Abstract: To appropriately evaluate a surface shape of an object to be inspected regardless of the relative positions of a light source and an image-taking device with respect to the object.

Abstract: A method is provided of detecting a region of raised material on a document surface. A surface of the document is illuminated with at least one angled radiation beam such that any raised material on the document surface reflects the radiation. The surface containing the raised material is imaged using at least one radiation detector. The image is then processed to detect the existence on the document surface of the raised material. The illuminating step causes a reflection and/or shadow to be generated from at least one edge of the raised material. The processing step detects the location of the material using the said reflection and/or shadow from the at least one edge.

Abstract: An object of the present invention is to apply a phase shift method to a workpiece having a rough surface to accurately detect an abnormal concave-convex irregularity. Therefore, in an inspecting system of the present invention, an image of a stripe pattern reflected on an inspection target surface is detected at a shallow angle, and one or more continuous unit stripes of a unit stripes reflected image is specified among the stripe pattern reflected images existing in a predetermined distance range counted from the edge in a closer side to the workpiece. Then, the phase of the specified unit stripes reflected image is varied to apply a phase shift method and scan the inspection target surface with the unit stripes reflected image to thereby detect the abnormal concave-convex irregularity.

Abstract: An apparatus and method for ocular surgery includes a delivery system for generating and guiding a surgical laser beam to a focal point on a target surface in a treatment area of an eye. A detector is coupled to the beam path of the surgical laser to create a three-dimensional image of the target surface, and a computer morphs this three-dimensional image into a two-dimensional image. Operationally, the computer then uses the two-dimensional image to position and move the focal point in the treatment area for surgery.

Abstract: A structured light sensor system for measuring contour of a surface includes a control module that coordinates control of both a projection system and an imaging system to operate the structured light sensor system in three different modes. The imaging system is configured to selectively capture an image of light reflected off of the surface. In point mode, the imaging system is on for a first period during which the projection system projects a point of light onto the surface. In line mode, the imaging system is on for a second period during which the projection system projects onto the surface a first plurality of points of light forming a line of light. In area mode, the imaging system is on for a third period during which the projection system projects onto the surface a second plurality of points of light forming a plurality of lines of light.

Abstract: The invention describes a method for measuring the shape of a reflective surface (14) and a corresponding system which has at least one pattern (15) for reflection at the reflective surface (14) and at least one camera (1) for viewing the pattern (15) which is reflected at the surface (14) pixel by pixel, wherein the position and orientation of the camera (1) and of the pattern (15) are known. In order to reliably measure the shape of reflective surfaces with a small amount of equipment complexity, the viewing directions of the camera (1), which are known for the pixels (8), and the positions of the pattern (15), which correspond to the mapping of the reflected pattern (15) to pixels (8) of the camera (1), are used to determine the surface angle and surface height for the purpose of measuring the shape.

Abstract: The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.

Abstract: Apparatus for indicating the departure of a shape of an object (3;11;16;18;22;26) from a specified shape is described. The apparatus comprises radiation means for directing an incident beam of radiation (4) onto the object, and inspecting means (5) for inspecting the final beam after transmission by or reflection from said object. The apparatus is arranged so that the final beam will have a substantially planar wavefront when said object has said specified shape, and said inspecting means (5) is arranged to determine any departure of the wavefront of the final beam from planarity. In one embodiment, the inspecting means comprises beamsplitting means, for example a diffraction grating (6) or hologram, and detector means such as a CCD camera (8). The beamsplitting means is then arranged to split the final beam into two or more beams and to direct said two or more beams to laterally displaced locations on the detector means.

Abstract: The invention relates to a method of measuring a profile of a reflecting face of a work piece, in particular a reflecting face of an end (2) of a pipe section, in that an electrical field is generated between the face and suspended particles (19) suspended in the ambient air of the face, the particles (19) being attracted to the face by the electrical field and matt-finishing the face by being deposited thereon, and the matt-finished face is then sensed with a laser beam (16) and scattered light (17) reflected by the matt-finished face is measured by a sensor (11) and in this way the profile of the face is determined.

