Abstract: A piezoelectric resonator adapted to generate a third harmonic wave of a thickness extensional vibration mode in which the fundamental wave is lead out of the vibrating portion and suppressed effectively. The piezoelectric resonator includes a vibrating portion with vibration electrodes opposing each other in the middle of a piezoelectric plate, lead-out electrodes electrically connected to the vibration electrodes, and a floating electrode disposed along the short side edge on at least one major surface of the piezoelectric plate or in the vicinity of the edge.

Abstract: A parallel plate structure (1) is provided with a pair of bimorph piezoelectric elements (2) and prismatic insulation spacers (3) inserted between the piezoelectric elements (2) at the upper and lower ends thereof for cementing the piezoelectric elements (2) together via the spacers (3). Each piezoelectric element (2) comprises a planar base material (4) of titanium, PZT thin films (5) formed on both sides of the base material (4) by the hydrothermal method, and electrode films (6) formed on the PZT thin films (5). The base material (4) is 20 &mgr;m thick and the PZT thin films (5) are several pm thick, while the aluminum electrode films (6) are several um thick.

Abstract: A wafer with a reversed domain is prepared for two piezoelectric single crystal plates and of about the same thickness by using direct bonding without any adhesive. Driving electrodes are formed on two principal planes of the wafer with a reversed domain to provide a piezoelectric resonator. A piezoelectric resonator having the structure with a reversed polarization and using odd-order vibration modes vibrating with a fundamental wave has a wavelength of a thickness thereof and suppresses scattering of the thickness of the domains with a reversed polarization. In the direct bonding, the axes of the spontaneous polarization of the two piezoelectric single crystal plates are reverse to each other and crystalline axes other than the axes of polarization are shifted intentionally by an angle other than zero. Thus, spurious modes are suppressed in a simple way.

Abstract: A protection plate 36a and a protection plate 36b, which are each of a substantially rectangular shape and which extend upwards from respective substantially central portions of opposite lengthwise ends of an attachment platform 34, are formed in the attachment platform 34 by bending part of the attachment platform 34. Also, stoppers 46a and 46b, which have notches 48for protecting two surfaces on either side of the ridge line of the oscillator 12, are attached to the attachment platform 34. Further the oscillator 12, the attachment platform 34, and the stoppers 46a and 46b etc. are housed in a box-shaped case 50. Accordingly, the vicinities of both lengthwise ends of the oscillator 12 are surrounded and protected by the stoppers 46a and 46b. The protection plates 36a and 36b, and the inner side surface of the case 50 as the protection members in the predetermined space d. By means of this structure, an oscillation gyroscope is provided in which the shock resistance is further improved.

Abstract: A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. Utilizing the fact that the magnitude of strain is different depending on positions on the resonator beam, the installation position of the piezoresistor is adjusted on each of the resonator beams so as to set the level of an output signal from each frequency band at a desired level; thus, it becomes possible to control the gain of a specific frequency band.

Abstract: A method of manufacturing a resonance element includes the steps of preparing a multilayered body having a plurality of piezoelectric layers and a plurality of inner electrodes laminated to each other, forming an insulating film on one surface of the multilayered body at exposed portions of the inner electrodes, the insulating film having a plurality of openings constituting substantially parallel rows which are substantially parallel to the laminating direction of the multilayered body, forming an outer electrode on substantially the entire surface on which the insulating film is formed, forming a plurality of grooves on the surface on which the outer electrode is formed and cutting the multilayered body substantially parallel to the grooves, wherein a first group of the openings in a first of the rows are disposed on every alternate exposed portion of the internal electrodes, and a second group of remaining openings in a second row adjacent to the first row are disposed on each of the remaining alternate ex

Abstract: The drive section made by bonding the piezoelectric material on part of the elastic shim and the displacement amplifying section which amplifies the amplitude of vibration vibrated in the drive section are provided in the same plane. The device is driven at drive frequencies in a region between the resonance frequency of the drive section and the resonance frequency of the displacement amplifying section.

