Abstract: Photonic structures and photonic devices are provided. A photonic structure includes a three-dimensional photonic crystal and an actuator. The three-dimensional photonic crystal comprises an elastomeric, auxetic material and configured to provide a predetermined optical bandgap. The actuator is coupled to the three-dimensional photonic crystal and is configured to compress the three-dimensional photonic crystal. When the actuator compresses the three-dimensional photonic crystal, the three-dimensional photonic crystal shifts from reflecting light in a first wavelength range to light in a second wavelength range.

Abstract: A display for imaging includes an aperture layer and a set of light modulators. The aperture layer includes a light absorbing layer disposed over a light reflecting layer, each layer having a set of apertures defined therein. The light absorbing layer includes light absorbing material suspended in a photosensitive resin. The set of light modulators are for modulating light passing through the apertures defined in the aperture layer.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: A reflective subpixel array may be formed in which an absorption layer is formed on a back substrate, which may obviate the need for a black mask on a front substrate upon which the reflective subpixel array is formed. In some implementations, the black mask layer may be formed only in post areas on the front substrate. The absorption layer may absorb light that enters between subpixel rows and/or columns. The absorption layer may include at least one highly conductive layer that can form part of the signal routing for the display. Conductive spacers may be formed to connect the conductive absorption layer to a conductive layer of the subpixel array.

Abstract: A control of gobos defend by records in the gobo. The gobos are formed by menued shapes.

Abstract: An optical micro-electro-mechanical systems (MEMS) structure is provided. The structure includes an elastomer membrane, a plurality of polymer fibers attached to the elastomer membrane, an array of detectors operatively connected to the plurality of polymer fibers at a first end of the plurality of polymer fibers, and a microlens array operatively connected to the plurality of polymer fibers at a second end of the plurality of polymer fibers. A method of manufacturing an optical MEMS structure is provided. The method includes forming a hollow PDMS chamber in which PDMS fibers extend from top to bottom using a lost wax molding process.

Abstract: A illumination device comprises a light guide having a first end for receiving light and configured to support propagation of light along the length of the light guide. A turning microstructure is disposed on a first side of the light guide configured to turn light incident on the first side and to direct the light out a second opposite side of the light guide, wherein the turning microstructure comprises a plurality of indentations. A cover is physically coupled to the light guide and disposed over the turning microstructure. An interlayer is between the cover and the light guide, wherein the interlayer physically couples the cover to the light guide. A plurality of open regions is between the interlayer and the plurality of indentations. Various embodiments include methods of coupling the cover to the light guide while preserving open regions between the cover and plurality of indentations.

Abstract: A tunable metamaterial comprising a membrane on which is arranged a two-dimensional array of elements to form a metamaterial, wherein the array is subdivided into blocks of multiple elements, each block being separated from adjacent blocks by a gap to allow each block to be moveable relative to its adjacent blocks. The lattice of the metamaterial and hence its properties are tuned by inducing adjacent blocks to move away from each other or towards each other either in-plane or out-of-plane in a controllable manner in response to an electrical, thermal or optical control signal.

Abstract: This disclosure provides systems, methods and apparatus for a MEMS device. In one aspect, an electromechanical systems apparatus includes a substrate, a stationary electrode positioned over the substrate, a movable electrode spaced from the stationary electrode by a gap, and at least one support structure extending above the movable electrode. The support structure includes an inorganic dielectric layer and a polymer layer.

Abstract: An optical system may include an objective, a source of illumination, an illumination system having illumination optics configured to direct the illumination onto the objective, and at least two dynamic optical array devices located at a pupil conjugate plane and a field conjugate plane, respectively in the illumination optics. The dynamic optical array devices are configured to control one or more properties of illumination coupled from the illumination system to the objective.

Abstract: Disclosed is a display device including a substrate having a unit pixel area, a fixed member formed on the substrate to receive a ground voltage, an insulating layer formed on the fixed member, a fixed electrode formed on the insulating layer to receive a common voltage, and a plurality of movable members partially fixed on the insulating layer. The movable members are spaced apart from the fixed electrode at regular intervals, and the plurality of movable members and the fixed electrode are placed within the unit pixel area.

