And Additional Electrical Device On Insulating Substrate Or Layer Patents (Class 438/155)
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Publication number: 20140183638Abstract: Methodology enabling selectively connecting fin structures using a segmented trench salicide layer, and the resulting device are disclosed. Embodiments include: providing on a substrate at least one gate structure; providing first and second fin structures in a vertical direction intersecting with the at least one gate structure; and providing a first segment of a salicide layer, the first segment being formed along a horizontal direction and being connected with the second fin structure and separated from the first fin structure.Type: ApplicationFiled: December 28, 2012Publication date: July 3, 2014Applicant: GLOBALFOUNDRIES Inc.Inventors: Mahbub RASHED, Srikanth Samavedam, David Doman, Navneet Jain, Subramani Kengeri, Suresh Venkatesan
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Patent number: 8766270Abstract: A pixel structure is provided. A first insulating pattern is on the first polysilicon pattern. A second insulating pattern is on the second polysilicon pattern and separated from the first insulating pattern. An insulating layer covers the first and the second insulating patterns. A first gate and a second gate are on the insulating layer. A first covering layer covers the first and the second gates. A first source metal layer and a first drain metal layer are on the first covering layer and electrically connected to a first source region and a first drain region. A second source metal layer and a second drain metal layer are on the first covering layer and electrically connected to a second source region and a second drain region. A pixel electrode is electrically connected to the first drain metal layer.Type: GrantFiled: January 11, 2011Date of Patent: July 1, 2014Assignee: Au Optronics CorporationInventors: Hsiu-Chun Hsieh, Yi-Wei Chen, Ta-Wei Chiu, Chung-Tao Chen
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Patent number: 8765535Abstract: In the method for manufacturing a semiconductor device of the invention, a bonding layer is formed over a substrate, an insulating film and a storage capacitor portion lower electrode are formed over the bonding layer, a single crystal silicon layer is formed over the insulating film, a storage capacitor portion insulating film is formed over the storage capacitor portion lower electrode, a wiring is formed over the storage capacitor portion insulating film, a channel forming region and a low concentration impurity region are formed over the single crystal silicon layer, and a gate insulating film and a gate electrode are formed over the single crystal silicon layer. The storage capacitor portion insulating film is formed by depositing a YSZ film with a single crystal silicon layer used as a base film, whereby the permittivity increases and thus the leakage current from the storage capacitor portion is suppressed.Type: GrantFiled: October 21, 2011Date of Patent: July 1, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Kengo Akimoto
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Patent number: 8765536Abstract: A method of forming an integrated photonic semiconductor structure having a photonic device and a CMOS device may include depositing a first silicon nitride layer having a first stress property over the photonic device, depositing an oxide layer having a stress property over the deposited first silicon nitride layer, and depositing a second silicon nitride layer having a second stress property over the oxide layer. The deposited first silicon nitride layer, the oxide layer, and the second silicon nitride layer encapsulate the photonic device.Type: GrantFiled: September 28, 2012Date of Patent: July 1, 2014Assignee: International Business Machines CorporationInventors: Solomon Assefa, Tymon Barwicz, Swetha Kamlapurkar, Marwan H. Khater, Steven M. Shank, Yurii A. Vlasov
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Patent number: 8766269Abstract: It is an object to provide a flexible light-emitting device with high reliability in a simple way. Further, it is an object to provide an electronic device or a lighting device each mounted with the light-emitting device. A light-emitting device with high reliability can be obtained with the use of a light-emitting device having the following structure: an element portion including a light-emitting element is interposed between a substrate having flexibility and a light-transmitting property with respect to visible light and a metal substrate; and insulating layers provided over and under the element portion are in contact with each other in the outer periphery of the element portion to seal the element portion. Further, by mounting an electronic device or a lighting device with a light-emitting device having such a structure, an electronic device or a lighting device with high reliability can be obtained.Type: GrantFiled: June 28, 2010Date of Patent: July 1, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Kaoru Hatano, Masahiro Katayama, Shingo Eguchi, Yoshiaki Oikawa, Ami Nakamura
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Publication number: 20140175433Abstract: A semiconductor device in which the aperture ratio and which includes a capacitor with increased charge capacity is provided. A semiconductor device in which the number of masks used in a manufacturing process is reduced and the manufacturing costs are reduced is also provided. An impurity is contained in a light-transmitting semiconductor film so that the semiconductor film functions as one of a pair of electrodes in a capacitor. The other pair of electrodes is formed using a light-transmitting conductive film such as a pixel electrode. Further, a scan line and a capacitor line are provided on the same surface and in parallel to each other. An opening reaching the capacitor line and an opening reaching a conductive film which can be formed in the formation of a source electrode or a drain electrode of the transistor can be formed concurrently in an insulating film.Type: ApplicationFiled: December 19, 2013Publication date: June 26, 2014Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei YAMAZAKI, Hiroyuki MIYAKE
