Patents Represented by Attorney Wells St. John P.S.
  • Patent number: 8034655
    Abstract: A method of forming a non-volatile resistive oxide memory cell includes forming a first conductive electrode of the memory cell as part of a substrate. Insulative material is deposited over the first electrode. An opening is formed into the insulative material over the first electrode. The opening includes sidewalls and a base. The opening sidewalls and base are lined with a multi-resistive state layer comprising multi-resistive state metal oxide-comprising material which less than fills the opening. A second conductive electrode of the memory cell is formed within the opening laterally inward of the multi-resistive state layer lining the sidewalls and elevationally over the multi-resistive state layer lining the base. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: April 8, 2008
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: John Smythe, Bhaskar Srinivasan, Gurtej Sandhu
  • Patent number: 8034315
    Abstract: Some embodiments include devices that contain bundles of CNTs. An undulating topography extends over the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is directly over the CNTs, with the material being a plurality of particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width. Some embodiments include methods in which a plurality of crossed carbon nanotubes are formed over a semiconductor substrate. The CNTs form an undulating upper topography extending across the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is deposited over the CNTs, with the material being deposited as particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width.
    Type: Grant
    Filed: September 22, 2008
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Nishant Sinha, Gurtej S. Sandhu, Eugene Marsh, Neil Greeley, John Smythe
  • Patent number: 8034728
    Abstract: A method of forming (and an apparatus for forming) a metal oxide layer on a substrate, particularly a semiconductor substrate or substrate assembly, using a vapor deposition process and one or more precursor compounds that include diketonate ligands and/or ketoimine ligands.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Brian A. Vaartstra
  • Patent number: 8033884
    Abstract: Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Neal R. Rueger, Stephen J. Kramer
  • Patent number: 8036106
    Abstract: Packet switch operating methods and packet switches, using first processing circuitry of the packet switch, configure different second processing circuitry of the packet switch to periodically transmit control packets to a destination device via a port of the packet switch and, subsequent to the configuring and using the second processing circuitry, transmit the control packets to the destination device via the port during moments in time when the first processing circuitry is non-operational.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: October 11, 2011
    Assignee: World Wide Packets, Inc.
    Inventors: Jie Hu, Cory Dean Gordon
  • Patent number: 8034516
    Abstract: Some embodiments include methods of forming photomasks. A stack of at least three different materials is formed over a base. Regions of the stack are removed to leave a mask pattern over the base. The mask pattern includes a pair of spaced-apart adjacent segments of the stack. A liner is formed to cover sidewalls of the segments. Some embodiments include photomasks. The photomasks may include a transparent base supporting a pair of spaced-apart adjacent features. The spaced-apart adjacent features may include sidewalls, with inner sidewalls of the spaced-apart features being adjacent one another, and spaced from one another by a gap. A coating layer of from about 5 Angstroms thick to about 50 Angstroms thick may be along the entirety of the sidewalls of the spaced-apart adjacent features. Some embodiments include methods of photolithographically patterning substrates.
    Type: Grant
    Filed: March 9, 2011
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Fei Wang
  • Patent number: 8035160
    Abstract: Semiconductor memory devices having recessed access devices are disclosed. In some embodiments, a method of forming the recessed access device includes forming a device recess in a substrate material that extends to a first depth in the substrate that includes a gate oxide layer in the recess. The device recess may be extended to a second depth that is greater that the first depth to form an extended portion of the device recess. A field oxide layer may be provided within an interior of the device recess that extends inwardly into the interior of the device recess and into the substrate. Active regions may be formed in the substrate that abut the field oxide layer, and a gate material may be deposited into the device recess.
    Type: Grant
    Filed: November 30, 2009
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Kurt D. Beigel, Jigish D. Trivedi, Kevin G. Duesman
  • Patent number: 8034687
    Abstract: A method of forming a plurality of transistor gates having at least two different work functions includes forming first and second transistor gates over a substrate having different widths, with the first width being narrower than the second width. A material is deposited over the substrate including over the first and second gates. Within an etch chamber, the material is etched from over both the first and second gates to expose conductive material of the first gate and to reduce thickness of the material received over the second gate yet leave the second gate covered by the material. In situ within the etch chamber after the etching, the substrate is subjected to a plasma comprising a metal at a substrate temperature of at least 300° C. to diffuse said metal into the first gate to modify work function of the first gate as compared to work function of the second gate.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Sandhu S. Gurtej, Mark Kiehlbauch
  • Patent number: 8033857
    Abstract: A base tile 100 comprises a substrate 102 having a first surface 104 and an electrical connection system 200 supported by the substrate 102. The electrical connection system comprises a plurality of conducting posts 204. Each post 204 extends from a bottom surface 112 of the base tile 100 toward the first surface 104 of the substrate 102. A free end 206 of each post enables electrical and mechanical connection to a photovoltaic tile 10. The electrical connection system 200 also includes a electrical conductors 200 that electrically connect the posts 202 together.