Abstract: An optical metrology apparatus for measuring periodic structures using multiple incident azimuthal (phi) and polar (theta) incident angles is described. One embodiment provides the enhanced calculation speed for the special case of phi=90 incidence for 1-D (line and space) structures, which has the incident plane parallel to the grating lines, as opposed to the phi=0 classical mounting, which has incident plane perpendicular to the grating lines. The enhancement reduces the computation time of the phi=90 case to the same order as the corresponding phi=0 case, and in some cases the phi=90 case can be significantly faster. One advantageous configuration consists of two measurements for each sample structure, one perpendicular to the grating lines and one parallel. This provides additional information about the structure, equivalent to two simultaneous angles of incidence, without excessive increase in computation time.

Abstract: A method for detecting at least one value at least indirectly characterizing the properties of a surface in a material web treatment device. The method includes the steps of illuminating the surface at least at two measuring points with at least one emission source, simultaneously detecting at least one value at least indirectly characterizing a reflectivity of the surface at said each of the at least two measuring points with a detector device and evaluating the reflectivity.

Abstract: The invention relates to a method and an apparatus for determining a height of a number of spatial positions on a sample, defining a height map of a surface of said sample. The method can involve irradiating the surface of the sample with light including a spatial periodic pattern in a direction perpendicular to an optical axis and moving parallel to the pattern, scanning the surface in the direction of the optical axis for each position of the surface and detecting the light reflected by the sample by a detector during the scanning. In any scanning position, only a single image is taken, and the scanning speed has a predetermined relation to the phase of the periodic pattern. Analyzing an output signal of the detector can involve, for each spatial position of the detector, determining of an amplitude of the signal detected during the scanning and determining a scanning location where the amplitude is maximal.

Abstract: A device for acquiring the three-dimensional shape of the surface of an object comprises a lens; deflection means; at least two masks; at least two projection assemblies adapted to emit light beams which, by passing through the masks and the deflection means and by traveling along a channel which passes through the lens, strike the object to be acquired, projecting onto it the mutually offset images of the masks; means for acquiring the images reflected by the object; and means for processing the reflected images. The deflection means are semireflecting and the masks are adapted to project fringe images of the cosinusoidal type through the deflection means.

Abstract: An apparatus for measuring a shape of a surface, comprises a measurement head which measures a direction of a normal from the surface to a reference point by detecting test light obtained when light that passes through the reference point is emitted, is reflected by the surface, and returns to the reference point, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on the direction of the normal measured using the measurement head and a position of the reference point.

Abstract: An apparatus for measuring a shape of a surface, comprises a measurement head which measures at least one of a distance between a reference point and the surface and a direction of a normal from the surface to the reference point, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on a measurement result measured using the measurement head and coordinates of the reference point, wherein the coordinates of the reference point are calibrated using a measurement result measured by scanning the measurement head along a scanning path in association with a first surface to be measured, and a shape of a second surface to be measured is calculated based on a measurement result measured by scanning the measurement head along the same scanning path in association with the second surface, and the calibrated coordinates of the reference point.

Abstract: An object of the present invention is to apply a phase shift method to a workpiece having a rough surface to accurately detect an abnormal concave-convex irregularity. Therefore, in an inspecting system of the present invention, an image of a stripe pattern reflected on an inspection target surface is detected at a shallow angle, and one or more continuous unit stripes of a unit stripes reflected image is specified among from the stripe pattern reflected images existing in a predetermined distance range counted from the edge in a closer side to the workpiece. Then, the phase of the specified unit stripes reflected image is varied to apply a phase shift method and scan the inspection target surface with the unit stripes reflected image to thereby detect the abnormal concave-convex irregularity.

Abstract: An apparatus for measuring a curvature of a surface (1), comprising means for irradiating a first light beam (S1), a second light beam (S2) and a third light beam (S3) onto a surface (1) of a sample (12), a detector (5) comprising at least one detector plane and being adapted to detect a first position of the reflected first light beam (S1), a second position of the reflected second light beam (S2) and a third position of the reflected third light beam (S3) in the at least one detector plane, means for determining a first distance between the first position of the first light beam (S1) and the third position of the third light beam (S3) and a second distance between the second position of the second light beam (S2) and the third position of the third light beam (S3), and means for determining a mean curvature of the surface from the first distance and the second distance.