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Publication number: 20140175446Abstract: An array substrate includes a GOA circuit area and a display area, the GOA circuit area includes a TFT area and a lead-wire area, the display area includes a data line and a gate line. The GOA circuit area is provided with at least one first via and at least one second via, a data-line metal layer is disposed at the bottom of the at least one first via, and a gate-line metal layer is disposed at the bottom of the at least one second via. The GOA circuit area further includes a first electrode and a second electrode, the data-line metal layer is electrically connected to one electrode through the at least one first via, the gate-line metal layer is electrically connected to the other electrode through the at least one second via, such that a capacitor is formed between the first electrode and the second electrode.Type: ApplicationFiled: December 23, 2013Publication date: June 26, 2014Inventors: Chao Xu, Heecheol Kim
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Publication number: 20140167166Abstract: Semiconductor devices and fabrication methods for simultaneously forming a 3T-FinFET and a 4T-FinFET on a same substrate are provided. A first fin and a second fin can be formed on a semiconductor substrate. The first fin has a top surface higher than the second fin. A first gate dielectric layer and a first gate can be formed across the first fin. A second gate dielectric layer and a second gate can be formed across the second fin. An interlayer dielectric layer can be formed to cover the first gate, the second gate, and the semiconductor substrate. A first portion of the interlayer dielectric layer, a portion of the first gate, and a portion of the first gate dielectric layer, over the first fin, and a second portion of the interlayer dielectric layer over the second fin can be removed to expose the second gate.Type: ApplicationFiled: October 23, 2013Publication date: June 19, 2014Applicant: Semiconductor Manufacturing International (Shanghai) CorporationInventor: WAYNE BAO
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Patent number: 8748258Abstract: An ETSOI transistor and a capacitor are formed respectively in a transistor and capacitor region thereof by etching through an ETSOI and thin BOX layers in a replacement gate HK/MG flow. The capacitor formation is compatible with an ETSOI replacement gate CMOS flow. A low resistance capacitor electrode makes it possible to obtain a high quality capacitor or varactor. The lack of topography during dummy gate patterning are achieved by lithography in combination accompanied with appropriate etch.Type: GrantFiled: December 12, 2011Date of Patent: June 10, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Ghavam Shahidi
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Patent number: 8748242Abstract: A thin film transistor (TFT) structure is implemented. This embodiment is much less sensitive than conventional TFTs to alignment errors and substrate distortion. In such a configuration, there is no need to define gate features, so the layout is simplified. Moreover, the gate layer may be patterned by several inexpensive printing or non-printing methods.Type: GrantFiled: July 26, 2012Date of Patent: June 10, 2014Assignee: Palo Alto Research Center IncorporatedInventors: Jurgen H. Daniel, Ana Claudia Arias
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Patent number: 8735891Abstract: A display substrate includes first, second, and third insulating layers in a display area thereof. The first and third insulating layers are in not only the display area but also a pad area adjacent to the display area and including a pad therein. Thus, defects of the display panel may be reduced.Type: GrantFiled: December 22, 2011Date of Patent: May 27, 2014Assignee: Samsung Display Co., Ltd.Inventors: JeongMin Park, Jung-Soo Lee, Ji-Hyun Kim, Gwui-Hyun Park
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Publication number: 20140141575Abstract: A transistor region of a first semiconductor layer and a capacitor region in the first semiconductor layer are isolated. A dummy gate structure is formed on the first semiconductor layer in the transistor region. A second semiconductor layer is formed on the first semiconductor layer. First and second portions of the second semiconductor layer are located in the transistor region, and a third portion of the second semiconductor layer is located in the capacitor region. First, second, and third silicide regions are formed on the first, second, and third portions of the second semiconductor layer, respectively. After forming a dielectric layer, the dummy gate structure is removed forming a first cavity. At least a portion of the dielectric layer located above the third silicide region is removed forming a second cavity. A gate dielectric is formed in the first cavity and a capacitor dielectric in the second cavity.Type: ApplicationFiled: January 27, 2014Publication date: May 22, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo CHENG, Bruce DORIS, Ali KHAKIFIROOZ, Ghavam G. SHAHIDI
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Publication number: 20140138694Abstract: An array substrate for a display device includes: a substrate; first and second gate electrodes of impurity-doped polycrystalline silicon on the substrate; a gate insulating layer on the first and second gate electrodes; first and second active layers of intrinsic polycrystalline silicon on the gate insulating layer, the first and second active layers corresponding to the first and second active layers, respectively; an interlayer insulating layer on the first and second active layers and including first to fourth active contact holes, the first and second active contact holes exposing side portions of the first active layer, the third and fourth active contact holes exposing side portions of the second active layer; first and second ohmic contact layers of impurity-doped amorphous silicon on the interlayer insulating layer, the first ohmic contact layer contacting the first active layer through the first and second active contact holes, the second ohmic contact layer contacting the second active layer througType: ApplicationFiled: January 28, 2014Publication date: May 22, 2014Applicant: LG DISPLAY CO., LTD.Inventor: Hee-Dong CHOI
