Abstract: A method of forming a carbon nano-material layer may involve a cyclic deposition technique. In the method, a chemisorption layer or a chemical vapor deposition layer may be formed on a substrate. Impurities may be removed from the chemisorption layer or the chemical vapor deposition layer to form a carbon atoms layer on the substrate. More than one carbon atoms layer may be formed by repeating the method.

Abstract: Novel methods and apparatus for continuous production of aligned carbon nanotubes are disclosed. In one aspect, the method comprises dispersion of a metal catalyst in a liquid hydrocarbon to form a feed solution, and volatilizing the feed solution in a reactor through which a substrate is continuously passed to allow growth of nanotubes thereon. In another aspect, the apparatus comprises a reactor, a tube-within-a-tube injector, and a conveyor for passing a substrate through the reactor. The present invention further discloses a method for restricting the external diameter of carbon nanotubes produced thereby comprising passing the feed solution through injector tubing of a specified diameter, followed by passing the feed solution through an inert, porous medium. The method and apparatus of this invention provide a means for producing aligned carbon nanotubes having a defined external diameter, suitable for large scale production in an industrial setting.

Abstract: A method for carbon nanotube synthesis can include providing in a growth chamber, a substrate in close proximity with a surface of a first plate having a catalyst. The method can also include heating the growth chamber to a temperature sufficient to cause transfer of catalytic particles from the first plate to the substrate. The method can also include growing carbon nanotubes on the substrate by directing feed gas to the substrate.

Abstract: A carbon nanotube array includes a plurality of carbon nanotubes and at least one line mark formed on the carbon nanotubes. The carbon nanotubes have a top end and a bottom end. The at least one line mark is formed on the carbon nanotubes. The at least one line mark transversely extends across the carbon nanotubes, and is located between the top end and the bottom end. The at least one line mark is spaced from the top and bottom ends.

Abstract: A process for producing a wear-resistant coating and to a wear-resistant coating on predetermined surfaces (2) of machine or engine parts (1) consisting of a sintered material which are exposed to frictional wear, for fuel feed units in particular, comprising at least one metal-free amorphous hydrocarbon layer (5) with sp2- and sp3-hybridized carbon applied to the predetermined surface (2) of the machine or engine part (I) for reducing friction and increasing the wear resistance of the predetermined surface (2) of the machine or engine part (1), and at least one intermediate layer of a metal-containing hydrocarbon layer formed between the predetermined surface of the machine or engine part and the amorphous hydrocarbon layer wherein the metal is a combination of W, Ti, Hf and Ge.

Abstract: This apparatus and method facilitate the synthesis of a single-wall carbon nanotube array. The apparatus includes a reactor, a local heating device, a gaseous carbon supplier, and a reactant gas supplier. The reactor is configured for receiving a catalyst in a reaction zone thereof. The local heating device is configured for selectively heating the reaction zone and/or the catalyst received thereat. The gaseous carbon supplier is configured for introducing gaseous carbon into the reactor from an upstream position of the reaction zone. The reactant gas supplier is configured for introducing a reactant gas containing a carbon source gas into the reactor. A densely aligned, single-wall carbon nanotube array can be achieved due to the proximity to the catalyst of the heating device and due to the gaseous carbon supplier.

Abstract: An apparatus having at least one carbon nanotube growth zone having a substrate inlet sized to allow a spoolable length substrate to pass therethrough. The apparatus also has at least one heater in thermal communication with the carbon nanotube growth zone. The apparatus has at least one feed gas inlet in fluid communication with the carbon nanotube growth zone. The apparatus is open to an atmospheric environment during operation.

Abstract: A method for synthesizing single-wall carbon nanotubes (SWNTs) generally includes the steps of: providing a substrate having an upper portion comprised of indium tin oxide; forming an aluminum layer on the upper portion of the substrate; forming a catalyst layer on the aluminum layer to obtain a treated substrate; annealing the treated substrate so as to transform the catalyst layer into a plurality of oxidized catalyst particles on the substrate; and growing a plurality of single-wall carbon nanotubes on the treated substrate using a chemical vapor deposition process.

Abstract: An apparatus having at least one carbon nanotube growth zone having a substrate inlet sized to allow a spoolable length substrate to pass therethrough. The apparatus also has at least one heater in thermal communication with the carbon nanotube growth zone. The apparatus has at least one feed gas inlet in fluid communication with the carbon nanotube growth zone. The apparatus is open to the atmosphere during operation.