Abstract: The invention is directed to a method for illuminating an object and projecting its image on a ground glass screen. Optical comparators conventionally use incandescent illumination, either mercury arc or halogen. The use of an array of high intensity LED devices, provides many options for packaging the required optical components used in comparators.

Abstract: Deformations of a surface of a test object can be measured by attaching mirrors to a surface of a test object, each mirror having a reflective surface with a dimension and a radius of curvature smaller than those of the surface of the test object. Light is directed towards the mirrors and a reference surface, and interference patterns are generated using light reflected from the mirrors and the reference surface. Changes in the surface of the test object are determined based on the interference patterns.

Abstract: A measuring apparatus measuring a surface shape of a target includes a projection optical system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, an optical imaging system to cause the reflected line beam to form an image on a receiving surface of the imaging device to acquire a shape of the line beam on the target, and a splitting mechanism to split the reflected line beam so as to acquire the shape of the line beam on the target at different positions in an extending direction of the line beam and guide the split reflected line beams to the imaging device. A plurality of segments are set on the receiving surface while each segment in which at least one region is set as a reception region is partitioned into a plurality of regions, and the optical imaging system causes the split reflected line beams to form images on the reception regions in the different segments, respectively.

Abstract: A method of measuring a pattern shape of performing a shape measurement of a semiconductor pattern at a high accuracy even when a process margin is narrow with respect to miniaturization of a semiconductor device is provided. In the method of measuring a pattern shape, when a best-match calculated waveform cannot be selected, at least one parameter among shape parameters is set as a fixed value based on information obtained by another measurement apparatus that uses a measurement method independent to the pattern shape measurement, a matching of a library and a detected waveform is performed again, a best-match calculated waveform is selected, and shape information of an object pattern is obtained from the best-match calculated waveform.

Abstract: A method of determining properties of textured surfaces with the steps: irradiation of radiation onto the surface (10) to be investigated; detection of at least part of the radiation irradiated onto the surface (10) and reflected by the latter by means of a detector device (4) which permits a location-resolved evaluation of the radiation striking it; determination of a first characteristic value (?P) from the radiation detected, wherein the first characteristic value (?P) is characteristic of a texture of the surface (10); determination of a second characteristic value (?E) from the radiation detected, wherein the second characteristic value is characteristic of a further optical property of the surface (10); determination of a result value (?I) on the basis of the first characteristic value (?P) and the second characteristic value (?E).

Abstract: A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.

Abstract: An apparatus for imaging the inner surface of a cavity in a workpiece has an optical system including a panoramic field of view that is linked to an imager and a downstream evaluation device by an image communication link. The apparatus furthermore has an illumination system including a light source to illuminate an imaging region of the inner surface, which region has been captured by the optical system. According to the invention, the illumination system is disposed in such a way relative to optical system, and for which the beam path is selected in such a way, that a first axial section of the imaging region is able to be illuminated under brightfield illumination, while simultaneously a second axial region spaced apart from the first axial region is able to be illuminated under darkfield illumination.

Abstract: Disclosed is a medical device susceptible of identification using interference patterns. A source signal may be directed from an energy source towards the surface of a device for reflection therefrom. An interference pattern may be detected from the surface of the device, such as by a sensor. A determination as to whether a match exists between the representation of the interference pattern and a stored representation of an interference pattern may be performed. If a match exists, the device may be identified based on the stored representation of the interference pattern. Otherwise, a representation of the interference pattern may be stored and a unique identifier may be assigned to the stored representation of the interference pattern.

Abstract: This invention is directed to extract the scattering characteristic of a measurement target together when measuring the surface shape in a measurement system, which measures the surface shape of a measurement target, by the pattern projection method. To accomplish this, the measurement system includes an illumination unit which irradiates a measurement target with dot pattern light, a reflected light measurement unit which receives the reflected light at a reflection angle almost equal to a incident angle, and a reflected light extraction unit which extracts the inclination of the surface of the measurement target, based on the shift amount between the light receiving position of the received reflected light and a predetermined reference position, and extracts the luminance value of the reflected light and the dot diameter of the dot pattern light as information about the scattering characteristic.

