Abstract: An elongated bar shaped housing contains an optical sensing apparatus with at least one light source to create a sensing beam and a deflecting arrangement which moves the sensing beam back and forth between the longitudinal ends of the housing. One of the walls of the housing has an output window extending in the longitudinal direction of the housing for the sensing beam and an input window parallel to the output window for the sensing beam reflected from a workpiece or its support. In the housing behind the input window there is a strip shaped light receiving arrangement with a plurality of optical sensors, as well as an evaluation unit connected to the light receiving arrangement to which the output signals of the light receiving arrangement are sent.

Abstract: By means of the method and the apparatus in accordance with the invention, coated spectacle lenses are processed to form at the latter joining surfaces which permit a reliable adhesive bonding of the lenses to the bridge and the lugs of rimless spectacles. The method provides that for the respective spectacle lens two processing areas are predetermined with the shape, size and location thereof at the lens and that in the two predetermined processing areas the coating at the lens is locally removed by irradiation by a laser beam.

Abstract: A surface profile measuring apparatus includes a light source assembly, a spatial light modulator, a spectroscope, a wave-front sensor, and a control-processing device. The light source assembly has a liquid crystal display pixel structure and is configured for providing parallel light. The spatial light modulator is positioned to receive the light from the light source assembly. The spectroscope is positioned to receive the light from the spatial light modulator. The wave-front sensor is positioned to receive the light from the spectroscope. The control-processing device is electrically connected to the spatial light modulator and the wave-front sensor. The surface profile measuring apparatus can measure the surface profile of an object and not contact the surface of the object in cooperation with the spatial light modulator, the spectroscope and the wave-front sensor. Therefore, the surface of the object is protected from being damaged.

Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.

Abstract: An apparatus for measuring the coordinates of a point on the surface of an object comprises a projection system for projecting a beam of energy onto the surface of the object, a receiving system for receiving reflected beam energy from the target surface, and a detector for detecting the received energy. The projection system comprises a beam expander for expanding the width of the beam, and a focussing device for focussing the projected beam. The position of the reflected beam energy at the detector provides a measure of the range of the point on the target surface using triangulation and the direction of the projected beam provides the x and y coordinates. The focussing device can be controlled to vary the focal length of the projected beam and to control the beam size at the target object to vary the area of the target surface illuminated by the beam and thereby to control the resolution of the measurements.

Abstract: A method allows analyzing and describing the reflective properties of a three-dimensionally structured original surface. The topology of the original surface is determined and the topological data are stored in the form of a depth map in a first data record and evaluated with respect to the influence of the data on the reflective properties. Each surface element is assigned a reflective value in accordance with the evaluation and the value is stored in a second data record and made available to other machining or inspection systems. There, the reflection values of the second data record are divided into classes and the depth values of the first data record, assigned to the classified reflection values, are varied in accordance with the classification. Finally, the changed depth values are employed as parameters for electronically controlling a tool in order to machine the artificially produced surface.

Abstract: A method teaches how to measure—even strongly curved—specular surfaces with an apparatus that measures a shape as well as local surface normals absolutely. This is achieved by the observation and evaluation of patterns that are reflected at the surface. The reflected patterns are observed from different directions. The evaluation is done by termination of those locations in space, where the surface normals that are observed from different directions, have at least deviations against each other.

Abstract: The invention provides a handheld electronic gauge that is configured to obtain measurement data for an object, such as a wheel, rail, axle, or the like. The gauge includes one or more position sensors that automatically determine when the gauge is in a measurement position. The invention also provides a handheld computing device that can automatically determine when a gauge is in the measurement position and automatically obtain measurement data using the gauge. As a result, the invention provides a solution for measuring an object, such as a railway wheel, that is portable and capable of repeatedly providing various desired measurements, irrespective of the operator.