Abstract: There are provided a method of forming carbon nano tubes, a field emission display device having the carbon nanotubes formed using the method, and a method of manufacturing the field emission display device. The method of forming carbon nanotubes includes forming a catalytic metal layer on a substrate, forming an insulation layer on the catalytic metal layer, and forming carbon nanotubes on the insulation layer.

Abstract: A method of growing a carbon nanotube includes the step of impinging a beam of carbon-containing molecules onto a substrate to grow at least one carbon nanotube on the catalyst surface.

Abstract: Disclosed are structures formed as bulk support media having carbon nanotubes formed therewith. The bulk support media may comprise fibers or particles and the fibers or particles may be formed from such materials as quartz, carbon, or activated carbon. Metal catalyst species are formed adjacent the surfaces of the bulk support material, and carbon nanotubes are grown adjacent the surfaces of the metal catalyst species. Methods employ metal salt solutions that may comprise iron salts such as iron chloride, aluminum salts such as aluminum chloride, or nickel salts such as nickel chloride. Carbon nanotubes may be separated from the carbon-based bulk support media and the metal catalyst species by using concentrated acids to oxidize the carbon-based bulk support media and the metal catalyst species.

Abstract: Holes in semiconductor processing reactor parts are sized to facilitate deposition of protective coatings, such as by chemical vapor deposition at atmospheric pressure. In some embodiments, the holes each have a flow constriction that narrows the holes in one part and that also divides the holes into one or more other portions. In some embodiments, the aspect ratios of the one or more other portions are about 15:1 or less, or about 7:1 or less, and have a cylindrical or conical cross-sectional shape. The holes are coated with a protective coating, such as a silicon carbide coating, by chemical vapor deposition, including chemical vapor deposition at atmospheric pressure.

Abstract: A method for forming a silicon dioxide cap layer for a carbon hard mask layer for patterning of polysilicon line features having critical dimensions of 50 nm and less is provided. To this end, a low temperature plasma enhanced CVD process is used in which the deposition rate is maintained low to provide improved controllability of the layer thickness and, thus, of the optical characteristics of the silicon dioxide layer.

Abstract: A method for manufacturing a carbon nanotube field emission cathode includes the steps of: providing a substrate (110) with a metallic layer (130) thereon; defining holes (131) in the metallic layer; oxidizing the metallic layer to form a metallic oxide layer (132) thereon; removing portions of the metallic oxide layer in the holes so as to expose corresponding portions of the metallic layer; forming a metal-salt catalyst layer (580) on the exposed portions of the metallic layer in the holes; and growing carbon nanotubes (690) on the substrate in the holes.

Abstract: An apparatus and a method of producing a vapor-grown carbon structure capable of obtaining a vapor-grown carbon structure with a markedly low production cost are provided. A vapor-grown carbon structure producing apparatus 1 has a screw feeder 4 for supplying a biomass raw material into a furnace 2, a thermal decomposition zone 5 having a first high-temperature air introducing nozzle 6 for thermally decomposing the supplied raw material at a thermal decomposition temperature of 500 to 900° C., a combustion zone 7 having a second high-temperature air introducing nozzle 8 for combusting a thermal decomposition product at a reaction temperature of 900 to 1300° C., and a charbed zone 9 for holding a combustion residue having passed through the combustion zone 7 and generating a carbon radical in a decomposition gas, to generate a vapor-grown carbon structure.

Abstract: The present invention is a catalytic chemical vapor deposition method and apparatus for synthesizing carbon nanotubes and/or carbon nanofibers (CNTs) on a substrate by selectively heating a catalyst for CNT synthesis on or near the surface of the substrate. Selective heating of the catalyst is achieved using an exothermic oxidation reaction on the surface of the catalyst. Selective heating of the catalyst prevents heating of the substrate and enables the synthesis of CNTs on temperature sensitive substrates.

Abstract: A method for fabricating a super-aligned carbon nanotube array includes the following steps: (1) providing a flat and smooth substrate (11); (2) depositing a catalyst layer (12) on the substrate at a rate of less than about 5 nm/s; (3) annealing the catalyst layer at atmosphere; (4) positioning the substrate with the catalyst layer into a furnace; (5) heating the furnace up to a predetermined temperature; and (6) supplying a reaction gas into the furnace, thereby growing a number of carbon nanotubes (22) on the substrate, via the catalyst layer, such that the carbon nanotube array is formed on the substrate.