Abstract: Chirped light pulses, the color of which changes regularly with time, are generated and applied to an object to be measured. A reflected light image of the chirped light pulses reflected from the object is acquired. Then, three-dimensional information of the object is acquired using two-dimensional information, color information represented by the reflected light image of the chirped light pulses, and the field of vision of the three-dimensional information to be acquired is enlarged.

Abstract: A scanning system for carrying out 3D scanning of dental models in a scanning direction V including a holding device for a whole jaw model which spans an occlusal plane E over a line-shaped mandibular arch, a base, a swivel bearing on a swivel axis normal to the scanning direction V and a stage mounted for rotation on the swivel bearing relatively to the base, on which the dental model to be scanned can be mounted. The stage can be rotated through an angular range ? of at least 150° about the swivel axis, and the whole jaw model can be mounted such that said occlusal plane E is aligned parallel to said scanning direction V. An evaluation unit receives data from a detector to generate a 3D data set.

Abstract: Laser scanning measurement systems and methods are disclosed that allow for surface shape measurements of otherwise hidden portions of an object's surface. The system includes a laser system that scans a laser beam over a scan path, a photodetector that detects light reflected from the object's surface, and a processor adapted to process detector signals from the photodetector to determine a two-dimensional (2D) surface shape representation and a three-dimensional (3D) surface shape profile representation. The system includes a mirror(s) configured to direct the scanned laser beam to one or more portions of the object surface that cannot be directly irradiated by the laser, and that allows the photodetector to detect light reflected from the one or more hidden portions via the mirror(s).

Abstract: In a device manufacturing method and a metrology apparatus, metrology measurements are executed using radiation having a first wavelength. Subsequently a grid of conducting material is applied on the substrate, the grid having grid openings which in a first direction in the plane of the grid are smaller than the first wavelength. The space in the scribe lane where the measurement target was, is now shielded and may be used again in further layers or processing steps of the substrate.

Abstract: A device for observation, by reflection, of the structural details of an object (2) that exhibits a behaviour that is at least partially specular, located in an exposure area, which includes: at least one radiation source with an emission surface (6) possessing at least two distinct zones (26, 27) emitting streams of radiation, where at least one of the characteristics differs from one zone to the next; an optical projection system that is located in line with the radiation source in relation to the exposure zone, in the path of the radiation; an optical exposure system (18) designed to optically link the entry aperture (14) of the optical projection system and the emission surface (6); a projection surface (10) that is linked optically with the object in the exposure zone, and whose received radiation depends on the deflection on the object (2).

Abstract: An apparatus and a method for examining a curved surface (5), having a camera (2) and an objective (3) and a lamp (4), is described. The camera (2) can be aimed at the inside of the curved surface (5), and the lamp (4) can be located such that light (7) emitted by the lamp (4) is reflected from the inside of the curved surface (5) into the camera (2). To attain high contrast with a simple arrangement, the lamp (4) is located in the beam path of the objective (3) of the camera (2).

Abstract: An optical metrology apparatus for measuring periodic structures using multiple incident azimuthal (phi) and polar (theta) incident angles is described. One embodiment provides the enhanced calculation speed for the special case of phi=90 incidence for 1-D (line and space) structures, which has the incident plane parallel to the grating lines, as opposed to the phi=0 classical mounting, which has incident plane perpendicular to the grating lines. The enhancement reduces the computation time of the phi=90 case to the same order as the corresponding phi=0 case, and in some cases the phi=90 case can be significantly faster. One advantageous configuration consists of two measurements for each sample structure, one perpendicular to the grating lines and one parallel. This provides additional information about the structure, equivalent to two simultaneous angles of incidence, without excessive increase in computation time.

