Abstract: A method of designing a nanophotonic scattering structure can include establishing an initial design having an array of discrete pixels variable between at least two pixel height levels. A performance metric for the structure can be a function of the heights of the pixels. The height of a pixel can be varied, and then the performance metric can be calculated. The steps of varying the pixel height and calculating the performance metric can be repeated to increase the performance metric. The above steps can be repeated for each pixel within the array and then the method can be iterated until the performance metric reaches an optimized value. Nanophotonic scattering structures can be produced from designs obtained through this process.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: An electrowetting display device that includes a display member having: a first substrate, at least one surface of which is electroconductive, a second substrate disposed so as to face the electroconductive surface of the first substrate, a hydrophobic insulation film disposed at the side of the electroconductive surface of the first substrate, a non-electroconductive oil provided movably on the hydrophobic insulation film and containing a nonpolar solvent and a porphyrin dye represented by Formula (1), and an electroconductive hydrophilic liquid that contacts the oil. In Formula (1), A1 to A4: N or —C(R1)?; M: metal atom, metal oxide, metal hydroxide, metal halogenide or 2H; R: C4-30 alkyl; X: single bond, O, S or —N(R2)—; R1: H, alkyl, aryl or —X11—R11; R2: H, alkyl or aryl; R11: C4-30 alkyl; X11: single bond, O, S or —N(R12)—; R12: H, alkyl or aryl; and n: 1-8.

Abstract: The present invention provides a transmissive Spatial Light Modulator with fast response speed and higher brightness using micro-windows having switching transistors on said window so that the fill factor of light transferring area can be maximized. Conventional systems have transistors out of windows which substantially reduce the area to pass incoming light, because transistors are usually opaque and block light transmission. Transmissive Spatial Light Modulator requires simpler and smaller optics than reflective Spatial Light Modulator.

Abstract: An optical device compensates for decreased transmission of light caused by gaps between mirrors of a MEMS array. The optical device employs MEMS mirrors having non-reflecting regions on them disposed such that reflecting regions of the MEMS mirrors have substantially the same optical throughput, or an additional optical element having increased transmission at those spatial positions where light impinging on the gaps passes through. Alternatively, the optical device may employ a filter having spectral transmission characteristic with increased transmission at those wavelengths of dispersed light that impinge on the gaps.

Abstract: The present disclosure relates to an improved optical arrangement for an optical imaging system or the like, comprising: an optical device; a digital micromirror device having a plurality of individually addressable micromirrors; a convex mirror; and a concave mirror concentric to the convex mirror. The convex mirror and the concave mirror define an optical triplet which is located in an optical path with the digital micromirror device and the optical device. The concave mirror comprises two concave mirror sections, one or both concave mirror sections being moveable relative to the convex mirror so as to control an image mapping between the digital micromirror device and the optical device.

Abstract: This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator includes a display pixel having a movable reflector, and a movable absorbing layer. The movable absorbing layer is positionable at a variable first distance from an electrode that is substantially transparent over a visible wavelength spectrum. The movable reflector is positionable at a variable second distance from the movable absorbing layer. Changing the first distance and the second distance changes a characteristic of light reflected from the display element.

Abstract: A variable spectrum element includes: first and third sensors which are placed at positions at which the first and third sensors are symmetrical with respect to a line connecting the centers of mass of the surfaces of a pair of optical substrates opposite to each other, respectively; second and fourth sensors which are placed at positions at which the second and fourth sensors are symmetrical with respect to the line connecting the centers of mass, respectively; and first to fourth actuators which are placed on lines running from the center of mass of the surface of each of the pair of the optical substrates opposite to each other to the centers of the first to fourth sensors respectively, respectively.

Abstract: This disclosure provides systems, methods and apparatus for providing white light color output from an electromechanical systems (EMS) device with reduced likelihood of stiction. In one aspect, interferometric modulators are configured to provide a white color output while having a non-zero modulator gap dimension. Such a feature can reduce problems associated with zero modulator gap dimensions such as stiction. Various methodologies can be used to yield such a non-zero modulator gap and a white color output. In some implementations, for example, an optical element that introduced wavelength dependent phase shift is used. In some implementations this wavelength dependent phase shifting optical element includes a stack of color filters, a hologram, a diffraction grating, or layers of material having specific thicknesses and wavelength dependent indices of refraction.

Abstract: This disclosure provides systems, methods and apparatus for encapsulating a display device. In one aspect, an interferometric modulator (IMOD) is formed on a substrate. The IMOD includes an absorbing layer separated from the substrate, a reflective layer between the absorbing layer and the substrate, and an optical gap between the absorbing layer and the reflective layer. One or more thin film encapsulation layers hermetically seal the IMOD between the one or more thin film encapsulation layers and the substrate. In another aspect, an optical or functional layer can be formed over the one or more thin film encapsulation layers.