Abstract: An assembly for utilization in a loudspeaker system is disclosed. The assembly comprises a substantially flat piezoelectric element capable of being excited by applied electric potential, a diaphragm that is driven by the excited piezoelectric element, said diaphragm having a surface area that is at least 20 times the surface area of the piezoelectric element and at least one motion coupler which is attached to at least a portion of the outer perimeter of the piezoelectric element and on its underside to the diaphragm.

Abstract: A bulk acoustic wave device that provides a high spectral purity, high Q, resonator in the radio frequency and microwave frequency ranges. Such resonators may be coupled together to form filters or other frequency selective devices. The bulk acoustical wave filter is constructed from a piezoelectric (PZ) material having a first surface and a second surface and first and second electrodes. The first electrode includes an electrically conducting layer on the first surface, and the second electrode includes an electrically conducting layer on the second surface. The first electrode overlies at least a portion of the second electrode, the portion of the first electrode that overlies the second electrode has a periphery which is a non-rectangular, irregular polygon. In the preferred embodiment of the present invention, the periphery is a three-sided, four-sided, or n-sided irregular polygon in which no two sides are parallel to one another.

Abstract: The invention relates to resonator structures of radio communication apparatus. According to the invention, a micromechanical switch and a resonator are realized in a single combined structure. Combination of switch and resonator structures allows the manufacture of very compact filter and resonator structures needed for multi-system mobile communication means.

Abstract: A thickness-extensional piezoelectric resonator using a harmonic of a thickness-extensional vibration mode has a compact size, large electric capacity, is not affected by the stray capacitance of a circuit board, and has small variations in resonance characteristics. The thickness-extensional piezoelectric resonator includes a piezoelectric body, a first excitation electrode, a second excitation electrode, a terminal electrode and a connection electrode disposed on outer surfaces of the piezoelectric body, as well as an internal electrode inside of the piezoelectric body. Portions where the first excitation electrode, the second excitation electrode and the internal electrode overlap define a resonating portion. In the length direction of the piezoelectric body, a vibration-attenuating portion is defined at opposite sides of the resonating portion, whereas in the width direction, the vibration-attenuating portion is not provided at each side thereof. In addition, a relationship of Go/D≧2.

Abstract: An ultrasonic wave applying apparatus which is safe and convenient for use. The apparatus includes an hand-held applicator having a vibration element which is, in use, contact with a skin of a user to apply ultrasonic waves to the skin, a power source providing a DC voltage, an oscillator circuit which is energized by the DC voltage from the power source to generate an oscillating output for driving the vibration element, and a load detecting circuit which monitors whether the vibration element is loaded such as by contact with the skin and provides a load detection signal when the vibration element is so loaded. In addition, a motion detecting circuit is provided to monitor whether the vibration element is moving and give a motion detection signal when the vibration element is so moving.

Abstract: Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.

Abstract: An energy trapping type piezoelectric filter having a minimal surface area comprises a first and second identical piezoelectric substrates 10a and 10b being laid one on the other to form a multilayer structure, each having a first surface provided with a pair of oscillatory electrodes 11 and 12 arranged vis-a-vis relative to each other and a capacitor electrode 14 which is connected to one of the oscillatory electrodes 12, the other oscillatory electrode 11 being electrically connected to an input/output connection terminal 13 also arranged on the first surface, and a second surface provided with a common electrode 16 arranged oppositely relative to said pair of oscillatory electrodes 11 and 12 and a capacitor electrode 17 arranged opposite to said capacitor electrode 14, the capacitor electrode 17 and the common electrode 16 being electrically connected to each other, the pair of oscillatory electrodes 11 and 12 and the common electrode 16 forming an oscillating section V, the capacitor electrodes 14 and 17

Abstract: A micromechanical signal processing system includes an oscillating member designed to oscillate at a first frequency, a micromechanical pump oscillator being driven so as to oscillate at a second frequency, with the second frequency being greater than the first frequency, and a non-linear coupling element to couple the micromechanical pump oscillator to the oscillating member. These elements are arranged such that energy from the micromechanical pump oscillator is transferred via said non-linear coupling element into the oscillating member to compensate for its losses if the oscillating member oscillates at the first frequency.