Abstract: A method and means for determining the thickness, or curvature, of a thin film or stack of thin films disposed on the surface of a substrate having a curvature comprising generating a beam of radiation, focusing the beam through the one or more films onto a surface of the substrate, measuring the intensity across the reflected beam as a function of the angle of incidence of a plurality of rays derived from the focussed beam, determining the path of each of the plurality of rays and determining the thickness, or curvature of the film, or films, from the angular dependent intensity measurement.

Abstract: Diffraction modeling of a diffracting structure employing at least two distinct differential equation solution methods. In an embodiment, a rigorous coupled wave (RCW) method and a coordinate transform (C) method are coupled with a same S-matrix algorithm to provide a model profile for a scatterometry measurement of a diffracting structure having unknown parameters. In an embodiment, a rigorous coupled wave (RCW) method and a coordinate transform (C) method generate a modeled angular spectrum of diffracted orders as a prediction for how a diffracting photolithographic mask images onto a substrate.

Abstract: Disclosed is a measuring instrument for determining geometric properties of a profiled element. Said measuring instrument comprises:—a device that generates at least one first light beam (7) and a second light beam (8), the direction of radiation of the first light beam being different from the direction of radiation of the second light beam;—a retro-reflecting surface (3) which is arranged in such a way relative to the light source that at least some of both light beams is incident on the retro-reflecting surface; and—a recording device (14) which can determine, across the transversal extension thereof, the light intensity distribution of at least some of the reflected light beam of the first light beam and at least some of the reflected light beam of the second light beam, the first light beam being reflected by the retro-reflecting surface and the second light beam being reflected by the/a retro-reflecting surface.

Abstract: A shape evaluation device performs simulation by using an annular light source or concentric light source instead of a rectilinear light source and calculates a characteristic line for performing shape evaluation. The shape evaluation device includes a calculation device (2) having: a distance vector calculation unit (2a) for acquiring a distance vector representing a distance between the circle and the vector, a distance function unit (2b) for acquiring a distance function from the distance vector, and a distance function calculation unit (2c) for acquiring a point on a curved surface where the value of the distance function is a predetermined value. By performing simulation using the annular or concentric light source, it is possible to obtain a characteristic line capable of observing distortion in all the directions by one calculation.

Abstract: A tire shape detecting apparatus includes a projector that applies a plurality line light beams in a continuously joined manner, from a direction different from the detection height direction (Z-axis direction) in one light section line, or that applies one line light beam in a condensed manner in the line length direction thereof in order that the one light section line may be formed on the one line Ls on the surface of the tire; and a camera for picking up images of the plurality of line light beams applied to the tire surface in the direction in which the principal ray of each of the plurality of line light beams performs specular reflection with respect to the tire surface, or in the direction in which the principal ray of the condensed one line light beam performs specular reflection with respect to the tire surface.

Abstract: A shape measuring apparatus and a shape measuring method suited for measuring an edge profile of a thin sample such as a semiconductor wafer or the like is provided. A distribution of surface angle and an edge profile of a measurement site is calculated by emitting light at sequentially different angle to the measurement site of a wafer by sequentially switching and lighting a plurality of LEDs each disposed at one of plurality of positions in one plane by an LED driving circuit, obtaining an image data showing a luminance distribution of the reflected light form the measurement site through a camera by a calculator each time light is emitted and, estimating an emitting angle of the light when the luminance of the reflected light becomes peak based on image data and emitting angle of the light corresponding to each LED by the calculator.

Abstract: Surface normals and other 3D shape descriptors are determined for a specular or hybrid specular-diffuse object. A camera records an image of a smoothly spatially-varying pattern being reflected in the surface of the object, with the pattern placed at an initial position. The camera then records multiple images of the pattern undergoing a sequence of subsequent displacements to a final position distinct from the initial position. For a pixel in the images, the pattern displacement that corresponds to the minimum difference between the pixel value in the initial image and any of the final images is determined. The incident ray that strikes the surface of the object at the point being imaged by the pixel is then determined using the determined pattern displacement. The surface normal at that same surface point is then determined using the determined incident ray.

Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.

