And Additional Electrical Device On Insulating Substrate Or Layer Patents (Class 438/155)
  • Patent number: 8552500
    Abstract: A semiconductor substrate having a first type of conductivity and a top surface, a layer of oxide disposed over the top surface and a semiconductor layer disposed over the layer of oxide. A plurality of transistor devices are disposed upon the semiconductor layer. Each transistor device includes a channel between a source and a drain, where some transistor devices have a first type of channel conductivity and the remaining transistor devices have a second type of channel conductivity. A well region is formed adjacent to the top surface. The well region has a second type of conductivity. First trench isolation regions are between adjacent transistor devices that extend through the semiconductor layer. Second trench isolation regions are between adjacent transistor devices of opposite channel conductivity.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: October 8, 2013
    Assignee: International Business Machines Corporation
    Inventors: Robert H. Dennard, Terence B. Hook
  • Publication number: 20130248945
    Abstract: Electronic circuits and methods are provided for various applications including signal amplification. An exemplary electronic circuit comprises a MOSFET and a dual-gate JFET in a cascode configuration. The dual-gate JFET includes top and bottom gates disposed above and below the channel. The top gate of the JFET is controlled by a signal that is dependent upon the signal controlling the gate of the MOSFET. The control of the bottom gate of the JFET can be dependent or independent of the control of the top gate. The MOSFET and JFET can be implemented as separate components on the same substrate with different dimensions such as gate widths.
    Type: Application
    Filed: March 14, 2013
    Publication date: September 26, 2013
    Inventors: Alexandre G. Bracale, Denis A. Masliah
  • Patent number: 8535995
    Abstract: A method of manufacturing an organic light-emitting display device includes forming a silicon layer and a gate insulating film over a substrate having a transistor region and a capacitor region; forming a halftone photoresist over the substrate; patterning the silicon layer and the gate insulating film; forming a residual photoresist by subjecting the halftone photoresist to an ashing process to leave part of the halftone photoresist over the transistor region; and doping at least a portion of the silicon layer with impurities by applying the impurities over an entire region of the substrate.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: September 17, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jong-Hyun Park, Chun-Gi You, Sun Park, Yul-Kyu Lee, Sang-Ho Moon
  • Patent number: 8530288
    Abstract: Some embodiments include DRAM having transistor gates extending partially over SOI, and methods of forming such DRAM. Unit cells of the DRAM may be within active region pedestals, and in some embodiments the unit cells may comprise capacitors having storage nodes in direct contact with sidewalls of the active region pedestals. Some embodiments include 0C1T memory having transistor gates entirely over SOI, and methods of forming such 0C1T memory.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: September 10, 2013
    Assignee: Micron Technology, Inc.
    Inventor: Kunal R. Parekh
  • Publication number: 20130221441
    Abstract: Gate electrodes having different work functions can be provided by providing conductive metallic nitride layers having different thicknesses in a replacement gate scheme. Upon removal of disposable gate structures and formation of a gate dielectric layer, at least one incremental thickness conductive metallic nitride layer is added within some gate cavities, while not being added in some other gate cavities. A minimum thickness conductive metallic nitride layer is subsequently added as a contiguous layer. Conductive metallic nitride layers thus formed have different thicknesses across different gate cavities. A gate fill conductive material layer is deposited, and planarization is performed to provide multiple gate electrode having different conductive metallic nitride layer thicknesses. The different thicknesses of the conductive metallic nitride layers can provide different work functions having a range of about 400 mV.
    Type: Application
    Filed: February 28, 2012
    Publication date: August 29, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Hemanth Jagannathan, Vamsi K. Paruchuri
  • Patent number: 8507333
    Abstract: Disclosed is an integrated circuit device having series-connected planar or non-planar field effect transistors (FETs) with integrated voltage equalization and a method of forming the device. The series-connected FETs comprise gates positioned along a semiconductor body to define the channel regions for the series-connected FETs. Source/drain regions are located within the semiconductor body on opposing sides of the channel regions such that each portion of the semiconductor body between adjacent gates comprises one source/drain region for one field effect transistor abutting another source/drain region for another field effect transistor. Integrated voltage equalization is achieved through a conformal conductive layer having a desired resistance and positioned over the series-connected FETs such that it is electrically isolated from the gates, but in contact with the source/drain regions within the semiconductor body.
    Type: Grant
    Filed: April 25, 2012
    Date of Patent: August 13, 2013
    Assignee: International Business Machines Corporation
    Inventors: Andres Bryant, Edward J. Nowak
  • Patent number: 8501552
    Abstract: A pixel structure includes a substrate; a scan line; a gate electrode; an insulating layer disposed on the scan line, the gate electrode and the substrate; a channel and a data line disposed on the insulating layer; a source electrode and a drain electrode disposed on the channel; a passivation layer; a pixel electrode and a connecting electrode. The data line does not overlap the scan line. The passivation layer disposed on the source electrode and the drain electrode includes a first contact hole partially exposing the drain electrode, and a plurality of second contact holes partially exposing the data line or the scan line. The pixel electrode disposed on the passivation layer is electrically connected to the drain electrode through the first contact hole. Furthermore, the connecting electrode disposed on the passivation layer is electrically connected to the data line or the scan line through the second contact holes.
