Abstract: A flat panel display is provided. The flat panel display includes a display panel, a light source module and an optical film. The display panel has a light incident surface. The light source module including a light guide plate which has a light emergent surface is disposed parallel to the display panel. The light emergent surface is opposite to the light incident surface. A light emitted from the light source module is transmitted from the light emergent surface to the light incident surface. The optical film is disposed between the display panel and the light source module. The optical film has a first surface and a second surface which are opposite to each other. A plurality of platform-shaped optical structures are formed on the first surface while each of them has a flat top surface. A first transparent glue layer and a second transparent glue layer are respectively formed on the light incident surface and the light emergent surface.

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.

Abstract: We describe a method of fabricating an optical MEMS spatial light modulator (SLM). The method comprises providing an optical MEMS SLM wafer bearing multiple optical MEMS SLM devices and spin coating a glass wafer with an organic adhesive, in some preferred embodiments benzocyclobutene. The adhesive is patterned, preferably by uv lithography, to define multiple ring-shaped bond lines each sized to fit around one of the SLM devices, and the glass wafer is then bonded to the MEMS SLM wafer, preferably at a temperature of between 100° C. and 450° C., such that each of the ring-shaped bond lines encompasses a respective SLM device. A portion of the glass wafer adjacent an SLM device is then removed to reveal electrical connectors to the device and the devices are tested before dicing and packaging, to enable selective packaging of working devices.

Abstract: We describe a method of compensating for long-term mechanical property changes in an analogue optical MEMS SLM. In embodiments the SLM comprises multiple piston-type actuation optical phase modulating pixels each having a mirror with a variable height determined by an analogue voltage applied to a corresponding pixel electrode. The method comprises performing initial calibrations of the analogue displacement and pixel capacitance versus analogue voltage to determine a relationship between the pixel capacitance and analogue displacement, and then updating the displacement-voltage capacitance using the initial calibration data and a later calibration of the analogue voltage-capacitance characteristic of a pixel.

Abstract: We describe a phase modulating spatial light modulator (SLM). The SLM comprises a substrate bearing multiple SLM pixels, each of the SLM pixels comprising a MEMS (micro electromechanical system) optical phase modulating structure. The MEMS optical phase modulating structure comprises: a pixel electrode; a spring support structure around a perimeter of the pixel electrode; and a mirror spring supported by the spring support structure. The mirror spring comprises a mirror support and a plurality of mirror spring arms each extending between the mirror support and the spring support structure, and a mirror mounted on the mirror support. Each mirror spring arm has a spiral or serpentine shape. A voltage applied to the pixel electrode flexes the mirror spring and causes the mirror to translate perpendicularly to the substrate substantially without tilting.

Abstract: We describe an analogue optical MEMS spatial light modulator (SLM) comprising optical phase modulating MEMS pixels each with a pixel electrode and a mirror mounted on a spring such that said mirror is able to translate in a direction perpendicular to said substrate substantially without tilting, under the influence of a voltage applied to said pixel electrode. The CMOS substrate comprises an analogue pixel driver circuit for each of the pixels to apply an analogue voltage to the pixel electrode. The analogue pixel driver circuit comprises a pixel voltage input to receive an analogue voltage, a first and second sample/hold circuits coupled to the pixel voltage input, and a multiplexer having respective inputs coupled to said first and second sample/hold circuits, an output coupled to the pixel electrode, and a select line to control said multiplexer to selectively couple said first and second S/H circuits to the pixel electrode.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: This disclosure provides systems, methods, and apparatus for encapsulated electromechanical systems. In one aspect, a release path includes a release hole through an encapsulation layer. The release path exposes a portion of a first sacrificial layer that extends beyond a second sacrificial layer in a horizontal direction. This allows the first sacrificial layer and the second sacrificial layer to later be etched through the release path. The corresponding electromechanical system device includes a shell layer encapsulating a mechanical layer. A conformal layer seals a release hole that extends through a shell layer. A portion of the conformal layer blocks the opening of the release passage within the release hole. The release passage has substantially the same vertical height as a gap that defines the spacing between the mechanical layer and a substrate.