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Publication number: 20140141574Abstract: A flat panel display device having increased capacitance and a method of manufacturing the flat panel display device are provided. A flat panel display device includes: a plurality of pixel areas, each located at a crossing region of a gate line, a data line, and a common voltage line; a thin film transistor (TFT) located at a region where the gate line and the data line cross each other, the TFT including a gate electrode, a source electrode, and a drain electrode; and a storage capacitor located at a region where the common voltage line and the drain electrode cross each other, the storage capacitor including first, second, and a third storage electrodes.Type: ApplicationFiled: January 24, 2014Publication date: May 22, 2014Applicant: Samsung Display Co., Ltd.Inventors: Zhi-Feng Zhan, Seung-Gyu Tae, Deok-Hoi Kim
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Publication number: 20140131782Abstract: A semiconductor-on-insulator (SOI) substrate comprises a bulk semiconductor substrate, a buried insulator layer formed on the bulk substrate and an active semiconductor layer formed on the buried insulator layer. Impurities are implanted near the interface of the buried insulator layer and the active semiconductor layer. A diffusion barrier layer is formed between the impurities and an upper surface of the active semiconductor layer. The diffusion barrier layer prevents the impurities from diffusing therethrough.Type: ApplicationFiled: November 14, 2012Publication date: May 15, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Gregory G. Freeman, Kam Leung Lee, Chengwen Pei, Geng Wang, Yanli Zhang
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Patent number: 8716710Abstract: A thin-film transistor (TFT) array substrate comprises: a substrate; an active layer and a capacitor first electrode formed on the substrate; a gate insulating film formed on the substrate, the active layer and the capacitor first electrode; a gate electrode formed on the gate insulating film corresponding to the active layer and a capacitor second electrode formed on the gate insulating film corresponding to the capacitor first electrode; an interlayer insulating film formed on the gate insulating film, the gate electrode, and the capacitor second electrode; and a pixel electrode, a source electrode, and a drain electrode formed on the interlayer insulating film; wherein at least one of the source electrode and the drain electrode is formed on the pixel electrode. A method of fabricating the TFT array substrate is also disclosed.Type: GrantFiled: August 26, 2011Date of Patent: May 6, 2014Assignee: Samsung Display Co., Ltd.Inventor: Chun-Gi You
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Publication number: 20140117362Abstract: A display panel is provided, which includes a transparent substrate, a first thin film transistor (TFT), a second TFT, a transparent bottom electrode, a capacitance layer, a transparent top electrode, an opposite substrate and a display medium layer. The transparent substrate has a display region and a peripheral region. The display region has sub-pixel regions, and at least one sub-pixel region at least includes a capacitance region and a transistor region. The first and the second TFTs are disposed on the transistor region of the transparent substrate. The transparent bottom electrode, the capacitance layer and the transparent top electrode are sequentially disposed on the capacitance region of transparent substrate, in which the transparent bottom electrode is connected to a source/drain electrode of the first TFT, and the transparent top electrode is connected to a source/drain electrode of the second TFT.Type: ApplicationFiled: May 3, 2013Publication date: May 1, 2014Applicant: AU OPTRONICS CORPORATIONInventor: Peng-Bo XI
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Patent number: 8709890Abstract: An ETSOI transistor and a combination of capacitors, junction diodes, bank end contacts and resistors are respectively formed in a transistor and capacitor region thereof by etching through an ETSOI and BOX layers in a replacement gate HK/MG flow. The capacitor and other devices formation are compatible with an ETSOI replacement gate CMOS flow. A low resistance capacitor electrode makes it possible to obtain a high quality capacitor, and devices. The lack of topography during dummy gate patterning are achieved by lithography in combination accompanied with appropriate etch.Type: GrantFiled: December 12, 2011Date of Patent: April 29, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Thomas N. Adam, Ali Khakifirooz, Alexander Reznicek
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Patent number: 8703553Abstract: Methods for capacitor fabrication include doping a capacitor region of a semiconductor layer in a semiconductor-on-insulator substrate; partially etching the semiconductor layer to produce a first terminal layer comprising doped semiconductor fins on a remaining base of doped semiconductor; forming a dielectric layer over the first terminal layer; and forming a second terminal layer over the dielectric layer in a finFET process.Type: GrantFiled: May 15, 2012Date of Patent: April 22, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Balasubramanian S. Haran, Shom Ponoth, Theodorus E. Standaert, Tenko Yamashita