    Type: Grant
    Filed: February 8, 2012
    Date of Patent: August 6, 2013
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventors: Chin-Tzu Kao, Yu-Tsung Lee
  • Patent number: 8492222
    Abstract: A method is provided for forming a pixel of an electroluminescence device. The method provides a substrate; defines at least a first area for capacitors, a second area for a transistor on the substrate and a third area for an organic light-emitting diode (OLED) on the substrate; forms first conductive, first dielectric, second conductive, second dielectric, and third conductive layers over the first area; forming a third conductive layer over the second dielectric layer over the first area; wherein the first conductive layer over the first area is directly connected to a power supply voltage, wherein the second conductive layer is electrically connected to a fourth conductive layer and wherein the first conductive layer, the first dielectric layer, and the second conductive layer over the first area collectively form a first one of the capacitors over the first area, the second conductive layer, the second dielectric layer.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: July 23, 2013
    Assignee: AU Optronics Corporation
    Inventor: Wein-Town Sun
  • Patent number: 8487312
    Abstract: To provide a semiconductor device with a TFT, capable of reducing the electric resistance of a power supply wiring without increasing the off-current. The semiconductor device includes an insulating film with a surface; a semiconductor layer which is formed over the surface of the insulating film and which includes a channel region and a pair of source/drain regions and sandwiching the channel region; and a power supply wiring for supplying power to the source region. A concave portion is formed in the surface of the insulating film. The power supply wiring includes a layer formed from the same layer as the semiconductor layer, and has a first portion formed over the surface of the insulating film and a second portion formed in the concave portion. The bottom of the second portion is covered with an insulator.
    Type: Grant
    Filed: May 16, 2012
    Date of Patent: July 16, 2013
    Assignee: Renesas Electronics Corporation
    Inventor: Yukio Maki
  • Publication number: 20130178021
    Abstract: A transistor region of a first semiconductor layer and a capacitor region in the first semiconductor layer are isolated. A dummy gate structure is formed on the first semiconductor layer in the transistor region. A second semiconductor layer is formed on the first semiconductor layer. First and second portions of the second semiconductor layer are located in the transistor region, and a third portion of the second semiconductor layer is located in the capacitor region. First, second, and third silicide regions are formed on the first, second, and third portions of the second semiconductor layer, respectively. After forming a dielectric layer, the dummy gate structure is removed forming a first cavity. At least a portion of the dielectric layer located above the third silicide region is removed forming a second cavity. A gate dielectric is formed in the first cavity and a capacitor dielectric in the second cavity.
    Type: Application
    Filed: September 13, 2012
    Publication date: July 11, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo CHENG, Bruce DORIS, Ali KHAKIFIROOZ, Ghavam G. SHAHIDI
  • Publication number: 20130175595
    Abstract: An integrated circuit includes an SOI substrate with a unitary N+ layer below the BOX, a P region in the N+ layer, an eDRAM with an N+ plate, and logic/SRAM devices above the P region. The P region functions as a back gate of the logic/SRAM devices. An optional intrinsic (undoped) layer can be formed between the P back gate layer and the N+ layer to reduce the junction field and lower the junction leakage between the P back gate and the N+ layer. In another embodiment an N or N+ back gate can be formed in the P region. The N+ back gate functions as a second back gate of the logic/SRAM devices. The N+ plate of the SOI eDRAM, the P back gate, and the N+ back gate can be electrically biased at the same or different voltage potentials. Methods to fabricate the integrated circuits are also disclosed.
    Type: Application
    Filed: January 6, 2012
    Publication date: July 11, 2013
    Applicant: International Business Machines Corporation
    Inventors: Kangguo Cheng, Bruce B. Doris, Terence B. Hook, Ali Khakifirooz, Pranita Kulkarni
  • Publication number: 20130175594
    Abstract: An integrated circuit comprising an N+ type layer, a buffer layer arranged on the N+ type layer; a P type region formed on with the buffer layer; an insulator layer overlying the N+ type layer, a silicon layer overlying the insulator layer, an embedded RAM FET formed in the silicon layer and connected with a conductive node of a trench capacitor that extends into the N+ type layer, the N+ type layer forming a plate electrode of the trench capacitor, a first contact through the silicon layer and the insulating layer and electrically connecting to the N+ type layer, a first logic RAM FET formed in the silicon layer above the P type region, the P type region functional as a P-type back gate of the first logic RAM FET, and a second contact through the silicon layer and the insulating layer and electrically connecting to the P type region.