Abstract: A semiconductor bulk acoustic resonator (SBAR) with improved passband insertion loss and phase performance characteristics is suitable for use in a wide variety of narrowband filtering applications. The SBAR is configured to suppress lateral propagating acoustical wave modes. The lateral acoustical wave modes are controlled by varying the lateral dimension of the resonator electrodes and or utilizing a viscous acoustic damping material, such as a viscoelastic material, such as polyimide, applied along at least a portion of the perimeter of the electrodes to attenuate reflections of the lateral acoustic modes at the electrode edges back into the electrode region.

Abstract: An oscillatory gyroscope having an improved detecting sensitivity. The oscillatory gyroscope includes an elastic metal body in the form of a rectangular column having first to fourth surfaces. The elastic metal body includes a distal portion having a distal through hole extending from the second surface to the fourth surface and a proximal portion having a second through hole extending from the first surface to the third surface. Two first ferroelectric substance films are provided on the first and third surfaces in the distal portion. Two second ferroelectric substance films are provided over the second and fourth surfaces in the proximal portion. First and second electrodes are provided on each of the first ferroelectric substance films, and third and fourth electrodes are provided on the respective second ferroelectric substance films. Voltages of reverse polarities are applied to the first and second electrodes.

Abstract: A method of manufacturing a small, light, highly accurate and inexpensive thin film sensor element is disclosed. The thin film sensor element comprises a sensor holding substrate having an opening part and a multilayer film structure adhered thereon. The multilayer film structure comprises a first electrode film, a second electrode film, and a piezoelectric dielectric oxide film present between the first and second electrode films. The method of manufacturing the thin film sensor element comprises the steps of: forming the multilayer film structure by forming the first electrode film having a (100) plane orientation on a surface of an alkali halide substrate, forming the piezoelectric dielectric oxide thereon, and forming the second electrode film on the piezoelectric dielectric oxide; adhering the multilayer film structure on the surface of the sensor holding substrate having the opening part; and dissolving and removing the alkali halide substrate with water.

Abstract: Piezoelectric resonators utilizing a differentially offset reflector. One or more piezoelectric resonators are supported upon a substrate by one or more intervening layers of material, which intervening layers of material act as a reflector. The reflector isolates the resonators from the substrate. A portion of one or more of the intervening layers of material includes a differential layer of material, which differential layer shifts the resonant frequencies of the resonators that overlie the differential layer as compared with the resonant frequencies of those resonators that do not overlie the differential layer of material.

Abstract: An ultrasonic transducer having a narrow principal lobe opening angle simultaneously with low secondary lobe amplitudes is provided. The ultrasonic transducer invention has a disk-shaped quarter-wave transformer element whose peripheral surface is configured as a stepped profile.

Abstract: The invention concerns a resonator (1) with at least one crystal (2, 2'), at least two electrodes (3, 3', 4, 4') exciting the crystal (2, 2'), and a sandwich housing (5, 5') with a substantially plate-shaped bottom (6), at least one frame-like central portion (7, 7') which surrounds the crystal (2, 2') and supports it in a pendular fashion, and a substantially plate-shaped lid (8), wherein these housing sections (6, 7, 7', 8) are interconnected by means of sealing surfaces (13, 14, 15, 16), with the inclusion of conducting layers (9 and 9', 10 and 10'; 11, 12) and each electrode (3, 4; 3', 4') is connected to conductive layers (9 and 9', 10 and 10';11, 12). The resonator in accordance with the invention is configured in such a fashion that it can be further processed using SMD technology.