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Patent number: 8703552Abstract: A device is provided that includes memory, logic and capacitor structures on a semiconductor-on-insulator (SOI) substrate. In one embodiment, the device includes a semiconductor-on-insulator (SOI) substrate having a memory region and a logic region. Trench capacitors are present in the memory region and the logic region, wherein each of the trench capacitors is structurally identical. A first transistor is present in the memory region in electrical communication with a first electrode of at least one trench capacitor that is present in the memory region. A second transistor is present in the logic region that is physically separated from the trench capacitors by insulating material. In some embodiments, the trench capacitors that are present in the logic region include decoupling capacitors and inactive capacitors. A method for forming the aforementioned device is also provided.Type: GrantFiled: March 14, 2012Date of Patent: April 22, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Ramachandra Divakaruni
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Patent number: 8703555Abstract: An SRAM device and method of forming MOS transistors of the device having reduced defects associated with selective epitaxial growth in moat tip regions is discussed. The SRAM device comprises a core region and a logic region, logic transistors within the logic region of the SRAM, and selective epitaxial regions grown on both source and drain regions; and memory cell transistors within the core region of the SRAM, and having the selective epitaxial regions grown on only one of the source and drain regions. One method of forming the MOS transistors of the SRAM cell comprises forming a gate structure over a first conductivity type substrate to define a channel therein, masking one of the source and drain regions in the core region, forming a recess in the substrate of the unmasked side of the channel, epitaxially growing SiGe in the recess, removing the mask, and forming the source and drain extension regions in source/drain regions.Type: GrantFiled: January 23, 2013Date of Patent: April 22, 2014Assignee: Texas Instruments IncorporatedInventor: Antonio L. Rotondaro
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Patent number: 8703554Abstract: An array substrate for an LCD device includes a gate line crossing a data line to define a pixel region. A thin film transistor (TFT) includes a gate electrode connected to the gate line, insulating and active layers on the gate electrode, a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode. An auxiliary common electrode includes a horizontal portion disposed in the pixel region. A metal layer overlaps the insulating layer and contacts the horizontal portion of the auxiliary common electrode through a contact hole defined through the insulating layer. A passivation layer is disposed on the TFT and the metal layer. A pixel electrode has a horizontal portion overlapping the metal layer with the passivation layer therebetween to form a storage capacitor, the pixel electrode connected to the drain electrode through a second contact hole defined through the passivation layer.Type: GrantFiled: November 28, 2012Date of Patent: April 22, 2014Assignee: LG Display Co., Ltd.Inventors: Il-Man Choi, Ho-June Kim
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Patent number: 8698251Abstract: An organic light emitting diode display includes a substrate, a semiconductor layer on the substrate, the semiconductor layer including an impurity-doped polycrystalline silicon layer, a first capacitor electrode on the substrate main body, the first capacitor electrode including an impurity-doped polycrystalline silicon layer, and bottom surfaces of the first capacitor electrode and semiconductor layer facing the substrate main body being substantially coplanar, a gate insulating layer on the semiconductor layer and the first capacitor electrode, a gate electrode on the semiconductor layer with the gate insulating layer therebetween, and a second capacitor electrode on the first capacitor electrode with the gate insulating layer therebetween, bottom surfaces of the second capacitor electrode and gate electrode facing the substrate main body being substantially coplanar, and the second capacitor electrode having a smaller thickness than the gate electrode.Type: GrantFiled: April 13, 2010Date of Patent: April 15, 2014Assignee: Samsung Display Co., Ltd.Inventors: Oh-Seob Kwon, Moo-Soon Ko
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Patent number: 8691639Abstract: Embodiments of the disclosed technology disclose manufacture methods of a thin film transistor and an array substrate and a mask therefor are provided. The manufacture method of the thin film transistor comprises: patterning a wire layer by using a exposure machine and a mask with a first exposure amount larger than a normal exposure amount during formation of source and drain electrodes; forming a semiconductor layer on the patterned wire layer; patterning the semiconductor layer by using the exposure machine and the mask with a second exposure amount smaller than the first exposure amount. The mask comprises a source region for forming the source electrode, a drain region for forming the drain electrode and a slit provided between the source region and the drain region, and the width of the slit is smaller than the resolution of the exposure machine.Type: GrantFiled: May 31, 2012Date of Patent: April 8, 2014Assignee: Boe Technology Group Co., Ltd.Inventors: Weifeng Zhou, Jianshe Xue
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Patent number: 8686422Abstract: A stem wiring (13a) having a broad line width is formed above branch wirings (13b) having a narrow line width. In a region where the stem wiring (13a) is connected to the branch wiring (13b), the stem wiring (13a) overlaps with the branch wiring (13b) via a gate insulating film when seen in a plan view, a contact hole is provided in the gate insulating film so as to uncover the branch wiring (13b), and the stem wiring (13a) is electrically connected to the branch wiring (13b) via a connecting conductor formed in the contact hole. Consequently, a TFT array substrate can be achieved, in which a disconnection failure or an abnormal line width is reduced without enlarging the dimension of a driving circuit region.Type: GrantFiled: April 2, 2010Date of Patent: April 1, 2014Assignee: Sharp Kabushiki KaishaInventors: Masahiro Yoshida, Isao Ogasawara, Shinya Tanaka