    Type: Application
    Filed: July 18, 2012
    Publication date: July 11, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Veeraraghavan S. Basker, Kangguo Cheng, Bruce B. Doris, Terence B. Hook, Ali Khakifirooz, Pranita Kulkarni, Tenko Yamashita, Chun-Chen Yeh
  • Patent number: 8481373
    Abstract: A method for manufacturing a thin film transistor substrate includes a step of forming a gate electrode (11a) and a first interconnect on a substrate (10), a step of forming a gate insulating film (12a) having a contact hole at a position overlapping the first interconnect, a step of forming a source electrode (13a) and a drain electrode (13b) overlapping the gate electrode (11a) and separated apart from each other, and a second interconnect connected via the contact hole to the first interconnect, a step of successively forming an oxide semiconductor film (14) and a second insulating film (15), and thereafter, patterning the second insulating film (15) to form an interlayer insulating film (15a), and a step of reducing the resistance of the oxide semiconductor film (14) exposed through the interlayer insulating film (15a) to form a pixel electrode (14b).
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: July 9, 2013
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Tohru Okabe, Hirohiko Nishiki, Yoshimasa Chikama, Takeshi Hara
  • Patent number: 8482008
    Abstract: A thin film transistor having a crystalline silicon film that is formed over an insulating substrate with a gate electrode and a gate insulating film in between, and has a channel region in a region corresponding to the gate electrode; an insulating channel protective film that is selectively formed in a region corresponding to the channel region on the crystalline silicon film; an n+ silicon film having a source region and a drain region that sandwich a region corresponding to the channel region on the channel protective film and the crystalline silicon film; and a metal film having a source electrode and a drain electrode that respectively correspond to the source region and the drain region.
    Type: Grant
    Filed: April 11, 2012
    Date of Patent: July 9, 2013
    Assignee: Sony Corporation
    Inventors: Toshiaki Arai, Yoshio Inagaki
  • Patent number: 8476637
    Abstract: Nanostructure array optoelectronic devices are disclosed. The optoelectronic device may have a top electrical contact that is physically and electrically connected to sidewalls of the array of nanostructures (e.g., nanocolumns). The top electrical contact may be located such that light can enter or leave the nanostructures without passing through the top electrical contact. Therefore, the top electrical contact can be opaque to light having wavelengths that are absorbed or generated by active regions in the nanostructures. The top electrical contact can be made from a material that is highly conductive, as no tradeoff needs to be made between optical transparency and electrical conductivity. The device could be a solar cell, LED, photo-detector, etc.
    Type: Grant
    Filed: June 8, 2010
    Date of Patent: July 2, 2013
    Assignee: Sundiode Inc.
    Inventors: James C. Kim, Sungsoo Yi, Danny E. Mars
  • Publication number: 20130153903
    Abstract: An ambipolar transistor device structure suitable for use in an integrated circuit is disclosed. An electron blocking layer or a hole blocking layer is interposed between a source/drain and an ambipolar active layer. Therefore, a unipolar device electric property may be extracted from the ambipolar active layer, which may be suitably applied to the design of a logic circuit. The manufacturing method of the disclosure is simple, only needing one patterning step, so as to effectively improve the performance of the ambipolar device.
    Type: Application
    Filed: April 20, 2012
    Publication date: June 20, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chao-Feng Sung, Yen-Min Hsieh
  • Publication number: 20130153904
    Abstract: A semiconductor device (1000) includes a thin film transistor having a gate line (3a), source and drain lines (13as, 13ad), and an island-like oxide semiconductor layer (7), and a capacitor element (105) having a first electrode (3b) formed from the same conductive film as the gate line (3s), a second electrode (13b) formed from the same conductive film as the source line (13as), and a dielectric layer positioned between the first electrode and the second electrode. A gate insulating film (5) has a layered structure including a first insulating layer (5A) containing an oxide and a second insulating layer (5B) disposed on the side closer to the gate electrode closer than the first insulating film and having a higher dielectric constant than the first insulating film, the layered structure being in contact with the oxide semiconductor layer (7). The dielectric layer includes the second insulating film (5B) but does not include the first insulating film (5A).
    Type: Application
    Filed: August 26, 2011
    Publication date: June 20, 2013
    Inventors: Jun Nishimura, Yukinobu Nakata, Yoshihito Hara
  • Patent number: 8466048
    Abstract: Disclosed is a semiconductor device which includes a substrate 11, a thin film transistor 20 having a first semiconductor layer 16A that is supported by the substrate 11, a thin film diode 30 having a second semiconductor layer 16B that is supported by the substrate 11, and a metal layer 12 that is formed between the substrate 11 and the second semiconductor layer 16B. The first semiconductor layer 16A is a laterally grown crystalline semiconductor film, and the second semiconductor layer 16B is a crystalline semiconductor film that contains fine crystal grains. The average surface roughness of the second semiconductor layer 16B is higher than the average surface roughness of the first semiconductor layer 16A. Consequently, the optical sensitivity of the TFD is improved and the reliability of the TFT is improved, as compared with those in the conventional semiconductor devices.