Abstract: A surface profile measuring apparatus includes a light source assembly, a spatial light modulator, a spectroscope, a wave-front sensor, and a control-processing device. The light source assembly has a liquid crystal display pixel structure and is configured for providing parallel light. The spatial light modulator is positioned to receive the light from the light source assembly. The spectroscope is positioned to receive the light from the spatial light modulator. The wave-front sensor is positioned to receive the light from the spectroscope. The control-processing device is electrically connected to the spatial light modulator and the wave-front sensor. The surface profile measuring apparatus can measure the surface profile of an object and not contact the surface of the object in cooperation with the spatial light modulator, the spectroscope and the wave-front sensor. Therefore, the surface of the object is protected from being damaged.

Abstract: Image data is acquired, processed, and/or displayed in accordance with an embodiment of the present disclosure to display, monitor, and/or demonstrate the progress of an experiment substantially in real-time and with high sensitivity. In one embodiment, at least one time-resolved value of spatially distributed polarization change data is provided and displayed. Advantageously, real-time processing and display of data is provided such that discussion and collaboration about the experiment may occur, time-resolved data is not lost, and resources are not wasted.

Abstract: The inner surface shape of a hole, in particular, the inner surface shape of a hole the entry of which is narrow and which becomes wider further in from the entry, can be measured at a high level of accuracy.

Abstract: The invention relates to a device and a method for the measurement of the curvature of a surface (1), which is more exact and less expensive than prior art devices. The device comprises a light source (2) for the irradiation of a light beam (3) onto the surface (1), in which a birefingent element (4) is arranged between light source (2) and surface (1), in which furthermore a detector (5) is arranged for the detection of the partial beams (6,7), that are reflected from the surface (1), and at least one main axis (17) of the birefringent element (4) is positioned with respect to the light beam (3) of the light source (2) in such a way, that the light beam (3) of the light source (2) is split up into at least two parallel beams (6,7).

Abstract: A target object has its surface condition inspected by having its image taken from above while being irradiated by red, green and blue light beams at different elevation angles. An inspection area is set on the image and a direction is extracted on the image in which a change appears in the color phase according to the arrangement of the light sources and this extracted direction is compared with a preliminarily registered standard direction to judge the surface condition from the result of this comparison.

Abstract: The invention relates to a method for three-dimensional shape measurement of a body or of a part thereof, in particular of a dental object such as a model, by scanning non-contact distance measurement using an optical sensor device comprising a beam source, where the shape of the body subjects reproducing areas to a beam at various incidence angles (impinging beam), and the reflected beam (measuring beam) is measured, with the body being adjusted relative to the optical sensor device. To permit measurement with high precision of the body and undercuts thereof, without tilting being necessary, it is proposed that for shape measurement of the respectively measured area the beam (measuring beam) reflected therefrom, which describes an angle ? to a surface normal corresponding to the respective area, is taken into account, said angle being equal to or smaller than a predefined critical angle ?GR relative to the surface normal.

Abstract: A method of calibrating or compensating a sensor for measuring property of target surface is provided. In one embodiment, a liquid reference surface is formed on a platen. A sensor is used to measure a feature property of the reference surface. The measured feature property of the reference surface may be used to calibrate the sensor. Further, the sensor is used to measure the feature property of a polishing pad. The measured feature property of the reference surface may be used to compensate the measured feature property of the polishing pad.

Abstract: A tire shape measuring system measures a surface shape on the basis of an image of a line of light (a light section line) emitted to a surface of a relatively rotating tire using a light-section method. The shape measuring system includes a light projector for emitting a plurality of lines of light onto a tire surface in directions different from a direction in which the height of the surface is detected so as to form a plurality of separate light section lines and a camera for capturing images of the light section lines in directions in which chief rays of the lines of light are specularly reflected by the tire surface. The shape measuring system individually detects the coordinates of the light section lines from images of pre-defined independent image processing target areas for each captured image and calculates the distribution of the surface height using the detected coordinates.

Abstract: In a device manufacturing method and lithographic apparatus wherein a pattern is transferred from a patterning device onto a substrate, a measurement target is provided on the substrate in a process enabling execution of a substrate measurement using radiation of a first wavelength. Subsequently the measurement target is transformed in a grid of conducting material, the grid having grid openings which are smaller than the first wavelength. The space in the scribe lane where the measurement target was, is now shielded and may be used again in further layers or processing steps of the substrate.