Abstract: A vibration wave detector in which: a plurality of resonator beams, each having a different length and being allowed to resonate at a specific frequency, are provided; a piezoresistor is installed in each resonator beam; and the piezoresistors are parallel-connected so that vibration is converted to an electric signal by the piezoresistors so as to output the sum of vibration waveforms at the respective resonator beams. It is possible to control a gain of a specific frequency band by changing a voltage to be applied to the parallel circuit or changing the resistance value of each piezoresistor.

Abstract: A method using piezoelectric effect is provided for measuring an angle between a reference plane and a plane to be measured. The method can be used to measure the inclination of a plane or for leveling purpose. The method employs an apparatus wherein the main characteristics of the apparatus are simple in structure with no limitation in the measurement range and fewer limitations to the environment. The method may also have the following advantages compact, quick and accurate measurement, easy for multiaxial measurement.

Abstract: A piezoelectric device is used in an dual axial gyroscope system and includes a piezoelectric exciter for generating a linear velocity on a first axis; a first piezoelectric detector element, placed on a surface of the piezoelectric exciter in a direction orthogonal to the first axis, for detecting a first Coriolis force provided in a direction orthogonal to the first detector; and as second piezoelectric detector element, placed on the surface of the piezoelectric exciter in a direction orthogonal to the first axis and the first detector, for detecting a second Coriolis force provided in a direction orthogonal to the second detector element.

Abstract: The application of a piezoceramic resonator (PR), connected in parallel to a discharge lamp and in series to cathode filaments of a lamp, provides reliable means of preheating of cathode filaments facilitating a soft start of a fluorescent lamp. The piezoceramic resonator is a polarized piezoceramic element formed in a form of rectangular plate, disk, cylinder, etc. The linear size and shape of the PR determine the type of oscillation, electromechanical resonant frequency and frequency characteristics. The PRs with radial, contour or longitudinal oscillations are best suited for application to a piezoelectronic ballast. Piezoceramic resonators and filters as frequency-selective elements in measuring and radio communication instruments are widely used in weak alternating electrical fields, where the intensity of field does not exceed an order of volts per mm.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: The present invention provides methods and systems for controlling transductive structures to achieve a desired performance objective. According to one aspect, the present invention provides a controller which simulates a synthetic admittance or impedance when coupled to a bicoupled device and effectively cancels the reactance of the bicoupled device. Cancelling the reactance of the bicoupled device allows energy to be reflected back into an energy storage portion of the circuit resulting in an energy efficient damping and/or control system.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A sensor for detection of a trace fluid component in a fluid environment, comprising: a piezoelectric crystal having a fundamental resonant frequency in response to an applied oscillating electric field; a coating on the piezoelectric crystal of a sensor material which is reactive with the trace fluid component to yield a solid interaction product of changed mass in relation to initial mass of the sensor material interacting with the trace fluid component to yield the solid interaction product; means for applying an oscillating electric field to the piezoelectric crystal which generates an output resonant frequency therefrom; means for (i) sampling the output resonant frequency of the piezoelectric crystal while the oscillating electric field is applied thereto, (ii) determining the change in resonant frequency from the fundamental resonant frequency that occurs on formation of the solid interaction product when the sensor material interacts with the trace fluid component in the fluid environment, and (iii) g

Abstract: A piezo-resonator included in a filter and/or an AM signal receiving circuit eliminates unwanted signals produced as a result of the piezo-resonator experiencing a mechanical impact. The piezo-resonator includes a piezoelectric substrate and first and second electrodes provided on opposite surfaces of the substrate. The first electrode is divided into three portions along its width by grooves extending along the longitudinal substrate. The grooves are formed so that the resulting divided portions are substantially symmetrical to each other with respect to the central axis extending along the longitudinal substrate. The peripheral portions of the divided electrode are used as one input/output terminal, while the central portion is used as the other input/output terminal. The piezo-resonator can be provided in at least the last stage of a plurality of resonators for use in a filter.