Abstract: Embodiments of the invention are directed to a new type of phase screen, i.e., an opto-electronic device that can convert a distorted incoming optical wavefront into a plane wave or, conversely, transform a plane wave into a prescribed varying output wavefront. The basic concept involves novel binary all-digital MEMS interferometer configurations that can be used to create controlled and arbitrary optical wavefront using only 0,1 amplitude changes followed by differential propagation distances to convert these amplitude variations into controllable and/or continuous phase variations. Clustered pixel notions, such as Floyd-Steinberg, Stucki or other algorithms useful in digital half-tone printing, are simultaneously employed to create controllable grey-level variations as well as continuous phase variations. Desired grey-levels can be obtained wherein each pixel is formed by, e.g., a 3×3 or 5×5 cluster of mirrors.

Abstract: A DND chip is disclosed. In one aspect, the chip includes a 2D DND array of DND elements logically arranged in rows and columns, and a DND driver architecture for actuating the DND elements. The DND driver has a set of first drive lines along the rows and a set of second drive lines along the columns, a set of first line drivers for each biasing one line from the set of first drive lines and a set of second line drivers for each biasing a line from the set of second drive lines. A plurality of second line drivers are spatially grouped together to serve a block of DND elements, and that plurality of second line drivers are spatially covered substantially completely by at least some DND elements of the block of DND elements. A holographic visualization system including the DND chip is provided.

Abstract: A spatial light modulator (SLM) module and methods of designing, manufacturing and using the same are provided. In one embodiment, the SLM module comprises a diffractive, diffractive SLM formed on a substrate, the SLM including a plurality of pixels each including a plurality of electrostatically deflectable actuators, and a driver including a number of drive channels each coupled to one of the plurality of electrostatically deflectable actuators. Each of the drive channels include at least one internal digital-to-analog converter (DAC) integrally formed on the same substrate as the SLM. In one embodiment, the DAC is a multi-slope charge integrating DAC. In other embodiments, the driver includes circuitry to test each of the drive channels, and a spare drive channel that can be switched in to replace a defective drive channel.

Abstract: The electrowetting display apparatus includes a display unit including: a first substrate at least one surface of which is electroconductive; a second substrate disposed to face the electroconductive surface of the first substrate; a hydrophobic insulation film disposed on the electroconductive surface side of the first substrate; a non-electroconductive oil which is provided between the hydrophobic insulation film and second substrate movably on the hydrophobic insulation film and includes a non-polar solvent and an azamethine-based colorant containing two colorant mother nuclei bonded via a linking group represented by ?N—; and an electroconductive hydrophilic liquid provided between the hydrophobic insulation film and second substrate to contact the oil; in which an image is displayed by applying a voltage between the hydrophilic liquid and the electroconductive surface of first substrate and changing the shape of interface between the oil and hydrophilic liquid.

Abstract: An optical phase shifter according to the invention includes the thermo-optical element of which a refractive index with respect to an input optical signal changes dependently on temperature; a temperature change section, having contact with one end of the thermo-optical element and of which a temperature changes so that a temperature of the thermo-optical element becomes a desired temperature; a heat dissipation section being disposed on an opposite side of the thermo-optical element with respect to the temperature change section and going into a state of thermal equilibrium at a temperature different from the temperature of the temperature change section; and a temperature buffer section, being disposed between the temperature change section and the heat dissipation section, having contact with the temperature change section and the heat dissipation section, and having a heat resistance greater than that of the heat dissipation section.

Abstract: A light-scattering photonic material is disclosed having a matrix defining a plurality of disordered voids. The material may be reversibly responsive to an external stimulus, exhibiting reversible first and second optical effects. The material may be a thin film material.

Abstract: As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.

Abstract: The visible spectrum modulator makes use of thin film conductive oxides and air gaps to reflect colors of certain wavelengths, achieving transparency due to the transparent nature of conductive oxides and via electrostatic pull-in to reduce the air gaps.

Abstract: This disclosure provides systems, methods, and apparatus related to a the design of arrays of electrodes in a device which includes a light-guiding layer in optical contact with the electrodes. In one aspect, a device includes an array of electrodes, the electrodes include at least one edge having a non-linear shape. Specific design constraints may be placed on the shape of the non-linear edge of the electrodes.

Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.

