Patents Assigned to Atotech Deutschland GmbH
  • Patent number: 10900140
    Abstract: A method for electrolytically passivating an outermost chromium or chromium alloy layer to increase corrosion resistance thereof, including steps of (i) providing a substrate comprising said outermost chromium or chromium alloy layer, (ii) providing or manufacturing an aqueous, acidic passivation solution comprising trivalent chromium ions, phosphate ions, one or more organic acid residue anion, (iii) contacting the substrate with the passivation solution and passing an electrical current between the substrate as a cathode and an anode in the passivation solution such that a passivation layer is deposited onto the outermost layer, wherein the trivalent chromium ions are obtained by chemically reducing hexavalent chromium in presence of phosphoric acid and at least one reducing agent, with the proviso that during or after the chemical reducing the one or more than one organic acid residue anion is present for the first time in the passivation solution.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: January 26, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Berkem Özkaya, Philipp Wachter, Christina Pfirrmann
  • Patent number: 10882842
    Abstract: The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths. The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: January 5, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Rangarajan Jagannathan, James Adolf, Jun Wu, Lars Kohlmann, Heiko Brunner
  • Patent number: 10867895
    Abstract: A lead-frame structure having two faces and exposing a treated silver surface on at least one of said two faces, the treated silver surface(s) serving the wire bonding, which lead-frame structure has a surface which, after applying resin to it, has excellent adhesion even under severe testing conditions, such as the IPC/JEDEC J-STD-20 MSL standard, and a surface mount electronic device comprising a lead-frame or lead-frame entity and at least one semiconductor device mounted thereon, wherein the lead-frame or lead-frame entity exposes a treated silver surface on at least one of the two faces thereof, wherein the treated silver surface(s) serve(s) the wire bonding, and wherein a resin is applied to the lead-frame or lead-frame entity, and which surface mount electronic device has excellent adhesion of the surface of the lead-frame or lead-frame entity even under severe testing conditions.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: December 15, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Din-Ghee Neoh, Jürgen Barthelmes
  • Patent number: 10858747
    Abstract: The present invention relates to an acidic zinc or zinc-nickel alloy plating bath composition comprising a source for zinc ions, optionally a source for nickel ions, a source for chloride ions and at least one dithiocarbamyl alkyl sulfonic acid or salt thereof. Said plating bath composition and the corresponding plating method result in zinc or zinc-nickel alloy layers having an improved throwing power and thickness distribution, particularly when plating substrates having a complex shape and/or in rack-and-barrel plating.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: December 8, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Michal Kaczmarek, Antje Richter, Lukas Bedrnik, Eric Sibürge
  • Patent number: 10832929
    Abstract: The present invention refers to a method for processing a wafer like substrate using a touching gripper and a touchless gripper. Furthermore, the present invention refers to an apparatus for processing a wafer-like substrate containing a touching gripper and a touchless gripper. Additionally, the present invention refers to the use of an inventive apparatus to process a wafer-like substrate.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: November 10, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Ralph Rauenbusch, Tobias Bussenius, Daniel Buchberger, Ray Weinhold
  • Patent number: 10832997
    Abstract: A method of producing a lead-frame structure having two faces and exposing a treated silver surface on at least one of the two faces, the treated silver surface(s) serving the wire bonding, which yields a surface which, after applying resin to it, has excellent adhesion even under severe testing conditions, such as the IPC/JEDEC J-STD-20 MSL standard, and a method of producing a surface mount electronic device including a lead-frame or lead-frame entity and at least one semiconductor device mounted thereon, wherein the lead-frame or lead-frame entity exposes a treated silver surface on at least one of the two faces, wherein the treated silver surface(s) serve(s) the wire bonding, and wherein a resin is applied to the lead-frame or lead-frame entity, which method yields excellent adhesion of the surface of the lead-frame or lead-frame entity even under severe testing conditions.
    Type: Grant
    Filed: March 10, 2017
    Date of Patent: November 10, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Din-Ghee Neoh, Jürgen Barthelmes
  • Patent number: 10793962
    Abstract: An aqueous indium or indium alloy plating bath comprising a source of indium ions, an acid, a source of halide ions, a surfactant according to formula (I) wherein A is selected from branched or unbranched C10-C15-alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and a dihydroxybenzene derivative according to formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, and a process for deposition of indium or an indium alloy wherein the disclosed bath is used.