Abstract: A knock sensor employs a piezoelectric element and includes a ring-shaped weight which has a chamfered surface portion formed at an inner peripheral edge of the weight. The knock sensor basically comprises a housing which includes a disc-shaped flange portion and a cylinder portion covered with an insulating tube. A lower lead plate, the piezoelectric element, an upper lead plate, an insulating sheet, a weight, a disc spring, and a nut are stacked on the flange portion and disposed around the cylinder portion in the order of mention. The nut is tightly screwed to the external thread portion of the cylinder portion to fixedly sandwich the stacked parts with the flange portion of the housing.

Abstract: A piezoelectric electro-acoustic transducer has a substantially decreased resonant frequency without having to modify the size of a piezoelectric diaphragm or the shape of casing members used therein. The piezoelectric electro-acoustic transducer has a piezoelectric diaphragm including a metal plate and a piezoelectric ceramic disc disposed on one surface of the metal plate, wherein the piezoelectric diaphragm is to be supported at its periphery. A plurality of projections are specifically provided for stress transmission suppression at the periphery of the piezoelectric diaphragm in order to suppress or eliminate occurrence of circumferential transmission of a stress at the periphery during activation of the transducer.

Abstract: In a multiple-stage-connected multiple-mode piezoelectric filter unit having a single container 1 in which there are connected, in cascade, two multiple-mode piezoelectric filter elements comprising at least one piezoelectric substrate and two electrode groups each comprising a pair of input/output electrodes and a grounding electrode, the electrode pairs being formed on one side of the piezoelectric substrate with a predetermined gap provided and the grounding electrodes being formed on the other side of the piezoelectric substrate at positions respectively opposite to the electrode pairs, it is an object of the present invention to enhance the ability of preventing the two filter elements from being coupled with each other, thus facilitating the final adjustment thereof. Formed in a single container 1 are two piezoelectric substrates 2, 3 on each of which formed are a pair of input/output electrodes and a grounding electrode.

Abstract: A multi-functional chip-type piezoelectric filter of a simple configuration comprises a multilayer structure which includes a plurality of piezoelectric substrates provided with oscillating sections having respective frequency response characteristics that are different from each other, a plurality of conductive terminals formed on the outer surface of the multilayer structure and connected to the respective oscillating sections of the piezoelectric substrates so that the oscillating sections may be selectively used.

Abstract: A method and system for detecting material bound on a surface of a piezoelectric resonator introduces a signal of a constant frequency through the sensing resonator and detects a change in the insertion phase shift of the resonator as a result of the binding of the material being detected on the surface of the resonator. Environmental effects on the measurement are effectively canceled by the use of a reference resonator driven by the same input signal. A multiple-port sensing device is provided which includes thin-film sensing and reference resonators monolithically formed on a substrate.

Abstract: A vibration driven motor constituted by an elastic member and an electro-mechanical converting element connected to the elastic member is characterized in that the driving direction is changed by changing the frequency of a vibration produced by the electro-mechanical converting element. In this case, the driving direction preferably includes two orthogonal directions.

Abstract: A piezoelectric resonator has a substantially rectangular-parallelpiped-shaped base member. The base member includes laminated piezoelectric layers which are polarized in the longitudinal direction of the base member such that the directions of polarization differ at adjacent piezoelectric layers. Internal electrodes are disposed between the piezoelectric layers. The internal electrodes each preferably comprise a plurality stripes dispose on main surfaces of the piezoelectric layers. On opposing side surfaces of the base member, the internal electrodes are alternately covered by at least two insulating films. The at least two insulating films cover different internal electrodes. External electrodes are disposed on the opposing side surfaces of the base member and are connected to internal electrodes.

