Abstract: A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.

Abstract: An AgX-type zeolite having a silver exchange level of 20-70% and a Ar/O2 Henry's law selectivity ratio at 23° C. of 1.05 or greater has an optimum combination of selectivity for argon over oxygen at lower cost than higher silver exchange levels. This material can be used in oxygen VSA/PSA processes to produce oxygen at purities above 97%.

Abstract: An improved method of processing a molten non-ferrous metal and alloys of the metal using a blanketing gas having a global warming potential is provided. The improvement involves reducing the global warming potential of the blanketing gas by blanketing the molten non-ferrous metal and alloys with a gaseous mixture including at least one compound selected from the group consisting of SO2F2, NF3, SO2CLF, SOF4, and NOF.

Abstract: An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below −100° C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.

Abstract: A process for recovering hydrogen products from a hydrogen/carbon oxide synthesis gas wherein removal of carbon oxides is accomplished in a pressure swing adsorption unit, by operating the pressure swing adsorption unit until carbon oxides break through into the effluent from the pressure swing adsorption unit, followed by passing the effluent from the pressure swing adsorption unit through a methanator to remove breakthrough carbon oxides from the pressure swing adsorption effluent.

Abstract: A pressure swing adsorption process including an adsorption apparatus having a plurality of beds and counter-currently purging at least two of the beds simultaneously throughout the process. The number of beds and number of pressure equalization steps are not particularly limited, but a ten-bed, four pressure equalization step process in advantageous. In addition, other ten-bed, four pressure equalization step processes are disclosed which do not counter-currently purge at least two of the beds simultaneously, but which have an average of at least two of the ten beds being simultaneously regenerated by simultaneously providing off-gas from a feed end of each of the beds to an off-gas line.

Abstract: An economical means of safely “containing” or “packaging” commercial electrophilic fluorination agents whereby these agents are readily stored and transported in a package, typically without loss of “F+” activity, and in a form which is readily and directly useable, i.e., in solution or a slurry. Importantly, the solution/slurry medium provides a tremendous safety margin for storage and transportation since the solution medium has an enormous ability to absorb heat (due to the latent heat of vaporization of the liquid) relative to the contained active fluorination agent.

Abstract: A process provides a ceramic film, such as a mesoporous silica film, on a substrate, such as a silicon wafer. The process includes preparing a film-forming fluid containing a ceramic precursor, a catalyst, a surfactant and a solvent, depositing the film-forming fluid on the substrate, and removing the solvent from the film-forming fluid on the substrate to produce the ceramic film on the substrate. The ceramic film has a dielectric constant below 2.3, a halide content of less than 1 ppm and a metal content of less than 500 ppm, making it useful for current and future microelectronics applications.

Abstract: A process for destroying fluorine in a gas containing such fluorine by contacting the gas with a fluidized bed of metal particles capable of reacting with such fluorine wherein the metal particles have a particle size essentially no greater than approximately 300 microns. The process can be conducted in parallel connected switching fluidized beds wherein the beds are switched based upon achieving a predetermined bed height expansion based upon the reaction of the metal particles with such fluorine.

Abstract: A vacuum purge system is provided to protect the vacuum pump from becoming flooded with liquid that on occasion is purged with vapors from process equipment. The liquid is trapped in a vessel and then evaporated and exhausted through the vacuum pump as vapor. Evaporation of trapped liquid is effected by reducing or stopping the purge stream to the trapping vessel while continuing to operate the vacuum pump, thereby reducing the absolute pressure within the vessel. Evaporation of liquid can also be effected by supplying heat to the trapped vessel, either in cooperation with or instead of the pressure reduction. Use of a programmable logic controller enables a cyclic operation that traps liquid from entering the pump, removes the trapped liquid as vapor, and then resumes normal purge operation.

Abstract: A process is provided for removing CO2 and/or H2S from a gas mixture containing as impurities CO2 and/or H2S and at least one other impurity selected from the group consisting of a cyanide and ammonia. The process includes contacting at least a portion of the reflux stream from the overhead vapor from a stripping column of an acid gas removal solvent (i.e., alkanolamine) treatment plant with an anion exchange resin to remove corrosive impurities. The ion-exchanged reflux stream is then recycled to the top of the stripping column or into the bulk circulating acid gas removal solvent (i.e., alkanolamine) passing from the bottom of the stripping column.

Abstract: A pressure or vacuum swing adsorption process and apparatus are used for the separation and recovery of certain gaseous components, such as carbon dioxide from hot gas mixtures containing water vapor. The process comprises introducing the feed gas mixture at an elevated temperature into a feed end of an adsorber column containing an adsorbent. The adsorbent preferentially adsorbs at least one adsorbable component. An adsorber effluent, depleted of the at least one adsorbable component, is withdrawn from a product end of the adsorber column. The adsorber column is depressurized below atmospheric pressure and then purged with steam to withdraw an effluent comprising a mixture of the at least one adsorbable component and H2O. Next, the adsorber column is pressurized by introducing a gas that is depleted of the at least one adsorbable component. The steps are repeated in a cyclic manner.