Abstract: In one or more embodiments described herein, there is provided an apparatus including a support layer, a plurality of pixels, and a switch. The pixels are formed using an arrangement of respective liquid-phobic elements disposed on the support layer. The arrangement of the liquid-phobic elements is configured so as to be able to provide, when interacting with a liquid on the support layer, one or more associated plastron regions to provide a first pixel optical state. The switch is configured to be able to selectively modify one or more of said associated plastron regions to provide a second pixel optical state.

Abstract: Interferometric modulators and methods of making the same are disclosed. In one embodiment, an interferometric modulator includes an interferometric reflector having a first reflective surface, a second reflective surface, and an optical resonant layer defined by the first reflective surface and the second reflective surface. The interferometric reflector can be configured to transmit a certain spectrum of light at a transmission peak wavelength such that the interferometric modulator has a diminished reflectance of light at the transmission peak wavelength.

Abstract: The force on the electrodes of an electrostatic field is used so that lateral tensile or compressive forces result which can deform a deformable element or can strongly deflect a deflectable structure. For this, a micromechanical device includes, apart from an electrode and a deformable element, an insulating spacer layer via which the electrode is fixed to the deformable element, wherein the insulating spacer layer is structured into several spaced-apart segments along a lateral direction, so that by applying an electric voltage between the electrode and the deformable element lateral tensile or compressive forces bending the deformable element along the lateral direction result. Thereby, the problem that normally accompanies electrostatic drives, namely the problem of the pull-in effect, is overcome. The deflection of the deformable element can be much larger than the gaps of the two electrodes, i.e. the above-mentioned electrode and the deformable element. A usage as a sensor is also possible.

Abstract: Systems and methods for generating a position reference grid and relative positioning of an object are presented. Radiation is emitted towards a digital micro-mirror device including a plurality of micro-mirrors. Additionally, one or more of a plurality of micro-mirrors are modulated such that at least a portion of the radiation reflected from the plurality of micro-mirrors is projected on to a designated location in a designated pattern representative of a position reference grid. The radiation reflected from the plurality of micro-mirrors is detected. Further, the detected radiation is interpreted as location coordinates in the position reference grid. Additionally, the location coordinates are communicated to the object moving in relation to the digital micro-mirror device for positioning the object at a designated position in the position reference grid.

Abstract: Interferometric modulators may include a movable layer including both permanently anchored and programmable hinges. Unactuated programmable hinges may exert little or no force on the movable layer. When actuated, programmable hinges may exert a mechanical force on the movable layer in a direction approximately opposite to the direction of force exerted by the permanently anchored hinges. By increasing a voltage between the programmable hinges and an electrode, a progressive number of programmable hinges may be engaged. The mechanical force exerted on the movable layer by these hinges may change the relative position of the movable layer within an IMOD device.

Abstract: An optical device suitable for forming a pixel in a video display. The optical device includes a first layer having a first refractive index; a second layer over the first layer, the second layer having a second refractive index less than the first refractive index; and a third layer over the second layer, the third layer having a third refractive index larger than the second refractive index; and a fourth layer that is at least partially optically absorptive, wherein the optical stack and the fourth layer are a first distance from one another when the device is in a first state and are a second distance from one another when the device is in a second state, the first distance different from the second distance.

Abstract: A micro electro-mechanical system (MEMS) switch includes an active device, an immovable metal layer and a movable metal layer is provided. The immovable metal layer is disposed on the active device and the movable metal layer is disposed above the immovable metal layer. Accordingly, an insulating cavity is formed between the immovable metal layer and the movable metal layer. Further, the active device is capable of driving the movable metal layer. Compare to thin film transistor, since the operation performance of the MEMS switches would not affected by carrier mobility and on-off current ratio, display performance of the display device can be easily improved.

Abstract: Provided is a flexible display device including a display body having flexibility; an actuator for changing and driving the display body; and an initial shape forming substrate for maintaining an initial state of the display body before the display body is changed and driven. The flexible display device allows a user to exactly control a change state of the flexible display device by driving the actuator and to decrease power consumption for changing and driving the flexible display device. Thus, by using the flexible display device, user convenience can be improved and the flexible display device can be driven with low power consumption.

Abstract: Lighting systems comprising a spectrum former upstream from a reflective pixelated spatial light modulator (reflective SLM), the SLM reflecting substantially all of the light in the spectrum into at least two different light paths, that do not reflect back to the light source or the spectrum former. At least one of the light paths acts as a projection light path and transmits desired light out of the lighting system. The lighting systems provide virtually any desired color(s) and intensity(s) of light, and avoid overheating problems by deflecting unwanted light and other electromagnetic radiation out of the system or to a heat management system. The systems can be part of another system, a luminaire, or any other suitable light source. The systems can provide virtually any desired light, from the light seen at the break of morning to specialized light for treating cancer or psoriasis, and may change color and intensity at speeds that are perceptually instantaneous.