Abstract: In a device manufacturing method and a metrology apparatus, metrology measurements are executed using radiation having a first wavelength. Subsequently a grid of conducting material is applied on the substrate, the grid having grid openings which in a first direction in the plane of the grid are smaller than the first wavelength. The space in the scribe lane where the measurement target was, is now shielded and may be used again in further layers or processing steps of the substrate.

Abstract: An apparatus for generating a surface normal map of an object may include a plurality of light sources having intensities that are controllable so as to generate one or more gradient illumination patterns. The light sources are configured and arranged to illuminate the surface of the object with the gradient illumination patterns. A camera may receive light reflected from the illuminated surface of the object, and generate data representative of the reflected light. A processing system may process the data so as to estimate the surface normal map of the surface of the object. A specular normal map and a diffuse normal map of the surface of the object may be generated separately, by placing polarizers on the light sources and in front of the camera so as to illuminate the surface of the object with polarized spherical gradient illumination patterns.

Abstract: The height of protuberances present on the surface of a product, typically a bump wafer, can be measured with a high accuracy irrespective of the state of the upper surfaces of the protuberances. In the signal processor of a bump height measuring apparatus, a bump height measurement area setting section set a bump height measurement area by the bump layout information, a statistical application section averages the height data in an statistical calculation within the measurement area, a contour line calculating section calculates a contour line of a section of the bump, and a bump height determining section determines a peak value in the contour line as the height of the bump.

Abstract: An apparatus and a method permit the 3D detection of specular objects which are transparent to visible light. The method operates on the basis of the principle of deflectometry with specific improvements.

Abstract: A structure formed on a semiconductor wafer is examined by obtaining measurements of cross polarization components of diffraction beams, which were obtained from scanning an incident beam over a range of azimuth angles to obtain an azimuthal scan. A zero azimuth position is determined based on the azimuthal scan. The cross polarization components are zero at the zero azimuth position. A measured diffraction signal is obtained using an azimuth angle to be used in optical metrology of the structure. Misalignment of the azimuth angle is detected using the measured diffraction signal and the determined zero azimuth position.

Abstract: An unevenness elimination end-point detection apparatus for a CMP apparatus which polishes a film to be polished formed on a wafer surface includes: light irradiation means for irradiating a light on a polishing surface of the wafer during polishing of the wafer; photoelectric conversion means for converting a light intensity of a reflected light from the polishing surface into an electric signal to output the electric signal as a light intensity signal; and determination means for determining an elimination end-point of the initial unevenness of the wafer on the basis of the light intensity signal output from the photoelectric conversion means. The irradiated light is white light and the white light is split and input to the photoelectric conversion means, and light intensity signals are output in units of wavelengths of split lights. In this manner, an elimination end-point of the initial unevenness can be optically detected during wafer polishing.

Abstract: Apparatus for quantitatively measuring the curvature and/or relative tilt of large surfaces wherein a small array of parallel laser beams, each separated by a known distance, reflect from the surface of a sample and fall upon a feedback controlled front-surface steering mirror to a detector that measures both the change in separation of the reflected beams and the spatial translation of the entire array on the detector. The sample surface is translated beneath or in front of the fixed laser array by means of a computer controlled stage or other apparatus to create a 1-dimensional line scan or 2-dimensional map of both bow and relative tilt of the sample surface. A computer-driven, feedback-controlled steering mirror compensates for varying sample tilt by precisely realigning the reflected laser array onto the detector as the sample is translated.

Abstract: An apparatus and a method for detecting low frequency specular surface flaws on coated substrates is disclosed. A method for detecting low frequency specular surface flaws may comprise: impinging visible electromagnetic radiation or light from an electromagnetic radiation source onto the coated substrate at an oblique angle, reflecting the visible electromagnetic radiation off the coated substrate onto a screen material to form a specular surface flaw reflected image, and recording the reflected image off the screen material with a photosensitive device to form a recorded reflected image.