Abstract: An illumination system is disclosed that had a plurality of moveable reflective elements and associated actuators which may be configured to form an illumination mode. One or more of the actuators is arranged to move between first, second and third positions, and so move an associated moveable reflective element between first, second and third orientations, the first and second orientations being such that radiation reflected from the moveable reflective element forms part of the illumination mode, and the third orientation being such that radiation reflected from the moveable reflective element does not form part of the illumination mode.

Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

Abstract: Another embodiment has a method of driving a display device including an array of MEMS elements is disclosed. The MEMS elements are characterized by a preferred set of drive potential differences including preferred positive and preferred negative actuation potential differences, preferred positive and preferred negative hold potential differences, and a preferred release potential difference, where the preferred set of drive potential differences is symmetric about a voltage differing from 0V by an offset ?V. Another embodiment has a reduced set of supply voltages are used, while maintaining the charge balancing effects of applying potential differences of opposite polarity without visible artifacts.

Abstract: This disclosure provides systems, methods and apparatus for an electromechanical system. In one aspect, an electromechanical interferometric modulator system includes a substrate and a plurality of interferometric modulators (IMODs). At least two different IMOD types correspond to different reflected colors. Each IMOD has an optical stack, an absorber layer, a movable reflective layer, where the movable reflective layer has at least open and collapsed states, and an air gap defined between the movable reflective layer and the optical stack in the open state. The optical stacks define different optical path lengths for each of the different IMOD types by way of different transparent layer thickness and/or material, while the air gap has the same size when in the open state. The IMODs reflect different colors in the closed state and a common appearance in the open state. Use of two absorbers aids in defining the common appearance in the open state and can also improve color saturation.

Abstract: Systems and methods for generating, projecting or correlating thermal spectra use digital micro-mirror devices (DMDs) to controllably modulate input radiation such as long wave infrared light. An optical system for creating an output spectrum based upon an input light suitably includes a grating configured receive the input light and to spread the input light by wavelength into an input spectrum. A digital micro-mirror device (DMD) is configured to receive the input spectrum and to controllably activate mirrors in the DMD corresponding to selected wavelengths of the input light. Portions of the input light having selected wavelengths can be extracted from remaining portions of the input light for the output spectrum.

Abstract: An apparatus includes an irradiating unit, a spatial light modulator configured to modulate a wavefront of an electromagnetic wave, a device configured to receive a signal from a position of the medium by irradiating the electromagnetic wave, and a controller configured to control the spatial light modulator based on the received signal so that the irradiated electromagnetic wave with the modulated wavefront focuses on the position in the medium.

Abstract: A DND chip is disclosed. In one aspect, the chip includes a 2D DND array of DND elements logically arranged in rows and columns, and a DND driver architecture for actuating the DND elements. The DND driver has a set of first drive lines along the rows and a set of second drive lines along the columns, a set of first line drivers for each biasing one line from the set of first drive lines and a set of second line drivers for each biasing a line from the set of second drive lines. A plurality of second line drivers are spatially grouped together to serve a block of DND elements, and that plurality of second line drivers are spatially covered substantially completely by at least some DND elements of the block of DND elements. A holographic visualization system including the DND chip is provided.

Abstract: A DND device is disclosed. In one aspect, the device includes a nano-mirror (21), and an actuating module configured to move the nano-mirror in an upward and/or downward position. The actuating module has a cantilever mounted to a fixed structure, and at least one first electrode for moving the cantilever in an upward and/or downward position. Such DND devices may be arranged in a 2D array.

Abstract: Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.

Abstract: The invention is directed to novel methods and compositions useful for improving the performance of electrophoretic displays. The methods comprise adding a high absorbance dye or pigment, or conductive particles, or a conductive filler in the form of nanoparticles and having a volume resistivity of less than about 104 ohm cm, or a charge transport material into an electrode protecting layer of the display.

