Abstract: The invention relates to a piezoelectric adjusting element, in particular a piezoelectric motor in the form of a monolithic plate-shaped or cylindrical piezoelectric oscillator comprised of a first and of a second kind of main surfaces and of groups of electrodes that are allocated to them, comprised of a housing, a driven element, at least one friction layer arranged on the housing or on the driven element, a driving element that is connected to an electric excitation source and that is in friction contact with the friction layer, and the piezoelectric oscillator is excited by way of the groups of electrodes [to form] standing longitudinal acoustic waves in the direction of an oscillator resonant length and in the direction of an oscillator resonant height of this piezoelectric oscillator, and the oscillator resonant length is equal to an integral multiple of the wave length of the standing longitudinal wave that vibrates in its direction, and the oscillator resonant height is equal to one half of

Abstract: A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the pair of thin plate sections. Movable sections, having mutually opposing end surfaces, are formed proximate the ends of the thin plate sections. A distance between the end surfaces is not less than a length of the movable sections.

Abstract: In a substrate bath that processes substrate wafers using megasonic energy, a tank that is provided with reflecting surfaces that direct the megasonic energy to those portions of the substrates that would otherwise be sonically shadowed by the cassette that supports the substrates. In one aspect, a pair of curved wall surfaces are formed within the tank, each extending from one side wall to the bottom wall in curvilinear fashion and oriented longitudinally, the paired curved wall surfaces being disposed in laterally spaced, enantiomorpic relationship. The curved surfaces are arranged so that a significant amount of the megasonic energy impinges at an angle less than the critical angle, so that the energy is reflected in a diverging field that intersects the substrates and strikes those portions of the substrates that are shadowed by the cassette structure. Thus the megasonic cleaning, (etching or processing of the substrate) process is improved significantly.

Abstract: A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the pair of thin plate sections. Movable sections, having mutually opposing end surfaces, are formed proximate the ends of the thin plate sections. A distance between the end surfaces is not less than a length of the movable sections.

Abstract: A method of fabricating a bulk acoustic wave (BAW) resonator and a BAW resonator so fabricated, the method including the steps of: providing a substrate; providing a first isolation structure; and providing a resonator section including a piezolayer; wherein the first isolation structure includes an acoustic mirror made from only electrically conductive layers of alternating high and low acoustic impedance. In some applications, the first isolation structure is situated between the resonator section and the substrate, while in other applications, the first isolation structure is situated above the resonator section (on the side of the resonator section facing away from the substrate), so that the resonator section lies between the first isolation structure and the substrate, and the resonator then further comprises a second isolation structure situated between the resonator section and the substrate.

Abstract: The invention relates to a unidirectional acoustic probe comprising a high-performance interconnection network, and a method of manufacturing such a probe.

Abstract: An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective cavities to produce a high Q-factor filter circuit.

Abstract: A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.

Abstract: A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. A piezoelectric/electrostrictive element is arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, the movable section and the fixation section. A central portion of the movable section is cut off to form mutually opposing end surfaces in the movable section.

Abstract: An acoustic biosensor is provided for deployment at an implantation site within a body, such as an abdominal aortic aneurysm. The biosensor includes a sensor element for measuring a physiological condition at the implantation site, and for generating an information signal representative of the physiological condition. The biosensor further includes a piezoelectric transducer element for converting an externally originated acoustic interrogation signal into energy for operating the sensor, and for modulating the interrogation signal, e.g., by employing a switching element to alternate the mechanical impedance of the transducer element, to transmit the information signal outside of the body.

Abstract: A digital angular rate and acceleration sensor is constructed with force-sensitive resonators positioned longitudinally on one or both sides of the neutral bending plane of a cantilevered structure. The cantilevered structure has an inertial proof mass at its free end with a periodic velocity applied sideways to the bending plane. Rotation about the longitudinal axis, which produces periodic Coriolis acceleration, as well as inertial acceleration applied perpendicular to the bending plane, generate tensile and compressive forces on the resonators thereby altering the resonant frequencies that are thus a measure of angular rate of rotation and acceleration.

Abstract: A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the pair of thin plate sections. Movable sections, having mutually opposing end surfaces, are formed proximate the ends of the thin plate sections. A distance between the end surfaces is not less than a length of the movable sections.