Abstract: A piezoelectric resonator has a substantially rectangular-parallelpiped-shaped base member. The base member includes a plurality of laminated piezoelectric layers. The piezoelectric layers are polarized in the longitudinal direction of the base member such that the direction of polarization differs at adjacent piezoelectric layers. At opposite major surfaces of the plurality of piezoelectric layers, internal electrodes are disposed. The internal electrodes have surface areas with different sizes and therefore, areas of pairs of opposing electrodes have different sizes. The internal electrodes are alternately covered by at least two insulating films provided on opposing side surfaces of the base member. The at least two insulating films cover different internal electrodes. External electrodes are disposed on the same or the opposing side surfaces of the base member and the external electrodes are connected to the internal electrodes.

Abstract: A vibratory gyroscope including an elongated vibrator having a central (neutral) axis (Y-axis), a drive unit for deforming the first direction such that the vibrator vibrates in a first (X) direction, an added mass attached to the vibrator at a position offset from the central axis in a second (Z) direction, and a detector formed on the vibrator. Rotation of the vibratory gyroscope about the second (Z) direction during vibration in the second direction causes Coriolis force to acting on the added mass in a direction parallel to the central axis. Because the added mass is offset from the central axis, a resulting vibration in the second (Z) direction is produced, which is detected by the detector. With this arrangement, the central axis of the vibrator is placed in parallel with the surface of rotation of the rotating system. Thus, rotations about two or three axes in each direction can be detected in such a manner that noise generation is prevented.

Abstract: A piezoelectric resonator has a base member formed by laminating a plurality of piezoelectric layers and electrodes. The base member is polarized in different directions at both sides of each electrode. Electrodes are alternately covered by a first insulating film and a second insulating film, respectively, at both sides of a groove formed in the base member. The first insulating film covers electrodes which are not covered by the second insulating film, and vice versa. External electrodes are formed at both sides of the groove on the base member and the internal electrodes are connected to the external electrodes. A support member made from an electrically conductive material is provided at the approximate centers of the external electrodes.

Abstract: A viscosity measuring device is equipped with a piezo-electric vibrator, an oscillator and a loss factor monitoring means. The elastic properties of the piezo-electric vibrator and the viscous resistance of the fluid are controlled so that the tangent of loss factor of the piezo-electric vibrator may change largely enough to measure the viscosity. The characteristics measuring device is equipped with a first ceramic plate, a piezo-electric element sandwiched between a pair of electrodes attached to one surface of this first ceramic plate, a second ceramic plate having a hollow portion therein sintered integrally with the first ceramic plate, and a lid disposed so as to sandwich the second ceramic plate between the lid and the first ceramic plate and so as to face the other surface of the first ceramic plate. The amount of a glass component on the other surface of the first ceramic plate is regulated to be smaller than that of the glass component on the one surface of the first ceramic plate.

Abstract: A vibrating gyroscope having a supporting structure of a vibrator including, for example, a substantially regular triangular prism-shaped vibrating body. The vibrating body is formed with materials generally generating a mechanical vibration such as a constant-elastic materials. On three side faces of the vibrating body, three piezoelectric elements are formed respectively. On a ridge-line portion of the vicinity of two nodal points of the vibrating body, for example, a substantially rectangular frame-shaped supporting member is secured. The supporting member is formed into a body by means of etching or press molding. In this case, long sides of the supporting member are formed so as to extend in an axial direction of the vibrating body. Short sides of the supporting member are bonded to the vibrating body by securing means such as welding, adhesives or soldering.

Abstract: An actuator which includes an electromechanical converting element having a first connection portion and a second connection portion, an inertia member connected to the first connection portion of the electromechanical converting element, and a moving member connected to the second connection portion of the electromechanical converting element. A drive signal control unit produces a drive signal having an asymmetric voltage waveform. The asymmetric voltage waveform has a voltage level increasing portion in which the voltage level of the asymmetric voltage waveform is increasing. The drive signal control unit controls the voltage level of the asymmetric voltage waveform during the voltage level increasing portion of the asymmetric voltage waveform, and applies the drive signal to the electromechanical converting element to generate an inertia force in the inertia member and cause the moving member to move.