Abstract: A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

Abstract: A spatial light modulator includes an array of elements to modulate light in accordance with image data. The modulator has a display panel having first and second surfaces arranged adjacent to the array of elements such that the second surface is directly adjacent the array of elements to allow a viewer to view an image produced by modulation of light The modulator may also include a light source to provide light to the display panel and illumination dots on the first surface of the display panel to reflect light from the source to the array of elements.

Abstract: A micromirror and micromirror array may have a first stationary structure, and a mirror structure connected to a first pivoting structure that pivots the mirror structure relative to the first stationary structure about a first axis of rotation. A first comb drive pivots the mirror structure about the first axis of rotation. The first comb drive has a first portion attached to the stationary structure and a second portion attached to the mirror structure, the first portion being electrically isolated from the second portion. The micromirror or micromirror array may be mounted to a Through Silicon Via (TSV) wafer having electrical connections that extend between a first side and a second side of the TSV wafer such that the first and second portions of each comb drive are electrically connected to the electrical connections.

Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.

Abstract: An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.

Abstract: A structure such as an electronically deformable mirror contains a deformable membrane, an array of actuators located facing the membrane, each actuator being arranged to actuate local displacement of the membrane perpendicular to its surface. The actuators and the membrane are connected via an array of actuating connections. The actuating connections substantially transmit movement perpendicular to the second surface, but leave planar displacement and/or local rotation of the second surface substantially free. Preferably, the actuators contain an array of soft magnetic islands on a soft magnetic base plane, with actuator coils running around the islands and a system of sort magnetic walls on the base plane to separate the coils. The walls support a soft magnetic resilient surface that extend over of the islands and serve to drive the actuating connections.

Abstract: An actuator and method for MEMS array actuation is disclosed. In one embodiment, the actuator having a pixel coupled to a charge integration circuit, the pixel comprising a voltage bias, a variable gap capacitor, and a switch, all in series, the charge integration circuit configured to modulate charge on the variable gap capacitor during an actuation cycle. In one embodiment, the MEMS actuator having a unit cell with parasitic capacitance and coupled to a negative feedback sampling circuit, the unit cell comprising a variable gap capacitor, a voltage bias, a modulated current source, and a voltage-to-current converter, the negative feedback sampling circuit configured to receive an output current from the unit cell, convert the output current from the unit cell to a low voltage signal, sample the low voltage signal, and provide a feedback signal to the modulated current source to compensate for the parasitic capacitance in the unit cell.

Abstract: The present invention relates to a lighting device having a planer optical fiber and at least one light source device for illuminating a controllable spatial light modulator, wherein the optical fiber comprises a light-conducting core and a cover coating, and the light modulator comprises a pixel matrix, the light source device is disposed on the side of the optical fiber, and the light emitted by at least one light source of the light source device propagates laminarly in the optical fiber. The lighting unit according to the invention is characterized in that the planar optical fiber comprises a deflecting coating having a selective polarization function for laminarly decoupling and deflecting the evanescent wave field of the light propagating in the optical fiber, wherein the thickness of the cover coating reduces in the direction of light propagation.

Abstract: A programmable spectrum light source is disclosed. In one embodiment, the programmable light source comprises a light source, a spectrum separation system that splits the light into its constituent spectral components, a light modulator that modulates the spectral components according to a required spectral envelope and a light recombination system that recombines the shaped spectral components to produce light with a required spectrum.

Abstract: The present invention provides a transmissive Spatial Light Modulator with fast response speed and higher brightness using micro-windows having switching transistors on said window so that the fill factor of light transferring area can be maximized. Conventional systems have transistors out of windows which substantially reduce the area to pass incoming light, because transistors are usually opaque and block light transmission. Transmissive Spatial Light Modulator requires simpler and smaller optics than reflective Spatial Light Modulator.