Abstract: Developed is high-efficiency synthesis method and apparatus capable of promoting the initial growth of carbon nanostructure by eliminating the initial fluctuation time and rising time in raw gas flow quantity. A high-efficiency synthesis method of carbon nanostructure according to the present invention is a high-efficiency synthesis method of carbon nanostructure, the method comprising: bringing raw material gas and a catalyst into contact with each other under reactive conditions so as to produce a carbon nanostructure, wherein: the initiation of contact of the raw material gas with the catalyst is carried out instantaneously. Reaction conditions such as temperature and raw material gas concentration are set so as to meet those for catalyst growth, and under the reaction conditions, the initiation of contact of raw material gas G with catalyst 6 is carried out instantaneously.

Abstract: A method for synthesizing carbon nanotubes (CNT) comprises the steps of providing a growth chamber, the growth chamber being heated to a first temperature sufficiently high to facilitate a growth of carbon nanotubes; and passing a substrate through the growth chamber; and introducing a feed gas into the growth chamber pre-heated to a second temperature sufficient to dissociate at least some of the feed gas into at least free carbon radicals to thereby initiate formation of carbon nanotubes onto the substrate.

Abstract: The present invention relates to a method of manufacturing a carbon nanostructure for growing crystalline carbon by vapor deposition from a crystal growth surface of a catalytic base including a catalytic material, and in particular, to a method of manufacturing a carbon nanostructure where at least two gases including a feedstock gas are brought into contact with the catalytic base simultaneously. Preferably, the at least two gases are constituted by at least one feedstock gas and at least one carrier gas. Preferably, the carrier gas is brought into contact with the crystal growth surface, and the feedstock gas is brought into contact with at least a part of a region except for the crystal growth surface with which the carrier gas has been brought into contact. Preferably, the material gas contains an ion, and further preferably, it contains a carbon ion.

Abstract: A method for making a carbon nanotube-based device is provided. A substrate having a shadow mask layer to define an unmasked surface area thereon is provided. A sputter source is disposed on the shadow mask layer. The sputter source is configured for supplying a catalyst material and depositing the catalyst material onto the substrate. A catalyst layer including at least one catalyst block is formed on the substrate. A thickness of the at least one catalyst block is gradually decreased from one end to another opposite end thereof. The at least one catalyst block has a region with a thickness proximal or equal to an optimum thickness. A carbon source gas is introduced. At least one carbon nanotube array extending from the catalyst layer using a chemical vapor deposition process is formed. The at least one carbon nanotube array is arc-shaped, and bend in a direction of deviating from the region.

Abstract: The invention relates to a coated diamond comprising a diamond substrate; a primary carbided layer of a carbide forming element; a secondary layer of a high melting point metal selected from W, Mo, Cr, Ni, Ta, Au, Pt, Pd or any combination or alloy thereof, the secondary layer being substantially free of carbide forming element from the primary layer; and an overcoat of Ag, Ni, Cu, Au, Pd, Pt, Rh, Os, Tr, Re, any combination or alloy thereof, the metal of the secondary layer being different to the metal of the overcoat. The invention further relates to methods for producing such coated diamonds and abrasive-containing tools including such coated diamonds.

Abstract: An objective is to provide a film formation method with which a layer having reduced defects, a die obtained by the film formation method, and a method of manufacturing the die. Free carbons increase in the case of reducing hydrogen gas as a carrier gas, so that concave portions are generated and increased during the molding transfer surface process. It was commonly known that hydrogen gas employed for the thermal CVD was set to 2 moles, but it was found out that generation of concave portions was possible to be largely inhibited by setting hydrogen gas to at least 3 moles. However, a level of up to 8 moles is preferable in view of practical use, since dilution of the total raw material gas causes a decline of reaction speed in the case of too much increase of hydrogen gas, resulting in the low speed of film formation.

Abstract: The present invention relates to a catalyst composition for the synthesis of thin multi-walled carbon nanotube (MWCNT) and a method for manufacturing a catalyst composition. More particularly, this invention relates to a multi-component metal catalyst composition comprising i) main catalyst of Fe and Al, ii) inactive support of Mg and iii) optional co-catalyst at least one selected from Co, Ni, Cr, Mn, Mo, W, V, Sn, or Cu. Further, the present invention affords thin multi-walled carbon nanotube having 5˜20 nm of diameter and 100˜10,000 of aspect ratio in a high yield.