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Publication number: 20140080270Abstract: A backplane includes: a substrate, a pixel electrode, which includes a transparent conductive material, on the substrate, a capacitor first electrode formed on the same layer as the pixel electrode, a first protection layer covering the capacitor first electrode and an upper edge of the pixel electrode, a gate electrode of a thin film transistor (TFT) formed on the first protection layer, a capacitor second electrode formed on the same layer as the gate electrode, a first insulating layer that covers the gate electrode and the capacitor second electrode, a semiconductor layer that is formed on the first insulating layer and includes a transparent conductive material, a second insulating layer covering the semiconductor layer, source and drain electrodes of the TFT that are formed on the second insulating layer, and a third insulating layer that covers the source and drain electrodes and exposes the pixel electrode.Type: ApplicationFiled: November 20, 2013Publication date: March 20, 2014Applicant: Samsung Display Co., Ltd.Inventors: Jong-Han Jeong, Chaun-Gi Choi
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Patent number: 8674371Abstract: The protective circuit is formed using a non-linear element which includes a gate insulating film covering a gate electrode; a first wiring layer and a second wiring layer which are over the gate insulating film and whose end portions overlap with the gate electrode; and an oxide semiconductor layer which is over the gate electrode and in contact with the gate insulating film and the end portions of the first wiring layer and the second wiring layer. The gate electrode of the non-linear element and a scan line or a signal line is included in a wiring, the first or second wiring layer of the non-linear element is directly connected to the wiring so as to apply the potential of the gate electrode.Type: GrantFiled: December 6, 2012Date of Patent: March 18, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Kengo Akimoto, Shigeki Komori, Hideki Uochi, Tomoya Futamura, Takahiro Kasahara
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Publication number: 20140054581Abstract: Embodiments of the invention relate to an array substrate, a manufacturing method thereof and a display device comprising the array substrate. The array substrate comprises a gate line and a data line which define a pixel region, the pixel region comprises a thin film transistor region and an electrode pattern region, a gate electrode, a gate insulation layer, an active layer, a source electrode, a drain electrode and a passivation layer are formed in the thin film transistor region, the gate insulation layer, a pixel electrode, the passivation layer and a common electrode are formed in the electrode pattern region, and the common electrode and the pixel electrode form a multi-dimensional electric field. A color resin layer is formed between the gate insulation layer and the pixel electrode.Type: ApplicationFiled: December 23, 2012Publication date: February 27, 2014Applicant: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Youngsuk Song, Guanbao Hui, Seongyeol Yoo, Seungjin Choi, Feng Zhang
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Patent number: 8652888Abstract: A method of forming an SOI structure which includes providing a semiconductor on insulator (SOI) substrate having an SOI layer, an intermediate buried oxide (BOX) layer and a bottom substrate; patterning the SOI layer to form first and second openings in the SOI layer; extending the first openings into the bottom substrate; enlarging the first openings within the bottom substrate; filling the first and second openings with an insulator material to form deep trench isolations (DTIs) from the first openings and shallow trench isolations (STIs) from the second openings; implanting in the bottom substrate between the DTIs to form wells; and forming semiconductor devices in the SOI layer between the DTIs with each semiconductor device being separated from an adjacent semiconductor device by an STI.Type: GrantFiled: June 24, 2013Date of Patent: February 18, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Pranita Kerber
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Patent number: 8652898Abstract: A transistor region of a first semiconductor layer and a capacitor region in the first semiconductor layer are isolated. A dummy gate structure is formed on the first semiconductor layer in the transistor region. A second semiconductor layer is formed on the first semiconductor layer. First and second portions of the second semiconductor layer are located in the transistor region, and a third portion of the second semiconductor layer is located in the capacitor region. First, second, and third silicide regions are formed on the first, second, and third portions of the second semiconductor layer, respectively. After forming a dielectric layer, the dummy gate structure is removed forming a first cavity. At least a portion of the dielectric layer located above the third silicide region is removed forming a second cavity. A gate dielectric is formed in the first cavity and a capacitor dielectric in the second cavity.Type: GrantFiled: September 13, 2012Date of Patent: February 18, 2014Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce Doris, Ali Khakifirooz, Ghavam G. Shahidi
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Patent number: 8642408Abstract: A semiconductor device and method is disclosed. One embodiment provides a method comprising placing a first semiconductor chip on a carrier. After placing the first semiconductor chip on the carrier, an electrically insulating layer is deposited on the carrier. A second semiconductor chip is placed on the electrically insulating layer.Type: GrantFiled: October 7, 2010Date of Patent: February 4, 2014Assignee: Infineon Technologies AGInventors: Ralf Otremba, Joachim Mahler, Bernd Rakow, Reimund Engl, Rupert Fischer