Abstract: A method for producing a tantalum nitride layer on a substrate, comprising; directly injecting a liquid mixture of (R1R2N)3Ta(═NR3) and (R4R5N)3Ta[&eegr;2—R6N═C (R7)(R8)] into a dispersing zone followed by delivering the dispersed mixture into a reactor containing the substrate at elevated temperature and reacting the mixture with a source of nitrogen selected from the group consisting of ammonia, alkyl amines, N2H2, alkyl hydrazine, N2 and mixtures thereof, to produce the tantalum nitride layer on the substrate, where R1, R2, R3, R4, R5, R6, R7 and R8 are individually C1-6 alkyl, aryl or hydrogen.

Abstract: A process for providing an &agr;-fluorinated-&bgr;-dicarbonyl includes electrophilically fluorinating a &bgr;-dicarbonyl with bis-fluoroxydifluoromethane in the presence of an acid to provide the &agr;-monofluorinated-&bgr;-dicarbonyl. The acid is preferably hydrofluoric acid. Preferred &bgr;-dicarbonyls include methyl-3-oxopentanoate and ethyl-4,4,4-trifluoroacetoacetate. The process can limit radical impurity byproducts to no more than 4% in some cases, and less than 0.5% in other cases. Theoretical yields of 95% &agr;-monofluorinated-&bgr;-dicarbonyl are possible in some cases.

Abstract: An improved adsorption process is provided for purifying hydrogen from a feed gas mixture including hydrogen and at least one impurity selected from the group consisting of carbon monoxide and nitrogen. The process includes providing an adsorption apparatus having a discharge end adsorption layer containing an adsorbent with a Henry's law constant (KH) at 70° F. for the impurity from about 0.5 to about 2.4 mmole/g/atm. The product gas collected from the adsorption apparatus is high purity (99.99+%) hydrogen.

Abstract: A method for delivering a gas having a proton affinity of less than 866 kJ/mol is disclosed. A support including at least one polymer sufficiently acidic to protonate the gas is contacted with the gas to protonate the gas. The protonated gas condenses to form a solid salt which is sorbed by the support. The gas is dispensed by deprotonating the sorbed solid salt to regenerate said gas. The at least one polymer of the support has a first Hammett acidity value greater than a second Hammett acidity value of a conjugate acid of the gas. Also provided is an apparatus for performing the method. The invention is especially useful for storing, transporting and delivering hazardous gases, such as arsine and phosphine. The polymer can be polymeric sulfonic acids, polymeric perfluoroalkylsulfonic acids, fluorinated sulfonic acid polymers, cross-linked sulfonated polystyrene-divinylbenzene macroreticular copolymers, carboxylic acid polymers, halogenated carboxylic acid functionalized polymers and mixtures thereof.

Abstract: The process recovers NF3 from a multicomponent fluid containing NF3, one or more components less volatile than NF3, and one or more components more volatile than NF3. The process uses a first distillation column and a second distillation column, each distillation column having a top and a bottom. The process includes the following steps: feeding the multicomponent fluid to the first distillation column at a first feed location below the top of the first distillation column; feeding a cryogenic liquid to the first or second distillation column adjacent the top of the first or second distillation column; withdrawing a mixture containing NF3 from the first distillation column; feeding the mixture to the second distillation column at a second feed location; separating NF3 from the mixture in the second distillation column; and removing a stream of NF3 from the second distillation column.

Abstract: A high purity chemical storage and delivery system and process with secondary containment, comprising; a cabinet for containing a canister of high purity chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet for controllably dispensing high purity chemical; a control unit for controlling the dispensing of high purity chemical from the canister and the cabinet for a downstream use, a closeable opening in the cabinet for allowing loading and unloading of the canister from the cabinet, at least one door for closing the opening, a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister.

Abstract: Hydrogen and carbon monoxide are separated from a condensate-containing gaseous mixture thereof by using (a) a “first” stripping column (8) to remove the hydrogen content of the CO-loaded methane stream (6) obtained by washing CO from the gaseous mixture, or the vapor portion from a phase separation thereof, ascending a methane wash column (2) and (b) a “second” stripping column or a flash separator (30) to remove the hydrogen content of the feed gas condensate (9) obtained from the methane wash column (2), or the phase separation. The vapor stream (32) from the second stripping column or flash separator (30) is fed to the first stripping column (8). The liquid stream from the first stripping column and the liquid stream (33) from the second stripping column or flash separator (30) are fed (16, 17, 19 & 20; 34 to 39) to different locations of a separation column (18) providing a gaseous carbon monoxide product stream (21) and a liquid methane wash recycle stream (3).

Abstract: A process includes substituting a substituent on a substrate. The process includes reacting a salt of an anionic form of the substituent with an electrophilic fluorination agent to provide an electrophile containing a cationic form of the substituent. The electrophile is then electrophilically substituted on the substrate. In some aspects of the process, the substrate can be an aromatic or a non-aromatic. The process can be used for a variety of reactions having electrophilic mechanisms, including halogenation, thiocyanation and nitration.