Abstract: Disclosed is a method for mixing colors in a display unit with pixels that are arranged like a raster. According to said method, each pixel is provided with at least three color mirrors which are disposed behind or next to each other and are formed by transparent receptacles whose interiors are connected to reservoirs via ducts, while a colored liquid, e.g. a red liquid, as well as a fully transparent medium that is immiscible with colored liquid can be moved into the color mirrors and the reservoirs thereof, the fully transparent medium having the effect of making the color of the background in the color mirror appear white, for example. According to the invention, color is mixed by alternately moving the colored liquid and the fully transparent medium into the color mirrors in a rapid sequence, the time fraction during which the colored liquid or the fully transparent medium is located in the color mirror being controllable.

Abstract: Illuminating light (B2, B3) for a liquid crystal on silicon (LCOS) micro-display (210) is provided by an illuminating unit (100). The illuminating unit (100) has a waveguiding substrate (7) and a plurality of light out-coupling features (F30). The substrate (7) has two substantially parallel surfaces (41,42). Light coupled into said substrate (7) is reflected several times on the surfaces (41,42) of the substrate (7) by total internal reflection (TIR) before being coupled out of the substrate (7). Thus a portion (102) of said substrate (7) may act as an optical integrator for smoothing out variations in spatial intensity distribution of light propagating within said substrate (7). The out-coupling efficiencies of the out-coupling features (F30) may be selected to minimize vignetting and/or to minimize stray light effects.

Abstract: In accordance with the teachings of one embodiment of this disclosure, a method for manufacturing a semiconductor device includes forming a support structure outwardly from a substrate. The support structure has a first thickness and a first outer sidewall surface that is not parallel with the substrate. The first outer sidewall surface has a first minimum refractive index. A first anti-reflective layer is formed outwardly from the support structure and outwardly from the substrate. A second anti-reflective layer is formed outwardly from the first anti-reflective layer. The first and second anti-reflective layers each includes respective compounds of at least two elements selected from the group consisting of: silicon; nitrogen; and oxygen.

Abstract: An example hard imaging device includes an interface to access image data corresponding to images to be formed using the hard imaging device. The example hard imaging device further includes processing circuitry in communication with the interface to access the image data, to access correction data corresponding to a geometric distortion of a scan lens of an optical scanning system of the hard imaging device, and to modify the image data according to the correction data to reduce image errors introduced during optical scanning of the image data using the optical scanning system.

Abstract: A method of fabricating an integrated device including a MicroElectroMechanical system (MEMS) and an associated microcircuit is provided. In one embodiment, the method comprises: forming a high temperature capable contact through a dielectric layer to an underlying element of a microcircuit formed adjacent to a MicroElectroMechanical System (MEMS) structure on a substrate; and depositing a layer of conducting material over the dielectric layer, and patterning the layer of conducting material to form a local interconnect (LI) for the microcircuit overlying and electrically coupled to the contact and a bottom electrode for the adjacent MEMS structure. Other embodiments are also provided.

Abstract: Disclosed is an optical element which includes a support substrate and a thin plate of single crystal stacked on the support substrate through a thermoplastic adhesive, having the advantages of easily regulating the phase of light waves and restoring the regulated state to the original state. The optical element includes a support substrate 4 and a thin plate 1 of single crystal stacked on the support substrate 4 through a thermoplastic adhesive 3. The optical characteristics of the optical element are regulated by applying stress within an elastic limit to at least a part of the thin plate in a state where the thermoplastic adhesive is softened by heating the optical element, forming a concavo-convex part 10 in the thin plate, and then cooling the optical element to fix the concavo-convex part.

Abstract: There is provided an electronic paper display device, and a method of manufacturing the same. The electronic paper display device includes a display side electrode formed of a transparent material, a rear electrode opposing the display side electrode, a substrate disposed between the display side electrode and the rear electrode, and including a plurality of partition walls separating a space between the display side electrode and the rear electrode and a plurality of cell spaces formed by the plurality of partition walls, and two or more types of rotary bodies disposed in the plurality of cell spaces and displaying different respective colors. The same type of rotary bodies displaying the same color among the rotary bodies includes a plurality of rotary bodies having different respective shades. The electronic paper display device has high image stability and uniformity and enables the expression of various shades.