    Type: Grant
    Filed: March 9, 2010
    Date of Patent: June 18, 2013
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yoshiyuki Itoh, Masashi Maekawa, Norihisa Asano, Hiroki Taniyama
  • Publication number: 20130146953
    Abstract: An ETSOI transistor and a combination of capacitors, junction diodes, bank end contacts and resistors are respectively formed in a transistor and capacitor region thereof by etching through an ETSOI and BOX layers in a replacement gate HK/MG flow. The capacitor and other devices formation are compatible with an ETSOI replacement gate CMOS flow. A low resistance capacitor electrode makes it possible to obtain a high quality capacitor, and devices. The lack of topography during dummy gate patterning are achieved by lithography in combination accompanied with appropriate etch.
    Type: Application
    Filed: December 12, 2011
    Publication date: June 13, 2013
    Applicant: International Business Machines Corporation
    Inventors: Kangguo Cheng, Thomas N. Adam, Ali Khakifirooz, Alexander Reznicek
  • Patent number: 8460986
    Abstract: An active matrix type display device, wherein a pixel circuit is formed using a plurality of thin film transistors in which thin semiconductor films forming channel regions of the thin film transistors are made in different crystal states.
    Type: Grant
    Filed: August 3, 2007
    Date of Patent: June 11, 2013
    Assignee: Sony Corporation
    Inventors: Motohiro Toyota, Toshiaki Arai
  • Patent number: 8455954
    Abstract: The present invention provides a wireless chip having high mechanical strength. Moreover, the present invention also provides a wireless chip which can prevent an electric wave from being blocked. In a wireless chip of the present invention, a layer having a thin film transistor formed over an insulating substrate is fixed to an antenna by an anisotropic conductive adhesive, and the thin film transistor is connected to the antenna. The antenna has a dielectric layer, a first conductive layer, and a second conductive layer; the first conductive layer and the second conductive layer has the dielectric layer therebetween; the first conductive layer serves as a radiating electrode; and the second electrode serves as a ground contact body.
    Type: Grant
    Filed: April 12, 2012
    Date of Patent: June 4, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yukie Suzuki, Yasuyuki Arai, Shunpei Yamazaki
  • Patent number: 8450738
    Abstract: An active matrix substrate includes: pixel regions (5L, 5R, and 5M) provided in line and column direction; scan signal lines (16? and 16?); data signal lines (Sp, Sq, sp, and sq) crossing the scan signal lines at right angles; a gate insulating film covering the scan signal lines; and an interlayer insulating film covering the data signal lines, two of the data signal lines (Sq and sp) being provided (i) so as to overlap a gap between two of the pixel regions (5L and 5R) which are adjacent to each other in the line direction or (ii) so as to overlap a region which extends along the gap, the interlayer insulating film having a hollow part K so that the hollow part K and a gap between the two of the data signal lines (Sq and sp) overlap each other, and part of the hollow part K and the scan signal lines (16? and 16?) overlap each other via the gate insulating film.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: May 28, 2013
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Toshihide Tsubata, Toshinori Sugihara
  • Patent number: 8450157
    Abstract: A master having a substrate including displaying units and an ESD protection structure including an adjacent first region and a second region is provided. The displaying units have a predetermined-cutting region therebetween. Each displaying unit includes a peripheral circuit region and a display region having pixels.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: May 28, 2013
    Assignee: Au Optronics Corporation
    Inventors: Pei-Ming Chen, Chih-Hung Shih
  • Patent number: 8450135
    Abstract: A manufacturing method of pixel structure includes: sequentially forming a gate, a gate insulation layer, a semiconductor layer and a conductive layer on a substrate; forming a first patterned photoresist layer including multiple first photoresist blocks and multiple second photoresist blocks on the conductive layer; reducing the thickness of the first patterned photoresist layer until the second photoresist blocks are completely removed; forming a pixel electrode layer and a second photoresist layer on a partial pixel electrode layer; removing a part of the pixel electrode layer exposed by the second photoresist layer, a partial conductive layer and a partial semiconductor layer both under the removed pixel electrode layer to define a first electrode block, a second electrode block and a channel region; removing the remained first patterned photoresist layer and second photoresist layer and forming a protective layer and a common electrode layer on a part of the protective layer.
    Type: Grant
    Filed: July 15, 2011
    Date of Patent: May 28, 2013
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventor: Yuan-Hsin Tsou
  • Patent number: 8445909
    Abstract: Provided are a sensor array substrate and a method of fabricating the same. The sensor array substrate includes: a substrate in which a switching element region and a sensor region that senses light are defined; a first semiconductor layer which is formed in the sensor region; a first gate electrode which is formed on the first semiconductor layer and overlaps the first semiconductor layer; a second gate electrode which is formed in the switching element region; a second semiconductor layer which is formed on the second gate electrode and overlaps the second gate electrode; and a light-blocking pattern which is formed on the second semiconductor layer and overlaps the second semiconductor layer, wherein the first semiconductor layer and the second semiconductor layer are disposed on different layers, and the second gate electrode and the light-blocking pattern are electrically connected to each other.