Abstract: The present invention related to an auto focus intraoral camera. The auto focus intraoral camera includes an illumination module for providing illuminating light, an imager, and a lens system for collecting light reflected from an object and focusing the light onto the imager, wherein said lens system further comprises at least one liquid lens including a vessel filled with a first liquid, and a second liquid being in contact with said first liquid, the first and second liquids being immiscible, of different optical indexes, and of substantially same density; wherein the lens system further includes a driver integrated circuit applying variable voltage to control the focal length of said lens. According to the present application, a compact auto focus intraoral camera with a small size and simple structure is provided, which decreases the camera complexity and improve the performance.

Abstract: A method of fabricating an integrated device including a MicroElectroMechanical system (MEMS) and an associated microcircuit is provided. In one embodiment, the method comprises: forming a high temperature contact through a dielectric layer to an underlying element of a microcircuit formed adjacent to a MicroElectroMechanical System (MEMS) structure on a substrate; and depositing a layer of conducting material over the dielectric layer, and patterning the layer of conducting material to form a local interconnect (LI) for the microcircuit overlying and electrically coupled to the contact and a bottom electrode for the adjacent MEMS structure. Other embodiments are also provided.

Abstract: A spatial light modulator has a plurality of mirror elements each of which is controllable into a first state in which the mirror element reflects incident light with a change in a phase thereof by a first phase and a second state in which the mirror element reflects the incident light with a change in the phase thereof by a second phase 180° different from the first phase; and a boundary portion arranged between the mirror elements, which changes the phase of the incident light by a third phase substantially (90°+k·180°) (where k is an integer) different from the first phase. In projecting a pattern with the use of the spatial light modulator, an error caused in the pattern can be reduced even if the light quantity of light passing a gap region between the optical elements in the spatial light modulator is large.

Abstract: A lighting device is described for receiving source light within a source wavelength range, converting the source light into a converted light, and reflecting the converted light to a desired output direction. The lighting device may use a micro electromechanical system (MEMS) device to receive and redirect the source light to the desired output direction. A conversion coating may be applied to the operative surface of the MEMS device to convert the source light into a converted light.

Abstract: A radiation emitting element comprising a radiation transmissive element having a first refractive index, a first surface, a second, opposite surface, a radiation emitter adapted to emit radiation of a predetermined wavelength into the radiation transmissive element, and a plurality of radiation controlling elements, wherein each radiation controlling element comprises: —a first liquid having a second refractive index, —a second fluid having a third refractive index being lower than the second refractive index, the second refractive index being closer to the first refractive index than the third refractive index, —means for altering a shape of the first liquid between two modes wherein: • in a first mode, the first liquid being in contact with the first surface at a first surface part, and an interface between the first liquid and the second fluid, at the first surface part, is not parallel to the first surface part and • in a second mode, a surface of the second fluid, at the first surface part, is at least

Abstract: A flexible display apparatus that has improved portability and convenience of usage. The flexible display apparatus includes a display main body that is flexible; and a bendable driving film coupled to the display main body, and that bends when an electric current flows. The flexible display apparatus may be flexibly transformed to be stored when it is carried, and then, may be unfolded to be flat through a simple manipulation when it is in use for displaying an image. Thus, the convenience of carrying and using the flexible display apparatus may be increased.

Abstract: According to one embodiment, an image display apparatus includes a light source, a modulation unit, a first array and a second array. The modulation unit modulates intensity and a color of the light to generate beams corresponding to each of modulated pixels included in a modulated pixel group. The first array is formed by juxtaposing a plurality of first deflection elements each having a generating line parallel to a vertical direction of the modulated pixels. The second array is formed by juxtaposing a plurality of second deflection elements each having a generating line tilted by an angle represented by tan?1(?×m/n) with respect to a generating line of the first deflection element.

Abstract: Embodiments of a display comprising pixels formed from suitably tethered deformable membrane-based MEMS subsystems are provided that include the means to dynamically alter the in-plane tension, and thus the effective spring constant, of the deformable membrane being ponderomotively propelled between active and inactive optical states, said dynamic alteration being effected by exploiting transverse piezoelectric properties of the deformable membranes. Manipulating the spring constant can reduce the actuation force required to turn pixels on, thus significantly reducing the operational voltages for the display composed of an array of such subsystems. Since display power rises with the square of the pixel drive voltage, such architectures give rise to more power efficient display systems.

