while the value of the linear temperature coeffcient a of resonance frequency in the same temperature range is less than 1 ppm/° C., preferably less than 0.5 ppm/° C. when the resonator is inb contact with the carrier medium. The resonator element (1) can additionally be provided with at least one layer sensitive to the parameter to be measured.

Abstract: A piezoelectric transducer comprises a piezoelectric component, an acoustic member attached to one of the surfaces of the piezoelectric component and a dampening material of low elastic modulus attached to one or both surfaces of the piezoelectric transducer. The piezoelectric component may comprise either an unimorph or a bimorph structure including a piezoceramic wafer made of lead zirconate titanate and a layer of dampening material sandwiched between the piezoelectric component and the acoustic member. The acoustic member comprises a surrounding wall portion and an end portion which form an acoustic chamber when the member is mounted on a surface of the piezoelectrie component. The end portion has an orifice to form a passageway from the chamber through the end portion to the outside of the member.

Abstract: A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.

Abstract: An ink-jet printing head comprises: a pressurizing chamber substrate having first and second sides opposing each other; a plurality of pressurizing chambers formed on the first side of the pressurizing chamber substrate; channels formed on the second side of the pressuring chamber substrate to be opposite to the pressuring chambers, respectively; oscillating plate films for pressurizing ink within the respective pressurizing chambers; and piezoelectric thin-film elements, each having upper and lower electrodes and a piezoelectric film sandwiched between the upper and lower electrodes, the piezoelectric thin-film being formed in the channel, wherein at least the upper electrode is formed to have a narrower width than that of the pressurizing chamber. And a method for producing the ink-jet head.

Abstract: A motion sensing system utilizing piezoelectric laminates with predetermined surface electrode patterns disposed thereon utilizes a frequency selector to pass motion waves of predetermined frequencies and an electrical circuit for processing the electrical signals for transmission to an activating device for appropriate activation. In particular, the frequency selector is a low frequency bandpass filter for free-fall acceleration wave frequencies. By directing appropriate action, the present invention increases the applicability of the device upon which it is mounted (e.g., for military or other hostile environment use), decreases the possibility of damage, and lengthens its useful life.

Abstract: A film bulk acoustic resonator (FBAR) includes an insulation layer on a substrate to prevent a signal from being transmitted to a substrate. The FBAR includes a portion of a membrane layer corresponding to an activation area to adjust a resonance frequency band and improve a transmission gain of the resonance frequency band, the portion of the membrane layer being partially etched to have a thickness less than the other portion of the membrane layer. A method of forming the FBAR includes forming an sacrificing layer made of polysilicon, forming an air gap using a dry etching process, and forming a via hole. The method prevents structural problems occurred in a conventional air gap forming process and provides locations and the number of the via holes to be controlled.

Abstract: A composite piezoelectric transducer of the present invention includes a plurality of arranged piezoelectric elements, and dielectric portions positioned between the plurality of piezoelectric elements. In the composite piezoelectric transducer, an area of a cross-section perpendicular to an ultrasonic emitting direction in at least one piezoelectric element of the plurality of piezoelectric elements varies along the ultrasonic emitting direction.