Abstract: Method and apparatus are provided for determining the diffusion length of minority carriers in semiconductor material, particularly amorphous silicon, which has a significantly small minority carrier diffusion length using the constant magnitude surface-photovoltage (SPV) method. Steady or modulated illumination at several wavelengths provides the light excitation on the surface of the material to generate the SPV. A manually controlled or automatic servo system maintains a constant predetermined value of the SPV for each wavelength. A probe electrode immersed in an electrolyte solution containing redox couples (preferably quinhydrone) having an oxidation-reduction potential (E) in the order of +0.6 to -1.65 volts couples the SPV to a measurement system. The redox couple solution functions to create a liquid Schottky barrier at the surface of the material. The Schottky barrier is contacted by merely placing the probe in the solution.
Abstract: Novel copolymers comprising a compound containing an acrylate moiety and a silicon-containing oxime ester of methacrylic acid having the formula ##STR1## are positive resist recording media which can be dry developed.
Abstract: The invention is a method for diffusing phosphorus into the surface of a silicon substrate using borophosphosilicate glass as the phosphorus source.
Abstract: An optical system and method for direct human eye visual inspection of specimens of photoresist coated masks for defects as small as 2 .mu.m. The specimens are uniformly illuminated with a partially coherent sodium light that has very high illuminance and constrast levels. The system consists of a high pressure (1-1.5 atmosphere) sodium lamp source projected onto the specimen by a Kohler-type illumination system.
Abstract: In order to provide an improved seal between matrixes and their replicas, as well as eliminating or substantially reducing the problem of premature separation of the replicas from the matrixes, a circumferential spiral groove of a substantially rectangular configuration is cut into the outermost circumferential area of the matrix. The rectangular spiral groove is cut beyond the portion of the matrix which will be used as the molding surface of the stamper. The rectangular groove is substantially larger than the V-shaped groove of audio records and is much larger than the V-shaped grooves used on high density information discs. Because of the larger size and the substantially rectangular geometric configuration of the grooves, the rectangular spiral groove forms a highly effective seal between the matrix and the replica.
Type:
Grant
Filed:
June 30, 1983
Date of Patent:
February 14, 1984
Assignee:
RCA Corporation
Inventors:
Charles A. Weaver, Donald J. Wierschke, Gunter John
Abstract: A single chamber continuous chemical vapor deposition (CVD) reactor is described for depositing continuously on flat substrates, for example, epitaxial layers of semiconductor materials. The single chamber reactor is formed into three separate zones by baffles or tubes carrying chemical source material and a carrier gas in one gas stream and hydrogen gas in the other stream without interaction while the wafers are heated to deposition temperature. Diffusion of the two gas streams on heated wafers effects the epitaxial deposition in the intermediate zone and the wafers are cooled in the final zone by coolant gases. A CVD reactor for batch processing is also described embodying the deposition principles of the continuous reactor.
Abstract: Low density conductive carbon black agglomerated particles are finely divided to a particle size below 0.044 millimeter and added in a portionwise manner to a PVC resin in a closed system. The process ensures a uniform dispersion of the carbon black into the PVC resin and uniform bulk and surface properties of articles molded from the resultant resin.
Abstract: A process for preparing separators for use in alkaline power cells for space vehicles is decribed. The separator is prepared by subjecting a sheet of fibrous polypropylene to corona discharge followed by impregnation with a compound selected from the group consisting of phenylglycine, parahydroxyphenylglycine and mixtures thereof.
Abstract: An improved method of preparing a coating by subjecting gaseous precursors to a glow discharge and an apparatus suitable for carrying out such a method are disclosed. The improvement includes mounting a substrate onto a plate of ferromagnetic material which enhances the deposition rate of the coating within the electrode area.
Abstract: The content of oxygen, if any, that is present in a body of essentially monocrystalline semiconductor material is determined by converting by heating all of the oxygen in the body to interstitial form. The oxygen content is measured by infrared beam evaluation of the absorption band to identify the interstitial oxygen present in the material.
Abstract: A semiconductor laser includes a body having parallel end faces and a substrate having a ridge in a major surface thereof which extends between the end surfaces, an active layer overlying the ridge and which tapers in thickness from that portion of the active layer which overlies the ridge and a confinement layer overlying the active layer. The invention also includes a method of forming a semiconductor laser which includes a substrate having a ridge thereon. The method includes the steps of coating a portion of a flat surface of the substrate with an etch resistant material, etching the surface with an anisotropic etchant thereby forming a mesa therein, removing the etch resistant material, further etching the substrate to round the mesa to form a ridge and depositing the active and confinement layers over the surface and the ridge.