Abstract: The present disclosure provides systems, methods, and apparatus to facilitate edge routing among a plurality of microelectromechanical devices arranged in a mosaic or array. In one aspect, the disclosed implementations modify the construction of a movable layer, such that portions of the movable layer, in addition to serving their original functions, also facilitate routing from a single edge of the device. In some implementations, portions of the movable layer are re-oriented to achieve edge routing, while in others, the orientation remains the same but electrical connections are altered.

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Abstract: An interferometric modulator (“IMOD”) display utilizes ambient light and incorporates touch sensing without reducing the amount of ambient light that reaches the MEMS modulators, and without introducing any optical distortion or loss of performance. Electrodes for touch sensing are located at a back glass of the inteferometric display, and are used in conjunction with electrodes whose primary function is to activate the pixels of the MEMS display, in order to sense a touch. The touch deflects the IMOD layers and is sensed through the various display layers at the rear of the display.

Abstract: To provide a light controller allowing for an enhanced positional precision in assembly of a spatial light modulator and a random phase mask, and to provide a light controller adapted to prevent positional deviations between a spatial light modulator and a random phase mask against impacts or vibrations, allowing for an enhanced operational integrity, a light controller includes a substrate, a light modulation unit disposed on the substrate and configured for modulation of light, and a random phase mask stacked on the light modulation unit on an optical axis of the light modulation unit.

Abstract: As for the method that modulates optical path length by the position of reflection plane of light, the movement of the position-movable plate in micrometer-size electromechanical device can be restricted by the stopping plates placed above and below the edge of the position-movable plate, the distance between the stopping plates may be set depending on the desired amount in modulating the optical path length. The voltage differential in the device is operable to create electrostatic attraction, to perform transition movement of the position-movable plate between the stopping plates, the light reflector connected to the position-movable plate takes at least two states in positioning, enabling to modulate the optical path length of reflected light by the light reflector with high reproducibility and high accuracy.

Abstract: An apparatus includes a substrate having a metallic surface, a structure, and a dielectric object facing the metallic top surface. The structure is configured to optically produce surface plasmon polaritons that propagate on the metallic surface. The dielectric object is controllable to adjust values of the dielectric constant at an array of different positions along and near to the metallic surface.

Abstract: A digital micromirror device (DMD), a method of manufacturing the DMD and an optical processor incorporating a DMD. In one embodiment, the DMD includes: (1) a first group of micromirrors having a first modulation structure based on a first wavelength of light and a second group of micromirrors having a second modulation structure based on a second wavelength of light, the second wavelength differing from the first wavelength.

Abstract: A package frame for use in packaging microelectromechanical devices and/or spatial light modulators comprises a frame, a stiffener, and a heat dissipater.

Abstract: A micromirror device includes an elastic hinge for supporting a mirror on a substrate, and an address electrode for deflecting the mirror. The device further includes a protective layer and an oriented monolayer laid to cover a stopper also functioning as an address electrode provided below the mirror and between the mirror and the substrate.

Abstract: The present disclosure provides systems, methods and apparatus for providing interferometric modulator displays using flexible films. In one aspect, a method of forming an interferometric modulator device includes providing a conductive element, depositing a reflective layer over at least a portion of the conductive element, and depositing a plurality of spacing elements over the conductive element. The absorber layer and the substrate are provided over the conductive element such that the absorber layer is disposed between the substrate and the spacing elements.

Abstract: A package structure and method of packaging for an interferometric modulator. A transparent substrate having an interferometric modulator formed thereon is provided. A backplane is joined to the transparent substrate with a seal where the interferometric modulator is exposed to the surrounding environment through an opening in either the backplane or the seal. The opening is sealed after the transparent substrate and backplane are joined and after any desired desiccant, release material, and/or self-aligning monolayer is introduced into the package structure.

Abstract: An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

Abstract: An optical device for modulating the intensity of light from an interferometric reflector. In one embodiment, the optical device can include an optical stack having a reflective layer and a partially reflective, partially transmissive layer for reflecting light. The optical device can also include a fluid cell comprising an absorptive fluid and a transmissive fluid. The optical device can also include a mechanism for controlling the portion of the reflector which is shadowed by the absorptive fluid.