Abstract: A three-dimensional shape measuring system includes: a light projecting/receiving apparatus which causes a light receiver to receive light reflected on a surface of a measurement object onto a light receiving surface thereof at a predetermined cycle multiple times, while changing a projecting direction of the light; and a measuring apparatus for measuring a three-dimensional shape of the measurement object, utilizing light receiving data.

Abstract: Methods, systems, and devices can determine spatial relationships between a probe and a target surface. Specular reflections from the target surface vary dramatically with small changes in angle between the scanning beam and the target surface, and as the geometry of the beam scanner and light detector of the probe are often known, and as the angle of the light beam projected from a scanner for accurately generating an image, the pattern of spectral light reflected from the light beam directly back to the detector allows the distance between the probe and the target surface, and/or the angular relationship between the probe and the target surface, to be calculated.

Abstract: A system for measuring a profile of an object comprising a source creating a beam of electromagnetic energy. An electromagnetic beam receiver spaced from the source for processing an output signal proportional to the girth of the object being measured. A platform for providing rotational and vertical movement of the object being measured causing the object to obstruct a portion of the electromagnetic beam generated by the source. A processor for processing the output signal from the electromagnetic beam receiver to form a composite profile of the object measured.

Abstract: A system and method of inspecting a semiconductor wafer that may be employed to detect and to characterize defects occurring on an edge of the wafer. The wafer inspection system includes an optical module for providing a light source to scan the wafer edge, a light channel detector for detecting light reflected from the wafer edge, and a processor and memory for converting detected signals to digital form, and for filtering and processing the digital data. The module includes a wafer edge scanning mechanism for projecting a collimated laser beam toward the wafer edge at a predetermined angle of incidence to scan the wafer edge for defects. The light channel detector detects light reflected from the wafer edge to obtain wafer edge data, which are applied to thresholds to determine the location of defects in the wafer edge.

Abstract: A microplate reader includes a light emitting portion for irradiating each of a plurality of test samples with excitation light, a light receiving portion for receiving return light from each of the test samples, and an XY stage for moving the light emitting portion and the light receiving portion to traverse and scan the test samples. The light emitting portion and the light receiving portion are defined at the same location on a reflection surface, which is formed on a distal end of a glass light guide rod. The light emitting portion irradiates each test sample with a sufficient amount of excitation light so that a sufficient amount of return light enters the light receiving portion.

Abstract: The present invention provides a transparent liquid inspection apparatus capable of identifying a boundary between a transparent liquid applied on a base material which provides a multi-piece product and the base material, and automatically inspecting an applied condition of the transparent liquid without influence of a background of the base material. A projected image of an illumination source (2) is reflected on a surface of the transparent liquid as a mirror, the projected image is picked up by cameras (41 to 44), and the image is analyzed by an image processing unit (8), thereby inspecting an amount of displacement of the transparent liquid from a predetermined application position and expansion of the surface of the transparent liquid.

Abstract: A method and apparatus for determining color, presence and/or polarity of a component in a printed circuit board includes a sensor and an LED positioned behind a faceplate. The faceplate abuts the component and light is reflected from the LED off the component and received by the sensor. A resulting output signal is analyzed to determine the color, presence and/or polarity of the component in the printed circuit board, thereby ensuring that the printed circuit board is correctly assembled.

Abstract: A luminous projecting device for the topography of spherical and non-spherical reflecting surfaces, adapted to a slit lamp, and/or any other focused and projected light source illumination system, which uses the illumination system of this equipment as its own lighting source, and evaluates the reflected images of the continuous, concentric and illuminated target circles projected on the surfaces intended to be measured, with several dimensions in accordance with the specific image size, and its distance to the eye.