Abstract: This disclosure provides systems, methods and apparatus for providing white light color output from an electromechanical systems (EMS) device with reduced likelihood of stiction. In one aspect, interferometric modulators are configured to provide a white color output while having a non-zero modulator gap dimension. Such a feature can reduce problems associated with zero modulator gap dimensions such as stiction. Various methodologies can be used to yield such a non-zero modulator gap and a white color output. In some implementations, for example, an optical element that introduced wavelength dependent phase shift is used. In some implementations this wavelength dependent phase shifting optical element includes a stack of color filters, a hologram, a diffraction grating, or layers of material having specific thicknesses and wavelength dependent indices of refraction.

Abstract: A system and method for operating an electronic device used in light processing. A method comprises altering a spatial relationship between a spatial light modulator (SLM) and a light incident on the SLM, shifting light modulator states of a first portion of light modulators to a second portion of light modulators, and placing a third portion of light modulators in the SLM into a performance degradation-reducing mode. The amount of shifting performed is proportional to the amount of change in the spatial relationship. The method allows for a change in light modulators used to modulate the light, thereby preventing the overuse of some of the light modulators, which may help to prevent degradation of the light modulators. The performance degradation reducing mode may help to further reduce or even reverse the performance degradation of the light modulators.

Abstract: A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.

Abstract: A micro-mirror system having a micro-mirror actuator, a sensor for detecting the position of the micro-mirror actuator, a light module having at least one light source and an associated control system via which a light intensity of the light source is controllable, and an evaluation and control unit which is designed to control the micro-mirror actuator as a function of an output signal of the sensor. The system provides that the evaluation and control unit includes a compensation routine in which an offset voltage of the output signal of the sensor is settable as a function of the light intensity of the light source to be expected at the point in time that the micro-mirror actuator is activated.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.

Abstract: An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Abstract: An interferometric display comprises a backlight with light extraction features formed from a desiccant material within the display. A light source is positioned at one or more edges or corners of the back glass, and the desiccant based features patterned in or on the back glass remove unwanted moisture and create uniform light extraction from the back glass.

Abstract: A lighting device is described for receiving source light within a predetermined source wavelength range, converting the source light into a converted light, and reflecting the converted light to a desired output direction. The lighting device may use a micro electromechanical system (MEMS) device to receive and redirect the source light to the desired output direction. A conversion coating may be applied to the operative surface of the MEMS device to convert the source light into a converted light.

Abstract: An illumination optical apparatus includes a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other, a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.

Abstract: An optoelectronic device for projecting a first beam (110) of coherent first electromagnetic radiation onto a surface (91) comprises a first radiation source (11), which is suitable for emitting a first beam (110) of coherent first electromagnetic radiation when in operation. The optoelectronic device additionally comprises a first phase-modifying element (21) in the beam path of the first electromagnetic radiation for changing the phase of the first electromagnetic radiation in a subzone (1102) of the first beam (110) and a radiation-directing element (4) in the beam path of the first electromagnetic radiation for changing a beam direction (P1, P2) of the first beam (110).

Abstract: This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.

Abstract: This disclosure provides systems, methods and apparatus for providing illumination by using a light guide to distribute light and for determining spacing between light turning features in the light guide. In one aspect, a light intensity profile along a first axis is determined and the pitch of light turning features along that first axis is varied based upon this profile, while the pitch along a second crossing axis (for example, an orthogonal axis) and the sizes of the light turning features remain unchanged. In some implementations, an apparatus includes a light guide having an array of light turning features configured to turn light from at least one light emitter. The light turning features can be non-uniformly spaced apart along a first axis such that pitches vary non-monotonically and, along a second axis that crosses the first axis, the light turning features are spaced apart with substantially the same progression.

Abstract: In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.

Abstract: A device for sensing light comprises a light sensor, one or more intermediate mirrors, a micromirror array including a plurality of independently positionable micromirrors, wherein a first micromirror in the micromirror array is positionable in a first position such that light reflected by the first micromirror while in the first position is reflected toward a first region on one of the one or more intermediate mirrors, wherein the light reflected toward the first region on one of the one or more intermediate mirrors is further reflected to the light sensor, and a lens configured to direct light toward the micromirror array.

Abstract: An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process.