Abstract: A method for lapping two flats of substantially the same dimensions in an element having a cone-shaped tip. The method includes the steps of contacting a first region of the cone wherein a flat is to be lapped while the cone is in contact with the lapping surface; rotating the element to a second region wherein a second flat is to be lapped while the tip is in contact with the lapping surface without the cone tip contacting or disturbing the lapping surface; contacting the second region of the cone with the abrasive lapping surface for a predetermined time; and repeating the previous steps until the two flats have been lapped. The time each region contacts the lapping surface is substantially equal and the time during which the element is rotated is small compared to the time each region contacts the lapping surface.
Abstract: A method of making a series connected array of amorphous silicon solar cells on a single substrate includes forming a plurality of spaced conductive lower electrodes on the substrate. Metal electrode stripes are applied on each of the lower electrodes. A layer of amorphous silicon is formed over the lower electrodes, metal electrode stripes and any exposed portions of the surface of the substrate. A plurality of spaced upper conductive electrodes are formed over the amorphous silicon layer with each of the upper electrodes having a portion overlying the electrode stripe on the lower electrode of an adjacent cell. The array is heated to spike the electrode stripes completely through the amorphous silicon layer to contact the overlying upper electrode and thereby electrically connect the cells in series.
Abstract: An improved method is provided for the visual inspection of printed circuit boards to determine the continuity or discontinuity of the circuits. In the method the circuit boards are treated in an electrolytic bath to cause an electrochemical change in the color of the continuous circuits versus the discontinuous circuits.
Abstract: A method of planarizing a light sensitive coating on a substrate having topographical features is provided. The coating which comprises a novolak resin and a diazoquinone sensitizer is exposed to actinic radiation to react substantially all of the sensitizer and then heated by applying heat to the surface of the substrate opposite the coating.
Abstract: A method of precisely controlling the thickness of dielectric islands on a substrate is provided. The subject method comprises forming a patterned layer of an etchable metal over a first dielectric layer on a substrate, forming a second layer of dielectric material thereover so that there is contact where the etchable metal layer has been removed, patterning the second dielectric layer so that islands remain only over the openings in the etchable layer, removing the etchable metal layer and then patterning the first dielectric layer. There are thus provided islands of dielectric material on the substrate having a thickness equal to the first only or the first and second dielectric layers together, respectively. The process may be extended to form at least one additional layer of dielectric material on certain of the islands.
Abstract: Video disc caddies are treated to maintain dimensional stability by heating them while preventing either inward or outward bowing of the caddy halves for a time sufficient to stress-relieve the plastic.
Abstract: The invention is a semiconductor laser which includes a substrate with a pair of substantially parallel grooves in a surface thereof with a mesa therebetween where the height of the surface of the mesa above the bottom of the grooves is different than the height of the major surface of the substrate above the bottom of the grooves. Layers deposited on this substrate exhibit an increased taper in thickness in the lateral direction.
Abstract: The invention is a recording medium wherein the light absorptive layer is a granular material comprising domains of a light sensitive material embedded in a dielectric matrix. The domains comprise a material which can be reversibly switched from a first state to a second state having different optical properties by the absorption of light. The matrix is composed of a material which is effective for inhibiting the formation of an irreversible change in the optical properties of the absorptive layer. The invention further comprises this optical recording medium having an information track recorded therein as a series of regions in the absorptive layer wherein the domains have been reversibly switched to a second state having different optical properties.
Abstract: A nozzle for directing a flow of lubricant particles vertically downwardly onto the surface of a disc moving horizontally across the discharge opening of the nozzle includes a pair of side plates which are secured together by end plates to form an enclosure having a narrow discharge opening at the bottom edge. The side plates are substantially in the form of isoceles trapezoids having a bottom edge wider than its top edge and having the end plates extending between the nonparallel edges of the side plates. An inlet port is connected to the top edges of the plates. The side plates have on their inner surfaces adjacent their bottom edges a groove which extends along the bottom edges to the end plates. The grooves are adapted to catch any lubricant which flows down the inner surfaces of the side plates and direct such lubricant to the ends of the discharge opening where the lubricant can drip from the nozzle.