Abstract: A reflecting surface design system (50) has (1) first rendering means (54) for displaying a free-form surface (20) on which a plurality of segments (24), each of which is defined by a plurality of vertices (251 to 254), are formed, (2) reflection information specifying means (56) for specifying the vertex position and light reflecting direction for each of the plurality of vertices (251 to 254) that define one of the plurality of segments (24), and (3) surface calculation means (58) for calculating a surface (S) to be assigned to the one segment (24) on the basis of the vertex positions and light reflecting directions specified for the plurality of vertices (251 to 254) that define one segment (24), and the light source position, which is specified in advance.

Abstract: A light sensor circuit based on direct connection of LEDs to I/O pins of a microcontroller. The LEDs are reverse biased and the parasitic junction capacitance is charged in an output mode. Then, the I/O pins placed into an high-impedance input mode. The time for the capacitance to be discharged by photoconduction caused by light incident on the LEDs is inversely proportional to an intensity of the incident light, and can be directly measured as the time required for the I/O pin to transition from fully-charged (5 volts) to a logic threshold level (1.7 volts). By using multiple LEDs, multiplexed between emissive and sensing modes, a wide variety of sensors can be constructed, particularly, when the LEDs emit light at different wavelength.

Abstract: The invention concerns a device for acquiring the three-dimensional shape of an object (10) by opto-electronic process, comprising a chromatic system (18) for illuminating the object (10) and for picking up the light reflected or backscattered by the object (10), and a reflecting mirror (26) placed on the optical axis between the optical system (18) and an illumination slot (16) for deflecting the light reflected by the object towards a spectral analysis means (30).

Abstract: Apparatus and process for fast, quantitative, non-contact topographic investigation of samples. Apparatus includes a light source, and a collimating concave mirror structured and arranged to produce a parallel beam and to direct the parallel beam to a sample to be investigated. A structured mask is located between the light source and the concave mirror, and an image sensor structured and arranged to receive a beam reflected from the sample and the concave mirror. Relative positions of the mask and the sensor to other elements of the apparatus are chosen to provide an essentially sharp image of the mask on the sensor. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: The present invention provides a reflector having a light-diffusing property which suppresses inter-object reflection over a wide angle, and giving particularly high reflectance in an intended range of viewing angle; and to provide a reflection type liquid crystal display device using the same. The reflector includes a plurality of light-reflective concave portions. Each of the concave portions is formed so that an inclination angle (an angle between a plane tangential to a point on a concave surface and the surface of the base material) is maximum on a side portion of the curved surface, and so that the direction of the side portion having the maximum inclination angle is on a far side from a view point of an observer.

Abstract: A method of media type differentiation includes the steps of providing a media sensor including a specular detector that provides a specular signal output having a signal level related to an amount of the reflected specular light received; providing a highly reflective surface positioned to face the media sensor; interposing a print media sheet between the media sensor and the highly reflective surface; using the media sensor to measure a first amount of the reflected specular light and determining a first signal level of the specular signal output of the specular detector; and using the first signal level to differentiate the print media sheet as being one of a transparency media sheet or a high glossy media sheet.

Abstract: A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity.

Abstract: The present invention is directed to a system and method for taking up an object space using a laser range finder and a scanning device for scanning the object space. Furthermore, there is a passive opto-electronic receiver having an associated scanning device. The scanning device(s) scans the object space for the range finder and the passive receiver synchronously and in phase. To each image element, a spatial angle is assigned for identification. The passive receiver, comprises an array of transducer, elements where the image angle of an individual element of the array corresponds preferably to the beam angle of the laser beam. A memory includes one cell per image element so that with each distance measurement the individual elements of the array can be read and their signals stored in the cells of the memory.

Abstract: A method for polishing wafers includes polishing a process layer formed on a wafer, the process layer overlying a grating structure; illuminating at least a portion of the process layer and the grating structure; measuring light reflected from the illuminated portion of the process layer and the grating structure to generate a reflection profile; comparing the measured reflection profile to a target reflection profile having an acceptable degree of planarity; and terminating the polishing of the process layer based on the comparison of the measured reflection profile and the target reflection profile. A metrology tool adapted to measure a wafer having a grating structure and a process layer formed over the grating structure after initiation of a polishing process includes a light source, a detector, and a data processing unit. The light source is adapted to illuminate at least a portion of the process layer overlying the grating structure.