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Patent number: 8643020Abstract: It is an object to provide a flexible light-emitting device with high reliability in a simple way. Further, it is an object to provide an electronic device or a lighting device each mounted with the light-emitting device. A light-emitting device with high reliability can be obtained with the use of a light-emitting device having the following structure: an element portion including a light-emitting element is interposed between a substrate having flexibility and a light-transmitting property with respect to visible light and a metal substrate; and insulating layers provided over and under the element portion are in contact with each other in the outer periphery of the element portion to seal the element portion. Further, by mounting an electronic device or a lighting device with a light-emitting device having such a structure, an electronic device or a lighting device with high reliability can be obtained.Type: GrantFiled: June 28, 2010Date of Patent: February 4, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Kaoru Hatano, Masahiro Katayama, Shingo Eguchi, Yoshiaki Oikawa, Ami Nakamura
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Patent number: 8642404Abstract: A TFT LCD array substrate and a manufacturing method thereof. The manufacturing method includes the steps of: forming a thin film transistor on a substrate to form a gate line and a gate electrode connected with the gate line on the substrate; forming a gate insulating layer and a semiconductor layer on the gate electrode; forming an ohmic contact layer on the semiconductor layer; forming a transparent pixel electrode layer and a source/drain electrode metal layer in sequence on the resultant substrate, wherein the transparent pixel electrode layer is electrically insulated from the gate line and the gate electrode, and the transparent pixel electrode layer forms an ohmic contact with two sides of the semiconductor layer via the ohmic contact layer; and performing masking and etching with a gray tone mask with respect to the resultant substrate to form a transparent pixel electrode, a source/drain electrode and a data line simultaneously.Type: GrantFiled: January 7, 2013Date of Patent: February 4, 2014Assignee: Beijing BOE Optoelectronics Technology Co., LtdInventors: Chaoyong Deng, Seung Moo Rim
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Patent number: 8637867Abstract: An electrostatic discharge device and an organic electro-luminescence display device having the same are provided. The organic electro-luminescence display device includes an electrostatic discharge device including a metal pattern having an island shape on a substrate, an insulating layer on the metal pattern, a semiconductor pattern on the insulating layer, the semiconductor pattern corresponding to the metal pattern, a first electrode overlapping one end of the semiconductor pattern, and a second electrode overlapping the other end of the semiconductor pattern, and spaced from the first electrode, thereby preventing a current leakage, a signal distortion and a signal cross-talk to improve the reliability.Type: GrantFiled: December 27, 2007Date of Patent: January 28, 2014Assignee: LG Display Co., Ltd.Inventor: Hee Dong Choi
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Patent number: 8633532Abstract: A semiconductor memory device having a floating body capacitor. The semiconductor memory device can perform a memory operation using the floating body capacitor. The semiconductor memory device includes an SOI substrate having a staked structure in which a base substrate having a conducting surface, a buried insulating layer and a device-forming layer are staked, a transistor formed in a portion of the device-forming layer, having a gate, a source region and a drain region, and a capacitor formed by the buried insulating layer, the conducting surface of the base substrate, and accumulated holes generated in the device-forming layer when the transistor is driven.Type: GrantFiled: November 25, 2011Date of Patent: January 21, 2014Assignee: SK Hynix Inc.Inventor: Jong Su Kim
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Publication number: 20140015053Abstract: Device structures, design structures, and fabrication methods for a metal-oxide-semiconductor field-effect transistor. A gate structure is formed on a top surface of a substrate. First and second trenches are formed in the substrate adjacent to a sidewall of the gate structure. The second trench is formed laterally between the first trench and the first sidewall. First and second epitaxial layers are respectively formed in the first and second trenches. A contact is formed to the first epitaxial layer, which serves as a drain. The second epitaxial layer in the second trench is not contacted so that the second epitaxial layer serves as a ballasting resistor.Type: ApplicationFiled: July 11, 2012Publication date: January 16, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: James P. Di Sarro, Robert J. Gauthier, JR., Junjun Li
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Patent number: 8629504Abstract: An electrical device is provided that in one embodiment includes a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness of less than 10 nm. A semiconductor device having a raised source region and a raised drain region of a single crystal semiconductor material of a first conductivity is present on a first surface of the semiconductor layer. A resistor composed of the single crystal semiconductor material of the first conductivity is present on a second surface of the semiconductor layer. A method of forming the aforementioned electrical device is also provided.Type: GrantFiled: March 29, 2012Date of Patent: January 14, 2014Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Kangguo Cheng, Ali Khakifirooz, Ghavam G. Shahidi