    Type: Grant
    Filed: May 6, 2011
    Date of Patent: May 21, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Kyung-Sook Jeon, Jun-Ho Song, Sang-Youn Han, Sung-Hoon Yang, Dae-Cheol Kim, Ki-Hun Jeong, Mi-Seon Seo
  • Publication number: 20130105893
    Abstract: A DMOS on SOI transistor including an elongated gate extending across the entire width of an active area; a drain region of a first conductivity type extending across the entire width of the active area; a source region of the first conductivity type extending parallel to the gate and stopping before the limit of the active area at least on one side of the transistor width, an interval existing between the limit of the source region and the limit of the active area; a bulk region of a second conductivity type extending under the gate and in said interval; a more heavily-doped region of the second conductivity type extending on a portion of said interval on the side of the limit of the active area; and an elongated source metallization extending across the entire width of the active area.
    Type: Application
    Filed: October 25, 2012
    Publication date: May 2, 2013
    Applicants: STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS SA
    Inventors: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
  • Publication number: 20130102115
    Abstract: The disclosed method for manufacturing an active matrix substrate includes a step in which a first mask is used to pattern a first conductive layer G, CS, and S, a step in which a second mask is used to pattern a first insulating layer, a step in which a third mask is used to pattern a semiconductor layer, a step in which a fourth mask is used to pattern a second conductive later, a step in which a fifth mask is used to pattern a second insulating layer, and a step in which a sixth mask is used to pattern a third conductive layer.
    Type: Application
    Filed: July 1, 2011
    Publication date: April 25, 2013
    Applicant: SHARP KABUSHIKI KAISHA
    Inventors: Takeshi Yaneda, Hiromitsu Katsui, Wataru Nakamura
  • Patent number: 8426278
    Abstract: Apparatus for semiconductor device structures and related fabrication methods are provided. A method for fabricating a semiconductor device structure on an isolated region of semiconductor material comprises forming a plurality of gate structures overlying the isolated region of semiconductor material and masking edge portions of the isolated region of semiconductor material. While the edge portions are masked, the fabrication method continues by forming recesses between gate structures of the plurality of gate structures and forming stressor regions in the recesses. The method continues by unmasking the edge portions and implanting ions of a conductivity-determining impurity type into the stressor regions and the edge portions.
    Type: Grant
    Filed: June 9, 2010
    Date of Patent: April 23, 2013
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Akif Sultan, Indradeep Sen
  • Patent number: 8420474
    Abstract: A field effect transistor fabrication method includes defining a gate structure on a substrate, depositing a dielectric layer on the gate structure, depositing a first metal layer on the dielectric layer, removing a portion of the first metal layer, depositing a second metal layer, annealing the first and second metal layers, and defining a carbon based device on the dielectric layer and the gate structure.
    Type: Grant
    Filed: January 11, 2012
    Date of Patent: April 16, 2013
    Assignee: International Business Machines Corporation
    Inventors: Martin M. Frank, Dechao Guo, Shu-Jen Hen, Kuen-Ting Shiu
  • Patent number: 8389995
    Abstract: A method for producing a solid-state semiconducting structure, includes steps in which: (i) a monocrystalline substrate is provided; (ii) a monocrystalline oxide layer is formed, by epitaxial growth, on the substrate; (iii) a bonding layer is formed by steps in which: (a) the impurities are removed from the surface of the monocrystalline oxide layer; (b) a semiconducting bonding layer is deposited by slow epitaxial growth; and (iv) a monocrystalline semiconducting layer is formed, by epitaxial growth, on the bonding layer so formed. The solid-state semiconducting heterostructures so obtained are also described.
    Type: Grant
    Filed: September 17, 2008
    Date of Patent: March 5, 2013
    Assignee: Centre National de la Recherche Scientifique (C.N.R.S.)
    Inventors: Guillaume Saint-Girons, Ludovic Largeau, Gilles Patriarche, Philippe Regreny, Guy Hollinger
  • Patent number: 8389344
    Abstract: Provided is a method of manufacturing an oxide semiconductor thin film transistor using a transparent oxide semiconductor as a material for a channel. The method of manufacturing the oxide semiconductor thin film transistor includes forming a passivation layer on a channel layer and performing an annealing process for one hour or more at a temperature of about 100° C. or above.
    Type: Grant
    Filed: February 26, 2010
    Date of Patent: March 5, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jisim Jung, Youngsoo Park, Sangyoon Lee, Changjung Kim, Taesang Kim, Jangyeon Kwon, Kyungseok Son
  • Publication number: 20130049000
    Abstract: A semiconductor device and method of making the same are provided. The method of forming semiconductor device uses non-implant process to form doped layers, and thus is applicable for large-size display panel. The method of forming semiconductor device uses annealing process to reduce the resistance of the doped layers, which improves the electrical property of the semiconductor device. A first dielectric layer of the semiconductor device is able to protect a semiconductor layer disposed in a first region of the substrate from being damaged during the process, and an etching stop layer of the semiconductor device is able to protect the semiconductor layer disposed in a second region of the substrate from being damaged when defining second doped layers. The first dielectric layer and the etching stop layer are formed by the same patterned dielectric layer, thus no extra process is required, fabrication cost is reduced, and yield is increased.