Abstract: Polyester compositions are disclosed that include polyester polymers or copolymers having incorporated therein titanium nitride particles and carbon-coated iron particles to improve the reheat properties of the compositions. The compositions may also exhibit reduced yellowness, and improved resistance to the effects of UV light. Processes for making such compositions are also disclosed. The particles may be incorporated in the polyester by melt compounding, or may be added at any stage of the polymerization, such as during the melt-phase of the polymerization. A range of particle sizes may be used, as well as a range of particle size distributions. The polyester compositions are suitable for use in packaging made from processes in which a reheat step is desirable, or decreased yellowness is desired, or increased resistance to the effects of ultraviolet light is desired, or any combination of the foregoing.

Abstract: A method for making a carbon nanotube-based device is provided. A substrate having a shadow mask layer to define an unmasked surface area thereon is provided. A sputter source is disposed on the shadow mask layer. The sputter source is configured for supplying a catalyst material and depositing the catalyst material onto the substrate. A catalyst layer including at least one catalyst block is formed on the substrate. A thickness of the at least one catalyst block is gradually decreased from one end to another opposite end thereof. The at least one catalyst block has a region with a thickness proximal or equal to an optimum thickness. A carbon source gas is introduced. At least one carbon nanotube array extending from the catalyst layer using a chemical vapor deposition process is formed. The at least one carbon nanotube array is arc-shaped, and bend in a direction of deviating from the region.

Abstract: A process of a preparing transparent conductive carbon nanotube (CNT) film, the carbon nanotube film prepared by the process, and carbon nanotube elements including the carbon nanotube film are provided. The carbon nanotube film has a higher transparency and much lower sheet resistance compared with the carbon nanotube film obtained by a conventional filtration process.

Abstract: An apparatus of the present invention for producing an aligned carbon-nanotube aggregate is an apparatus for producing an aligned carbon-nanotube aggregate by synthesizing the aligned carbon-nanotube aggregate on a base material having a catalyst on a surface thereof, the apparatus including: a formation unit that processes a formation step of causing an environment surrounding the catalyst to be an environment of a reducing gas and heating at least either the catalyst or the reducing gas; a growth unit that processes a growth step of synthesizing the aligned carbon-nanotube aggregate by causing the environment surrounding the catalyst to be an environment of a raw material gas and by heating at least either the catalyst or the raw material gas; and a transfer unit that transfers the base material at least from the formation unit to the growth unit.

Abstract: A method of making a membrane electrode assembly (MEA) having an anode and a cathode and a proton conductive membrane there between. A bundle of longitudinally aligned carbon nanotubes with a catalytically active transition metal incorporated in the nanotubes forms at least one portion of the MEA and is in contact with the membrane. A combination selected from one or more of a hydrocarbon and an organometallic compound containing an catalytically active transition metal and a nitrogen containing compound and an inert gas and a reducing gas is introduced into a first reaction zone maintained at a first reaction temperature for a time sufficient to vaporize material therein. The vaporized material is transmitted to a second reaction zone maintained at a second reaction temperature for a time sufficient to grow longitudinally aligned carbon nanotubes with a catalytically active transition metal incorporated throughout the nanotubes.

Abstract: A coating includes a thin film which is intended to protect a corrodible part against corrosion and, to some extent, against wear and friction. The coating essentially includes a composition containing silicon, carbon, hydrogen and nitrogen such that: the atomic hydrogen concentration, measured using the ERDA technique, is 20 ±5 atoms %; the atomic silicon concentration, measured using the Rutherford backscattering (RBS) technique, is between 15 and 28 atoms %; the ratio of the atomic concentrations of nitrogen and carbon (N/C) is greater than 0.9; and the hardness of the material is less than or equal to 2100 daN/mm2.

Abstract: An energy storage device structure comprises a first electrode layer, an electrolyte layer and a second electrode layer. At least one of the electrode layers comprise a metallic base layer and a layer of carbon nanotubes grown on the base layer, the carbon nanotube layer being arranged to face the electrolyte layer. The structure has much larger width and length than thickness, so it is rolled up or folded and then hermetically sealed to form an energy storage unit. The layer of carbon nanotubes is grown on the metallic base layer by a chemical vapor deposition process at a temperature no higher than 550° C. The carbon nanotubes in the carbon nanotube layer are at least partially aligned in a direction that is perpendicular to the surface of the metallic base layer.