    Type: Grant
    Filed: July 23, 2009
    Date of Patent: October 11, 2011
    Assignee: Dragon Energy PTE. Ltd.
    Inventors: Christopher George Edward Nightingale, Wai Hong Lee, Boon Hou Tay, Swee Ming Goh
  • Patent number: 8035129
    Abstract: This invention includes methods of forming layers comprising epitaxial silicon, and field effect transistors. In one implementation, a method of forming a layer comprising epitaxial silicon comprises epitaxially growing a silicon-comprising layer from an exposed monocrystalline material. The epitaxially grown silicon comprises at least one of carbon, germanium, and oxygen present at a total concentration of no greater than 1 atomic percent. In one implementation, the layer comprises a silicon germanium alloy comprising at least 1 atomic percent germanium, and further comprises at least one of carbon and oxygen at a total concentration of no greater than 1 atomic percent. Other aspects and implementations are contemplated.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: October 11, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Nirmal Ramaswamy, Gurtej S. Sandhu, Cem Basceri, Eric R. Blomiley
  • Patent number: 8030208
    Abstract: There is described a bonding method for through-silicon-via bonding of a wafer stack in which the wafers are formed with through-silicon-vias and lateral microchannels that are filled with solder. To fill the vias and channels the wafer stack is placed in a soldering chamber and molten solder is drawn through the vias and channels by vacuum. The wafers are held together by layers of adhesive during the assembly of the wafer stack. Means are provided for local reheating of the solder after it has cooled to soften the solder to enable it to be removed from the soldering chamber.
    Type: Grant
    Filed: June 2, 2008
    Date of Patent: October 4, 2011
    Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
    Inventors: Chi Kuen Vincent Leung, Peng Sun, Xunqing Shi, Chang Hwa Chung
  • Patent number: 8030168
    Abstract: The invention includes methods of electrically interconnecting different elevation conductive structures, methods of forming capacitors, methods of forming an interconnect between a substrate bit line contact and a bit line in DRAM, and methods of forming DRAM memory cells. In one implementation, a method of electrically interconnecting different elevation conductive structures includes forming a first conductive structure comprising a first electrically conductive surface at a first elevation of a substrate. A nanowhisker is grown from the first electrically conductive surface, and is provided to be electrically conductive. Electrically insulative material is provided about the nanowhisker. An electrically conductive material is deposited over the electrically insulative material in electrical contact with the nanowhisker at a second elevation which is elevationally outward of the first elevation, and the electrically conductive material is provided into a second conductive structure.
    Type: Grant
    Filed: April 6, 2009
    Date of Patent: October 4, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Brett W. Busch, David K. Hwang, F. Daniel Gealy
  • Patent number: 8030170
    Abstract: Some embodiments include methods of forming isolation structures. A trench may be formed to extend into a semiconductor material. Polysilazane may be formed within the trench, and then exposed to steam. A maximum temperature of the polysilazane during the steam exposure may be less than or equal to about 500° C. The steam exposure may convert all of the polysilazane to silicon oxide. The silicon oxide may be annealed under an inert atmosphere. A maximum temperature of the silicon oxide during the annealing may be from about 700° C. to about 1000° C. In some embodiments, the isolation structures are utilized to isolate nonvolatile memory components from one another.
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: October 4, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Yunjun Ho, Matt Meyers, Kevin L. Beaman, Gregory J. Light
  • Patent number: 8030156
    Abstract: Methods of etching into silicon oxide-containing material with an etching ambient having at least 75 volume percent helium. The etching ambient may also include carbon monoxide, O2 and one or more fluorocarbons. The openings formed in the silicon oxide-containing material may be utilized for fabrication of container capacitors, and such capacitors may be incorporated into DRAM.