    Type: Application
    Filed: April 16, 2012
    Publication date: February 28, 2013
    Inventor: Shou-Peng Weng
  • Patent number: 8383468
    Abstract: A method of forming a display device including source/drain electrodes on a substrate, a pixel electrode, an insulating partition wall layer, a channel-region semiconductor layer. Source/drain electrodes of a thin-film transistor are formed on the substrate, while a pixel electrode is connected to the source/drain electrodes. The insulating partition wall layer is formed on the substrate, where the partition wall layer has a first opening extending to between the source electrode and the drain electrode. Furthermore, a channel-region semiconductor layer is formed by depositing a semiconductor layer over the partition wall layer. The channel-region semiconductor layer is on the bottom of the first opening to be separate from a upper part of the partition wall layer.
    Type: Grant
    Filed: April 5, 2012
    Date of Patent: February 26, 2013
    Assignee: Sony Corporation
    Inventor: Iwao Yagi
  • Patent number: 8384138
    Abstract: An SRAM device and method of forming MOS transistors of the device having reduced defects associated with selective epitaxial growth in moat tip regions is discussed. The SRAM device comprises a core region and a logic region, logic transistors within the logic region of the SRAM, and selective epitaxial regions grown on both source and drain regions; and memory cell transistors within the core region of the SRAM, and having the selective epitaxial regions grown on only one of the source and drain regions. One method of forming the MOS transistors of the SRAM cell comprises forming a gate structure over a first conductivity type substrate to define a channel therein, masking one of the source and drain regions in the core region, forming a recess in the substrate of the unmasked side of the channel, epitaxially growing SiGe in the recess, removing the mask, and forming the source and drain extension regions in source/drain regions.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: February 26, 2013
    Assignee: Texas Instruments Incorporated
    Inventor: Antonio Luis Pacheco Rotondaro
  • Patent number: 8377763
    Abstract: A method is provided for fabricating a microelectronic device and a resistor on a substrate. The method can include forming device regions in a monocrystalline semiconductor region of a substrate, in which the device regions have edges defined according to a first semiconductor feature overlying a major surface of the semiconductor region. A dielectric region is formed having a planarized surface overlying the semiconductor region and overlying a second semiconductor feature disposed above a surface of an isolation region in the substrate. The surface of the isolation region can be disposed below the major surface. The method can further include removing at least a portion of the first semiconductor feature exposed at the planarized surface of the dielectric region to form an opening and forming a gate at least partially within the opening.
    Type: Grant
    Filed: December 6, 2010
    Date of Patent: February 19, 2013
    Assignee: International Business Machines Corporation
    Inventor: Narasimhulu Kanike
  • Patent number: 8377764
    Abstract: The present invention provides a vapor deposition method and a vapor deposition system of film formation systems by which EL materials can be used more efficiently and EL materials having superior uniformity with high throughput rate are formed. According to the present invention, inside a film formation chamber, an evaporation source holder in a rectangular shape in which a plurality of containers sealing evaporation material is moved at a certain pitch to a substrate and the evaporation material is vapor deposited on the substrate. Further, a longitudinal direction of an evaporation source holder in a rectangular shape may be oblique to one side of a substrate, while the evaporation source holder is being moved. Furthermore, it is preferable that a movement direction of an evaporation source holder during vapor deposition be different from a scanning direction of a laser beam while a TFT is formed.
    Type: Grant
    Filed: April 28, 2012
    Date of Patent: February 19, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hideaki Kuwabara, Masakazu Murakami
  • Patent number: 8377762
    Abstract: An object of the invention is to improve the reliability of a light-emitting device. Another object of the invention is to provide flexibility to a light-emitting device having a thin film transistor using an oxide semiconductor film. A light-emitting device has, over one flexible substrate, a driving circuit portion including a thin film transistor for a driving circuit and a pixel portion including a thin film transistor for a pixel. The thin film transistor for a driving circuit and the thin film transistor for a pixel are inverted staggered thin film transistors including an oxide semiconductor layer which is in contact with a part of an oxide insulating layer.