Abstract: The invention relates to a nanoparticle growing mat (30), a method of manufacturing the mat, and a method for the continuous production of organized nanotubes using the mat. The mat (30) comprising a substrate including carbon, on which is deposited in a predetermined pattern of nanosized catalytic particles whose pattern produces nanotubes in a highly ordered form. The mat (30) is activated in the presence of a carrier gas, by passing current through the mat (30) which raises the temperature to the level where, nanotubes are: formed; gathered; withdrawn as nanotube bundles (42); and collected.

Abstract: The present invention relates to nanostructured composites comprising a nanotube network which is at least partially embedded within a carbon layer. The present invention particularly relates to conducting nanostructured composites for use in the fields of energy conversion, energy storage and also the biomedical field. The present invention also relates to a process via CVD of carbon onto a catalyst layer on a substrate. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.

Abstract: A thermal interface material includes a carbon nanotube array having a plurality of carbon nanotubes, a matrix, and a plurality of heat conductive particles. The carbon nanotube array includes a first end and a second end. The first and second ends are arranged along longitudinal axes of the carbon nanotubes. The matrix is formed on at least one of the first and second ends of the carbon nanotube array. The heat conductive particles are dispersed in the matrix, and the heat conductive particles are thermally coupled to the carbon nanotubes.

Abstract: A beam-like material 1, 11 is formed of a CNT aggregate 25 comprising a plurality of CNTs aligned in the same direction and having a weight density of from 0.1 to 1.5 g/cm3, thereby providing a beam-like material comprising a CNT aggregate having anisotropy and shape restorability and capable of being formed to a desired shape at a desired position.

Abstract: A carbon nanotube array includes a plurality of carbon nanotubes. Each of the carbon nanotubes has a plurality of line marks formed on each of the carbon nanotubes. The line marks transversely extend across the carbon nanotubes. The line marks of each of the carbon nanotubes are spaced apart from each other.

Abstract: A method of depositing organic material is provided. A carrier gas carrying an organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas. In some embodiments, the background pressure is at least about 10e-3 Torr, more preferably about 0.1 Torr, more preferably about 1 Torr, more preferably about 10 Torr, more preferably about 100 Torr, and most preferably about 760 Torr. A device is also provided. The device includes a nozzle, which further includes a nozzle tube having a first exhaust aperture and a first gas inlet; and a jacket surrounding the nozzle tube, the jacket having a second exhaust aperture and a second gas inlet.

Abstract: A method for making a carbon nanotube-based device is provided. A substrate with a shadow mask layer formed thereon is provided, to define an unmasked surface area on the substrate. The substrate is rotated around an axis. A catalyst layer including at least one catalyst block is formed on the unmasked surface area of the substrate. A thickness of the at least one catalyst block is decreased gradually from a first end thereof to an opposite second end thereof, and somewhere the at least one catalyst block having a region with a thickness proximal or equal to an optimum thickness at which carbon nanotubes growing fastest. A carbon source gas is introduced. At least one carbon nanotube array extending from the catalyst layer using a chemical vapor deposition process is formed. The at least one carbon nanotube array is arc-shaped, and bend in a direction of deviating from the region.

Abstract: A method for forming a patterned array of carbon nanotubes (11) includes the steps of: forming an array of carbon nanotubes on a substrate (10); imprinting the array of carbon nanotubes using a molding device (12) with a predetermined pattern; and removing the molding device, thereby leaving a patterned array of carbon nanotubes (13). The method can effectively reduce or even eliminate any shielding effect between adjacent carbon nanotubes, and is simple to implement. The field emission performance of the patterned array of carbon nanotubes is improved.

Abstract: Polyester compositions are disclosed that include polyester polymers or copolymers having incorporated therein carbon-coated iron particles that improve the reheat properties of the compositions. Processes for making such compositions are also disclosed. The carbon-coated iron particles may be incorporated in the polyester by melt compounding, or may be added at any stage of the polymerization, such as during the melt-phase of the polymerization. A range of particle sizes may be used, as well as a range of particle size distributions. The polyester compositions are suitable for use in packaging made from processes in which a reheat step is desirable.