Abstract: A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

Abstract: A resonator with mechanical node reinforcement includes a substrate, an intermediate portion adjacent to the substrate, and a resonant portion adjacent to the intermediate portion. The intermediate portion may include multiple layers, such as an insulating layer and/or a conductive layer. The resonant portion of the resonator is adapted for an oscillation mode with a nodal point located within its periphery. Preferably, the resonant portion contacts the intermediate portion at points located at the periphery and at the nodal point. The resonant portion may include multiple layers and its primary layer may be a membrane or a plate. An alternative embodiment of the resonator excludes the intermediate layer allowing the resonant portion to contact the substrate instead of the intermediate layer.

Abstract: A piezoelectric resonator includes a laminated structure having a piezoelectric laminate, at least one pair of electrodes and a substrate. The piezoelectric laminate includes at least one first piezoelectric layer having a positive temperature coefficient of a resonant frequency and at least one second piezoelectric layer which has a negative temperature coefficient of a resonant frequency. The at least one pair of electrodes interpose at least one of the first and second piezoelectric layers. The substrate supports the laminated structure and holds a portion of the laminated structure such that a suspended portion of the laminated structure vibrates in response to application of a voltage across the pair of electrodes.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: An anti-vibration member is provided on an inner wall of a cylinder tube of a lift cylinder. The anti-vibration member is formed into a cylindrical form, and an outer circumferential surface thereof is formed along an inner circumferential surface of the cylinder tube. The anti-vibration member is formed by coating resin high in ultrasonic wave attenuating effect (such as polyphenylene sulfide (PPS) resin). It is possible to attenuate or absorb a vibration of a surface wave transmitted from an ultrasonic wave sensor and indirectly transmitted through the inner wall of the cylinder tube.

Abstract: An ultrasonic motor is described which uses radial vibrations of an electro-active material disc (7) amplified by one or more flextensional diaphragms (6) to drive a rotor (4) pressed in frictional contact with the diaphragm (6) by a force imposed by a spring (3) or magentic attraction. The vibrations are converted by elastic fins (5) into rotary motion of the rotor (4). The motor can be operated in any resonant mode that generates vibration at the surface perpendicular to the contact area. Versions of the motor with one or two rotors are disclosed with the two rotor version being used to produce an output in the same direction or opposite directions.

Abstract: A vibration type actuator includes a vibration element having at least a first elastic element, a second elastic element, an electro-mechanical energy conversion element, and a shaft, and a relative moving member which relatively moves upon a vibration of the vibration element. The shaft has a flange portion and a fixing portion joined to a fixing member and clamps the first and second elastic elements by the flange and the nut while the conversion element is clamped between the first and second elastic elements.

Abstract: A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism comprises a cavity portion formed on the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, whose forward end enters the cavity portion.

Abstract: An electronic component includes a piezoelectric element and at least a pair of lead terminals having cup-shaped holder portions attached to hold both ends of the piezoelectric element. The cup-shaped holder portions and the electrodes disposed at both end portions of the piezoelectric element are electrically and mechanically connected by a conductive joining material. The lead terminals are made of a conductive wire, and one end portion of the lead terminals is bent outwards at an angle of about 90 degrees and flat portions are defined by press extending the portions on the tip side from the bending points that extend substantially parallel to the lead portions, and the cup-shaped holder portions are formed by bending the flat portions inwards.

Abstract: A crystal oscillator with an improved shock resistance is disclosed. A pair of supporting protuberances protrude within an oscillator main body. A conductive adhesive is spread on the pair of the supporting protuberances, and a quartz blank is bonded to the supporting protuberances across the conductive adhesive. Further, an insulating resin layer is disposed between the quartz blank and a cover so as to elastically press down the conductive adhesive. Further, the length of the connecting parts between the supporting part and the bridge parts is more extended to a certain degree, so that any stress imposed on them can be dispersed.