    Type: Grant
    Filed: September 13, 2010
    Date of Patent: February 19, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shingo Eguchi, Yoshiaki Oikawa, Kenichi Okazaki, Hotaka Maruyama
  • Patent number: 8373165
    Abstract: A method of fabricating a semiconductor integrated circuit includes forming a first dielectric layer on a semiconductor substrate, patterning the first dielectric layer to form a first patterned dielectric layer, forming a non-single crystal seed layer on the first patterned dielectric layer, removing a portion of the seed layer to form a patterned seed layer, forming a second dielectric layer on the first patterned dielectric layer and the patterned seed layer, removing portions of the second dielectric layer to form a second patterned dielectric layer, irradiating the patterned seed layer to single-crystallize the patterned seed layer, removing portions of the first patterned dielectric layer and the second patterned dielectric layer such that the single-crystallized seed layer protrudes in the vertical direction with respect to the first and/or the second patterned dielectric layer, and forming a gate electrode in contact with the single-crystal active pattern.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: February 12, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-hoon Son, Si-young Choi, Jong-wook Lee
  • Patent number: 8367444
    Abstract: A display substrate includes a gate line, a gate insulation layer, a data line, a switching element, a protection insulation layer, a gate pad portion and a data pad portion. The gate insulation layer is disposed on the gate line. The switching element is connected to the gate line and the data line. The protection insulation layer is disposed on the switching element. The gate pad portion includes a first gate pad electrode which makes contact with an end portion of the gate line through a first hole formed through the gate insulation layer, and a second gate pad electrode which makes contact with the first gate pad electrode through a second hole formed through the protection insulation layer. The data pad portion includes a data pad electrode which makes contact with an end portion of the data line through a third hole formed through the protection insulation layer.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: February 5, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Young-Min Kim, Bo-Sung Kim, Seon-Pil Jang, Seung-Hwan Cho, Kang-Moon Jo
  • Patent number: 8368142
    Abstract: A semiconductor device having performance comparable with a MOSFET is provided. An active layer of the semiconductor device is formed by a crystalline silicon film crystallized by using a metal element for promoting crystallization, and further by carrying out a heat treatment in an atmosphere containing a halogen element to carry out gettering of the metal element. The active layer after this process is constituted by an aggregation of a plurality of needle-shaped or column-shaped crystals. A semiconductor device manufactured by using this crystalline structure has extremely high performance.
    Type: Grant
    Filed: September 19, 2006
    Date of Patent: February 5, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hisashi Ohtani, Jun Koyama, Takeshi Fukunaga
  • Patent number: 8367488
    Abstract: A method includes the steps of preparing a multilayer film 80 formed by sequentially stacking a first metal layer 10, an inorganic insulating layer 20, a semiconductor layer 30, and a second metal layer 40; forming a source electrode 42s and a drain electrode 42d comprised of the second metal layer 40 by etching the second metal layer 40; pressure-bonding a resin layer 50 onto a surface of the multilayer film 80 provided with the source electrode 42s and the drain electrode 42d to burry the source electrode 42s and the drain electrode 42d in the resin layer 50; and forming a gate electrode 10g comprised of the first metal layer 10 by etching the first metal layer 10. The inorganic insulating layer 20g functions as a gate insulating film. The semiconductor layer 30 functions as a channel.
    Type: Grant
    Filed: February 5, 2010
    Date of Patent: February 5, 2013
    Assignee: Panasonic Corporation
    Inventors: Takashi Ichiryu, Seiichi Nakatani, Koichi Hirano
  • Patent number: 8358202
    Abstract: It is an object to provide a highly reliable semiconductor device which operates normally even when a communication distance is extremely short. A semiconductor device which transmits/receives data by wireless communication includes a comparison circuit which compares electric power supplied form outside with electric power serving as a reference; a bias circuit portion which outputs a protection signal and a modulation signal in accordance with output of the comparison circuit; and a protection/modulation circuit which performs protection to prevent degradation and breakdown of elements of the semiconductor device and modulation to transmit data, with one circuit.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: January 22, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yasuyuki Takahashi
  • Patent number: 8357936
    Abstract: An array substrate for an LCD device includes a gate line crossing a data line to define a pixel region. A thin film transistor (TFT) includes a gate electrode connected to the gate line, insulating and active layers on the gate electrode, a source electrode connected to the data line, and a drain electrode spaced apart from the source electrode. An auxiliary common electrode includes a horizontal portion disposed in the pixel region. A metal layer overlaps the insulating layer and contacts the horizontal portion of the auxiliary common electrode through a contact hole defined through the insulating layer. A passivation layer is disposed on the TFT and the metal layer. A pixel electrode has a horizontal portion overlapping the metal layer with the passivation layer therebetween to form a storage capacitor, the pixel electrode connected to the drain electrode through a second contact hole defined through the passivation layer.
    Type: Grant
    Filed: August 22, 2007
    Date of Patent: January 22, 2013
    Assignee: LG Display Co., Ltd.
    Inventors: Il-Man Choi, Ho-June Kim
  • Patent number: 8357570
    Abstract: A method for fabricating a pixel structure includes providing a substrate having a pixel area. A first metal layer, a gate insulator and a semiconductor layer are formed on the substrate and patterned by using a first half-tone mask or a gray-tone mask to form a transistor pattern, a lower capacitance pattern and a lower circuit pattern. Next, a dielectric layer and an electrode layer both covering the three patterns are sequentially formed and patterned to expose a part of the lower circuit pattern, a part of the lower capacitance pattern and a source/drain region of the transistor pattern. A second metal layer formed on the electrode layer and the electrode layer are patterned by using a second half-tone mask or the gray-tone mask to form an upper circuit pattern, a source/drain pattern and an upper capacitance pattern. A portion of the electrode layer constructs a pixel electrode.