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Publication number: 20140008710Abstract: A metal-semiconductor-compound thin film is disclosed, which is formed between a semiconductor layer and a polycrystalline semiconductor layer, the metal-semiconductor-compound thin film having a thickness of about 2˜5 nm, so as to improve a contact between the semiconductor layer and the polycrystalline semiconductor layer. A DRAM storage cell is also disclosed. A metal-semiconductor-compound thin film having a thickness of about 2-5 nm is added between a drain region of a MOS transistor and a polycrystalline semiconductor buffer layer in the DRAM storage cell, so as to enhance read/write speed of the transistor of the DRAM storage cell while preventing excessive increase in leakage current between the drain region and a semiconductor substrate. A method for making a DRAM storage cell is also disclosed.Type: ApplicationFiled: September 28, 2011Publication date: January 9, 2014Applicant: FUDAN UNIVERSITYInventors: Dongping Wu, Shili Zhang, Zhiwei Zhu, Wei Zhang
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Patent number: 8614462Abstract: A method of fabricating an array substrate for an organic electroluminescent device includes forming a semiconductor layer of polysilicon in an element region, and a semiconductor pattern of polysilicon in a storage region on a substrate; forming a multiple-layered gate electrode corresponding to a center portion of the semiconductor layer and a first storage electrode corresponding to the semiconductor pattern; performing an impurity-doping to make a portion of the semiconductor layer not covered by the gate electrode into an ohmic contact layer and make the semiconductor pattern into a second storage electrode; forming source and drain electrodes and a third storage electrode corresponding to the first storage electrode; forming a first electrode contacting the drain electrode and a fourth storage electrode corresponding to the third storage electrode.Type: GrantFiled: October 31, 2011Date of Patent: December 24, 2013Assignee: LG Display Co., Ltd.Inventors: Hee-Dong Choi, Ki-Sul Cho, Seong-Moh Seo
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Patent number: 8609476Abstract: The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.Type: GrantFiled: February 15, 2013Date of Patent: December 17, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hideaki Kuwabara, Masakazu Murakami
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Patent number: 8592262Abstract: A method is used to prevent unwanted electrical contacts between various electrically conducting surfaces and lines in a display panel due to an n+ a-Si residue and/or ITO debris. The method provides a clearing pattern including at least a cleared area in the passivation layer for preventing the residue or debris from locating at the cleared area. As such, if an n+ a-Si residue happens to be deposited under the passivation layer, the part of the residue located in the cleared area is removed by an a-Si selective etching process, for example. Furthermore, with the cleared area, ITO debris deposited on the section of the dielectric layer deposited on the signal line can be electrically isolated from the electrode.Type: GrantFiled: November 16, 2006Date of Patent: November 26, 2013Assignee: AU Optronics CorporationInventor: Han-Chung Lai
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Publication number: 20130307076Abstract: A fin resistor and method of fabrication are disclosed. The fin resistor comprises a plurality of fins arranged in a linear pattern with an alternating pattern of epitaxial regions. An anneal diffuses dopants from the epitaxial regions into the fins. Contacts are connected to endpoint epitaxial regions to allow the resistor to be connected to more complex integrated circuits.Type: ApplicationFiled: May 16, 2012Publication date: November 21, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, Thomas N. Adam, Ali Khakifirooz, Alexander Reznicek
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Publication number: 20130309819Abstract: An array for an in-plane switching (IPS) mode liquid crystal display device includes a gate line formed on a substrate to extend in a first direction, a common line formed on the substrate to extend in the first direction, a data line formed to extend in a second direction, a thin film transistor formed at an intersection between the gate line and the data line, wherein the thin film transistor includes a gate line, a gate insulating layer, an active layer, a source electrode, and a drain electrode, a passivation film formed on the substrate including the thin film transistor, a pixel electrode formed on the passivation film located on a pixel region defined by the gate line and the data line, the pixel electrode being electrically connected to the drain electrode, a common electrode formed on the passivation film, and a common electrode connection line connected to the common electrode and the common line, wherein the common electrode connection line overlaps with the common line and the drain electrode.Type: ApplicationFiled: July 23, 2013Publication date: November 21, 2013Applicant: LG DISPLAY CO., LTD.Inventor: Min-Jic LEE
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Patent number: 8581332Abstract: The invention provides a semiconductor device and its manufacturing method in which a memory transistor and a plurality of thin film transistors that have gate insulating films with different thicknesses are fabricated over a substrate. The invention is characterized by the structural difference between the memory transistor and the plurality of thin film transistors. Specifically, the memory transistor and some of the plurality of thin film transistors are provided to have a bottom gate structure while the other thin film transistors are provided to have a top gate structure, which enables the reduction of characteristic defects of the transistor and simplification of its manufacturing process.Type: GrantFiled: August 11, 2011Date of Patent: November 12, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tamae Takano, Tetsuya Kakehata, Shunpei Yamazaki