    Type: Grant
    Filed: December 4, 2009
    Date of Patent: October 4, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Russell A. Benson
  • Patent number: 8029858
    Abstract: The invention includes methods of forming material on a substrate and methods of forming a field effect transistor gate oxide. In one implementation, a first species monolayer is chemisorbed onto a substrate within a chamber from a gaseous first precursor. The first species monolayer is discontinuously formed over the substrate. The substrate having the discontinuous first species monolayer is exposed to a gaseous second precursor different from the first precursor effective to react with the first species to form a second species monolayer, and effective to form a reaction product of the second precursor with substrate material not covered by the first species monolayer. The substrate having the second species monolayer and the reaction product is exposed to a third gaseous substance different from the first and second precursors effective to selectively remove the reaction product from the substrate relative to the second species monolayer. Other implementations are contemplated.
    Type: Grant
    Filed: October 24, 2005
    Date of Patent: October 4, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Gurtej S. Sandhu
  • Patent number: 8025809
    Abstract: A chemical-mechanical polishing (CMP) method includes applying a solid abrasive material to a substrate, polishing the substrate, flocculating at least a portion of the abrasive material, and removing at least a majority portion of the flocculated portion from the substrate. Applying solid abrasive material can include applying a CMP slurry or a polishing pad comprising abrasive material. Such a method can further include applying a surfactant comprising material to the substrate to assist in effectuating flocculation of the abrasive material to the surfactant comprising material may be cationic which includes, for example, a quaternary ammonium substituted salt. Also, for example, the surfactant comprising material may be applied during polishing, brush scrubbing, pressure spraying or buffing.
    Type: Grant
    Filed: July 21, 2008
    Date of Patent: September 27, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Michael T. Andreas
  • Patent number: 8025108
    Abstract: A subterranean method of processing a hydrocarbon fluid-containing deposit includes, from a subterranean room, providing a borehole into a deposit containing formation fluid comprising fluid hydrocarbon. The borehole has a first end at a wall of the subterranean room, and a second end remote from the subterranean room and received within the deposit. The first end is elevationally lower than the second end. A string of pipe is provided within the borehole from the subterranean room. A cuttings removal fluid is injected from the string of pipe into the borehole and against a wall of the borehole in underbalanced pressure conditions. One of drilling, reaming, or jetting is conducted within the borehole during said injecting of the cuttings removal fluid. Formation fluid comprising fluid hydrocarbon is flowed from the deposit into the borehole during said injecting of the cuttings removal fluid.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: September 27, 2011
    Assignee: New Era Petroleum, LLC.
    Inventors: Joseph McPhie, Clint Spence, Marty Fell, Greg Vandersnick, Brian Lunan, Albert Cerenzie
  • Patent number: 8026148
    Abstract: Some embodiments include methods of forming capacitors. Storage nodes are formed within a material. The storage nodes have sidewalls along the material. Some of the material is removed to expose portions of the sidewalls. The exposed portions of the sidewalls are coated with a substance that isn't wetted by water. Additional material is removed to expose uncoated regions of the sidewalls. The substance is removed, and then capacitor dielectric material is formed along the sidewalls of the storage nodes. Capacitor electrode material is then formed over the capacitor dielectric material. Some embodiments include methods of utilizing a silicon dioxide-containing masking structure in which the silicon dioxide of the masking structure is coated with a substance that isn't wetted by water.
    Type: Grant
    Filed: January 12, 2011
    Date of Patent: September 27, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Niraj B. Rana, Nishant Sinha, Prashant Raghu, Jim J. Hofmann, Neil Joseph Greeley
  • Patent number: 8022147
    Abstract: Zwitterionic block copolymers having oppositely charged or chargeable terminal groups, and methods of making and using the same, are disclosed. The zwitterionic block copolymers can undergo microphase separation.
    Type: Grant
    Filed: February 11, 2011
    Date of Patent: September 20, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Dan Millward, Eugene P. Marsh
  • Patent number: 8021897
    Abstract: Some embodiments include cross-point memory structures. The structures may include a line of first electrode material extending along a first horizontal direction, a multi-sided container of access device materials over the first electrode material, a memory element material within the multi-sided container, and a line of second electrode material over the memory element material and extending along a second horizontal direction that is orthogonal to the first horizontal direction. Some embodiments include methods of forming memory arrays. The methods may include forming a memory cell stack over a first electrode material, and then patterning the first electrode material and the memory cell stack into a first set of spaced lines extending along a first horizontal direction. Spaced lines of second electrode material may be formed over the first set of spaced lines, and may extend along a second horizontal direction that is orthogonal to the first horizontal direction.
    Type: Grant
    Filed: February 19, 2009
    Date of Patent: September 20, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Scott Sills, Gurtej S. Sandhu