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: January 22, 2013
    Assignee: Au Optronics Corporation
    Inventor: Yu-Cheng Chen
  • Patent number: 8354305
    Abstract: A TFT LCD array substrate and a manufacturing method thereof. The manufacturing method includes the steps of: forming a thin film transistor on a substrate to form a gate line and a gate electrode connected with the gate line on the substrate; forming a gate insulating layer and a semiconductor layer on the gate electrode; forming an ohmic contact layer on the semiconductor layer; forming a transparent pixel electrode layer and a source/drain electrode metal layer in sequence on the resultant substrate, wherein the transparent pixel electrode layer is electrically insulated from the gate line and the gate electrode, and the transparent pixel electrode layer forms an ohmic contact with two sides of the semiconductor layer via the ohmic contact layer; and performing masking and etching with a gray tone mask with respect to the resultant substrate to form a transparent pixel electrode, a source/drain electrode and a data line simultaneously.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: January 15, 2013
    Assignee: Beijing BOE Optoelectronics Technology Co., Ltd
    Inventors: Chaoyong Deng, Seung Moo Rim
  • Publication number: 20130011976
    Abstract: A fabricating method of a pixel structure is provided. A substrate has an array of pixel areas. The common electrode wire is positioned only in a portion of the pixel area. A first capacitance storage electrode is formed in each of the pixel areas and electrically connected between two adjacent common electrode wires. A gate insulation layer covers the scan line, the gate electrode, the common electrode wire and the first capacitance storage electrode. A semiconductor layer is formed on the gate insulation layer above the gate electrode. The source and the drain is formed on two sides of the semiconductor layer. A passivation layer is formed on the substrate to cover the data line, the source and the drain. A pixel electrode is formed in each of the pixel areas, and the pixel electrode is electrically connected with the drain through the contact window.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: CHUNGHWA PICTURE TUBES, LTD.
    Inventor: Meng-Chi Liou
  • Patent number: 8349694
    Abstract: When forming the strain-inducing semiconductor alloy in one type of transistor of a sophisticated semiconductor device, superior thickness uniformity of a dielectric cap material of the gate electrode structures may be achieved by forming encapsulating spacer elements on each gate electrode structure and providing an additional hard mask material. Consequently, in particular, in sophisticated replacement gate approaches, the dielectric cap material may be efficiently removed in a later manufacturing stage, thereby avoiding any irregularities upon replacing the semiconductor material by an electrode metal.
    Type: Grant
    Filed: October 21, 2010
    Date of Patent: January 8, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Stephan Kronholz, Markus Lenski, Andy Wei, Martin Gerhardt
  • Patent number: 8343819
    Abstract: An electrical device is provided that in one embodiment includes a semiconductor-on-insulator (SOI) substrate having a semiconductor layer with a thickness of less than 10 nm. A semiconductor device having a raised source region and a raised drain region of a single crystal semiconductor material of a first conductivity is present on a first surface of the semiconductor layer. A resistor composed of the single crystal semiconductor material of the first conductivity is present on a second surface of the semiconductor layer. A method of forming the aforementioned electrical device is also provided.
    Type: Grant
    Filed: January 14, 2010
    Date of Patent: January 1, 2013
    Assignee: International Business Machines Corporation
    Inventors: Bruce B. Doris, Kangguo Cheng, Ali Khakifirooz, Ghavam G. Shahidi
  • Patent number: 8345435
    Abstract: A conductor having a projecting portion is formed which forms a terminal portion. An uncured prepreg including a reinforcing material is closely attached to the conductor and the prepreg is cured to form an insulating film including the reinforcing material. When the prepreg is closely attached, the prepreg is stretched by the projecting portion, so that a region of the prepreg, which is closely attached to the conductor, can be thinner than the other region of the prepreg. Then, by reducing the thickness of the entire insulating film, an opening can be formed in the portion having a smaller thickness. The step of reducing the thickness can be performed by etching. Further, it is preferable not to remove the reinforcing material in this step. The strength of a terminal and an electronic device can be increased by leaving the reinforcing material at the opening.
    Type: Grant
    Filed: August 5, 2010
    Date of Patent: January 1, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Toshiji Hamatani, Hiroki Adachi
  • Patent number: 8343799
    Abstract: An object is to manufacture a semiconductor device including an oxide semiconductor at low cost with high productivity in such a manner that a photolithography process is simplified by reducing the number of light-exposure masks. In a method for manufacturing a semiconductor device including a channel-etched inverted-stagger thin film transistor, an oxide semiconductor film and a conductive film are etched using a mask layer formed with the use of a multi-tone mask which is a light-exposure mask through which light is transmitted so as to have a plurality of intensities. The etching step is performed by wet etching in which an etching solution is used.
    Type: Grant
    Filed: October 20, 2009
    Date of Patent: January 1, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunichi Ito, Miyuki Hosoba