    Type: Grant
    Filed: January 25, 2017
    Date of Patent: October 6, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Jan Sperling, Stefan Pieper, Grigory Vazhenin, Mauro Castellani, Andreas Kirbs, Dirk Rohde
  • Patent number: 10774437
    Abstract: For improving the current transfer during the electrolytic metallization of workpieces, a method is proposed: (a) providing a metal depositing apparatus 17, in which the workpiece, at least one anode 40, 41 and a metal deposition electrolyte AE are arranged and which has a device for electric current generation 60 and at least one current feeding device 31 with in each case at least one electrical contact element 34, 35 for making electrical contact with the workpiece; (b) bringing the at least one electrical contact element 34, 35 into contact with the workpiece; and (c) feeding electric current to the workpiece via the at least one electrical contact element 34, 35 in order that the deposition metal deposits on the workpiece. Before method step (b), in a further method step (d), deposition metal is deposited on the at least one electrical contact element 34, 35.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: September 15, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Dominik Britz, Bernd Schmitt, Bernd Böse, Frank Mücklich, Christian Selzner
  • Patent number: 10767275
    Abstract: The present invention relates to bisurea derivatives and their use in aqueous plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions and a bisurea derivative. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: September 8, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Lars Kohlmann, Agnieszka Witczak, Olivier Mann
  • Patent number: 10753007
    Abstract: The present invention deals with a process for deposition of indium or indium alloys and an article obtained by the process, wherein the process includes the steps i. providing a substrate having at least one metal or metal alloy surface; ii. depositing a first indium or indium alloy layer on at least one portion of said surface whereby a composed phase layer is formed of a part of the metal or metal alloy surface and a part of the first indium or indium alloy layer; iii. removing partially or wholly the part of the first indium or indium alloy layer which has not been formed into the composed phase layer; iv. depositing a second indium or indium alloy layer on the at least one portion of the surface obtained in step iii.
    Type: Grant
    Filed: October 4, 2016
    Date of Patent: August 25, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Grigory Vazhenin, Jan Sperling, Stefan Pieper, Mauro Castellani, Andreas Kirbs, Dirk Rohde
  • Patent number: 10745568
    Abstract: The present invention relates to an acidic aqueous composition for treating of zirconium-pretreated metal-based substrate surfaces such as steel metals or aluminium surfaces, a process for treating the substrate surfaces with the composition and the use of the composition as post-treatment of zirconium-pretreated metal-based substrate surfaces for subsequent electrocoating of the surfaces to increase corrosion resistance of said metal-based surfaces prior to electro-coating (e-coat) applications and increases detergent and chemical resistance of treated surfaces used in the white goods industry. The acidic aqueous composition comprises trivalent chromium ions; and hexafluorozirconate ions; characterized in that the source of trivalent chromium ions is a trivalent chromium nitrate salt.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: August 18, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Agnes Rousseau, Stephen Taylor
  • Patent number: 10633755
    Abstract: The present invention relates to aqueous acidic plating baths for copper deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions, at least one acid and an additive obtainable by a reaction of at least one aminoglycidyl compound comprising at least one amino group which bears at least one glycidyl moiety and at least one second compound selected from ammonia and amine compounds wherein the amine compounds comprise at least one primary or secondary amino group with the proviso that the aminoglycidyl compound contains at least one polyoxyalkylene residue and/or the amine compound contains at least one polyoxyalkylene residue. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: April 28, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Dirk Rohde, Jens Palm
  • Patent number: 10619251
    Abstract: An etching solution for copper and copper alloy surfaces comprising at least one acid, at least one oxidising agent suitable to oxidise copper, at least one source of halide ions and further at least one polyamide containing at least one polymeric moiety according to formula (I) wherein each a is independently from each other selected from 1, 2 and 3; each b is an integer independently from each other ranging from 5 to 10000; each R1 is a monovalent residue independently from each other selected from the group consisting of substituted or unsubstituted C1-C8-alkyl groups and a method for its use are provided. Such etching solution is particularly useful for retaining the shape of treated copper and copper alloy lines.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: April 14, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Fabian Michalik, Norbert Lützow, Josef Gaida, Thomas Hülsmann, Gabriela Schmidt
  • Patent number: 10604861
    Abstract: Device for vertical galvanic metal deposition on a substrate comprising a first and a second device, arranged vertically parallel to each other; the first device comprising a first anode having a plurality of through-going conduits and a first carrier having a plurality of through-going conduits; wherein said first anode and said first carrier are connected to each other; wherein the second device comprises a first substrate holder adapted to receive a first substrate to be treated, wherein said first substrate holder at least partially surrounds the first substrate along its outer frame, wherein the first device further comprises a plurality of plugs, each plug comprising a through-going channel, each plug arranged such that it runs from the backside of the first carrier through a through-going conduit of the first carrier and further through the conduit of the first anode element, and the plugs are detachably connected to the first device.