Abstract: A piezoelectric resonator utilizes a thickness shear vibration mode, which allows for simplification of the manufacturing process, effectively suppresses ripples in the width mode, has superior frequency characteristics and is inexpensive. This piezoelectric resonator includes a pair of vibration electrodes provided on portions of first and second main surfaces, respectively, of a piezoelectric substrate, and a damping member arranged so as to cover a vibrating portion only on one main surface of the piezoelectric resonator and a pair of side surfaces connecting the first and second main surfaces.

Abstract: A vibrating rate gyro structure machined in a plate of material and comprising a fixed part, a resonator, and a mechanical system connecting the resonator to the fixed part. The mechanical system comprises a first mobile mass part connected to one end of the resonator, a second mobile mass part (4) connected to the resonator and situated in the vicinity of the other end of the resonator, two flexible arms situated on both sides of the resonator and each connecting the first mobile mass part to the second mobile mass part, and two other flexible arms situated on both sides of the resonator and connecting the second mobile mass part to the fixed part.

Abstract: A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections; and a piezoelectric/electrostrictive element arranged on each of the pair of thin plate sections; wherein movable sections have mutually opposing end surfaces; and a distance between the end surfaces is not less than a length of the movable section.

Abstract: A piezoelectric/electrostrictive device includes a driving portion, a movable portion and a fixing portion. The driving portion includes a pair of mutually opposing thin plate portions and a piezoelectric/electrostrictive (P/E) element. A P/E operating portion of the P/E element is arranged on at least a part of an outer surface of at least one of the thin plate portions, such that one end thereof exists on the fixing portion or the movable portion and the other end thereof is arranged on the thin plate portion. At least one end of a P/E layer of the P/E element exists on the fixing portion or the movable portion, and the other end is arranged on the thin plate portion.

Abstract: A tubular resonant mechanical horn having a contoured inner surface such that, under vibration, an output radial displacement is obtained on the outer surface of horn that is substantially uniform over its entire surface, for producing effects useful in continuous processes. The horn does not contain a node of motional displacement.

Abstract: An electromechanical functional module and associated process for production thereof, which includes at least one transducer, at least one upper fiber cover layer, which is nonconducting and is positioned over the at least one transducer having a first electrode and a second electrode, at least one lower fiber cover layer, which is nonconducting and is positioned below the at least one transducer, at least one fiber interlayer, which is nonconducting with at least one cut-out for accommodating the at least one transducer, at least one upper electric contract strip that is integrally connected to the at least one upper fiber cover layer and in contact with the first electrode of the at least one transducer, and at least one lower electric contract strip that is integrally connected to the at least one lower fiber cover layer and in contact with the second electrode of the at least one transducer, wherein the at least one upper fiber cover layer, the at least one lower fiber cover layer and the at least one tra

Abstract: A plurality of acoustic resonators are manufactured in a batch process by forming cavities in a substrate and filling the cavities with a sacrificial layer. An FBAR membrane comprising a bottom electrode, a piezoelectric layer, and a top electrode is formed over each cavity and the sacrificial layer. The substrate is then thinned and the substrate is separated into a plurality of dice using a scribe and break process. The sacrificial layer is then removed and the FBAR filter is mounted in a package with thermal vias being thermal communication with underside of the FBAR filter. The production method improves thermal properties by increasing the efficiency of heat dissipation from the FBAR filter. In addition, electromagnetic interference is decreased by reducing the distance between a primary current flowing over the surface of the FBAR filter and an image current flowing in a ground plane beneath the FBAR filter.

Abstract: First resonant electrodes are provided on one main surface of a piezoelectric plate, a second resonant electrode is provided on the other main surface of the piezoelectric plate, such that the first and second resonant electrodes face each other. An energy trap-type piezoelectric vibrating section is thus provided by the first and second resonant electrodes, and a capacitor section is provided in a position separated from the vibrating section. The capacitor section has a first capacitor electrode provided on the upper surface of the piezoelectric plate, and has a second capacitor electrode provided on the bottom surface of the piezoelectric plate. Further, an outer edge portion of the first capacitor electrode is spaced from an outside edge of the piezoelectric plate, thus providing a margin area except at the portions led out to the outside edge of the piezoelectric plate.