Abstract: A stacked thin film device structure grown on a substrate, the resonator structure comprising a thin film device comprising at least one piezoelectric crystal layer sandwiched between metallic electrodes, and constructed to have an acoustic response in a given frequency range, and an acoustical stack disposed between and joining the thin film device and the substrate and comprising multiple layers of material, each layer having a characteristic thickness and impedance and being composed of a non-lossless material, the characteristic thicknesses and impedances of the layers being adjusted to determine the input impedance presented to the thin film device, and thereby determining the acoustical coupling between the thin film device and the substrate.

Abstract: An acoustic filter array of microelectromechanical beams each having a characteristic resonance frequency response to mechanical and/or acoustical vibration. The array divides incoming acoustic signals into a plurality of discrete spectral components, each of which may be separately detected and converted into corresponding electrical signals. The acoustic filter may be integrated onto a single crystal silicon substrate with electrical circuity for performing acoustic signal processing functions required for applications such as speech processing and simulating the physiological function of the ear.

Abstract: A vibration gyroscope 10 includes a vibrator 12. The vibrator 12 has a vibration member 14 formed in a regular triangular prism shape and piezoelectric elements 16a, 16b and 16c. Two of the piezoelectric elements 16a and 16b are polarized in the direction from the outside to the vibration member 14, and the other piezoelectric element 16c is polarized in the direction from the vibration member 14 to the outside. An oscillation circuit 28 sends signals to the piezoelectric elements 16a to 16c and a signal output from the vibration member 14 is fed back. Two of the piezoelectric elements 16a and 16b are connected to a differential circuit 30. The differential circuit 30 is connected to a synchronous detection circuit 32 and then connected to a smoothing circuit 34 and a DC amplifier 36 in series.

Abstract: A vibration gyroscope includes a cross-shaped vibration member having two axes perpendicular to each other, an excitation structure for generating a bending vibration such that vibrations along the two axes of the vibration member have opposite phases, and a detecting structure for detecting angular velocities around the two axes of the vibration member during excitation of the bending vibration on the basis of bending displacements.

Abstract: The present invention is a piezoelectric actuator for stabilizing the driving of a small-sized chopper, thereby enhancing reliability of a pyroelectric type infrared ray sensor, wherein actuator is a unimorph type actuator having a piezoelectric element adhered to a shim. The shim and a displacement magnifying part are bound in a U-form. The resonance frequencies due to the vibrations of the unimorph type actuator and the displacement magifying part are brought close to each other wherein the chopper is driven at an intermediate frequency. As a result, a stable displacement magnifying effect is obtained at the front end of the displacement magnifying part.

Abstract: A thickness shear vibration type double mode filter includes two or more vibrating elements disposed in parallel on a piezoelectric substrate and a coupling capacitor formed on the piezoelectric substrate at a position intermediate two of the vibrating elements. The coupling capacity includes a capacitor electrode formed on one main surface of the piezoelectric substrate and an opposing ground electrode formed on a second main surface of the substrate. Input/output electrodes of the vibrating elements are formed on the same surface of the piezoelectric substrate as the capacitor electrode. A damper formed of a resin material on which no solder adheres is formed on top of the capacitor electrode and has sufficient mass to suppress undesired vibration in the area of the coupling capacitor.

Abstract: A support member preferably made of a metal such as cold rolled steel is disposed in a looped configuration and is provided with a gap. A transducer member preferably made of a piezoelectric material such as a ceramic is disposed within the support member. The transducer member is provided with a gap at a position corresponding to the gap in the support member. A closure member made from a suitable springlike material such as an alloy steel is attached to the opposite ends of the support member at the position of the gap as by welding. The closure member extends in a U-shaped configuration into the looped configuration (in section) defined by the support member and the ceramic member. The axial length of the closure member defines the bandwidth of the frequency vibrations generated by the transducer member.