    Type: Grant
    Filed: August 18, 2017
    Date of Patent: March 31, 2020
    Assignee: Atotech Deutschland GmbH
    Inventor: Ray Weinhold
  • Publication number: 20200080217
    Abstract: Method for electroplating a metal onto a flat substrate P. Surfaces are electrically polarized for metal deposition by feeding thereto at least one first and second forward-reverse pulse current sequences. The first forward-reverse pulse current sequence includes a first forward pulse generating a first cathodic current during a first forward pulse duration tf1 and having a first forward pulse peak current if1, and a first reverse pulse generating a first anodic current during a first reverse pulse duration tr1 and having a first reverse pulse peak current ir1, the second forward-reverse pulse current sequence including a second forward pulse generating a second cathodic current during a second forward pulse duration tf2 and having a second forward pulse peak current if2, and a second reverse pulse generating a second anodic current during a second reverse pulse duration tr2, the second reverse pulse having a second reverse pulse peak current ir2.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 12, 2020
    Applicant: Atotech Deutschland GmbH
    Inventors: Toshia Fujiwara, Horst Brüggmann, Roland Herold, Thomas Schiwon
  • Patent number: 10538850
    Abstract: The present invention relates to aqueous acidic plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions, at least one acid and at least one guanidine compound. The plating bath is particularly useful for plating recessed structures with copper and build-up of copper pillar bump structures.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: January 21, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Dirk Rohde, Manuel Pölleth, Sven Rückbrod, Desthree Darwin, Sandra Niemann, Gerhard Steinberger
  • Patent number: 10513780
    Abstract: The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the invention comprises a source for palladium ions, a reducing agent for palladium ions and an unsaturated compound. The aqueous plating bath composition according to the invention has an improved stability against undesired decomposition due to the unsaturated compounds while keeping the deposition rate for palladium at the desired satisfying value. The aqueous plating bath composition has also a prolonged life time. The unsaturated compounds of the invention allow for adjusting the deposition rate to a satisfying range over the bath life time and for electrolessly depositing palladium layers at lower temperatures.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: December 24, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Andreas Walter, Christof Suchentrunk, Thomas Beck, Gerhard Steinberger, Holger Bera, Heiko Brunner, Bernd Froese
  • Patent number: 10501860
    Abstract: Method for electroplating a metal onto a flat substrate P. Surfaces are electrically polarized for metal deposition by feeding thereto at least one first and second forward-reverse pulse current sequences. The first forward-reverse pulse current sequence includes a first forward pulse generating a first cathodic current during a first forward pulse duration tf1 and having a first forward pulse peak current if1, and a first reverse pulse generating a first anodic current during a first reverse pulse duration tr1 and having a first reverse pulse peak current ir1, the second forward-reverse pulse current sequence including a second forward pulse generating a second cathodic current during a second forward pulse duration tf2 and having a second forward pulse peak current if2, and a second reverse pulse generating a second anodic current during a second reverse pulse duration tr2, the second reverse pulse having a second reverse pulse peak current ir2.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: December 10, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Toshia Fujiwara, Horst Brüggmann, Roland Herold, Thomas Schiwon
  • Patent number: 10494732
    Abstract: The present invention relates to a method for monitoring the total amount of brighteners in an acidic copper/copper alloy plating bath during a copper/copper alloy plating process, the use of such a method for controlling a plating process, a controlled process for electrolytically depositing copper/copper alloy onto a substrate utilizing the method for monitoring according to the present invention, and the use of one or more than one redox active compound for monitoring and/or determining the total amount of brighteners in the acidic copper/copper alloy plating bath.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: December 3, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Mutlu-Iskender Muglali, Torsten Voss, Andreas Kirbs
  • Patent number: 10487404
    Abstract: A method is provided for metallisation of non-conductive substrates providing a high adhesion of the deposited metal to the substrate material and thereby forming a durable bond. The method applies a metal oxide adhesion promoter which is activated and then metal plated. The method provides high adhesion of the non-conductive substrate to the plated metal layer.
    Type: Grant
    Filed: September 22, 2014
    Date of Patent: November 26, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Zhiming Liu, Hailuo Fu, Sara Hunegnaw, Lutz Brandt