Abstract: A low-cost piezoelectric component which is efficiently manufactured and which provides excellent electrical characteristics, includes a piezoelectric element, a damping member, a supporting substrate for mounting the piezoelectric element, and a cover member. On a surface of the piezoelectric element, the damping member has a predetermined hardness and a vibrating electrode. In the case of a piezoelectric trap filter, a damping member is provided which has a Shore hardness of about 35 to about 80. In the case of a piezoelectric discriminator, the damping member has a Shore hardness of about 80 to about 100.

Abstract: An energy trapping type piezoelectric filter comprising a first piezoelectric substrate (1A) and a second piezoelectric substrate (1B) having an identical configuration and arranged in layers with an adhesive sheet or spacer (20A) interposed therebetween and insulating top and base plates (30A, 30B) arranged on and under the respective piezoelectric substrates with adhesive sheets or spacers (20B, 20C) also interposed therebetween, wherein a shielding conductive member (40) is provided on an upper surface of the insulating base plate (30B) for preventing an electromagnetic coupling between an input electrode (31) and output electrodes (32A, 32B), the shielding conductive member (40) being connected to grounding electrodes (33A, 33B).

Abstract: Providing a mechanism which can eliminate an influence of residual strain in a piezoelectric thin film, having excellent piezoelectric strain characteristics.

Abstract: In a transducer for emitting and picking up mechanical vibrations, a center body (4) is suspended in a piezo-electric and elastic suspension structure (3) in a surrounding framework (2). The suspension structure (3) is sectorized and has separate signal wires for each respective sector (5) so that vibrations can be emitted and received at the same time with different sectors (5). Besides, the center body (4) can be equipped with piezo-elements of its own.

Abstract: A ZrO2 porcelain comprising a cylindrical member and a flexible member made of a ZrO2 porcelain which has a relative density not lower than 95% and contains a cubic crystal at a ratio not lower than 75%, thereby exhibiting high erosion resistance and high strength.

Abstract: A piezoelectric/electrostrictive device including a driving portion, a movable portion, a fixing portion for holding the driving portion and the movable portion, the movable portion being coupled with the fixing portion via the driving portion, and a hole formed by inner walls of the driving portion, movable portion, and fixing portion. The driving portion includes a pair of mutually opposing thin plate portions and a piezoelectric/electrostrictive (P/E) element. A P/E operating portion of the P/E element is arranged on at least a part of an outer surface of at least one of the thin plate portions, such that one end thereof exists on the fixing portion or the movable portion and the other end thereof is arranged on the thin plate portion. At least one end of a P/E layer of the P/E element exists on the fixing portion or the movable portion, and the other end is arranged on the thin plate portion.

Abstract: Tuning fork and method in which a pair of elongated tines having front and rear surfaces are disposed symmetrically about an axis, and balancing masses on the front surface of one tine and on the rear surface of the other tine are trimmed to reduce quadrature error and also to maintain mass balance between the tines.

Abstract: A piezoelectric/electrostrictive device has a base 10a including a pair of right and left movable parts 11, 12 and a fixing part 13 on one end thereof, and a piezoelectric/electrostrictive element 10b on the side surfaces of movable parts 11, 12 of base 10a. The adhesive force of bonding a component H sandwiched and held on the other end of movable parts 11, 12 is enhanced. Base 10a constituting the piezoelectric/electrostrictive device has a pair of long mounting parts 15, 16 for mounting component H on the other end of movable parts 11, 12. Mounting parts 15, 16 extend for a predetermined length while holding slit-shaped gaps 15a, 16a of a predetermined width along the inside surfaces of movable parts 11, 12 by being turned around at the other end of movable parts 11, 12. This increases the bonding area of mounting parts 15, 16 to component H, thereby greatly improving the adhesive force of bonding the component.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A method of fabricating a piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion. The driving portion includes a pair of thin plate portions facing each other, and a film-like piezoelectric/electrostrictive element formed on at least a part of the outer surface of at least one of the thin plate portions. A ceramic green laminate including at least one ceramic green sheet constituting one of the thin plates and at least one ceramic green sheet having at least one hole formed thereon is formed. The ceramic green laminate is sintered to produce a ceramic laminate. A piezoelectric/electrostrictive element is formed by a film formation method on the outer surface of the thin plate portion of the ceramic laminate. The ceramic laminate is then cut with the piezoelectric/electrostrictive element formed thereon.

