Abstract: It is an object of the present invention to make it possible to use the same inspection apparatus regardless of the difference of the model of the glass sheets.

Abstract: The present invention provides a wheel measurement method and system to measure an attribute of a wheel. Light illumination devices and light sensing devices provide wheel data. A computer then performs a calculation on the wheel data to measure the attribute of the wheel.

Abstract: A forward looking cross-track laser altimeter comprises: a first configuration of optical elements for guiding pulsed laser beams along a first optical path; a mirror element coupled to a scanner and disposed in the first optical path, the scanner operative to oscillate the mirror element to sweep the reflected laser beams back and forth across a line at a predetermined frequency; the scanner and mirror element configurable to reflect the pulsed laser beams along paths forward and downward at a predetermined angle to the flight path of the aircraft, wherein the pulsed laser beam paths are caused to be line swept across a ground track forward the aircraft; the mirror element for receiving returns of the pulsed laser beams from the terrain and objects on the terrain forward the aircraft and reflecting the returns along a second optical path to a light detector which produces a return signal in response thereto; a first circuit governed by the return signals for measuring times-of-flight of the returns and gener

Abstract: An optical system, consisting of drop-reflection image, reflection-refracted shadowgraphy and top-view photography, is used to measure the spreading and instant dynamic contact angle of a volatile-liquid drop on a non-transparent substrate. The drop-reflection image and the shadowgraphy is shown by projecting the images of a collimated laser beam partially reflected by the drop and partially passing through the drop onto a screen while the top view photograph is separately viewed by use of a camera video recorder and monitor. For a transparent liquid on a reflective solid surface, thermocapillary convection in the drop, induced by evaporation, can be viewed nonintrusively, and the drop real-time profile data are synchronously recorded by video recording systems. Experimental results obtained from this technique clearly reveal that evaporation and thermocapillary convection greatly affect the spreading process and the characteristics of dynamic contact angle of the drop.

Abstract: A method for determining or designing the topography of at least one unknown surface of an optical element includes the steps of measuring or prescribing geometrical properties, determining a set of integration equations from the geometrical properties, and determining the topography of the at least one unknown surface from the set of equations. The set of integration equations is determined also from the optical index or indexes of the optical element. The geometrical properties measured or prescribed are the geometric properties of a plurality of rays incident upon the optical element and of a corresponding plurality of rays affected by at least the at least one unknown surface.

Abstract: A method and apparatus reduces undesirable glints in an optical position alignment sensor designed to orient components. Collimated light is provided onto the component. A filter is positioned behind the components and is used to block glint generated by the components. The filter is tunable by rotating it about an axis in the plane of the component.

Abstract: A foreign substance inspecting method includes the steps of detecting a height of a foreign substance attaching to a periphery of a wafer by irradiating a light beam from a light source to the wafer, thereby detecting the presence/absence of a foreign substance with not less than a predetermined height. The predetermined height is set to be substantially equal to a gap between the wafer and a mask at a wafer exposure.

Abstract: An apparatus for generating structural data of a structure. The apparatus includes a scanning laser range finder that produces reflectance data of the structure. The apparatus includes a memory which stores the reflectance data. The apparatus includes means for determining desired spatial relationships of the structure from the reflectance data. A method for generating structural data of a structure. The method includes the steps of producing reflectance data of the structure with a scanning laser range finder. There is the step of storing the reflectance data in a memory. There is the step of determining desired spatial relationships of the structure from the reflectance data.

Abstract: In accordance with the teachings of the present invention, an optoelectronic system (10) is provided for surface digitization of an object using spatiochromatic triangulation. The optoelectronic system (10) includes an illuminating subsystem (12) for illuminating a measuring space (30) that contains an object (16) to be measured, as well as a viewing subsystem (14) for collecting the light reflected by this object (16) and for generating a three-dimensional topography of the object (16) using in depth chromatic coding of the object. More specifically, relay optics (22) are used to image a polychromatic light source (20) onto a source slit (24) which in turn passes images from the slit image onto a dispersing element (26). The object to be measure is illuminated with a continuum of monochromatic images along a cutting, plane (x,z) within the measuring space (30).

Abstract: A method of inspecting bumps provided on a surface of an object to be inspected includes the steps of: (a) irradiating a first irradiation beam on said object in an oblique direction and (b) imaging a first reflected beam from said object so as to obtain a first reflection image including a first reflection region and a height data of said bump corresponding to said first regular reflection region produced by a part of the first reflected beam reflected near an apex of the bump. The method further includes the steps of (c) shifting a position of said first regular reflection region in said first reflection image in accordance with a value derived from said height data and said predetermined angle, (d) extracting said first regular reflection region within a predetermined region from said first reflection image after said step c), and (e) detecting a height of said bump based on said height data corresponding to the extracted first regular reflection region.