Abstract: A method and apparatus for measurement of a characteristic of a substrate. A target is present on the substrate and a measurement is performed during a scanning movement of the substrate. The scanning movement of the substrate is a linear movement and the measurement includes obtaining a reflected image of the target using a pulsed light source, the duration of a single light pulse being less than 100 psec. A lithographic apparatus includes such a measurement apparatus, and a device manufacturing method includes such a measurement method.

Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.

Abstract: The invention describes a method for measuring the shape of a reflective surface (14) and a corresponding system which has at least one pattern (15) for reflection at the reflective surface (14) and at least one camera (1) for viewing the pattern (15) which is reflected at the surface (14) pixel by pixel, wherein the position and orientation of the camera (1) and of the pattern (15) are known. In order to reliably measure the shape of reflective surfaces with a small amount of equipment complexity, the viewing directions of the camera (1), which are known for the pixels (8), and the positions of the pattern (15), which correspond to the mapping of the reflected pattern (15) to pixels (8) of the camera (1), are used to determine the surface angle and surface height for the purpose of measuring the shape.

Abstract: A quick, reliable and accurate method and device for measuring an optically reflecting surface, enabling quantifying of the curvatures and/or slopes and raised parts of the optically reflecting surface without risk of deteriorating the measured surface and adapted to measurement of large-dimension surfaces. The system and method for measuring the geometry of an optically reflecting surface to be measured S includes observing with a camera (2) the image of the surface to be measured S set in a measuring space (1), then interpreting the image in quantitative values characterizing at least one geometric quantity of the optically reflecting surface to be measured S.

Abstract: A method for detecting specular surface flaws on a coated substrate includes impinging visible non-integrated electromagnetic radiation from a first source onto the coated substrate, reflecting the visible non-integrated electromagnetic radiation off the coated substrate into a first photosensitive device, forming a recorded high frequency surface flaw image, and impinging visible coherent electromagnetic radiation from a second source onto a coated substrate at an oblique angle. The visible non-integrated electromagnetic radiation and the visible coherent electromagnetic radiation on the coated substrate are collocated but not combined on the substrate. The visible coherent electromagnetic radiation is reflected off the coated substrate onto a screen material to form a low frequency surface flaw image. The low frequency surface flaw image is recorded to form a recorded low frequency surface flaw image.

Abstract: A method is provided of detecting a region of raised material on a document surface. A surface of the document is illuminated with at least one angled radiation beam such that any raised material on the document surface reflects the radiation. The surface containing the raised material is imaged using at least one radiation detector. The image is then processed to detect the existence on the document surface of the raised material. The illuminating step causes a reflection and/or shadow to be generated from at least one edge of the raised material. The processing step detects the location of the material using the said reflection and/or shadow from the at least one edge.

Abstract: To provide measurement data on a real time basis from a laser measurement device mounted on an air vehicle to a ground station. The laser measurement unit sequentially outputs laser measurement data during a measurement period in which the air vehicle flies along a straight line flight fairway (32). The transmission unit desirably compresses the laser measurement data when the laser measurement data is accumulated to a file size while the air vehicle flies along straight line flight fairway (32), and transmits the laser measurement data to the ground station. The transmission units does not transmit the flight state data obtained by the GPS/IMU to the ground station on the straight line flight fairway (32), but transmits during a measurement suspended period in which the air vehicle flies along a turn fairway (34).

Abstract: A geometric measurement system is adapted to precisely measure one or more surfaces of objects such as corneas, molds, contact lenses in molds, contact lenses, or other objects in a fixture. The geometric measurement system can employ one or more of three possible methods of measurement: Shack-Hartmann wavefront sensing with wavefront stitching; phase diversity sensing; and white light interferometry.

Abstract: A device for acquiring the three-dimensional shape of the surface of an object comprises a lens; deflection means; at least two masks; at least two projection assemblies adapted to emit light beams which, by passing through the masks and the deflection means and by traveling along a channel which passes through the lens, strike the object to be acquired, projecting onto it the mutually offset images of the masks; means for acquiring the images reflected by the object; and means for processing the reflected images. The deflection means are semireflecting and the masks are adapted to project fringe images of the cosinusoidal type through the deflection means.