Abstract: A curved piezoelectric device is attached to a plate to vibrate the plate. Mass-loading is applied to at least one free end of the piezoelectric device to increase output.

Abstract: A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A piezoelectric resonator arrangement comprises a mount having at least two mounting elements on a base structure and at least one laminar piezoelectric resonator that is clamped between the mounting elements, of which at least one impinges on the resonator with a force. In order to obtain the oscillation and resonance characteristics in a manner as free as possible of influence from the mounting or, respectively, contacting, and over a large temperature range in order also to minimize the temperature-caused hysteresis of the resonance characteristics, the mounting elements abut immediately and directly on the resonator and fix this resonator in the arrangement without the use of adhesive, and the points of contact of the mounting elements with the resonator are located essentially in one plane that lies essentially parallel to the plane of the resonator, and, in addition, the mounting and contacting forces exerted by the mounting elements lie essentially parallel to the plane of the resonator.

Abstract: In a small rotary actuator having a rotor and a plurality of oscillators, each having a piezoelectric element that is excited by application of energy thereto so that the piezoelectric element oscillates at a resonance frequency thereof, the resonance frequency of the respective oscillators varies to some degree. This variation reduces the efficiency of rotation of the rotor. In order to reduce this variation, one or more of the piezoelectric elements of the oscillators is etched so that its resonance frequency is increased to match the resonance frequency of the other oscillators.

Abstract: A package structure for a piezoelectric resonator includes a base which has a shape of flat box and made of an insulating material, and a thin lid bonded to the upper side of the base. A tuning fork type quartz crystal resonator piece is mounted at its one end, that is its base end, on electrode pads provided on the mounting surface in a cantilever manner using conductive adhesive so that it is parallel to the mounting surface, and hermetically sealed in a package with the lid engaged therewith. Either one or both of the mounting surface of the base and the inner surface of the lid has a recess formed at the location adjacent to the free end of a tuning fork type quartz crystal resonator piece so that the free end does not touch the inside surfaces of the packages when the quartz crystal resonator piece is largely dislocated on external impact.

Abstract: A vibrating gyroscope includes two planar vibrating plates arranged to oppose each other. The two vibrating plates vibrate under buckling vibration mode and a second-order bending vibration mode which is degenerated with or close to the buckling vibration mode. The vibrating gyroscope detects Coriolis force by detecting displacements in amplitude balance of the second-order bending vibration modes generated when an angular rotation velocity around an axis parallel to surfaces of the vibrating plates is applied.

Abstract: A vibrating gyroscope includes a vibrator having a longitudinal direction and being capable of vibrating in a bending mode in a bending direction perpendicular to the longitudinal direction. The vibrator has first and second nodes which elongate in a direction perpendicular to both the bending direction and the longitudinal direction and first, second, third and fourth supporting members connected to the vibrator such that the first node is interposed between the first and second supporting members and the second node is interposed between the third and fourth supporting members. The first node is located at the vicinity of either the first supporting member or the second supporting member, and the second node is located at the vicinity of either the third supporting member or the fourth supporting member.

Abstract: A plurality of piezomaterial bodies, such as panels or slices, are merged together to form a larger piezomaterial body. For example, a 0.75×22 cm polycrystalline piezomaterial body is formed, where the distances are along lateral or footprint dimensions. The thickness of the piezomaterial body is substantially less than either of the distances along first and second lateral dimensions that define the footprint. Preferably, each piezomaterial body has a panel shape, and a plurality of panels are merged to form a large multi-panel.

Abstract: The invention relates to resonator structures of radio communication apparatus, especially bulk acoustic wave filter structures. According to the invention, a bulk acoustic filter structure is constructed with a lattice configuration, in which two of the filters have a different area than other two for creating very steep passband edges in the frequency response of the filter. Preferably, the filter structure further comprises a second lattice structure for increasing the stopband rejection ratio of the filter structure, and for allowing the use of a simple mechanical structure. The cascaded configuration allows the construction of the filter structure in such a way, that the electrodes of the input and output port are at the same layer, thereby removing the need to make vias in the piezoelectric layer, which results in considerable simplification of the manufacturing process.