Abstract: Anti-stiction systems may include one or more anti-stiction electrodes driven to provide an electrical force that counteracts a stiction force acting upon a moveable portion of an interferometric modulator. The anti-stiction electrode(s) may be disposed on a back glass or on another such substrate. The anti-stiction electrode(s) may be configured to apply an electrical force to substantially all of the interferometric modulators in a display device at once and/or may be configured to apply an electrical force only to a selected area. In some embodiments, the sum of an anti-stiction electrical force and a mechanical restoring force of a moveable part of an interferometric modulator is sufficient to counteract a stiction force.

Abstract: A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure.

Abstract: In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that reduce the field-of-view of the display. These structures may comprise, for example, baffles or non-imaging optical elements such as compound parabolic collectors. The baffles may comprise a plurality of vertically aligned surfaces arranged, e.g., in a grid. In certain preferred embodiments these baffles are opaque or reflective. These vertical surfaces, therefore, can substantially block light from exiting the interferometric display device in a substantially non-perpendicular direction. These vertical surfaces may, however, permit light directed in a substantially vertical direction to exit the display. The non-imaging optical elements, e.g., compound parabolic collectors, redirect light from large incident angles into more normal angles towards the display. As a result, the light reflected by the display to the user is also at a more normal angle.

Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.

Abstract: Embodiments of the invention are directed to a new type of phase screen, i.e., an opto-electronic device that can convert a distorted incoming optical wavefront into a plane wave or, conversely, transform a plane wave into a prescribed varying output wavefront. The basic concept involves novel binary all-digital MEMS interferometer configurations that can be used to create controlled and arbitrary optical wavefront using only 0,1 amplitude changes followed by differential propagation distances to convert these amplitude variations into controllable and/or continuous phase variations. Clustered pixel notions, such as Floyd-Steinberg, Stucki or other algorithms useful in digital half-tone printing, are simultaneously employed to create controllable grey-level variations as well as continuous phase variations. Desired grey-levels can be obtained wherein each pixel is formed by, e.g., a 3×3 or 5×5 cluster of mirrors.

Abstract: An optical device compensates for decreased transmission of light caused by gaps between mirrors of a MEMS array. The optical device employs MEMS mirrors having non-reflecting regions on them disposed such that reflecting regions of the MEMS mirrors have substantially the same optical throughput, or an additional optical element having increased transmission at those spatial positions where light impinging on the gaps passes through. Alternatively, the optical device may employ a filter having spectral transmission characteristic with increased transmission at those wavelengths of dispersed light that impinge on the gaps.

Abstract: At least some subpixels in an interferometric modulator display are formed in a triangular shape. Such triangular subpixels may be formed and/or addressed in a variety of manners. At least some individual triangular subpixels may be separately addressable. However, a plurality of triangular subpixels may be addressable as a group, e.g., as a group of 2, 3, 4 or more. A single pixel may include varying numbers of triangular subpixels. For example, a single pixel may include 3, 6, 9, 12, 15, 18, 21 or some other number of triangular subpixels. Alternatively, a single pixel may include 4, 8, 12, 16, 20, or some other number of triangular subpixels. A single pixel may include triangular subpixels that are configured to be separately addressable and/or triangular subpixels are configured to be addressable as a group.

Abstract: Interferometric modulators include a movable mirror that is actuated by voltage applied to a plurality of electrodes relative to at least one other electrode, to define a cavity relative to a partially reflective mirror formed by a top plate. The depth of the cavity determines a bandwidth of light that is modulated by internal reflections within the cavity and which interferes with light that is reflected from a partially reflective mirror on the top plate, producing a desired reflected color of light for the modulator. Variations in manufacturing and material characteristics can cause the movable mirror to tilt relative to the partially reflective mirror, which degrades the modulation accuracy. To compensate, different voltages can be applied to the plurality of electrodes. The voltage can be determined at time of manufacture and stored in non-volatile memory, for use when the modulator is actuated during use.