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Patent number: 8574970Abstract: A MOSFET device is formed on top of a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness ranging from 3 nm to 20 nm. A stair-shape raised extension, a raised source region and a raised drain region (S/D) are formed on top of the SOI substrate. The thinner raised extension region abuts at a thin gate sidewall spacer, lowering the extension resistance without significantly increasing the parasitic resistance. A single epitaxial growth forms the thinner raised extension and the thicker raised S/D preferably simultaneously, reducing the fabrication cost as well as the contact resistance between the raised S/D and the extension. A method of forming the aforementioned MOSFET device is also provided.Type: GrantFiled: September 15, 2010Date of Patent: November 5, 2013Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ali Khakifirooz, Ghavam G. Shahidi
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Patent number: 8569118Abstract: A TFT LCD array substrate and a manufacturing method thereof. The manufacturing method includes the steps of: forming a thin film transistor on a substrate to form a gate line and a gate electrode connected with the gate line on the substrate; forming a gate insulating layer and a semiconductor layer on the gate electrode; forming an ohmic contact layer on the semiconductor layer; forming a transparent pixel electrode layer and a source/drain electrode metal layer in sequence on the resultant substrate, wherein the transparent pixel electrode layer is electrically insulated from the gate line and the gate electrode, and the transparent pixel electrode layer forms an ohmic contact with two sides of the semiconductor layer via the ohmic contact layer; and performing masking and etching with a gray tone mask with respect to the resultant substrate to form a transparent pixel electrode, a source/drain electrode and a data line simultaneously.Type: GrantFiled: January 7, 2013Date of Patent: October 29, 2013Assignee: Beijing BOE Optoelectronics Technology Co., LtdInventors: Chaoyong Deng, Seung Moo Rim
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Patent number: 8555497Abstract: To form a conductive region in a prepreg without opening a through hole in a fibrous body. A wiring substrate is provided, including: an organic resin layer and a fibrous body, wherein the fibrous body is impregnated with the organic resin layer; and a wiring with which the fibrous body is impregnated and which is formed by dissolving the organic resin layer. The wiring is exposed on both surfaces of the organic resin layer and penetrates the fibrous body so that the fibrous body is positioned in the through wiring. Further, a semiconductor device is provided by adhering an integrated circuit chip having a bump to the wiring substrate so that the bump is in contact with the wiring.Type: GrantFiled: June 17, 2009Date of Patent: October 15, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Kaoru Hatano, Akihiro Chida, Takaaki Nagata, Masayuki Sakakura
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Publication number: 20130264644Abstract: On a semiconductor substrate having an SOI region and a bulk silicon region formed on its upper surface, epitaxial layers are formed in source and drain regions of a MOSFET formed in the SOI region, and no epitaxial layer is formed in source and drain regions of a MOSFET formed in the bulk silicon region. By covering the end portions of the epitaxial layers with silicon nitride films, even when diffusion layers are formed by implanting ions from above the epitaxial layers, it is possible to prevent the impurity ions from being implanted down to a lower surface of a silicon layer.Type: ApplicationFiled: April 9, 2013Publication date: October 10, 2013Applicant: Renesas Electronics CorporationInventors: Takaaki Tsunomura, Yoshiki Yamamoto, Masaaki Shinohara, Toshiaki Iwamatsu, Hidekazu Oda
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Patent number: 8551810Abstract: In a transistor including an oxide semiconductor film, a metal oxide film for preventing electrification which is in contact with the oxide semiconductor film and covers a source electrode and a drain electrode is formed. Then, oxygen is introduced (added) to the oxide semiconductor film through the metal oxide film and heat treatment is performed. Through these steps of oxygen introduction and heat treatment, impurities such as hydrogen, moisture, a hydroxyl group, or hydride are intentionally removed from the oxide semiconductor film, so that the oxide semiconductor film is highly purified. Further, by providing the metal oxide film, generation of a parasitic channel on a back channel side of the oxide semiconductor film can be prevented in the transistor.Type: GrantFiled: March 25, 2011Date of Patent: October 8, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8552498Abstract: A semiconductor device in which defects in characteristics due to electrostatic discharge is reduced and a method for manufacturing the semiconductor device are provided. The semiconductor device has at least one of these structures: (1) a structure in which a first and second insulating films are in direct contact with each other in a peripheral region of a circuit portion, (2) a structure in which a first and second insulators are closely attached to each other, and (3) a structure in which a first conductive layer and a second conductive layer are provided on outer surfaces of the first insulator and the second insulator, respectively, and electrical conduction between the first and second conductive layers is achieved at a side surface of the peripheral region. Note that the conduction at the side surface can be achieved by cutting a plurality of semiconductor devices into separate semiconductor devices.Type: GrantFiled: September 16, 2009Date of Patent: October 8, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shingo Eguchi, Yoshiaki Oikawa