Abstract: A system for projecting images has an illumination system for providing light, a spatial light modulator including an array of individually addressable pixel modulator elements with curved reflective surfaces, and projection optics for projecting the modulated light to form the image, wherein no focal planes of the projection optics are aligned to the reflective surfaces of the pixels.

Abstract: The present invention describes a micro-mechanical light modulator including a two-dimensional array of modulating elements, in which small modulating elements are organized into larger modulating areas. Using smaller elements organized into larger areas increases the resonant frequency of the modulators and the modulation speed. In some implementations, multiple modulating elements are driven by shared signals, allowing the number of elements driven and the resulting area to increase without increasing the data traffic. In some implementations, an anamorphic optical path is used that leaves individual modulating elements of the micro-mechanical light modulator that are operated as a single area unresolved at an image plane of the workpiece being patterned. Devices and methods are described.

Abstract: A method and apparatus is provided for processing an optical beam. The method includes spatially dispersing an optical beam received from an optical port into a plurality of wavelength components. The wavelength components are focused and at least one of the components is selectively directed to one of the optical ports by reflecting the focused wavelength component at least twice from a DMD before being directed to a selected one of the optical ports. A resolution of the focused wavelength component is optimized when it is reflected from the DMD a first or second time at the expense of the other time when it is reflected.

Abstract: According to particular embodiments, an illumination system includes a light source that generates light for use in illuminating a spatial light modulator and an assembly of two optical elements spatially separated by a gap that receives the light from the light source, changes the shape of the light, and transmits the light onto the spatial light modulator.

Abstract: A tunable bandwidth selector is disclosed. The tunable bandwidth selector may include a plurality of spaced apart electron sheets which selectively separate a first bandwidth from an input spectrum.

Abstract: The invention relates to a microsystem having at least one micromirror (1) and at least one micromirror actuator (2) for pivoting the at least one micromirror (1) about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover (3) disposed on the frame chip, wherein the frame chip has a chip frame (10), on which the at least one micromirror (1) is articulated in an elastically pivoting manner, wherein the at least one micromirror (1) is further disposed within the chip frame (10) and in a cavity (11) that is formed between the transparent cover (3) and a carrier layer.

Abstract: An substrate having a second material on a surface of the substrate or embedded as a layer within the substrate are described. The second material has a different index of refraction and/or stiffness than the substrate so that stretching and unstretching of the substrate and the second material can induce wrinkles in the second material that interacts with light thereby allowing reversible change from a transparent state to an opaque or iridescent state, and vice versa. The present disclosure is useful as a shading system and/or displays.

Abstract: The invention relates to a display element for the display of a plurality of a colors and a method for their display. For this purpose, the invention teaches a display element 1 based on one or more color-producing surfaces 2 which can be oriented parallel to the viewing direction 3 of an observer, for example, so that the observer views only the narrow edges of the surfaces 2. The actual content is perceptible only because a movable reflector 4 is also provided in which the color-producing surface 2 is reflected. The display element claimed by the invention has a particularly good aperture. In the case of static images, the power consumption of the display element is very low. In one preferred embodiment, the display element also makes possible the presentation of a large color space and can be independent of the presence of ambient light.

Abstract: A drive circuit includes a generator and a driver. The generator generates a signal having a period and a varying amplitude during a driving portion of the period, and the driver is coupled to the generator and drives a plate of an electrostatically drivable plant with the signal. The drive circuit may be used to drive a mirror plate of a comb-drive MEMS mirror.

Abstract: A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers.

Abstract: An optical arrangement and a related method for operating this optical arrangement are suggested, particularly in microscopes, for use as at least one of a main beam splitter and a beam combiner. One or more light beams can be coupled into the arrangement and at least one of the light beams that were coupled in can be coupled out again after having passed through the optical arrangement. In the path of the coupled in light beams at least one controllable microstructured element is provided, allowing to switch beam paths within the optical arrangement. This allows controlling or influencing the one or more light beams that are coupled out.

Abstract: A multi-layer hidden hinge and actuator design for high fill factor biaxial MEMS mirror array for wavelength selective switches (WSS) including a coarsely aligned orthogonal vertical comb drive and/or parallel plate actuator. Each micro-mirror in the MEMS linear piano micro-mirror array comprises a reflective body/mirror layer, a ground/hinge layer and a hot electrode/substrate layer. To increase the amount of surface area available for the hot and ground electrodes, the dimensions of the ground/hinge layer are extended longitudinally or laterally across the air gap between reflective layers to beneath the adjacent reflective layer. Ideally, diffraction patterns are formed on the surface of the ground/hinge layer to prevent stray light from reflecting back into the system.

Abstract: The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.