Abstract: In a substrate inspecting apparatus comprising a projecting section (4) in which light sources (8), (9) and (10) are provided for emitting colored lights of R, G and B in directions having different elevation angles, one or two color components which is/are greater than the mean value of the intensities of color components is/are extracted for an inspecting region including a soldered portion. Inclined surfaces adapted to the light sources (8), (9) and (10) are converted into monochromatic shaded images by the extraction processing. A boundary position between the inclined surfaces adapted to the light sources (8) and (9) are converted into one shaded image having a mixed color of red and green and the boundary position between the inclined surfaces adapted to the light sources (9) and (10) is converted into a different shaded image.

Abstract: An imaging method and system are presented for detecting the topography of a sample surface. Illuminating light is directed to the sample by sequentially passing the illuminating light through a grating and an objective lens arrangement The grating has a pattern formed by spaced-apart transparent regions spaced by non-transparent regions, and is specifically oriented with respect to the optical axis of the objective lens arrangement. Light, specularly reflected from the sample, is collected by the same objective lens arrangement and is directed to an imaging detector through the same grating, thereby enabling creation of an image of the illuminated sample indicative of the topography of the sample surface.

Abstract: A process and an apparatus for measuring an object space using an opto-electronic range finder which operates according to a method of determining the time-of-flight of a signal comprise a first measuring step including transmitting optical transmitter signals in form of a beam of a predetermined first divergence angle, receiving optical signals reflected from an object and evaluating a distance value, while scanning the object space. After or before this first take-up step follows a second one wherein reference marks in the object space are taken up with a using an enlarged divergence angle so as to detect reliably the reference marks. The apparatus comprises, accordingly, appropriate devices for varying the divergence angle.

Abstract: A surveying instrument, comprising a distance measuring unit for measuring a distance to a collimating point, an angle measuring unit for measuring a vertical angle and a horizontal angle of the collimating point, an image pick-up means for acquiring an image in a collimating direction, a driving unit for directing the image pick-up means in a direction of a predetermined object to be measured as selected based on an entire image data acquired by the image pick-up means, and a control arithmetic unit for recording by associating an image of an object to be measured with survey data to the object, wherein the image is picked-up in the direction directed by the driving unit and the survey data is measured by the distance measuring unit and the angle measuring unit.

Abstract: The start of the displacement movement is initiated by a software instruction when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller.

Abstract: Apparatus and process for fast, quantitative, non-contact topographic investigation of samples. Apparatus includes a light source, and a collimating concave mirror structured and arranged to produce a parallel beam and to direct the parallel beam to a sample to be investigated. A structured mask is located between the light source and the concave mirror, and an image sensor structured and arranged to receive a beam reflected from the sample and the concave mirror. Relative positions of the mask and the sensor to other elements of the apparatus are chosen to provide an essentially sharp image of the mask on the sensor. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: This invention concerns a process and a device for measuring at least one geometric magnitude of an optically reflective surface. The process is rapid, reliable, and precise, and makes it possible to quantify the curvatures and/or slopes and reliefs of the optically reflective surface without the risks of damaging the surface to be measured, and which is suitable for measuring large surfaces.

Abstract: A system including confocal and triangulation-based scanners or subsystems provides data which is both acquired and processed under the control of a control algorithm to obtain information such as dimensional information about microscopic targets which may be “non-cooperative.” The “non-cooperative” targets are illuminated with a scanning beam of electromagnetic radiation such as laser light incident from a first direction. A confocal detector of the electromagnetic radiation is placed at a first location for receiving reflected radiation which is substantially optically collinear with the incident beam of electromagnetic radiation. The system includes a spatial filter for attenuating background energy. The triangulation-based subsystem also includes a detector of electromagnetic radiation which is placed at a second location which is non-collinear with respect to the incident beam. This detector has a position sensitive axis.