Abstract: A method for polishing wafers includes polishing a process layer formed on a wafer, the process layer overlying a grating structure; illuminating at least a portion of the process layer and the grating structure; measuring light reflected from the illuminated portion of the process layer and the grating structure to generate a reflection profile; comparing the measured reflection profile to a target reflection profile having an acceptable degree of planarity; and terminating the polishing of the process layer based on the comparison of the measured reflection profile and the target reflection profile. A metrology tool adapted to measure a wafer having a grating structure and a process layer formed over the grating structure after initiation of a polishing process includes a light source, a detector, and a data processing unit. The light source is adapted to illuminate at least a portion of the process layer overlying the grating structure.

Abstract: A three-dimensional shape measuring apparatus has a point light source for radiating illumination light diverging in the shape of an elliptical cone, a slit illumination system for imaging the illumination light into the shape of a slit, an objective system for imaging the illumination light toward a measurement object and for imaging reflected light traveling back from the measurement object, a beam splitter for separating the optical paths of the illumination light entering the objective system and of the reflected light exiting from the objective system, and a sensor for detecting the amount of the reflected light exiting from the objective system.

Abstract: In a shape determining method of a reflective surface 10a of a reflector 1 in a vehicle lamp in such structure that a basic shape thereof is a free-formed surface 20 satisfying shape constraints etc. and that reflective surface elements are assigned to segments obtained by dividing the free-formed surface 20 into an array pattern, a reference plane is defined as a plane opposite to the free-formed surface 20 and normal to the optical axis Ax, and the free-formed surface 20 is projected onto the reference plane to determine the reflective surface. This permits uniform handling independent of the shape of the free-formed surface 20 and thus can simplify design steps and make the resultant shape of the reflective surface suitable. Thus, the reflective surface determining method of the reflector in the vehicle lamp permitting efficient creation of the segments on the free-formed surface and efficient creation of the reflective surface elements assigned to the respective segments can be realized.

Abstract: A method of forming a gold statuette of a three-dimensional object, e.g. a man, is disclosed as including the steps of (1) scanning the man with scanning means to obtain data on his contour and shape; (2) inputting the data into a computer; (3) based on the data inputted into the computer, displaying a virtual three-dimensional image of the man on a monitor of the computer; (4) providing an epoxy resin prototype of the man by a sculpturing machine controlled by the computer; (5) providing silicon rubber mould-halves on the basis of the epoxy resin prototype; (6) providing a wax prototype on the basis of the silicon rubber mould-halves; (7) casting gold onto the wax prototype; (8) removing the wax, in which the scanning means revolves around the man to scan his contour and shape.

Abstract: A test device for horizontal position of an optical disc drive, comprising a test platform having a plurality of vertical position rods mounted thereon and the rods being of similar horizontal height; and at least a sensor mounted within the area formed by the position rods located on the platform, and including at least an emitting element and a receiving element, the emitting element emitting an optical detection signal (i.e., incident wave) to an optical disc connectedly driven by the motor rotating shaft of a pick-up mechanism to be tested, by means of a reflected optical signal produced by the optical disc, the receiving element receives the signal, and the sensor produces a horizontal height measuring data, and thereby the results and the measured horizontal height data determine whether the motor horizontal position of the optical disc drive pick-up device is parallel to the horizontal axial direction of the optical disc drive pick-up device.

Abstract: The present invention provides a light illuminating method, a surface examining method using the light illuminating method, and apparatuses for performing these methods. In the surface illuminating apparatus for illuminating an object with a light beam from a light source through a lens member for illumination, the lens member for illumination has a characteristics with respect to a longitudinal aberration caused by a spherical aberration in the light source side of the lens for illumination, that an amount of shift from a paraxial image surface to image formation points gradually increase or decrease, with an increase in height of light incidence into the lens; and the light source is set at a position in an outside of a group of the image formation points.

Abstract: A method and a device for opto-electrically acquiring the shape of a surface by illuminating the surface (S) with light beams (10) having different wavelengths and which converge at different points on the axial illumination direction (Y) in the vicinity of the surface (S), by spectral analysis of the light reflected or backscattered by the surface (S) in the direction (Y) and by determining distances of points on the surface (S) relative to a reference plane (X, Y) from the wavelength and/or the spectral widths of the light analyzed.