Abstract: The present invention relates to a method to rationally coat cutting tool inserts comprising a substrate and a coating deposited using a CVD and/or MTCVD method. According to the invention the inserts are positioned on a net with a surface roughness, Ra, of the wires between 2 and 50 ?m.

Abstract: A coating for the protection of optical surfaces exposed to a high energy erosive plasma. A gas that can be decomposed by the high energy plasma, such as the xenon plasma used for extreme ultraviolet lithography (EUVL), is injected into the EUVL machine. The decomposition products coat the optical surfaces with a protective coating maintained at less than about 100 ? thick by periodic injections of the gas. Gases that can be used include hydrocarbon gases, particularly methane, PH3 and H2S. The use of PH3 and H2S is particularly advantageous since films of the plasma-induced decomposition products S and P cannot grow to greater than 10 ? thick in a vacuum atmosphere such as found in an EUVL machine.

Abstract: Systems and methods for creating carbon nanotubes are disclosed that comprise a growing a nanotube on a tri-layer material. This tri-layer material may comprise a catalyst and at least one layer of Ti. This tri-layer material may be exposed to a technique that is used to grow a nanotube on a material such as a deposition technique.

Abstract: The invention discloses a method for fabricating a carbon nanotube, and the method comprises the following steps: providing a substrate; forming a catalyst layer on the substrate; forming a porous capping layer on the catalyst layer to finish a wafer; forming the carbon nanotube on the wafer. By the porous capping layer, the well-aligned carbon nanotube can grow on the wafer through thermal CVD.

Abstract: Systems and methods for synthesizing ultra long carbon nanotubes comprising one or more metal underlayer platforms that allow the nanotube to grow freely suspended from the substrate. A modified gas-flow injector is used to reduce the gas flow turbulence during nanotube growth. Nanotube electrodes are formed by growing arrays of aligned nanotubes between two metal underlayer platforms.

Abstract: A method of forming a coated body composed of small columnar crystals coated using the MTCVD process. Wear resistance of the prior-art Ti(C,N) layers can be considerably enhanced by optimising the grain size and microstructure. Considerably better wear resistance in, for example in many carbon steels, can be obtained by modifying the grain size and morphology of prior art MTCVD Ti(C,N) coatings. The method includes a step of doping by using CO, CO2, ZrCl4, HfCl4 and AlCl3 or combinations of these to ensure the control of the grain size and shape. Doping has to be controlled carefully in order to maintain the columnar structure and also in order to avoid nanograined structures and oxidisation. The preferred grain size should be in the sub-micron region with the grain width of from about 30 to about 300 nm. The length to width ratio should be more than 5, preferably more than 10 and the coating should exhibit a strong preferred growth orientation along 422 or 331. The XRD line broadening should be weak.

Abstract: An isotope-doped carbon nanotube (40) includes at least two kinds of carbon nanotube segments, each kind of carbon nanotube segment having a unique carbon isotope. The at least two kinds of carbon nanotube segments are arranged along a longitudinal direction of the carbon nanotube alternately or non-alternately. The carbon isotope is selected from the group consisting of a carbon-12 isotope, a carbon-13 isotope and a carbon-14 isotope. Three preferred methods employ different single isotope sources to form isotope-doped carbon nanotubes. In a chemical vapor deposition method, different isotope source gases are alternately or non-alternately introduced. In an arc discharge method, a power source is alternately or non-alternately switched between different isotope anodes. In a laser ablation method, a laser is alternately or non-alternately focused on different isotope targets.

Abstract: An amorphous carbon film forming method is performed by using a parallel plate type plasma CVD apparatus in which an upper electrode and a lower electrode are installed within a processing chamber, and the method includes: disposing a substrate on the lower electrode; supplying carbon monoxide and an inert gas into the processing chamber; decomposing the carbon monoxide by applying a high frequency power to at least the upper electrode and generating plasma; and depositing amorphous carbon on the substrate. It is desirable that the upper electrode is a carbon electrode.

Abstract: A cutting tool and process for the formation thereof. The cutting tool comprises a basic body (1) presenting an active end portion (2) coated with a diamond film obtained by the CVD growth technique, having superficial accidents (10) that are arranged and dimensioned to produce a substantial increase of the seating area for the diamond film and an increased degree of mechanical interference with the latter. This invention refers to the cutting tool above and to the process of obtaining said tool, to be generally used for cutting, drilling, abrading and trimming, and particularly to be coupled to ultrasonic systems.