Abstract: A method of projecting images uses an array of pixels having curved reflective surfaces.

Abstract: A beam combiner for combining at least two light beams (1, 2) into one combined light beam (3), in particular in the beam path of an optical arrangement, preferably of a microscope, is with respect to a flexible beam combination with structurally simple means characterized by an acousto-optical element (4) in which a mechanical wave or sound wave for deflecting or bending light beams can be generated, so that a first light beam (1) entering the acousto-optical element (4) and at least a second light beam (2) entering the acousto-optical element (4) exit the acousto-optical element (4) in a collinear manner as a combined light beam (3). Further, a light source with such a beam combiner is specified.

Abstract: A laser display system and method that includes some or all of the following parts: an optical apparatus that includes two spatial light modulators and a laser, and switches the laser between the light modulators; two lasers that combine pulses to illuminate one spatial light modulator; controlling a laser Q-switch to stay in CW mode for variable periods of time to generate variable-amplitude pulses; and loading and resetting a digital micromirror device between pulses of light.

Abstract: A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

Abstract: A system and method of reducing color shift in a display includes an interferometric modulator display configured to reflect light from at least one light source and through at least one converging optical element in an optical path from the light source to a viewer via the display. In one embodiment, the converging optical element comprises a diffractive optical element.

Abstract: Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

Abstract: A manufacturing method and system are disclosed for illuminating a target. A light controller has a plurality of pixels, and light is projected from at least a first light source to the light controller, wherein the light from the first light source is incident on the light controller at a first angle. The pixels are controlled to establish illumination characteristics for first and second optical paths between the light controller and the target.

Abstract: A “Stacked-Grating Light Modulator” (“SGLM”) comprises two diffraction grating elements, a reflection grating and a transmission grating, in close parallel proximity. An incident beam transmits through the transmission grating and is reflected by the reflection grating back through the transmission grating. The relative lateral position of the two gratings is varied to modulate the beam's zero-order reflectance.

Abstract: This disclosure provides systems, methods and apparatus for backside patterning of structures in electromechanical devices. In one aspect, backside patterning of supports in an electromechanical device allows the size of the supports to be reduced, increasing the active region of the electromechanical device. In electromechanical devices having black masks, the black masks may include a partially transmissive aperture aligned with the supports which enable backside patterning of the support through the black mask. The black mask may include an interferometric black mask in which an upper reflective layer has been patterned to form an aperture extending therethrough.

Abstract: A spatial light modulator driven with binary pulse-width-modulation requires very high data transfer rate to achieve high grayscale. This invention enables to reduce substantially the data transfer rate using non-sequential order of binary bits, wherein the combination of the sequences of binary bits is selected from the combinations which avoid simultaneous writing of multiple rows. The possible number of such combinations is astronomically large and mathematical programs were developed to find right combinations. These results were proposed.

Abstract: The present invention provides image projection system implemented with a spatial light modulator, for modulating an illumination light projected from a light source wherein said spatial light modulator comprising an image projection system implemented with a spatial light modulator for modulating an illumination light projected from a light source wherein said spatial light modulator comprising: at least two electrically conductive layers functioning as two different electrical wirings and said conductive layers having respectively a first and a second longitudinal directions overlapping and crossing each other; and a fixed electric potential layer electrically connected to a fixed electric potential, wherein the two different conductive layers and fixed electric potential layer overlapping one another and disposed at a location along a light path of the illumination light emitted from the light source to block said illumination light.

Abstract: According to one embodiment, a spatial light modulator unit is used in the illumination optical system for illuminating an illumination target surface with light from a light source and comprises: a spatial light modulator with a plurality of optical elements arrayed in a predetermined plane and controlled individually; a spatial light modulation element which applies spatial light modulation to the incident light from the light source and which makes rays of intensity levels according to positions of the respective optical elements, incident on the plurality of optical elements; and a control unit which individually controls the plurality of optical elements on the basis of information about the intensity levels of the rays incident on the respective optical elements.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.

Abstract: The application of optical microstructures improve the quality of light available to the viewer of an optical display system, or any display which works on the concept of moving one surface into direct contact or close proximity of a light guide to extract light through frustrated total internal reflection. Certain ones of the microstructures can act to assist in overcoming stiction between the surface and the light guide.